JP3384114B2 - Electroforming equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electroforming apparatus used for producing a stamper or the like which is a master for producing a disc-shaped recording medium such as an optical disc or a magneto-optical disc.

[0002]

2. Description of the Related Art In disk-shaped recording media such as optical disks and magneto-optical disks, recording signals such as audio and video are recorded as pits formed by minute holes in a signal recording area on the main surface, and the signal recording area A groove, which is a minute guide groove for recording a signal, or a pit for address information is provided on the substrate. These pits and grooves are generally transferred and formed on a transparent resin material substrate using a nickel metal stamper to form a disk-shaped recording medium.

The stamper is roughly divided into a mastering process for producing a glass master from a glass substrate and an electroforming process for producing a nickel stamper from the glass master. The mastering process includes a step of forming a resist layer on a glass substrate, a cutting step of laser cutting another resist layer while leaving a portion corresponding to a pit or a groove, a developing step of developing the resist layer, and a resist layer And a conductive treatment step of forming a silver or nickel film.

The electroforming step includes an electroforming step of forming a nickel thick film on a glass master to produce a nickel father,
A peeling process for peeling the nickel father obtained by this electroforming process from the glass master, a desilvering process performed on the surface of the nickel father, and a nickel nickel thick film mother nickel that is based on the nickel father are manufactured. It comprises a casting step, a peeling step of peeling the mother nickel obtained by the electroforming step from the nickel father, and an electroforming step of manufacturing a stamper based on the mother nickel. These electroforming steps are performed using an electroforming device.

As shown in FIG. 8, an electroforming apparatus 100 used in the conventional electroforming process of an optical disk is a circulating apparatus 103 for an electroforming solution 102 in which nickel sulfamate, boric acid, nickel chloride and a leveling agent are mixed. It is provided with an electroforming tank 101 that is circulated and supplied. The electroforming liquid 102 is
During electroforming, the electroforming tank 10 is kept at a constant temperature, for example, 40 ° C. to 60 ° C. by the circulation device 103.
1 is circulated and overflowed to remove impurities by a filter or the like. Inside the electroforming tank 101, a sulfur-containing nickel chip 104 is arranged as an electroforming material forming the anode side. Although not shown in the drawing, nickel ions eluted between the nickel chip 104 and a glass substrate 110 facing each other as described later are efficiently sprayed and attached to the electroforming tank 101 onto the glass substrate 110. There is provided a nozzle mechanism.

Further, the electroforming apparatus 100 is provided with a rotary head mechanism 106 located above the electroforming tank 101 and supported by a rotary head supporting mechanism 105. The rotary block member that constitutes the rotary head support mechanism 105 is rotatably mounted on a support shaft 107 that is supported by a device frame (not shown). The rotary head mechanism 106 has a rotary shaft that is driven to rotate by a motor 107 arranged at one end side, and the cathode plate 109 is provided at the tip of this rotary shaft.
Is provided. On the main surface of the cathode plate 109,
A glass master 110, which is an electrocast material, is attached. The glass master plate 110 is attached to the cathode plate 109 via a baffle plate having an appropriate opening shape as needed.

The conventional electroforming apparatus 1 configured as described above
00, the rotary head support mechanism 104 is rotated counterclockwise in FIG.
The cathode plate 109 with the glass master 110 attached is inserted into the electroforming tank 101. The cathode plate 109 inserted in the electroforming tank 101 is the nickel chip 1 on the anode side.
It is located opposite to 04. Therefore, when both electrodes are energized, the nickel ions eluted from the electrolytic solution are discharged to the cathode plate 1.
The nickel layer is laminated on the surface of the glass master 110 attached to the substrate 09.

The stamper is generally formed with a thickness dimension and accuracy of about 300 ± 5 μm. In order to obtain this accuracy, the electroforming apparatus 100 controls the amount of current supplied to both electrodes and rotates the cathode plate 109 by rotating the rotating shaft by the motor 108,
The nickel layer is uniformly formed on the surface of the glass master 110.

[0009]

In the electroforming apparatus 100 used in the electroforming process of such an optical disc, the nickel chip 104 and the glass master 110, in other words, the portion between the anode and the cathode is eluted as described above. A gap is present by disposing a nozzle mechanism or the like (not shown) for efficiently spraying and adhering nickel ions onto the surface of the glass master 110. This gap acts as a resistance in an electric circuit. Therefore, when the distance between the anode and the cathode is large and the resistance is large, it becomes difficult to supply a large current value. The elution amount of nickel ions is regulated by the supplied current value.
Therefore, in order to improve the efficiency of the electroforming process, it is preferable that the distance between the anode and the cathode is minimum.

On the other hand, in the electroforming step, when the current density is small, the nickel crystal grain boundaries are small and a smooth and hard nickel layer is formed, and when the current density is large, the crystal grain boundaries are large. It has a characteristic that a rather coarse nickel layer is formed. In the conventional electroforming apparatus 100, as described above, since the anode and the cathode are configured with a gap that does not interfere with the nozzle mechanism, the current that is harmonized with the efficiency of the electroforming process is harmonized. It is difficult to adjust the density, and it is extremely difficult to obtain a high quality electroformed product.

