JP3350840B2 - Processing method and processing apparatus - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing method and a processing apparatus for appropriately processing an object to be processed such as a semiconductor wafer or an LCD substrate.

[0002]

2. Description of the Related Art Generally, in a semiconductor device manufacturing process, a circuit pattern is reduced on a surface of an object to be processed such as a semiconductor wafer or an LCD substrate using a photolithography technique, transferred to a photoresist, and developed. Coating and developing processing systems are used.

The coating / developing system includes a loading / unloading section for setting a container for accommodating a plurality of, for example, 25 semiconductor wafers, and a cleaning / cooling / cooling process for the semiconductor wafers.
A processing unit provided with a processing unit for performing various processes such as heat treatment such as heating, resist coating processing, and development processing, and a processing unit disposed between the loading / unloading unit and the processing unit. The main part is constituted by a delivery unit having tweezers as a delivery means for delivery.

In the coating / developing system configured as described above, for example, semiconductor wafers in a container set in the loading / unloading section are selected one by one, then taken out with tweezers, transported to the processing section, and processed. After performing appropriate processing in the section, the semiconductor wafer is loaded into an empty container and the processing is completed. In addition, in the processing of the LCD substrate, since the LCD substrate is large in size and weight with respect to the semiconductor wafer,
After the container is fixed and held on the mounting table of the loading / unloading section, the LCD substrate is similarly taken out using tweezers and transported to the processing section, and the processing is continuously performed as appropriate.

[0005]

However, when a container accommodating an object to be processed, such as an unprocessed semiconductor wafer or LCD substrate, is not accurately set in the loading / unloading section, or the container moves during the processing. In addition, if the container is not sufficiently held, the position of the object to be processed is changed, and there is a problem in that the conveyance is hindered and the processing cannot be continued, or the object to be processed is damaged. There has been a problem that the efficiency and the yield are reduced.

The present invention has been made in view of the above circumstances, and monitors the set state of a container accommodating an object to be processed and monitors the operation of a transporting means for selecting and extracting an object to be processed in the container. It is an object of the present invention to provide a processing method and a processing apparatus capable of improving a processing efficiency and a product yield by appropriately processing a processed object.

[0007]

According to a first aspect of the present invention, there is provided a processing method, wherein a processing object selected from a container accommodating a plurality of processing objects is carried out and appropriately processed. Assuming a processing method, setting the container in a predetermined position, detecting the presence or absence of the container, and mapping the object to be processed in the container to detect whether the container setting is normal A step of displaying the state of the container when the absence of the container is detected or when the setting of the container is detected to be abnormal, based on information stored in the display and the control means in advance. And resetting the container to a predetermined position, and mapping the object to be processed in the reset container.

[0008] The processing method according to claim 2 is based on the premise that, similarly to the above-mentioned processing method, a processing method is carried out in which a target object selected from a container accommodating a plurality of target objects is carried out and appropriately processed. Setting the container at a predetermined position, detecting the presence or absence of the container, detecting the malfunction of the means for detecting the presence or absence of the container, mapping the object to be processed in the container, A step of detecting whether or not the set is normal; and, when a malfunction of the means for detecting the presence or absence of the container is detected, a step of displaying a state of the malfunction. Resetting the container to a predetermined position based on the above, and mapping the object to be processed in the reset container.

[0010] The processing method according to the third aspect is the first aspect.
Alternatively, in the processing method described in 2 , the type of the object to be processed is simultaneously detected when the state of the object to be processed in the container is detected.

The processing method according to claim 4 is the method according to claim 1.
In the processing method according to any one of to 3 , when mapping the object in the container, information different from the information stored in advance in the control means is detected, or the object of a different type is detected. Detected, or detected an abnormality in the operation of the transporting means of the object to be processed, or when the transporting means of the object to be processed stopped, displaying the state and moving the transporting means of the object to the initial position It is characterized by returning.

