JP3349069B2 - Surface inspection equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface inspection apparatus for inspecting a surface of an object to be inspected, for example, a surface defect such as unevenness on a pressed surface when a body panel of an automobile is press-formed.

[0002]

2. Description of the Related Art As a conventional surface inspection apparatus, for example,
There is one disclosed in JP-A-8-5573 and the like.

As shown in FIG. 14, the surface inspection apparatus disclosed in the above publication is a surface which irradiates a planar illumination light to the surface of the work 1 which is located diagonally above one side of the work 1 to be inspected. A light source 2 and an area sensor camera 3 which is located diagonally above the other side of the work 1 and which picks up an image of the surface of the work 1 so as to detect foreign matter and protrusions present on the surface of the work 1. Has become.

Further, as shown in FIG. 15, another surface inspection apparatus disclosed in the publication discloses a linear inspection device which is located diagonally above one side of a work 1 and irradiates the surface of the work 1 with linear illumination light. A light source 4 and a line sensor camera 5 as an image pickup device that is positioned diagonally above the other side of the work 1 and that captures an image of the surface of the work 1 are provided so as to detect minute projections and the like existing on the surface of the work 1. Has become.

In the above two-surface inspection apparatus, the light sources 2 and
4, the angle of incidence α of the illumination light and the angle of reflection β of the reflected light captured by the imaging devices 3 and 5 are both 80 ° or more and 90 °.
The incident angle α and the reflection angle β are substantially the same. Therefore, the captured image 6 captures specularly reflected light, and the foreign matter or defect existing on the surface of the work 1 is used as a shadow, that is,
The image is taken as a dark spot 6b in the bright portion 6a.

[0006]

In the above-described conventional surface inspection apparatus, the incident angle α of the illumination light and the reflection angle β of the reflected light imaged by the imaging device are both 80 ° or more and 90 °. Since the detection method is a value of less than and a regular reflection light (that is, α = β), the unevenness or the protrusion having a relatively gentle inclination angle on the surface of a body panel or the like having a curved surface is to be inspected. And the like, the following problems occur.

That is, when the imaging angle (90 ° -β) is 10
Because of the shallow angle of less than °, when using an area sensor camera, the detection range becomes extremely narrow due to the restriction on the depth of field, and the imaging range becomes extremely large in only one direction, and the resolution becomes large. The image of the defect is distorted,
It becomes difficult to detect with high accuracy.

Further, since the vehicle body panel generally has a shape having a curved surface (radius of curvature R), the optimum incident angle α, ie, the irradiation angle (90 ° −α) and the imaging angle (90 ° −β), as described above. ) Is difficult to maintain on the vehicle body panel surface, and in-line cannot be performed.

The present invention has been achieved in view of the above-mentioned problems of the prior art. It is an object of the present invention to provide a projection and a projection having a gentle inclination angle on a surface of a body panel having a curved surface. It is an object of the present invention to provide a surface inspection apparatus capable of detecting press defects such as in-line and with high accuracy.

[0010]

According to a first aspect of the present invention, there is provided a surface inspection apparatus for irradiating illumination light onto a surface to be inspected of an object to be inspected; Imaging means for forming a light-receiving image based on reflected light of the object, inspection processing means for detecting a defect present on the inspection surface based on the light-receiving image obtained by the imaging means, and outputting detection information thereof; Inspected surface type input means for inputting the type of surface, inspected surface position detecting means for detecting position information in the transport direction of the inspected surface, inspected surface type information obtained by the inspected surface type input means, Inspected surface information specifying means for specifying the curved surface shape and inclination angle information of the inspected surface corresponding to the position information obtained by the inspected surface position detecting means; and the inspection surface obtained by the inspected surface information specifying means. Angle information and said An irradiation angle position control means for controlling an irradiation angle and a height position of the illuminating means based on the position information of the inspection surface obtained by the inspection surface position detection means; and an irradiation angle position control means for obtaining the inspection surface information obtained by the inspection surface information specifying means. A surface inspection apparatus comprising: angle information and imaging angle position control means for controlling an imaging angle and a height position of the imaging means based on position information of the inspection surface obtained by the inspection surface position detection means, The illumination means is controlled by the irradiation angle position control means so that the incident angle of the illumination light irradiated on the surface to be inspected is always constant, and the imaging means is controlled by the imaging angle position control means. , And is configured to receive irregularly reflected light of the illumination light reflected at a reflection angle smaller than the incident angle.

[0011] The surface inspection apparatus according to claim 2 of the present invention comprises:
The illuminating means includes a front illuminating means for illuminating a front part in a transfer direction of the surface to be inspected and a rear illuminating means for illuminating a rear part in the transport direction of the surface to be inspected, and the imaging means is paired with the front illumination means. Front-side imaging means for cooperating and imaging the front surface in the transport direction of the inspected surface based on the reflected light from the inspected surface,
And a rear surface imaging unit that captures an image of the rear surface in the transport direction of the surface to be inspected based on the reflected light from the surface to be inspected in cooperation with the rear surface irradiating unit. On the basis of the obtained position information of the inspected surface and the angle information of the inspected surface obtained by the inspected surface information specifying unit, a pair of the front illumination unit and the front imaging unit and a pair of the rear illumination unit and the front imaging unit And a switching unit for switching between front and rear illumination imaging.

A surface inspection apparatus according to a third aspect of the present invention comprises:
Illuminating means for illuminating the inspected surface of the inspected object with illumination light,
Imaging means for forming a light-receiving image based on reflected light from the surface to be inspected while imaging the surface to be inspected, and detecting and detecting a defect present on the surface to be inspected based on the light-receiving image obtained by the imaging means Inspection processing means for outputting information; inspection surface type input means for inputting the type of inspection surface; inspection surface position detection means for detecting positional information of the inspection surface in the transport direction; Inspected surface information identifying means for identifying curved surface shape and inclination information of the inspected surface corresponding to the inspected surface type information obtained by the input means and the positional information obtained by the inspected surface position detecting means; Inspection surface angle position for controlling the inclination angle and height position of the inspection surface based on the angle information of the inspection surface obtained by the surface information specifying means and the position information of the inspection surface obtained by the inspection surface position detecting means. The inspection surface is controlled by the inspection surface angle position control unit such that the illumination angle and the imaging angle of the illumination unit and the imaging unit are always constant. It has a configuration.

A surface inspection apparatus according to a fourth aspect of the present invention comprises:
Illuminating means for illuminating the inspected surface of the inspected object with illumination light,
Imaging means for forming a light-receiving image based on reflected light from the surface to be inspected while imaging the surface to be inspected, and detecting and detecting a defect present on the surface to be inspected based on the light-receiving image obtained by the imaging means Inspection processing means for outputting information; inspected surface type inputting means for inputting the type of inspected surface; inspected object installation angle inputting means for inputting an installation inclination angle at the time of transporting the inspected object; Inspected surface position detecting means for detecting positional information in the transport direction; inspected surface type information obtained by the inspected surface type inputting means; angle information obtained by the inspected object installation angle inputting means; Inspected surface information identifying means for identifying curved surface shape and inclination angle information of the inspected surface corresponding to the position information obtained by the surface position detecting means; and angular information of the inspected surface obtained by the inspected surface information identifying means. An irradiation angle position control means for controlling an irradiation angle and a height position of the illuminating means based on position information of the inspection surface obtained by the inspection surface position detection means; A surface inspection apparatus comprising: an imaging angle position control unit that controls an imaging angle and a height position of the imaging unit based on inspection surface angle information and position information of the inspection surface obtained by the inspection surface position detection unit. The illumination means is controlled by the irradiation angle position control means so that the incident angle of the illumination light applied to the surface to be inspected is always constant, and the imaging means is controlled by the imaging angle position control means. It is configured to be controlled so as to receive irregularly reflected light of the illumination light reflected from the surface to be inspected at a reflection angle smaller than the incident angle.

[0014]

[0015]

[0016]

[0017]

[0018]

According to the surface inspection apparatus of the first aspect of the present invention, the angle of incidence α of the illumination light on the surface to be inspected by the illumination means is, for example, in the range of 80 ° or more and less than 90 °, that is, the irradiation angle ( 90 [deg.]-[Alpha]) can always be controlled to be a fixed angle of 10 [deg.] Or less, which is almost right beside, and the reflection angle [beta] of the reflected light received by the imaging means is smaller than the incident angle [alpha], for example. In the range of 75 ° to 75 °, that is, the imaging angle (90 ° -β)
It can be controlled to be an intermediate angle in the range of 15 ° to 40 ° which is larger than α).

Thus, when inspecting an object to be inspected transferred at a predetermined speed, for example, the surface of a car body panel in-line, the car body panel is transferred without stopping the line, and gently irregularities and projections on the surface are obtained. And the like can be reliably and continuously inspected with high accuracy.

According to the surface inspection apparatus of the second aspect of the present invention, the surface to be inspected of the object to be inspected has a top portion in the middle region thereof, like a general body panel, and is directed toward both front and rear ends. In the case of a convex curved surface having a downward slope, the position information of the inspected surface obtained by the inspected surface position detecting means and the angle of the inspected surface obtained by the inspected surface information specifying means Based on the information, the surface inspection can be performed by switching between the pair of the front illumination unit and the front imaging unit and the pair of the rear illumination unit and the front imaging unit.

Thus, the irradiation angle (90 ° -α) and the imaging angle (90 ° -β) with respect to the surface to be inspected can be set in the desired ranges as described above, and the gradual change in the surface to be inspected such as a vehicle body panel can be achieved. Defects such as irregularities and protrusions can be detected with high accuracy and reliability over the entire surface to be inspected.

According to the surface inspection apparatus of the third aspect of the present invention, the irradiation angle (90 ° −α) and the imaging angle (90 °) with respect to the inspection surface are adjusted by adjusting the inclination angle of the inspection surface.
° -β) can be set in the desired range as described above, and it is possible to detect loose irregularities, protrusions, and other defects on the surface to be inspected, such as a vehicle body panel, with high accuracy and reliability.

According to the surface inspection apparatus of the fourth aspect of the present invention, the mounting surface of the object to be inspected, for example, a belt conveyor for transferring the vehicle body panel, that is, the installation reference surface of the vehicle body panel is inclined. In this case, the vehicle body panel mounted on the belt conveyor is also transported in an inclined state, but by inputting the inclination angle by the inspection object installation angle input means, the inclination angle is corrected, The irradiation angle (90 ° −α) and the imaging angle (90
° -β) can be set in the desired range as described above.

This makes it possible to accurately and reliably detect defects such as gently unevenness and projections on the surface to be inspected, such as a vehicle body panel.

[0025]

[0026]

Embodiments of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 is a block diagram showing an embodiment of a surface inspection apparatus according to the present invention, and shows a case in which a defect inspection on a body panel surface of a press-formed automobile is taken as an example. As shown in FIG. 1, in this surface inspection apparatus, a linear light source 11 as front illumination means for irradiating illumination light to a front portion of a vehicle body panel 10 as an object to be inspected in a transfer direction (L), and the linear light source A CCD camera 12 as a front-side imaging means for receiving the reflected light of the illumination light by 11 and forming a received image, and a transfer direction (L) of the vehicle body panel 10
A linear light source 13 as a rear illumination unit for irradiating the rear surface with illumination light, and a CCD as a rear imaging unit for receiving a reflected light of the illumination light from the linear light source 13 and forming a received image.
A camera 14 and a panel position detection sensor 15 as position detection means for detecting the position of the surface to be inspected, that is, the body panel 10 in the transport direction (L) when the panel is transported by a belt conveyor (not shown) or the like. Is provided as a basic structure.

Here, the linear light sources 11 and 13 are respectively disposed obliquely above one side of the vehicle body panel 10 so that the incident angle α of the illuminating light to be applied to the panel surface is 80 ° or more and less than 90 °. , Ie, the irradiation angle (9
0 ° -α) is less than 10 °. The CCD cameras 12 and 14 cooperate with the linear light sources 11 and 13 in pairs, respectively.
The body panel 10 is disposed obliquely above the other side with respect to the one side, and is smaller than the incident angle α by 50 ° to 75 °.
To receive the irregularly reflected light reflected at the reflection angle β in the range of °, that is, the imaging angle (90 ° -β) is 15 ° to
It is oriented to have an intermediate angle in the range of 40 °.

The linear light sources 11, 13 and the CCD
The cameras 12 and 14 are provided with adjusting mechanisms (not shown) for adjusting the height position and irradiation angle of the irradiation starting point, the height position of the light receiving point and the imaging angle, respectively.
For the panel surface where the inclination angle changes with the transfer of
It is possible to adjust so that the predetermined irradiation angle and the imaging angle in the above-described range are always maintained.

By directing the linear light sources 11 and 13 and the CCD cameras 12 and 14 within the range of the irradiation angle (90 ° -α) and the imaging angle (90 ° -β) as described above, a low-angle Among the reflected light that irradiates the light with high reflectance, among the reflected light that has a high reflectance, the irregular reflection light due to defects such as gentle irregularities and protrusions that are reflected at a smaller reflection angle than the regular reflection light due to the scattering surface other than the defect has high brightness Can be caught.

To explain the principle, as shown in FIG. 2, first, the linear light sources 11 and 13 irradiate the surface of the vehicle body panel 10 with illumination light at an incident angle α. And
Irradiation light applied to the non-defective scattering surface has a reflection angle α
(= Incident angle), and the illumination light applied to the convex defect 10a having the inclination angle θ is reflected light β (= α−
θ).

At this time, since the irradiation angle (90 ° -α) of the linear light sources 11 and 13 is a shallow angle of 10 ° or less with respect to the panel surface, it is high due to a scene phenomenon in which the directivity of the reflected light distribution increases. The reflectance is obtained. This allows
The reflected light distribution at the reflection angle α due to the scattering surface other than the defective portion and the reflected light distribution at the reflection angle β (= α−θ) due to the defective portion can be clearly distinguished.

Here, as shown in FIG. 3, if the irradiation angle (90 ° −α) of the illuminating light is 10 ° or less, an image of the defective portion can be obtained with high brightness as shown in FIG. become,
This tendency becomes more conspicuous as the irradiation angle is smaller, as shown in FIG.

The sensitivity at the time of imaging by the CCD cameras 12 and 14 is highest when the imaging angle is an angle at which diffusely reflected light having a reflection angle β (= α−θ) is captured, that is, 90 ° −β. However, the reflected light has an angular distribution, and the regular reflection angle α
And the irregular reflection angle β, the imaging angle θc is preferably an angle that is as far as possible from the regular reflection light reflection angle α and as close as possible to the irregular reflection light reflection angle β (= α−θ). For example, as shown in FIG. 5, by setting the imaging angle θc in a range of 15 ° to 40 °, a defect or the like can be captured with high luminance.

Since the CCD cameras 12 and 14 are installed at an angle with respect to the surface to be inspected of the vehicle body panel 10, the depth of field is shallow and images at the front and rear ends may be blurred. In this case, the illuminance of the linear light sources 11 and 13 is increased to irradiate strongly, while the apertures of the CCD cameras 12 and 14 are narrowed to increase the depth of field as much as possible, so that the inclination angle θ is gentle and the height is small. Is very low, it is possible to capture only this defective part as a high luminance part.

Further, in the above surface inspection apparatus, as shown in FIG. 1, a panel type input means 16 as an inspected surface type input means for inputting the type of the vehicle body panel 10.
Based on the position information of the vehicle body panel 10 obtained by the panel position detection sensor 15 and the panel type information input to the panel type input means 16, based on the information of the body panel 10 to be inspected at a position corresponding to the information. The panel surface information specifying means 17 as the inspection surface information specifying means for specifying the curved surface shape and the inclination angle information, and the panel surface angle information obtained by the panel surface information specifying means 17 and the panel position detection sensor 15 are used. Irradiation angle position control means for controlling the irradiation angles and height positions of the linear light sources 11 and 13 based on the position information of the vehicle body panel 10, and imaging angle position control for controlling the imaging angles and height positions of the CCD cameras 12 and 14. And an irradiation / imaging angle position control means 18 serving as a means.

Each adjusting mechanism (not shown) is controlled based on a control signal output from the irradiation / imaging angle position control means 18 so that the linear light sources 11, 13 with respect to the surface to be inspected of the vehicle body panel 10 are controlled. In addition, the irradiation angles and the imaging angles of the CCD cameras 12 and 14 are controlled so as to always have predetermined values.

Further, based on the position information in the moving direction (L) of the vehicle body panel 10 obtained by the panel position detecting sensor 15 and the panel surface angle information obtained by the panel surface information specifying means 17, the front part of the vehicle body panel 10 is provided. A front and rear illumination imaging switching unit 19 for switching between a pair of a linear light source 11 and a CCD camera 12 for illuminating and imaging the image and a pair of a linear light source 13 and a CCD camera 14 for illuminating and imaging the rear surface of the vehicle body panel 10. Have.

That is, based on the output signal of the front / back illumination imaging switching means 19, the illumination power switch 20 and the image input switch 21 are operated near the boundary of the inspectable range, and the linear light source 11 and the CCD camera are turned on. A light reception image of the front surface of the vehicle body panel 10 is obtained by the reference numeral 12, and a light reception image of the rear surface of the vehicle body panel 10 is obtained by the linear light source 13 and the CCD camera 14.

