JP3358578B2 - Twist angle, cell gap and azimuth angle anchoring measuring device, measuring method and storage medium storing program - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a twist angle, a cell gap, and an azimuth anchor for measuring an azimuth anchoring energy from data obtained by measuring a twist angle and a cell gap which are basic characteristics of a liquid crystal cell. The present invention relates to a ring measurement device, a measurement method, and a storage medium storing a program.

[0002]

2. Description of the Related Art A liquid crystal display device using a nematic liquid crystal element has been widely used in a liquid crystal display which has recently attracted attention as a next-generation display device. As this liquid crystal display device, a device having a twisted nematic (TN) structure or a super twisted nematic (STN) structure is mainly used. In this twisted nematic (TN) structure, the alignment state of the direction (director) of long liquid crystal molecules lying parallel to the glass substrate between the upper glass substrate and the lower glass substrate is as follows.
It is configured to be twisted exactly 90 degrees. In addition, the super twisted nematic (STN) structure is arranged so that the orientation state of the direction of the liquid crystal molecules (director) is twisted about 230 degrees between the upper glass substrate and the lower glass substrate in order to perform fine liquid crystal display. Make up. A method of driving the liquid crystal display device configured as described above by controlling the switching of the potential between the substrates using the switching element is mainly used.

The twisted nematic (TN) structure or super twisted nematic structure (S
The optical characteristics of the liquid crystal display according to TN) are determined by the refractive index anisotropy (Δn), the cell gap (d), and the twist angle.

[0004] The refractive index anisotropy is defined as the difference between the refractive index of a liquid crystal material constituting a twisted nematic (TN) structure or a super twisted nematic (STN) structure for ordinary light and that for extraordinary light. The cell gap (d) is defined as the thickness of a liquid crystal layer injected between glass substrates having a twisted nematic (TN) structure or a super twisted nematic (STN) structure, and is usually set to 10 μm or less. is there. The twist angle is defined as the difference between the azimuth φA that the liquid crystal can take on the light-entering glass substrate constituting the liquid crystal layer and the azimuth φB that the liquid crystal can take on the light-emitting glass substrate.

Among them, the refractive index anisotropy is an amount uniquely determined by the material constituting the liquid crystal. The twist angle and the cell gap are amounts that vary among products manufactured individually. Furthermore, the twist angle largely depends on the azimuthal anchoring strength, which is the interaction between the liquid crystal molecules and the alignment film surface for aligning the liquid crystal molecules in a certain direction. Accurate determination of the azimuthal anchoring strength is an extremely important point in controlling the orientation of the liquid crystal.

As for the method of measuring the cell gap and the twist angle, Japanese Patent No. 2565147 discloses a method of measuring them simultaneously. Further, a method of obtaining the azimuthal anchoring energy from the twist angle and the cell gap has been introduced by, for example, Sun et al. Of the Chinese Academy of Sciences (Molecular Crystals and Liquid.
Crystals, 1995, 265, 335).

Here, a conventional method will be described with reference to FIG. First, as shown in FIG. 22, a liquid crystal cell 103 as a test object is placed between a polarizer 102 and an analyzer 104, and the liquid crystal cell 103 is configured to be rotatable to determine an azimuth. And then the polarizer 102 or the analyzer 10
By rotating any one of 4, the transmitted light intensity is measured by the light receiver 105. The cell gap and the twist angle are calculated based on the change in transmitted light intensity corresponding to the rotation angle (rotation at a predetermined angular velocity) of either the polarizer 102 or the analyzer 104 at this time. The details of this procedure will be described below.

The light emitted from the light source 101 is the polarizer 1
After being polarized in a predetermined direction by 02, the polarized light enters the liquid crystal cell 103 and is rotated by the liquid crystal. afterwards,
The transmitted light intensity of the light detected by the analyzer 104 is detected by the light receiver 105. The orientation direction of the liquid crystal on the incident side of the liquid crystal cell 103 is inclined by x ° with respect to the polarization angle of the polarizer 102, and the polarization angle of the analyzer 104 is
Assuming that the light is inclined by y ° with respect to the polarization angle of 02, the state of the transmitted light at this time is represented by the following equation using a Jones matrix.

[0009]

(Equation 1)

In this Jones matrix, a and b are represented by the following equations. A * and b * are a and b, respectively.
Is a complex conjugate of.

[0011]

(Equation 2)

However,

[0013]

(Equation 3)

As shown in the above equation, Δn indicates the refractive index anisotropy of the liquid crystal, Θ indicates the twist angle, d indicates the cell gap, and λ indicates the wavelength of the incident light. Ex and Ey are Jones vectors of the light incident on the polarizer 102, and E
x ′ and Ey ′ are Jones vectors of the transmitted light emitted from the analyzer 104. From the above equation, the transmitted light intensity is represented by the following equation.

[0015]

(Equation 4)

Here, f, g, and h are represented by the following equations, respectively.

[0017]

(Equation 5)

Therefore, when the liquid crystal cell 103 is rotated with y = 0 from the above equation, the transmitted light intensity takes the maximum value under the following conditions.

[0019]

(Equation 6)

Here, n is an integer. Further, under the following conditions, the transmitted light intensity takes a minimum value.

[0021]

(Equation 7)

The rotation of the liquid crystal cell 103 is fixed when the angle at which the intensity of the transmitted light in the light receiver 105 becomes maximum or minimum, that is, when the angle formed by the polarization angle of the polarizer 102 becomes Xmax or Xmin. Liquid crystal cell 103
Can be determined in any case, but the subsequent measurement can be performed in substantially the same manner. Therefore, in the following, the azimuth of the liquid crystal cell 103 is set so that the transmitted light intensity is maximized. A description will be given based on the case.

The azimuth of the liquid crystal cell 103 is determined by searching for the maximum value or the minimum value in a state where the polarizer 102 and the analyzer 104 are parallel to each other. Is not necessarily required to be 0 ° as long as its value is known. However, considering the ease of determining the angle and the simplicity of calculation,
Since it is more preferable to set the angle to 0 ° or 90 °, here, an example employing 0 ° is shown.

After fixing the azimuth of the liquid crystal cell 103 at a position where the transmitted light intensity in the light receiver 105 is maximized, the analyzer 104 is rotated to measure the transmitted light intensity. The transmitted light intensity at this time is obtained by the following equation.

[0025]

(Equation 8)

From this equation, the azimuth (y) of the analyzer 104 can be obtained.
When the measurement is performed while changing the
It can be seen that the component that changes with s2y and the component that changes with sin2y can be considered as being divided into constant components. The ratio TC / T0 between the coefficients T0, TC, and TS of these components.
And Ts / T0 can be obtained from the measurement results. From the above equation, the two ratios are determined by the cell gap and the twist angle. Therefore, conversely, the ratios TC / T0 and TS /
The cell gap and the twist angle can be determined from T0.

Next, the calculation of the azimuth anchoring energy will be described. The free energy density in the liquid crystal cell 103 is represented by the following equation by the sum of the elastic energy density and the surface energy density of the liquid crystal.

[0028]

(Equation 9)

Where

[0030]

(Equation 10)

[0031]

[Equation 11]

[0032] K ₂₂ twist elastic constant, d is the cell gap, E _T is the azimuthal anchoring energy, Pusaiesu the deviation angle from the rubbing direction of the liquid crystal director (orientation direction) of the alignment film surface, theta is the twist angle is there. The relationship between the twist angle Θ and the shift angle ψs of the liquid crystal director (direction of orientation) on the alignment film surface from the rubbing direction is represented by the following equation.

[0033]

(Equation 12)

Here, Ψ _r is the angle between the rubbing directions of the glass substrates on the light input side and the light output side of the liquid crystal cell 103. The liquid crystal director in the liquid crystal cell 103 is oriented in a direction in which the free energy density is minimized, that is,

[0035]

(Equation 13)

Therefore,

[0037]

[Equation 14]

Thus, the azimuthal anchoring energy can be obtained by the above equation.

The above is the conventional method for determining the twist angle, cell gap, and azimuth anchoring.

[0040]

However, with the recent increase in the size of liquid crystal cells, conventional twist angle, cell gap and azimuth angle anchoring measuring devices use a photodetector by rotating the liquid crystal cell. Since the twist angle, the cell gap, and the azimuth anchoring energy are calculated based on the detected transmitted light intensity, there is a problem that the entire measuring apparatus must be enlarged.

Further, as the size of the liquid crystal cell increases, uniformity of each characteristic on the display surface of the liquid crystal cell becomes a problem.
There is a problem that demands for in-plane distribution measurement of liquid crystal cells are increasing.

However, in the twist angle, cell gap and azimuth anchoring measuring apparatus shown in the above-mentioned conventional example, since the twist angle, self-cap and azimuthal anchoring are measured by rotating the liquid crystal cell, the liquid crystal cell is not used. There is a first problem that as the size increases, the measurement apparatus itself increases in size.

Also, the twist angle shown in the above conventional example,
In the cell gap and azimuth anchoring measurement device, since the relative positional relationship between the liquid crystal cell, the measurement device, and the optical axis was not configured to be changeable, the twist angle in the display surface of the liquid crystal cell, the cell gap, and the like. There is a second problem that the in-plane distribution of the azimuthal anchoring energy cannot be measured.

Further, in the twist angle, cell gap and azimuth angle anchoring measuring devices shown in the above-mentioned conventional example, the measurement accuracy is reduced because the influence of the reflected light from the liquid crystal cell and the analyzer is not taken into account. There is a third problem.

A first object of the present invention is to cope with an increase in the size of a liquid crystal cell as an object to be inspected, without increasing the size of the measuring apparatus itself, without changing the twist angle, cell gap and orientation in the display surface of the liquid crystal cell. It is an object of the present invention to provide a twist angle, cell gap and azimuth angle anchoring measuring device capable of measuring angular anchoring energy, a measuring method, and a storage medium storing a program.

A second object of the present invention is to provide a twist angle for measuring the twist angle, the cell gap and the in-plane distribution of azimuthal anchoring on the display surface of a liquid crystal cell as a test object. An object of the present invention is to provide a cell gap and azimuth anchoring measuring device, a measuring method, and a storage medium storing a program.

Further, a third object of the present invention is to provide a twist angle and a cell gap which can improve the measurement accuracy of the twist angle, the cell gap and the azimuth angle anchoring on the display surface of a liquid crystal cell as a test object. And an azimuth anchoring measurement device, a measurement method, and a storage medium storing a program.

[0048]

In order to solve the above-mentioned problems, the invention according to the first aspect of the present invention is directed to a light source having at least a predetermined wavelength.
A light source that emits light and a predetermined
Polarizer for extracting polarized light and where it is extracted by the polarizer
A liquid crystal cell that transmits a certain amount of polarized light and performs optical rotation;
Analyzer that detects over-light and transmission that is analyzed by the analyzer
A receiver that receives light and measures transmitted light intensity, and a receiver
Twist of the liquid crystal cell based on the measured transmitted light intensity
Angle and cell gap and the determined twist
Angle and azimuthal anchoring using the cell gap.
Having a control unit for controlling the operation, the polarizer and the analyzer,
Each independently, it is configured to be rotatable around the optical axis,
Control unit controls the rotation of the polarizer and analyzer
When the liquid crystal cell is configured to be rotatable about the optical axis,
Both can move freely in a plane perpendicular to the optical axis
At all points on the display surface of the liquid crystal cell.
By measuring the light intensity, the in-plane distribution of the liquid crystal cell characteristics can be determined.
It is characterized by measuring a cloth state.

According to a second aspect of the present invention, in the first aspect of the present invention, the control unit determines a transmission axis between the polarizer and the analyzer.
Rotate to a fixed angle, and with a polarizer from a predetermined angle
Measured by the receiver while synchronizing the rotation with the analyzer
Rotate to the angle where the transmitted light intensity is maximum or minimum, and
Polarizer or polarizer from the angle where the light intensity is maximum or minimum
Rotate one of the analyzers at a predetermined angular velocity.
It is characterized by controlling.

According to a third aspect of the present invention, at least a predetermined
A light source that emits light of a wavelength and light emitted by the light source
Polarizer that takes out predetermined polarized light from
Equivalent to 倍 times the polarized light given
A half-wave plate that transmits by giving a phase difference, and a half-wave plate
Liquid crystal cell that rotates by the transmitted light of the liquid crystal and the transmitted light of the liquid crystal cell
And the transmitted light detected by the analyzer.
A receiver that receives and measures the transmitted light intensity and a receiver
Twist angle of liquid crystal cell based on measured transmitted light intensity
And the determination of the cell gap and the determined twist angle and
And calculation of azimuth anchoring using the cell gap
And a controller for controlling the polarizer, the half-wave plate, and the detector.
Each photon can rotate independently of the optical axis
The control unit includes a polarizer, a half-wave plate, and an analyzer.
Controls each of the rotation of the child, the liquid crystal cell, around the optical axis
And a plane perpendicular to the optical axis.
It is configured so that it can move freely in the plane, and displays liquid crystal cells
By measuring the transmitted light intensity at all points in the plane
Measurement of in-plane distribution of liquid crystal cell characteristics
And

The invention according to claim 4 is the invention according to claim 3.
In the description, the control unit determines the transmission axis of the polarizer and the analyzer.
Rotate to a certain angle, and 波 wave from a certain angle
While maintaining the rotation angle ratio between the long plate and the analyzer at 1: 2,
From the maximum or minimum transmitted light intensity measured by the receiver
Rotate in the same direction or the opposite direction up to an angle
Polarizer or analyzer from maximum or minimum angle
Is controlled to rotate either of them at a predetermined angular velocity
It is characterized by the following.

According to a fifth aspect of the present invention, at least a predetermined
A light source that emits light of a wavelength and light emitted by the light source
Polarizer that takes out predetermined polarized light from
Liquid crystal cell that transmits and rotates predetermined polarized light, and liquid crystal
A position corresponding to half of the transmitted light of the cell
A half-wave plate that transmits by giving a phase difference, and a half-wave plate
An analyzer that detects transmitted light, and a transmittance that is detected by the analyzer.
A receiver that receives transmitted light and measures transmitted light intensity, and a receiver
Of the liquid crystal cell based on the transmitted light intensity measured by
Determination of strike angle and cell gap and the determined twist
Azimuth anchoring using the angle and the cell gap
And a control unit for controlling the operation of the polarizer and the half-wavelength.
The plate and the analyzer rotate independently around the optical axis
The control unit comprises a polarizer, a half-wave plate and
The liquid crystal cell controls the rotation of the
Around the optical axis.
The liquid crystal cell is configured to be movable in a free direction in a straight plane.
Measure the transmitted light intensity at all points on the display surface of
By measuring the in-plane distribution state of the liquid crystal cell characteristics by
It is characterized by.

The invention according to claim 6 is the invention according to claim 5.
In the description, the control unit determines the transmission axis of the polarizer and the analyzer.
Rotate to a certain angle, and 波 wave from a certain angle
Rotation between the long plate and either the polarizer or the analyzer is 1: 2
Transmitted light measured by the receiver while maintaining the rotation angle ratio of
Same direction or up to the angle where the strength is maximum or minimum
Angle at which the transmitted light intensity is maximized or minimized
Either the polarizer or the analyzer at a given angular velocity
It is characterized by being controlled to move.