According to a fifth aspect of the present invention, there is provided a processing apparatus, wherein a container for accommodating a plurality of objects to be processed, transport means for carrying in and out a predetermined object to be processed selected from the container, and processing of the object to be processed as appropriate. Assuming a processing device having a processing unit to perform, a container presence / absence detection means for detecting the presence / absence of the container, a detection means provided in the transport means, and a mapping means for mapping the object to be processed in the set container When the absence of the container is detected or when the setting of the container is detected to be abnormal, display means for displaying the state, a signal from the container presence / absence detection means and a signal from the detection means, And control means for performing a comparison operation with the information stored in advance and transmitting a signal to the display means based on the output signal.

According to a sixth aspect of the present invention, there is provided a processing apparatus, wherein a container accommodating a plurality of objects to be processed, transport means for carrying in and out a predetermined object selected from the containers, and processing of the objects to be processed as appropriate. And a container transporting means for setting the container at the loading position of the loading / unloading unit from outside the device, and provided at the loading position to detect the presence or absence of the container. Container presence / absence detection means, provided on the transport means, and detection means for mapping the object to be processed in the container set at the placement position, and when the absence of the container is detected or setting of the container Display means for displaying the status when the status is detected as abnormal,
Control means for comparing the signal from the container presence / absence detection means and the signal from the detection means with information stored in advance and transmitting a signal to the display means and the container transport means based on the output signal; It is characterized by having.

According to a seventh aspect of the present invention, there is provided the processing apparatus according to the fifth aspect.
7. The processing apparatus according to 6, wherein the detection means has a function of detecting the type of the object to be processed.

[0019]

According to the first, fifth or sixth aspect of the present invention, the presence or absence of a container for accommodating a plurality of objects to be processed and whether or not the container set is normal is detected. If the condition is not normal, the condition can be displayed to notify the worker, etc., and after setting the container at a predetermined position based on this display, the object to be processed in the set container is selected and processed. Can be applied.

According to the second aspect of the present invention, when the means for detecting the presence or absence of the container has a malfunction such as a state in which the detection is continuously performed, the state is displayed and the worker or the like is displayed. After the container is set at a predetermined position based on the display, the object to be processed in the set container can be selected and processed.

According to the fourth aspect of the present invention, when mapping the object to be processed in the container, information different from information previously stored in the control means is detected, or an object of a different type is detected. When the operation of the transfer means of the object to be processed is detected, or when the transfer means of the object to be processed is stopped, the transfer means is returned to the initial position, and the state is displayed to inform an operator or the like. After the container is set at a predetermined position based on the display, the object to be processed in the set container can be selected and subjected to processing. In this case, when detecting the state of the object to be processed in the container, by simultaneously detecting the type of the object to be processed,
Of the non-target preventing processing of the workpiece can be processed to continue the initial workpiece (claims 3,7).

[0023]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a schematic plan view of a first embodiment of a processing apparatus according to the present invention.
FIG. 2 is a schematic side view of the main part. Here, a case where the processing apparatus according to the present invention is applied to a semiconductor wafer coating / developing processing system will be described.

In the semiconductor wafer coating / developing processing system 1, a plurality of containers 6 (cassettes) accommodating, for example, a large number of semiconductor wafers W (hereinafter, referred to as wafers) as an object to be processed can be placed at one end thereof. Loading / unloading unit 2, a processing unit 3 having a plurality of processing units for appropriately processing wafers W, loading / unloading unit 2 and processing unit 3
And a transfer unit 5 having a transfer mechanism 4 as transfer means for transferring the wafer W positioned between the transfer unit 5 and the transfer unit 5.

A cassette sensor 7 (container presence / absence detection means) for detecting the presence / absence of the container 6 is provided on the loading / unloading section 2 on which the container 6 is placed. The cassette sensor 7 is formed of, for example, a photo sensor having a light emitting element and a light receiving element, a capacitance type sensor, a micro switch, and the like. To a central processing unit 8 (hereinafter, referred to as a CPU) as a control means.

