JP3331369B2 - Superconducting detector - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a superconducting detector for detecting electromagnetic waves such as radiation, light and X-rays using a superconducting tunnel junction element as a sensor. The present invention relates to a device in which a magnetic field generator for applying an external magnetic field to suppress the Josephson current of the STJ is manufactured on the same chip as the STJ element.

[0002]

2. Description of the Related Art As a conventional superconducting detector of this type, FIG.
The detector shown in (a) is known. Reference numeral 81 denotes an STJ element having a size of several hundred microns which is the heart of a superconducting detector. The material of the superconducting electrode used in the element is reduced to a temperature less than one tenth of the superconducting transition temperature (Tc). A cooling device for cooling is provided. Normally, an STJ element has an insulating film that becomes a tunnel barrier layer of about 1 nm formed on a lower electrode superconducting thin film of several hundred nanometers, and has a thickness similar to that of the lower electrode superconducting thin film. It has a sandwich-type configuration in which the upper electrode superconducting thin film is formed. 82 is ST
The upper electrode superconducting thin film of the J element, 83 is a lower electrode superconducting thin film, 84 is a tunnel barrier insulating layer (body), for example, Al ₂ O
_x insulator layer. Reference numerals 85 and 86 denote bias lines for supplying a bias current I to the STJ element electrode by a constant current source (not shown), and reference numeral 87 denotes a measured voltage V between the upper and lower electrodes. Numeral 88 denotes an electromagnetic wave applied to the upper electrode 82, X
Line. The upper electrode 82 and the lower electrode 83 function as an electromagnetic wave sensor surface of the superconducting detector.

FIG. 9B shows a current-voltage characteristic of a superconducting detector. X-rays as electromagnetic waves are applied to the upper electrode 82 on the sensor surface,
When the lower electrode 83 is not irradiated, the current-voltage characteristic is represented by a line 89 and the voltage between the junction electrodes is V ₀ . When electromagnetic waves are irradiated to the electrode, the superconducting electrons excited quasiparticles occurs, the current-voltage characteristic is varied from line 89 to line 90, the voltage measured between the bonding electrode is reduced from V ₀ to V ₁ . An electromagnetic wave is detected based on the voltage change ΔV = V ₀ −V ₁ .

Since the energy gap of an STJ element is about 1/1000 that of a semiconductor, the statistical fluctuation is known to be several tenths of that of a semiconductor, and the energy resolution is improved accordingly. X-rays with an incident energy of 5.9 KeV have already been applied to the STJ element using niobium superconducting metal.
It has been successfully measured with a sensitivity of 7 eV. This far exceeds the theoretical limit of 120 eV for semiconductor detectors. Accordingly, the SJT element detector is about to be used for ultra-precision measurement such as physical property analysis and medical diagnosis. The semiconductor detector measures at the theoretical limit of sensitivity, but the SJT element detector must still improve the resolution by about an order of magnitude before it can measure at the theoretical limit (4 eV).

[0005]

A problem you try the Invention current-voltage characteristics shown in FIG. 9 (b), by applying a constant bias current, but the bonding electrode voltage V ₀ is described in the characteristics of the conditions occurring in fact Due to the DC Josephson effect, no voltage V is generated between the electrodes even when a bias current I equal to or less than the Josephson current (critical current) Ic flows through the junction (see FIG. 10A). SJ
In order to use the T element as a detector for electromagnetic waves or the like, this Josephson current must be suppressed. Conventionally, in this type of superconducting detector, a large magnetic field generator was installed around the cryostat for cooling the STJ element, and the SJ
It was considered that the Josephson current Ic was suppressed by applying an external magnetic field parallel to the T plane (see FIG. 10B).

The main purpose of this external magnetic field was to suppress the Josephson current of the STJ element. According to our experiments, this magnetic field generates a current step (Fiske Step) due to resonance in the STJ. (See FIG. 11). Therefore, the bias current of the superconducting detector needs to be set to a value that is not affected by this current step. However, it has been confirmed that when the relative position between the external magnetic field and the STJ fluctuates even if it is minute, the current step itself also fluctuates. When the superconducting detector is cooled by the cryostat, a minute vibration is generated in the STJ due to the boiling of the liquid helium and the vibration of the pump, and the current step also fluctuates. This is considered to be a major factor that hinders improvement in energy resolution. Therefore, it was important to stabilize the external magnetic field itself and to stabilize the relative position between the STJ element and the external magnetic field.

