JP3391023B2 - Test head for IC tester - Google Patents

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to an object to be tested, I
Regarding the test head of the IC tester for testing C, LSI, etc., the DUT board can be easily attached and detached, and the signal quality is good.
The present invention relates to a test head of a C tester.

[0002]

2. Description of the Related Art An IC tester provides a test signal to a device under test (hereinafter abbreviated as DUT) such as an IC and an LSI, and judges pass / fail by an output from the DUT. Such an IC tester will be described with reference to FIG.

In the figure, the test head TH has a plurality of printed circuit boards called pin electronics boards mounted therein and is connected to a main body (not shown) in which a control unit for controlling the apparatus is stored. Performance board 1
Are electrically connected to the contact pins of the test head TH. The DUT board 2 is electrically connected to the performance board 1 via the cable 3. The studs 4 are screwed to the performance boat 1 and the DUT board 2, respectively, and the DUT board 2 is attached to the performance board 1
Attach to. The DUT 5 is electrically connected to the DUT board 2 via a socket (not shown).

The operation of such a device will be described below.
The DUT 5 is connected to the DUT board 2 by a handler (not shown).
Attach to. After mounting, a test signal is output from the test head TH to the performance board 1 via the contact pin. Then, a test signal is output from the performance board 1 to the DUT boat 2 via the cable 3. The DUT board 2 sends this test signal to the DUT.
Output to 5. The DUT 5 outputs based on the test signal. This output is input to DUT board 2 and cable 3
To the performance board 1 via. And from the performance board 1 to the test head TH,
The output of DUT 5 is input. As a result, the quality of the DUT 5 is determined by the test head TH and the main body. Again, the handler removes and attaches the DUT 5.

Next, the assembling operation will be described. The cable 3 is soldered to the performance board 1 and the DUT board 2, and the stud 4 fixes the DUT board 2 to the performance board 1.

Then, the performance board 1 is attached to the test head TH. The performance board 1 is fixed to the test head TH by an air cylinder, a fixing ring, or the like. This is, for example, Japanese Patent Laid-Open No. 10-2
Although it is described in Japanese Patent Publication No. 21404, etc., it is not a main part of the present invention, and therefore its explanation is omitted here.

[0007]

Therefore, in order to remove the DUT board 2 from the performance board 1, the stud 4 must be unscrewed and the cable 3 must be unsoldered.
It was not possible to easily remove the T-board 2. For this reason, it has not been possible to easily perform maintenance of electrical parts such as resistors, capacitors, delay lines, and ICs mounted on the lower surface of the DUT board 2.

Further, since the performance board 1 and the DUT board 2 are connected to each other by the cable 3, a certain length is required, and due to the capacity and wiring resistance, the DUT
There is a problem that the quality of the test signal given to the No. 5 and the output signal of the DUT 5 is deteriorated, and an error occurs in the quality judgment of the DUT 5.

Therefore, an object of the present invention is to realize a test head for an IC tester in which the DUT board can be easily attached and detached and the signal quality is good.

[0010]

SUMMARY OF THE INVENTION The present invention is a test head of an IC tester equipped with a performance board and a DUT board which is electrically connected to an object to be tested. And a second contact pin that is detachably engaged with the receptacle connector, is attached to the DUT board, and is electrically connected to the DUT board. , A plug connector provided with a camshaft fixed to the receptacle connector by electrically connecting the second contact pin to the first contact pin.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. 1 is a side view showing an embodiment of the present invention, and FIG. 2 is a perspective view of the apparatus shown in FIG.

In the figure, the test head TH has a plurality of printed circuit boards called pin electronics boards mounted therein and is connected to a main body (not shown) in which a control unit for controlling the apparatus is stored.

The bottom surface of the performance board 10 is electrically connected to the contact pins of the test head TH to exchange signals with the pin electronics board of the test head TH.

The plurality of receptacle connectors 20 are mounted on the upper surface of the performance board 10 and electrically connect the contact pins 21 to the performance board 10. The plurality of plug connectors 30 are detachably engaged with the receptacle connector 20, and the receptacle connector 2
A camshaft 32 is provided, which is electrically connected to 0.
A groove 321 is provided on the upper portion of the camshaft 32.

The DUT board 40 has a plug connector 30.
Is attached to the lower surface, the contact pin 31 of the plug connector 30 is electrically connected, and the through hole 41 is provided. The through hole 41 penetrates the cam shaft 32 of the plug connector 30.

The stud 50 is a plug connector 30, D
The plug connector 30 is fixed to the DUT board 40 by being screwed to the UT board 40. The stud 50 is
It is unnecessary if the plug connector 30 and the DUT board 40 are close to each other.