As shown in FIGS. 1 to 3, the transport mechanism 4 is slidable in a horizontal Y direction along a transport path 11 provided between the loading / unloading section 2 and the processing section 3. And a transfer table 12 which is moved by a ball screw mechanism or the like (not shown).
A shaft 13 that can be moved up and down (Z direction) and horizontally rotated (θ) by a ball screw mechanism, a stepping motor, and the like built in 2, and a driving unit 14 mounted on the shaft 13 moves forward and backward in the horizontal X direction. It is composed of a pair of tweezers 15 and an arm 16 as moving delivery means. In this case, the tweezers 15 are formed in a rectangular plate shape having a width capable of being inserted into the container 6, and are connected to a vacuum pump (not shown) to suction-mount the wafer W and perform unprocessed processing with the container 6. And the delivery of the processed wafer W. On the other hand, the arm 16 is formed in a substantially horseshoe shape with an open end, and is configured to be able to hold the lower surface of the edge of the wafer W by a claw (not shown) projecting from the inner peripheral surface at appropriate intervals. It is configured to transfer the wafer W to and from the processing unit 3.

At the base of the tweezers 15, for example, a sensor 17 for confirming the alignment of the photoelectric type wafer W is provided. Further, a mapping sensor 18 that detects the presence or absence of the wafer W in the container 6 and the confirmation of the type of the wafer W is attached to the tip side of the driving unit 14. The mapping sensor 18 is formed of a photosensor including a light emitting unit 18a and a light receiving unit 18b. After facing the container 6, the mapping sensor 18 enters the container 6 and checks whether there is a wafer W in the container 6. The position and type of the other wafer W, for example, a discrimination between a 6-inch wafer and an 8-inch wafer, and a malfunction of the mapping sensor 18 itself can be detected. The alignment confirmation sensor 17 and the mapping sensor 18 are configured to transmit their detection signals to the CPU 8.

The CPU 8 includes the cassette sensor 7,
The detection signals from the positioning sensor 17 and the mapping sensor 18 are compared and calculated with pre-stored information, and the output signals are displayed on display means such as the alarm 9 and the container transport device 20.
And it can be transmitted to the transport mechanism 4. Here, the alarm 9 is, for example, an alarm device such as a buzzer or a bell,
It means a display including a display by a lamp or a screen display by a monitor. For example, when the container 6 is not placed at a predetermined loading position of the loading / unloading unit 2 and the cassette sensor 7 detects that there is no cassette, an alarm 9 is output by an output signal from the CPU 8 based on the detection signal. It operates to notify the worker or the like of the state. Further, by providing the cassette sensor 7 with an operation detecting means for detecting the operation state of the cassette sensor itself, for example, a timer function, for example, the cassette sensor 7 continuously detects a state different from the actual state for more than the timer set time. CPU 8 based on the detection signal when a malfunction such as
The alarm 9 is actuated by the output signal from the operator to inform an operator or the like of the state. As a specific example, monitoring is performed when a transfer robot such as an AGV automatically places or unloads a cassette, generates a completion signal indicating that the transfer is completed at that time, and then continues malfunctioning with or without the cassette for a certain period of time. It becomes possible. Further, by driving the container transfer device 20 based on the detection signal indicating that there is no cassette, the container 6 is re-mounted and the container 6 is transferred to a predetermined position and set. After the container 6 is set at the predetermined position, the transfer mechanism 4 is driven again to detect (map) the presence or absence and position of the wafer W in the container 6. On the other hand, mapping sensor 1
8 detects information different from the pre-programmed information or detects the presence of a different type of wafer W, an alarm 9 is activated by an output signal from the CPU 8 based on the detection signal, and an operator or the like is activated. Inform the state. Further, the transport mechanism 4 is driven based on the detection signal, and the tweezers 15 retreat from the container 6 and temporarily return to the initial position. Further, based on the detection signal, the cassette transfer device 20
Drives to transport and set the container 6 to a predetermined position. Then, after the container 6 is set at a predetermined position, the transport mechanism 4 is driven again to detect the wafer W in the container 6 (mapping).
Is performed.

