JPH0388634A - Cassette automatic charger device - Google Patents

Abstract

PURPOSE:To surely give an operation command by receiving schedule information from an external means, such as process schedule control computer for controlling a process shedule and a manufacturing device control computer, and commanding a cassette and a stage, for this cassette to be charged, to a worker being based on this schedule information. CONSTITUTION:Schedule information is received from external means 200, 300, and being based on this schedule information, a cassette 100 and a stage, for this cassette 100 to be charged, are commanded to a worker. In this way, a sure operation command can be given to the worker. While in accordance with a charge command and a collection command from the external means, a cassette charger robot 2 is drivecontrolled. In this way, the manufacturing device 200 can be automatically charged with the assigned cassette 100 with its automatic collection possible. While because a processing history of the cassette is stored, in the case of generating abnormality in the cassette charger robot and the manufacturing device, the processing history of the cassette is confirmed with restoration performed before generation of the abnormality.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention provides a method for automatically loading and retrieving cassettes containing substrates (wafers) into manufacturing equipment in the manufacturing process of electronic components such as semiconductors and liquid crystal display components. This invention relates to an automatic cassette loading device.

[Prior Art] In manufacturing equipment for semiconductors, etc., when a cassette containing wafers (substrates) is loaded into the cassette rotor of the manufacturing equipment, the manufacturing equipment automatically processes the cassette. Automation is progressing with cassettes. Therefore, when manufacturing equipment is operated unmanned and automatically at night, etc., we have been able to cope with this by adding an automatic cassette loading/recovering device to the manufacturing equipment that automatically loads and retrieves cassettes. Designed for mass production.

Figure 5 is a configuration diagram of a conventional automatic cassette loading/recovery device.
FIG. 6 is an operational flowchart showing an example of the operation of this automatic cassette loading/recovering device. In Figure 5, 1
00 is a cassette containing wafers, ■ is a cassette 100
2 is a cassette loading robot that loads the cassette 100 into the cassette rotor 201 of the manufacturing apparatus 200. In addition, the second machine is the cassette loading robot 2.
22 is a start button; 210 is a manufacturing device controller that drives and controls the manufacturing device 200;

The robot controller 2t receives the start signal a from the start button 22 and starts its operation. A stage number is assigned in advance to stage l, and this stage number is assumed to be j.

Next, the operation will be explained with reference to the flowchart shown in FIG.

First, start operation as i-4 (Ste Tsubu St)
.

It is checked whether or not there is a cassette 100 in the i-th stage, and if there is a cassette 100, the process proceeds to step S3 (
Step S2), if there is none, the process advances to step S7 and ends.

The cassette loading robot 2 loads the cassette lOO on the stage 2 with the stage number i into the cassette rotor 201 (step S3).

The robot controller 21 is the manufacturing equipment controller 2
A cassette loading notification message is sent to 10 to notify that the cassette loading process has been completed (step S4). As a result, the manufacturing equipment controller 210 controls the manufacturing equipment 200.
The wafers in the cassette 100 loaded in the cassette rotor 201 are subjected to a predetermined process.

The robot controller 21 sends a process completion notification C to the manufacturing apparatus controller I to the roller 2, which notifies that the process for the cassette 100 loaded in the cassette rotor 201 has been completed.
10, and when the processing end notification C is received, the cassette rotor 201 and the cassette 100 of h are collected (step S6). If there are any remaining stages that have not been processed, the robot controller 21 adds ↓ to the stage number i (Stella 7S8).
, returns to step S2 and performs the same process. Further, when it is confirmed that all stages have been completed, the process ends (step 7).

As described above, until the processing for all cassettes t00 placed in stage 1 is completed, the cassettes 100 placed in the stage ■ of the stage number i in ascending order of stage number i are transferred to the cassette rotor 201 of the manufacturing apparatus 200.
A predetermined operation of being loaded and recovered is repeated.

[Problem to be solved by the invention] In recent years, in the field of semiconductor manufacturing, the manufacture of customer-specific products called ASICs has become popular, and unlike conventional mass production, wafer processing conditions differ for each lot. There are many cases where it is necessary to manage the opening and opening of the cassette.

Moreover, this loft management is often performed using a process control computer.

However, with the conventional cassette loading/recovering device described above, it is not possible to distinguish between cassette lot names.
Cassettes with the specified lot name cannot be loaded into the manufacturing equipment. Therefore, all cassette management depended on the judgment and careful work of the operator.