Further, the nozzle mechanism and the glass master disk 110 are provided on the glass master disk 110 in a state in which nickel ions are uniform and efficiently, based on various electroforming conditions such as a supplied current value and an electroforming solution temperature. It is preferable that the intervals are set optimally so that a nickel layer having a uniform thickness dimension is formed by spraying. However, the conventional electroforming apparatus 10
In No. 0, the distance between the glass master 110 attached to the cathode plate 109 and the nozzle mechanism was constant, and there was a problem that the nickel layer was formed nonuniformly.

Therefore, according to the present invention, the anode and the cathode of the electroforming tank can be adjusted to have an optimal facing distance, so that the electroforming time can be reduced or the film thickness is constant and no return occurs. It is proposed for the purpose of providing an electroforming apparatus capable of producing a cast product.

[0013]

An electroforming apparatus according to the present invention which achieves this object is an electroforming tank in which an electroforming material of an anode is disposed in an electroforming liquid circulated and supplied through a circulation device. And a rotary head member including a rotary shaft provided with a cathode plate to which an electrocast material is attached at one end thereof, and a rotary drive mechanism including a drive motor provided on a side opposite to a supporting side of the rotary shaft. The rotary head mechanism has a rotary head mechanism and a rotary head support block member that supports the rotary head member and is rotatably mounted on a support shaft supported by the apparatus frame. A rotating head support mechanism for rotating the cathode plate so that the cathode plate is inserted into and removed from the electroforming tank, and a cathode plate inserted into the electroforming tank by moving the rotating head mechanism with respect to the rotating head support mechanism. Mounted on A rotary head adjusting mechanism that adjusts the facing distance between the electrocast material and the electroforming material that is the anode on the electroforming tank side, and is provided between the rotary head member and the rotary head support block member. And a rotary head guide mechanism for guiding the rotary head member to be moved so as to be moved in the axial direction.

Further, in the electroforming apparatus according to the present invention, the rotary head adjusting mechanism is provided with an adjusting bolt which is screwed to the side surface of the rotary head supporting block member in the moving direction of the rotary head member, and the adjusting bolt. And a set collar that is fixed in the axial direction and is combined, and an adjusting bracket member that connects the set collar and the rotary head mechanism.

Further, in the electroforming apparatus according to the present invention, the rotary head adjusting mechanism is attached to the support bracket member provided on the rotary head support block member, and the piston rod having the tip end connected to the rotary head mechanism is used as the rotary head. It is composed of a cylinder that moves back and forth in parallel with the axial direction of the mechanism.

Furthermore, in the electroforming apparatus according to the present invention, the rotary head adjusting mechanism penetrates a screw hole provided in the rotary block member and parallel to the axial direction of the rotary head mechanism, and the tip portion thereof is the rotary head mechanism. It is composed of an adjusting screw connected to.

Further, in the electroforming apparatus according to the present invention, the rotary head guide mechanism is attached to and detached from the rotary head support block member, and a guide member in which a key groove parallel to the axial direction of the rotary head mechanism is formed, And a parallel key member incorporated so as to relatively engage with a key groove provided in the head support block member.

[0018]

According to the electroforming apparatus of the present invention having the above-described structure, the electroformed material attached to the cathode plate is moved into the electroforming tank by the rotating head supporting mechanism rotating. It is inserted and positioned so as to face the electroformed material which is the anode disposed in this electroforming tank. For the cathode plate and the anode,
When the electric current is supplied, the metal ions eluted in the electroforming liquid are sprayed and adhered onto the surface of the electroformed material via the nozzle mechanism or the like to form a metal film layer in a laminated manner. The metal ions attached to the surface of the electroformed material are attached to the surface of the electroformed material in a uniform state by the rotation driving mechanism rotating the cathode plate.

The rotary head adjusting mechanism moves the rotary head mechanism in the axial direction with respect to the rotary head support mechanism so that the distance between the electroformed material attached to the cathode plate and the anode of the electroformed layer is opposed. adjust. The moving movement of the rotary head mechanism in the axial direction is guided by the rotary head guide mechanism. By the moving operation of the rotary head mechanism, the facing distance between the electroformed material attached to the cathode plate and the electroformed material of the anode arranged in the electroforming tank is adjusted.

By setting and adjusting the facing distance between the anode and the cathode plate to the minimum, the gap resistance value can be reduced and a large current can be supplied to these both electrodes. The supply of a large current promotes the elution of metal ions from the electroformed material, and the electroforming time can be shortened. By adjusting the facing distance between the anode and the cathode plate to be in an optimum state, the eluted metal ions can be attached to the electrocast material in a good state. Therefore, in the thin electroformed material, the current density is reduced to reduce the occurrence of return. Further, the optimum facing distance between the anode and the cathode plate is to simplify the baffle plate and the like, correct the error in the mounting position of the anode due to the accuracy of the electroforming tank, and cope with the thickness dimension specifications of the electroformed material.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Specific embodiments of the present invention will be described below in detail with reference to the drawings. The electroforming apparatus 1 of the embodiment is similar to the electroforming apparatus 100 of FIG.
For example, an electroforming apparatus used in an electroforming process when a nickel stamper is manufactured from a glass master, and as shown in FIG. 2, a lower housing portion 2 in which an electroforming tank 7 is disposed and supported, and a rotary head. It is assembled by the upper housing portion 3 on which the mechanism 10 and the like are arranged and supported, and the power supply portion 4 arranged on the ceiling portion of the upper housing portion 3. The lower housing part 2 and the upper housing part 3 are firmly assembled by a frame material, and an exterior panel is attached to the surface.

