JP3354602B2 - Flexible tube aseptic joining device - Google Patents

Flexible tube aseptic joining device

Info

Publication number
JP3354602B2
JP3354602B2 JP26067892A JP26067892A JP3354602B2 JP 3354602 B2 JP3354602 B2 JP 3354602B2 JP 26067892 A JP26067892 A JP 26067892A JP 26067892 A JP26067892 A JP 26067892A JP 3354602 B2 JP3354602 B2 JP 3354602B2
Authority
JP
Japan
Prior art keywords
wafer
clamp
circuit
temperature
flexible tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP26067892A
Other languages
Japanese (ja)
Other versions
JPH0678971A (en
Inventor
好雄 伊藤
憲明 平野
篤 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Terumo Corp
Original Assignee
Terumo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Terumo Corp filed Critical Terumo Corp
Priority to JP26067892A priority Critical patent/JP3354602B2/en
Publication of JPH0678971A publication Critical patent/JPH0678971A/en
Application granted granted Critical
Publication of JP3354602B2 publication Critical patent/JP3354602B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61MDEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M39/00Tubes, tube connectors, tube couplings, valves, access sites or the like, specially adapted for medical use
    • A61M39/10Tube connectors; Tube couplings
    • A61M39/14Tube connectors; Tube couplings for connecting tubes having sealed ends
    • A61M39/146Tube connectors; Tube couplings for connecting tubes having sealed ends by cutting and welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/18Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools
    • B29C65/20Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools with direct contact, e.g. using "mirror"
    • B29C65/2007Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools with direct contact, e.g. using "mirror" characterised by the type of welding mirror
    • B29C65/203Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools with direct contact, e.g. using "mirror" characterised by the type of welding mirror being several single mirrors, e.g. not mounted on the same tool
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/18Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools
    • B29C65/20Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools with direct contact, e.g. using "mirror"
    • B29C65/2046Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools with direct contact, e.g. using "mirror" using a welding mirror which also cuts the parts to be joined, e.g. for sterile welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/18Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools
    • B29C65/20Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools with direct contact, e.g. using "mirror"
    • B29C65/2053Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools with direct contact, e.g. using "mirror" characterised by special ways of bringing the welding mirrors into position
    • B29C65/2061Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools with direct contact, e.g. using "mirror" characterised by special ways of bringing the welding mirrors into position by sliding
    • B29C65/2069Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools with direct contact, e.g. using "mirror" characterised by special ways of bringing the welding mirrors into position by sliding with an angle with respect to the plane comprising the parts to be joined
    • B29C65/2076Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools with direct contact, e.g. using "mirror" characterised by special ways of bringing the welding mirrors into position by sliding with an angle with respect to the plane comprising the parts to be joined perpendicularly to the plane comprising the parts to be joined
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/02Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
    • B29C65/18Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools
    • B29C65/24Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using heated tools characterised by the means for heating the tool
    • B29C65/30Electrical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/78Means for handling the parts to be joined, e.g. for making containers or hollow articles, e.g. means for handling sheets, plates, web-like materials, tubular articles, hollow articles or elements to be joined therewith; Means for discharging the joined articles from the joining apparatus
    • B29C65/7802Positioning the parts to be joined, e.g. aligning, indexing or centring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C65/00Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
    • B29C65/78Means for handling the parts to be joined, e.g. for making containers or hollow articles, e.g. means for handling sheets, plates, web-like materials, tubular articles, hollow articles or elements to be joined therewith; Means for discharging the joined articles from the joining apparatus
    • B29C65/7841Holding or clamping means for handling purposes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/001Joining in special atmospheres
    • B29C66/0012Joining in special atmospheres characterised by the type of environment
    • B29C66/0018Joining in special atmospheres characterised by the type of environment being sterile
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/01General aspects dealing with the joint area or with the area to be joined
    • B29C66/05Particular design of joint configurations
    • B29C66/10Particular design of joint configurations particular design of the joint cross-sections
    • B29C66/11Joint cross-sections comprising a single joint-segment, i.e. one of the parts to be joined comprising a single joint-segment in the joint cross-section
    • B29C66/114Single butt joints
    • B29C66/1142Single butt to butt joints
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/50General aspects of joining tubular articles; General aspects of joining long products, i.e. bars or profiled elements; General aspects of joining single elements to tubular articles, hollow articles or bars; General aspects of joining several hollow-preforms to form hollow or tubular articles
    • B29C66/51Joining tubular articles, profiled elements or bars; Joining single elements to tubular articles, hollow articles or bars; Joining several hollow-preforms to form hollow or tubular articles
    • B29C66/52Joining tubular articles, bars or profiled elements
    • B29C66/522Joining tubular articles
    • B29C66/5221Joining tubular articles for forming coaxial connections, i.e. the tubular articles to be joined forming a zero angle relative to each other
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/70General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/73General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/737General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the state of the material of the parts to be joined
    • B29C66/7373Joining soiled or oxidised materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/70General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material
    • B29C66/73General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/739General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset
    • B29C66/7392General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of at least one of the parts being a thermoplastic
    • B29C66/73921General aspects of processes or apparatus for joining preformed parts characterised by the composition, physical properties or the structure of the material of the parts to be joined; Joining with non-plastics material characterised by the intensive physical properties of the material of the parts to be joined, by the optical properties of the material of the parts to be joined, by the extensive physical properties of the parts to be joined, by the state of the material of the parts to be joined or by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of the parts to be joined being a thermoplastic or a thermoset characterised by the material of at least one of the parts being a thermoplastic characterised by the materials of both parts being thermoplastics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/80General aspects of machine operations or constructions and parts thereof
    • B29C66/81General aspects of the pressing elements, i.e. the elements applying pressure on the parts to be joined in the area to be joined, e.g. the welding jaws or clamps
    • B29C66/816General aspects of the pressing elements, i.e. the elements applying pressure on the parts to be joined in the area to be joined, e.g. the welding jaws or clamps characterised by the mounting of the pressing elements, e.g. of the welding jaws or clamps
    • B29C66/8167Quick change joining tools or surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/80General aspects of machine operations or constructions and parts thereof
    • B29C66/84Specific machine types or machines suitable for specific applications
    • B29C66/857Medical tube welding machines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/80General aspects of machine operations or constructions and parts thereof
    • B29C66/87Auxiliary operations or devices
    • B29C66/874Safety measures or devices
    • B29C66/8748Safety measures or devices involving the use of warnings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/80General aspects of machine operations or constructions and parts thereof
    • B29C66/87Auxiliary operations or devices
    • B29C66/876Maintenance or cleaning
    • B29C66/8762Cleaning of the joining tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/90Measuring or controlling the joining process
    • B29C66/91Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
    • B29C66/912Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux
    • B29C66/9121Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux by measuring the temperature
    • B29C66/91211Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux by measuring the temperature with special temperature measurement means or methods
    • B29C66/91212Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux by measuring the temperature with special temperature measurement means or methods involving measurement means being part of the welding jaws, e.g. integrated in the welding jaws
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/90Measuring or controlling the joining process
    • B29C66/91Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
    • B29C66/912Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux
    • B29C66/9121Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux by measuring the temperature
    • B29C66/91231Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux by measuring the temperature of the joining tool
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/90Measuring or controlling the joining process
    • B29C66/91Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
    • B29C66/912Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux
    • B29C66/9131Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux by measuring the heat or the thermal flux, i.e. the heat flux
    • B29C66/91311Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux by measuring the heat or the thermal flux, i.e. the heat flux by measuring the heat generated by Joule heating or induction heating
    • B29C66/91313Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux by measuring the heat or the thermal flux, i.e. the heat flux by measuring the heat generated by Joule heating or induction heating by measuring the voltage, i.e. the electric potential difference or electric tension
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/90Measuring or controlling the joining process
    • B29C66/91Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
    • B29C66/912Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux
    • B29C66/9131Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux by measuring the heat or the thermal flux, i.e. the heat flux
    • B29C66/91311Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux by measuring the heat or the thermal flux, i.e. the heat flux by measuring the heat generated by Joule heating or induction heating
    • B29C66/91315Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by measuring the temperature, the heat or the thermal flux by measuring the heat or the thermal flux, i.e. the heat flux by measuring the heat generated by Joule heating or induction heating by measuring the current intensity
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/90Measuring or controlling the joining process
    • B29C66/91Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
    • B29C66/914Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux
    • B29C66/9141Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the temperature
    • B29C66/91421Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the temperature of the joining tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/90Measuring or controlling the joining process
    • B29C66/91Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
    • B29C66/914Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux
    • B29C66/9161Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the heat or the thermal flux, i.e. the heat flux
    • B29C66/91651Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the heat or the thermal flux, i.e. the heat flux by controlling or regulating the heat generated by Joule heating or induction heating
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/90Measuring or controlling the joining process
    • B29C66/96Measuring or controlling the joining process characterised by the method for implementing the controlling of the joining process
    • B29C66/961Measuring or controlling the joining process characterised by the method for implementing the controlling of the joining process involving a feedback loop mechanism, e.g. comparison with a desired value
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/90Measuring or controlling the joining process
    • B29C66/96Measuring or controlling the joining process characterised by the method for implementing the controlling of the joining process
    • B29C66/962Measuring or controlling the joining process characterised by the method for implementing the controlling of the joining process using proportional controllers, e.g. PID controllers [proportional–integral–derivative controllers]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/90Measuring or controlling the joining process
    • B29C66/91Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux
    • B29C66/914Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux
    • B29C66/9161Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the heat or the thermal flux, i.e. the heat flux
    • B29C66/91651Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the heat or the thermal flux, i.e. the heat flux by controlling or regulating the heat generated by Joule heating or induction heating
    • B29C66/91653Measuring or controlling the joining process by measuring or controlling the temperature, the heat or the thermal flux by controlling or regulating the temperature, the heat or the thermal flux by controlling or regulating the heat or the thermal flux, i.e. the heat flux by controlling or regulating the heat generated by Joule heating or induction heating by controlling or regulating the voltage, i.e. the electric potential difference or electric tension
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C66/00General aspects of processes or apparatus for joining preformed parts
    • B29C66/90Measuring or controlling the joining process
    • B29C66/95Measuring or controlling the joining process by measuring or controlling specific variables not covered by groups B29C66/91 - B29C66/94
    • B29C66/959Measuring or controlling the joining process by measuring or controlling specific variables not covered by groups B29C66/91 - B29C66/94 characterised by specific values or ranges of said specific variables
    • B29C66/9592Measuring or controlling the joining process by measuring or controlling specific variables not covered by groups B29C66/91 - B29C66/94 characterised by specific values or ranges of said specific variables in explicit relation to another variable, e.g. X-Y diagrams

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、少なくとも2本の可撓
性チューブを加熱溶融して、無菌的に接続するための可
撓性チューブ無菌的接合装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an aseptic flexible tube joining apparatus for aseptically connecting at least two flexible tubes by heating and melting the tubes.

【0002】[0002]

【従来の技術】輸血システムにおける採血バッグおよび
血液成分バッグのチューブ接続、持続的腹膜透析(CA
PD)における透析液バッグと廃液バッグの交換時など
には、チューブの接続を無菌的に行うことが必要とな
る。このようなチューブの無菌的接続を行う装置として
は、特公昭61−30582号公報に示されものがあ
る。この特公昭61−30582号公報に示されている
装置は、チューブを加熱溶融して接続するチューブ接続
装置であり、接続すべき2本の可撓性チューブを平行状
態にて保持する第1クランプおよび第2クランプと、第
1クランプおよび第2クランプ間にて可撓性チューブを
切断するための切断手段と、切断手段により切断された
可撓性チューブの接合される端部相互が密着するように
第1クランプまたは第2クランプの少なくとも一方を移
動させる移動手段とを有している。
2. Description of the Related Art Tube connection of blood collection bags and blood component bags in blood transfusion systems, continuous peritoneal dialysis (CA)
At the time of exchanging the dialysate bag and the waste liquid bag in PD), it is necessary to connect the tubes aseptically. The apparatus for performing aseptic connection of such tubes are those Ru shown in JP-B-61-30582. The device disclosed in Japanese Patent Publication No. Sho 61-30582 is a tube connecting device for connecting a tube by heating and melting the tube, and a first clamp for holding two flexible tubes to be connected in a parallel state. And a second clamp, a cutting means for cutting the flexible tube between the first clamp and the second clamp, and a joined end of the flexible tube cut by the cutting means so as to be in close contact with each other. Moving means for moving at least one of the first clamp and the second clamp.

【0003】そして、切断手段は、可撓性チューブを溶
融切断するためのウエハーと、ウエハーを加熱するため
の電源とを有している。ウエハーを加熱するための電源
としては、特開昭59−64034号公報に示されてい
るように、定電流源を用いている。そして、ウエハーの
温度制御は、抵抗体の抵抗値温度変化を利用して、抵抗
値よりウエハーの温度を予測する方法を用いている。
[0003] The cutting means has a wafer for melting and cutting the flexible tube, and a power supply for heating the wafer. As a power supply for heating the wafer, a constant current source is used as disclosed in Japanese Patent Application Laid-Open No. 59-64034. The temperature control of the wafer uses a method of predicting the temperature of the wafer from the resistance value using a change in the resistance value temperature of the resistor.

【0004】[0004]

【発明が解決しようとする課題】しかし、特開昭59−
64034号公報に示されているように、定電流源を用
い、ウエハーの温度制御は、抵抗体の抵抗値温度変化を
利用して、抵抗値よりウエハーの温度を予測する方法で
は、実際にウエハーの温度を測定し制御するものではな
いので、確実な温度制御を行うことが困難であるという
問題点を有している。さらに、定電流源を用いた加熱回
路では、駆動回路の損失が大きいため、消費電力が大き
いう問題点もあった。そこで、本発明の目的は、可
撓性チューブを加熱溶融により切断するためのウエハー
の温度制御を確実に行うことができ、さらに、消費電力
が少ない可撓性チューブ無菌的接合装置を提供するもの
である。
However, Japanese Unexamined Patent Publication No.
As disclosed in Japanese Patent No. 64034, a method of predicting a wafer temperature from a resistance value by using a constant current source and controlling a temperature of a wafer by using a temperature change of a resistance value of a resistor is not actually used. However, there is a problem that it is difficult to perform reliable temperature control because the temperature is not measured and controlled. Furthermore, a heating circuit using the constant-current source, since the loss of the drive circuit is large, there is a problem called large power consumption. Therefore, an object of the present invention is to provide a flexible tube aseptic joining apparatus which can surely control the temperature of a wafer for cutting a flexible tube by heating and melting, and further consumes less power. It is.

【0005】[0005]

【課題を解決するための手段】上記目的を達成するもの
は、可撓性チューブを無菌的に接合するための装置であ
って、該装置は、チューブを保持する第1クランプおよ
び第2クランプと、該第1クランプおよび第2クランプ
間にて前記可撓性チューブを切断するための切断手段と
を有し、前記切断手段は、可撓性チューブを溶融切断す
るためのウエハーと、該ウエハーを加熱するための定電
圧源と、ウエハー温度検知手段と、ウエハー加熱制御手
段とを有し、前記ウエハー加熱制御手段は、前記ウエハ
ー温度検知手段の出力に基づいて算出されるパルス幅変
調信号出力部、該パルス幅変調信号により前記定電圧
源を制御するためのドライブ回路と、ウエハー短絡保護
回路とを有し、前記ウエハー短絡保護回路は、前記ウエ
ハーの短絡検知部と、該短絡検知部の検知信号に基づ
き、前記パルス幅変調信号出力部からのパルス幅変調信
号の前記ドライブ回路への流入を制御するパルス幅変調
信号制御部を有している可撓性チューブ無菌的接合装置
である。また、上記目的を達成するものは、可撓性チュ
ーブを無菌的に接合するための装置であって、該装置
は、少なくとも2本の可撓性チューブを平行状態にて保
持する第1クランプおよび第2クランプと、該第1クラ
ンプおよび第2クランプ間にて前記可撓性チューブを切
断するための切断手段と、該切断手段により切断された
可撓性チューブの接合される端部相互が密着するように
前記第1クランプまたは前記第2クランプの少なくとも
一方を移動させる移動手段とを有し、前記切断手段は、
前記可撓性チューブを溶融切断するためのウエハーと、
該ウエハーを加熱するための定電圧源と、ウエハー温度
検知手段と、ウエハー加熱制御手段とを有し、前記ウエ
ハー加熱制御手段は、前記ウエハー温度検知手段の出力
に基づいて、算出されるパルス幅変調信号出力部を有
し、該パルス幅変調信号により前記定電圧源を制御する
ものである可撓性チューブ無菌的接合装置である。
SUMMARY OF THE INVENTION To achieve the above object, an apparatus for aseptically joining flexible tubes comprises a first clamp and a second clamp for holding the tubes. Cutting means for cutting the flexible tube between the first clamp and the second clamp, the cutting means comprising: a wafer for melting and cutting the flexible tube; A constant-voltage source for heating, a wafer temperature detection unit, and a wafer heating control unit, wherein the wafer heating control unit is a pulse width modulation signal output unit that is calculated based on an output of the wafer temperature detection unit. When, a drive circuit for controlling the constant voltage source by the pulse width modulation signal, wafer circuit protection
Circuit, and the wafer short-circuit protection circuit is
A short-circuit detection section of the hull and a detection signal of the short-circuit detection section.
A pulse width modulation signal from the pulse width modulation signal output unit.
Width modulation for controlling the flow of signals into the drive circuit
It is a flexible tube aseptic joining device having a signal control unit . What achieves the above object is a device for aseptically joining flexible tubes, the device comprising: a first clamp for holding at least two flexible tubes in a parallel state; A second clamp, a cutting means for cutting the flexible tube between the first clamp and the second clamp, and an end of the flexible tube cut by the cutting means joined to each other; Moving means for moving at least one of the first clamp and the second clamp so that the cutting means,
A wafer for melting and cutting the flexible tube;
A constant voltage source for heating the wafer, a wafer temperature detecting means, and a wafer heating control means, wherein the wafer heating control means calculates a pulse width based on an output of the wafer temperature detecting means. A flexible tube aseptic joining apparatus having a modulation signal output section and controlling the constant voltage source by the pulse width modulation signal.

【0006】そして、前記ウエハー加熱制御手段は、前
記ウエハー温度検知手段の出力に基づいて、補正ウエハ
ー温度算出部と、該算出部により算出された補正温度と
前記ウエハーの目的加熱温度との偏差信号を出力する偏
差信号出力部とを有し、前記パルス幅変調信号出力部
は、該偏差信号に基づいてパルス幅変調信号を出力する
ものであることが好ましい。さらに、前記ウエハー加熱
制御手段は、ウエハー短絡保護回路を有していることが
好ましい。また、前記ウエハー加熱制御手段は、該パル
ス幅変調信号により前記定電圧源を制御するためのドラ
イブ回路を有しており、前記ウエハー短絡保護回路は、
前記ウエハーの短絡検知部と、該短絡検知部の検知信号
に基づき、前記パルス幅変調信号出力部からのパルス幅
変調信号の前記ドライブ回路への流入を制御するパルス
幅変調信号制御部を有していることが好ましい。また、
前記補正ウエハー温度算出部は、比例・積分・微分補正
回路を有していることが好ましい。さらに、前記偏差信
号出力部は、比例・積分・微分補正回路を有しているこ
とが好ましい。そして、前記ウエハー温度検知手段は、
熱電対または測温抵抗体であることが好ましい。さら
に、前記ウエハー温度検知手段は、シース形熱電対また
は測温抵抗体であることが好ましい。
The wafer heating control means includes a correction wafer temperature calculating section based on an output of the wafer temperature detecting means, and a deviation signal between the correction temperature calculated by the calculation section and a target heating temperature of the wafer. And a deviation signal output unit that outputs a pulse width modulation signal based on the deviation signal. Further, it is preferable that the wafer heating control means has a wafer short-circuit protection circuit. Further, the wafer heating control means has a drive circuit for controlling the constant voltage source by the pulse width modulation signal, and the wafer short circuit protection circuit,
A short-circuit detection unit for the wafer, and a pulse width modulation signal control unit that controls a pulse width modulation signal from the pulse width modulation signal output unit to flow into the drive circuit based on a detection signal of the short circuit detection unit. Is preferred. Also,
It is preferable that the corrected wafer temperature calculating section has a proportional / integral / differential correction circuit. Further, it is preferable that the deviation signal output section has a proportional / integral / differential correction circuit. And, the wafer temperature detecting means includes:
It is preferably a thermocouple or a resistance thermometer. Further, it is preferable that the wafer temperature detecting means is a sheath type thermocouple or a temperature measuring resistor.

【0007】そこで、本発明の可撓性チューブ無菌的接
合装置について、図面を参照して説明する。この可撓性
チューブ無菌的接合装置1は、可撓性チューブを無菌的
に接合するための装置であって、少なくとも2本の可撓
性チューブを平行状態にて保持する第1クランプ3およ
び第2クランプ2と、第1クランプ3および第2クラン
プ2間にて可撓性チューブ48,49を切断するための
切断手段5と、切断手段5により切断された可撓性チュ
ーブ48,49の接合される端部相互48a,49aが
密着するように第1クランプ3または第2クランプ2の
少なくとも一方を移動させる移動手段とを有し、切断手
段5は、可撓性チューブ48,49を溶融切断するため
のウエハー6と、ウエハー6を加熱するための定電圧源
43と、ウエハー温度検知手段7と、ウエハー加熱制御
手段44とを有し、ウエハー加熱制御手段44は、ウエ
ハー温度検知手段7の出力に基づいて、算出されるパル
ス幅変調信号出力部59を有し、パルス幅変調信号によ
り定電圧源43を制御するものである。
Therefore, a flexible tube aseptic joining apparatus of the present invention will be described with reference to the drawings. The flexible tube aseptic joining device 1 is a device for aseptically joining flexible tubes, and includes a first clamp 3 and a second clamp 3 that hold at least two flexible tubes in a parallel state. 2 clamp 2, cutting means 5 for cutting flexible tubes 48, 49 between first clamp 3 and second clamp 2, and joining of flexible tubes 48, 49 cut by cutting means 5 Moving means for moving at least one of the first clamp 3 and the second clamp 2 so that the end portions 48a, 49a to be brought into close contact with each other, and the cutting means 5 melt-cuts the flexible tubes 48, 49. And a constant voltage source 43 for heating the wafer 6, a wafer temperature detecting means 7, and a wafer heating control means 44. The wafer heating control means 44 Based on the output of the sensing means 7, it has a pulse width modulation signal output unit 59 is calculated, and controls the constant voltage source 43 by a pulse width modulated signal.

【0008】図1は、本発明の可撓性チューブ無菌的接
合装置の一実施例の斜視図であり、図2は、図1に示し
た無菌的接合装置をケースに収納した状態を示す斜視図
であり、図3は、本発明の無菌的接合装置に使用される
電気回路の一例を示すブロック図であり、図4は、本発
明の無菌的接合装置の電気回路のウエハー加熱制御手段
の一例を示す電気回路ブロック図である。図5は、本発
明の可撓性チューブ無菌的接合装置の一実施例の上面図
である。
FIG. 1 is a perspective view of one embodiment of the flexible tube aseptic joining apparatus of the present invention, and FIG. 2 is a perspective view showing a state in which the aseptic joining apparatus shown in FIG. 1 is housed in a case. FIG. 3 is a block diagram showing an example of an electric circuit used in the aseptic bonding apparatus of the present invention. FIG. 4 is a block diagram of the wafer heating control means of the electric circuit of the aseptic bonding apparatus of the present invention. It is an electric circuit block diagram which shows an example. FIG. 5 is a top view of one embodiment of the flexible tube aseptic joining apparatus of the present invention.

【0009】次に、図4に記載するウエハー加熱制御手
段について説明する。ウエハー6としては、向かい合う
ように折り曲げられた金属板と、この金属板の内面に形
成された絶縁層と、この絶縁層内に上記の金属板と接触
しないように形成された抵抗体と、この抵抗体の両端部
に設けられた通電用端子とを有するものが好適に使用さ
れる。そして、抵抗体は、通電により発熱するため、抵
抗体の発熱は、金属板に伝導されウエハー全体が通電に
より発熱する。そして、抵抗体は、通電による発熱によ
り、抵抗値が変化する。よって、定電圧源を単に使用
し、ウエハーへの電力供給を調整するだけでは、十分な
ウエハーの温度制御ができない。そこで、この実施例の
無菌的接合装置1では、ウエハー加熱制御手段を有して
いる。
Next, the wafer heating control means shown in FIG. 4 will be described. As the wafer 6, a metal plate bent so as to face each other, an insulating layer formed on the inner surface of the metal plate, a resistor formed in the insulating layer so as not to contact the metal plate, A resistor having current-carrying terminals provided at both ends of the resistor is preferably used. Since the resistor generates heat when energized, the heat generated by the resistor is transmitted to the metal plate and the entire wafer generates heat when energized. Then, the resistance value of the resistor changes due to heat generated by energization. Therefore, sufficient temperature control of the wafer cannot be achieved simply by adjusting the power supply to the wafer by simply using the constant voltage source. Therefore, the aseptic bonding apparatus 1 of this embodiment has a wafer heating control unit.

【0010】ウエハー加熱制御手段44は、図4に示す
ように、ウエハー加熱制御回路55および補正ウエハー
温度算出51を有しており、さらに、図4に示すよう
にウエハー短絡保護回路65を有することが好ましい。
ウエハー加熱制御回路55は、温度検知手段7からの出
力に基づいて、算出されるパルス幅変調信号出力部59
を有し、パルス幅変調信号により定電圧源43を制御す
るものである。具体的には、ウエハー温度検知手段7の
出力に基づいて、補正ウエハー温度を算出する補正ウエ
ハー温度算出部56と、算出部により算出された補正温
度とウエハーの目的加熱温度との偏差信号を出力する偏
差信号出力部57とを有し、パルス幅変調信号出力部5
9は、偏差信号に基づいてパルス幅変調信号を出力する
ものである。温度検知手段7としては、熱電対または測
温抵抗体であることが好ましい。より好ましくは、シー
ス形熱電対または測温抵抗体であり、特に、シース形熱
電対が好ましい。
The wafer heating control means 44 has a wafer heating control circuit 55 and a corrected wafer temperature calculating section 51 as shown in FIG. 4, and further has a wafer short circuit protection circuit 65 as shown in FIG. Is preferred.
The wafer heating control circuit 55 outputs a pulse width modulation signal output section 59 which is calculated based on the output from the temperature detecting means 7.
And the constant voltage source 43 is controlled by the pulse width modulation signal. Specifically, based on the output of the wafer temperature detecting means 7, a corrected wafer temperature calculator 56 for calculating a corrected wafer temperature, and a deviation signal between the corrected temperature calculated by the calculator and the target heating temperature of the wafer are output. A pulse width modulation signal output unit 5
9 outputs a pulse width modulation signal based on the deviation signal. The temperature detecting means 7 is preferably a thermocouple or a resistance temperature detector. More preferably, it is a sheath-type thermocouple or a resistance temperature detector, and in particular, a sheath-type thermocouple is preferable.