However, it is impossible to eliminate operator errors, which causes a decrease in yield.

The automatic cassette loading device of the present invention has been developed in view of the above circumstances, and its purpose is to be able to manage cassettes and load them into the device based on a process schedule, and to instruct workers to load and unload cassettes. An object of the present invention is to provide an automatic cassette loading device that performs the following operations.

[Means for Solving the Problems] The automatic cassette/soto loading device of the present invention has the following means.

(A) A stage for placing cassettes containing wafers, etc.; (B) a cassette loading robot that loads cassettes into the cassette rotor of the manufacturing equipment and retrieves the sets from the cassette rotor of the manufacturing equipment according to loading commands and collection commands; (C) A management control device that controls the transport of the cassette loading robot.

Further, this management control device has the following means.

(a> Communication means that receives schedule information, loading commands, and collection commands from external means, and transmits the completion results of cassette loading and collection operations performed in response to the loading commands and collection commands to external means; b) a cassette input/output instruction means for displaying on a display device an input instruction for loading the cassette into the stage and an unloading instruction for removing the cassette from the stage according to the schedule information; (c) the schedule information, loading instruction, and collection. a status display means for displaying the processing status of the cassette on the stage according to the command; (d) a robot control management means for transmitting a control command according to the loading command and the collection command to a robot controller that controls the cassette loading robot; ) Processing history storage means for storing processing history performed on the cassette.

[Operation] By receiving schedule information from an external means and instructing the worker about the cassette and the stage to which the cassette should be inserted based on this schedule information, reliable operation instructions can be given to the worker. .

Further, by controlling the cassette loading robot according to loading commands and collection commands from external means, specified cassettes can be automatically loaded into the manufacturing apparatus and automatically collected.

In addition, since the cassette processing history is stored, if an error occurs in the cassette loading robot or manufacturing equipment, by checking the cassette processing history, it is possible to restore the cassette to the state before the error occurred. Become.

[Example] Next, the present invention will be explained with reference to the drawings.

FIGS. 1 and 2 show the components of an embodiment of the automatic cassette loading device of the present invention, and the same reference numerals as in FIG. 4 indicate the same or corresponding parts, and the explanation thereof will be omitted.

In FIG. 1, reference numeral 3 denotes a management control device, which transmits and receives control information to and from the process schedule management computer 300 via a communication line 50, and also transmits and receives control information from the robot controller 21 via a communication line 40. Process schedule management needle W [3oo is at the production site,
This is a computer that manages the manufacturing equipment of an entire factory, one floor, or t job shops and the processing steps by these manufacturing equipment, and manages and controls the schedule and execution of processing. 220 is a manufacturing equipment control computer that controls one manufacturing equipment 200, has an internal scheduler, and continuously controls the processing of lots I to 1 through the communication line 50. Control information is exchanged with the process schedule management computer 300.

The management control device 3 is configured as shown in the block diagram shown in FIG. 3■ is a process schedule management calculator 300
It is a communication means for sending and receiving control information.

Reference numeral 32 denotes a cassette management means that stores schedule information of the cassette lOO and stage information of stage 1, and controls each section according to these information. The cassette management means 32 stores and manages information in, for example, a table as shown below. That is, in the lot information management table shown in Table 1, each cassette 101]
schedule information, that is, the lot name of the cassette 100, the processing start time of the lot 1~, etc., are stored, and this fl! ! The status of the lot and the stage number in which the cassettes 1 to 100 are set are stored. In addition, in the stage management table shown in Table 2, stage information, that is, the number of stage l,
The state of stage 1, the lot name of stage 1, etc. are managed.

Table 1 Table 2 The operations performed by the cassette management means 32 are as follows.

■Management of information for cassettes 1 to 100 based on the lot information management table ■Cassettes? - Management of the status of the cassette 100 ■ Writing of the processing history performed on the cassette 100 to the processing history storage means 37 ■ Interpretation of the schedule information of the cassette 100 received from the process schedule management computer 300, and the processing completed. Logical check to see if the schedule information is logically consistent with the lot information management table, for example, check to see if there is any duplication of schedule information, reversal of processing times, etc. ■ Stage 1 management based on the stage management table (a) Stage (b) Allocating the cassette 100 to the stage ■ Loading the cassette 100, interpreting the recovery command (a) Checking the validity of the command (b) Sending the transport command to the robot control management means 35 (from which stage (c) Sending a message 33 of the transport result to the process schedule management computer 300 is carried out according to instructions from the cassette management means 32.
This is a cassette status display means for displaying the status of 00 on the display device 38.

Reference numeral 34 denotes a cassette input/output instructing means that gives instructions to the operator by displaying information on the display device 38 to instruct loading and unloading of the cassette 100 in accordance with instructions from the cassette managing means 32. Further, this cassette input/output instruction means 34 inputs the cassette 100 through three input devices.

It is designed to recognize when a key operation is performed to confirm ejection. Also, as a result of inserting or removing cassette I00, cassette 100 and stage 1
The cassette management means 32 is notified of the change in the state of the cassette.

35 is a robot control management means for controlling the cassette loading robot 2, and the cassette management means 32 controls the cassette I.
In response to the transfer instruction, a specific robot control command is sent to the robot controller 21 via the robot-to-robot communication means 36 and the communication line 40, and a sequence of transfer operations for loading and retrieving cassettes into the cassette rotor 201 is controlled and executed. It looks like this. Further, when all the sequences are completed and the transport operation instructed by the transport instruction is completed, the cassette management means 32 is notified of the end of transport. If an error occurs in the cassette loading robot 2 during the transport operation, the cassette management means 32 is notified of the occurrence of the abnormality.

The robot-to-robot communication means 36 is adapted to send and receive control information to and from the robot controller 21 via the communication line 40.

The processing history storage means 37 is adapted to store information on processing performed on the cassette 100.

FIG. 3 is a flow chart showing an outline of the automatic cassette loading process according to this embodiment. The operation of the automatic loading process will be briefly described below with reference to FIGS.

First, schedule information corresponding to a cassette to be processed by the manufacturing apparatus 200 is transmitted in advance from the process schedule management computer 300 to the cassette management means 32 via the communication means 31. Various types of schedule information can be considered, but typical examples include the loft name of the wafer stored in the cassette 1, the scheduled start time of processing, and the name of the person in charge of processing. The cassette management means 32 performs a logical check on the contents of the sent schedule information, ie, checks whether there are any duplications in loft names, duplications in scheduled processing start times, etc.

As a result, if there is no logical error in the schedule information, this schedule information is accepted and written into the lot information management table. On the other hand, if there is a logical error in the schedule information, this schedule information will not be accepted, and as soon as the process schedule management computer 300 is notified of the error in the schedule information, the process schedule management computer 300 will notify the person in charge of process management. Please notify us of the content of the above error. The person in charge who recognizes this modifies the schedule data (step 5tO).

Next, the cassette management means 32 determines in which stage the cassette 100 with the loft name specified by the sent schedule is to be placed, based on the stage information in the stage information management table, and sets the stage to a reserved state. (Step S11).

On the other hand, the cassette status display means 33 displays a plurality of stages 1
The display device 38 displays the status of the cassette 100 based on the schedule information stored in the cassette management means 32.
to be displayed. For example, for each of the multiple stages 1, "vacant J"reserved","processing","processing completed 1
etc. will be displayed. In addition, for reservation, processing, and completed processing, the lot name, time when the status changed, and person in charge are also displayed.

The cassette input/output instruction means 34 inquires of the cassette management means 32 and obtains schedule information to be instructed to the operator by the cassette management means 32.

Then, the obtained schedule information, that is, the lot name of the next cassette 1.00 to be loaded and the stage number of the stage (2) to be set, are displayed on the display device 38 to instruct the operator. The operator inserts the cassette 1.00 in accordance with the instructions displayed on the display device 38. After completing this loading work, the user presses the three predetermined keys on the human-powered device to notify the completion of the loading work. The fact that the above-mentioned predetermined key has been pressed is notified to the cassette input/output instruction means 34 which is executing the process of inserting the cassette lOO. As a result, the cassette input/output instruction means 34 determines that the instructed inputting operation of the cassette lOO has been performed.A detection sensor (not shown) for detecting the presence or absence of a cassette is installed at the 9th stage l, and the above-mentioned When the key is pressed manually, this detection sensor detects whether or not the cassette 100 is placed, and notifies the cassette input/output instruction means 34.

If the cassette input/output instruction means 34 is notified that the cassette LOO is not correctly placed at the designated t: stage number, the cassette input/output instruction means 34 displays a warning message on the display device 38 and , does not recognize that cassette 1.00 has been placed on stage 1 and suspends the loading process (step S] 2).

When the processing start time by the manufacturing apparatus 200 arrives, the cassette I
- The management means 32 is a process schedule, 1-rule management computer 30
0 through the communication line 50 and the communication means 31-. This loading command specifies the name 071~ of the cassette 100, and the cassette management means 32 checks whether there is a cassette with the specified loft name and whether there is any duplication of processing. As a result of this check, if there is a logical contradiction, the loading operation is executed (step 7), and the communication means 31 notifies the process schedule management computer 300 that it is an erroneous command.

The loading operation of the cassette 100 with the specified lot name into the cassette rotor 201 is controlled by the robot control management means 35. The robot control management means 35 checks the presence or absence of a cassette 100 to be loaded and the presence or absence of a cassette on the cassette rotor 201, and if it determines that the operation is possible, sends a control command to the robot controller 2L via the communication line 40. , receives a notification of the end of the operation from the robot controller 21, and controls the operation of the cassette loading robot 2. As a result, the cassette loading robot 2
The specified cassette 100 is gripped from the stage 1, moved to the position of the cassette rotor 201, and the cassette 100 is released from the grip on the cassette rotor 201, thereby loading the cassette I00 (step S13〉.

Processing of the wafers in the loaded cassette lOO is performed by the manufacturing device 2.
After finishing with 00, the process schedule management calculator 300
sends a collection command specifying the lot name of the cassette lOO to the management control device 3. As a result, the cassette 100 is recovered using the same procedure as when loading the cassette (step 514).

If there are any remaining cassettes 100 waiting to be loaded, the same operation is repeated from step 313, and if there is no reservation, the process advances to step S16 (step 515).

After the processing in the manufacturing apparatus 200 is completed, the cassette t00 returned to the stage ↓ is displayed on the display device 38 by the cassette management means 32 and the cassette status display means 33 to indicate that the processing has been completed. The operator sees this display and takes out the processed cassette 100 from the stage.The procedure for taking out is the same as that for inserting cassette 00, and is carried out according to instructions from the cassette input/output instruction means 34.

That is, it specifies the loft name of cassette 00 and the stage number of stage 1 to be unloaded, and checks whether cassette lOO has been taken out from the stage with the designated stage number.

This check is performed by the detection sensor that detects the presence of the cassette 100 detecting the absence of the cassette 100 on stage (2) and notifying the cassette input/output instruction means 34 (step 816), as described in step SL2. ).

The processing history storage means 37 stores the above-mentioned processing history, that is,
Information such as the state of the cassette lOO, the time at which the state changed, and the name of the person in charge of processing are stored in accordance with instructions from the cassette management means 32. Therefore, even if something goes wrong,
By looking at the information stored in the processing history storage means 37, it is possible to quickly restore the state before the abnormality occurred (step S]-7).

Next, detailed operations in each step of the above-mentioned FIG. 3 will be explained with reference to FIGS. 4(a) to 4(g).

(a) Reception of schedule information FIG. 4(a) is a detailed flowchart of step S10 in FIG.

The cassette management means 32 performs process management calculation @
When schedule information is received from 300, the cheater format is first checked (step 5IO1,
), if a format error is detected, notify the process schedule management computer 300 of the occurrence of a format error (Step 5102), if no data format error is detected, read the contents of the lot information management table and perform the above-mentioned reception. Stella 7S103) to check if there are any duplications by referring to the scheduled schedule information.

If there is a duplication in the schedule information, the process schedule management computer 300 is notified that there is a duplication of lots (Suge Tsubu 5104), and if there is no duplication in the schedule information, the received schedule information is stored in the loft information management table. Write (step 5105).

(b) Stage Allocation and Reservation FIG. 4(b) is a detailed flowchart 1 of step Sll in FIG.

When the schedule information is newly written to the lot information management table by the above-described operation, the cassette management means 32 reads the contents of the stage management table and inquires whether there is an empty stage (step 5ill). If so, the lots are allocated in ascending order of stage numbers (step 5l12), and if there is no empty stage, the process returns to step 5lit. Then, when the lot allocation is complete, change the status item in the stage management table to ``reserving'' and change the status item in the loft information management table from ``vacant'' to ``waiting for input.'' 5113) Check whether reservations for all lofts have been completed or not, and repeat steps 5ltl to 5113 described above until the reservations are completed (step 5L14).

(C) Inserting the cassette, instructing the operator, and checking Fig. 4 (
C) is a detailed flowchart of Stella 7S12 in FIG. 3.

The cassette input/output instruction means 34 is connected to the cassette management means 32.
Step 5: Read the schedule information from the lot information management table and check whether there is a lot waiting for input.
121), if there is a loft waiting to be loaded, the cassette input/output instruction means 34 displays the lot name and reservation stage number on the display device 38 to instruct loading. Displays on the display device 38 that there is no required cassette (step 5L23). When the input confirmation key is input manually, the detection sensor of the relevant stage detects the cassette and checks whether it is in the on state or not (step 5126>
, if the detection sensor is on, the cassette management means 32
Notify the completion of input. As a result, the cassette management means 32 changes the state item of the lot information management table corresponding to the stage from "waiting for input" to "waiting for processing".
Step 31.27).

On the other hand, if the detection sensor is not on, a warning to the effect that no cassettes/cassettes are placed on the relevant stage is displayed on the display device 38, and the process returns to step 5124 (step 12).
5).

((i) Loading the cassette into the cassette rotor (Figure 4)
d> is a detailed flowchart of step 313 in FIG.

When it is time for the manufacturing apparatus 200 to start processing, the process schedule management computer 300 transmits a cassette loading command specifying the port number to the cassette management means 32 via the communication line.

The cassette management means 32 reads data from the lot information management table and checks whether the lot designated by this loading command is waiting for processing (step 5131>).
If the specified lot is waiting for processing, the stage number where the lot is placed is read from the lot information management table (step 5132), and if the specified lot is not waiting for processing, process schedule management calculation R300 is executed. Sends a loading failure notification to (step 5L33)
).

(Step 5t34) When the cassette management means 32 receives the notification of completion of the transport operation sent from the robot control management means 35, it sends a transport instruction specifying the stage number to the robot control management means 35. The status item is changed to "Processing" and the process schedule management calculation F1300 is notified of the completion of loading (Stella 7''5135.5136).

(e) Recovery of cassettes from the cassette rotor Figure 4 (e)
) is a detailed flowchart of step S1.1 in FIG.

When the processing of the wafers by the manufacturing apparatus 200 is completed, the process schedule management computer 300 transmits a cassette collection command specifying a lot number to the cassette management means 32 via the four-wire communication line.

The cassette management means 32 reads data from the lot information management table to determine whether the lot designated by this collection command is being processed or not (step 5L41).
, If the specified lot is being processed, the stage number to which the lot should be returned is read from the loft information management table (step SL4.2>; if the specified lot is not being processed, the process schedule management computer 30
0 (step 5143).

Then, a transport instruction specifying the stage number is sent to the robot control management means 35 (step 5I44).
.

When the cassette management means 32 receives the notification of completion of the transport operation sent from the robot control management means 35, the cassette management means 32 changes the status item of the loft information management table from "waiting for processing" to "end of processing", and at the same time changes the status item of the loft information management table from "waiting for processing" to "finished processing", and also performs process schedule management. Notify computer 300 of completion of collection←Step 5145.
5146).

(``) Removal of cassettes, instructions to workers, confirmation 4th
Figure (f) is a detailed flowchart of step S16 in Figure 3.

In step S15 of FIG. 3, if there are no cassettes waiting to be processed and the processing of all cassettes has been completed, the cassette input/output instruction means 34 selects to take out the cassette, instruct the operator to force it, and confirm.

The cassette input/output instruction means 34 is connected to the cassette management means 32.
Inquire whether there are any lots that have been processed. The cassette management means 32 checks the status item of the lot information management table and answers whether or not there is a lot that has been processed.
Q&A 1 is notified to the cassette input/output instruction means 34 of the lot name of the processed lot and the stage number of the stage where the cassette of that lot is placed (step 5161
).

If there is a lot that has been processed, the cassette input/output instruction means 34 inputs the received loft name 3 from the cassette management means 32.
and the stage number are displayed on the display device 38 to instruct the operator to remove the cassette (step 5162). The operator takes out the cassette according to the instructions displayed on the display device 38.

On the other hand, if there is no lot that has been processed, the cassette input/output instruction means 34 displays on the display device 38 that there are no cassettes to be ejected (step 316B). It is checked whether or not (step 5164). When the key to confirm ejection is performed manually, the cassette input/output instruction means 34
checks whether the detection sensor of the stage detects that the cassette is missing and is in the OFF state (step 5165), and if the detection sensor is OFF, instructs the cassette management means 32 to complete ejection. If the detection sensor is not turned off (step 5167), a warning to the effect that a cassette is placed on the stage is displayed on the display device 38, and the process returns to step 5164 (step 166).

(g) Recording of Lot History FIG. 4(g) is a detailed flowchart 1 to step S17 in FIG.

The cassette management means 32 includes a cassette input/output instruction means 34.
When receiving a notification of the completion of loft removal from the controller, the history of the lot, that is, the record of the transition of the processing state, is written in the processing history storage device 37 (step 5171).

Subsequently, the cassette input/output instruction means 34 deletes the information of the loft from the loft information management table, and
The information of the stage from which the cassette of the lot was taken out in the stage management table is changed to "vacant" (steps 5172 and 3173).

In this embodiment, the processing schedule information and the cassette loading command and collection command are transmitted from the process schedule management computer 300. However, as long as the execution can be controlled, the manufacturing equipment control computer 220 can be used as the transmission source. In addition, schedule information is transmitted from the process schedule management computer 300, and cassette loading commands and collection commands are calculated by manufacturing equipment control! Furthermore, in this embodiment, when the operator inputs and unloads the cassette, the input device 3 is used for confirmation.
For example, if you use a device such as a barcode reader that automatically identifies the lot name of the cassette 100, it is possible to confirm the loading and unloading operations of the cassette. Needless to say, it will become.

[Effect of the Invention 1] As explained above, according to the automatic cassette loading device of the present invention, schedule information is received from external means such as a process schedule management computer that manages a process schedule, a manufacturing equipment control management computer, etc. By instructing the operator on the stage at which the cassette and the cassettes 1 to 1 should be inserted based on the information, reliable operating instructions can be given to the operator.

Furthermore, by controlling the drive of the cassette loading robot 1 in accordance with loading commands and collection commands from external means, specified cassettes 1 to 1 can be automatically loaded into and automatically collected from the manufacturing apparatus.

In addition, since the processing history of cassettes is stored, if an abnormality occurs in the cassette loading robot or manufacturing equipment, by checking the processing history, it is possible to restore cassettes 1 to the state before the abnormality occurred. Become.

Therefore, automatic loading and automatic retrieval of cassettes can be performed under extremely reliable control. Furthermore, in semiconductor manufacturing for high-mix, low-volume production,
Low yields caused by operator errors can be improved, and the operating rate of semiconductor manufacturing equipment can be improved and labor can be saved.

[Brief explanation of drawings]

Fig. 1 is a block diagram showing an embodiment of the automatic cassette loading device of the present invention, Fig. 2 is a block diagram showing details of the management control device of the same embodiment, and Fig. 3 is a schematic diagram of the operation of the same embodiment. 4(a) to (9) are flowcharts showing detailed operations of the same embodiment, FIG. 5 is a block diagram of a conventional cassette loading device, and FIG. 6 is a flowchart showing the operation of a conventional cassette loading device. FIG. DESCRIPTION OF SYMBOLS 1... Stage, 2... Cassette loading robot, 21... Robot controller 1-roller, 3... Management control device, 31... Communication means, 32... Cassette management means , 33... Cassette status display means, 34... Cassette input/output instruction means, 35... Robot control management means, 37... Processing history storage means, 100... Cassette, 200... Manufacturing device, 201... - Cassette 1 to loader, 210... Manufacturing equipment control calculator, 300... Process schedule management computer.

Claims (1)

[Scope of Claims] A stage on which a cassette containing wafers or the like is placed; a cassette loading robot that loads the cassette into a cassette rotor of a manufacturing device according to a loading command and a collection command, and retrieves the cassette from the cassette rotor of the manufacturing device;
A cassette automatic loading device having a management control device that controls the transport of a cassette loading robot, the management control device receiving schedule information, loading commands, and collection commands from external means, and also receiving loading commands and collection commands. communication means for transmitting the completion results of the cassette loading operation and retrieval operation performed according to the schedule information to an external means, and displaying on a display device an input instruction for loading the cassette into the stage and an ejection instruction for removing the cassette from the stage according to the schedule information. cassette input/output instruction means for instructing the cassette loading robot; status display means for displaying the processing status of the cassette on the stage in accordance with the schedule information, the loading command, and the retrieval command; An automatic cassette loading device comprising: robot control management means for transmitting data to a controlling robot controller; and processing history storage means for storing processing history performed on cassettes.