On the other hand, the processing section 3 is composed of a first processing section 31 and a second processing section 32 which are connected via a relay section 30. In this case, the first processing unit 31 is provided with a transfer path 33 along the longitudinal direction of the center, and a brush cleaning device 34 for brush-cleaning the wafer W on one side with respect to the transfer path 33; A jet water cleaning device 35 for cleaning with water, an adhesion processing device 36 for hydrophobizing the surface of the wafer W, and a cooling device (not shown) disposed below the adhesion processing device 36 for cooling the wafer W to a predetermined temperature. And a resist coating device 37 and a coating film removing device 37a are provided on the opposite side of the transport path 33. The wafer W is transferred between the devices 34 to 37a by the wafer transfer arm 10 movably provided along the transfer path 33. Further, the second processing unit 32 is provided with a transport path 33 along the longitudinal direction of the center similarly to the first processing unit 31, and with respect to this transport path 33,
Three heating devices 3 in which a plurality of hot plates are vertically stacked
8 are arranged in parallel, and two developing devices 39 are arranged in parallel on the opposite side of the transport path 33. The wafer transfer arm 1 movably provided along the transfer path 33
The transfer of the wafer W to / from each of the devices 38 and 39 is performed by Oa. The second processing unit 32 is connected to the exposure device 40 via the relay unit 30a.

Next, the processing method of the present invention will be described with reference to FIG.
This will be described with reference to the flowchart shown in FIG. First, the cassette sensor 7 detects whether or not the container 6 accommodating the unprocessed wafer W is set on the mounting table of the loading / unloading section 2 (Step A). Container 6 with cassette sensor 7
If it is detected that the container 6 is not present, or if an erroneous operation occurs in which the container 6 is once detected as being present and then subsequently detected as being absent, the signal is transmitted to the CPU 8, and the signal is transmitted to the CPU 8. Is compared with the information stored in advance, and the output signal is transmitted to a display means, for example, an alarm 9 and displayed as an alarm to notify an operator or the like (step B). Further, the cassette transport device 20 is driven based on the output signal, and the container 6 is automatically set on the mounting table of the loading / unloading section 2 or is reset (step C). In this case, the operator may manually set the container 6 without using the container transport device 20.

After the container 6 has been set on the mounting table of the loading / unloading section 2 as described above, the position of the wafer W is detected by the mapping sensor 18 to determine whether the setting state of the container 6 is normal. Is detected (step D). Container 6
If the set is not normal, for example, if the installation position of the container 6 is shifted, the detection signal is transmitted to the CPU 8 in the same manner as described above, and the information stored in advance in the CPU 8, for example, the normal position information of the wafer W The output signal is transmitted to a display means, for example, an alarm 9 and displayed as an alarm to notify an operator or the like of an abnormality (step E). Further, based on the output signal, the container 6 is reset to a predetermined position by the cassette transport device 20 or manually by an operator (step F).

When the container 6 is normally set at a predetermined position as described above, the mapping of the entire wafer W is performed by the mapping sensor 18 and then the selection of the wafer W to be received by the tweezers 15 is performed. (Step G) At the time of this mapping, the operation of the tweezers 15 is abnormal, for example, the tweezers 15 come into contact with the container 6 and the container 6 vibrates to cause lifting or displacement, resulting in no cassette or the tweezers 15 being out of position. If the operation is stopped halfway due to some trouble (Step H), the abnormal signal is transmitted to the CPU 8 and compared with the information stored in advance in the CPU 8 in the same manner as described above, and the output signal is displayed on a display means such as an alarm 9. And an alarm is displayed to inform an operator or the like (step I). The tweezers 15 retreat from the container 6 and return to the initial position based on the output signal (step J). Thereafter, whether or not the position of the wafer W in the container 6 is different from that before the occurrence of the abnormality is detected again by the mapping sensor 18 (step K). If there is no abnormality, a predetermined wafer W is selected by the tweezers 15. It is taken out and transported to the processing unit 3 (step L). If there is an abnormality, it is monitored whether or not the operation status of the setting of the container 6 and the tweezers 15 is appropriate by the procedure of the alarm display, the container setting,... The above-described re-detection operation is also applied to a case where the container 6 is intentionally lifted and removed, and then placed again.

As described above, by automatically monitoring the setting state of the container 6 accommodating the unprocessed wafer W and monitoring the operation of the tweezers 15 for taking out the wafer W from the container 6, a transfer error of the wafer W can be achieved. Can be prevented, and the wafer W can be continuously transferred according to a pre-programmed procedure to perform a predetermined process.

The wafer W transferred to the processing unit 3 is
After being received by the wafer transfer arms 10 and 10a, they are sequentially cleaned, adhered, cooled, and coated with a resist.
After the resist film on the peripheral portion of the wafer W is removed, pre-baking and exposure by the exposure device 40 are performed, and then development processing and post-baking are performed. Then, the wafer is transported to the loading / unloading section 2 and stored in the container 6 for storing processed wafers.

[0036] ◎ Reference Example Figure 5 is a schematic plan view of a reference example of the processing apparatus of the present invention,
FIG. 6 is a perspective view of the main part. In the reference example , the processing apparatus according to the present invention is applied to an LCD substrate coating / developing processing system.

The LCD substrate coating / development processing system 1A has, as in the semiconductor wafer coating / development processing system, one end of the LCD substrate coating / development processing system, for example, a large number of L substrates.
A loading / unloading unit 2 configured to be able to place a plurality of containers 6A (cassettes) accommodating a CD substrate G (hereinafter, referred to as a substrate).
A, a processing unit 3A including a plurality of processing units for appropriately processing the substrate G, and a transport as a transport unit that is located between the loading / unloading unit 2A and the processing unit 3A and transfers the substrate G. The main part is constituted by the delivery part 5A provided with the mechanism 4A. In the LCD substrate coating / developing processing system 1A, the processing unit 3A is the same as the semiconductor wafer coating / developing processing system 1 except that the shapes of the substrate transport arms 10A and 10B as transport means are different. The same reference numerals are given to the portions, and the description thereof will be omitted.

A holding means for installing and fixing the container 6A, such as a lock mechanism 50, is provided on the mounting portion of the container 6A of the loading / unloading section 2A, and the container 6A is loaded / unloaded by the locking mechanism 50. It is designed to be installed and fixed at a predetermined position on the mounting table of the portion 2A. This lock mechanism 5
Reference numeral 0 denotes a flange portion 6a of the container 6A which is disposed adjacent to the container 6A on the mounting table 2a of the loading / unloading portion 2A, for example.
Can be locked. This lock mechanism 50
As shown in FIG. 7, a case 51 is fixedly arranged at a position close to the installation portion of the container 6A, and a case 51 is provided with a magnet body that can come out of the case 51 toward the flange 6a of the container 6A. A lock piece 52 formed, a spring 53 that constantly presses the lock piece 52 inward of the case 51, and a lock piece 52 in the lock direction (leftward in the figure) against the resilience of the spring 53 by excitation. The electromagnetic solenoid 54 is pressed.

In the lock mechanism 50 constructed as described above, when the solenoid 54 is energized and energized, the spring 5
The locking piece 52 projects above the flange 6a of the container 6A against the resilience of the container 3 and slightly presses the flange 6a against the mounting table 2a to fix and hold the container 6A on the mounting table 2a. (See FIG. 7A). Further, when the energization of the solenoid 54 is stopped, the lock piece 52 is retracted into the case 51 by the elastic force of the spring 53, and the holding of the container 6A is released (see FIG. 7B).

Further, a holding detection sensor 60 (container holding detecting means) for detecting whether or not the lock mechanism 50 configured as described above is operating properly is provided. The holding detection sensor 60 is formed of, for example, a photo sensor having a light emitting element and a light receiving element, and a central processing unit 8 (as a control means for comparing the detection signal with information stored in advance. (Hereinafter referred to as CPU).