[0007] Further, a superconducting quantum interference device (Supe) is used to calculate the quantity measured by the STJ device.
rconducting Quantum Interference Devices, hereafter simply SQUID. ) And Josephson logic gates are greatly affected by the presence of a small external magnetic field (microgauss level), so they operate in the external magnetic field of several hundred gauss necessary for the operation of conventional superconducting detectors. However, it has been difficult to form a separate chip for magnetic shielding.

The present invention provides a superconducting magnetic field generator for generating an external magnetic field applied to a sensor STJ element so that the magnetic field is confined and localized in the sensor STJ element using microfabrication technology. It is an object of the present invention to provide a superconducting detector which can realize an STJ element for a sensor, a superconducting magnetic generator, a Josephson logic element for performing digital processing, and the like on the same chip.

[0009]

According to the present invention, there is provided a superconducting magnetic field generator for generating a magnetic field applied to an STJ element for a sensor using a microfabrication technique. Magnetic coil for sensor
Parallel or Fisukesute the bonding surface to the left and right STJ element
High-resolution detection by suppressing the
Parallel to the joint surface above and below the STJ element for sensors
In this example, a spiral superconducting inductance line and a superconducting ground plane are formed on the same superconducting chip on which STJ elements are integrated.

As the superconducting coil and the inductance wire usable in the present invention, a superconducting metal thin film such as a niobium or lead alloy thin film can be used, and it can be manufactured as a conventional niobium or lead alloy superconducting integrated circuit. Can be.

[0011]

FIG. 1 shows an embodiment of the superconducting detector according to the present invention. FIG. 1B is a view from above, and FIG.
1A is a cross-sectional view taken along the line AA ′ of FIG. 1B, FIG. 1C is a cross-sectional view taken along the line CC ′ of FIG. 1B, and FIG.
It is sectional drawing of the DD 'line of (b). 1 is an STJ element, 2 is a superconducting upper electrode, 3 is a superconducting lower electrode, 4 is a tunnel barrier insulator (layer), 5 and 6 are superconducting bias lines for passing a bias current of a detector, 7 is a chip substrate, 8 is a superconducting coil, 9 is an insulating layer for insulating and protecting the integrated circuit, and 10 is a magnetic field generated by the superconducting coil 6. Superconducting coil 8
Are composed of a lower electrode portion 8a, a contact portion 8b, an upper electrode portion 8c, a contact portion 8d, a lower electrode portion 8e,....

FIG. 7 shows a superconducting coil 8 applied to the present invention.
FIG. 8 is a diagram illustrating the relationship between the production of an STJ element and the production of a superconducting coil. First, a general silicon, quartz, sapphire or other wafer substrate (FIG. 7A) having a diameter of several inches and a thickness of 1 mm or less is superconductive such as lead or niobium by sputtering or vapor deposition on the entire surface of the wafer. A film is formed of metal, and a lower electrode is formed as shown in FIG. The microfabrication of the superconducting thin film is performed by a photolithography technique using the same photoresist as used for manufacturing a semiconductor device. (Hereinafter, the same reference numerals in FIGS. 1 to 8 are the same.)

After forming a photoresist 61 corresponding to the superconducting electrode portion on the lower side of the superconducting coil as shown in FIG. 7 (c), dry etching is performed by a method such as reactive ion etching (62). After removing the superconducting thin film at a certain location, as shown in FIG.
Is completed. An insulating layer 9 of silicon oxide (SiO, SiO ₂ ) or the like is formed thereon by a film forming technique such as vapor deposition or sputtering (FIG. 3E). A minute hole (contact hole 63) is formed by photolithography technology and dry etching technology in a portion for forming an electrical connection with the superconducting lower electrode portion 8a (FIG. 7F). On this, a superconducting thin film is formed in the same manner as the superconducting lower electrode (FIG. (G)).
And a superconducting upper electrode portion 8c and a superconducting contact portion 8 using photolithography and dry etching techniques.
The superconducting coil is completed by forming b and 8d as shown in FIG. The line connecting the superconducting coils is created on the side of the lower electrode of the STJ element in the process of creating the lower electrode (FIG. 8).
(A)). The upper surface may be further covered with an insulating layer to protect the superconducting coil. A ground plane may be provided on the substrate 7 to shield noise and ground the elements.