The lower casing portion 2 is constructed so that the carrier 5 is disposed on the bottom plate portion to make the electroforming apparatus 1 movable and to be firmly installed and fixed by the stand 6. The electroforming tank 7 is formed of a reinforced plastic material, and the side surface portion 7A has an angle of about 45 °.
Is configured as an inclined surface. The electroforming tank 7 is filled with electroforming liquid. The electroforming liquid is composed of, for example, a mixed liquid of nickel sulfamate, boric acid, nickel chloride, and a leveling agent as in the above-described conventional electroforming apparatus 100, and at a constant temperature, for example, 40 ° C., during electroforming processing described later.
The temperature is maintained at 60 ° C to 60 ° C.

As shown in FIG. 2, the electroforming tank 7 is partially configured as a double tank, and the height of the inner tank wall is made smaller than that of the outer tank wall so that the overflow tank is overflow tank. Is configured as. The electroforming tank 7 is connected to four ducts 8A to 8D located on the bottom surface side. The first duct 8A is an overflow duct communicating with the overflow passage 7B, and circulates the electroforming liquid to an overflow tank (not shown). An adsorbent, a filter, etc. for removing impurities such as resist mixed in the electroforming liquid are disposed between the overflow duct 8A and the overflow tank.

The second duct 8B is a supply duct for supplying the electroforming liquid to the electroforming tank 7, and the third duct 8C is an exhaust duct for discharging the electroforming liquid from the electroforming tank 7. Also,
The fourth duct 8D arranged at the bottom of the electroforming tank 7 is a drain duct that is normally closed and discharges the electroforming liquid when cleaning the inside of the tank. The above-mentioned four ducts 8A to 8D, a circulation tank (not shown), and a circulation pump constitute a circulation device for electroforming liquid.

The electroforming tank 7 is provided with an anode case 9 containing a nickel chip containing sulfur as an electroforming material constituting the anode side. This anode case 9 is
It has a length dimension substantially equal to that of the inclined side surface portion 7A of the electroforming tank 7, and is positioned and arranged with high precision in parallel with the inclined side surface portion 7A. Therefore, the anode case 9 is disposed inside the electroforming tank 7 with an inclination angle of about 45 °.

The electrocasting tank 7 constructed as described above includes the anode case 9 and has a basic structure similar to that of the conventional electroforming apparatus 100.

The upper housing section 4 includes a rotary head support mechanism 3
A rotary head mechanism 10 rotatably supported by 0 is provided. As shown in FIGS. 1 and 3, the rotary head mechanism 10 includes a rotary head member 11, a cathode plate 12, a drive motor 13 for rotationally driving the cathode plate 12, a transmission gear mechanism 14, and a rotary connector 15. And the connecting rods 16 and 17 and other members and mechanisms. The rotary head member 11 includes a head frame 18
On the other hand, a cylindrical outer cylinder member 19 supported in a cantilever state so as to be movable in the axial direction, and rotatably supported by bearing members 20A and 20B respectively provided on both side openings of the outer cylinder member 19. The rotary shaft 21 supported by the rotary shaft 21 and the outer cylinder member 19 are constituted by members such as a rotary disk 22 fixed to the rotary shaft 21 and positioned at the free end side opening.

The cathode plate 12 has a first connecting rod 16
And the rotary head member 11 via the second connecting rod 17.
It is attached to the tip of the. The cathode plate 12 has the same basic structure as the cathode plate 109 of the conventional electroforming apparatus 100 described above, and is formed into a disk shape, for example, with vinyl chloride resin or the like, and the baffle plate 23 is formed on the main surface by a mounting mechanism (not shown). The glass master 24 is attached via the above, and power is supplied via the rotary connector 15. Further, the cathode plate 12 is, as described later,
When the rotary head support mechanism 25 operates, the rotary head support mechanism 25 enters the electroforming tank 7 and is positioned to face the anode case 9.

The first connecting rod 16 is made of a conductive material and is formed into a tubular shape as a whole. A flange plate 16A joined and fixed to the rotary disc 22 is integrally formed at one end of the first connecting rod 16 and the other end of the flange disc 16A is formed. The second connecting rod 17 is inserted and fixed in the opening. This second connecting rod 17 also
It is made of a conductive material. The outer peripheral surfaces of the first connecting rod 16 and the second connecting rod 17 are FRP coated.

