JP3363705B2 - Method for producing Fe-Ni-based shadow mask sheet having excellent uneven streaks characteristics - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an Fe--FeO film having excellent linear streaks during etching and suitable for manufacturing a shadow mask used for a display device such as a color television or a personal computer. method for producing a Ni-based shadow mask thin plate relate. 2. Description of the Related Art Pure iron (aluminum-killed steel) has conventionally been used as a shadow mask material for a display device such as a color television or a personal computer. 36% by weight
A so-called invar alloy, which is an Fe-Ni alloy containing% Ni, is replacing aluminum-killed steel. This Invar alloy has the advantage that the coefficient of thermal expansion at room temperature is extremely lower than that of pure iron (aluminum-killed steel), and the position accuracy of the electron beam transmission holes formed in the shadow mask can be accurately maintained regardless of the temperature. Have [0003] The shadow mask material is required to have a high etching property for forming a precise electron beam transmitting hole. Recently, when an electron beam transmitting hole is formed by etching, fine stripe-shaped unevenness (hereinafter referred to as "streak unevenness") has become a problem due to a partial difference in etching state. As a method for suppressing such uneven streaks, Japanese Patent Application Laid-Open No. Hei 7-207415 discloses a method in which the amount of Mn is set to 5 × S (%) ≦ Mn.
A method of improving the etching property and reducing the streak pattern by controlling to ≦ 0.05% (S: sulfur%) has been proposed. Further, Japanese Patent Publication No. 7-78270 proposes a method in which the equiaxed crystal ratio is set to 30% or more, and a soaking treatment is performed at 950 ° C. for 1 hour or more to suppress uneven streaks. Japanese Patent Publication No. 7-116558 proposes a method of preventing the occurrence of unevenness by suppressing the segregation ratio of Si to 10% or less by a soaking process. [0004] The above-mentioned Japanese Patent Application Laid-Open No. Hei 7-2
No. 07415 and Japanese Patent Publication No. 7-116558 are intended to prevent the occurrence of uneven streaks at the time of etching drilling by suppressing the Mn content or the Si concentration segregation, respectively. Although it is effective in reducing the absolute amount of density unevenness, deoxidation during refining becomes difficult, and work that greatly affects the cost increase such as the use of carefully selected raw materials and vacuum refining is inevitable. Although the soaking method is effective, there is a problem that it takes too many steps to eliminate the segregated portion as it is. Fe-36% Ni
Fe with low thermal expansion characteristics such as invar alloy
-Since the Ni-based alloy is an austenitic single-phase alloy, the crystal grains tend to be coarsened during solidification from the molten metal, and the concentration of alloying elements and unavoidable impurity elements tends to fluctuate accordingly. Have. According to the study of the present inventor, the cause of the occurrence of uneven streaks corresponds to a portion where both Ni, which is a main element, and Mn, which is added or remains as an impurity, are streaked. And the fluctuation of the concentration of these elements, the fluctuation of the concentration of these elements during solidification,
It was presumed that it was stretched in the longitudinal direction by subsequent hot rolling and cold rolling to form a stripe-like concentration fluctuation region having a width of about 0.5 to 2 mm. The object of the present invention is to provide Fe-N
reducing the fluctuation of the concentrations of both Ni and Mn in the i-based alloy is to more reliably provide a method of manufacturing a shadow mask thin plate eliminates the occurrence of streak unevenness in the etching perforation. As described above, the present inventors have studied the relationship between the fluctuation of the concentration of Ni and Mn and the occurrence of streaks in order to improve the streaks characteristics of an Fe-Ni-based alloy. The study was focused on. In order to suppress the occurrence of such uneven streaks, the present inventors first set Ni and M
In addition to suppressing the fluctuation of the concentration of n to an extremely low level, it was found that the austenite grain size number in the microstructure should be 9 or more by annealing in a relatively low temperature range of 750 to 900 ° C. in the rolling step. The present invention has been reached. That is, it is not enough to increase the solidification rate and suppress the fluctuation of Ni and Mn as much as possible to suppress the appearance of streaks that appear for the first time due to the extremely subtle difference in etching and are visually judged.
The streaks can be eliminated only by minimizing the fluctuation of the grain size and increasing the grain boundaries in the structure as much as possible. [0007] That is, the present invention provides Ni 30-50.
%, Mn 0.01 to 0.5%, and a balance mainly composed of Fe, and obtained by rolling a strip cast to a thickness of 10 mm or less.
Fluctuations in the concentrations of Ni and Mn detected at 0 mm intervals indicate that N and M
i3% or less, equal to or less than Mn10%, crystal grains in the structure is to provide a method of manufacturing a Fe-Ni based shadow mask thin plate is austenite grain size number # 9 or more granules. In the present invention, a part of Ni is replaced by C
o It may be replaced by 10% or less. In the present invention, in order to suppress the fluctuation of the concentration of Ni and Mn to the level described above or less, as a specific method, a continuous casting method of a thin plate is applied, at a high solidification rate, and from the surface during solidification. It is effective to cool the inside as quickly as possible. That is, it has been found that it is effective to shorten the solidification distance from the surface to the center and to give a temperature gradient from the surface to the inside that is significantly larger than that of the conventional ingot making method. Further, as described above, after reducing the fluctuation of the concentration of Ni and Mn,
In the rolling process, it is necessary to perform an annealing process in a relatively low temperature range of 750 to 900 ° C. to reduce the austenite grain size number in the structure to 9 or more. In other words, the production method of the present invention uses Ni 30
-50%, Mn 0.01-0.5%, the balance being Fe or a portion of the Ni
A molten Fe-Ni alloy having a composition of 10% or less is cast into a strip having a thickness of 10 mm or less through a pair of rolls at a solidification rate of 160 ° C / sec or more, and then the strip is rolled to a predetermined thickness. a is obtained as, have rows streak suppression annealing process of adjusting the granules than the austenite grain size number # 9 at 750 ° C. to 900 ° C. at or the way after the rolling treatment, 10 on the rolling width direction of the sheet
Fluctuations in Ni and Mn concentrations detected at mm intervals
Is Ni for each baseline concentration
This is a method for producing an Fe—Ni-based shadow mask thin plate having excellent streak characteristics of 3% or less and Mn of 10% or less . Note that, in addition to the steps of the above-described manufacturing method, strain relief annealing may be performed in a temperature range of 500 to 750 ° C. after the final cold rolling. An important feature of the present invention is that the fluctuations in the concentrations of Ni and Mn detected at intervals of 10 mm in the rolling width direction of the thin plate are reduced with respect to the respective baseline concentrations by Ni3 and Ni3. % And Mn of 10% or less, a continuous casting method with a thickness of 10 mm or less that satisfies a solidification rate of 160 ° C./sec or more is applied, and a relatively low temperature range of 750 to 900 ° C. is applied to the subsequent rolling process. In that the austenite grain size number in the structure is reduced to 9 or more by annealing. For the purpose of the present invention to significantly improve the streaks characteristics, strip casting alone is not sufficient.
That is, in the present invention, rolling is performed in a state where fluctuations in the concentrations of Ni and Mn are greatly reduced in the casting of a strip, and the structure is fine and uniformly distributed in a relatively low temperature range (75%).
It has been found that when annealing is performed at 0 to 900 ° C., preferably 750 to 850 ° C.), uniform fine grains having an austenite grain size number of 9 or more can be obtained. When a conventional rolled material started from a steel ingot which is not strip cast is used, the influence of segregation at the time of the steel ingot appears, and even if annealing is performed in a low temperature range, uniform fine crystal grains can be obtained. No, it appears as a streak.
On the other hand, strip casting was carried out,
Even if controlling the fluctuation of the concentration, annealing at 900 ° C. or more at the stage of the rolling process results in coarsening of the austenite grain size or unevenness of the grain size due to unevenness in the stress during rolling, resulting in unevenness of the grain size. They appear as stripes. That is, in the manufacturing method of the present invention, the linear streaks are greatly reduced only in a specific combination between the important steps of solidification and annealing during rolling. 10mm
The continuous casting method for directly obtaining the following sheet thickness can shorten the solidification distance from the surface to the center, and is convenient for increasing the cooling rate at the center of the sheet thickness. Here, the upper limit of the plate thickness of 10 mm is that the solidification distance from the surface to the center becomes longer even if the plate is continuously cast to a plate thickness exceeding 10 mm, and the fluctuation of the concentrations of Ni and Mn cannot be sufficiently suppressed. That's why.
The term “baseline concentration” as used in the present invention refers to the concentration of a normal part which is confirmed by performing line analysis of Ni and Mn using an X-ray microanalyzer. Further, in the present invention, the concentration fluctuation was defined as the rolling width direction of the thin plate, streak is to present to extend in the longitudinal direction of rolling, be due convenient in detecting uneven streaks . The rolling step, which is another important part of the present invention, is performed after the pressure treatment or during the pressure treatment at a temperature of 750.degree.