The transport mechanism 4A is, like the transport mechanism 4 of the semiconductor wafer coating / developing system 1 of the first embodiment, a transport path disposed between the loading / unloading section 2A and the processing section 3A. A transfer table 72 slidably arranged in the Y direction along the base 71 and moved by a ball screw mechanism or the like (not shown).
A shaft 73 that can be raised and lowered (in the Z direction) and horizontally rotated (θ) by a ball screw mechanism, a stepping motor, or the like that is erected on the upper surface of the transfer table 72 and built in the transfer table 72;
A tweezers 75 is provided as a transfer unit that moves forward and backward in the horizontal direction (X direction) by a driving unit 74 mounted on the shaft 73. In this case, tweezers 7
5 is formed in a rectangular plate shape having a width capable of being inserted into the container 6A. A suction groove 75a connected to a vacuum pump (not shown) for sucking and holding the substrate G is provided on the upper surface thereof. At three positions around the suction groove 75a, support protrusions 75b made of nylon resin for supporting the substrate G are erected. By forming the support protrusions 75b with a member made of a nylon resin in this manner, the charge of the glass, which is the material of the substrate G, and the charge of the nylon are reversed by positive and negative to cancel each other, thereby preventing generation of static electricity.

The transport mechanism 4A has a mapping sensor 18A for detecting the presence, position, and number of substrates G accommodated in the container 6A, and corrects the movement of the substrate G accommodated in the container 6A to the central position of the container. A central positioning arm 80 is provided for positioning. In this case, as shown in FIG. 6, the mapping sensor 18A is formed of a reflective photosensor that moves along a guide bar 77 provided on the movable body 76. Note that, in this case, the mapping sensor 18A includes a light emitting unit 18c and a light receiving unit 18d provided toward the container 6A, and is slightly disposed between the light emitting axis of the light emitting unit 18c and the light receiving axis of the light receiving unit 18d. By providing an inclination angle, the light beam emitted and reflected from the light emitting unit 18c can be reliably received by the light receiving unit 18d. The mapping sensor 18A is configured to transmit the detection signal to the CPU 8.
The center positioning arm 80 is connected to a reciprocating mechanism (not shown) mounted on the upper part of the movable body 76 and moves in the reciprocating directions with respect to each other. And a substrate pressing member 82 made of nylon resin. Here, the reason why the substrate pressing member 82 is formed of a nylon resin member is that, similarly to the case of the support projection 75b, the generation of static electricity is caused by the nylon having the electric charge of the glass, which is the material of the substrate G, and the electric charge of positive and negative charges. This is to prevent it.

The CPU 8 includes the holding detection sensor 6.
The detection signal from the mapping sensor 0A and the mapping sensor 18A is compared with information stored in advance, and the output signal is transmitted to display means such as the alarm 9, the lock mechanism 50, and the transport mechanism 4A. For example, when the holding detection sensor 60 detects that the container 6A is not properly held by the lock mechanism 50 at the predetermined placement position of the loading / unloading unit 2 by the holding detection sensor 60, the detection signal is output. The alarm 9 is activated by an output signal from the CPU 8 based on the information, and informs an operator or the like of the state. In addition, the container 6A is set at a predetermined position and fixed and held by automatically re-driving the lock mechanism 50 based on the detection signal. After the container 6A is installed and fixed at a predetermined position, the transport mechanism 4A is driven again to detect (map) the substrate G in the container 6A. On the other hand, if the mapping sensor 18A detects information different from the pre-programmed information or detects the presence of a different type of substrate G, the alarm 9 is activated by an output signal from the CPU 8 based on the detection signal. , Inform the worker etc. of the state. Further, the transport mechanism 4A is driven based on the detection signal, and the tweezers 75 retreat from the container 6A and return to the initial position. After the container 6A is installed and fixed at a predetermined position, the transport mechanism 4A is driven again to detect (map) the substrate G in the container 6A.

