JP3387473B2 - Circuit device - Google Patents

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a circuit device. For example, the present invention relates to a semiconductor integrated circuit device used in a high-frequency electronic circuit such as a radio transmitter / receiver device and a broadcast receiving device, and relates to an arrangement of external connection pads and wirings on the semiconductor integrated circuit device.

[0002]

2. Description of the Related Art Conventionally, a large number of active elements such as transistors and passive elements such as resistors are arranged on a chip of a semiconductor device, and external connection pads for taking out signals to the outside are provided in the peripheral portion of the chip. . These active / passive elements and external connection pads are connected to each other by wirings made of metal or high-impurity-doped low-resistance semiconductor. These wirings are insulated by the multi-layer wiring technique even at a portion where two or more wirings intersect with each other through an insulating layer such as a silicon oxide film or a silicon nitride film.

FIG. 5 shows a semiconductor integrated circuit which constitutes a conventional 2-input 2-output high frequency signal changeover switch. In FIG. 5, a first input end 32 on the support base 31, a second input end 33 adjacent to the first input end 32,
A first output end 34 and a second output end 35 adjacent to the first output end 34 are formed respectively.

The first input terminal 32 and the first switching means 36 are connected by a first wiring 37, and the first switching means 36 and the second input terminal 33 are connected by a second wiring. 38, and the first switching means 36 and the second output end 35 are connected by a third wiring 39.

The first wiring 37 and the second switching means 4 are also provided.
0 is connected by the fourth wiring 41, the second switching means 40 and the second wiring 38 are connected by the fifth wiring 42, and the second switching means 40 and the first output are connected. The end 34 is connected by a sixth wiring 43.

In such a conventional circuit device, for example,
The wirings intersect at the intersections 44 and 45, but each wiring is insulated and separated into upper and lower layers by an insulating layer (not shown) by a multilayer wiring technique.

[0007]

However, there is a coupling of electric signals due to parasitic capacitance between the upper and lower wirings such as the intersection 45, and the influence of the electric signals occurs between the wirings which should be electrically independent, which causes noise. It mixes. Particularly, in a semiconductor device that handles a high frequency signal, there is a problem that as the frequency of the high frequency signal becomes higher, the semiconductor device is affected by the high frequency signal propagating in another wiring, and the electrical characteristics deteriorate.

An object of the present invention is to provide a circuit device having excellent characteristics by eliminating the intersection of high frequency signal wirings.

[0009]

According to another aspect of the present invention, there is provided a circuit device comprising: a first input end at each apex of a rectangular region on a supporting base; a second input end adjacent to the first input end; One output end and a second output end adjacent to the first output end, and the first input end and the first switching means are the first
And the first switching means and the second input end are connected by a second wiring.
Switching means and the second output end are connected by a third wiring, and the first input end and the second switching means are connected to the fourth
The second switching means and the second input end are connected by a fifth wiring, and the second switching means and the second input end are connected by a fifth wiring.
The switching means and the first output end are connected by a sixth wiring, and among the first wiring to the sixth wiring,
At least one wiring is formed outside the rectangular area. According to the present invention, it is possible to provide a circuit device in which wirings do not intersect with each other.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 shows a circuit configuration of a semiconductor integrated circuit device constituting a 2-input 2-output high frequency signal changeover switch according to an embodiment of the present invention. In FIG. 1, a first input end 3, a second input end 4 adjacent to the first input end 3, a first output end 5, and a first input end 3 are provided at the respective vertices of the rectangular region 2 on the support base 1. A second output end 6 adjacent to the first output end 5 is formed. Square area 2
Defines one area on the supporting substrate 1 and does not mean a physical boundary. The first input end 3, the second input end 4, the first output end 5, and the second output end 6 are each formed of a metal pad and are connected to an external circuit by a method such as wire bonding. It

The first input terminal 3 and the first switching means 7 are
The first switching means 7 and the second input end 4 are connected by the first wiring 8, and the first switching means 7 and the second input end 4 are connected by the second wiring 9. 6 is the third wiring 10
Connected by. By controlling the first switching means 7, for example, a conduction state or a disconnection state between the first input end 3 and the second output end 6 is determined.

Similarly, the first input terminal 3 and the second switching means 11 are connected to each other by the fourth wiring 12 formed outside the rectangular area 2, and the second switching means 11 and the second switching means 11 are connected to each other. The second input end 4 and the fifth input terminal 4 are formed outside the rectangular region 2.
The second switching means 11 and the first output terminal 5 are connected by the sixth wiring 14.

In the circuit device according to the present embodiment, the first
There is no place where the sixth wirings intersect with each other.

As described above, by forming one of the wirings outside the quadrangular area 2, it is possible to construct a circuit device in which the wirings do not intersect each other, and as a result, the influence of the parasitic capacitance between the wirings is exerted. It is possible to manufacture a circuit device which does not receive the voltage.