On the rotary shaft 21, the transmission gear mechanism 1 is provided on the base end side.
The spur gear 14B forming part 4 is fixed. The spur gear 14B is a drive gear 14 that constitutes the transmission gear mechanism 14.
It meshes with A. The drive gear 14A is the drive motor 13
Is fixed to the output shaft 13A. The drive motor 13 and the transmission gear mechanism 14 form a rotary drive mechanism 27 for the rotary head member 11. Therefore, the rotation output of the drive motor 13 is output shaft 13A-drive gear 14A-spur gear 14B-
Rotating shaft 21-turning plate 22-first connecting rod 16-second
It is transmitted to the cathode plate 12 via the transmission system of the connecting rod 17 of, and the cathode plate 12 is rotationally driven.

The base end of the rotary shaft 21 extends through the head frame 18 and is supplied with a negative charge through the rotary connector 15. This negative charge is applied to the cathode plate 12 via the transmission system of the rotary shaft 21, the rotary disk 22, the first connecting rod 16 and the second connecting rod 17.

Rotary head mechanism 1 constructed as described above
As shown in FIG. 2, 0 is mounted on a rotary head support housing 31 that constitutes the housing of the rotary head support mechanism 30. The rotary head support housing 31 has a guide cylinder 2 on one side surface thereof.
5 is attached, and from this guide cylinder 25 to the second
The connecting rod 17 of is penetrated. In addition, the guide cylinder 2
In FIG. 5, a lid member 26 that closes the electroforming tank 7 when the rotary head mechanism 10 is rotated as described later is 45 °.
It is attached at an angle of.

The rotary head support mechanism 30 is shown in FIGS.
As shown in FIG. 3, the rotary head support housing 31, the rotary head support block member 32, the rotary support shaft 33, the drive motor 34, the stopper member 35, and other members are included. Rotary head member 1 of the rotary head mechanism 10 described above
1 is axially movably supported on the main surface 32A of the rotary head support block member 32. That is, the outer cylinder member 19 forming the rotary head member 11 has the bottom surface portion 27.
Is configured as a flat surface by being so-called D-cut in the axial direction, and the bottom surface portion 27 is provided with the rotary head support block member 3 via a rotary head guide mechanism 40 described later.
It is supported on the second main surface 32A.

The drive motor 34 is attached to the apparatus frame, and the output shaft of the drive motor 34 is connected to the rotation support shaft 33. The rotary support shaft 33 is rotatably supported by the rotary head support housing 31 via a bearing member (not shown).
The rotary head support block members 32 are assembled in a fixed state with respect to the rotation direction. A stopper member 35 is attached to the rotary head support block member 32 so as to project to one corner. The rotary head support block member 32 is
When the drive motor 34 rotates, it rotates counterclockwise in FIG. 3, and the stopper member 35 abuts on the stopper 36.

The stopper 36 is supported by the apparatus frame in a state parallel to the axial direction of the rotary head member 11, and is composed of a stopper piece with which the tip of the stopper member 35 abuts, and a damper. This stopper 36
The rotary head support block member 32 and the rotary head support block member 32 are in contact with each other when the rotary head support mechanism 30 is rotated.
The glass master 24 attached to 2 is the anode case 9
It is positioned so as to face in parallel with. This positioning operation is performed by adjusting the damper of the stopper 36.

The rotary head guide mechanism 40 is provided between the key groove 41 provided on the main surface 32A of the rotary head support block member 32, the outer cylinder member 19 constituting the rotary head member 11 and the rotary head support block member 32. And a member such as a key groove 43 and a parallel key member 44 provided in the guide member 42. The guide member 42 is configured as a plate-shaped member having a length dimension larger than the width dimension of the rotary head support block member 32, and is interposed between the main surface 32A of the rotary head support block member 32 and the outer tubular member 19. It has been inserted.
Further, the guide member 42 is attached and fixed to the rotary head support housing 31 by an attachment screw (not shown).

The guide member 42 is provided on the main surface 32A of the rotary head support block member 32 in a state in which these two members are combined on the surface facing the main surface 32A of the rotary head support block member 32. A key groove 43 is provided in the width direction, which cooperates with the above to form a key groove that is closed in the vertical direction. Further, although not shown, the guide member 42 is provided with elongated holes along both side surfaces in the width direction. These elongated holes are provided so as to correspond to the screw holes provided on the bottom surface portion 19A of the outer tubular member 19 that constitutes the rotary head member 11. Therefore, in the range of the elongated hole, the guide member 42 and the outer cylinder member 19 can adjust the tightening position by the set screw 45 penetrating the elongated hole and screwed into the screw hole.

Main surface 3 of rotary head support block member 32
The parallel key member 44 is combined with the key groove formed by cooperation of the key groove 41 provided in 2A and the key groove 43 provided in the guide member 42. The parallel key member 44 has a width dimension substantially equal to the groove width of the key groove and a longitudinal dimension of the key groove 4.
It is configured as a plate-shaped member slightly smaller than the length of 1. Therefore, the guide member 42 is fixed to the rotary head support block member 32 in the rotational direction and movably in the axial direction by the action of the parallel key member 44 that relatively engages with the key groove 43. .