The socket 60 is mounted on the upper surface of the DUT board 40 and electrically connected to the DUT board 40. The socket 60 is a single socket,
It may consist of a parent socket and a child socket so that the socket can be replaced. The electric parts 71, 72 are resistors, capacitors, etc., and are electrically connected to the lower surface of the DUT board 40 near the socket 60. The DUT 80 is attached to the socket 60 and electrically connected to the socket 60.

Here, the electric parts 71 and 72 are the DUT 8
It is a component required to test the DUT 80 with a load of 0. The electric parts 71 and 72 are attached to the lower surface of the DUT 40 by the handler surface of a handler (not shown).
This is because the height of the socket 60 is lowered by bringing it closer to the DUT board 40. As a result, the signal path distance between the electric components 71 and 72 and the DUT 80 can be shortened, the influence of the capacitance component, the resistance component, etc. can be reduced, and accurate testing can be performed without affecting the operating characteristics of the DUT 80.

The handle 90 comprises a handle portion 91, a pipe 92 and a rod 93, and is detachably attached to the camshaft 32. The handle portion 91 is attached to the upper portion of the pipe 92. The pipe 92 is the camshaft 3
A rod 93 that fits into the groove 2 and fits into the groove 321 is provided inside the hollow.

More specifically, the receptacle connector 20,
The plug connector 30 will be described with reference to FIG.

The receptacle connector 20 has a plurality of contact pins 21 and a through hole 22 in the center. The contact pin 21 has a terminal 211 and a contact 212, and the terminal 211 is soldered to the performance board 10.

The plug connector 30 has a plurality of contact pins 31, a cam shaft 32 at the center, two actuators 33, and two springs 34.

The contact pin 31 has a terminal 311 and a contact 312, the terminal 311 is soldered to the DUT board 40, and the contact 312 is electrically connected to the contact 212.

The cam shaft 32 has a groove portion 321 and a cam 3.
22 and a protrusion 323, and is inserted into the through hole 22.
The cam 322 slides the actuator 33 in the lateral direction by the rotation operation of the cam shaft 32. Protrusion 3
Reference numeral 23 denotes the through hole 2 due to the rotation operation of the cam shaft 32.
2, the cam shaft 32 is fixed, and the plug connector 30 is fixed to the receptacle connector 20.

The actuator 33 has a camshaft 32.
Are provided on the left and right sides of the contact, and by sliding in the lateral direction, the contact 312 is brought into contact with the contact 212,
The contact 312 and the contact 212 are electrically connected by elastically changing and pressing.

The spring 34 is used for the cam 3 of the actuator 33.
It is provided on the surface opposite to the surface with which 22 contacts and pushes actuator 33 toward cam 322.

The assembly operation of such a device will be described below. FIG. 4 is a diagram for explaining the operation of the apparatus shown in FIG.
First, how to attach the DUT board 40 will be described.

By fitting the plug connector 30 into the receptacle connector 20 as shown by the arrow in FIG.
Attach the DUT board 40 to the performance board 10. As a result, the cam shaft 32 of the plug connector 30 is inserted into the through hole 22 of the receptacle connector 20.

Then, the handle 90 is attached to the camshaft 32 so that the rod 93 of the handle 90 fits into the groove 321 of the camshaft 32. By rotating the handle 90, the cam shaft 32 rotates via the rod 93 and the groove 321. This rotation causes the cam 322 to rotate and the actuator 33 to slide laterally. As a result, the contact 312 of the plug connector 30 is elastically displaced so as to come into contact with the contact 212 of the receptacle connector 20, and is pressed into contact, thereby electrically connecting the two. Further, the protrusion 323 also rotates to fix the camshaft 32 in the through hole 22. This allows
The plug connector 30 is fixed to the receptacle connector 20. That is, the DUT board 40 is fixed to the performance board 10. Then, the handle 90 is removed from the camshaft 32, and the state shown in FIG. 1 is obtained.

Next, how to remove the DUT board 40 will be described. From the state of FIG. 1, the bar 93 of the handle 90
The handle 90 is attached to the camshaft 32 so that the handle 90 fits in the groove 321 of the camshaft 32. Handle 9
By rotating 0 in the reverse direction, the cam shaft 32 rotates in the reverse direction via the rod 93 and the groove 321. By this reverse rotation, the cam 322 reversely rotates, and the elastic force of the contact 312 and the spring 34 cause the actuator 33 to slide laterally and return to the original state. As a result, the contact 312 of the plug connector 30 and the receptacle connector 2
0 contact 212 is separated. Also, the protrusion 323
Also reversely rotates, and the cam shaft 32 comes out of the through hole 22. Then, handle 90 to camshaft 32
, The plug connector 30 is removed from the receptacle connector 20, and the DUT board 40 is removed from the performance board 10. As a result, the state shown in FIG. 4 is obtained.

As described above, the performance board 10 and the DUT board 40 are connected by the receptacle connector 20 and the plug connector 30, and the camshaft 32 is rotated, whereby the contact pin 21 of the receptacle connector 20 and the plug connector 30 are connected. The contact pin 31 is electrically connected and the plug connector 30 is fixed to the receptacle connector 20. As a result, the performance board 10 and the DUT board 40 can be easily attached and detached without requiring the insertion pressure.

Particularly, in the IC tester, the number of contact pins from the performance board 10 to the DUT board 40 is about 1000, and when a normal connector is used,
If the insertion pressure per pin is 20 g, the total insertion pressure will be 20 Kg, and a dedicated connection / disconnection mechanism is required, but attachment / detachment can be performed without the need for such a mechanism. Even if a dedicated connection / disconnection mechanism is not used, all the connectors cannot be connected at the same time, so that the DUT board can be prevented from being deformed and damaged.

Further, unlike a cable, it is not necessary to take an extra wiring length for mounting, and deterioration of signal quality can be prevented.

The electrical components 71, 72 to be mounted on the DUT board 2 differ depending on the type of the DUT 5, but the DUT board 40 is not soldered by a cable.
However, it is not necessary to replace the performance board 10.

Further, unlike the ordinary connector, the insertion pressure is not generated, so that the connector can be downsized and the mounting areas of the electric components 71 and 72 mounted on the DUT board 40 can be secured. In particular, DUTs for analog devices and mixed analog and digital devices
The 80 requires a large mounting area because it requires the electrical components needed to test the DUT 80.

In addition, the handle 90 is attached to the camshaft 32.
Since it is detachable from the DUT board 40
It is possible to prevent the height of the socket 60 and the like from increasing, and it is possible to prevent signal deterioration.

The present invention is not limited to this, and the DUT board 40 has a structure in which the socket 60 is attached. However, instead of the socket 60, a probe pin is attached, and the DUT 80 is not an IC package but a wafer. May be used.

Further, the camshaft 32 is the DUT board 4
Although the length which penetrates the through hole 41 of 0 is shown, a short hole which does not penetrate may be used. That is, the handle 90 may be attached to the camshaft 32.

[0039]

The present invention has the following effects. According to claims 1 to 3, the performance board and D
The UT board is connected by the receptacle connector and the plug connector, and the contact pin of the receptacle connector and the contact pin of the plug connector are electrically connected by the rotation of the camshaft, and the plug connector is fixed to the receptacle connector. Thereby, the performance board and the DUT board can be easily attached and detached without requiring the insertion pressure.

Further, unlike a cable, it is not necessary to take an extra wiring length for mounting, and deterioration of signal quality can be prevented.

According to the second aspect, the D on which the electric component is mounted is mounted.
Only the UT board can be replaced easily, so there is no need to replace the performance board.

Further, since the insertion pressure is not generated unlike the ordinary connector, the connector can be downsized,
It is possible to secure a mounting area for electric components mounted on the DUT board.

According to the third aspect, since the handle is detachably attached to the camshaft, the handler and the like can be brought close to the DUT board, the socket and the like can be prevented from being raised, and the signal deterioration can be prevented.

[Brief description of drawings]

FIG. 1 is a side view showing an embodiment of the present invention.

FIG. 2 is a perspective view of the apparatus shown in FIG.

FIG. 3 Receptacle connector 20 and plug connector 3
It is a figure showing the concrete composition of 0.

FIG. 4 is a diagram illustrating the operation of the device shown in FIG.

FIG. 5 is a diagram showing a configuration of a test head of a conventional IC tester.

[Explanation of symbols]

TH test head 10 performance board 20 Receptacle connector 21 contact pins 30 plug connector 31 contact pins 32 camshaft 40 DUT board 80 DUT 90 handle

Claims (3)

(57) [Claims] 1. A test head of an IC tester having a performance board and a DUT board electrically connected to an object to be tested, the first contact being attached to the performance board and electrically connected to the performance board. The receptacle connector provided with a pin is detachably engaged with the receptacle connector, and the D
A second contact pin attached to the UT board and electrically connected to the DUT board; and a camshaft fixed to the receptacle connector by electrically connecting the second contact pin to the first contact pin by rotation. And a plug connector provided with
C tester test head. 2. The test head for an IC tester according to claim 1, wherein the DUT board mounts electric components. 3. The test head for an IC tester according to claim 1, further comprising a handle which is detachably engaged with the cam shaft and rotates the cam shaft.