According to a seventh aspect of the present invention, at least a predetermined
A light source that emits light of a wavelength and light emitted by the light source
Polarizer that takes out predetermined polarized light from
Equivalent to 倍 times the polarized light given
A first half-wave plate that transmits by giving a phase difference;
A liquid crystal cell that rotates by the transmitted light of a half-wave plate, and a liquid crystal
A position corresponding to half of the transmitted light of the cell
A second half-wave plate transmitting by giving a phase difference;
The analyzer that analyzes the transmitted light of the half-wave plate and the analyzer
Receiving light that receives the analyzed transmitted light and measures the transmitted light intensity
And the liquid based on the transmitted light intensity measured by the receiver.
Of twist angle and cell gap of crystal cell and its determination
Azimuth angle using the determined twist angle and the cell gap
A control unit for controlling an anchoring operation, and a polarizer
, A first half-wave plate, a second half-wave plate, and an analyzer
Are independently rotatable about the optical axis.
The control unit includes a polarizer, a first half-wave plate, and a second half-wave plate.
The rotation of each of the half-wave plate and the analyzer is controlled,
The crystal cell is configured to be rotatable around the optical axis,
Configurable to move freely in a plane perpendicular to the optical axis
Transmitted light intensity at all points on the display surface of the liquid crystal cell.
The in-plane distribution of liquid crystal cell characteristics
Is measured.

The invention according to claim 8 provides the invention according to claim 7.
In the description, the control unit determines the transmission axis of the polarizer and the analyzer.
Rotate to a predetermined angle, and from the predetermined angle to the first 1
Do not synchronize the rotation of the half-wave plate and the second half-wave plate.
Maximum or minimum transmitted light intensity measured by the receiver
The same direction or the opposite direction until the angle
The first half wavelength from the angle where the intensity is maximum or minimum
Plate, second half-wave plate, polarizer, analyzer
Is controlled to rotate at a predetermined angular velocity.
And

According to the ninth aspect of the present invention, at least a predetermined
Light source for emitting light having a wavelength, and light emitted by the light source
And a polarizer for extracting predetermined polarized light from the
A liquid crystal cell that transmits a predetermined polarized light that is emitted and rotates the light,
An analyzer for analyzing the transmitted light of the liquid crystal cell;
To receive transmitted light that has been detected and measure the transmitted light intensity.
Based on the optical device and the transmitted light intensity measured by the light receiver
To determine the twist angle and cell gap of the liquid crystal cell
Using the determined twist angle and the cell gap
A control unit for controlling the operation of the angle anchoring.
Measurement device for ist angle, cell gap and azimuth anchoring
Measurement method, and the transmission axis between the polarizer and the analyzer is
A first rotation step of rotating to a fixed angle, and a light source
An emission step of emitting light of a predetermined wavelength from the
Polarized light that takes out predetermined polarized light from the emitted light with a polarizer
Process and the predetermined polarized light extracted in the polarization process
A light-irradiation step for rotating the liquid crystal cell and a liquid-crystal cell by the light-irradiation step.
Analysis process to analyze the transmitted light of the
Received by the receiver and the transmitted light intensity
Measuring the degree of transparency and the permeability measured in the measuring step.
Polarizer and analyzer up to the angle where the light intensity is at the maximum or minimum
A second rotation step of rotating while synchronizing with the child;
From the angle where the light intensity is maximum or minimum,
A third rotating mechanism for rotating any of the photons at a predetermined angular velocity
And the third rotation step, whether a polarizer or an analyzer
When it is rotated at a predetermined angular velocity, it is received by the receiver.
From the transmitted light intensity, the twist angle and cell
A first calculating step of calculating the gap, and a first calculating step.
Using the twist angle and cell gap calculated by
Calculation to calculate the azimuthal anchoring of the liquid crystal cell
Out of the liquid crystal cell and the optical axis of the light emitted from the light source.
Rotate around the heart and / or move in a plane perpendicular to the optical axis
Rotating / moving step.
Moving the liquid crystal cell in a plane perpendicular to the optical axis
To measure the transmitted light intensity at all points in the display surface
This makes it possible to measure the in-plane distribution of liquid crystal cell characteristics.
And features.

According to a tenth aspect of the present invention, at least a predetermined
A light source for emitting light having a wavelength of, emitted by the light source
A polarizer that extracts predetermined polarized light from light, and the polarizer
For the given polarized light extracted, half the phase of the polarized light
A half-wave plate that transmits by giving a difference,
Liquid crystal cell rotating by transmitted light and transmitted light of the liquid crystal cell
And transmitted light detected by the analyzer.
And a receiver for measuring transmitted light intensity by receiving light
Twist of the liquid crystal cell based on the measured transmitted light intensity
Angle and cell gap and the determined twist
Angle and azimuthal anchoring using the cell gap.
And a control unit for controlling the operation.
And azimuth anchoring measurement equipment.
So that the transmission axis between the polarizer and the analyzer is at a predetermined angle.
A first rotation step of rotating the light source, and light of a predetermined wavelength from the light source.
And the polarization of the light emitted from the light source
Polarization process to take out predetermined polarized light by
Rotates the liquid crystal cell with the predetermined polarized light extracted
An analyzer that analyzes the light transmitted through the liquid crystal cell
The light is analyzed by the light detection step and the light detection step
Measuring system that measures transmitted light intensity by receiving transmitted light with a receiver
The transmitted light intensity measured by the measurement process
Is a 1: 2 ratio of the half-wave plate and the analyzer to the minimum angle.
Rotate in the same direction or opposite direction while maintaining the rotation angle ratio of
A second rotating step, and a step of determining whether the transmitted light intensity is maximum or minimum.
Either polarizer, analyzer or half-wave plate from a certain angle
Rotating at a predetermined angular velocity, and a third rotating step.
Any of polarizer, analyzer, and half-wave plate depending on the moving process
Is rotated by a predetermined angular velocity,
Twist angle of liquid crystal cell and cell
A first calculating step of calculating the gap, and a first calculating step.
Using the twist angle and cell gap calculated from
Second calculation step for calculating the azimuth anchoring of the liquid crystal cell
Around the optical axis of the light emitted from the light source
Rotate and / or move in a plane perpendicular to the optical axis
Rotating / moving step, and the liquid crystal is
By moving the cell in a plane perpendicular to the optical axis,
To measure the transmitted light intensity at all points in the display surface
Measurement of the in-plane distribution of liquid crystal cell characteristics.
Sign.

According to the eleventh aspect of the present invention, at least a predetermined
A light source for emitting light having a wavelength of, emitted by the light source
A polarizer that extracts predetermined polarized light from light, and the polarizer
Liquid crystal cell that emits light by passing the extracted polarized light
And に 対 し て of the transmitted light of the liquid crystal cell
A half-wave plate that transmits by providing a corresponding phase difference,
Analyzes transmitted light given a phase difference by a half-wave plate
Receiving an analyzer and the transmitted light analyzed by the analyzer;
A receiver for measuring the intensity of transmitted light, and
Twist angle of the liquid crystal cell based on the transmitted light intensity
Cell gap determination and the determined twist angle and the
Control azimuth anchoring calculation using cell gap
Angle, cell gap and direction with control unit
A method for measuring an angle anchoring measurement device, comprising: a polarizer
Rotates the transmission axis between the analyzer and the analyzer so that it has a predetermined angle.
First rotating step, and emitting light of a predetermined wavelength from the light source
The emission process and the light emitted from the light source
Polarization process to take out fixed polarized light and take out by polarization process
Light application step of rotating the liquid crystal cell with the given polarized light
And the transmitted light of the liquid crystal cell in the light application process is detected by the analyzer.
The transmitted light detected in the light detection step and the light detection step
A measuring process of measuring the transmitted light intensity by receiving light with a receiver,
The transmitted light intensity measured by the
A half-wave plate and a polarizer are rotated at a rotation angle of 1: 2 to a certain angle.
Second rotating in the same or opposite direction while maintaining the ratio
Rotation angle and the angle at which the transmitted light intensity is maximum or minimum
From the polarizer, analyzer, half-wave plate
A third rotation step of rotating at an angular velocity and a third rotation step
More polarizer, analyzer, half-wave plate
Transmitted light received by the receiver when rotated at angular velocity
Calculate twist angle and cell gap of liquid crystal cell from intensity
A first calculating step to be performed and a first calculating step.
Liquid crystal cell using the twist angle and cell gap
A second calculation step for calculating azimuth anchoring;
Rotating the cell about the optical axis of the light emitted from the light source and / or
Or rotation / movement moving in a plane perpendicular to the optical axis
A liquid crystal cell by a rotation / movement process.
By moving in a plane perpendicular to the
By measuring the transmitted light intensity at all points,
The in-plane distribution state of the cell characteristics is measured.

According to a twelfth aspect of the present invention, at least a predetermined
A light source for emitting light having a wavelength of, emitted by the light source
A polarizer that extracts predetermined polarized light from light, and the polarizer
For the extracted polarized light, the phase becomes half the polarized light.
A first half-wave plate that transmits by providing a corresponding phase difference;
Transmitted light given a phase difference by the first half-wave plate
Liquid crystal cell, and the transmitted light of the liquid crystal cell
To give a phase difference equivalent to 1/2 of the transmitted light
A second half-wave plate, and the second half-wave plate
An analyzer for analyzing transmitted light having a phase difference, and the analyzer
The transmitted light detected by the probe is received and the transmitted light intensity is measured.
And the transmitted light intensity measured by the receiver
Of twist angle and cell gap of liquid crystal cell based on
Using the determined twist angle and the cell gap
And a control unit for controlling the azimuth anchoring calculation.
Twist angle, cell gap and azimuth anchoring
A measuring method of a measuring device, wherein a transmission between a polarizer and an analyzer is performed.
First rotation step of rotating the shaft to a predetermined angle
An emission step of emitting light of a predetermined wavelength from a light source;
The polarized light is extracted from the light emitted from the source by a polarizer.
Polarization process and the predetermined polarization extracted by the polarization process.
A light application step of rotating the liquid crystal cell with light, and a light application step.
Analysis process for analyzing the transmitted light of a liquid crystal cell with an analyzer
And the transmitted light detected by the light detection process
Measuring the transmitted light intensity using the
Until the specified transmitted light intensity reaches the maximum or minimum.
Do not synchronize the first half-wave plate and the second half-wave plate.
A second rotation step of rotating the light,
Is the first half-wave plate, the second 1 /
One of a two-wave plate, polarizer, and analyzer at a predetermined angular velocity
A third rotating step of rotating and a first rotating step
Half-wave plate, second half-wave plate, polarizer, analyzer
Is rotated by the receiver when any of
The twist angle of the liquid crystal cell and the
A first calculating step for calculating the cell gap and the cell gap;
Twist angle and cell gap calculated by the output process
To calculate the azimuthal anchoring of the liquid crystal cell using
Calculation process and the optical axis of the light emitted from the light source through the liquid crystal cell
Around a center and / or in a plane perpendicular to the optical axis
Moving / rotating / moving step.
Move the liquid crystal cell in a plane perpendicular to the optical axis.
And measure the transmitted light intensity at all points on the display surface.
The in-plane distribution of the liquid crystal cell characteristics
It is characterized by the following.

According to a thirteenth aspect of the present invention, at least a predetermined
A light source that emits light of a wavelength of
A polarizer that extracts predetermined polarized light from light, and the polarizer
A liquid crystal cell that transmits the extracted polarized light and rotates it.
An analyzer for detecting the transmitted light of the liquid crystal cell; and the analyzer.
Receives the transmitted light detected by the analyzer and measures the transmitted light intensity.
Based on the transmitted light intensity measured by the receiver.
Of Twist Angle and Cell Gap of Liquid Crystal Cell
And the determined twist angle and the cell gap
Control unit for controlling the calculation of the azimuth anchoring
Twist angle, cell gap and azimuth anchoring measurements
Storage medium storing the program of the
Rotate the transmission axis between the analyzer and analyzer so that it is at a predetermined angle.
A first rotation process, and emitting light of a predetermined wavelength from the light source.
Injection process and the light emitted from the light source
Polarization processing to take out predetermined polarized light and polarization processing
Lighting treatment to rotate the liquid crystal cell with the given polarized light
Light transmitted through the liquid crystal cell
Light analysis processing and transmitted light detected by the light analysis processing
A measurement process of measuring the transmitted light intensity by receiving light with a receiver and measuring
Is the maximum or minimum transmitted light intensity
Rotate while synchronizing the polarizer and analyzer to a certain angle
A second rotation process, and the transmitted light intensity becomes maximum or minimum.
The polarizer or analyzer at a given angular velocity
A third rotation process that rotates by degrees, and a third rotation process.
Rotate either the polarizer or the analyzer at a given angular velocity
From the transmitted light intensity received by the
Calculation for calculating the twist angle and cell gap of the
Output processing and the twist angle calculated by the first calculation processing
Angle anchorage of liquid crystal cell by using
Calculation processing for calculating the liquid crystal cell and the liquid crystal cell from the light source.
The emitted light rotates around the optical axis and / or
And rotate / move processing to move in a vertical plane
And the liquid crystal cell is perpendicular to the optical axis by the rotation / movement processing.
Moving in a simple plane, all points on the display surface
By measuring the transmitted light intensity, the characteristics of the liquid crystal cell can be improved.
Characterized by storing a program for measuring the distribution state
And

According to a fourteenth aspect of the present invention, at least a predetermined
A light source for emitting light having a wavelength of, emitted by the light source
A polarizer that extracts predetermined polarized light from light, and the polarizer
For the given polarized light extracted, half the phase of the polarized light
A half-wave plate that transmits by giving a difference,
Liquid crystal cell rotating by transmitted light and transmitted light of the liquid crystal cell
And transmitted light detected by the analyzer.
And a receiver for measuring transmitted light intensity by receiving light
Twist of the liquid crystal cell based on the measured transmitted light intensity
Angle and cell gap and the determined twist
Angle and azimuthal anchoring using the cell gap.
And a control unit for controlling the operation.
And a program for the azimuth anchoring measurement device.
Storage medium that has the transmission axis between the polarizer and the analyzer
A first rotation process of rotating to a predetermined angle;
An emission process for emitting light of a predetermined wavelength from a source, and
Polarization to extract predetermined polarized light from the emitted light with a polarizer
Light processing and the predetermined polarized light extracted by the polarization processing.
Light treatment to rotate the liquid crystal cell and the liquid crystal by the light treatment
Analysis processing for analyzing the transmitted light of the cell with an analyzer, and analysis
The transmitted light detected by the processing is received by the receiver and the transmitted light
Measurement process to measure the strength, measured by the measurement process
1/2 wavelength up to the angle where the transmitted light intensity is maximum or minimum
Plate and analyzer are the same while maintaining the rotation angle ratio of 1: 2
A second rotation process of rotating in the opposite or opposite direction,
Polarizer, analyzer, 1
A third method of rotating one of the half-wave plates at a predetermined angular velocity
By the rotation processing and the third rotation processing, the polarizer, the analyzer,
When one of the half-wave plates is rotated at a predetermined angular velocity
From the intensity of the transmitted light received by the receiver,
First calculation processing for calculating strike angle and cell gap
And the twist angle calculated by the first calculation process and
Azimuthal anchoring of liquid crystal cell using cell gap
A second calculation process for calculating the liquid crystal cell emitted from the light source;
About the optical axis of the light to be reflected and / or perpendicular to the optical axis.
Rotation / movement processing for moving in a straight plane,
The liquid crystal cell is placed in a plane perpendicular to the optical axis by moving / moving
Moving within the screen, transmission at all points on the display surface
By measuring the light intensity, the in-plane distribution of the liquid crystal cell characteristics
A program for measuring a state is stored.
You.