The guide member 42, in other words, the rotary head member 11 is axially moved by the rotary head adjusting mechanism 50 with respect to the rotary head support block member 32. The rotary head adjusting mechanism 50 is composed of an adjusting bolt 52 screwed into an adjusting screw hole 51 penetrating the rotary head supporting block member 32, a set collar 53, and an adjusting bracket member 54. That is,
As shown in FIG. 1, the adjustment screw hole 51 is provided in the rotary head support block member 32 as a through screw hole parallel to the rotary head member 11.

A set collar 53 is fixed to the shank portion 52A of the adjusting bolt 52 screwed into the adjusting screw hole 51 via a set screw. One end of the adjustment bracket member 54 has a shank portion 52A and a head portion 52.
It is supported by the adjusting bolt 52 so as to be interposed between the rotary head member 11 and B and has a free end side bent in parallel with the rotary head member 11, and is configured as a member having a substantially L shape. As shown in FIG. 1, the adjustment bracket member 54 has a free end side, as shown in FIG. 1, a connecting member 55 and a screw 56 fixed to a flange portion 19A formed at the base end portion of the outer tubular member 19 constituting the rotary head member 11. Fixed by joining.

Although not shown in detail in the electroforming apparatus 1 of the embodiment, an operation panel board 28 is provided in the upper housing 3, and the main switch, the drive motor 13 of the rotary head mechanism 10, or the rotary head mechanism 10 is rotated. A start switch for the drive motor 34 of the head support mechanism 30 and the like are provided.

Example electroforming apparatus 1 constructed as described above
As described above, is used in the electroforming step of forming a nickel layer on the surface of the glass master 24 to manufacture a nickel stamper. In the electroforming step, the electroforming apparatus 1 is subjected to setup steps such as mounting the glass master disk 24 and adjusting the rotary head member 11. That is, the glass master disk 24 is disposed and fixed to the cathode plate 12 via a mounting mechanism (not shown). The rotary head member 11 provided with the cathode plate 12 at the tip thereof has a plate thickness specification of the glass master 24,
The rotary head adjustment mechanism 50 axially adjusts the cathode plate 12 and the anode case 9 so that the cathode plate 12 and the anode case 9 are set to have an optimum facing distance depending on electroforming conditions such as an applied voltage specification and an electroforming liquid temperature.

In the electroforming apparatus 1, the drive motor 34 of the rotary head support mechanism 30 is powered on after the above-mentioned setup process is performed. In the rotary head support mechanism 30, as the drive motor 34 is rotationally driven, the rotary head support block member 32 is rotated counterclockwise via the rotary support shaft 33 as shown in FIG. Therefore, the rotary head mechanism 10 is supported by the rotary head support mechanism 30 to rotate as a whole, and the cathode plate 12 provided at the tip is inserted into the electroforming tank 7. The rotating operation of the rotary head mechanism 10 is stopped by the stopper member 35 of the rotary head support mechanism 30 hitting the stopper 36.

When the stopper member 35 and the stopper 36 are in contact with each other, the cathode plate 12 is positioned in parallel with the anode case 9 so as to face it. Since the anode case 9 is arranged in the electroforming tank 7 in a state where the anode case 9 is parallel to the inclined side surface portion 7A, the cathode plate 12 is rotated by the rotary head support mechanism 30 by an angle of about 45 ° from the initial position. Will be done. The electroforming tank 7 has a cathode plate 12
Is closed by the lid member 26 while being rotated so as to face the anode case 9. The lid member 26 prevents the electroforming liquid having a relatively high temperature from scattering from the electroforming tank 7 and the inclusion of foreign matter.

Power is supplied to the anode case 9 and the cathode plate 12 facing each other with the facing distance adjusted by the rotary head adjusting mechanism 50. Power is supplied to the cathode plate 12 via a rotary connector 15 arranged at one end of the rotary shaft 21. Anode case 9
When the cathode plate 12 is powered on, nickel ions are eluted from the electrolytic solution and adhere to the surface of the glass master plate 24 attached to the cathode plate 12 to form a nickel layer. The principle of electroforming the nickel layer on the surface of the glass master 24 is well known in the art, and a detailed description thereof will be omitted. However, also in the electroforming apparatus 1 of the embodiment, the nickel case is supplied to the anode case 9 and the cathode plate 12. The amount of current flowing is precisely controlled, and the cathode plate 12 is rotated,
A nickel layer is formed on the surface of the glass master 24 uniformly with a predetermined thickness dimension and accuracy.

When power is supplied to the drive motor 13, the rotary head member 11 transmits the rotary drive force via the transmission gear mechanism 14. As described above, the rotary head member 11 includes the output shaft 13A-driving gear 14A-spur gear 14B.
-Rotation shaft 21-Rotary disc 22-First connection rod 16-Second connection rod 17 is rotated by a transmission system, and the rotation output of drive motor 13 is transmitted to cathode plate 12.

In the electroforming apparatus 1, after the lapse of a predetermined time, the power supply to the anode case 9 and the cathode plate 12 is stopped, and the drive motor 34 of the rotary head support mechanism 30 is stopped.
The power is turned on again. In the rotary head support mechanism 30, the rotary head support block member 32 is rotated in the clockwise direction in FIG. Therefore, the rotary head mechanism 1
0 is supported by this rotary head support mechanism 30 and the whole is returned and rotated, so that the cathode plate 12 escapes from the electroforming tank 7.
Thereafter, the glass master disk 24 having a nickel layer formed on the surface thereof is removed from the cathode plate 12.