An example of the fabrication of an STJ element will be briefly described. FIGS. 8A and 8B are views of the step of FIG. 7D and the step of FIG. The superconducting lower electrode 3 and the bias line 6 of the STJ element are produced simultaneously with the lower electrode 8a of the superconducting coil (see FIG. 8A). Adjustment of the relative position between the upper surface of the superconducting lower electrode and the magnetic field of the superconducting coil is performed by polishing the upper surface of the lower electrode of the superconducting coil as necessary. Tunnel barrier insulator (layer)
4. The superconducting upper electrode 2 and the bias line 5 are formed in a step different from the step of forming the superconducting coil 8. Although the upper surfaces of the STJ element and the superconducting coil are exposed, they may be covered with an insulating layer for protection.

Since the superconducting coil 8 faces the STJ and is arranged so that the inner diameter range wraps around the tunnel barrier insulating layer which is the junction surface, the magnetic field of the superconducting coil causes the tunnel barrier insulation of the STJ junction surface due to the Meissner effect. Since the upper electrode and the lower electrode of the superconducting coil are made parallel to the joint surface of the STJ, the magnetic field becomes parallel to the joint surface of the STJ, and the Josephson current is suppressed efficiently. . Specifically, using the case where the Josephson current is several tens mA, 6
The current level of the detection output signal when the keV X-ray signal is detected is about 1 μA. Therefore usually Josephson current ^{10-5 -} it is necessary to suppress to about ^6. The strength of the magnetic field applied to the STJ surface required for this is, for example, 100Φ
_{It is} about ₀ (Φ ₀ is magnetic quantum = 2.07 × 10 ⁻¹⁵ Wb). (See FIG. 9B)

FIG. 1 does not show the current supply of the superconducting coil, but supplies a DC current from an external power source, short-circuits the superconducting coil with a Josephson switch, and cuts off the external power source to thereby superconducting the superconducting coil. Current continues to flow through the coil.

FIG. 2 shows an embodiment of the superconducting detector according to the present invention. The superconducting coil 8 has a toroidal structure and the magnetic field is closed. Therefore, the closed magnetic field is localized in the coil, and the superconducting coil can be formed avoiding the Josephson element and the like that are susceptible to the magnetic field.
The J element can be formed on the same chip.

FIG. 3 shows an embodiment of the superconducting detector according to claim 3. FIG. 3B is a diagram viewed from the upper side, and FIG.
FIG. 3B is a view of a cross section taken along the line AA ′ in FIG. Reference numeral 31 denotes a spiral superconducting inductance wire which is disposed above the STJ element 1 via an insulating layer and is magnetically coupled to the upper electrode 2 and the like, and 32 is disposed above the substrate 5 via the insulating layer. A superconducting ground plane. The spiral-shaped inductance wire 31 is effective if one section of the spiral is arranged on the STJ element so as to be parallel to the upper electrode surface 2 and the surface to which a magnetic field is applied to the STJ element.

When a current is applied to the superconductor, the current is concentrated on the superconductor surface by the Meissner effect. Also, when another superconductor comes close to the superconductor where the current is flowing, the mirror effect is applied to the other superconductor so that the magnetic field induced by the current of the superconductor is canceled. Current flows. The generated magnetic field in the embodiment of FIG. 3 will be schematically described with reference to FIG.

FIG. 4B is a sectional view taken along the line XY in FIG. 4A. When passing a control current I ₁ in the direction of the arrow to the inductance line 31, the Meissner effect and the mirror effect, the current flows concentrated in the lower surface of the inductance line 31. Therefore, the mirror current I ₂ of the current I ₁ and the opposite flow to the top surface of the upper electrode 2 of the STJ. The mirror current is returned becomes current I ₃ to the lower surface of the STJ reversed. Here, the current I ₁ and the current I ₂ is similar effect as that forming the coil to flow against is obtained in opposite directions, resulting from the current I ₁ magnetic field of the upper electrode of the inductance line and STJ trapped in the insulating layer between (1), the magnetic field H ₁ in the backward direction is generated from the front of the drawing.

Similarly, the current I ₃ induces the current I ₄ through the tunnel barrier insulator 4 of the STJ 1, and finally the current I ₆ through the reverse current I ₅ to the superconducting ground plane 32.
Occurs. Due to the currents I ₅ and I ₆ , the magnetic field concentrates on the insulating layer (2) between the lower electrode and the superconducting ground plane 32,
Field of H ₂ backward direction is generated from the front of the drawing. Further, a magnetic field 10 is generated in the tunnel barrier insulator 4 between the upper electrode 2 and the lower electrode 3 from the front to the rear of the drawing by the currents I ₃ and I ₄ .