Next, the processing method of the reference embodiment will be described with reference to the flowchart shown in FIG. First, the holding detection sensor 60 detects whether or not the container 6A for housing the unprocessed substrate G is fixedly held at a predetermined position on the mounting table of the loading / unloading section 2A (step A). When it is detected by the holding detection sensor 60 that the container 6A is not accurately fixed and held, the signal is transmitted to the CPU 8 and the CPU 8 compares the signal with information stored in advance,
The output signal is transmitted to a display means, for example, an alarm 9 and displayed as an alarm to notify an operator or the like (step B). Further, the lock mechanism 50 is driven based on the output signal, and the container 6A is fixedly held on the mounting table of the loading / unloading section 2A (Step C). In this case, the operator may manually fix and hold the container 6A.

After the container 6A is fixed and held on the mounting table of the loading / unloading section 2A as described above, next, mapping is performed by the mapping sensor 18A.
Selection of a substrate G to be received by the tweezers 75 is performed (step D). At this mapping, when the operation of the tweezers 75 is abnormal, for example, when the tweezers 75 comes into contact with the container 6A or the operation of the tweezers 75 stops (step E). , And the signal is transmitted to the CPU 8, and C
The PU 8 compares the information with the information stored in advance, and the output signal is transmitted to a display means, for example, an alarm 9 and displayed as an alarm to notify an operator or the like (step F). In addition, based on the output signal, the tweezers 75 move the container 6A.
And returns to the initial position (step G). afterwards,
The mapping sensor 18A detects whether or not the substrate G in the container 6A is different from that before the abnormality (step H). If there is no abnormality, the predetermined substrate G is taken out by the tweezers 75 and transported to the processing unit 3A. (Step I). If there is an abnormality, it is monitored whether or not the operation status of the setting of the container 6A and the tweezers 75 is appropriate by the procedure of the alarm display, the container setting,...

As described above, by monitoring the setting state of the container 6A for storing the unprocessed substrate G and monitoring the operation of the tweezers 75 for removing the substrate G from the container 6A,
The transport error of the substrate G can be prevented, and the substrate G can be transported continuously according to a pre-programmed procedure to perform a predetermined process.

The substrate G transported to the processing section 3 includes a substrate transport arm 10A, as in the case of the semiconductor wafer.
After being received by 10B, cleaning, adhesion processing, cooling, application of the resist, removal of the resist film on the peripheral portion of the substrate G, pre-baking, exposure by the exposure device 40, development processing, and post-baking are performed. Then, it is conveyed to the carry-in / carry-out section 2 and stored in the empty container 6A.

In the above embodiment, the processing apparatus according to the present invention is applied to the semiconductor wafer coating / developing system and the LC / LC system.
Although the description has been given of the case where the present invention is applied to a D substrate coating / developing processing system, the present invention is not necessarily applied to the coating / developing processing, and can be applied to, for example, an etching process. Of course, it can be applied to body treatment.

[0049]

As described above, according to the present invention, it is possible to monitor the setting state of the container accommodating the object to be processed to the predetermined position and to carry out the means for carrying out the selected predetermined object to be processed in the container. By monitoring the operation, it is possible to prevent erroneous conveyance of the object and prevent the object from being damaged, so that it is possible to improve the processing efficiency and the yield.

[Brief description of the drawings]

FIG. 1 is a schematic plan view of a system for coating and developing a semiconductor wafer to which a processing apparatus according to a first embodiment of the present invention is applied.

FIG. 2 is a schematic side view of a main part of the semiconductor wafer coating / developing processing system of FIG. 1;

FIG. 3 is a perspective view showing a transport mechanism in the first embodiment.

FIG. 4 is a flowchart showing an operation procedure of the first embodiment.

FIG. 5 illustrates an example of a processing apparatus according to a reference embodiment of the present invention.
1 is a schematic plan view of a coating / developing system for a CD substrate.

FIG. 6 is a perspective view illustrating a transport mechanism according to the reference example .