As described above, the electroforming apparatus 1 uses the anode case 9 and the cathode plate 1 as a setup step of the electroforming step.
The rotary head adjusting mechanism 5 is used to adjust the facing distance to
An adjusting operation for moving the rotary head member 11 in the axial direction via 0 is performed. The adjustment operation of the rotary head mechanism 10 is performed by adjusting the adjustment bolt 5 with the outer cylinder member 19 and the guide member 42 of the rotary head guide mechanism 40 released from the fixed state.
This is done by rotating 2 to the left and right.

Outer cylinder member 1 constituting the rotary head mechanism 10.
9 is usually coupled with a guide member 42 fixed to the rotary head support housing 31 by a set screw 45. Therefore, the rotary head mechanism 10 is in a state of being supported on the main surface 32A of the rotary head support block member 32 and being fixed to the rotary head support housing 31 via the guide member 42. In the rotary head mechanism 10, the set state of the outer cylinder member 19 and the guide member 42 is released by loosening the set screw 45. After that, the adjusting bolt 52 is rotated.

For example, in the rotary head mechanism 10, as shown in FIG. 6, the adjustment bolt 52 is screwed into the adjustment screw hole 51 provided in the rotary head support block member 32 by rotating the adjustment bolt 52 in the clockwise direction. Going away. By the screwing operation of the adjusting bolt 52, the adjusting bracket member 54 moves integrally with the adjusting bolt 52 to the left side as shown by the arrow in the figure. The operation of the adjustment bracket member 54 is performed by the rotary head mechanism 1 via the connecting member 55.
It is transmitted to the outer cylinder member 19 which constitutes 0. Therefore, the rotary head mechanism 10 moves to the left as a whole as shown by the arrow in the figure.

In this case, the outer cylinder member 19 has the key groove 43 of the guide member 42 constituting the rotary head guide mechanism 40.
And the parallel key member 44 incorporated in the key groove 41 provided in the main surface 32A of the rotary head support block member 32 causes linear movement in the axial direction. The cathode plate 12 also moves to the left by the moving operation of the rotary head mechanism 10. The outer cylinder member 19 constituting the rotary head mechanism 10 is fixed again to the guide member 42 by tightening the set screw 45. Therefore,
The cathode plate 12 is spaced apart from the rotary shaft 33 of the rotary head support mechanism 30 so that the cathode plate 12 is separated from the anode case 9 in a state where the rotary head support mechanism 30 operates and the cathode plate 12 enters the electroforming tank 7. It is controlled in the direction in which the opposing distance is narrowed.

Further, as shown in FIG. 7, the rotary head mechanism 10 rotates the adjustment bolt 52 counterclockwise so that the adjustment bolt 52 is pulled out from the adjustment screw hole 51 provided in the rotary head support block member 32. To go. By this turning operation of the adjusting bolt 52, the adjusting bracket member 54 moves integrally with the adjusting bolt 52 to the right as shown by the arrow in the figure. The operation of the adjusting bracket member 54 is performed by the rotary head mechanism 1 via the connecting member 55.
It is transmitted to the outer cylinder member 19 which constitutes 0. Therefore, the rotary head mechanism 10 moves to the right as a whole as indicated by the arrow in the figure.

Similar to the adjusting operation described above, the outer cylinder member 19
Is a guide member 4 that constitutes the rotary head guide mechanism 40.
The parallel key member 44 incorporated in the second key groove 43 and the key groove 41 provided on the main surface 32A of the rotary head support block member 32 linearly moves in the axial direction. The cathode plate 12 also moves to the right by the moving operation of the rotary head mechanism 10. Rotating head mechanism 1
The outer cylinder member 19 forming 0 is fixed again to the guide member 42 by tightening the set screw 45. Therefore, the cathode plate 12 has a small distance from the rotary support shaft 33 of the rotary head support mechanism 30, and the rotary head support mechanism 30 operates so that the cathode plate 12 enters the electroforming tank 7. It is adjusted in the direction in which the distance between and becomes large.

By the above operation, the rotary head mechanism 10
Is a cathode through the rotary head adjusting mechanism 50 in accordance with plate thickness specifications of the glass master 24, applied voltage specifications, electroforming conditions such as the temperature of the electroforming liquid, or the mounting accuracy of the electroforming tank 7 or the anode case 9. The facing distance between the plate 12 and the anode case 9 is set to an optimum state. Further, during this operation, the rotary head mechanism 10 is accurately moved in the axial direction by the rotary head guide mechanism 40.

The present invention is not limited to the electroforming apparatus 1 of the first embodiment described above. For example, regarding the rotary head adjusting mechanism, the second or third embodiment shown in FIGS. It is deployed like a rotary head adjusting mechanism provided in the electroforming devices 60 and 70, respectively. FIG. 8 is a diagram for schematically explaining the configuration of the main part of the electroforming apparatus 60 of the second embodiment, and the same parts as the components and mechanisms of the electroforming apparatus 1 of the first embodiment are the same. The description is omitted by attaching the reference numerals.