In the present embodiment, an example in which the fourth wiring 12 and the fifth wiring 13 are formed outside the rectangular area 2 has been described, but as shown in FIG.
Similarly, even when only the fifth wiring 13 is formed outside the square area 2, or when only the sixth wiring 14 is formed outside the square area 2 as shown in FIG. It is possible to realize a circuit device in which wirings do not intersect.

FIG. 4 shows an example of the configuration of the first switching means 7 and the second switching means 11 in the circuit device shown in FIG. In FIG. 4, the first switching means 7
Is a first switch 15 that controls connection and disconnection between the first wiring 8 and the third wiring 10, and a first switch 15 that controls connection and disconnection between the second wiring 9 and the third wiring 10. 2 switches 1
6 and 6. The first switch 15 is connected to the first switch pad 18 by the seventh wiring 17,
The second switch 16 is connected to the second switch pad 20 by the eighth wiring 19.

By appropriately inputting a switch control signal to the first switch pad 18 or the second switch pad 20, the first switch 15 and the second switch 16 are controlled, and the first input terminal 3 And the second output end 6 are connected and disconnected, or the second input end 4 and the second output end 6 are connected.
Controls connection to and disconnection from.

Similarly, the second switching means 11 has a third switch 21 for controlling connection and disconnection of the fourth wiring 12 and the sixth wiring 14, a fifth wiring 13 and a sixth wiring 13. Wiring 14
And a fourth switch 22 for controlling connection and disconnection with. The third switch 21 is connected to the third switch pad 24 by the ninth wiring 23, and the fourth switch 22 is connected to the fourth switch pad 26 by the tenth wiring 25.

Here, for example, the sixth wiring 14 intersects with the ninth wiring 23, but since it is formed with respect to the ninth wiring 23 via an insulating layer (not shown), It is electrically isolated. In addition, since only the signal for controlling the third switch 21 flows through the ninth wiring 23, and the frequency of the signal is small,
The influence on the signal flowing through the wiring 14 is small.

[0021]

According to the present invention, since there is no intersection between the wirings for transmitting high frequency signals, the high frequency characteristics of the circuit device are improved.

[Brief description of drawings]

FIG. 1 is a diagram showing a circuit device according to an embodiment of the present invention.

FIG. 2 is a diagram showing another circuit device according to the embodiment of the present invention.

FIG. 3 is a diagram showing another circuit device according to the embodiment of the present invention.

FIG. 4 is a diagram showing a circuit device according to an embodiment of the present invention.

FIG. 5 is a diagram showing a conventional circuit device.

[Explanation of symbols]

1 Support substrate 2 rectangular area 3 First input end 4 Second input end 5 First output end 6 Second output end 7 First switching means 8 First wiring 9 Second wiring 10 Third wiring 11 Second switching means 12 Fourth wiring 13 Fifth wiring 14 Sixth wiring 15 First switch 16 Second switch 17th wiring 18 First switch pad 19th wiring 20 Second switch pad 21 Third Switch 22 4th switch 23 9th wiring 24 Third switch pad 25th wiring 26 Fourth switch pad

Front page continued (58) Fields surveyed (Int.Cl. ⁷ , DB name) H01L 21/822 H01L 21/3205 H01L 21/82 H01L 27/04 H05K 7/06

Claims (3)

(57) [Claims] 1. A first input end at each apex of a rectangular area on a support base, and a second input end adjacent to the first input end.
Has an input end, a first output end, and a second output end adjacent to the first output end, and the first input end and the first switching means are connected by a first wiring. The first switching means and the second input end are connected by a second wiring, and the first switching means and the second output end are connected by a third wiring. The first input terminal and the second switching means are connected by a fourth wiring, and the second switching means and the second input terminal are connected by a fifth wiring. The second switching means and the first output end are connected by a sixth wiring, and at least one wiring from the first wiring to the sixth wiring has the rectangular shape. A circuit device characterized by being formed outside the region. 2. A first switch for controlling connection and disconnection between the first wiring and the third wiring, the first switching means, the second wiring and the third wiring. A third switch for controlling connection and disconnection between the fourth wiring and the sixth wiring, and a second switch for controlling connection and disconnection between the fourth wiring and the sixth wiring. 2. The circuit device according to claim 1, further comprising: a fourth switch that controls connection and disconnection between the fifth wiring and the sixth wiring. 3. A seventh wiring for transmitting an electric signal for controlling the first switch, an eighth wiring for transmitting an electric signal for controlling the second switch, and the third wiring.
The ninth wiring for transmitting the electric signal for controlling the switch and the tenth wiring for transmitting the electric signal for controlling the fourth switch are provided from the first wiring to the sixth wiring.
3. The circuit device according to claim 2, wherein any one of the wirings of the above is crossed via an insulating layer.