This is to perform a streak suppressing annealing treatment at 00 ° C. to adjust the grain size to be smaller than the austenite grain size number 9. A temperature range of 750 to 900 ° C. was set as a temperature at which softening was possible and generation of streaks was prevented. More preferably, it is 750 ° C to 850 ° C. With this condition,
Fine grains of austenite grain size number 9 or more. When the crystal grains are refined, the crystal grain boundaries increase, and the influence of the crystal grain boundaries on the etching form increases, and the difference due to the difference in the components of the individual crystal grains due to the fluctuation of the concentration of Ni and Mn is not emphasized. In the case of the present invention, the use of a material having originally small fluctuations in the concentrations of Ni and Mn can significantly suppress the occurrence of uneven streaks as a synergistic effect. [0014] The processing strain when applying cold rolling is as follows.
Has the effect of promoting the diffusion of atoms during annealing and reducing the fluctuation of the concentration of Ni and Mn to a considerable extent;
It is desirable to carry out at least once or more to obtain the final thickness. More preferably, it is two or more times. In the present invention, after the cold working step described above, 500 to 75
Strain relief annealing can be performed in a temperature range of 0 ° C. Here, the reason why the temperature is set to 500 to 750 ° C. is to ensure a Vickers hardness of HV160 or more that does not cause recrystallization and can withstand handling as a shadow mask thin plate.
It is specified as an effective range for removing distortion. The Fe—Ni-based shadow mask sheet of the present invention can have a face-centered cubic lattice,
Ni is defined as 30 to 50% as a range that satisfies the low thermal expansion characteristic characteristic of the i-type alloy thin plate. That is, in the Fe-Ni binary system, if the Ni content is less than 30%, the structure of the face-centered cubic lattice from which low thermal expansion characteristics can be obtained cannot be obtained. On the other hand, if Ni exceeds 50%, the coefficient of thermal expansion increases, and low thermal expansion characteristics cannot be obtained. In the present invention, one of the characteristics is that Ni and Mn are concentrated together in a streak shape to prevent streaks generated.Ni is a main element and is reduced by selective selection and refining of raw materials like Mn. Not a target. Therefore, in the present invention, as a technique for preventing both Ni and Mn from being concentrated together, a continuous casting method is applied at 160 ° C./sec.
The above solidification speed is applied. Further, Mn defined in the present invention is an element causing stripe unevenness as described above. However, Mn is added as a deoxidizing element or Fe-
It is present in Ni-based alloys. Mn0.01 ~
0.5% is specified as below 0.01%.
If the refining cost is too high and exceeds 0.5%, the coefficient of thermal expansion increases and the bending workability deteriorates. Further, the Fe—Ni alloy which is a feature of the present invention contains Si or Al which is added mainly from the viewpoint of steel making or inevitably exists in addition to Ni , Mn and Fe. May be. If these are too large, they form inclusions that impair the etching properties. In addition, Co has a function of stabilizing the structure of the face-centered cubic lattice similarly to Ni, and can change the thermal expansion characteristic, so that Co can be replaced. However, since it is expensive and has a small thermal expansion up to 100 ° C., it is desirable to set the maximum to 10%. In the present invention, other elements can be added as long as the characteristics as a face-centered cubic lattice are maintained. For example, Cr, Ti, V, Nb,
Mo or the like may be selectively added in the range of 3 to 5% or less. The present invention will be described below with reference to examples. Fe-36% Ni alloy having the chemical components shown in Table 1, Fe
A melt of −31% Ni-5% Co alloy and Fe-42% Ni alloy was prepared, and a twin roll (roll pair) 3 shown in FIG.
The molten metal 1 is introduced into a continuous casting apparatus having a crucible 2 for holding the molten metal 1, and the gap between the rolls 3 is adjusted so that the sheet thickness is 7, 5, and 3 mm.
And a slab-shaped slab 4 of a comparative example having a plate thickness of 30 mm. The solidification rate of each slab was measured by observing the cross section of the slab 4 and measuring the secondary dendrite arm spacing, and the solidification rate was evaluated based on the secondary dendrite arm spacing of the sample whose solidification rate was actually measured. Table 2 shows the results. [Table 1] [Table 2] The first cold rolling (R) was performed on the obtained slab by applying the reduction (%) and temperature (° C.) shown in Table 2.