According to a fifteenth aspect of the present invention, at least a predetermined
A light source for emitting light having a wavelength of, emitted by the light source
A polarizer that extracts predetermined polarized light from light, and the polarizer
Liquid crystal cell that emits light by passing the extracted polarized light
And に 対 し て of the transmitted light of the liquid crystal cell
A half-wave plate that transmits by providing a corresponding phase difference,
Analyzes transmitted light given a phase difference by a half-wave plate
Receiving an analyzer and the transmitted light analyzed by the analyzer;
A receiver for measuring the intensity of transmitted light, and
Twist angle of the liquid crystal cell based on the transmitted light intensity
Cell gap determination and the determined twist angle and the
Control azimuth anchoring calculation using cell gap
Angle, cell gap and direction with control unit
Memory storing the program of the angle anchoring measurement device
Medium, the transmission axis of the polarizer and the analyzer is set at a predetermined angle
A first rotation process of rotating so that
Emission processing that emits light of a wavelength of
A polarization process of extracting predetermined polarized light from the light by a polarizer,
Liquid crystal cell with predetermined polarized light extracted by polarization processing
Light treatment to rotate the light and transmission of the liquid crystal cell by the light treatment
Light analysis with light analyzer and light analysis with light
Receives the analyzed transmitted light with a receiver and measures the transmitted light intensity
Measurement process and transmitted light intensity measured by the measurement process
Half-wave plate and polarizer up to the angle at which the maximum or minimum is obtained
And the same direction or opposite while maintaining a rotation angle ratio of 1: 2
The second rotation process in which the transmitted light intensity is maximized.
Or polarizer, analyzer, half-wave plate from minimum angle
Rotation processing for rotating any one of the above at a predetermined angular velocity
And a third rotation process, a polarizer, an analyzer, and a half wavelength
When one of the plates is rotated at a predetermined angular velocity
From the transmitted light intensity received from the
And a first calculation process for calculating a cell gap and a first
Twist angle and self-gap calculated by the calculation process
Calculation of azimuth anchoring of liquid crystal cell using
2 and the light emitted from the light source through the liquid crystal cell
Rotation about an axis and / or in a plane perpendicular to the optical axis
Is executed, and the rotation / movement process is performed.
The liquid crystal cell in a plane perpendicular to the optical axis
Measuring the transmitted light intensity at all points on the display surface.
The in-plane distribution of liquid crystal cell characteristics
A program to be executed is stored.

According to a sixteenth aspect of the present invention, at least a predetermined
A light source that emits light of a wavelength of
A polarizer that extracts predetermined polarized light from light, and the polarizer
For the extracted polarized light, the phase becomes half the polarized light.
A first half-wave plate that transmits by providing a corresponding phase difference;
Transmitted light given a phase difference by the first half-wave plate
Liquid crystal cell, and the transmitted light of the liquid crystal cell
To give a phase difference equivalent to 1/2 of the transmitted light
A second half-wave plate, and the second half-wave plate
An analyzer for analyzing transmitted light having a phase difference, and the analyzer
The transmitted light detected by the probe is received and the transmitted light intensity is measured.
And the transmitted light intensity measured by the receiver
Of twist angle and cell gap of liquid crystal cell based on
Using the determined twist angle and the cell gap
And a control unit for controlling the azimuth anchoring calculation.
Twist angle, cell gap and azimuth anchoring
A storage medium storing a program for a measuring device,
Rotate the transmission axis between the photon and analyzer so that it is at a predetermined angle
1st rotation processing to emit light of a predetermined wavelength from the light source
And a polarizer from the light emitted from the light source.
Polarization processing to extract predetermined polarized light and polarization processing
Light processing for rotating the liquid crystal cell with the given polarized light
And the light transmitted through the liquid crystal cell by the light treatment
Light detection processing for light detection and transmitted light detected by light detection processing
Measuring the transmitted light intensity by receiving the
Maximum or minimum transmitted light intensity measured by the measurement process
The first half-wave plate and the second half-wave plate up to an angle
A second rotation process in which the plate and the plate are rotated in synchronization with each other;
The first half wave from the angle where the light intensity is maximum or minimum
Any of a long plate, a second half-wave plate, a polarizer, and an analyzer
Rotating at a predetermined angular velocity, and a third rotating process.
First half-wave plate, second half-wave by dynamic processing
The plate, polarizer, or analyzer is rotated at a predetermined angular speed.
From the transmitted light intensity received by the
Calculation for calculating the twist angle and cell gap of the
Output processing and the twist angle calculated by the first calculation processing
Angle anchorage of liquid crystal cell by using
Calculation processing for calculating the liquid crystal cell and the liquid crystal cell from the light source.
The emitted light rotates around the optical axis and / or
And rotate / move processing to move in a vertical plane
And the liquid crystal cell is perpendicular to the optical axis by the rotation / movement processing.
Moving in a simple plane, all points on the display surface
By measuring the transmitted light intensity, the characteristics of the liquid crystal cell can be improved.
Characterized by storing a program for measuring the distribution state
And

[0064]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, with reference to the accompanying drawings, a twist angle, cell gap and azimuth angle anchoring measuring device, a measuring method and a storage medium storing a program according to an embodiment of the present invention will be described in detail. . 1 to 22 show an embodiment of a twist angle, cell gap, and azimuth angle anchoring measurement device, a measurement method, and a storage medium storing a program according to the present invention.

<First Embodiment> FIG. 1 is a view showing a configuration of an optical element in a twist angle, cell gap and azimuth anchoring measurement apparatus according to a first embodiment of the present invention. The optical element of the twist angle, cell gap, and azimuth angle anchoring measuring apparatus according to the first embodiment of the present invention includes a light source 1 that emits light such as a laser beam and the same light that is emitted from the light source 1. It is provided on the axis and includes, in order from the light source 1 side, a polarizer 2, a liquid crystal cell 3, which is a test object, an analyzer 4, and a light receiver 5.

The light source 1 emits light having a predetermined wavelength, such as laser light, as described above. Polarizer 2 is light source 1
Out of the light emitted from the device, only polarized light in a predetermined direction is extracted. The liquid crystal cell 3 is, for example, a liquid crystal display device that has a twisted nematic (TN) structure or a super twisted nematic (STN) structure, and emits light by irradiating light transmitted through the polarizer 2. The analyzer 4 detects the transmitted light of the liquid crystal cell 3. The light receiver 5 includes, for example, a photodiode or the like, and measures the transmitted light intensity of the transmitted light detected by the analyzer 4.

In the first embodiment of the present invention, of the optical elements configured as described above, each of the polarizer 2 and the analyzer 4 is configured to be rotatable. Hereinafter, a first embodiment of the present invention will be described in detail with reference to the drawings.

<First Example of First Embodiment> FIG. 2 is an overall configuration diagram showing a first example of the first embodiment of the present invention. In FIG. 2, only the polarized light in a predetermined direction is extracted from the light emitted from the light source 1 by the polarizer 2 and irradiates the liquid crystal cell 3. The light transmitted through the liquid crystal cell 3 is detected by the analyzer 4 and received by the light receiver 5. The light receiver 5 detects, as a current, the intensity of light (transmitted light intensity) after the light has been detected by the analyzer 4, converts this current value into a voltage value by a current-voltage converter 8, and converts the voltage value to a voltage. A total of 9 are detected. The PC 10 is a stepping motor 1 serving as a driving unit for rotating the polarizer 2 and the analyzer 4 based on the voltage value detected by the voltmeter 9, that is, the transmitted light intensity.
A control signal is sent to 1,12. Stepping motor 1
On the basis of the control signal, the drive units 12 drive the polarizer 2 and the analyzer 4 to rotate by a predetermined angle.

An operation example 1 of the first example of the first embodiment of the present invention will be described with reference to FIG. As a first stage, the stepping motors 11 and 12 are driven to set the transmission axes of the polarizer 2 and the analyzer 4 at a predetermined angle. In the second stage, the rotations of the polarizer 2 and the analyzer 4 are synchronized by the stepping motors 11 and 12 until the transmitted light intensity (current value) detected by the light receiver 5 is maximized or minimized. Move and fix. As the third stage, the stepping motor 11
Is driven to rotate the polarizer 2 while maintaining a predetermined angular velocity, and the light receiving unit 5 measures the transmitted light intensity. At this time, the analyzer 4 is fixed. As a fourth step, the twist angle and cell gap of the liquid crystal cell 3 as the test object are calculated from the relationship between the transmitted light intensity corresponding to the rotation angle of the polarizer 2 by a fitting process. As a fifth step, the azimuth anchoring of the liquid crystal cell 3 is calculated by a predetermined calculation from the twist angle and the cell gap obtained by the fitting process.

An operation example 2 of the first example of the first embodiment of the present invention will be described with reference to FIG. As a first stage, the stepping motors 11 and 12 are driven to set the transmission axes of the polarizer 2 and the analyzer 4 at a predetermined angle. In the second stage, the rotations of the polarizer 2 and the analyzer 4 are synchronized by the stepping motors 11 and 12 until the transmitted light intensity (current value) detected by the light receiver 5 is maximized or minimized. Move and fix. As the third stage, the stepping motor 12
Is driven to rotate the analyzer 4 while maintaining a predetermined angular velocity, and the light receiving unit 5 measures the transmitted light intensity. At this time, the polarizer 2 is fixed. As a fourth stage, the twist angle and cell gap of the liquid crystal cell 3 as the test object are calculated from the relationship between the transmitted light intensity corresponding to the rotation angle of the analyzer 4 and the fitting process. As a fifth stage, the azimuth anchoring of the liquid product cell 3 is calculated by a predetermined calculation from the twist angle and the cell gap calculated by the fitting process.

Referring to FIG. 2, an operation example 3 of the first example of the first embodiment of the present invention will be described. Operation example 1
In the above, the transmitted light intensity is measured by rotating the polarizer 2 at a predetermined angular velocity by the stepping motor 11, and
In the operation example 2, the analyzer 4 is rotated at a predetermined angular velocity by the stepping motor 12 to measure the transmitted light intensity. That is, the same effect can be obtained regardless of whether the polarizer 2 or the analyzer 4 is rotated. Therefore, in the third operation example, the setting of rotating the polarizer 2 or the analyzer 4 is performed based on the operation setting from the PC 10.

As described above, according to the first example of the first embodiment of the present invention, the twist angle, the cell gap, and the azimuth which were measured by rotating the liquid crystal cell in the prior art were measured. By measuring the angular anchoring by rotatably configuring the polarizer and the analyzer, which are optical element components, the configuration of the entire measuring apparatus can be reduced in size.

<Second Example of First Embodiment> FIG. 3 is an overall configuration diagram showing a second example of the first embodiment of the present invention. In FIG. 3, the difference from the first embodiment is that the liquid crystal cell 3 is configured to be movable in a vertical plane with respect to the light emitted from the light source 1.

In the first embodiment, the transmitted light intensity is measured at only one arbitrary point on the display surface of the liquid crystal cell 3, and the twist angle and the cell gap are calculated based on the transmitted light intensity by a fitting process. Although the azimuth anchoring is calculated by a predetermined calculation from the calculated twist angle and cell gap, in the second embodiment, the liquid crystal cell 3 uses a stepping motor for the light emitted from the light source 1. By driving the LCD 13 so as to be movable in a vertical plane, the transmitted light intensity can be measured at all points on the display surface of the liquid crystal cell 3.

Therefore, according to the second embodiment of the first embodiment of the present invention, uniformity of each characteristic within a display surface required for a liquid crystal cell which is getting larger year by year, that is, twist angle, cell Uniformity of the gap and the azimuthal anchoring can be realized by making the liquid crystal cell movable.

<Third Example of First Embodiment> FIG. 4 is an overall configuration diagram showing a third example of the first embodiment of the present invention. In FIG. 4, the difference from the second embodiment is that the liquid crystal cell 3 is movable in a vertical plane with respect to the light emitted from the light source 1 and is also rotatable around the light. It is a point that is configured. An operation example of the third embodiment will be described below.

As the first stage, the stepping motor 1
The transmission axes of the polarizer 2 and the analyzer 4 are set so that the transmission axes of the polarizer 2 and the analyzer 4 are at a predetermined angle with each other by driving 1 and 12. In the second stage, the liquid crystal cell 3 as a test object is rotated by the stepping motor 14 so that the transmitted light intensity (current value) detected by the light receiver 5 is rotated to the maximum or minimum angle. Fix it. As a third stage, the polarizer 2 or the stepping motor 12 by the stepping motor 11 is used.
Is rotated while maintaining a predetermined angular velocity, and the intensity of transmitted light is measured by the light receiver 5. At this time,
The optical element that does not perform the rotation process is fixed. As a fourth step, the twist angle and cell gap of the liquid crystal cell 3 as the test object are determined by a fitting process from the relationship between the rotation angle when the rotation processing is performed in the third step and the transmitted light intensity corresponding to the rotation angle. calculate. As a fifth step, the azimuth anchoring of the liquid crystal cell 3 is calculated using the twist angle and the cell gap obtained by the fitting process.

According to the third embodiment, which is the first embodiment of the present invention, it is possible to measure the transmitted light intensity at all positions on the display surface of the liquid crystal cell 3 and at the same time, to use the conventional liquid crystal. Even in a state in which the cell has a rotating function, the transmitted light intensity can be measured on the entire display surface.

FIG. 18 is a flowchart showing an operation example according to the configuration of the first embodiment of the present invention. In FIG. 18, the angles of the polarizer 2 and the analyzer 4 are fixed at a position where the value (transmitted light intensity) of the voltmeter 9 is maximum (step S1). Next, the value of the voltmeter 9 at each rotation angle is recorded while rotating either the polarizer 2 or the analyzer 4 at a predetermined angle (step S2). The calculated results of the angle dependence of transmittance and the measured results obtained from combinations of several twist angles and cell gaps are compared using the least squares method, and the twist angle and cell gap of the liquid crystal cell 3 are compared. Is obtained (step S3). From the obtained twist angle and cell gap, an azimuth unrealization is calculated and calculated by a predetermined calculation (step S4).

<Specific Example of First Embodiment> A specific example of the first embodiment of the present invention will be described with reference to FIG. In this specific example, the wavelength of the light source 1 is 632.8.
nm HeHe laser was used. In addition, a photodiode was used as the light receiver 5, the photocurrent was converted into a voltage by the current / voltage converter 8, and the voltage was detected by the voltmeter 9. The rotation of the polarizer 2 and the analyzer 4 and the parallel movement of the liquid crystal cell 3 are performed by controlling the stepping motors 11, 12, and 13 by the PC 10. In addition, the measured values of the voltmeter 9 are also taken into the PC 10, and the values of the values can be determined by executing a program for a calculation of a fitting process for obtaining a twist angle and a cell gap and a program for calculating an azimuth anchoring energy. did.

First, in order to determine the relative angle between the polarizer 2 and the analyzer 4, the angle of the polarizer 2 is fixed, and the analyzer 4 is rotated around the optical axis to read the value of the voltmeter 9. Find the angle at which is minimum. When the analyzer 4 is further rotated by 90 ° around the optical axis from that angle, the polarization transmission axes of the polarizer 2 and the analyzer 4 become parallel.

A TN (twisted nematic) cell was prepared as the liquid crystal cell 3 to be tested (hereinafter, referred to as TN cell 3). The method for manufacturing the TN cell 3 is as follows. First, two alkali-free glass substrates are prepared. This is the upper and lower substrates. The thickness of the glass used here was 0.7 μm. An alignment film is formed on both the upper and lower substrates. A polyimide film was selected as an alignment film, and polyamic acid was applied to both upper and lower substrates by spin coating, and about 1.
It was formed by firing for 5 hours. This is rubbed with a cloth in which rayon is planted. Thereafter, the two substrates were bonded together via a spacer so that the rubbing directions of the substrates were orthogonal to each other to form a cell, and the cell was filled with nematic liquid crystal. The spacer diameter is 5 μm. The inlet was sealed with a photocurable resin. The angle between the rubbing directions of the two substrates is 90 ° from the positional accuracy of a rubbing device, a bonding device, and the like.
Is estimated to be less than 0.1 °.