The rotary head adjusting mechanism 61 provided in the electroforming apparatus 60 has an air cylinder 62 arranged between the rotary head mechanism 10 and the rotary head supporting mechanism 30. That is, the air cylinder 62 serves as the rotary head support block member 3 that constitutes the rotary head support mechanism 30.
Mounting bracket member 63 attached to the side surface of No. 2
And the head frame 18 are interposed. The piston rod 64 of the air cylinder 62 is connected to the head frame 18.

According to the electroforming apparatus 60 of the second embodiment configured as described above, the guide member 42 constituting the rotary head guide mechanism 40 and the outer cylinder member 19 constituting the rotary head member 11 are fixedly coupled. The air cylinder 62 is operated with the set screw 45 that is loosened. The operation of the air cylinder 62 is transmitted to the rotary head mechanism 10 via the head frame 18 to which the piston rod 64 is coupled, and the rotary head mechanism 10 is axially guided while being guided by the rotary head guide mechanism 40. Move works.

By the moving operation of the rotary head mechanism 10, the cathode plate 12 is also moved in the axial direction. Thereafter, the outer cylinder member 19 constituting the rotary head mechanism 10 is fixed again to the guide member 42 by tightening the set screw 45. Therefore, the cathode plate 12
The rotary head support mechanism 30 operates to cause the cathode plate 12 to move.
The anode case 9 in a state where the aluminum has entered the electroforming tank 7.
The interval opposite to is adjusted.

FIG. 9 is a diagram for schematically explaining the construction of the main part of the electroforming apparatus 70 of the third embodiment, and the same parts as the components and mechanisms of the electroforming apparatus 1 of the first embodiment described above. The same reference numerals will be given to those and description thereof will be omitted. The rotary head adjusting mechanism 71 provided in the electroforming apparatus 70 has a rotary head supporting mechanism 30 similar to the first electroforming apparatus 1 described above.
The adjusting bolt 73 is screwed into a screw hole 72 provided through the rotary head supporting block member 32.

The adjusting bolt 73 has a sufficient length dimension that it is screwed from one side surface portion of the rotary head supporting block member 32 and the other end portion thereof is exposed to the other side surface portion of the rotating head supporting block member 32. . A connecting bracket member 74 is attached to the exposed end portion 73A of the adjusting bolt 73.
Are joined at one end. The other end of the connecting bracket member 74 is joined to the head frame 18.

According to the electroforming apparatus 70 of the third embodiment configured as described above, the guide member 42 forming the rotary head guide mechanism 40 and the outer cylinder member 19 forming the rotary head member 11 are fixedly coupled. The adjusting bolt 73 is rotated while the set screw 45 is loosened. By the operation of the adjusting bolt 73, the amount of protrusion of the exposed end portion 73A from the rotary head support block member 32 is adjusted. Then, the operation of the adjusting bolt 73 is performed by the connecting bracket member 74.
Is transmitted to the rotary head mechanism 10 through the head frame 18 to which the rotary head mechanism 10 is coupled, and the rotary head mechanism 10 moves in the axial direction while being guided by the rotary head guide mechanism 40.

By the moving operation of the rotary head mechanism 10, the cathode plate 12 also moves in the axial direction. After that,
The outer cylinder member 19 forming the rotary head mechanism 10 is tightened with the setscrew 45 so that the guide member 42
Fixed again. Therefore, the distance between the cathode plate 12 and the anode case 9 is adjusted when the rotary head support mechanism 30 operates and the cathode plate 12 enters the electroforming tank 7.

In the electroforming apparatus of each of the above-described embodiments, the rotary head guide mechanism 40 includes the key groove 41 provided on the main surface 32A of the rotary head support block member 32 and the outer cylinder forming the rotary head mechanism 10. The parallel key member 44 is combined with the key groove formed in cooperation with the key groove 43 provided in the guide member 42 screwed and fixed to the member 19, but the present invention is limited to such a structure. Not. For example, the rotary head support block member 32 and the guide member 42 form a so-called parallel key structure by forming a key groove and a key convex portion which are engaged with each other on their respective opposing surfaces. The rotary head guide mechanism may be configured by the structure.

[0064]

As described in detail above, according to the electroforming apparatus of the present invention, the rotary head mechanism supported by the rotary head supporting mechanism operates the rotary head adjusting mechanism to operate the rotary head guide mechanism. By being configured to be moved in the axial direction by being guided by the mechanism, the facing distance between the cathode and the anode can be adjusted to an optimum state. Therefore, the electroforming apparatus, for example, by setting the cathode and the anode to the minimum facing distance,
A high current can be supplied to the cathode and the anode, and the electroforming time can be greatly shortened.

In the electroforming apparatus, the distance between the cathode and the anode is optimally set on the basis of the electroforming conditions such as the thickness dimension specification of the electroformed member and the current specification. It is possible to manufacture a high-quality electroformed product in which generation is prevented or the thickness dimension of the electroformed layer is uniform.