【0011】図4を用いて、加熱制御手段44をより具
体的に説明すると、温度検知手段7である熱電対からの
温度検知信号aが、補正ウエハー温度算出部51のPI
D補正器56(比例・微分・積分補正器1)に入力さ
れ、補正された補正温度信号bが出力される。このPI
D補正器56では、例えば、式1 b=1/K・a・(1+K1・T・da/dt)・・・(1) により、補正値を算出する。Kは、ウエハーと熱電対と
の結合係数であり、K1は、切断される可撓性チューブ
に起因する補正係数であり、Tは、熱電対の熱時定数で
ある。このような補正を行う目的は、ウエハーと熱電対
との間での熱伝導損失に基づく補正(K)を行うこと、
熱電対の熱時定数(T)を考慮した補正を行うことにあ
る。そして、式1に示すように、補正温度信号bは、1
/Kは定数であるので、実測されたウエハー温度信号a
より、ウエハー温度が上昇している間は、K1・T・d
a/dt分だけ、高く算出される。熱電対が検知する温
度は、熱電対の内部温度であり、ウエハーの表面温度に
対して遅れを持っている。しかし、上記の補正を行うこ
とにより、熱電対の遅れを一次遅れに近似して時定数T
とし、補正関数としては、逆に時定数Tの一次進み演算
を行うので、ウエハー表面温度を時間遅れなく正確に算
出することができる。
The heating control means 44 will be described in more detail with reference to FIG. 4. A temperature detection signal a from a thermocouple as the temperature detection means 7 is output from the PI
The corrected temperature signal b is input to the D corrector 56 (proportional / differential / integral corrector 1) and is output. This PI
The D corrector 56 calculates a correction value according to, for example, Expression 1 b = 1 / K · a · (1 + K1 · T · da / dt) (1) K is a coupling coefficient between the wafer and the thermocouple, K1 is a correction coefficient due to the flexible tube to be cut, and T is a thermal time constant of the thermocouple. The purpose of making such a correction is to make a correction (K) based on the heat conduction loss between the wafer and the thermocouple,
It is to perform the correction in consideration of the thermal time constant (T) of the thermocouple. Then, as shown in Equation 1, the corrected temperature signal b is 1
Since / K is a constant, the actually measured wafer temperature signal a
Therefore, while the wafer temperature is rising, K1 · T · d
It is calculated higher by a / dt. The temperature detected by the thermocouple is the internal temperature of the thermocouple and has a delay with respect to the surface temperature of the wafer. However, by performing the above correction, the delay of the thermocouple is approximated to the first-order delay, and the time constant T
Conversely, as the correction function, the primary advance calculation of the time constant T is performed, so that the wafer surface temperature can be accurately calculated without time delay.

【0012】また、式1に示すような補正を行うことに
より、ウエハー温度下降時にも、正確なウエハー表面温
度を時間遅れなく正確に算出することができる。そし
て、サンプリングタイム(△t)を考慮して、式1を書
き直すと、式2となる。 b(t+△t)=1/K・a(t+△t)・{1+K1
・T/△t・[a(t+△t)−a(t)]}・・・
(2) このようにして、算出される補正温度信号bは、目標と
するウエハー温度信号cと比較され、偏差信号出力部5
7より偏差信号dが出力される。この偏差信号dは、制
御系の応答性を高めるために適当な伝達関数に設計され
たPID補正器2に入力され、補正偏差信号eとして、
出力される。この補正偏差信号eは、パルス幅変調信号
出力部(PWM信号作成回路59に入力される。PW
M信号作成回路59は、上記の補正偏差信号eと搬送波
発振回路60によって作成される所定周波数に同期し、
補正偏差信号eに比例したパルス幅の信号(PWM変調
したパルス列信号)fを出力する。このパルス列信号f
は、ゲート回路61を通り、ドライブ回路62に流入す
る。ドライブ回路62は、半導体スイッチング素子であ
るトランジスタ、サイリスタなどにより構成されてお
り、入力されたパルス列信号gは、スイッチング、タイ
ミング信号として作用し、パルス列信号gがHの状態の
ときのみ、定電圧源とウエハーが接続される。ドライブ
回路62とウエハー6との接続は、接続端子39により
行われてる。定電圧源43とウエハー6は、パルス列信
号gに基づき断続的に接続され、ウエハーは、目的とす
るウエハー温度に制御される。
Further, by performing the correction as shown in Equation 1, even when the wafer temperature decreases, the accurate wafer surface temperature can be accurately calculated without time delay. Then, when Expression 1 is rewritten in consideration of the sampling time (Δt), Expression 2 is obtained. b (t + △ t) = 1 / K · a (t + △ t) · {1 + K1
・ T / {t ・ [a (t + Δt) -a (t)]}
(2) The corrected temperature signal b thus calculated is compared with the target wafer temperature signal c, and the deviation signal output unit 5
7 outputs a deviation signal d. The deviation signal d is input to the PID corrector 2 designed to have an appropriate transfer function to enhance the response of the control system, and is output as a corrected deviation signal e.
Is output. This correction deviation signal e is a pulse width modulation signal
The output unit ( PWM signal generation circuit ) 59 is input to the output unit 59. PW
The M signal creation circuit 59 synchronizes with the correction deviation signal e and the predetermined frequency created by the carrier oscillation circuit 60,
A signal f having a pulse width (PWM modulated pulse train signal) proportional to the correction deviation signal e is output. This pulse train signal f
Flows through the gate circuit 61 into the drive circuit 62. The drive circuit 62 is constituted by a transistor, a thyristor, or the like, which is a semiconductor switching element. The input pulse train signal g acts as a switching and timing signal, and only when the pulse train signal g is in the H state is the constant voltage source. And the wafer are connected. The connection between the drive circuit 62 and the wafer 6 is made by a connection terminal 39 . The constant voltage source 43 and the wafer 6 are intermittently connected based on the pulse train signal g, and the wafer is controlled to a target wafer temperature.

【0013】そして、定電流方式の場合の加熱回路の概
略は、図19に示すようになり、定電流方式の加熱回路
の損失を求めると、損失(Wo’)は、 Wo’=(Vi−Vo)Ioであり、 Wo’=[Vce+{(Vi−Vce)−Vo}]・Io (A)となる。 また、PWM方式の場合の加熱回路の概略は、図20に
示すようになり、駆動回路の損失(Wo)は、 Wo=Vo/Vi・Vce・Io+W1であり、(B) W1は、ドライブ回路を構成するトランジスタのスイッ
チング損失である。そして、WoとWo’を比較する
と、B式において、一般的に次の関係が成り立つ。 Vo/Vi・Vce・Io>W1 次に、A式において、一般的に次の関係が成り立つ。 Vce≪(Vi−Vce)−Vo これにより、A式およびB式の第1項目、第2項目を比
較すると、 Vo/Vi・Vce・Io<Vce・Io W1<(Vi−Vce)−Vo}・Io よって、Wo<Wo’となり、PWM方式の方が、定電
流方式に比べて、消費電力が小さいものである。
The outline of the heating circuit in the case of the constant current system is as shown in FIG. 19. When the loss of the heating circuit of the constant current system is obtained, the loss ( Wo ' ) is expressed as Wo' = (Vi- Vo) Io, and Wo ′ = [Vce + {(Vi−Vce) −Vo}] · Io (A). The heating circuit in the case of the PWM method is schematically shown in FIG. 20, and the loss (Wo) of the drive circuit is Wo = Vo / Vi · Vce · Io + W1, and (B) W1 is the drive circuit. Is the switching loss of the transistor that constitutes. When Wo and Wo 'are compared, the following relationship is generally established in the expression B. Vo / Vi · Vce · Io> W1 Next, in the formula A, the following relationship generally holds. Vce≪ (Vi-Vce) -Vo By comparing the first and second items of the expressions A and B, Vo / Vi ・ Vce ・ Io <Vce < Io W1 <(Vi-Vce) -Vo} Io Therefore, Wo <Wo ', and the PWM method consumes less power than the constant current method.

【0014】次に、ウエハー短絡保護回路について、図
4を用いて説明する。通常状態においては、コンパレー
タ67からの信号jが、ラッチ回路68に入力されてい
ないため、ラッチ回路68は、ゲート回路61(アンド
回路)に対して、常にHの信号を出力している。このた
め、ゲート回路は、PWM信号fのON/OFF(H/
L)に従って、信号gをドライブ回路62に出力する。
そして、図4に示すように、ウエハー6には、シャント
抵抗66が、電気的に接続されており、シャント抵抗6
6の電圧Vは、コンパレータ67により、設定電圧Vs
etと比較されている。通常状態では、シャント抵抗間
の電圧Vは、設定電圧Vsetより低いため、コンパレ
ータ67から信号jは出力されない。しかし、ウエハー
6が短絡すると、シャント抵抗66に規定以上の電流が
流れるため、シャント抵抗66の電圧Vが上昇し、設定
電圧Vsetより大きくなると、コンパレータ67から
信号jが、ラッチ回路68に出力される。ラッチ回路6
8は、一度信号jが入力されるとその状態を保持する機
能を有している。このため、一度信号jが入力される
と、ゲート回路61(アンド回路)に対して、常にLの
信号を出力する。このため、ゲート回路61からは、P
WM信号fに基づく信号gが、ドライブ回路62に出力
されなくなり、回路が保護される。そして、短絡事故を
起こしたウエハーを交換した後、リセットスイッチ69
を押すと、ラッチ回路68は、ゲート回路61(アンド
回路)に対して、Hの信号を出力する。ラッチ回路68
は、一度リセット信号kが入力されるとその状態を保持
し、通常状態に復帰する。
Next, the wafer short-circuit protection circuit will be described with reference to FIG. In the normal state, since the signal j from the comparator 67 is not input to the latch circuit 68, the latch circuit 68 always outputs an H signal to the gate circuit 61 (AND circuit). For this reason, the gate circuit turns ON / OFF (H /
The signal g is output to the drive circuit 62 according to L).
As shown in FIG. 4, a shunt resistor 66 is electrically connected to the wafer 6.
6 is set by the comparator 67 to the set voltage Vs
compared to et. In the normal state, since the voltage V between the shunt resistors is lower than the set voltage Vset, the signal j is not output from the comparator 67. However, when the wafer 6 is short-circuited, a current exceeding the specified value flows through the shunt resistor 66, and the voltage V of the shunt resistor 66 increases. When the voltage V exceeds the set voltage Vset, a signal j is output from the comparator 67 to the latch circuit 68. You. Latch circuit 6
8 has a function of holding the state once the signal j is input. For this reason, once the signal j is input, an L signal is always output to the gate circuit 61 (AND circuit). Therefore, the gate circuit 61 outputs P
The signal g based on the WM signal f is not output to the drive circuit 62, and the circuit is protected. After replacing the short-circuited wafer, the reset switch 69
When is pressed, the latch circuit 68 outputs an H signal to the gate circuit 61 (AND circuit). Latch circuit 68
, Once the reset signal k is input, holds that state and returns to the normal state.

【0015】次に、無菌的接合装置1の全体の機構につ
いて説明する。この無菌的接合装置1は、図1、図2、
図5、図10に示すように、少なくとも2本の可撓性チ
ューブを平行状態にて保持する第1クランプ3および第
2クランプ2を有している。モータの作動により回転す
るギア30、ギア30の回転により回転するギア31、
ギア31の回転により回転するシャフト32、シャフト
の両端が回転可能に固定されたフレーム9、第1クラン
プ3の原点位置でのがたつきを防止するための防止部材
11、マイクロスイッチ13,14,15、第1クラン
プ3を移動させるための駆動用アーム18、第1クラン
プ3を移動させるためのカム19、切断手段5、切断手
段5および第2クランプを駆動させるためのカム17、
第2クランプ2を第1クランプ側に押圧する押圧部材3
3、第1クランプ3の後退位置を規制する規制部材2
5、第1クランプ3のがたつきを防止するためのバネ部
材27、ウエハー交換レバー22,ウエハーカートリッ
ジ8、ウエハーカートリッジ交換レバー24、使用済ウ
エハー収納箱把持部材28、使用済ウエハーを収納箱に
誘導するための誘導部材26、使用済ウエハー収納箱2
9、操作パネル50を有している。
Next, the overall mechanism of the aseptic joining apparatus 1 will be described. This aseptic bonding apparatus 1 is shown in FIGS.
As shown in FIGS. 5 and 10, a first clamp 3 and a second clamp 2 for holding at least two flexible tubes in a parallel state are provided. A gear 30 rotated by the operation of the motor, a gear 31 rotated by the rotation of the gear 30,
A shaft 32 which is rotated by the rotation of the gear 31, a frame 9 having both ends of the shaft rotatably fixed, a prevention member 11 for preventing rattling of the first clamp 3 at the origin position, micro switches 13, 14, 15, a driving arm 18 for moving the first clamp 3, a cam 19 for moving the first clamp 3, the cutting means 5, the cam 17 for driving the cutting means 5 and the second clamp,
Pressing member 3 for pressing the second clamp 2 toward the first clamp
3. a regulating member 2 for regulating a retreat position of the first clamp 3
5, a spring member 27 for preventing rattling of the first clamp 3, a wafer exchange lever 22, a wafer cartridge 8, a wafer cartridge exchange lever 24, a used wafer storage box gripping member 28, and a used wafer stored in the storage box. Guiding member 26 for guiding, used wafer storage box 2
9, an operation panel 50 is provided.

【0016】そして、この無菌的接合装置1は、切断手
段5により切断された可撓性チューブ48,49の接合
される端部相互48a,49aが向かい合うように第1
クランプ3を移動させる第1クランプ移動機構と、切断
手段5をチューブ側に(上方に)移動させ、切断後再び
チューブより離れる方向(下方に)に移動させるための
移動機能と、第2クランプ2を第1クランプ3に対し
て、近接および離間する方向に移動させる第2クランプ
移動機構とを有している。切断手段駆動機構には、切断
手段5を2本のチューブの軸に対して垂直に上方に移動
させ、チューブ切断後下方に移動させるものであり、第
1クランプ移動機構は、チューブ切断後、第1クランプ
3を2本のチューブの軸に対して水平状態にて直交方向
(より具体的には、後方に)に移動させるものであり、
第2クランプ移動機構は、第2クランプ2を第1クラン
プ側に近づくように、2本のチューブの軸に対して水平
状態にてごくわずか平行に移動させるものである。
The aseptic joining apparatus 1 is provided with a first tube 48, which is cut by the cutting means 5, so that the ends 48a, 49a to be joined face each other.
A first clamp moving mechanism for moving the clamp 3, a moving function for moving the cutting means 5 to the tube side (upward), and moving the cutting means 5 away from the tube again (downward) after cutting, and a second clamp 2 And a second clamp moving mechanism for moving the first clamp 3 toward and away from the first clamp 3. The cutting means driving mechanism moves the cutting means 5 vertically upward with respect to the axes of the two tubes, and moves the cutting means 5 downward after cutting the tubes. One clamp 3 is moved in a direction perpendicular to the axis of the two tubes in a horizontal state (more specifically, backward),
The second clamp moving mechanism moves the second clamp 2 very slightly parallel to the axis of the two tubes in a horizontal state so as to approach the first clamp side.

【0017】そこで、第1および第2クランプ3,2に
ついて説明する。第1および第2クランプ3,2は、図
1、図5、図7および図10に示すように構成されてい
る。具体的には、第1クランプ3は、図10に示すよう
に、ベース3bと、このベース3bに回転可能に取り付
けられたカバー3aと、ベース3bが固定されたクラン
プ固定台3cを有している。そして、このクランプ固定
台3cは、リニアテーブルに固定されている。リニアテ
ーブルは、クランプ固定台3cの下面に固定された移動
3dと、移動台3dの下部に設けられたレール部材3
nにより構成されている。そして、このリニアテーブル
により、第1クランプ3は、接合するチューブ48,4
9の軸に対して垂直方向、言い換えれば、切断された可
撓性チューブの接合される端部相互が向かい合うよう、
歪みがなく移動する。よって、この実施例の無菌的接合
装置1では、第1クランプ移動機構は、上記のリニアテ
ーブル、モータ、ギア30、ギア31、シャフト32、
駆動用アーム18、カム19により構成されている。そ
して、この接合装置1では、図1および図5に示すよう
に、第1クランプ固定台3cの後方と、接合装置1のフ
レームとを接続するバネ部材27が設けられており、第
1クランプ3は、常時後方に引っ張られた状態となって
おり、第1クランプ3(正確には、第1クランプ固定台
3c)のがたつきを少ないものとしている。また、図
1、図5に示すように、第1クランプ3のチューブ装着
位置(言い換えれば、第1クランプが最も前に出た状態
の位置)にて、第1クランプのがたつきを防止するた
めの防止部材11が、フレーム9の側面に固定されてい
る。よって、第1クランプ3は、チューブ装着位置で
は、バネ部材27により後方に引っ張られた状態、つま
り、後方側にがたつきがない状態であり、かつ前方をが
たつき防止部材により、それより前方に移動できないよ
うになっている。よって、第1クランプ3は、チューブ
装着位置では、がたつきがないように構成されている。
また、接合装置1には、図1および図5に示すように、
第1クランプ3(正確には、第1クランプ固定台3c)
の後方の最大移動位置を規制する規制部材25が設けら
れている。
Therefore, the first and second clamps 3 and 2 will be described. The first and second clamps 3, 2 are configured as shown in FIG. 1, FIG. 5, FIG. 7, and FIG. Specifically, as shown in FIG. 10, the first clamp 3 has a base 3b, a cover 3a rotatably attached to the base 3b, and a clamp fixing base 3c to which the base 3b is fixed. I have. And this clamp fixing base 3c is fixed to the linear table. The linear table includes a moving table 3d fixed to the lower surface of the clamp fixing table 3c, and a rail member 3 provided below the moving table 3d.
n. Then, the first clamp 3 is connected to the tubes 48 and 4 by the linear table.
9, so that the joined ends of the cut flexible tubes face each other.
Moves without distortion. Therefore, in the aseptic joining apparatus 1 of this embodiment, the first clamp moving mechanism includes the linear table, the motor, the gear 30, the gear 31, the shaft 32,
It is composed of a driving arm 18 and a cam 19. As shown in FIGS. 1 and 5, the joining device 1 is provided with a spring member 27 that connects the rear of the first clamp fixing base 3 c and the frame of the joining device 1. Is always pulled backward, so that the first clamp 3 (accurately, the first clamp fixing base 3c) has less rattling. In addition, as shown in FIGS. 1 and 5, the first clamp 3 is prevented from rattling at the tube mounting position of the first clamp 3 (in other words, at the position where the first clamp is at the foremost position). Is fixed to a side surface of the frame 9. Therefore, in the tube mounting position, the first clamp 3 is pulled rearward by the spring member 27, that is, in a state where there is no rattling on the rear side, and the front rattling preventing member prevents the first clamp 3 from rattling further. You cannot move forward. Therefore, the first clamp 3 is configured so that there is no play at the tube mounting position.
Also, as shown in FIGS. 1 and 5,
First clamp 3 (Accurately, first clamp fixing base 3c)
A restricting member 25 for restricting the maximum movement position behind is provided.

【0018】第2クランプ2は、図5、図7および図1
0に示すように、ベース2bと、このベース2bに回転
可能に取り付けられたカバー2aと、ベース2bが固定
されたクランプ固定台2cを有している。そして、この
クランプ固定台2cは、リニアテーブルに固定されてい
る。リニアテーブルは、クランプ固定台2cの下面に固
定された移動台2dと、移動台2dの下部に設けられた
レール部材2nにより構成されている。そして、このリ
ニアテーブルにより、第2クランプ2は、接合するチュ
ーブ48,49の軸に対して平行な方向、言い換えれ
ば、第2クランプ2を第1クランプ3に対して、近接お
よび離間する方向にのみ、歪みがなく移動する。
The second clamp 2 is shown in FIGS. 5, 7 and 1
As shown in FIG. 1, the base 2b includes a base 2b, a cover 2a rotatably attached to the base 2b, and a clamp fixing base 2c to which the base 2b is fixed. And this clamp fixing base 2c is fixed to the linear table. The linear table includes a moving table 2d fixed to the lower surface of the clamp fixing table 2c and a rail member 2n provided below the moving table 2d . The linear table allows the second clamp 2 to move in a direction parallel to the axis of the tubes 48 and 49 to be joined, in other words, to move the second clamp 2 toward and away from the first clamp 3. Only move without distortion.

【0019】また、図5および図7に示すように、接合
装置1のフレームとクランプ固定台2cとの間には、押
圧部材33が設けられており、常時第2クランプ2(正
確には、第2クランプ固定台2c)を第1クランプ側に
押している。押圧部材としては、バネ部材が好適に使用
される。そして、この押圧部材33は、第1および第2
クランプ3,2により2本の可撓性チューブ48,49
を押し潰すようにして把持した時の、可撓性チューブの
反発力より押圧部材33の押圧力は弱いものが使用され
ており、可撓性チューブを把持したとき、第2クランプ
2が第1クランプ3より若干は離間する方向に動くよう
に構成されている。よって、この実施例の無菌的接合装
置1では、第2クランプ移動機構は、上記のリニアテー
ブル、モータ、ギア30、ギア31、シャフト32、カ
ム17、押圧部材33により構成されている。
As shown in FIGS. 5 and 7, a pressing member 33 is provided between the frame of the joining apparatus 1 and the clamp holder 2c, and the second clamp 2 (more precisely, The second clamp fixture 2c) is pushed toward the first clamp. A spring member is suitably used as the pressing member. The pressing member 33 includes the first and second
Two flexible tubes 48, 49 are provided by the clamps 3, 2.
Is used, the pressing force of the pressing member 33 is weaker than the repulsive force of the flexible tube when the flexible tube is crushed, and when the flexible tube is gripped, the second clamp 2 It is configured to move slightly away from the clamp 3. Therefore, in the aseptic joining apparatus 1 of this embodiment, the second clamp moving mechanism is constituted by the above-described linear table, motor, gear 30, gear 31, shaft 32, cam 17, and pressing member 33.

【0020】そして、第1クランプ3および第2クラン
プ2は、図10に示すように、保持するチューブを斜め
に押し潰した状態で保持するように構成されている。ク
ランプ3,2は、ベース3b,2bに旋回可能に取り付
けられたカバー3a,2aを有しており、ベース3b,
2bには、2つのチューブを置するために平行に設け
られた2つのスロット3f,3eおよび2f,2eを有
している。そして、スロット3f,3eとスロット2
f,2eが向かい合う部分のベース3b,2bの端面に
は、鋸刃状の閉塞部材3h,2hが設けられている。そ
して、カバー3a,2aには、上記のベース3b,2b
の閉塞部材3h,2hに対応する形状の鋸刃状の閉塞部
材3g,2gが設けられている。カバー3a,2aの内
表面は平坦となっている。そして、カバー3a,2aに
は、それぞれ旋回カムを有しており、この旋回カムは、
カバー3a,2aを閉じると、ベース3b,2bのロー
ラと係合する。そして、2本のチューブは、カバー3
a,2aが閉じられたとき、ベース3bの閉塞部材3h
とカバー3aの閉塞部材3gとの間、およびベース2b
の閉塞部材2hとカバー2aの閉塞部材2gとの間によ
り、斜めに押し潰され、閉塞した状態で保持される。ま
た、第1クランプ3は、第2クランプ方向に突出する突
出部3iを有し、第2クランプ2が、この突出部3iを
収納する凹部2iを有しているので、第2クランプ2
は、第1クランプを閉塞しないと、閉塞できないよう
に構成されている。
As shown in FIG. 10, the first clamp 3 and the second clamp 2 are configured to hold the tube to be held in a state where the tube is obliquely crushed. The clamps 3, 2 have covers 3a, 2a pivotally attached to the bases 3b, 2b.
2b, the two slots 3f provided in parallel in order for placing the two tubes, 3e and 2f, and a 2e. And slots 3f, 3e and slot 2
Saw blade-shaped closing members 3h, 2h are provided on the end surfaces of the bases 3b, 2b at the portions where f and 2e face each other. Then, the bases 3b, 2b are attached to the covers 3a, 2a.
Are provided with saw blade-shaped closing members 3g and 2g corresponding to the closing members 3h and 2h. The inner surfaces of the covers 3a and 2a are flat. Each of the covers 3a and 2a has a turning cam.
When the covers 3a and 2a are closed, they engage with the rollers of the bases 3b and 2b. And the two tubes cover 3
a, 2a are closed, the closing member 3h of the base 3b is closed.
And the closing member 3g of the cover 3a, and the base 2b
Between the closing member 2h of the cover 2a and the closing member 2g of the cover 2a, and is held in a closed state. The first clamp 3 has a projection 3i projecting in the second clamp direction, and the second clamp 2 has a recess 2i for accommodating the projection 3i.
Are configured so that they cannot be closed unless the first clamp 3 is closed.

【0021】そして、無菌的接合装置1は、図1に示す
ように、モータにより回転するギア30と、このギア3
0の回転により回転するギア31を有しており、ギア3
1のシャフト32には、図7に示すように、2つのカム
19,17が固定されており、カム19,17は、ギア
31の回転と共に回転する。そして、カム19の右側面
には、図8に示すような形状の第1クランプ駆動用のカ
ム溝19aが設けられている。そして、カム19のカム
溝19a内を摺動するフォロア18aを中央部に有する
第1クランプ移動用アーム18が設けられている。ま
た、アーム18の下端は、支点18bによりフレーム9
に回動可能に支持されており、アーム18の上端は、第
1クランプ3のクランプ固定台3cに設けられた支点1
8cにより回動可能に支持されている。よって、第1ク
ランプ3は、リニアテーブルのレール部材3nに沿っ
て、図8に示すように、カム19の回転により、カム溝
19aの形状に従い矢印に示すように、2本のチューブ
の軸に対して水平状態にて直交方向後方に移動する。
As shown in FIG. 1, the aseptic joining apparatus 1 includes a gear 30 rotated by a motor,
0, and has a gear 31 that rotates by the rotation of 0.
As shown in FIG. 7, two cams 19 and 17 are fixed to one shaft 32, and the cams 19 and 17 rotate with the rotation of the gear 31. On the right side of the cam 19, a first clamp driving cam groove 19a having a shape as shown in FIG. 8 is provided. Further, a first clamp moving arm 18 having a follower 18a at the center thereof which slides in the cam groove 19a of the cam 19 is provided. The lower end of the arm 18 is connected to the frame 9 by a fulcrum 18b.
The upper end of the arm 18 is supported by a fulcrum 1 provided on a clamp fixing base 3 c of the first clamp 3.
8c rotatably supported. Therefore, as shown in FIG. 8, the first clamp 3 is rotated along the rail member 3n of the linear table by the rotation of the cam 19, and is formed on the axis of the two tubes as shown by the arrow according to the shape of the cam groove 19a. On the other hand, it moves backward in the orthogonal direction in a horizontal state.

【0022】切断手段5は、図6に示すように、ウエハ
ーを交換可能に保持するウエハー保持部5aと、ウエハ
ー保持部5aの下方に設けられたアーム部5cと、アー
ム部5cの端部に設けられたフォロア5bと、ヒンジ部
5dと、フレーム9への取付部5eを有している。そし
て、ヒンジ部5dによりフレーム9に対して旋回可能と
なっている。そして、図6に示すように、切断手段5の
右側面には、ウエハー加熱用の電気接続端子39、ウエ
ハーの温度検知のための温度検知手段7が固定されてい
る。温度検知手段7としては、熱電対または測温抵抗体
であることが好ましい。より好ましくは、シース形熱電
対または測温抵抗体であり、特に、シース形熱電対が好
ましい。ウエハー6としては、向かい合うように折り曲
げられた金属板と、この金属板の内面に形成された絶縁
層と、この絶縁層内に上記の金属板と接触しないように
形成された抵抗体と、この抵抗体の両端部に設けられた
通電用端子とを有するものが好適に使用される。
As shown in FIG. 6, the cutting means 5 includes a wafer holding portion 5a for holding a wafer so as to be exchangeable, an arm portion 5c provided below the wafer holding portion 5a, and an end portion of the arm portion 5c. It has a follower 5b, a hinge 5d, and an attachment 5e to the frame 9. The hinge part 5d is capable of turning with respect to the frame 9. As shown in FIG. 6, an electric connection terminal 39 for heating the wafer and a temperature detecting means 7 for detecting the temperature of the wafer are fixed to the right side surface of the cutting means 5. The temperature detecting means 7 is preferably a thermocouple or a resistance temperature detector. More preferably, it is a sheath-type thermocouple or a resistance temperature detector, and in particular, a sheath-type thermocouple is preferable. As the wafer 6, a metal plate bent so as to face each other, an insulating layer formed on the inner surface of the metal plate, a resistor formed in the insulating layer so as not to contact the metal plate, A resistor having current-carrying terminals provided at both ends of the resistor is preferably used.

【0023】そして、カム17は、図6および図9に示
すように、左側面に切断手段駆動用のカム溝17aを有
している。そして、切断手段5のフォロア5bは、カム
17のカム溝17a内に位置しており、カム溝17a内
をカム溝の形状に沿って摺動する。よって、切断手段5
は、図9に示すように、カム17の回転により、カム溝
17aの形状に従い上下に、言い換えれば、2本のチュ
ーブの軸に対して、直交かつ垂直方向上下に移動する。
さらに、カム17は、図7に示すように、中央部に第2
クランプ2の駆動用のカム溝17cを有している。カム
溝17cは、左側面17fおよび右側面17eを有して
おり、左側面17fおよび右側面17eにより、第2ク
ランプの位置を制御する。第2クランプ固定台2cには
下方にのびる突出部を有しており、その先端にはフォロ
ア20が設けられている。このフォロア20は、第2ク
ランプ2の駆動用のカム溝17c内を摺動する。そし
て、図7に示すように、フォロア20とカム溝17cの
側面間には、若干の隙間ができるように形成されてい
る。そして、第2クランプ固定台2cは、バネ部材33
により常時押されているため、通常状態では、フォロア
20は、カム溝17cの左側面17fに当接するように
なり、フォロア20とカム溝17cの右側面17eとの
間に若干の隙間ができる。しかし、第1および第2クラ
ンプ3,2により2本のチューブを保持すると、上述の
ように、2つのクランプ3,2はそれぞれ、2本のチュ
ーブを押し潰すように閉塞し保持するため、チューブの
閉塞に起因する反発力が生ずる。そして、バネ部材33
は、上記チューブの閉塞に起因する反発力より小さい力
のものが用いられているため、クランプ3,2がチュー
ブを保持する状態では、図7に示すように、フォロア2
0は、カム溝17cの右側面17eに当接するようにな
り、フォロア20とカム溝17cの左側面17fとの間
に若干の隙間ができる。しかし、上述の切断手段5によ
りチューブが切断されと、チューブの閉塞に起因する反
発力が消失するため、通常状態に戻り、フォロア20
は、カム溝17cの左側面17fに当接するようにな
り、フォロア20とカム溝17cの右側面17eとの間
に若干の隙間ができる。このように、バネ部材33の作
用およびチューブの反発力により、フォロア20が当接
するカム溝の摺動面が経時的に変化するように構成され
ている。
As shown in FIGS. 6 and 9, the cam 17 has a cam groove 17a for driving the cutting means on the left side surface. The follower 5b of the cutting means 5 is located in the cam groove 17a of the cam 17, and slides in the cam groove 17a along the shape of the cam groove. Therefore, the cutting means 5
As shown in FIG. 9, the cam 17 moves up and down according to the shape of the cam groove 17a by rotation of the cam 17, in other words, vertically and vertically with respect to the axes of the two tubes.
Further, as shown in FIG. 7, the cam 17 has a second
It has a cam groove 17c for driving the clamp 2. The cam groove 17c has a left side 17f and a right side 17e, and the position of the second clamp is controlled by the left side 17f and the right side 17e. The second clamp fixing base 2c has a protruding portion extending downward, and a follower 20 is provided at the tip thereof. The follower 20 slides in the driving cam groove 17c of the second clamp 2. As shown in FIG. 7, a slight gap is formed between the follower 20 and the side surface of the cam groove 17c. The second clamp fixing base 2c is provided with a spring member 33.
In the normal state, the follower 20 comes into contact with the left side surface 17f of the cam groove 17c, and a slight gap is formed between the follower 20 and the right side surface 17e of the cam groove 17c. However, when the two tubes are held by the first and second clamps 3 and 2, as described above, the two clamps 3 and 2 close and hold the two tubes by crushing the two tubes, respectively. A repulsive force is generated due to the blockage of the body. And the spring member 33
As shown in FIG. 7, when the clamps 3 and 2 hold the tube, the follower 2 has a smaller force than the repulsive force caused by the blockage of the tube.
0 comes into contact with the right side surface 17e of the cam groove 17c, and a slight gap is formed between the follower 20 and the left side surface 17f of the cam groove 17c. However, when the tube is cut by the above-described cutting means 5, the repulsive force due to the blockage of the tube disappears.
Comes into contact with the left side face 17f of the cam groove 17c, and a slight gap is formed between the follower 20 and the right side face 17e of the cam groove 17c. Thus, the sliding surface of the cam groove with which the follower 20 abuts changes over time by the action of the spring member 33 and the repulsive force of the tube.

【0024】そして、図7に示すように、左側面17f
に凹部17dが形成されている。この凹部17d部分を
フォロア20が通過する時期は、切断手段によりチュー
ブの切断後であるため、フォロア20は、カム溝17c
の左側面17fを沿って摺動している状態であり、よっ
て、フォロア20は凹部17d部分に入る。このため、
凹部17dの深さ分だけ、第2クランプ2が第1クラン
プ3方向に移動することになる。これにより、チューブ
の接合がより確実となる。そして、カム溝17cの右側
面17eにも凹部17gが設けられている。この凹部1
7gは、クランプ3,2の内面の清掃のためのものであ
る。この凹部17gを設けることにより、第2クランプ
2をバネ部材33側に押すことにより、フォロア20が
凹部17gに当接するまで、第2クランプ2を第1クラ
ンプ3より離間する方向に移動することができ、これに
より、第1クランプ3と第2クランプとの間に隙間が形
成される。形成された間隙内に清掃部材、例えば、アル
コールなどのある程度切断されるチューブの形成材料を
溶解できる溶剤を含有した綿棒により清掃することが可
能となる。この凹部17gは、図7に示すように、左側
面17fの凹部17d(第2クランプ2の幅寄せが行わ
れる部分)とほぼ向かい合う位置に設けられている。第
2クランプ固定台2cの下方にのびる突出部に設けられ
たフォロア20が凹部17d部分に入っているときは、
チューブ切断後、目的とするチューブ相互を接合した状
態であり、この状態にて、第2クランプは停止する。ま
た、第1クランプも既に停止しており、かつ、第1クラ
ンプ3は、第2クランプとずれた位置にある。具体的に
は、図1に示すように、第1クランプ3が、第2クラン
プ2より後退しており、第1クランプ3は、第2クラン
プとずれた位置にある。このため、この状態では、第2
クランプ2の先端部の内面が若干露出しており、さら
に、第1クランプの後端部の内面も若干露出している。
よって、露出した第2クランプ2の内面および第1クラ
ンプ3は、その清掃が容易である。
Then, as shown in FIG.
A concave portion 17d is formed in the recess. Time to the recess 17d portion follower 20 passes, since the cutting means is after cutting of the tube, the follower 20, the cam groove 17c
Is sliding along the left side surface 17f, and the follower 20 enters the concave portion 17d . For this reason,
The second clamp 2 moves in the direction of the first clamp 3 by the depth of the concave portion 17d. Thereby, the joining of the tubes becomes more reliable. Also, a concave portion 17g is provided on the right side surface 17e of the cam groove 17c. This recess 1
7 g is for cleaning the inner surfaces of the clamps 3 and 2. By providing the recess 17g, by pushing the second clamp 2 toward the spring member 33, the second clamp 2 can be moved in a direction away from the first clamp 3 until the follower 20 contacts the recess 17g. As a result, a gap is formed between the first clamp 3 and the second clamp. In the formed gap, cleaning can be performed by a cleaning member, for example, a cotton swab containing a solvent capable of dissolving a forming material of the tube to be cut to a certain degree such as alcohol. As shown in FIG. 7, the concave portion 17g is provided at a position substantially opposite to the concave portion 17d (the portion where the width of the second clamp 2 is adjusted) on the left side surface 17f. When the follower 20 provided on the protruding portion extending below the second clamp fixing base 2c enters the recess 17d,
After the tubes are cut, the target tubes are joined to each other, and in this state, the second clamp is stopped. In addition, the first clamp has already stopped, and the first clamp 3 is located at a position shifted from the second clamp. Specifically, as shown in FIG. 1, the first clamp 3 is retracted from the second clamp 2, and the first clamp 3 is located at a position shifted from the second clamp. Therefore, in this state, the second
The inner surface of the front end of the clamp 2 is slightly exposed, and the inner surface of the rear end of the first clamp is also slightly exposed.
Therefore, the exposed inner surface of the second clamp 2 and the first clamp 3 can be easily cleaned.

【0025】次に、本発明の無菌的接合装置1の作用を
図面を用いて説明する。図11は、切断手段、第1クラ
ンプ、第2クランプの動作を示すタイミングチャートで
ある。図12,図13および図14は、無菌的接合装置
の作用を説明するためのフローチャートである。図1
5、図16、図17および図18は、無菌的接合装置の
作用を説明するための説明図である。この接合装置1で
は、接合作業終了時の第1クランプ3は、第2クランプ
2とずれた位置となっており、図11のタイミングチャ
ートの停止位置にある。図11のタイミングチャートの
横軸の角度は、原点(第1クランプと第2クランプの位
置があっている状態)を0°とし、その後のギア31の
シャフト32の回転角度、言い換えれば、カム17およ
びカム19の回転角度のときの、切断手段(ウエハ
ー)、第1クランプ3、第2クランプ2の動きを示すも
のである。
Next, the operation of the aseptic bonding apparatus 1 of the present invention will be described with reference to the drawings. FIG. 11 is a timing chart showing the operation of the cutting means, the first clamp, and the second clamp. FIGS. 12, 13 and 14 are flowcharts for explaining the operation of the aseptic joining apparatus. FIG.
5, FIG. 16, FIG. 17, and FIG. 18 are explanatory views for explaining the operation of the aseptic joining apparatus. In this joining apparatus 1, the first clamp 3 at the end of the joining operation is shifted from the second clamp 2, and is at the stop position in the timing chart of FIG. The angle of the horizontal axis in the timing chart of FIG. 11 is 0 ° at the origin (the state where the first clamp and the second clamp are in the same position), and the rotation angle of the shaft 32 of the gear 31 after that, in other words, the cam 17 7 shows the movement of the cutting means (wafer), the first clamp 3 and the second clamp 2 when the rotation angle of the cam 19 and the rotation angle of the cam 19.

【0026】まず、最初にフローチャートの図12に示
すように、図3のパネル50に設けられている電源スイ
ッチを押す。これにより、図3に示す制御器40を構成
するCPUにより、接合装置1は、異常が無いか(具体
的には、内部コネクタの抜けがないか、熱電対の断線が
ないか、内部定電圧源に不良がないか)を判断し、異常
がある場合は、ブザーが鳴動する。続いて、図3のパネ
ル50に設けられているクランプリセットスイッチ53
を押す。CPUにより、第1および第2クランプが開い
ているか否か、第1および第2クランプが原点にないか
否か、ウエハー交換レバーが原点にあるか否かを判断す
る。なお、この実施例の無菌的接合装置1で使用するク
ランプは、上述のように、第1クランプ3が、第2クラ
ンプ方向に突出する突出部3iを有し、第2クランプ2
が、この突出部3iを収納する凹部2iを有しているの
で、第2クランプ2は、第1クランプを閉塞しない
と、閉塞できないように構成されている。このため、第
1および第2クランプが開いていることは、第2クラン
プが閉塞されたときに、接触するレバー16と、このレ
バー16によりON/OFFされるマイクロスイッチ1
3により検知される。具体的には、マイクロスイッチ1
3は、第2クランプが解放状態のときは、OFFとな
ており、第2クランプ2が閉塞されたときにレバー16
と接触し、レバー16が動きマイクロスイッチ13をO
N状態とする。このマイクロスイッチ13のON/OF
F信号は、制御器40に入力される。第1および第2ク
ランプが原点にないことは、それぞれのカムの円周上に
設けられた溝をマイクロスイッチSW5(73),SW
6(74)が検知することにより判断される。ウエハー
交換レバー22が原点にあることは、マイクロスイッチ
14により検知される。レバー22が、原点にある場合
は、マイクロスイッチ14がONとなり、原点にない場
合は、OFFとなり、このマイクロスイッチ14のON
/OFF信号は、制御器40に入力される。
First, as shown in the flowchart of FIG. 12, a power switch provided on the panel 50 of FIG. 3 is pressed. Thereby, the joining device 1 is checked by the CPU constituting the controller 40 shown in FIG. 3 whether there is no abnormality (specifically, there is no disconnection of the internal connector, no disconnection of the thermocouple, Source is not defective), and if there is an abnormality , a buzzer sounds. Subsequently, the clamp reset switch 53 provided on the panel 50 of FIG.
push. The CPU determines whether the first and second clamps are open, whether the first and second clamps are not at the origin, and whether the wafer exchange lever is at the origin. In the clamp used in the aseptic bonding apparatus 1 of this embodiment, as described above, the first clamp 3 has the protruding portion 3i protruding in the second clamp direction, and the second clamp 2
However, since the second clamp 2 has the concave portion 2i for accommodating the projecting portion 3i, the second clamp 2 cannot be closed unless the first clamp 3 is closed. Therefore, the fact that the first and second clamps are open means that when the second clamp is closed, the lever 16 that comes into contact with the micro switch 1 that is turned ON / OFF by the lever 16 is closed.
3 is detected. Specifically, the micro switch 1
3, when the second clamp is in released state, OFF and are Do Tsu <br/>, lever when the second clamp 2 is closed 16
, The lever 16 moves and the micro switch 13 is turned on.
N state. ON / OF of this micro switch 13
The F signal is input to the controller 40. The fact that the first and second clamps are not at the origin means that the grooves provided on the circumference of the respective cams are formed by the micro switches SW5 (73), SW5
6 (74) is determined by detection. The fact that the wafer exchange lever 22 is at the origin is detected by the microswitch 14. When the lever 22 is at the origin, the micro switch 14 is turned on, and when not, the micro switch 14 is turned off.
The / OFF signal is input to the controller 40.

【0027】そして、図12に示すように、上述の4つ
の点すべてがYESの場合、モータを作動させ、第1お
よび第2クランプを原点に復帰させる。また、上述の4
つの点のうちいずれか1つでもNoの場合、ブサーが鳴
動し、異常ランプが点灯し、手動解除を行い、リセット
スイッチを押すことにより、異常ランプが消灯する。第
1および第2クランプが原点に到達した後、2本の可撓
性チューブ48,49を第1および第2クランプに装着
する。この状態での第1および第2クランプ3,2は、
図10に示すように、両者とも開放した状態であり、か
つ両者に設けられたスロット3eと2eおよび3fと2
fは互いに向かいあった状態となっている。そして、使
用中のチューブ49を手前側のスロット3f,2fに装
着し、接続される未使用のチューブ48を奥側のスロッ
ト3e,2eに装着する。そして、上記のように第1お
よび第2クランプ3,2を閉塞した後、ウエハー交換レ
バー22をクランプ側に押して、ウエハーを交換する。
ウエハー交換レバー22をクランプ側に引くことによ
り、ウエハーカートリッジ8内より、新しいウエハーが
取り出され、新しいウエハーが、切断手段5に装着され
ている待機ウエハーを押し、待機ウエハーが切断手段5
に装着されていた使用済ウエハーを押し、待機ウエハー
が使用位置に装着されるとともに、使用済ウエハーは、
使用済ウエハー収納箱29内に収納される。続いて、パ
ネル50の開始スイッチを押すと図13のフローチャー
トのに移行し、図3に示す制御器40を構成するCP
Uにより、第1および第2クランプが閉じているか否
か、ウエハーが交換済であるか否か、第1および第2ク
ランプが原点にあるか否か、ウエハー交換レバーが原点
にあるか否か、第1および第2クランプが閉じているか
否かは、第2クランプが閉塞されたときに、接触するレ
バー16と、このレバー16によりON/OFFされる
マイクロスイッチ13により検知される。具体的には、
マイクロスイッチ13は、第2クランプが解放状態のと
きは、OFFとなっており、第2クランプ2が閉塞され
たときにレバー16と接触し、レバー16が動き、マイ
クロスイッチ13をON状態とする。このマイクロスイ
ッチ13のON/OFF信号は、制御器40に入力され
る。ウエハーが交換済であるか否かは、ウエハー交換レ
バー22をクランプ方向に押し、ウエハー交換作業を行
うと、交換レバー22は、マイクロスイッチ15を一度
ONさせるので、マイクロスイッチ15からのON信号
により交換されたか否か検知される。マイクロスイッチ
15のON/OFF信号は、制御器40に入力される。
第1および第2クランプが原点にあるか否かは、上述の
ようにマイクロスイッチ13により検知する。
Then, as shown in FIG. 12, if all the above four points are YES, the motor is operated to return the first and second clamps to the origin. In addition, the above 4
If any one of the two points is No, the buzzer sounds, the abnormal lamp is lit, manual release is performed, and the reset switch is pressed to turn off the abnormal lamp. After the first and second clamps have reached the origin, two flexible tubes 48, 49 are mounted on the first and second clamps. The first and second clamps 3, 2 in this state are:
As shown in FIG. 10, both are open and slots 3e and 2e and 3f and 2f provided in both are open.
f are facing each other. Then, the tube 49 in use is attached to the front slots 3f, 2f, and the unused tube 48 to be connected is attached to the rear slots 3e, 2e. Then, after closing the first and second clamps 3 and 2 as described above, the wafer is exchanged by pushing the wafer exchange lever 22 to the clamp side.
By pulling the wafer exchange lever 22 toward the clamp, a new wafer is taken out of the wafer cartridge 8, and the new wafer pushes the standby wafer mounted on the cutting means 5, and the standby wafer is moved to the cutting means 5.
The used wafer that was mounted on the wafer is pushed, the standby wafer is mounted on the used position, and the used wafer is
It is stored in the used wafer storage box 29. Subsequently, when the start switch of the panel 50 is pressed, the flow shifts to the flowchart of FIG. 13 and the CP constituting the controller 40 shown in FIG.
U determines whether the first and second clamps are closed, whether the wafer has been replaced, whether the first and second clamps are at the origin, and whether the wafer exchange lever is at the origin. Whether the first and second clamps are closed is detected by a lever 16 that contacts when the second clamp is closed, and a microswitch 13 that is turned on / off by the lever 16. In particular,
The micro switch 13 is OFF when the second clamp is in the released state, and comes into contact with the lever 16 when the second clamp 2 is closed, the lever 16 moves, and the micro switch 13 is turned ON. . The ON / OFF signal of the micro switch 13 is input to the controller 40. Whether the wafer has been replaced or not is determined by pressing the wafer replacement lever 22 in the clamping direction and performing the wafer replacement operation. The replacement lever 22 turns on the micro switch 15 once. It is detected whether or not it has been replaced. The ON / OFF signal of the micro switch 15 is input to the controller 40.
Whether or not the first and second clamps are at the origin is detected by the microswitch 13 as described above.

【0028】そして、図13に示すように、上述の4つ
の点のいずれか1つでもNoの場合、ブサーが鳴動し、
図12のにもどる。また、上述の4つの点のすべてが
YESの場合、動作中ランプ47が点灯し、ウエハーの
加熱が開始される。ウエハーの加熱開始後、ウエハー電
流が設定値以上であるか判断し、これは、ウエハーが短
絡しているを判断するためである。そして、ウエハー
電流が設定値以(シャント抵抗にかかる電圧が所定値
以上)でない場合は、0.3秒待った後に、ウエハー電
流が設定値範囲内であるか判断する。これは、ウエハー
が使用済のものである場合、抵抗体の熱履歴のために、
抵抗値が低下するため、ウエハー電流を測定し、あらか
じめ設定したウエハー電流と比較し、設定範囲内(許容
範囲内)であるかを検知し、これにより、ウエハーが使
用済であるかを電気的に判断する。上記のウエハー電流
が設定値以上である場合(ウエハーが短絡している場
合)および、上述のウエハー電流が設定範囲内でない場
合(ウエハーが使用済みの場合)は、ブサーが鳴動し、
ウエハーの加熱を停止し、ウエハー異常ランプが点灯
し、リセットスイッチが押された後、図12のフローチ
ャートに移行する。そして、ウエハー電流と比較し、
設定範囲内(許容範囲内)である場合は、ウエハーの加
熱が継続される。ウエハー6の加熱は、ウエハー温度検
知手段である熱電対7の温度検知出力に基づいて、算出
されるパルス幅変調信号により定電圧源43を制御しな
がら行われる。そして、ウエハーの過剰加熱を防止する
ために、ウエハーの加熱時間が所定時間内であるか判断
し、また、ウエハー電流が所定値範囲内であるか判断
し、所定値以、つまりウエハーが短絡事故を起こして
いる場合は、直ちにブサーが鳴動し、ウエハーの加熱を
停止し、図12のフローチャートに移行する。そし
て、ウエハーの温度が設定温度に達すると、図14のフ
ローチャートに移行し、モータが作動し、これによ
り、ギア30、ギア31、カム19,17が回転し、切
断手段(ウエハー)上昇し、チューブの切断、第1ク
ランプの後退、切断手段(ウエハー)の下降、第2クラ
ンプの第1クランプ側への幅寄せが行われる。
Then, as shown in FIG. 13, if any one of the above four points is No, the buzzer sounds,
It returns to FIG. If all four points are YES, the operating lamp 47 is turned on and heating of the wafer is started. After the start of the heating of the wafer, it is determined whether or not the wafer current is equal to or more than a set value, in order to determine whether the wafer is short-circuited. Then, if the wafer current is not set value than the (higher than a predetermined value the voltage across the shunt resistor), after waiting 0.3 seconds, to determine whether the wafer current is within a set value range. This is due to the thermal history of the resistor if the wafer is used,
Since the resistance value decreases, the wafer current is measured and compared with a preset wafer current to detect whether or not the current is within a set range (within an allowable range), thereby electrically determining whether the wafer has been used. To judge. When the above-mentioned wafer current is equal to or higher than the set value (when the wafer is short-circuited) and when the above-mentioned wafer current is not within the set range (when the wafer has been used), a buzzer sounds,
After the wafer heating is stopped, the wafer abnormality lamp is turned on, and the reset switch is pressed, the flow shifts to the flowchart of FIG. And compared with the wafer current,
If it is within the set range (within the allowable range), the heating of the wafer is continued. The heating of the wafer 6 is performed while controlling the constant voltage source 43 by a pulse width modulation signal calculated based on the temperature detection output of the thermocouple 7 serving as a wafer temperature detecting means. Then, in order to prevent excessive heating of the wafer, it is determined whether the heating time of the wafer is within a predetermined time, and determines whether the wafer current is within a predetermined value range, a predetermined value than on, i.e. wafer short If an accident has occurred, the buzzer sounds immediately, the heating of the wafer is stopped, and the flow shifts to the flowchart of FIG. When the temperature of the wafer reaches the set temperature, moves to the flowchart of FIG. 14, the motor is actuated, thereby, the gear 30, gear 31, cams 19, 17 is rotated, the cutting means (wafer) rises The cutting of the tube, the retreat of the first clamp, the lowering of the cutting means (wafer), and the shifting of the second clamp toward the first clamp are performed.

【0029】具体的に説明すると、まず、カム17が
9に示す矢印方向に回転することにより、切断手段5の
フォロア5bは、カム溝17a内を摺動する。当初図9
および図11に示すカム溝の原点Oがフォロア5bと接
触していた状態より、図9および図11に示すカム溝1
7aの点Aがフォロア5bと接触するようになる。そし
て、図9および図11に示すカム溝17aの点Aがフォ
ロア5bと接触する状態から、カム溝17aの点Bがフ
ォロア5bと接触する状態に至るまでの間、図11に示
すように、なだらかに切断手段5は上昇し、この間にお
いて、2本の可撓性チューブが切断される。図15およ
び図16を用いて説明すると、2本のチューブ48,4
9は、第1クランプ3および第2クランプ2により保持
されており、第1クランプ3および第2クランプ2の間
に位置するチューブ部分48a,49aが形成され、そ
の下方に切断手段のウエハー6が位置している。そし
て、上述のように、カム17の回転により、切断手段5
(ウエハー6)が上昇することにより、図16に示すよ
うに、2本のチューブの第1クランプ3および第2クラ
ンプ2の間に位置するチューブ部分48a,49aにて
両者を溶融切断する。
[0029] Specifically, first, the cam 17 in FIG.
By rotating in the direction indicated by the arrow 9, the follower 5 b of the cutting means 5 slides in the cam groove 17 a. Initially Figure 9
9 and 11 from the state where the origin O of the cam groove shown in FIG. 11 is in contact with the follower 5b.
The point A of 7a comes into contact with the follower 5b. As shown in FIG. 11, from the state where the point A of the cam groove 17a shown in FIGS. 9 and 11 contacts the follower 5b to the state where the point B of the cam groove 17a comes into contact with the follower 5b, as shown in FIG. The cutting means 5 rises gently, during which the two flexible tubes are cut. Referring to FIGS. 15 and 16, two tubes 48, 4
9 is held by the first clamp 3 and the second clamp 2, and tube portions 48a and 49a located between the first clamp 3 and the second clamp 2 are formed, and the wafer 6 of the cutting means is located below the tube portions 48a and 49a. positioned. As described above, the rotation of the cam 17 causes the cutting means 5 to rotate.
As the (wafer 6) rises, as shown in FIG. 16, the two tubes are melt-cut at the tube portions 48a and 49a located between the first clamp 3 and the second clamp 2 of the two tubes.

【0030】そして、図9に示すカム溝17aの点Bが
フォロア5bと接触する状態から、カム溝17aの点C
がフォロア5bと接触する状態に至るまでの間、図9お
よび図11に示すように、切断手段5は、上昇した状態
が維持され、チューブ48a,49aの切断された端部
を十分に溶解する。そして、図9および図11に示すカ
ム溝17aの点Cがフォロア5bと接触する状態から、
カム溝17aの点Eがフォロア5bと接触する状態に至
るまでの間、図9および図11に示すように、なだらか
に切断手段5は下降する。また、図8に示すように、カ
ム19が矢印方向に回転することにより、第1クランプ
を移動させるためのアーム18に設けられたフォロア1
8aは、カム溝19a内を摺動する。当初図8および図
11に示すカム溝の原点Oがフォロア18aと接触して
いた状態より、図8および図11に示すカム溝19aの
点Fがフォロア18aと接触するようになる。図11の
タイミングチャートに示すように、切断手段5のフォロ
ア5bがカム溝17aの点Bに至るより若干早く、フォ
ロア18aは、カム溝19a点Fに至る。そして、図8
および図11に示すように、カム溝19aの点Fがフォ
ロア18aと接触する状態から、カム溝19aの点Gが
フォロア18aと接触する状態に至るまでの間、図11
に示すように、徐々に第1クランプ3は後退し、図17
に示す状態となり、接合されるチューブ部分49aと4
8aがウエハー6を介して向かい合った状態となる。こ
の状態は、図11のタイミングチャートに示すように、
カム溝19aの点Gがフォロア18aと接触する状態か
ら、カム溝17aの点Cがフォロア5bと接触する状態
に至るまでの間維持される。そして、第1クランプの位
置は、点Gがフォロア18aと接触する状態から、カム
溝19aの点Hがフォロア18aと接触する状態に至る
までの間、図17の状態が維持される。なお、切断手段
5は、上述のように、図9および図11に示すカム溝1
7aの点Cがフォロア5bと接触する状態から、カム溝
17aの点Eがフォロア5bと接触する状態に至るまで
の間、図9および図11に示すように、なだらかに下降
し、接合されるチューブ部分48a,49aが当接す
る。
Then, the point B of the cam groove 17a shown in FIG.
9 and 11, the cutting means 5 is maintained in the raised state, and sufficiently dissolves the cut ends of the tubes 48a and 49a. . Then, from the state where the point C of the cam groove 17a shown in FIGS. 9 and 11 comes into contact with the follower 5b,
Until the point E of the cam groove 17a comes into contact with the follower 5b, as shown in FIGS. 9 and 11, the cutting means 5 descends gently. Also, as shown in FIG. 8, the follower 1 provided on the arm 18 for moving the first clamp by rotating the cam 19 in the direction of the arrow.
8a slides in the cam groove 19a. The point F of the cam groove 19a shown in FIGS. 8 and 11 comes into contact with the follower 18a from the state where the origin O of the cam groove shown in FIGS. 8 and 11 is initially in contact with the follower 18a. As shown in the timing chart of FIG. 11, the follower 18a reaches the point F of the cam groove 19a slightly before the follower 5b of the cutting means 5 reaches the point B of the cam groove 17a. And FIG.
As shown in FIG. 11 and FIG. 11, from the state where the point F of the cam groove 19a is in contact with the follower 18a to the state where the point G of the cam groove 19a is in contact with the follower 18a, FIG.
As shown in FIG. 17, the first clamp 3 gradually retreats,
And the tube portions 49a and 4a to be joined
8 a face each other via the wafer 6. This state is as shown in the timing chart of FIG.
The state is maintained from a state where the point G of the cam groove 19a contacts the follower 18a to a state where the point C of the cam groove 17a contacts the follower 5b. The position of the first clamp is maintained in the state shown in FIG. 17 from the state where the point G contacts the follower 18a to the state where the point H of the cam groove 19a contacts the follower 18a. Note that, as described above, the cutting means 5 is provided in the cam groove 1 shown in FIGS. 9 and 11.
As shown in FIGS. 9 and 11, during a period from a state in which the point C of 7a is in contact with the follower 5b to a state in which the point E of the cam groove 17a is in contact with the follower 5b, as shown in FIGS. The tube portions 48a and 49a abut.

【0031】そして、切断手段5の下降が終了した状
態、言い換えれば、カム溝17aの点Eがフォロア5b
と接触する状態に至ったときとほぼ同時に、図7および
図11に示すように、第2クランプ2が、第1クランプ
側に幅寄せを行う。具体的には、図7および図11に示
すように、カム溝17cの左側面17fの凹部17dの
点Mが、第2クランプ2を駆動させるためのフォロア2
0と接触する状態から、左側面の点Lがフォロア20と
接触する状態に至るまでの間、徐々に、第2クランプ2
は、第1クランプ3側に移動し、カム溝17cの凹部1
7dの点Lが、フォロア20と接触する状態から、凹部
17dの点Kがフォロア20と接触する状態に至るまで
の間、幅寄せした状態を維持する。この幅寄せにより、
チューブ部分48a,49aの両者は確実に密着するの
で、両者の接合をより確実なものとにすることができ
る。そして、カム溝17cの凹部17dの点Kが、フォ
ロア20と接触する状態から、左側面17fの点Jがフ
ォロア20と接触する状態に至るまでの間、徐々に、第
2クランプ2は、第1クランプ3側より離れる方向に移
動し、この状態にて、モータの作動が停止する。
Then, the state where the lowering of the cutting means 5 is completed, in other words, the point E of the cam groove 17a is
Almost at the same time as the state where it comes into contact with the second clamp 2, as shown in FIGS. 7 and 11, the second clamp 2 moves toward the first clamp. Specifically, as shown in FIG. 7 and FIG. 11, the point M of the concave portion 17d of the left side surface 17f of the cam groove 17c is the follower 2 for driving the second clamp 2.
0 until the point L on the left side surface comes into contact with the follower 20.
Moves to the first clamp 3 side, and the concave portion 1 of the cam groove 17c
From the state in which the point L of 7d is in contact with the follower 20 to the state in which the point K of the recess 17d is in contact with the follower 20, the state in which the width is shifted is maintained. By this approach
Since both of the tube portions 48a and 49a are securely adhered to each other, it is possible to further securely join them. Then, from the state where the point K of the concave portion 17d of the cam groove 17c is in contact with the follower 20 to the state where the point J of the left side surface 17f is in contact with the follower 20, the second clamp 2 gradually moves to the second position. moved away from the first clamp 3 side, at this state, the operation of the motor stops.

【0032】よって、停止した位置での、第1クランプ
および第2クランプ2の位置は、図18に示すよう
に、図17と同様にずれた位置となっている。そして、
図14のフローチャートに示すように、熱電対によりウ
エハー温度が検知され、ウエハー温度が設定値以下にな
ると、動作ランプが消灯し、ブサーが鳴動する。そし
て、図18に示すように、第1クランプおよび第2ク
ランプを開き、チューブを取り出すことにより、チュ
ーブの接合作業が終了する。また、図14のフローチャ
ートには記載していないが、図7および図11に示すカ
ム溝17aの点Aがフォロア5bと接触する状態より、
カム溝17aの点Cがフォロア5bと接触する状態に至
るまでの間、言い換えれば、切断手段5が上昇を開始し
てから下降を開始するまでの間も、図13のフローチャ
ートに示すようにウエハーが設定温度であるかを判断
し、ウエハー温度検知手段である熱電対7の温度検知出
力に基づいて、算出されるパルス幅変調信号により定電
圧源43を制御し、ウエハーの温度制御を行うことが好
ましい。これは、一度ウエハーが設定温度に到達して
も、切断するチューブ48,49にウエハーが接触する
ことにより、ウエハーの熱がチューブにより吸収され低
下するため、その補正を行うためである。特に、上述の
ように、図4における加熱制御回路55が、温度検知手
段7である熱電対からの温度検知信号aを、補正ウエハ
ー温度算出部51のPID補正器56(比例・微分・積
分補正器1)により補正し、補正した補正温度信号bを
出力するものとし、その補正を式1b=1/K・a・
(1+K1・T・da/dt)・・・(1)により、補
正値を算出するものとすると、補正温度信号bは、ウエ
ハーの温度の低下によって、温度検知信号である熱電対
の実際の温度が低下するまでの時間遅れを、K1・T・
da/dtにて補正しているので、実際のウエハーの低
下温度を正確に検知するので、対応早く、ウエハーの温
度制御を行うことができる。
Therefore, the positions of the first clamp 3 and the second clamp 2 at the stopped positions are shifted as shown in FIG. 17, as shown in FIG. And
As shown in the flow chart of FIG. 14, when the wafer temperature is detected by the thermocouple and the wafer temperature falls below the set value, the operation lamp is turned off and the buzzer sounds. Then, as shown in FIG. 18, the first clamp 3 and the second clamp 2 are opened, and the tube is taken out, thereby completing the tube joining operation. Although not described in the flowchart of FIG. 14, the point A of the cam groove 17a shown in FIGS. 7 and 11 is in contact with the follower 5b.
As shown in the flow chart of FIG. 13, the wafer C is not moved until the point C of the cam groove 17a comes into contact with the follower 5b, in other words, from when the cutting means 5 starts moving up to when the cutting means 5 starts moving down. Is determined to be the set temperature, and based on the temperature detection output of the thermocouple 7 as the wafer temperature detection means, the constant voltage source 43 is controlled by the calculated pulse width modulation signal to control the temperature of the wafer. Is preferred. This also reached once wafer set temperature, by wafer contacts the tubes 48 and 49 of cutting, because the wafer heat is absorbed by the tube decreases, in order to perform the correction. In particular, as described above, the heating control circuit 55 in FIG. 4 converts the temperature detection signal a from the thermocouple serving as the temperature detecting means 7 into the PID corrector 56 (proportional / differential / integral correction) of the correction wafer temperature calculator 51. Unit 1), and outputs a corrected temperature signal b. The correction is expressed by the formula 1b = 1 / K · a ·
(1 + K1 · T · da / dt) (1) If the correction value is calculated by (1), the correction temperature signal “b” indicates the actual temperature of the thermocouple which is the temperature detection signal due to a decrease in the temperature of the wafer. The time delay until the pressure drops is defined as K1 · T ·
Since the correction is performed using da / dt, the actual temperature drop of the wafer is accurately detected, so that the wafer temperature can be controlled quickly.

【0033】[0033]

【発明の効果】本発明の可撓性チューブ無菌的接合装置
は、可撓性チューブを無菌的に接合するための装置であ
って、該装置は、チューブを保持する第1クランプおよ
び第2クランプと、該第1クランプおよび第2クランプ
間にて前記可撓性チューブを切断するための切断手段と
を有し、前記切断手段は、可撓性チューブを溶融切断す
るためのウエハーと、該ウエハーを加熱するための定電
圧源と、ウエハー温度検知手段と、ウエハー加熱制御手
段とを有し、前記ウエハー加熱制御手段は、前記ウエハ
ー温度検知手段の出力に基づいて算出されるパルス幅変
調信号出力部、該パルス幅変調信号により前記定電圧
源を制御するためのドライブ回路と、ウエハー短絡保護
回路とを有し、前記ウエハー短絡保護回路は、前記ウエ
ハーの短絡検知部と、該短絡検知部の検知信号に基づ
き、前記パルス幅変調信号出力部からのパルス幅変調信
号の前記ドライブ回路への流入を制御するパルス幅変調
信号制御部を有している。特に、定電圧源とパルス幅変
調信号回路を用いることにより、消費電力を小さいもの
とすることができ、さらに、パルス幅変調信号により定
電圧源を制御することにより、可撓性チューブを加熱溶
融により切断するためのウエハーの温度制御を確実に行
うことができ、確実なチューブの接合を行うことができ
る。
According to the present invention, a flexible tube aseptic joining apparatus is an apparatus for aseptically joining flexible tubes, the apparatus comprising a first clamp and a second clamp for holding the tubes. And cutting means for cutting the flexible tube between the first clamp and the second clamp, the cutting means comprising: a wafer for melting and cutting the flexible tube; A constant voltage source for heating the wafer, a wafer temperature detecting means, and a wafer heating control means, wherein the wafer heating control means outputs a pulse width modulation signal output calculated based on the output of the wafer temperature detecting means. and parts, and a drive circuit for controlling the constant voltage source by the pulse width modulation signal, wafer circuit protection
Circuit, and the wafer short-circuit protection circuit is
A short-circuit detection section of the hull and a detection signal of the short-circuit detection section.
A pulse width modulation signal from the pulse width modulation signal output unit.
Width modulation for controlling the flow of signals into the drive circuit
It has a signal control unit . In particular, by using a constant voltage source and a pulse width modulation signal circuit, power consumption can be reduced. In addition, by controlling a constant voltage source with a pulse width modulation signal, a flexible tube is heated and melted. The temperature of the wafer for cutting can be reliably controlled, and the tube can be reliably bonded.

【図面の簡単な説明】[Brief description of the drawings]

【図1】図1は、本発明の可撓性チューブ無菌的接合装
置の一実施例の斜視図である。
FIG. 1 is a perspective view of one embodiment of a flexible tube aseptic joining apparatus of the present invention.

【図2】図2は、図1に示した無菌的接合装置をケース
に収納した状態を示す斜視図である。
FIG. 2 is a perspective view showing a state in which the aseptic joining device shown in FIG. 1 is housed in a case.

【図3】図3は、本発明の無菌的接合装置に使用される
電気回路の一例を示すブロック図であ
FIG. 3 is a block diagram showing an example of an electric circuit used in the aseptic joining apparatus of the present invention.

【図4】図4は、本発明の無菌的接合装置の電気回路の
ウエハー加熱制御手段の一例を示す電気回路ブロック図
である。
FIG. 4 is an electric circuit block diagram showing an example of a wafer heating control means of the electric circuit of the aseptic bonding apparatus of the present invention.

【図5】図5は、本発明の可撓性チューブ無菌的接合装
置の一実施例の上面図である。
FIG. 5 is a top view of one embodiment of the flexible tube aseptic joining apparatus of the present invention.

【図6】図6は、本発明の可撓性チューブ無菌的接合装
置に使用される切断手段の説明図である。
FIG. 6 is an explanatory view of cutting means used in the flexible tube aseptic joining apparatus of the present invention.

【図7】図7は、第1クランプ、第2クランプおよび切
断手段の動作を説明するために説明図である。
FIG. 7 is an explanatory diagram for explaining operations of a first clamp, a second clamp, and a cutting unit.

【図8】図8は、第1クランプの動作を説明するための
説明図である
FIG. 8 is an explanatory diagram for explaining an operation of a first clamp.

【図9】図9は、切断手段の動作を説明するための説明
図である。
FIG. 9 is an explanatory diagram for explaining an operation of a cutting unit.

【図10】図10は、本発明の無菌的接合装置に使用さ
れる第1および第2クランプの一例を示す斜視図であ
る。
FIG. 10 is a perspective view showing an example of first and second clamps used in the aseptic joining apparatus of the present invention.

【図11】図11は、第1クランプ、第2クランプおよ
び切断手段の動作タイミングを示すタイミングチャート
である。
FIG. 11 is a timing chart showing operation timings of a first clamp, a second clamp, and a cutting unit.

【図12】図12は、本発明の無菌的接合装置の作用を
説明するためのフローチャートである。
FIG. 12 is a flowchart for explaining the operation of the aseptic joining apparatus of the present invention.

【図13】図13は、本発明の無菌的接合装置の作用を
説明するためのフローチャートである。
FIG. 13 is a flowchart for explaining the operation of the aseptic joining apparatus of the present invention.

【図14】図14は、本発明の無菌的接合装置の作用を
説明するためのフローチャートである。
FIG. 14 is a flowchart for explaining the operation of the aseptic joining apparatus of the present invention.

【図15】図15は、本発明の無菌的接合装置の作用を
説明するための説明図である。
FIG. 15 is an explanatory diagram for explaining the operation of the aseptic joining apparatus of the present invention.

【図16】図16は、本発明の無菌的接合装置の作用を
説明するための説明図である。
FIG. 16 is an explanatory diagram for explaining the operation of the aseptic joining apparatus of the present invention.

【図17】図17は、本発明の無菌的接合装置の作用を
説明するための説明図である。
FIG. 17 is an explanatory diagram for explaining the operation of the aseptic joining apparatus of the present invention.

【図18】図18は、本発明の無菌的接合装置の作用を
説明するための説明図である。
FIG. 18 is an explanatory diagram for explaining the operation of the aseptic joining apparatus of the present invention.

【図19】図19は、定電流源を用いた加熱手段の回路
の概略図である。
FIG. 19 is a schematic diagram of a circuit of a heating unit using a constant current source.

【図20】図20は、定電圧源を用いた加熱手段の回路
の概略図である。
FIG. 20 is a schematic diagram of a circuit of a heating unit using a constant voltage source.

【符号の説明】[Explanation of symbols]

1 無菌的接合装置 2 第2クランプ 3 第1クランプ 5 切断手段 6 ウエハー 7 ウエハー温度検知手段 13 マイクロスイッチ1 14 マイクロスイッチ2 15 マイクロスイッチ3 40 制御器 41 整流電源回路 42 モーター 43 定電圧源 44 ウエハー加熱制御手段 50 入力パネル 59 パルス幅変調信号出力部 65 ウエハー短絡保護回路 DESCRIPTION OF SYMBOLS 1 Aseptic joining apparatus 2 2nd clamp 3 1st clamp 5 Cutting means 6 Wafer 7 Wafer temperature detecting means 13 Micro switch 1 14 Micro switch 2 15 Micro switch 3 40 Controller 41 Rectifier power supply circuit 42 Motor 43 Constant voltage source 44 Wafer Heating control means 50 Input panel 59 Pulse width modulation signal output section 65 Wafer short circuit protection circuit

フロントページの続き (56)参考文献 特開 平2−25318(JP,A) 特開 昭59−71814(JP,A) 特開 昭59−25756(JP,A) 特開 昭57−49468(JP,A) 特開 昭63−127767(JP,A) 特開 昭59−64034(JP,A) 特公 昭61−30582(JP,B1) (58)調査した分野(Int.Cl.7,DB名) A61J 1/14 A61M 1/28 A61M 39/02 Continuation of the front page (56) References JP-A-2-25318 (JP, A) JP-A-59-71814 (JP, A) JP-A-59-25756 (JP, A) JP-A-57-49468 (JP) JP-A-63-127767 (JP, A) JP-A-59-64034 (JP, A) JP-B-61-30582 (JP, B1) (58) Fields investigated (Int. Cl. 7 , DB A61J 1/14 A61M 1/28 A61M 39/02

Claims (6)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 可撓性チューブを無菌的に接合するため
の装置であって、該装置は、チューブを保持する第1ク
ランプおよび第2クランプと、該第1クランプおよび第
2クランプ間にて前記可撓性チューブを切断するための
切断手段とを有し、前記切断手段は、可撓性チューブを
溶融切断するためのウエハーと、該ウエハーを加熱する
ための定電圧源と、ウエハー温度検知手段と、ウエハー
加熱制御手段とを有し、 前記ウエハー加熱制御手段は、前記ウエハー温度検知手
段の出力に基づいて算出されるパルス幅変調信号出力部
、該パルス幅変調信号により前記定電圧源を制御する
ためのドライブ回路と、ウエハー短絡保護回路とを有
し、 前記ウエハー短絡保護回路は、前記ウエハーの短絡検知
部と、該短絡検知部の検知信号に基づき、前記パルス幅
変調信号出力部からのパルス幅変調信号の前記ドライブ
回路への流入を制御するパルス幅変調信号制御部を有し
ている ことを特徴とする可撓性チューブ無菌的接合装
置。
1. A device for aseptically joining flexible tubes, the device comprising a first clamp and a second clamp for holding the tubes, and a first clamp and a second clamp between the first and second clamps. Cutting means for cutting the flexible tube, the cutting means comprising: a wafer for melting and cutting the flexible tube; a constant voltage source for heating the wafer; and a wafer temperature detector. Means, and a wafer heating control means, wherein the wafer heating control means is a pulse width modulation signal output section calculated based on an output of the wafer temperature detecting means.
And controlling the constant voltage source by the pulse width modulation signal.
Drive circuit and a wafer short-circuit protection circuit.
And the wafer short circuit protection circuit detects a short circuit of the wafer.
And the pulse width based on a detection signal of the short-circuit detection unit.
Driving the pulse width modulation signal from the modulation signal output unit
Has a pulse width modulation signal control unit that controls the inflow to the circuit
And flexible tubing aseptically joining device, characterized in that are.
【請求項2】 前記可撓性チューブ無菌的接合装置は、
少なくとも2本の可撓性チューブを平行状態にて保持す
る第1クランプおよび第2クランプと、該第1クランプ
および第2クランプ間にて前記可撓性チューブを切断す
るための切断手段と、該切断手段により切断された可撓
性チューブの接合される端部相互が密着するように前記
第1クランプまたは前記第2クランプの少なくとも一方
を移動させる移動手段とを有している請求項1に記載の
可撓性チューブ無菌的接合装置。
2. The flexible tube aseptic joining device,
First and second clamps for holding at least two flexible tubes in parallel, cutting means for cutting the flexible tubes between the first and second clamps, 2. A moving means for moving at least one of the first clamp and the second clamp such that ends to be joined of the flexible tube cut by the cutting means are in close contact with each other. Flexible tube aseptic joining device.
【請求項3】 前記ウエハー加熱制御手段は、前記ウエ
ハー温度検知手段の出力に基づいて補正ウエハー温度を
算出する補正ウエハー温度算出部と、該補正ウエハー温
算出部により算出された補正温度と前記ウエハーの目
的加熱温度との偏差信号を出力する偏差信号出力部とを
有し、前記パルス幅変調信号出力部は、該偏差信号に基
づいてパルス幅変調信号を出力するものである請求項1
または2に記載の可撓性チューブ無菌的接合装置。
3. The wafer heating control means detects a corrected wafer temperature based on an output of the wafer temperature detection means.
A correction wafer temperature calculating unit for calculating the correction wafer temperature;
And a deviation signal output section for outputting a deviation signal between a target heating temperature of the calculated correction temperature the wafer by the degree calculating unit, the pulse width modulation signal output unit, the pulse width modulation on the basis of the deviation signal A signal is output.
Or the flexible tube aseptic joining apparatus according to 2.
【請求項4】 前記ウエハー温度検知手段は、熱電対ま4. The wafer temperature detecting means includes a thermocouple or a thermocouple.
たは測温抵抗体である請求項1ないし3のいずれかに記Or a resistance temperature detector.
載の可撓性チューブ無菌的接合装置。Assembling apparatus for flexible tubes.
【請求項5】 前記補正ウエハー温度算出部は、比例・
積分・微分補正回路を有している請求項3に記載の可撓
性チューブ無菌的接合装置。
5. The correction wafer temperature calculating section according to claim 1, wherein:
The flexible tube aseptic joining apparatus according to claim 3, further comprising an integration / derivative correction circuit.
【請求項6】 前記偏差信号出力部は、比例・積分・微
分補正回路を有している請求項3に記載の可撓性チュー
ブ無菌的接合装置。
6. The flexible tube aseptic joining apparatus according to claim 3, wherein the deviation signal output unit has a proportional / integral / differential correction circuit.
JP26067892A 1992-09-03 1992-09-03 Flexible tube aseptic joining device Expired - Lifetime JP3354602B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26067892A JP3354602B2 (en) 1992-09-03 1992-09-03 Flexible tube aseptic joining device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26067892A JP3354602B2 (en) 1992-09-03 1992-09-03 Flexible tube aseptic joining device

Publications (2)

Publication Number Publication Date
JPH0678971A JPH0678971A (en) 1994-03-22
JP3354602B2 true JP3354602B2 (en) 2002-12-09

Family

ID=17351258

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26067892A Expired - Lifetime JP3354602B2 (en) 1992-09-03 1992-09-03 Flexible tube aseptic joining device

Country Status (1)

Country Link
JP (1) JP3354602B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4162973B2 (en) * 2002-11-01 2008-10-08 テルモ株式会社 Tube joining device
JP4046655B2 (en) 2003-07-04 2008-02-13 テルモ株式会社 Tube joining device
CN103767741B (en) 2013-12-19 2015-08-19 武汉佰美斯医疗科技有限公司 The equipment of blood bag aseptic plug into method and the method use

Also Published As

Publication number Publication date
JPH0678971A (en) 1994-03-22

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