The TN cell 3 is placed between the polarizer 2 and the analyzer 4 so that the stepping motor 13 can be moved in parallel on the display surface of the TN cell 3. The polarizer 2 and the analyzer 4 are rotated around the optical axis in the same direction while synchronizing the polarizer 2 and the analyzer 4 with the point of the object to be measured on the display surface of the TN cell 3 aligned with the optical axis. The angle between the polarizer 2 and the analyzer 4 was fixed at the position where the value was maximum. Thereafter, the analyzer 4 was rotated around the optical axis, and the change in the amount of transparent light was measured using the value of the voltmeter 9. At this time, the angular velocity of the analyzer 4 was moved in steps of 5 °. The result is shown in FIG.

In FIG. 17, a white square represents a measured value, and a solid line is obtained by previously calculating a change in transmittance using the twist angle and the cell gap as parameters. As described above, the angle dependence of the transmittance is calculated in advance from a combination of several twist angles and the cell gap, and the twist of the calculation result that best matches the measured value is obtained by comparing the measured data with the measured data. The combination of the angle and the cell gap is determined as the measured twist angle and cell gap of the TN cell.

As described above, the method of obtaining the twist angle and the cell gap is a fitting process, and a combination having the smallest difference between the measured value and the calculated value is selected by the program using the least squares method. Thereafter, the azimuth anchoring energy is calculated using the obtained twist angle and cell gap.

In this example, the refractive index anisotropy of the liquid crystal used in the TN cell 3 was 0.074, and the wavelength of the incident light was 63.
2.8 μm, twist elastic constant 7.7 × 10 ⁻¹² N,
The angle between the rubbing directions of both substrates is 90 °, and the twist angle and the cell gap are respectively determined by this measurement.
86 ° and 5.0 μm. The azimuthal anchoring energy obtained using these values is 6.5.
It was determined to be 3 × 10 ⁻⁵ J / m ² .

The difference in the magnitude of the rotation angle and the offset of the angle due to the change of the optical element to be rotated were performed by a calculation program. The TN cell 3 can be moved in a plane parallel to the display surface by a stepping motor 13 controlled by the PC 10, and can measure an arbitrary position on the display surface, thereby enabling in-plane distribution measurement. I have. In this sample, the measurement of 9 points was repeated every 2 grids. As a result, it was found that the dispersion of the measured values at the nine measured points was approximately ± 1 °.

Second Embodiment FIG. 5 is a diagram showing a configuration of an optical element in a twist angle, cell gap, and azimuth anchoring measurement device according to a second embodiment of the present invention. An optical element of the twist angle, cell gap, and azimuth angle anchoring measuring apparatus according to the second embodiment of the present invention includes a light source 1 that emits light such as a laser beam, and the same light that is emitted from the light source 1. It is provided on the axis and includes, in order from the light source 1 side, a polarizer 2, a first half-wave plate 6, a liquid crystal cell 3, which is a test object, an analyzer 4, and a light receiver 5. It is composed.

The difference from the first embodiment of the present invention is that
This is in that a first half-wave plate 6 is provided between the polarizer 2 and the liquid crystal cell 3. This first half-wave plate 6
Irradiates the liquid crystal cell 3 by giving a phase difference of の of the polarized light in a predetermined direction extracted by the polarizer 2. By providing the first half-wave plate 6 in this manner, the influence of the reflected light from the liquid crystal cell 3 on the polarized light extracted by the polarizer 2 can be reduced.

In the second embodiment of the present invention, among the optical element components configured as described above, each of the polarizer 2, the analyzer 4, and the first half-wave plate 6 is rotated. It is configured to be possible. Hereinafter, a second embodiment of the present invention will be described in detail with reference to the drawings.

<First Example of Second Embodiment> FIG. 6 is an overall configuration diagram showing a first example of the second embodiment of the present invention. In FIG. 6, only the polarized light in a predetermined direction is extracted from the light emitted from the light source 1 by the polarizer 2 and irradiates the first half-wave plate 6. The first 1 /
The two-wavelength plate 6 applies one polarized light to the polarized light to be irradiated.
The liquid crystal cell 3 is transmitted by giving a phase difference of / 2 and transmitting the light. The light transmitted through the liquid crystal cell 3 is detected by the analyzer 4 and received by the light receiver 5. The light receiver 5 detects the intensity of the light (transmitted light intensity) detected by the analyzer 4 as a current, converts the current value into a voltage value with a current-voltage converter 8, and converts the voltage value. It is detected by the voltmeter 9. PC1
0 is a voltage value detected by the voltmeter 9, that is, the polarizer 2, the analyzer 4, and the first half based on the transmitted light intensity.
Control signals are sent to stepping motors 11, 12, and 15 serving as driving means for rotating the wave plate 6. The stepping motors 11, 12, and 15 drive each of the polarizer 2, the analyzer 4, and the first half-wave plate 6 to rotate by a predetermined angle based on the control signal.

Referring to FIG. 6, an operation example 1 of the first example of the second embodiment of the present invention will be described. In the first stage, the stepping motors 11 and 12 are driven to set the transmission axes of the polarizer 2 and the analyzer 4 at a predetermined angle. In the second stage, the stepping motors 12 and 15 are driven to rotate the analyzer 4 and the first half-wave plate 6 in the same direction while maintaining the rotation angle ratio of 1: 2, and the light receiver 5 is rotated and fixed to an angle at which the transmitted light intensity (current value) detected by 5 becomes maximum or minimum. As a third stage, the stepping motor 11 is driven to rotate the polarizer 2 while maintaining a predetermined angular velocity, and the transmitted light intensity is measured by the light receiver 5. At this time, the analyzer 4 and the first half-wave plate 6 are fixed. As a fourth step, the twist angle and cell gap of the liquid crystal cell 3 as the test object are calculated from the relationship between the transmitted light intensity corresponding to the rotation angle of the polarizer 2 by a fitting process.
As a fifth step, the azimuth anchoring of the liquid crystal cell 3 is calculated by a predetermined calculation from the twist angle and the cell gap obtained by the fitting process.

As the second stage of the operation example 1, the stepping motors 12 and 15 are driven so that the analyzer 4 and the first
Is rotated in the same direction while maintaining a rotation angle ratio of 1: 2 to the angle at which the transmitted light intensity (current value) detected by the light receiver 5 becomes maximum or minimum. It is operated to move and fix, but the analyzer 4 and the first half-wave plate 6 are rotated in the opposite direction while maintaining the rotation angle ratio of 1: 2, and the transmitted light intensity is adjusted. Can be fixed at an angle at which the maximum or minimum is obtained.

Referring to FIG. 6, an operation example 2 of the first example of the second embodiment of the present invention will be described. In the first stage, the stepping motors 11 and 12 are driven to set the transmission axes of the polarizer 2 and the analyzer 4 at a predetermined angle. In the second stage, the stepping motors 12 and 15 are driven to detect the light from the photodetector 5 while rotating the analyzer 4 and the first half-wave plate 6 while maintaining a rotation angle ratio of 1: 2. Transmitted light intensity (current value)
Is rotated and fixed to the maximum or minimum angle.
As a third step, the stepping motor 12 is driven to rotate the analyzer 4 while maintaining a predetermined angular velocity, and the transmitted light intensity is measured by the light receiver 5. At this time, the polarizer 2 and the first half-wave plate 6 are fixed. In the fourth step, the twist angle and cell gap of the liquid crystal cell 3 as the test object are calculated from the relationship between the rotation angle of the analyzer 4 and the transmitted light intensity corresponding to the rotation angle of the analyzer 4 by a fitting process. Fifth
As a step, the azimuth anchoring of the liquid crystal cell 3 is calculated by a predetermined calculation from the twist angle and the cell gap obtained by the fitting process.

Further, as a second stage of the operation example 2, the stepping motors 12 and 15 are driven to
Is rotated in the same direction while maintaining a rotation angle ratio of 1: 2 to the angle at which the transmitted light intensity (current value) detected by the light receiver 5 becomes maximum or minimum. The analyzer 4 and the first half-wave plate 6 are rotated in the opposite direction while maintaining a rotation angle ratio of 1: 2, so that the transmitted light intensity is increased. It is also possible to fix at a maximum or minimum angle.

Referring to FIG. 6, an operation example 3 of the first embodiment, which is the second embodiment of the present invention, will be described. In the operation example 1, the transmitted light intensity is measured by rotating the polarizer 2 at a predetermined angular velocity by the stepping motor 11, and in the operation example 2, the analyzer 4 is rotated by the stepping motor 12 at the predetermined angular velocity. The transmitted light intensity is measured while moving. That is, the same effect can be obtained regardless of whether the polarizer 2 or the analyzer 4 is rotated. Therefore, as an operation example 3, an operation such as which one of the polarizer 2 and the analyzer 4 is rotated, the same direction, or the opposite direction is input from the PC 10. This is performed based on the operation settings.

As described above, according to the first embodiment of the second embodiment of the present invention, similarly to the first embodiment of the present invention, measurement is conventionally performed by rotating a liquid crystal cell. The twist angle, the cell gap, and the azimuth angle anchoring, which have been described above, are configured such that each of the polarizer 2, the analyzer 4, and the first half-wave plate 6, which are optical elements, is rotatable. Can be miniaturized.

Further, the first half-wave plate 6 is inserted between the polarizer 2 and the liquid crystal cell 3 to reduce the influence of the reflected light from the liquid crystal cell 3 on the polarizer 2. Therefore, the measurement accuracy is improved.

<Second Example of Second Embodiment> FIG. 7 is an overall configuration diagram showing a second example of the second embodiment of the present invention. In FIG. 7, the difference from the first embodiment is that the liquid crystal cell 3 is configured to be movable in a vertical plane with respect to the light emitted from the light source 1.

In the first embodiment, the transmitted light intensity is measured at only one arbitrary point on the display surface of the liquid crystal cell 3, and the twist angle and the cell gap are calculated based on the transmitted light intensity by a fitting process. Although the azimuth anchoring is calculated by a predetermined calculation from the calculated twist angle and cell gap, in the second embodiment, the liquid crystal cell 3 uses a stepping motor for the light emitted from the light source 1. By driving the LCD 13 so as to be movable in a vertical plane, the transmitted light intensity can be measured at all points on the display surface of the liquid crystal cell 3.

Therefore, according to the second example of the second embodiment of the present invention, uniformity of each characteristic within a display surface required for a liquid crystal cell which is getting larger year by year, ie, twist angle, cell angle Uniformity of the gap and azimuthal anchoring can be realized by making the liquid crystal cell movable, and at the same time, the first half-wave plate 6 is provided between the polarizer 2 and the liquid crystal cell 3. By mounting, the influence of the reflected light from the liquid crystal cell 3 is reduced, so that the measurement accuracy can be improved.

<Third Example of Second Embodiment> FIG. 8 is an overall configuration diagram showing a third example of the second embodiment of the present invention. In FIG. 8, the difference from the second embodiment is that the liquid crystal cell 3 is movable in a vertical plane with respect to the light emitted from the light source 1 and is also rotatable around the light. The point is that it is composed. An operation example of the third example in the second embodiment of the present invention will be described below.

As the first stage, the stepping motor 1
The transmission axes of the polarizer 2 and the analyzer 4 are set so that the transmission axes of the polarizer 2 and the analyzer 4 are at a predetermined angle with each other by driving 1 and 12. In the second stage, the liquid crystal cell 3 as a test object is rotated by the stepping motor 14 so that the transmitted light intensity (current value) detected by the light receiver 5 is rotated to the maximum or minimum angle. Fix it. As the third stage, the polarizer 2 by the stepping motor 11, the analyzer 4 by the stepping motor 12, and the first half by the stepping motor 15
One of the wave plates 6 is rotated while maintaining a predetermined angular velocity, and the transmitted light intensity is measured by the light receiver 5. At this time, the optical element that does not perform the rotation process is fixed. As a fourth stage, the liquid crystal cell 3 as the test object is determined based on the relationship between the rotation angle when the rotation process is performed in the third stage and the transmitted light intensity corresponding to the rotation angle.
Is calculated by a fitting process. As a fifth stage, the azimuth anchoring of the liquid crystal cell 3 is calculated using the twist angle and the cell gap obtained by the fitting process.

According to the third embodiment, which is the first embodiment of the present invention, it is possible to measure the transmitted light intensity at all positions on the display surface of the liquid crystal cell 3 and, at the same time, to use the conventional liquid crystal. Even in a state in which the cell has a rotating function, the transmitted light intensity can be measured on the entire display surface.

FIG. 19 is a flowchart showing an operation example according to the configuration of the second embodiment of the present invention. In FIG. 19, the first half-wave plate 6 and the analyzer 4 are rotated in the same direction while maintaining a rotation angle ratio of 1: 2, and the value (transmitted light intensity) of the voltmeter 9 is maximized. (Step S11). Next, the value of the voltmeter 9 at each rotation angle is recorded while rotating either the polarizer 2 or the analyzer 4 at a predetermined angle (step S12). The calculated results of the angle dependence of transmittance and the measured results obtained from combinations of several twist angles and cell gaps are compared using the least squares method, and the twist angle and cell gap of the liquid crystal cell 3 are compared. (Step S1)
3). From the obtained twist angle and cell gap, an azimuth unrealization is calculated and calculated by a predetermined calculation (step S14).

<Specific Example 1 of Second Embodiment> A specific example 1 of the second embodiment of the present invention will be described with reference to the configuration of FIG. In this specific example, from the light source 1 side,
A polarizer 2, a first half-wave plate 6, and a liquid crystal cell (TN
Cell) 3, an analyzer 4, and a light receiver 5 in this order. Instead of rotating the liquid crystal cell 3 shown in the conventional example by the first-stage operation, the polarizer 2, the analyzer 4, In order to determine the relative angle, the angle of the polarizer 2 is fixed, and the analyzer 4 is rotated around the optical axis to obtain an angle at which the value of the voltmeter 9 becomes minimum. When the analyzer 4 is further rotated by 90 ° around the optical axis from that angle, the polarization transmission axes of the polarizer 2 and the analyzer 4 become parallel.

In the operation of the second stage, the analyzer 4 and the first 1 /
By rotating the two-wavelength plate 6 in the opposite direction while maintaining the rotation angle ratio of 2: 1, the analyzer 4 is positioned at the position where the value of the voltmeter 9 is maximum.
And the angle of the first half-wave plate 6 is fixed. Instead of rotating the analyzer 4 in the third stage operation, the first half-wave plate 6 is rotated. The other device configuration is the same as the configuration shown in each of the above-described embodiments, and the procedure up to obtaining the twist angle, the cell gap, and the azimuth anchoring energy thereafter is also the same.

It is to be noted that the rotation angles of the respective optical elements which reach the magnitude of the rotation angle due to the change of the optical element to be rotated and the offset of the angles are corrected by the calculation program of the PC 10.

In the specific example 1 of the second embodiment of the present invention, the measurement was performed using the same sample as the specific example of the first embodiment of the present invention. I got That is, the twist angle and the cell gap were determined to be 86 ° and 5.0 μm, respectively. The azimuthal anchoring energy calculated using these values was determined to be 6.53 × 10 ⁻⁵ J / m ² . Also, in the in-plane distribution measurement, it was confirmed that the variation was about ± 1 ° of the same degree.

<Specific Example 2 of Second Embodiment> As a specific example 2 of the second embodiment of the present invention, the を wavelength plate 6 was formed by the operation of the second stage of the specific example 1 described above. Instead of rotating, the analyzer 4 can be rotated. The stepping motor 12 provided in the analyzer 4 is set to P
The device configuration is such that the rotation is controlled by a control program by connecting to C10. In the same manner as in the above-described embodiment, the magnitude of the rotation angle is reached by changing the optical element to be rotated, and the angle offset is performed by an arithmetic program. In the in-plane distribution measurement, since the liquid crystal cell 3 can be moved in a plane parallel to the display surface by the stepping motor 13 controlled by the PC 10, the in-plane distribution measurement can be performed.

In the specific example 2 of the second embodiment of the present invention, the measurement is performed using the same sample as the specific example described above, and the same measurement result is obtained in each of the specific examples within the range of the measurement error. It turned out to be obtained. That is,
The twist angle and cell gap are 86 ° and 5.0, respectively.
μm. The azimuthal anchoring energy calculated using these values is 6.53 × 10 ⁻⁵ J / m ^2.
I was asked. Also, in the in-plane distribution measurement, the variation was about ± 1 °, which was also about the same.

Third Embodiment FIG. 9 is a diagram showing a configuration of an optical element in a twist angle, cell gap and azimuth anchoring measurement device according to a third embodiment of the present invention. The optical element of the twist angle, cell gap, and azimuth angle anchoring measuring device according to the third embodiment of the present invention includes a light source 1 that emits light such as a laser beam and the same light that is emitted from the light source 1. The polarizer 2, a liquid crystal cell 3 as a test object, a second half-wave plate 7, an analyzer 4, and a light receiver 5 are provided on the pongee in this order from the light source 1 side. It is composed.

The difference from the first and second embodiments of the present invention is that a second half-wave plate 7 is provided between the liquid crystal cell 3 and the analyzer 4. The second half-wave plate 7 irradiates the analyzer 4 with the transmitted light of the liquid crystal cell 3 giving a phase difference of １ ／ of the transmitted light. By providing the second half-wave plate 7 at the position shown,
The influence of the reflected light from the analyzer 4 on the light transmitted through the liquid crystal cell 3 can be reduced.

In the third embodiment of the present invention, of the optical element components configured as described above, each of the polarizer 2, the analyzer 4, and the second half-wave plate 7 is rotated. It is configured to be possible. Hereinafter, a third embodiment of the present invention will be described in detail with reference to the drawings.

<First Example of Third Embodiment> FIG. 10 is an overall configuration diagram showing a first example of the third embodiment of the present invention. In FIG. 10, only the polarized light in a predetermined direction is extracted from the light emitted from the light source 1 by the polarizer 2 and irradiates the liquid crystal cell 3. The transmitted light of the liquid crystal cell 3 is given a phase difference equivalent to 倍 of the transmitted light by the second half-wave plate 7 and is analyzed by the analyzer 4.
The light is received by the light receiver 5. The light receiver 5 detects the intensity of the light (transmitted light intensity) after being analyzed by the analyzer 4 as a current,
This current value is converted into a voltage value by the current-voltage converter 8, and the voltage value is detected by the voltmeter 9. The PC 10 is a voltmeter 9
, A stepping motor 11 serving as driving means for rotating the polarizer 2, the analyzer 4, and the second half-wave plate 7 based on the transmitted light intensity,
A control signal is sent to 12 and 16. The stepping motors 11, 12, and 16 drive each of the polarizer 2, the analyzer 4, and the second half-wave plate 7 by a predetermined angle based on the control signal.

With reference to FIG. 10, an operation example 1 of the first example of the third embodiment of the present invention will be described. As a first step, the stepping motors 11 and 12 are driven to set the transmission angles of the polarizer 2 and the analyzer 4 so as to be at a predetermined angle. In the second stage, the stepping motors 11 and 16 are driven to make the polarizer 2 and the second １ ／
The wavelength plate 7 is rotated in the same direction while maintaining a 2: 1 rotation angle ratio, and is rotated and fixed to an angle at which the transmitted light intensity (current value) detected by the light receiver 5 becomes maximum or minimum. I do. As a third stage, the stepping motor 11 is driven to rotate the polarizer 2 while maintaining a predetermined angular velocity, and the transmitted light intensity is measured by the light receiver 5. At this time, the analyzer 4 and the second half-wave plate 7 are fixed. As a fourth step, the twist angle and cell gap of the liquid crystal cell 3 as the test object are calculated from the relationship between the transmitted light intensity corresponding to the rotation angle of the polarizer 2 by a fitting process. As a fifth step, the azimuth anchoring of the liquid crystal cell 3 is calculated by a predetermined calculation from the twist angle and the cell gap obtained by the fitting process.

As the second stage of the first operation example, the stepping motors 11 and 16 are pivoted so that the polarizer 2 and the second
Is rotated in the same direction while maintaining a rotation angle ratio of 2: 1 to the angle at which the transmitted light intensity (current value) detected by the light receiver 5 becomes maximum or minimum. It is operated to rotate and fix, but the polarizer 2 and the second half-wave plate 7 are rotated in the opposite direction while maintaining the rotation angle ratio of 2: 1 to transmit the transmitted light intensity. Can be fixed at an angle at which the maximum or minimum is obtained.

With reference to FIG. 10, an operation example 2 of the first example of the third embodiment of the present invention will be described. In the first stage, the stepping motors 11 and 12 are driven to set the transmission axes of the polarizer 2 and the analyzer 4 at a predetermined angle. In the second stage, the stepping motors 12 and 16 are driven so that the analyzer 4 and the second １ ／
The wave plate 7 is rotated while maintaining a rotation angle ratio of 2: 1 to rotate and fix to an angle at which the transmitted light intensity (current value) detected by the light receiver 5 becomes maximum or minimum. As a third stage, the stepping motor 12 is driven to rotate the analyzer 4 while maintaining a predetermined angular velocity, and the photodetector 5 is rotated.
To measure the transmitted light intensity. At this time, the polarizer 2 and the second
The half-wave plate 7 is fixed. In the fourth stage, the twist angle and cell gap of the liquid crystal cell 3 as the test object are calculated from the relationship between the transmitted light intensity corresponding to the rotation angle of the analyzer 4 and the fitting process. Fifth
As a step, the azimuth anchoring of the liquid crystal cell 3 is calculated by a predetermined calculation from the twist angle and the cell gap obtained by the fitting process.

In the second stage of the operation example 2, the stepping motors 12 and 16 are driven so that the analyzer 4 and the second
Is rotated in the same direction while maintaining a rotation angle ratio of 2: 1 with respect to the half-wave plate 7 so that the transmitted light intensity (current value) detected by the light receiver 5 is rotated to the maximum or minimum angle. The analyzer 4 and the second half-wave plate 7 are rotated in the opposite direction while maintaining the rotation angle ratio of 2: 1 to reduce the transmitted light intensity. It is also possible to fix at a maximum or minimum angle.

Referring to FIG. 10, an operation example 3 of the first example of the third embodiment of the present invention will be described. In the first stage, the stepping motors 11 and 12 are driven to set the transmission axes of the polarizer 2 and the analyzer 4 at a predetermined angle. In the second stage, the stepping motors 11 and 16 are driven to make the polarizer 2 and the second １ ／
The wavelength plate 7 is rotated in the same direction while maintaining a 2: 1 rotation angle ratio, and is rotated and fixed to an angle at which the transmitted light intensity (current value) detected by the light receiver 5 becomes maximum or minimum. I do. In the third stage, the stepping motor 16 is driven to rotate the second half-wave plate 7 while maintaining a predetermined angular velocity, and the transmitted light intensity is measured by the light receiver 5. At this time, the polarizer 2 and the analyzer 4 are fixed. As a fourth step, the twist angle and cell gap of the liquid crystal cell 3 as the test object are calculated from the relationship between the transmitted light intensity corresponding to the rotation angle of the second half-wave plate 7 by a fitting process. As a fifth step, the azimuth anchoring of the liquid crystal cell 3 is calculated by a predetermined calculation from the twist angle and the cell gap obtained by the fitting process.

In the second stage of the operation example 3, the stepping motors 11 and 16 are driven so that the polarizer 2 and the second
Is rotated in the same direction while maintaining the rotation angle ratio of 2: 1 with respect to the half-wave plate 7 to rotate to the angle at which the transmitted light intensity (current value) converted by the light receiver 5 becomes maximum or minimum. The polarizer 2 and the second half-wave plate 7 are rotated in the opposite directions while maintaining a rotation angle ratio of 2: 1 to reduce the transmitted light intensity. It is also possible to fix at a maximum or minimum angle.

Referring to FIG. 10, an operation example 4 of the first example of the third embodiment of the present invention will be described. In the first stage, the stepping motors 11 and 12 are driven to set the transmission axes of the polarizer 2 and the analyzer 4 at a predetermined angle. In the second stage, the stepping motors 12 and 16 are driven so that the analyzer 4 and the second １ ／
The wave plate 7 is rotated while maintaining a rotation angle ratio of 2: 1 to rotate and fix to an angle at which the transmitted light intensity (current value) detected by the light receiver 5 becomes maximum or minimum. In the third stage, the stepping motor 16 is driven to rotate the second half-wave plate 7 while maintaining a predetermined angular velocity, and the transmitted light intensity is measured by the light receiver 5. At this time, the polarizer 2 and the analyzer 4 are fixed. As a fourth step, the twist angle and cell gap of the liquid crystal cell 3 as the test object are calculated from the relationship between the transmitted light intensity corresponding to the rotation angle of the second half-wave plate 7 by a fitting process. As a fifth step, the azimuth anchoring of the liquid crystal cell 3 is calculated by a predetermined calculation from the twist angle and the cell gap obtained by the fitting process.

As the second stage of the operation example 4, the stepping motors 12 and 16 are driven so that the analyzer 4 and the second
Is rotated in the same direction while maintaining a rotation angle ratio of 2: 1 with respect to the half-wave plate 7 so that the transmitted light intensity (current value) detected by the light receiver 5 is rotated to the maximum or minimum angle. The analyzer 4 and the second half-wave plate 7 are rotated in the opposite direction while maintaining the rotation angle ratio of 2: 1 to reduce the transmitted light intensity. It is also possible to fix at a maximum or minimum angle.

Further, according to each of the above-described operation examples, as the operation example 5 of the first example of the third embodiment of the present invention, the polarizer 2, the analyzer 4, and the second By configuring each of the half-wave plates 7 so as to be rotatable, each of the twists and the set gap of the liquid crystal cell 3 are measured by operating in any combination. Therefore, an operation setting such as which of the polarizer 2, the analyzer 4, and the second half-wave plate 7 is to be rotated, whether to rotate in the same direction, or whether to rotate in the opposite direction is set. It is also possible to carry out by input from the PC 10.

As described above, according to the first example of the third embodiment of the present invention, the first and second embodiments of the present invention are described.
The twist angle, cell gap, and azimuthal anchoring, which were conventionally measured by rotating a liquid crystal cell, are changed to polarizers 2 and analyzers 4 as optical elements, similarly to the embodiment.
By configuring each of the second half-wave plate 7 and the second half-wave plate 7 to be rotatable, the configuration of the entire measuring apparatus can be reduced in size.

Also, the second half-wave plate 7 is connected to the liquid crystal cell 3.
And the analyzer 4 can reduce the influence of the reflected light from the analyzer 4 on the liquid crystal cell 3, so that the measurement accuracy of the twist angle, the cell gap, and the azimuthal anchoring can be reduced. Is improved.

<Second Example of Third Embodiment> FIG. 11 is an overall configuration diagram showing a second example of the third embodiment of the present invention. In FIG. 11, the difference from the first embodiment is that the liquid crystal cell 3 is configured to be movable in a vertical plane with respect to the light emitted from the light source 1.

In the first embodiment, the transmitted light intensity is measured only at an arbitrary point on the display surface of the liquid crystal cell 3, and the twist angle and the cell gap are calculated based on the transmitted light intensity by a fitting process. Although the azimuth anchoring is calculated by a predetermined calculation from the calculated twist angle and cell gap, in the second embodiment, the liquid crystal cell 3 uses a stepping motor for the light emitted from the light source 1. When the liquid crystal cell 3 is configured to be movable in a vertical plane by driving, the transmitted light intensity can be measured at all points on the display surface of the liquid crystal cell 3.

Therefore, according to the second example of the third embodiment of the present invention, uniformity of each characteristic within a display surface required for a liquid crystal cell which is getting larger year by year, ie, twist angle, cell The uniformization of the gap and the azimuthal anchoring can be realized by making the liquid crystal cell movable, and at the same time, the second half-wave plate 7 is provided between the liquid crystal cell 3 and the analyzer 4. By placing the analyzer, the analyzer 4
The measurement accuracy can be improved because the influence of the reflected light from the object is reduced.

<Third Example of Third Embodiment> FIG. 12 is an overall configuration diagram showing a third example of the third embodiment of the present invention. In FIG. 12, the difference from the second embodiment is that the liquid crystal cell 3 can move in a vertical plane with respect to the light emitted from the light source 1 and can rotate around the light at the same time. The point is that it is composed. An operation example of the third example of the third embodiment of the present invention will be described below.

As the first stage, the stepping motor 1
The transmission axes of the polarizer 2 and the analyzer 4 are set so that the transmission axes of the polarizer 2 and the analyzer 4 are at a predetermined angle with each other by driving 1 and 12. In the second stage, the liquid crystal cell 3 as a test object is rotated by the stepping motor 14 so that the transmitted light intensity (current value) detected by the light receiver 5 is rotated to the maximum or minimum angle. Fix it. As a third stage, the polarizer 2 by the stepping motor 11, the analyzer 4 by the stepping motor 12, and the second half by the stepping motor 16
One of the wave plates 7 is rotated while maintaining a predetermined angular velocity, and the transmitted light intensity is measured by the light receiver 5. At this time, the optical element that does not perform the rotation process is fixed. As a fourth stage, the liquid crystal cell 3 as the test object is determined based on the relationship between the rotation angle when the rotation process is performed in the third stage and the transmitted light intensity corresponding to the rotation angle.
Is calculated by a fitting process. As a fifth stage, the azimuth anchoring of the liquid crystal cell 3 is calculated using the twist angle and the cell gap obtained by the fitting process.

According to the third example of the third embodiment of the present invention, it is possible to measure the transmitted light intensity at all positions on the display surface of the liquid crystal cell 3 and at the same time, to use the liquid crystal cell according to the prior art. The transmitted light intensity can be measured on the entire display surface even when the rotating function is provided.

FIG. 20 is a flowchart showing an operation example according to the configuration of the third embodiment of the present invention. In FIG. 20, the polarizer 2 and the second half-wave plate 7 are rotated in the same direction while maintaining the rotation angle ratio of 2: 1 so that the value (transmitted light intensity) of the voltmeter 9 becomes maximum. (Step S21). Next, the value of the voltmeter 9 at each rotation angle is recorded while rotating the second half-wave plate 7 at a predetermined angle (step S22). The calculated result of the angle dependence of transmittance and the measured result obtained from combinations of several twist angles and cell gaps are compared using the least squares method, and the twist angle of the liquid crystal cell 3 and the cell gap are compared. Is obtained (step S23). From the obtained twist angle and cell gap, an azimuth unrealization is calculated and calculated by a predetermined calculation (Step S).
24).