FIGS. 7A and 7B are a schematic side view showing a locked state of a lock mechanism and a schematic side view showing an unlocked state in a reference embodiment .

FIG. 8 is a flowchart illustrating an operation procedure of the reference example .

[Explanation of symbols]

2, 2A loading / unloading section 3, 3A processing section 4, 4A transport mechanism (transporting means) 6, 6A container 7 cassette sensor (container presence / absence detecting means) 8 CPU (control means) 9 alarm (display means) 15, 75 tweezers 18, 18A Mapping sensor (detection means, object detection means) 20 Container transfer device (container transfer means) 50 Lock mechanism (container holding means) 60 Sensor for holding detection (container holding detection means) W Semiconductor wafer (object to be processed) ) G LCD substrate (workpiece)

────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-2-42743 (JP, A) JP-A-7-130727 (JP, A) JP-A-3-88634 (JP, A) JP-A-5-127 318352 (JP, A) JP-A-4-46742 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01L 21/68 B65G 49/07 H01L 21/02

Claims (7)

(57) [Claims] 1. A processing method for carrying out an object to be processed selected from a container accommodating a plurality of objects to be processed and performing an appropriate process, comprising: setting the container at a predetermined position; A step of detecting, and a step of mapping the object to be processed in the container to detect whether or not the container set is normal; and detecting that the container is not present or that the container set is not normal. If so, a step of displaying the state; a step of resetting the container to a predetermined position based on the display and information stored in the control means in advance; and a step of resetting the container in the container. And a step of mapping an object to be processed. 2. A processing method for carrying out an object to be processed selected from a container accommodating a plurality of objects to be processed and performing an appropriate process, comprising: setting the container at a predetermined position; A step of detecting; a step of detecting a malfunction of the means for detecting the presence or absence of the container; a step of mapping the object to be processed in the container to detect whether or not the set of containers is normal; and When a malfunction of the means for detecting the presence or absence is detected, a step of displaying the state; a step of resetting the container to a predetermined position based on the display and information stored in advance in the control means; Mapping the object to be processed in the container that has been re-processed. 3. A processing method according to claim 1 or 2, wherein, when detecting the state of the object in the container, the processing method characterized in that the detection of the type of the object at the same time. 4. The method according to any one of claims 1 to 3, in mapping the object to be processed of the container, detects different information with previously stored information to the control means, or When a different type of the object to be processed is detected, or when an operation of the object to be processed is abnormally detected, or when the object to be processed is stopped, the state is displayed and the object to be processed is displayed. A processing method characterized by returning a body conveying means to an initial position. 5. A container for accommodating a plurality of objects to be processed, transport means for carrying in and out a predetermined object selected from the containers, and a processing unit for appropriately processing the objects to be processed. In the processing apparatus, a container presence / absence detection unit that detects the presence / absence of the container, a detection unit that is provided in the transport unit and maps the object to be processed in the set container, and that the absence of the container is detected. Display means for displaying the state when the set of containers is not normal or when the set of containers is not normal, and comparing the signal from the container presence / absence detection means and the signal from the detection means with information stored in advance and calculating And a control means for transmitting a signal to the display means based on the output signal. 6. A container for accommodating a plurality of objects to be processed, a transport means for carrying in and out a predetermined object to be processed selected from the container, and a processing unit for performing an appropriate process on the object to be processed. In the processing apparatus, container transport means for setting the container at a loading position of the loading / unloading unit from outside the apparatus, container presence detecting means provided at the loading position, and detecting the presence or absence of the container, and the transport means Provided, and a detection means for mapping the object to be processed in the container set at the mounting position, when the absence of the container is detected or when the setting of the container is detected as abnormal. Display means for displaying the state, a signal from the container presence / absence detection means and a signal from the detection means are compared with pre-stored information, and the display means and the container transport means are based on the output signal. Processing apparatus characterized by comprising a control means for transmitting signals. 7. The processing apparatus according to claim 5 , wherein said detection means has a function of detecting the type of the object to be processed.