1)-1st annealing (A1)-2nd cold rolling (R2)-2nd
Annealing (A2) -final cold rolling (Rf) -strain relief annealing was performed to obtain a shadow mask material having a final thickness of 0.15 mm. Here, the annealing before Rf is a streak suppressing annealing process. "-" In the table indicates that the processing is not performed. As a comparative example, an annealing temperature before final cold rolling was set to 1000 ° C., and a shadow mask material having large crystal grains was manufactured. For a slab-shaped slab having a thickness of 30 mm manufactured as a comparative example, 10
Hot-rolling was performed at a temperature of 80 ° C. to form a hot strip having a thickness of 3 mm, and a shadow mask material having a final thickness of 0.15 mm was obtained in the steps shown in Table 2 in the same manner as in the example. The condition for applying the strain relief annealing is 650.
C. for 3 minutes. The plate thickness thus produced is 0.15 mm
Of the sample, the austenitic crystal grain size number (GS number) was evaluated by an electron microscope, and a line analysis of 10 mm was performed by an X-ray microanalyzer to determine the baseline concentrations of Ni and Mn and the Ni and Mn. Was determined. Then, the concentration fluctuation of Ni and Mn was evaluated by the following equation. Density displacement amount = density of concentrated portion−baseline concentration density fluctuation% = (density displacement amount / baseline concentration) × 1
FIG. 2 shows a typical example of line analysis in the rolling width direction using a Ni X-ray microanalyzer. As shown in FIG. 2, a portion showing the maximum displacement from the baseline of the analysis value by the X-ray microanalyzer was specified and defined as the concentration of the concentrated portion. Further, as shown in FIG. 3, a 0.15 mm plate (a) is removed by etching a third of the plate thickness with ferric chloride as shown in FIG. 3 (b), and the removed surface is shown in FIG. It was checked whether the uneven streaks 6 extended in the rolling direction could be visually confirmed. It should be noted that the uneven streaks confirmed in FIG. 4 correspond to the Ni and Mn enriched portions confirmed as shown in FIG. Table 2 summarizes these results. As is evident from Table 2 , the sample of the present invention to which the continuous casting method which secures the cooling rate of 160 ° C./sec or more specified in the present invention has fluctuations in the concentrations of Ni and Mn, respectively. It can be seen that a shadow mask material satisfying 3% or less of the concentration and 10% or less of the average concentration of Mn and having no streak by visual observation was obtained. On the other hand, in the comparative examples the cooling rate is not less than the 50 ° C. / sec, despite the application of hot rolling, Ni and Mn
In both cases, a large concentration fluctuation was confirmed as compared with the present invention.
Then, streaks were visually confirmed, and the shadow mask material was defective. Further, even when the cooling rate is increased, in the structure in which the annealing temperature is high and the crystal grain number is small, that is, in a structure having coarse crystal grains, uneven streaks are observed, which is not preferable. According to the present invention, it is possible to eliminate uneven streaks at the time of perforation by etching of a shadow mask, thereby ensuring high quality of the shadow mask, but also improving yield and manufacturing. This is very effective for a shadow mask material which brings a great effect such as a reduction in man-hours and is expected to have higher precision in the future.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram showing an outline of a continuous casting apparatus. FIG. 2 is a diagram showing an example of a line analysis of Ni in a striped portion. FIG. 3 is a diagram showing a linear unevenness evaluation method. FIG. 4 is a diagram illustrating a form of occurrence of uneven streaks.

Continuing from the front page (72) Inventor Kokichi Mitsuku 6010, Sankajiri, Kumagaya-shi, Saitama Prefecture Hitachi Metals, Ltd. 56) References JP-A-62-120432 (JP, A) JP-A-2-54743 (JP, A) JP-A-4-120251 (JP, A) JP-B-5-70686 (JP, B2) (58) ) Surveyed field (Int.Cl. ⁷ , DB name) C21D 9/46 C22C 38/00 302 C22C 38/08 C22C 38/14 C22C 38/32

Claims (1)

(57) [Claims 1] Ni 30-50%, Mn 0.01-
0.5%, or has a composition mainly the remainder Fe, or Fe-Ni based alloy melt having a composition a part was replaced by Co 10% or less of the Ni through between roll pairs 16
Casting into a strip having a thickness of 10 mm or less at a solidification rate of 0 ° C./sec or more, and then obtaining a predetermined thickness by a rolling process at a rolling speed of 750 ° C. to 900 ° C. There <br/> rows streak suppression annealing process of adjusting the granules than the austenite grain size number # 9, is detected at intervals of 10mm on the rolling width direction of the sheet
Fluctuations in the concentration of Ni and Mn
Ni 3% or less, Mn 1
A method for producing an Fe-Ni-based shadow mask thin plate having excellent streak characteristics, characterized by being at most 0% .