<Specific Example of Third Embodiment> A specific example of the third embodiment of the present invention will be described with reference to FIG. In this specific example, the second half-wave plate 7 is located between the liquid crystal cell 3 and the analyzer 4, and instead of rotating the liquid crystal cell 3 shown in the conventional example by the operation of the first stage, polarization is performed. The polarizer 2 and the second half-wave plate 7 are rotated in the opposite directions while maintaining a rotation angle ratio of 2: 1 so that the value of the voltmeter 9 becomes maximum. The angle of the half-wave plate 7 is fixed. Instead of rotating the analyzer 4 in the operation of the second stage, the second
Is rotated. The other device configuration is the same as the configuration shown in each of the above-described embodiments, and the procedure up to obtaining the twist angle, the cell gap, and the azimuth anchoring energy thereafter is also the same.

Note that the magnitude of the rotation angle of each optical element and the offset of the angle due to the change of the optical element to be rotated are corrected by the calculation program of the PC 10.

In the specific example of the third embodiment of the present invention, the measurement was performed using the same sample as in the specific example of the second embodiment of the present invention, but the same measurement result was obtained within the range of the measurement error. Obtained. That is, the twist angle and the cell gap are
It was 86 ° and 5.0 μm, respectively. The azimuthal anchoring energy obtained using these values was determined to be 6.53 × 10 ⁻⁵ J / m ² . Also, in the in-plane distribution measurement, it was confirmed that the variation was about ± 1 ° of the same degree.

<Fourth Embodiment> FIG. 13 shows a twist angle according to a fourth embodiment of the present invention.
FIG. 2 is a perspective view showing a configuration of a cell gap and azimuth anchoring measurement device. A twist angle, cell gap, and azimuth angle anchoring measuring device according to a fourth embodiment of the present invention is provided on a light source 1 for emitting laser light, and on the same optical axis as the laser light emitted from light source 1. , From the light source 1 side, a polarizer 2, a first half-wave plate 6, a liquid crystal cell 3 as a test object, a second half-wave plate 7, and an analyzer 4.
And a light receiver 5.

The difference from the first, second and third embodiments of the present invention is that the first half-wave plate 6 is provided between the polarizer 2 and the liquid crystal cell 3 and the second half-wave plate 6 is provided between the polarizer 2 and the liquid crystal cell 3. By disposing the half-wave plate 7 at two positions between the liquid crystal cell 3 and the analyzer 4, the influence of the reflected light from the liquid crystal cell 3 and the reflected light from the analyzer 4 can be reduced. The measurement accuracy of the twist angle, the cell gap, and the azimuth anchoring can be further improved.

In the fourth embodiment of the present invention, of the optical elements configured as described above, the polarizer 2, the analyzer 4, the first half-wave plate 6, and the second half-wave plate 6 are used. Each of the two-wavelength plates 7 is configured to be rotatable. Hereinafter, a fourth embodiment of the present invention will be described in detail with reference to the drawings.

<First Example of Fourth Embodiment> FIG. 14 is an overall configuration diagram showing a first example of the fourth embodiment of the present invention. In FIG. 14, only the polarized light of a predetermined direction is extracted from the light emitted from the light source 1 by the polarizer 2 and irradiates the first half-wave plate 6. The first half-wave plate 6 imparts a phase difference corresponding to 倍 of the polarized light to be transmitted and transmits the polarized light, and illuminates the liquid crystal cell 3 with the transmitted light. The light transmitted through the liquid crystal cell 3 is given a phase difference corresponding to 倍 of the transmitted light by the second half-wave plate 7, is analyzed by the analyzer 4, and is received by the light receiver 5. You. The light receiver 5 detects the intensity of the light (transmitted light intensity) detected by the analyzer 4 as a current, converts the current value into a voltage value with a current-voltage converter 8, and converts the voltage value. It is detected by the voltmeter 9. The PC 10 turns the polarizer 2, the analyzer 4, the first half-wave plate 6, and the second half-wave plate 7 based on the voltage value detected by the voltmeter 9, that is, the transmitted light intensity. Control signals are sent to stepping motors 11, 12, 15, and 16 serving as driving means for moving the motors. Stepping motors 11, 12, 1
5 and 16 drive the polarizer 2, the analyzer 4, the first half-wave plate 6 and the second half-wave plate 7 based on the control signal so as to rotate each of them by a predetermined angle. I do.

Referring to FIG. 14, an operation example 1 of the first example of the fourth embodiment of the present invention will be described. As a first stage, the stepping motors 11 and 12 are driven to set the transmission axes of the polarizer 2 and the analyzer 4 at a predetermined angle. In the second stage, the stepping motors 15 and 16 are driven to rotate the first half-wave plate 6 and the second half-wave plate 7 in the same direction while maintaining the same rotation angle. It is rotated and fixed to an angle at which the transmitted light intensity (current value) detected by the light receiver 5 becomes maximum or minimum. As the third stage, the stepping motor 1
5 is driven to rotate the first half-wave plate 6 while maintaining a predetermined angular velocity, and the light receiver 5 measures the transmitted light intensity.
At this time, the polarizer 2, the analyzer 4, and the second half-wave plate 7 are fixed. As a fourth stage, the first half
The twist angle and the cell gap of the liquid crystal cell 3 as the test object are calculated from the relationship between the transmitted light intensity corresponding to the rotation angle of the wave plate 6 and the fitting process. As a fifth step, the azimuth anchoring of the liquid crystal cell 3 is calculated by a predetermined calculation from the twist angle and the cell gap obtained by the fitting process.

In the second stage of the operation example 1, the stepping motors 15 and 16 are driven so that the first half-wave plate 6 and the second half-wave plate 7 have the same rotation angle ratio. While rotating in the same direction while maintaining the rotation angle, the rotation is fixed to the angle at which the transmitted light intensity (current value) detected by the light receiver 5 is maximized or minimized. 1
It is also possible to rotate the half-wave plate 6 and the second half-wave plate 7 in opposite directions while maintaining the same rotation angle ratio, and to fix them at an angle at which the transmitted light intensity is maximum or minimum. .

Referring to FIG. 14, an operation example 2 of the first example of the fourth embodiment of the present invention will be described. As a first stage, the stepping motors 11 and 12 are driven to set the transmission axes of the polarizer 2 and the analyzer 4 at a predetermined angle. In the second stage, the stepping motors 15 and 16 are driven to rotate the first half-wave plate 6 and the second half-wave plate 7 while maintaining the same rotation angle ratio, and the light receiver 5 to rotate and fix to an angle at which the transmitted light intensity (current value) detected at step 5 becomes maximum or minimum. In the third stage, the stepping motor 16 is driven to rotate the second half-wave plate 7 while maintaining a predetermined angular velocity, and the transmitted light intensity is measured by the light receiver 5. At this time, the polarizer 2, the analyzer 4, and the first half-wave plate 6 are fixed. As a fourth step, the twist angle and cell gap of the liquid crystal cell 3 as the test object are calculated from the relationship between the transmitted light intensity corresponding to the rotation angle of the second half-wave plate 7 and the fitting process. As a fifth step, the liquid crystal cell 3 is subjected to a predetermined calculation from the twist angle and the cell gap obtained by the fitting process.
Azimuth anchoring is calculated.

In the second stage of the operation example 2, the stepping motors 15 and 16 are driven so that the first half-wave plate 6 and the second half-wave plate 7 have the same rotation angle ratio. While maintaining in the same direction, it is operated to rotate and fix to an angle at which the transmitted light intensity (current value) detected by the light receiver 5 becomes maximum or minimum.
It is also possible to rotate the half-wave plate 6 and the second half-wave plate 7 in opposite directions while maintaining the same rotation angle ratio, and to fix the angle at which the transmitted light intensity becomes maximum or minimum.

Referring to FIG. 14, an operation example 3 of the first example of the fourth embodiment of the present invention will be described. In the operation example 1, the first 1
The transmitted light intensity is measured by rotating the half-wave plate 6 at a predetermined angular speed, and in the operation example 2, the second half-wave plate 7 is rotated at a predetermined angular speed by the stepping motor 16. The transmitted light intensity is measured. That is, the first 1
The same effect can be obtained when either the half-wave plate 6 or the second half-wave plate 7 is rotated. Therefore, as an operation example 3, as to which one of the first half-wave plate 6 and the second half-wave plate 7 is to be rotated, to be rotated in the same direction, or to be rotated in the opposite direction. The operation such as whether or not to move is performed based on the operation setting input from the PC 10.

As described above, according to the first example of the fourth embodiment of the present invention, similarly to the first, second and third embodiments of the present invention, the liquid crystal cell is conventionally rotated. The twist angle, cell gap and azimuth anchoring measured by moving
By configuring each of the analyzer 4, the first half-wave plate 6, and the second half-wave plate 7 to be rotatable, the configuration of the entire measuring apparatus can be reduced.

Further, the first half-wave plate 6 is inserted between the polarizer 2 and the liquid crystal cell 3, and the second half-wave plate 7 is inserted between the liquid crystal cell 3 and the analyzer 4. By inserting and configuring, the influence of the reflected light from the liquid crystal cell 3 on the polarizer 2 and the influence of the reflected light from the analyzer 4 on the liquid crystal cell 3 can be reduced, so that the measurement accuracy is improved. is there.

<Second Example in Fourth Embodiment> FIG. 15 is an overall configuration diagram showing a second example in the fourth embodiment of the present invention. In FIG. 1, the difference from the first embodiment is that the liquid crystal cell 3 is configured to be movable in a vertical plane with respect to the light emitted from the light source 1.

In the first example of the fourth embodiment of the present invention, the transmitted light intensity is measured at only one arbitrary point on the display surface of the liquid crystal cell 3, and based on the transmitted light intensity, the twist angle, The cell gap is calculated by the fitting process, and the azimuth anchoring is calculated by a predetermined calculation from the calculated twist angle and cell gap. In the second embodiment, the liquid crystal cell 3
Is configured to be movable in a vertical plane by driving a stepping motor 13 with respect to light emitted from the light source 1, so that transmitted light intensity is measured at all points on the display surface of the liquid crystal cell 3. It is possible to do.

Therefore, according to the second example of the fourth embodiment of the present invention, uniformity of each characteristic within a display surface required for a liquid crystal cell which is increasing year by year, ie, twist angle, cell angle Uniformity of the gap and azimuthal anchoring can be realized by making the liquid crystal cell movable, and at the same time, the first half-wave plate 6 is provided between the polarizer 2 and the liquid crystal cell 3. Mounted on the second half-wave plate 7
Is placed between the liquid crystal cell 3 and the analyzer 4,
Since the influence of the reflected light from the liquid crystal cell 3 on the polarizer 2 and the influence of the reflected light from the analyzer 4 on the liquid crystal cell 3 can be reduced, the measurement accuracy can be greatly improved.

<Third Example in Fourth Embodiment> FIG. 16 is an overall configuration diagram showing a third example in the fourth embodiment of the present invention. In FIG. 16, the fourth embodiment of the present invention is different from the second embodiment in that the liquid crystal cell 3 is movable in a vertical plane with respect to the light emitted from the light source 1, and The point is that it is configured to be rotatable around the light. An operation example of the third example in the fourth embodiment of the present invention will be described below.

In the first stage, the stepping motor 1
The transmission axes of the polarizer 2 and the analyzer 4 are set so that they are at a predetermined angle by driving the polarizers 1 and 12. In the second stage, the liquid crystal cell 3 as a test object is rotated by the stepping motor 14 so that the transmitted light intensity (current value) detected by the light receiver 5 is rotated to the maximum or minimum angle. Fix it. As a third stage, one of the polarizer 2, the analyzer 4, the first half-wave plate 6, and the second half-wave plate 7 is controlled by each of the stepping motors 11, 12, 15, and 16. While rotating at a predetermined angular velocity, the transmitted light intensity is measured by the light receiver 5. At this time, the optical element that does not perform the rotation process is fixed. As a fourth step, the twist angle and cell gap of the liquid crystal cell 3 as the test object are determined by a fitting process from the relationship between the rotation angle when the rotation processing is performed in the third step and the transmitted light intensity corresponding to the rotation angle. calculate. As a fifth stage, the azimuth anchoring of the liquid crystal cell 3 is calculated using the twist angle and the cell gap obtained by the fitting process.

In the third example of the fourth embodiment of the present invention described above, the polarizer 2, the analyzer 4, the first half-wave plate 6, and the second half-wave plate 7 The control of which is rotated is performed based on an operation setting input from the PC 10.

According to the third example of the fourth embodiment of the present invention, it is possible to measure the transmitted light intensity at all positions on the display surface of the liquid crystal cell 3, and at the same time, to use the conventional liquid crystal cell. Even in the state where the rotation function is provided, the transmitted light intensity can be measured on the entire display surface.

FIG. 21 is a flowchart showing an operation example according to the configuration of the fourth embodiment of the present invention. In FIG. 21, a first half-wave plate 6 and a second half-wave plate 7
Are rotated in the same direction while maintaining the same rotation angle ratio, and fixed at a position where the value (transmitted light intensity) of the voltmeter 9 is maximized (step S31). Next, the value of the voltmeter 9 at each rotation angle is recorded while rotating the second half-wave plate 7 at predetermined angle intervals (step S32). The calculated result of the angle dependence of transmittance and the measured result obtained from combinations of several twist angles and cell gaps are illuminated using the least squares method, and the twist angle of the liquid crystal cell 3 and the cell gap are determined. It is determined (step S33). From the obtained twist angle and cell gap, an azimuth unrealization is calculated and obtained by a predetermined calculation (step S34).

<Specific Example of Fourth Embodiment> A specific example of the fourth embodiment of the present invention will be described with reference to FIG. From the side of the light source 1, the polarizer 2, the first half-wave plate 6, the liquid crystal cell 3, the second half-wave plate 7, the analyzer 4, and the light receiver 5 are arranged in this order. Instead of rotating the liquid crystal cell 3 in the conventional example by one-step operation, the first
The half-wave plate 6 and the second half-wave plate 7 are rotated in the opposite direction by the same angle and fixed at an angle at which the value of the voltmeter 9 is maximized. The apparatus configuration is the same as that of the above-described embodiment except that the second half-wave plate 7 is rotated instead of rotating the second half-wave plate 7. After that, the twist angle, cell gap and azimuthal anchoring energy are obtained by the same measurement procedure. Similarly, the difference in the magnitude of the rotation angle and the offset of the angle due to the change of the optical element to be rotated were performed by a calculation program.

Also in the specific example of the fourth embodiment of the present invention, measurement was performed using the same sample as in the previous specific examples, and it was confirmed that the same measurement result was obtained within the range of the measurement error. That is, the twist angle and the cell gap were determined to be 86 ° and 5.0 μm, respectively. Also, the azimuthal anchoring energy obtained using these values is
6.53 × 10 ⁻⁵ J / m ² was obtained. Also, in the in-plane distribution measurement, it was confirmed that the variation was about ± 1 ° of the same degree.

The embodiments described above are preferred embodiments of the present invention, and various modifications can be made without departing from the spirit of the present invention. For example, if the position is adjusted so that the optical element is positioned at the center of the optical element with respect to the optical axis of the laser emitted from the light source, the optical element is easily damaged, so that measurement at a position slightly shifted from the optical axis is possible.

Further, for example, in the case of a laser beam emitted from a light source in a state where polarized light is already applied, the measuring device can be configured without providing a polarizer, so that the measuring device can be further miniaturized. Can be planned.