Further, in the electroforming apparatus, the mask member to be attached to the electroformed member attached to the cathode can be simplified by setting the distance between the cathode and the anode to be optimal, and the manufacturing cost can be reduced. It can be reduced.
Further, in the electroforming apparatus, the electrocasting tank is manufactured as a so-called handmade product, but it is possible to improve the electrocasting accuracy due to dimensional variation.

[Brief description of drawings]

FIG. 1 is a longitudinal sectional view of an essential part of an electroforming apparatus according to the present invention,
A rotary head mechanism, a rotary head support mechanism, a rotary head guide mechanism, and a rotary head adjusting mechanism are shown.

FIG. 2 is a partially cutaway side view illustrating the overall configuration of the electroforming apparatus.

FIG. 3 is a side view of essential parts for explaining a rotary head mechanism section of the electroforming apparatus.

FIG. 4 is a side view of a main part for explaining an operating state during an electroforming process by the electroforming apparatus.

FIG. 5 is a side view of a partly cutaway main part for explaining an adjusting operation of the rotary head mechanism in the electroforming apparatus.

FIG. 6 is a partially cutaway side view for explaining an adjusting operation of the rotary head mechanism, showing a state in which the cathode plate is moved in a direction to approach the anode case side.

FIG. 7 is a partially cutaway side view for explaining an adjusting operation of the rotary head mechanism, showing a state in which the cathode plate is moved in a direction of separating it to the anode case side.

FIG. 8 shows a second embodiment of the electroforming apparatus according to the present invention,
It is a principal part side view explaining a rotary head mechanism part.

FIG. 9 shows a third embodiment of the electroforming apparatus according to the present invention,
It is a principal part side view explaining a rotary head mechanism part.

FIG. 10 is a schematic configuration diagram illustrating a configuration of a conventional electroforming apparatus.

[Explanation of symbols]

1 Electroforming equipment 7 Electroforming tank 9 Anode case (electroformed material) 10 rotating head mechanism 11 Rotating head member 12 cathode plate 13 Drive motor 18 head frame 19 Outer cylinder member 21 rotation axis 24 Glass master (electroformed member) 27 Rotation drive mechanism 30 rotating head support mechanism 32 Rotating head support block member 33 rotation spindle 34 Drive motor 40 Rotating head guide mechanism 41 keyway 42 Guide member 43 keyway 44 Parallel key member 45 set screw 50 Rotating head guide mechanism 51 Adjustment bolt 53 set colors 54 Adjustment bracket member

─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-4-183888 (JP, A) JP-A-7-29223 (JP, A) JP-A-6-195764 (JP, A) (58) Field (Int.Cl. ⁷ , DB name) C25D 1/00 G11B 7/26

Claims (5)

(57) [Claims] 1. An electroforming tank in which an electroformed material of an anode is arranged in an electroforming liquid circulated and supplied through a circulation device, and a cathode plate to which an electroformed material is attached is provided at one end thereof. A rotary head mechanism including a rotary head member including a rotary shaft and a rotary drive mechanism including a drive motor provided on a side opposite to the support side of the rotary shaft, and a rotary head member supporting and supporting the rotary head member on a device frame. It has a rotary head support block member that is rotatably mounted on a support shaft, and the rotary head mechanism rotates so that the cathode plate to which the electrocast material is attached is inserted into and removed from the electroforming tank. The rotating head support mechanism that causes the rotating head mechanism to move, and the moving head mechanism moves the rotating head mechanism relative to the rotating head support mechanism. The facing interval with the casting material A rotary head adjusting mechanism for adjusting, and a rotary head guide provided between the rotary head member and the rotary head supporting block member for guiding the rotary head member that is moved by the rotary head adjusting mechanism so as to be moved in the axial direction. An electroforming device equipped with a mechanism. 2. The rotary head adjusting mechanism includes an adjusting bolt screwed on a side surface of the rotary head supporting block member in a moving direction of the rotary head member, and fixed to the adjusting bolt in an axial direction. 2. The electroforming apparatus according to claim 1, comprising a set collar combined with the set collar, and an adjusting bracket member connecting the set collar and the rotary head mechanism. 3. A rotary head adjusting mechanism is mounted on a support bracket member provided on a rotary head support block member, and a piston rod whose tip is connected to the rotary head mechanism is moved forward and backward in parallel with the axial direction of the rotary head mechanism. The electroforming apparatus according to claim 1, wherein the electroforming apparatus is configured by a cylinder that allows the electroforming. 4. The rotary head adjusting mechanism is constituted by an adjusting screw which penetrates a screw hole provided in the rotary block member and which is parallel to the axial direction of the rotary head mechanism, and has a tip portion connected to the rotary head mechanism. The electroforming apparatus according to claim 1, characterized in that. 5. A rotary head guide mechanism is combined with a rotary head support block member, and a guide member formed with a key groove parallel to the axial direction of the rotary head mechanism,
5. The electroformed casting according to claim 1, wherein the rotary head support block member is constituted by a parallel key member incorporated so as to be engaged with a key groove provided in the rotary head support block member. apparatus.