The captured light-receiving image is subjected to edge extraction processing (step S ₂ ), binarization processing (step S ₃ ), and defect extraction processing (step S ₄ ) as shown in FIG. ) Is performed and output by display means 23 such as a display.

The host computer 24 plays the role of the panel surface information specifying means 17, the irradiation / imaging angle position control means 18, and the front / rear illumination / imaging switching means 19, and the image input changeover switch 21, Inspection processing means 2 for detecting a defect present on the surface to be inspected based on the received light image obtained by the imaging means by processing means 22 and display means 23 and outputting the detection information.
5 are configured.

In the surface inspection apparatus having the above configuration,
When controlling the irradiation angles and the imaging angles of the linear light sources 11 and 13 and the CCD cameras 12 and 14, the position of the vehicle body panel 10 transferred in the direction of arrow L by a belt conveyor (not shown) or the like is first determined. The position is detected by the position detection sensor 15, and subsequently, based on the panel type information input in advance by the panel type input means 16 and the position information, the host computer 24 traces the panel surface sequentially from the front end.
Calculates the irradiation angle, imaging angle, etc. corresponding to each position, and sends a control signal to the adjusting mechanism to determine the irradiation angle and height of the linear light sources 11, 13 and the imaging angle and height of the CCD cameras 12, 14. Control is performed for each position on the panel.

More specifically, as shown in FIG. 7, the imaging angle θc, the imaging height ΔZ ₂ and the irradiation angle θs, the irradiation height ΔZ
_In each of the methods, control is performed by switching stepwise in a pulsed manner.
In order to adopt such a control method, the irradiation angles and imaging angles of the linear light sources 11 and 13 and the CCD cameras 12 and 14 are as follows.
This is because both have a width (margin) at an angle that can be inspected, so that it is only necessary to control so as not to deviate to an angle at which inspection is not possible. This is because it is necessary to control the linear light source to irradiate the surface to be inspected in accordance with the height that changes depending on the curved surface of the vehicle body panel 10. If the angles θc and θs and the heights △ Z ₂ and △ Z ₁ are controlled linearly along the surface of the vehicle body panel 10, more optimal inspection can be performed.

Further, in the surface inspection apparatus having the above-described structure, a method of switching between illumination and imaging at the front and rear portions of the vehicle body panel 10 having a convex shape is described with reference to FIG.
As shown in FIG. 1A, the linear light source 11 and the CCD camera 12 illuminate and image the front surface of the vehicle body panel 10. Then, when the vehicle body panel 10 is transported in the direction of the arrow L, when the panel surface reaches the vicinity of the vertex where the inclination direction of the panel surface is reversed, the front and rear illumination and imaging are switched, as shown in FIG. As described above, the linear light source 13 and the CC
The rear surface of the vehicle body panel 10 is illuminated and imaged by the D camera 14.

As a result, while the body panel 10 is being transferred, gradual unevenness over the entire surface of the body panel 10 can be achieved.
Defects such as projections can be detected with high accuracy and reliability.

In the above embodiment, the linear light sources 11, 1
3 and two pairs of CCD cameras 12 and 14 are shown.
In the case of a vehicle body panel having such an inclination angle that the irradiation angle θs can be set to 10 ° or less by two lighting means, FIG.
As shown in (1), the entire area of the vehicle body panel 10 'can be inspected by one linear light source 11 and one CCD camera 12.

As the surface inspection apparatus in this case, the above 1
In addition to the pair of linear light sources 11 and the CCD camera 12, a panel position detection sensor 15, a panel type input unit 16, a panel surface information specifying unit 17, an irradiation / imaging angle position control unit 18,
What is necessary is just to include the image processing means 22, the display means 23, the illumination power supply 26 and the like, and the switching means 19 and the like as described above become unnecessary.

In the surface inspection apparatus having the above configuration,
The host computer 27 operates the panel surface information specifying unit 17.
And an irradiation / imaging angle position control means 18 and the like, and an image processing means 22, a display means 23 and the like constitute an inspection processing means 28.

FIG. 10 is a block diagram showing another embodiment of the surface inspection apparatus according to the present invention. As shown in FIG. 10, a surface inspection apparatus according to this embodiment includes a linear light source 11 'fixed at a predetermined height position and a predetermined irradiation angle diagonally above one side of a vehicle body panel 10, and a vehicle body panel. A CCD camera 12 'fixed at a predetermined height and at a predetermined imaging angle diagonally above the other side of 10, a belt conveyor (not shown)
A panel position detecting sensor 15 for detecting the position of the vehicle body panel 10 transferred in the transfer direction (L), an illumination power supply 26, a vehicle body panel 10 provided on a belt conveyor to support the body panel 10 and to support the body panel. 1
Height adjusting mechanism 30 for adjusting the height of the vehicle body panel 1
Panel type input means 16 for inputting the type 0, and the vehicle body panel 10 inspection based on the position information of the vehicle body panel 10 obtained by the panel position detection sensor 15 and the panel type information inputted to the panel type input means 16. Panel surface information specifying means 17 for specifying the curved surface shape and inclination angle information of the portion, and the angle information of the inspection portion obtained by the panel surface information specifying means 17 and the panel position detection sensor 1
And panel angle position control means 29 for controlling the inclination angle and height position of the inspection surface of the vehicle body panel 10 based on the position information obtained by the control unit 5. Each height adjusting mechanism 30 is controlled by an output signal of the control means 29 so that the inclination angle or the like of the inspection surface of the vehicle body panel 10 becomes a predetermined value.

The received light image obtained by the CCD camera 12 is processed by the image processing means 22 as shown in FIG.

As the panel information specifying means 17 and the panel angle position control means 29, a host computer 31 plays the role thereof, and the image processing means 22 and the display means 23 constitute an inspection processing means 28. ing.

In the surface inspection apparatus having the above configuration,
When controlling the inclination angle and the height position of the inspected surface with respect to the predetermined reference surface, first, the vehicle body panel 10 transferred in the arrow L direction by a belt conveyor (not shown) or the like.
Is detected by the panel position detection sensor 15, and subsequently, based on the panel type information previously input by the panel type input means 16 and the position information, the host computer 31 traces the panel surface sequentially from the front end. An inclination angle of the vehicle body panel 10 with respect to a predetermined reference plane, for example, a horizontal plane is calculated, and a control signal is sent to the height adjustment mechanism 30 to control the inspection portion on the vehicle body panel 10 to be always horizontal, for example.

More specifically, as shown in FIG. 11, the angle of the vehicle body panel 10 with respect to the horizontal plane is controlled by switching stepwise in a pulsed manner. Such a control method is performed because the irradiation angle and the imaging angle of the linear light source 11 ′ and the CCD camera 12 ′ each have a width (margin) within an inspectable angle, and therefore, the angle at which the inspection becomes impossible. This is because the control may be performed so as not to deviate from the above. The body panel 1
If the control is performed linearly along the curved surface of 0, more optimal inspection can be performed.

As a method of changing the angle and height of the vehicle body panel 10 by the height adjusting mechanism 30, there is a method of fixing one of the front and rear height adjusting mechanisms 30 and controlling the driving of the other, or , And a method of separately controlling the driving of the front and rear height adjusting mechanisms 30. Further, a method is employed in which rollers and the like are provided separately from the belt conveyor along the curved surface on the back side of the body panel 10 and the body panel 10 is transferred along the rollers and the like, and the inspection portion is always kept horizontal. You can also.

FIGS. 12 and 13 are a configuration diagram and a partially enlarged view showing still another embodiment of the surface inspection apparatus according to the present invention. The surface inspection apparatus according to this embodiment is used for inspection when a reference surface of a belt conveyor or the like for transferring a vehicle body panel 10 is inclined, and is different from the surface inspection apparatus shown in FIG. A panel installation reference angle input means 32 as an inspection object installation angle input means for inputting an installation inclination angle when the panel 10 is transferred, that is, an angle θb at which the reference plane of the belt conveyor 40 is inclined with respect to a predetermined reference plane, for example, a horizontal plane. The panel surface information specifying unit 17 is provided with the panel type information input to the panel type input unit 16, the position information obtained by the panel position detection sensor 15, and the panel type reference angle input unit 32. Based on the inclination angle information of the belt conveyor reference plane, the curved surface shape and the inclination angle information of the inspection portion at the position corresponding to these information It is adapted to the specific.

Then, based on the panel surface angle information obtained by the panel surface information specifying means 17 and the position information obtained by the panel position detection sensor 15, each adjustment is made while correcting the inclination angle of the belt conveyor reference surface. The mechanism is controlled and the linear light sources 11, 13 and CC
The angles and height positions of the D cameras 12 and 14 are controlled so as to always have predetermined values.

According to the above configuration, even when the reference surface (mounting surface) of the belt conveyor 40 for transferring the vehicle body panel 10 is inclined, the surface of the vehicle body panel 10 may have gentle irregularities, protrusions and the like. Defects can be accurately and reliably detected.

The linear light sources 11, 1 according to the embodiment described above.
1 'and 13 are, for example, a halogen lamp, a strong metal halide, or a more powerful xenon metal halide, which is used to guide the light to the lens directly or through an optical fiber or the like, and to condense the light linearly. Can be. Further, the imaging means is not limited to a CCD camera, and various other imaging devices can be used.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram showing one embodiment of a surface inspection apparatus according to the present invention.

FIG. 2 is a diagram for explaining the principle of the surface inspection apparatus according to the present invention.

FIG. 3 is a graph showing a relationship between an irradiation angle of illumination light by an illumination unit and luminance of a received image.

FIG. 4 is a diagram showing a received light image obtained by the surface inspection apparatus according to the present invention.

FIG. 5 is a graph showing the relationship between the imaging angle of the imaging means and the brightness of a received light image.

FIG. 6 is a flowchart illustrating a process performed by an inspection processing unit according to the present invention.

FIG. 7 is a diagram illustrating a control example of the angle and the height position of the illumination unit and the imaging unit.

8A and 8B are diagrams illustrating a state in which a surface to be inspected is illuminated and imaged by an illumination unit and an imaging unit, and FIG. 8A is a state in which a front surface of the surface to be inspected is illuminated and imaged; 2 shows a state in which the rear surface portion is irradiated and imaged.

FIG. 9 is a schematic configuration diagram showing another embodiment of the surface inspection apparatus according to the present invention.

FIG. 10 is a schematic configuration diagram showing still another embodiment of the surface inspection apparatus according to the present invention.

11 is a diagram showing a control example of the inclination angle and the height of the surface to be inspected in the surface inspection device shown in FIG.

FIG. 12 is a schematic configuration diagram showing still another embodiment of the surface inspection apparatus according to the present invention.

13 is a partially enlarged view of the surface inspection device shown in FIG.

FIG. 14 is a diagram illustrating the principle of irradiation and imaging in a conventional surface inspection apparatus.

FIG. 15 is a diagram illustrating the principle of irradiation and imaging in a conventional surface inspection apparatus.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 Body panel (object to be inspected) 11 Linear light source (illuminating means) 12 CCD camera (imaging means) 13 Linear light source (illuminating means) 14 CCD camera (imaging means) 15 Panel position detecting sensor (inspection surface position detecting means) 16 panel type input means (inspection surface type input means) 17 panel surface information identification means (inspection surface information identification means) 18 irradiation / imaging angle position control means 19 front / back illumination imaging switching means 20 illumination power supply switching switch 21 image input Changeover switch 22 Image processing means 23 Display means 24 Host computer 25 Inspection processing means 26 Illumination power supply 27 Host computer 28 Inspection processing means 29 Panel angle position control means (inspected surface angle position control means) 30 Height adjustment mechanism 31 Host computer 32 Panel installation reference angle input means (object to be inspected Reference angle input means) 40 belt conveyor

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-5-346408 (JP, A) JP-A-5-118997 (JP, A) JP-A-8-68760 (JP, A) 288935 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01N 21/84 G01B 11/30

Claims (4)

(57) [Claims] An illumination unit configured to irradiate illumination light on a surface to be inspected of an inspection object; an imaging unit configured to image a surface to be inspected and to form a light receiving image based on light reflected from the surface to be inspected; Inspection processing means for detecting a defect present on the inspection surface based on the received light image obtained by the means and outputting the detection information, and inspection surface type input means for inputting the type of the inspection surface
And a target for detecting positional information of the surface to be inspected in the transport direction.
Inspection surface position detection means and inspection object type input means
Obtained inspection surface type information and inspection surface position detecting means
Surface shape of inspection surface corresponding to position information obtained by
And inspected surface information specifying means for specifying tilt angle information,
The angle of the inspected surface obtained by the inspected surface information specifying means
Information obtained by the inspection surface position detecting means.
The irradiation angle of the illumination means based on the position information of the inspection surface and
Irradiation angle position control means for controlling a height position;
The angle information and the angle of the inspected surface obtained by the
And the inspection surface obtained by the inspection surface position detecting means.
An imaging angle and a height position of the imaging means based on the position information;
And an imaging angle position control means for controlling the illumination angle position control means , wherein the illumination means is controlled by the irradiation angle position control means.
The incident angle of illumination light applied to the inspection surface is always constant
The imaging means is controlled by the imaging angle position control means.
It is controlled to receive the diffuse reflection light of the illumination light reflected at a small reflection angle than the entering-morphism angle from the test surface
That, the surface inspection device, characterized in that. 2. The lighting device according to claim 1, wherein the illumination means is located in front of a surface to be inspected in a transfer direction.
Front illumination means for illuminating the surface part and after the transfer direction of the surface to be inspected
A back surface irradiating unit that irradiates a surface unit, wherein the imaging unit cooperates with the front illuminating unit in a pair.
Direction of the inspection surface based on the reflected light from the inspection surface
Front imaging means for imaging a front part, and the rear irradiation means
Based on the reflected light from the surface to be inspected
There is a rear surface imaging means for imaging the rear surface of the surface to be inspected in the transport direction.
And the position of the inspection surface obtained by the inspection surface position detecting means.
Information obtained by the position information and the inspection surface information specifying means.
Based on the angle information of the test surface, Ta front lighting unit及 beauty front
A pair of imaging means, and a pair of the rear illumination means and the front imaging means.
It has a front and rear illumination imaging switching means for switching between
That, the front surface inspection apparatus according to claim 1, characterized in that. 3. An illumination light is applied to a surface to be inspected of an object to be inspected.
Illuminating means, and an image of the surface to be inspected while reflecting from the surface to be inspected.
Imaging means for forming a received light image based on the emitted light;
On the surface to be inspected based on the received light image obtained by the imaging means
Inspection processing to detect existing defects and output the detected information
Means for inputting the type of the surface to be inspected
And a target for detecting positional information of the surface to be inspected in the transport direction.
Inspection surface position detection means and inspection object type input means
Obtained inspection surface type information and inspection surface position detecting means
Surface shape of inspection surface corresponding to position information obtained by
And inspected surface information specifying means for specifying tilt angle information,
The angle of the inspected surface obtained by the inspected surface information specifying means
Information obtained by the inspection surface position detecting means.
Inclination angle and height of inspection surface based on inspection surface position information
Table comprising inspection surface angle position control means for controlling position
A surface inspection apparatus, wherein the inspected surface is controlled by the inspected surface angular position control means.
The illumination angle and the imaging by the illumination means and the imaging means
Angle is always controlled to be constant, the front surface inspection apparatus characterized by. 4. An illuminating means for irradiating illumination light on a surface to be inspected of an object to be inspected, an imaging means for imaging a surface to be inspected and forming a light receiving image based on reflected light from the surface to be inspected, and inspection processing unit and, inspected surface species inputting means for inputting a type of the test surface to detect defects present on the surface to be inspected and outputs the detected information on the basis of the received-light image obtained by the means, the inspection Inspection to input the installation inclination angle when transferring objects
And object installation angle input means, and the object to be inspected surface position detecting means for detecting position information in the transfer direction of the inspected surface, the surface to be inspected species information obtained by the inspection surface species inputting means, the object
Angle information obtained by the inspection object installation angle input means, and inspection surface information specifying the curved surface shape and inclination angle information of the inspection surface corresponding to the position information obtained by the inspection surface position detection means specifying means,-out based the on position information of the test surface obtained by the angle information and the test surface position detecting means of the inspection surface obtained by the inspected surface information specifying means
Illumination angle that controls the irradiation angle of and the height position of said illuminating means
A degree position置制control means, obtained by the surface to be inspected information identification module
Angle information of the inspected surface to be inspected and the inspected surface position detecting means
Imaging based on positional information of the surface to be inspected obtained by the step
Imaging angle position control for controlling the imaging angle and height position of the means
A surface inspection apparatus and a control means, before Symbol illumination means, by the irradiation angle position control means, the
The incident angle of illumination light applied to the inspection surface is always constant
The imaging means is controlled by the imaging angle position control means.
Reflected from the inspection surface at a reflection angle smaller than the incident angle
The surface inspection apparatus is controlled to receive irregularly reflected light of the illumination light .