[0160]

As is apparent from the above description, according to the twist angle, cell gap, and azimuth angle anchoring measuring apparatus, the measuring method, and the storage medium storing the program of the present invention, the liquid crystal cell is rotated. In addition, by rotating an optical element such as a polarizer or an analyzer, it is possible to measure a twist angle, a cell gap, and an azimuthal anchoring, which are characteristics of a liquid crystal cell. Therefore, it is not necessary to provide a rotating stage or a rotating mechanism for rotating the liquid crystal cell with the increase in the size of the liquid crystal cell, and the measuring apparatus itself can be reduced in size.

Further, according to the measuring device, measuring method, and storage medium for storing the twist angle, cell gap, and azimuth angle anchoring of the present invention, the liquid crystal cell can be moved in a plane perpendicular to the light from the light source. By being movable, the in-plane distribution of the liquid crystal cell can be measured. Therefore, the uniformity of the twist angle, cell gap, and azimuthal anchoring characteristics, which are problems in a liquid crystal cell having a large size, in the display surface can be achieved.

Further, according to the measuring apparatus, measuring method, and storage medium for storing the twist angle, cell gap, and azimuth angle anchoring of the present invention, by providing a half-wave plate, the liquid crystal cell and the detector can be measured. Since the reflected light from the photons can be reduced, the measurement accuracy of the twist angle, the cell gap, and the azimuthal anchoring can be improved.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating a configuration of an optical element according to a first embodiment of the present invention.

FIG. 2 is an overall groove diagram showing a first example of the first embodiment of the present invention.

FIG. 3 is an overall configuration diagram showing a second example of the first embodiment of the present invention.

FIG. 4 is an overall configuration diagram showing a third example of the first embodiment of the present invention.

FIG. 5 is a perspective view illustrating a configuration of an optical element according to a second embodiment of the present invention.

FIG. 6 is an overall configuration diagram showing a first example of the second embodiment of the present invention.

FIG. 7 is an overall configuration diagram showing a second example of the second embodiment of the present invention.

FIG. 8 is an overall configuration diagram showing a third example of the second embodiment of the present invention.

FIG. 9 is a perspective view showing a groove of an optical element according to a third embodiment of the present invention.

FIG. 10 is an overall configuration diagram showing a first example of the third embodiment of the present invention.

FIG. 11 is an overall configuration diagram showing a second example of the third embodiment of the present invention.

FIG. 12 is an overall configuration diagram showing a third example of the third embodiment of the present invention.

FIG. 13 is a perspective view illustrating a configuration of an optical element according to a fourth embodiment of the present invention.

FIG. 14 is an overall configuration diagram showing a first example of the fourth embodiment of the present invention.

FIG. 15 is an overall configuration diagram showing a second example of the fourth embodiment of the present invention.

FIG. 16 is an overall configuration diagram showing a third example of the fourth embodiment of the present invention.

FIG. 17 is a diagram showing calculation results and measurement results in the embodiment of the present invention.

FIG. 18 is a flowchart showing an operation example according to the first embodiment of the present invention.

FIG. 19 is a flowchart illustrating an operation example according to the second embodiment of the present invention.

FIG. 20 is a flowchart illustrating an operation example according to the third embodiment of the present invention.

FIG. 21 is a flowchart illustrating an operation example according to the fourth embodiment of the present invention.

FIG. 22 is an overall configuration diagram of a conventional twist angle, cell gap, and azimuth anchoring measurement device.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 light source 2 polarizing plate 3 liquid crystal cell 4 analyzer 5 light receiver 6 first half-wave plate 7 second half-wave plate 8 current-voltage converter 9 voltmeter 10 PC 11, 12 stepping motor

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G01M 11/00 G01B 11/06 G01N 21/21 G02F 1/13 101

Claims (16)

(57) [Claims] 1. A light that emits light of at least a predetermined wavelength.
Extracting a predetermined polarized light from light emitted by the light source and the light source
A polarizer transmits the predetermined polarized light extracted by the polarizer.
A liquid crystal cell for optical rotation, and an analyzer for analyzing the light transmitted through the liquid crystal cell, by receiving the transmitted light which is the light detecting by the analyzer transmission Te
Light receiver for measuring light intensity, based on the transmitted light intensity measured by the light receiver
Determining the twist angle and cell gap of the liquid crystal cell;
Using the determined twist angle and the cell gap
A control unit for controlling the calculation of the azimuth anchoring, wherein the polarizer and the analyzer each independently, the optical axis
The control unit is configured to be rotatable around the polarizer and the analyzer.
The liquid crystal cell is configured to be rotatable about the optical axis.
And in a free direction in a plane perpendicular to the optical axis.
Movable at all points in the display surface of the liquid crystal cell,
By measuring the in-plane distribution of the liquid crystal cell characteristics,
Twist angle, cell gap and
And azimuth anchoring measurement device. 2. The controller according to claim 1 , wherein a transmission axis between the polarizer and the analyzer has a predetermined angle.
To rotate the polarizer and the analyzer from the predetermined angle.
The transmitted light intensity measured by the receiver while synchronizing is
Rotates to the maximum or minimum angle, and shifts from the angle at which the transmitted light intensity is maximum or minimum.
Turn a photon or one of the analyzers at a given angular velocity
2. The method according to claim 1, wherein the control is performed so as to move the object.
Angle, cell gap and azimuth anchoring measurements
Setting device. 3. A light that emits light of at least a predetermined wavelength.
Extracting a predetermined polarized light from light emitted by the light source and the light source
A polarizer, for the predetermined polarized light extracted by the polarizer,
1 which is transmitted by giving a phase difference corresponding to 1/2 of the polarized light
A half-wave plate, a liquid crystal cell rotating by the transmitted light of the half-wave plate, an analyzer for analyzing the transmitted light of the liquid crystal cell, and receiving the transmitted light detected by the analyzer. Through
Light receiver for measuring light intensity, based on the transmitted light intensity measured by the light receiver
Determining the twist angle and cell gap of the liquid crystal cell;
Using the determined twist angle and the cell gap
A control unit for controlling an operation of azimuth anchoring, wherein the polarizer, the half-wave plate, and the analyzer are
The controller is independently rotatable about the optical axis, and the control unit includes the polarizer, the half-wave plate, and the
The liquid crystal cell controls the rotation of each of the analyzers, and is configured to be rotatable about the optical axis.
And in a free direction in a plane perpendicular to the optical axis.
Movable at all points in the display surface of the liquid crystal cell,
By measuring the in-plane distribution of the liquid crystal cell characteristics,
Twist angle, cell gap and
And azimuth anchoring measurement device. 4. The control section sets a transmission axis between the polarizer and the analyzer at a predetermined angle.
So that the half-wave plate and the analyzer can be rotated from the predetermined angle.
Rotate the light with the light receiver while maintaining the rotation angle ratio of 1: 2.
Up to the angle where the measured transmitted light intensity is maximum or minimum
Rotate in the same direction or in the opposite direction, and deviate from the angle at which the transmitted light intensity is maximum or minimum.
Rotate either the photon or the analyzer at a given angular velocity
4. The control method according to claim 3, wherein
Twist angle, cell gap and azimuth anchoring measurements
apparatus. 5. Light for emitting light of at least a predetermined wavelength.
Extracting a predetermined polarized light from light emitted by the light source and the light source
A polarizer transmits the predetermined polarized light extracted by the polarizer.
A liquid crystal cell that rotates the liquid crystal, and that is half the transmitted light of the liquid crystal cell.
A half-wave plate which transmits by giving a phase difference equivalent to a analyzers for analyzing the light transmitted through the half-wave plate, transmitted by receiving the transmitted light which is the light detecting by said analyzer
Light receiver for measuring light intensity, based on the transmitted light intensity measured by the light receiver
Determining the twist angle and cell gap of the liquid crystal cell;
Using the determined twist angle and the cell gap
A control unit for controlling an operation of azimuth anchoring, wherein the polarizer, the half-wave plate, and the analyzer are
The controller is independently rotatable about the optical axis, and the control unit includes the polarizer, the half-wave plate, and the
The liquid crystal cell controls the rotation of each of the analyzers, and is configured to be rotatable about the optical axis.
And in a free direction in a plane perpendicular to the optical axis.
Movable at all points in the display surface of the liquid crystal cell,
By measuring the in-plane distribution of the liquid crystal cell characteristics,
Twist angle, cell gap and
And azimuth anchoring measurement device. 6. The control section sets a transmission axis between the polarizer and the analyzer at a predetermined angle.
From the predetermined angle, the half-wave plate and the polarizer or
Is a rotation angle ratio of 1: 2 with one of the analyzers
And the transmitted light intensity measured by the
Turn in the same or opposite direction to the maximum or minimum angle
From the angle at which the transmitted light intensity is maximum or minimum.
Rotate either the photon or the analyzer at a given angular velocity
6. The control method according to claim 5, wherein
Twist angle, cell gap and azimuth anchoring measurements
apparatus. 7. Light for emitting light of at least a predetermined wavelength.
Extracting a predetermined polarized light from light emitted by the light source and the light source
A polarizer, for the predetermined polarized light extracted by the polarizer,
A phase difference corresponding to a half of the polarized light
A half-wave plate and a liquid crystal cell that is rotated by the transmitted light of the first half-wave plate.
With the transmitted light of the liquid crystal cell to half of the transmitted light.
A second half-wave plate which transmits by giving a phase difference equivalent to a analyzers for analyzing the light transmitted through the second half-wave plate, the transmitted light which is the light detecting by said analyzer Receive and transmit
Light receiver for measuring light intensity, based on the transmitted light intensity measured by the light receiver
Determining the twist angle and cell gap of the liquid crystal cell;
Using the determined twist angle and the cell gap
A control unit that controls an operation of azimuth anchoring, wherein the polarizer, the first half-wave plate, and the second
The two-wavelength plate and the analyzer each independently have an optical axis
The control unit is configured to be rotatable about a center, and the control unit includes the polarizer, the first half-wave plate,
Each of the second half-wave plate and the analyzer
Controlling the rotation, the liquid crystal cell is configured to be rotatable about the optical axis.
And in a free direction in a plane perpendicular to the optical axis.
Movable at all points in the display surface of the liquid crystal cell,
By measuring the in-plane distribution of the liquid crystal cell characteristics,
Twist angle, cell gap and
And azimuth anchoring measurement device. 8. The control unit sets a transmission axis between the polarizer and the analyzer at a predetermined angle.
Rotate from the predetermined angle to the first half-wave plate and the second half-wave plate.
To the receiver while synchronizing the rotation with the half-wave plate
The angle at which the transmitted light intensity measured at
At the same or opposite direction, and from the angle at which the transmitted light intensity is maximum or minimum.
One half-wave plate, the second half-wave plate, the polarization
And the analyzer is rotated at a predetermined angular velocity.
The control according to claim 7, wherein the control is performed such that
Strike angle, Sergii cap and azimuth anchoring measurement instrumentation
Place. 9. Light for emitting light of at least a predetermined wavelength.
A source and a predetermined polarization from light emitted by the light source.
Outgoing polarizer, and the predetermined
Liquid crystal cell that transmits polarized light and performs optical rotation, and transmission of the liquid crystal cell
An analyzer for analyzing light; and the analyzer analyzed by the analyzer.
A light receiver for receiving transmitted light and measuring transmitted light intensity;
The liquid based on the transmitted light intensity measured by an optical device
Of twist angle and cell gap of crystal cell and its determination
Azimuth angle using the determined twist angle and the cell gap
A control unit for controlling an operation of anchoring
Angle, cell gap and azimuth anchoring
A measurement method, wherein a transmission axis of the polarizer and the analyzer has a predetermined angle.
A first rotation step of rotating the light source , an emission step of emitting light of a predetermined wavelength from the light source, and a predetermined rotation of the light emitted from the light source by the polarizer.
A polarization step of extracting polarized light, and the predetermined polarized light extracted in the polarization step
A light application step of rotating the liquid crystal cell, and a light transmitted through the liquid crystal cell in the light application step by an analyzer.
A light receiving step of receiving the transmitted light detected in the light detecting step.
Measuring the transmitted light intensity by illuminating, and the transmitted light intensity measured in the measuring step is maximized.
The polarizer and the analyzer up to a minimum angle.
A second rotation step of rotating while performing the rotation, and the deviation from an angle at which the transmitted light intensity is maximum or minimum.
Rotate either the photon or the analyzer at a given angular velocity
A third rotating step, and the polarizer or the analyzer by the third rotating step.
When any one of them is rotated at a predetermined angular velocity, the light receiving
From the intensity of the transmitted light received by the liquid crystal cell.
First calculation method for calculating twist angle and cell gap
And the twist angle and the twist angle calculated in the first calculation step.
And the azimuth angle of the liquid crystal cell using the cell gap.
A second calculating step of calculating anchoring ; and centering the liquid crystal cell around an optical axis of light emitted from the light source.
And / or moved in a plane perpendicular to the optical axis.
A rotating / moving step of moving the liquid crystal cell with respect to the optical axis by the rotating / moving step.
And move in a vertical plane,
By measuring the transmitted light intensity at a point, the liquid crystal cell
Twist characterized by measuring in-plane distribution of characteristics
Angle, cell gap and azimuth anchoring
Measuring method. 10. Emitting light of at least a predetermined wavelength
A light source and a predetermined polarized light from the light emitted by the light source.
And the predetermined polarizer extracted by the polarizer.
With a phase difference of 1/2 of the polarized light
Rotation by the half-wave plate and the transmitted light of the half-wave plate
Liquid crystal cell, and analyzer for detecting transmitted light of the liquid crystal cell
Receiving the transmitted light detected by the analyzer and transmitting the transmitted light.
A receiver for measuring the intensity of the transmitted light; and
The twist angle of the liquid crystal cell based on the transmitted light intensity.
And the determination of the cell gap and the determined twist angle and
And calculation of azimuth anchoring using the cell gap
Angle, cell gap comprising a control unit for controlling the
And a measurement method of the azimuth anchoring measurement device, wherein the transmission axis of the polarizer and the analyzer becomes a predetermined angle.
A first rotation step of rotating the light source , an emission step of emitting light of a predetermined wavelength from the light source, and a predetermined rotation of the light emitted from the light source by the polarizer.
A polarization step of extracting polarized light, and the predetermined polarized light extracted in the polarization step
A light application step of rotating the liquid crystal cell, and a light transmitted through the liquid crystal cell in the light application step by an analyzer.
A light receiving step of receiving the transmitted light detected in the light detecting step.
Measuring the transmitted light intensity by illuminating, and the transmitted light intensity measured in the measuring step is maximized.
Or the half-wave plate and the analyzer to a minimum angle.
And the same direction or opposite while maintaining a rotation angle ratio of 1: 2
A second rotation step of rotating in the direction, and the deviation from an angle at which the transmitted light intensity is maximum or minimum.
Any one of photons, the analyzer, and the half-wave plate
A third rotating step of rotating at an angular velocity of: the polarizer, the analyzer,
One of the half-wave plates was rotated at a predetermined angular velocity
At this time, from the transmitted light intensity received by the light receiver
Calculating the twist angle and cell gap of the liquid crystal cell
A first calculating step, and the twist angle and the twist angle calculated in the first calculating step.
And the azimuth angle of the liquid crystal cell using the cell gap.
A second calculating step of calculating anchoring ; and centering the liquid crystal cell around an optical axis of light emitted from the light source.
And / or moved in a plane perpendicular to the optical axis.
A rotating / moving step of moving the liquid crystal cell with respect to the optical axis by the rotating / moving step.
And move in a vertical plane,
By measuring the transmitted light intensity at a point, the liquid crystal cell
Twist characterized by measuring in-plane distribution of characteristics
Angle, cell gap and azimuth anchoring
Measuring method. 11. Emitting light of at least a predetermined wavelength
A light source and a predetermined polarized light from the light emitted by the light source.
And the predetermined polarizer extracted by the polarizer.
A liquid crystal cell that transmits light of different polarizations and emits light.
Gives a phase difference corresponding to 1/2 of the transmitted light to the overlight
And a half-wave plate that transmits
An analyzer for analyzing the transmitted light having the phase difference;
The transmitted light detected by the photon is received and the transmitted light intensity is received.
A light receiver for measuring the transmittance, and the transmittance measured by the light receiver.
The twist angle and cell angle of the liquid crystal cell are
Of the determined twist angle and the determined twist angle
Control azimuth anchoring calculation using
Angle, cell gap and azimuth with control unit
A measurement method of an angle anchoring measurement device, wherein a transmission axis of the polarizer and the analyzer has a predetermined angle.
A first rotation step of rotating the light source , an emission step of emitting light of a predetermined wavelength from the light source, and a predetermined rotation of the light emitted from the light source by the polarizer.
A higher polarization Engineering retrieve the polarization, by the predetermined polarized light taken out by the polarizing step
A light application step of rotating the liquid crystal cell, and a light transmitted through the liquid crystal cell in the light application step by an analyzer.
A light receiving step of receiving the transmitted light detected in the light detecting step.
Measuring the transmitted light intensity by illuminating, and the transmitted light intensity measured in the measuring step is maximized.
Or the half-wave plate and the polarizer up to a minimum angle.
And the same direction or opposite while maintaining a rotation angle ratio of 1: 2
A second rotation step of rotating in the direction, and the deviation from an angle at which the transmitted light intensity is maximum or minimum.
Any one of photons, the analyzer, and the half-wave plate
A third rotating step of rotating at an angular velocity of: the polarizer, the analyzer,
One of the half-wave plates was rotated at a predetermined angular velocity
The intensity of the transmitted light received by the light receiver
Calculate twist angle and cell gap of liquid crystal cell
A first calculation step, and the twist angle and the twist angle calculated in the first calculation step.
And the azimuth angle of the liquid crystal cell using the cell gap.
A second calculating step of calculating anchoring ; and centering the liquid crystal cell around an optical axis of light emitted from the light source.
And / or moved in a plane perpendicular to the optical axis.
A rotating / moving step of moving the liquid crystal cell with respect to the optical axis by the rotating / moving step.
And move in a vertical plane,
By measuring the transmitted light intensity at a point, the liquid crystal cell
Twist characterized by measuring in-plane distribution of characteristics
Angle, cell gap and azimuth anchoring
Measuring method. 12. Emitting light of at least a predetermined wavelength
A light source and a predetermined polarized light from the light emitted by the light source.
And the predetermined polarizer extracted by the polarizer.
Phase difference corresponding to １ ／ of the polarized light
A first half-wave plate transmitting the first half-wave
Liquid applied by transmitted light with phase difference given by long plate
Crystal cell and one-half of the transmitted light with respect to the transmitted light of the liquid crystal cell.
The second half wave transmitted by giving a phase difference equivalent to twice
A phase difference is given by the long plate and the second half-wave plate.
An analyzer for analyzing the transmitted light, and an analyzer for analyzing the transmitted light.
Receiving the transmitted light and measuring the transmitted light intensity
Based on the transmitted light intensity measured by the light receiver.
To determine the twist angle and cell gap of the liquid crystal cell.
Using the determined twist angle and the cell gap
And a control unit for controlling the azimuth anchoring calculation.
Twist angle, cell gap and azimuth anchoring
A measurement method of a measurement device, wherein a transmission axis of the polarizer and the analyzer has a predetermined angle.
A first rotation step of rotating the light source , an emission step of emitting light of a predetermined wavelength from the light source, and a predetermined rotation of the light emitted from the light source by the polarizer.
A polarization step of extracting polarized light, and the predetermined polarized light extracted in the polarization step
A light application step of rotating the liquid crystal cell, and a light transmitted through the liquid crystal cell in the light application step by an analyzer.
A light receiving step of receiving the transmitted light detected in the light detecting step.
Measuring the transmitted light intensity by illuminating, and the transmitted light intensity measured in the measuring step is maximized.
Or the first half-wave plate and the angle up to a minimum angle.
The second, which rotates while synchronizing with the second half-wave plate
A rotating step, and from the angle at which the transmitted light intensity is maximum or minimum,
One half-wave plate, the second half-wave plate, the polarization
And a second one that rotates one of the analyzer and the analyzer at a predetermined angular velocity.
3 and the third rotating step, the first half-wave plate,
The second half-wave plate, the polarizer, or the analyzer;
When it is rotated at a predetermined angular velocity,
Twist of the liquid crystal cell from the received transmitted light intensity
A first calculating step of calculating an angle and a cell gap, and the twist angle and the twist angle calculated in the first calculating step.
And the azimuth angle of the liquid crystal cell using the cell gap.
A second calculating step of calculating anchoring ; and centering the liquid crystal cell around an optical axis of light emitted from the light source.
And / or moved in a plane perpendicular to the optical axis.
A rotating / moving step of moving the liquid crystal cell with respect to the optical axis by the rotating / moving step.
And move in a vertical plane,
By measuring the transmitted light intensity at a point, the liquid crystal cell
Twist characterized by measuring in-plane distribution of characteristics
Angle, cell gap and azimuth anchoring
Measuring method. 13. Emitting light of at least a predetermined wavelength
A light source and a predetermined polarized light from the light emitted by the light source.
And the predetermined polarizer extracted by the polarizer.
A liquid crystal cell that transmits optically polarized light and makes an optical rotation,
An analyzer for detecting over-light, and before the light is analyzed by the analyzer.
A receiver for receiving the transmitted light and measuring the transmitted light intensity;
Based on the transmitted light intensity measured by a light receiver
Determination of twist angle and cell gap of liquid crystal cell and said determination
Using the defined twist angle and the cell gap
Control unit for controlling the calculation of angular anchoring
Strike angle, cell gap and azimuth anchoring measurement device
A storage medium storing a program, comprising the transmission axis of the polarizer and the analyzer a predetermined angle
Rotation processing, an emission processing for emitting light of a predetermined wavelength from the light source, and a predetermined processing by the polarizer from the light emitted from the light source.
Polarization processing for extracting polarized light, and the predetermined polarized light extracted by the polarization processing
A light treatment for rotating the liquid crystal cell, and a light transmitted through the liquid crystal cell by the light treatment by an analyzer.
And the transmitted light detected by the light detection processing is received by a light receiver.
Measuring the transmitted light intensity by illuminating the light; and measuring the transmitted light intensity measured by the measuring process to a maximum.
The polarizer and the analyzer up to a minimum angle.
A second rotation process in which the transmitted light intensity is maximized or minimized.
Rotate either the photon or the analyzer at a given angular velocity
And the third polarizer and the third polarizer perform the polarizer or the analyzer.
The light receiver when any one of them is rotated at a predetermined angular velocity
From the intensity of the transmitted light received by the liquid crystal cell.
First calculation processing for calculating ist angle and cell gap
And the twist angle calculated by the first calculation process.
And the azimuth angle of the liquid crystal cell using the cell gap.
A second calculation process for calculating anchoring, and centering the liquid crystal cell around an optical axis of light emitted from the light source.
And / or moved in a plane perpendicular to the optical axis.
And rotating the liquid crystal cell with respect to the optical axis by the rotating / moving process.
And move in a vertical plane,
By measuring the transmitted light intensity at a point, the liquid crystal cell
The program for measuring the in-plane distribution of characteristics is stored.
A storage medium storing a program characterized by the following. 14. Emitting light of at least a predetermined wavelength
A light source and a predetermined polarized light from the light emitted by the light source.
And the predetermined polarizer extracted by the polarizer.
With a phase difference of 1/2 of the polarized light
Rotation by the half-wave plate and the transmitted light of the half-wave plate
Liquid crystal cell, and analyzer for detecting transmitted light of the liquid crystal cell
Receiving the transmitted light detected by the analyzer and transmitting the transmitted light.
A receiver for measuring the intensity of the transmitted light; and
The twist angle of the liquid crystal cell based on the transmitted light intensity.
And the determination of the cell gap and the determined twist angle and
And calculation of azimuth anchoring using the cell gap
Angle, cell gap comprising a control unit for controlling the
And the program of the azimuth anchoring measurement device
A storage medium, comprising a transmission axis of the polarizer and the analyzer a predetermined angle
Rotation processing, an emission processing for emitting light of a predetermined wavelength from the light source, and a predetermined processing by the polarizer from the light emitted from the light source.
Polarization processing for extracting polarized light, and the predetermined polarized light extracted by the polarization processing
And facilities light processing to optical rotation of the liquid crystal cell, the light transmitted through the liquid crystal cell according to the optical rotation processing in the analyzer
And the transmitted light detected by the light detection processing is received by a light receiver.
Measuring the transmitted light intensity by illuminating the light; and measuring the transmitted light intensity measured by the measuring process to a maximum.
Or the half-wave plate and the analyzer to a minimum angle.
And the same direction or opposite while maintaining a rotation angle ratio of 1: 2
A second rotation process that rotates in the direction, and the deviation from the angle at which the transmitted light intensity is maximum or minimum.
Any one of photons, the analyzer, and the half-wave plate
A third rotation process of rotating at an angular velocity of: the polarizer, the analyzer, and the third rotation process.
One of the half-wave plates was rotated at a predetermined angular velocity
From the transmitted light intensity received by the light receiver at the time of
Calculate twist angle and cell gap of liquid crystal cell
A first calculation process, and the twist angle and the twist angle calculated by the first calculation process.
And the azimuth angle of the liquid crystal cell using the cell gap.
A second calculation process for calculating anchoring, and centering the liquid crystal cell around an optical axis of light emitted from the light source.
And / or moved in a plane perpendicular to the optical axis.
And rotating the liquid crystal cell with respect to the optical axis by the rotating / moving process.
And move in a vertical plane,
By measuring the transmitted light intensity at a point, the liquid crystal cell
The program for measuring the in-plane distribution of characteristics is stored.
A storage medium storing a program characterized by the following. 15. Emitting light of at least a predetermined wavelength
A light source and a predetermined polarized light from the light emitted by the light source.
And the predetermined polarizer extracted by the polarizer.
A liquid crystal cell that transmits light of different polarizations and emits light.
Gives a phase difference corresponding to 1/2 of the transmitted light to the overlight
And a half-wave plate that transmits
An analyzer for analyzing the transmitted light having the phase difference;
The transmitted light detected by the photon is received and the transmitted light intensity is received.
A light receiver for measuring the transmittance, and the transmittance measured by the light receiver.
The twist angle and cell angle of the liquid crystal cell are
Of the determined twist angle and the determined twist angle
Control azimuth anchoring calculation using
Angle, cell gap and azimuth with control unit
Storage medium storing program of angular anchoring measurement device
A body, comprising a transmission axis of the polarizer and the analyzer a predetermined angle
Rotation processing, an emission processing for emitting light of a predetermined wavelength from the light source, and a predetermined processing by the polarizer from the light emitted from the light source.
Polarization processing for extracting polarized light, and the predetermined polarized light extracted by the polarization processing
A light treatment for rotating the liquid crystal cell, and a light transmitted through the liquid crystal cell by the light treatment by an analyzer.
And the transmitted light detected by the light detection processing is received by a light receiver.
Measuring the transmitted light intensity by illuminating the light; and measuring the transmitted light intensity measured by the measuring process to a maximum.
Or the half-wave plate and the polarizer up to a minimum angle.
And the same direction or opposite while maintaining a rotation angle ratio of 1: 2
A second rotation process that rotates in the direction, and the deviation from the angle at which the transmitted light intensity is maximum or minimum.
Any one of photons, the analyzer, and the half-wave plate
A third rotation process of rotating at an angular velocity of: the polarizer, the analyzer, and the third rotation process.
One of the half-wave plates was rotated at a predetermined angular velocity
From the transmitted light intensity received by the light receiver at the time of
Calculate twist angle and cell gap of liquid crystal cell
A first calculation process, and the twist angle and the twist angle calculated by the first calculation process.
And the azimuth angle of the liquid crystal cell using the cell gap.
A second calculation process for calculating anchoring, and centering the liquid crystal cell around an optical axis of light emitted from the light source.
And / or moved in a plane perpendicular to the optical axis.
And rotating the liquid crystal cell with respect to the optical axis by the rotating / moving process.
And move in a vertical plane,
By measuring the transmitted light intensity at a point, the liquid crystal cell
The program for measuring the in-plane distribution of characteristics is stored.
A storage medium storing a program characterized by the following. 16. Emitting light of at least a predetermined wavelength
A light source and a predetermined polarized light from the light emitted by the light source.
And the predetermined polarizer extracted by the polarizer.
Phase difference corresponding to １ ／ of the polarized light
A first half-wave plate transmitting the first half-wave
Liquid applied by transmitted light with phase difference given by long plate
Crystal cell and one-half of the transmitted light with respect to the transmitted light of the liquid crystal cell.
The second half wave transmitted by giving a phase difference equivalent to twice
A phase difference is given by the long plate and the second half-wave plate.
An analyzer for analyzing the transmitted light, and an analyzer for analyzing the transmitted light.
Receiving the transmitted light and measuring the transmitted light intensity
Based on the transmitted light intensity measured by the light receiver.
To determine the twist angle and cell gap of the liquid crystal cell.
Using the determined twist angle and the cell gap
And a control unit for controlling the azimuth anchoring calculation.
Twist angle, cell gap and azimuth anchoring
A storage medium storing a program of a measurement device, wherein a transmission axis between the polarizer and the analyzer has a predetermined angle.
Rotation processing, an emission processing for emitting light of a predetermined wavelength from the light source, and a predetermined processing by the polarizer from the light emitted from the light source.
Polarization processing for extracting polarized light, and the predetermined polarized light extracted by the polarization processing
A light treatment for rotating the liquid crystal cell, and a light transmitted through the liquid crystal cell by the light treatment by an analyzer.
And the transmitted light detected by the light detection processing is received by a light receiver.
Measuring the transmitted light intensity by illuminating the light; and measuring the transmitted light intensity measured by the measuring process to a maximum.
Or the first half-wave plate and the angle up to a minimum angle.
The second, which rotates while synchronizing with the second half-wave plate
Rotation processing and the angle at which the transmitted light intensity is maximum or minimum
1 half-wave plate, prior Symbol second half-wave plate, the polarization
And a second one that rotates one of the analyzer and the analyzer at a predetermined angular velocity.
3 and the third rotation process, the first half-wave plate,
The second half-wave plate, the polarizer, or the analyzer;
By means of the light receiver when it is rotated at a predetermined angular velocity
Twist of the liquid crystal cell from the received transmitted light intensity
A first calculation process of calculating an angle and a cell gap; and the twist angle and the twist angle calculated by the first calculation process.
And the azimuth angle of the liquid crystal cell using the cell gap.
A second calculation process for calculating anchoring, and centering the liquid crystal cell around an optical axis of light emitted from the light source.
And / or moved in a plane perpendicular to the optical axis.
And rotating the liquid crystal cell with respect to the optical axis by the rotating / moving process.
And move in a vertical plane,
By measuring the transmitted light intensity at a point, the liquid crystal cell
The program for measuring the in-plane distribution of characteristics is stored.
A storage medium storing a program characterized by the following.