Due to the currents I _{1 to} I ₆ , the magnetic field is confined within the insulator layers (1) and (2) and the tunnel barrier insulator 4 by the width of the upper electrode 2 and the lower electrode 3 (FIG. 4B). The magnetic field passes through the insulating layer (body) in parallel, and on the entrance and exit sides of the upper electrode and the lower electrode, the magnetic field is pushed upward and almost no horizontal component is present (FIG. 4A).
Is reduced by the Miller effect of the superconducting ground plane 32. As a result, compared to the case without a superconducting ground plane, the inductance line and
Since the magnetic field generated by the inductance line 32 is extremely concentrated near the STJ element, other STJ elements outside the vicinity are not adversely affected.

In the configuration of the embodiment shown in FIGS. 3 and 4, the inductance wire 31 is returned a plurality of times on the STJ element 1 in a spiral shape, and the magnetic field generated by the inductance wire is reduced by an amount necessary for suppressing the Josephson current. Only increase and adjust. On the STJ element 1, a plurality of inductance lines 3
1 are arranged in parallel, the efficiency of the applied magnetic field is improved. The spiral-shaped inductance wire 31 is, of course, a microstrip wire of a superconducting thin film manufactured by the fabrication technology, similarly to the superconducting coil of FIG.

FIG. 5 shows an embodiment of a superconducting detector using the STJ element array for a sensor according to the present invention. In the embodiment of FIG. 5, the magnetic field generated by the superconducting coil having the toroidal structure constitutes a closed magnetic path that passes in parallel to the respective joint surfaces of the ten STJ elements 1 as the sensor elements. The sensitivity of the superconducting detector can be improved by widening the sensor surface. As shown in FIG. 5, a superconducting coil can be provided for each of a plurality of STJ element groups. Further, in this embodiment, the magnetic field leaking from the superconducting coil can be reduced as much as possible. A superconducting processing circuit section 51 such as a logic circuit is integrated on the same chip as the 20 sensor STJ elements. It is preferable to provide a ground plane on the substrate of the entire chip in order to shield noise and ground the element.

FIG. 6 shows an embodiment of an array type superconducting detector according to claim 5, in which the magnetic field generator using the spiral-shaped inductance wire shown in FIG. 3 is applied to 5 × 4 STJ element arrays for sensors. . The spiral-shaped inductance wires 31 are arranged on the 5 × 4 sensor STJ elements 1 in a plurality of regressions. The plurality of returned inductance lines 31 are parallel immediately above the STJ element. Since the magnetic field due to the spiral-shaped inductance wire is localized near the spiral-shaped inductance wire 31 as described in FIG. 4, the superconducting circuit element and the sensor STJ element array are mounted on the same chip as in the embodiment of FIG. It can be integrated on top.

In the embodiment shown in FIG. 6, the bias line 6 of the STJ element for all sensors is connected to the superconducting ground plane. The voltage change of the STJ element for each sensor is detected by the voltage of the bias line 5, and the arithmetic processing is performed by the same circuit as the superconducting processing circuit unit 51 in FIG. 5, and the electromagnetic waves and the like irradiated on the STJ element for each sensor are respectively measured. it can. Accordingly, it is possible to realize a pixel detector that detects a spatially incident position of an electromagnetic wave ray or the like and its energy with high resolution.

By connecting the bias lines of the STJ elements for all sensors in series, it is also possible to detect changes in all voltages of the STJ elements for sensors, and to detect electromagnetic waves and the like irradiated on the STJ elements for all sensors. The superconducting ground plane may be located below the STJ element such as another Josephson processing circuit.

[0028]

According to the present invention, the superconducting coil is formed on the same chip as the STJ element by using the microfabrication technology, so that the positioning becomes accurate and the parallel to the joining surface can be precisely formed from any direction. External magnetic field, the leakage magnetic flux can be confined to the micrometer level range, and a Josephson logic element that is easily affected by the magnetic field can be integrated on the same chip. Digital processing of the detected signal can be realized on the same chip, which can greatly contribute to downsizing of the detector and improvement of reliability.

ST for detecting superconducting electromagnetic waves, which was impossible in the past
SQUID to amplify weak signals generated by J element and STJ element
And a Josephson circuit that performs analog / digital (A / D) conversion of signals and signal processing on the same chip, improving the energy resolution performance and miniaturizing the detector. .

[Brief description of the drawings]

FIG. 1 is a diagram for explaining an embodiment of claims 1 and 2;

FIG. 2 is a diagram illustrating a closed magnetic circuit according to claims 1 and 2;

FIGS. 3A and 3B are a plan view and a cross-sectional view of the third embodiment.

FIG. 4 is a diagram illustrating a magnetic field generated by a spiral-shaped inductance wire according to the embodiment of claim 3;

FIG. 5 is a view for explaining an embodiment of claim 4;

FIG. 6 is a diagram for explaining an embodiment of claim 5;

FIG. 7 is a diagram showing an example of a method for producing a superconducting coil according to claims 1, 2 and 3.

FIG. 8 is a diagram for explaining the relationship between the production of a superconducting coil and the production of an STJ element.

FIG. 9 is a diagram illustrating the principle of a superconducting detector.

FIG. 10 is a diagram illustrating current-voltage characteristics of an STJ.

FIG. 11 is a diagram illustrating a Fiske step.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Superconducting tunnel junction (STJ) element 2 Upper electrode 3 Lower electrode 4 Tunnel barrier insulator 5, 6 Bias line 7 Substrate 8 Superconducting coil 9 Insulating layer 10 Magnetic field passing through joint surface 31 Spiral-shaped inductance wire 32 Superconducting ground Plane 50 superconducting detector chip 51 superconducting processing circuit of superconducting detector 52 superconducting detector output I bias current I ₁ control current

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Kenji Ishibashi 6-10-1 Hakozaki, Higashi-ku, Fukuoka City, Fukuoka Prefecture Within the Department of Energy Science, Kyushu University (72) Inventor Kyosuke Maehata 6-10-1 Hakozaki, Higashi-ku, Fukuoka City, Fukuoka Prefecture Examiner, Department of Energy Science, Kyushu University Masayuki Ogawa (56) References JP-A-7-273378 (JP, A) JP-A-63-1917 (JP, A) JP-A-60-15895 (JP, A) JP-A-63-260068 (JP, A) JP-A-2-193079 (JP, A) JP-A-60-187071 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01L 39/22-39/24 H01L 39/00

Claims (5)

(57) [Claims] 1. A superconducting device which generates a magnetic field parallel to the junction surface of a superconducting tunnel junction device for suppressing a Josephson current on the same substrate on which the superconducting tunnel junction device for a sensor is formed. A superconducting detector characterized in that conductive coils are formed on the left and right sides of the superconducting tunnel junction element so as to be parallel to the joining surface . 2. The superconducting detector according to claim 1, wherein the superconducting coil is formed in a toroidal structure in which a generated magnetic field is closed. 3. A substrate on which a superconducting tunnel junction element for a sensor is formed, a superconducting ground plane formed between the superconducting tunnel junction element and the substrate via an insulating layer, and In order to generate a magnetic field passing through the junction surface parallel to the junction surface of the tunnel junction element, a spiral-shaped inductance line formed via an insulating layer on the superconducting tunnel junction element is integrated and arranged ,
High resolution by suppressing Fiske step current
Superconducting detector, characterized in that in order to detect. 4. A plurality of superconducting tunnel junction elements for a sensor, a plurality of superconducting circuit elements, and a plurality of superconducting tunnel junction elements for a sensor arranged in an array,
A flat surface is formed between the plurality of superconducting tunnel junction elements for a sensor so as to generate a closed magnetic field passing through the entire junction surface.
A superconducting detector characterized in that superconducting coils of a toroidal structure provided in rows are integrated on the same substrate on which a ground plane is formed. 5. A plurality of superconducting tunnel junction elements for sensors, a plurality of superconducting circuit elements, and a plurality of superconducting tunnel junction elements for sensors arranged in an array in parallel with respective joining surfaces of the plurality of superconducting tunnel junction elements for sensors. to generate a closed magnetic field that passes through the joint surface, it is integrated in the superconducting tunnel same substrate with a spiral-shaped inductance line formed through the insulating layer to form a ground plane on the junction element, Fi scale step
Suppress current to detect with high resolution
A superconducting detector characterized in that: