JP3331283B2 - Vacuum suction device and static pressure bearing of mounting machine - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum suction device for a mounting machine such as a chip mounter or a die bonder and a static pressure bearing used for the device.

[0002]

2. Description of the Related Art A mounting machine (a so-called chip mounter or the like) for mounting an electronic component on a mounting area on a wiring board is conventionally known. Here, FIG. 6 shows an example of a vacuum suction device 60 in a conventional chip mounter.

As shown in FIG. 1, the vacuum suction device 60 includes a rod 61, a rolling bearing 62 for supporting the rod 61, and a head portion 6 for fixing the rolling bearing 62.
3 is provided. Inside the rod 61, a gas passage 64 for evacuation is formed. One end of the gas passage 64 is opened at a suction port 65 provided at the lower end of the rod 61. The other end of the gas passage 64 is connected to a vacuum pump (not shown) via an exhaust pipe 66. The rod 61 is inserted into the rod insertion hole 67 of the rolling bearing 62 with its lower end protruding. Since a plurality of balls 68 are arranged in the rod insertion hole 67, the rod 61 can slide in the vertical direction. A coil 69 is provided at the upper end of the rod 61, and a wiring 70 extends from the coil 69. On the other hand, a magnet 71 is provided on the head 63 side. Therefore, when the coil 69 is energized, the magnet 71
The rod 61 is driven in a predetermined direction by a change in the magnetic field formed between them.

[0004] In the case of such a vacuum suction device 60, the electronic component 72 can be suctioned to the suction port 65 by evacuating with a vacuum pump. Therefore, first, after the head unit 63 is moved onto the component tray to suck the electronic components 72, the head unit 63 is moved to a mounting area on the wiring board 73 by a head driving unit (not shown). Next, the head part 63 is lowered, and the electronic component 72 is pressed with a predetermined pressing force.
Is pressed onto the bonding material 74 in the mounting area. Then, the electronic component 72 is mounted by the adhesive force of the bonding material 74. Thereafter, the vacuum suction by the vacuum suction device 60 is stopped, and the head section 63 is returned from the wiring board 73 to the component tray. When a plurality of mounting areas are present on the wiring board 73, the electronic component 72 is sucked again and the above operation is repeated a required number of times.

However, since the mounting efficiency is poor in the conventional method of mounting the electronic components 72 one by one, it has recently been desired to improve the apparatus so that a plurality of electronic components 72 can be mounted simultaneously. As a configuration for this purpose, for example, a configuration in which a plurality of the above-described rolling bearings 62 are provided in the head portion 63 and the rods 61 are inserted through them may be considered.

[0006]

The chip mounter preferably has the following performance in addition to the performance of excellent mounting efficiency. First, the pressing force when pressing the electronic component 72 against the mounting area is extremely small. If this pressure is too high, electronic components 7
This is because it leads to the destruction of No. 2, and if it is too small, the joining becomes incomplete. Second, the electronic component 72 can be bonded to an accurate position on the mounting area (± 1 μm to 2 μm).
It is possible to perform joining within an error range of the order).

However, in the conventional chip mounter using the rolling bearing 62, the reduction of the sliding resistance of the rod 61 is naturally limited, and it has been difficult to delicately control the pressing force of the rod 61. Further, even when adopting a configuration in which a plurality of rods 61 are provided, it is difficult to set a suitable pressing force for all the rods 61 when mounting electronic components 72 having different shapes (particularly, thicknesses, etc.). Was expected to be. For this reason, the electronic components 72 having different thicknesses or the like have to be individually mounted as before. It is also expected that a similar problem occurs when the mounting surface of the wiring board 73 has irregularities.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a mounting machine capable of improving the mounting efficiency of an electronic component while improving the control accuracy of a rod pressing force. An object of the present invention is to provide a vacuum suction device.
Another object of the present invention is to provide a hydrostatic bearing suitable for the vacuum suction device.

[0009]

In order to solve the above-mentioned problems, the invention according to claim 1 is provided with a suction port formed at a tip portion for vacuum-sucking an object to be sucked, and a suction port formed at an outer peripheral surface. A plurality of rods each having an exhaust port and a gas passage communicating the suction port with the exhaust port; a hydrostatic bearing for movably and non-contactly supporting each of the rods by pressure fluid; The gist of the present invention is a vacuum suction device of a mounting machine having a head portion for fixing a pressure bearing portion.

[0010] In 請 Motomeko 1, the hydrostatic bearing unit,
It is constituted by a plurality of hydrostatic bearings having one rod insertion hole, and the hydrostatic bearing has one rod insertion hole.
Block having a bearing surface and the rod insertion
A sleeve made of a porous body provided in the through hole;
A pressurizing port for supplying pressurized fluid to the
The pressure fluid ejected from the bearing surface of the
Suction port for discharging to the outside of the
Position corresponding to the exhaust port on the rod outer peripheral surface in the hole
Gas that is formed in
The suction port to be introduced to the block side is in contact with the evacuation means.
Evacuation port continued, the evacuation port and the
And a gas passage communicating with the suction port .
According to the second aspect of the present invention, the object to be adsorbed is vacuum-adsorbed.
Suction port formed at the tip and exhaust formed at the outer peripheral surface
Gas passage for communicating between a port and the suction port and the exhaust port
And a plurality of rods each having
Hydrostatic bearing that supports the pad in a movable and non-contact manner
And a head for fixing the hydrostatic bearing.
In addition, the static pressure bearing unit is a vacuum suction device of a mounting machine, which is a single static pressure bearing having a plurality of rod insertion holes.
To the effect .

[0011] invention as set forth in claim 3, in claim 2 Te at <br/>, a block having a plurality of rod insertion hole, the bearing surface
And a plurality of rods provided in the rod insertion holes.
A sleeve made of a porous body and a pressurized fluid supplied to each of the sleeves.
Pressure port for feeding and bearing surface of each sleeve
Discharges pressure fluid ejected from the outside of the block
Suction port and a lock in the rod insertion hole.
At the position corresponding to the exhaust port on the outer peripheral surface of the
The gas discharged from the exhaust port is introduced to the block side
Suction port and a vacuum port connected to the vacuum means.
And the vacuum port and the suction port communicate with each other.
And a gas passage . According to a fourth aspect of the present invention, in any one of the first to third aspects, a magnet is provided on the rod side, and a coil is provided on the head side at a position corresponding to the magnet. According to a fifth aspect of the present invention, in any one of the first to fourth aspects, the rods protrude in substantially the same direction.

[0012]

[0013]

According to a sixth aspect of the present invention, there is provided a hydrostatic bearing for supporting a plurality of rods having the above structure in a non-contact manner, the block having a plurality of rod insertion holes,
A sleeve made of a porous body having a bearing surface and provided in each of the rod insertion holes, a pressurizing port for supplying a pressure fluid to each of the sleeves, and a pressure fluid ejected from the bearing surface of each of the sleeves And a suction port for discharging the gas to the outside of the block, and formed at a position corresponding to the exhaust port on the outer peripheral surface of the rod in the rod insertion hole, and introduces the gas exhausted from the exhaust port to the block side. The gist of the present invention is a static pressure bearing including a suction port, a vacuum port connected to a vacuum means, and a gas passage communicating the vacuum port with the suction port.

Hereinafter, the "action" of the present invention will be described. According to the first to fifth aspects of the present invention, the plurality of rods adsorb a plurality of objects to be adsorbed on the tip thereof and simultaneously press the objects onto a predetermined mounting area.
Further, since the rod is supported by the static pressure bearing in a non-contact manner, resistance when the rod moves in the static pressure bearing is reduced.

According to the invention described in claims 1, 3 to 5,
Since the sleeve is made of a porous material, the pressurized fluid is evenly and uniformly ejected from the bearing surface. According to the fourth aspect of the present invention, there is no need to provide a wire on the moving rod, so that the rod moves more smoothly.

According to the first, third to sixth aspects of the present invention,
A vacuum path is formed by the suction port, the gas path on the rod side, the exhaust port, the suction port, the gas path on the block side, and the vacuum port. When the evacuation is performed by the evacuation unit, the object to be adsorbed is surely adsorbed to the suction port even if the rod is supported in a non-contact manner.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION

[Embodiment 1] An embodiment in which the present invention is embodied in a vacuum suction device D1 of a chip mounter will be described in detail with reference to FIGS.

The vacuum suction device D1 of this embodiment comprises a plurality of rods 1, a plurality of hydrostatic bearings 2 as a hydrostatic bearing for supporting the rods 1, and a hydrostatic bearing 2
And a vacuum pump, an air supply source (all not shown), and the like. This chip mounter is mounted on the vacuum suction device D1.
, A head driving means (not shown) for driving the head 3 constituting the vacuum suction device D1 in the horizontal and vertical directions, and a control computer.
FIG. 1 shows a state before component mounting, and FIG. 2 shows a state at the time of component mounting.

On the lower end surface of the head portion 3, three block mounting portions 4 for fixing the hydrostatic bearing 2 are provided. A rod insertion hole 5 having a circular cross section is formed at the center of each of the block mounting portions 4. The head unit 3 including the three hydrostatic bearings 2 moves between a component tray (not shown) and a mounting stage. On the upper surface of the component tray, chip capacitors 6 as objects to be sucked are regularly placed. Note that the chip capacitors 6 mounted in the present embodiment are three types of chip capacitors 6 having different thicknesses. On the other hand, on the upper surface of the mounting stage, a wiring board 7 for mounting three types of chip capacitors 6 is set. The mounting surface of the wiring board 7 is flat. Each chip capacitor 6 is bonded to each mounting area on the wiring board 7 by a bonding material 8.

Each of the rods 1 is a metal rod having a rectangular cross section. In the center of the lower end surface of these rods 1,
A suction port 10 is provided. A contact member 11 made of a porous material is fixed to the lower end surface of the rod 1. The outer peripheral surface of the contact member 11 is covered with a thin non-permeable film (not shown) to prevent air leakage. An annular groove 12 having a predetermined width W is formed on the outer peripheral surface of the rod 1. On the bottom of the groove 12,
One exhaust port 13 is provided. The rod 1
In the center of the first vacuum evacuation passage 1 as a gas passage
4 is transparently provided. The first evacuation passage 14 makes the suction port 10 and the exhaust port 13 communicate with each other.

Block 15 constituting the static pressure bearing 2
Are fixed to the block mounting portions 4 of the head portion 3, respectively. Each block 15 has one rod insertion hole 16 for movably inserting the rod 1. The rod insertion hole 16 has the same rectangular cross section as the rod 1. On the inner wall surface of the rod insertion hole 16, a porous sleeve 1 made of sintered trifluoride resin is provided.
7 are fitted. The inner wall surface of the sleeve 17 is a bearing surface. The outer peripheral surface and the inner wall surface of the sleeve 17 are communicated with each other by fine continuous pores.

On the side surface of the block 15, a pressure port 18, a suction port 19 and a vacuum port 20 are provided one by one. The pressure port 18 includes:
Pressurized air is supplied from an air supply source (not shown). The pressurized air supplied to the pressurizing port 18 passes through an air supply passage 21 inside the block 15 and reaches an air pocket 22 surrounding the outer peripheral portion of the sleeve 17. The pressurized air reaching the outer peripheral surface of the sleeve 17 further passes through continuous pores inside the sleeve 17 and then blows out from the entire inner wall surface of the sleeve 17.

In the rod insertion hole 16 of the block 15, at a position slightly above the upper end surface of the sleeve 17,
A plurality of suction ports 23 are formed. Similarly, a plurality of suction ports 24 are formed in the rod insertion hole 16 of the block 15 at a position slightly below the lower end surface of the sleeve 17. These suction ports 23 and 24 and the suction port 19 are communicated by an exhaust passage 25 inside the block 15. The suction port 19 is connected to a vacuum pump (not shown). Therefore, most of the pressurized air ejected from the inner wall surface of the sleeve 17 is supplied to the suction port 23,
The suction is performed through the suction port 24 and the suction port 19.

In the rod insertion hole 16 of the block 15, another suction port having a function different from the suction ports 23 and 24 for sucking pressurized air is provided above the suction ports 23. 26 are formed. The suction port 26 and the evacuation port 20 are connected to a second evacuation passage 2 as a gas passage formed inside the block 15.
7 are connected. The evacuation port 20 is connected to a vacuum pump (both not shown) as evacuation means via piping. The rod 1 is inserted into the rod insertion hole 16 of the thus configured hydrostatic bearing 1 so as to be movable (specifically, vertically movable and non-rotatable).

The suction port 26 on the block 15 side is connected to the rod 1
It is provided so as to correspond to the groove 12 on the side. Accordingly, the suction port 26 is always open in the groove 12 regardless of the position of the rod 1 moving. Therefore, the width W of the groove 12 is set to substantially the same length as the stroke length of the rod 1. Therefore, the vacuum suction device D1 has continuous pores in the contact member 11, a suction port 10, a first evacuation passage 14, an exhaust port 13, a groove 12, a suction port 26,
The second evacuation passage 27 and the evacuation port 20 form one evacuation path.

A flange 30 is formed on a portion of the rod 1 above a portion where the groove 12 is formed. On the other hand, in each rod insertion hole 5 on the head part 3 side, an engagement groove part 31 is formed corresponding to the flange 30. The flange 30 and the engagement groove 31 constitute a rod retaining mechanism. That is, the lower surface of the flange 30 is engaged with a part of the engagement groove portion 31 to prevent the rod 1 from falling down.

Next, a mechanism for controlling the pressing force of the rod 1 will be described. Rod insertion hole 5 on head 3 side
Inside, a voice coil motor 32 as a coil is mounted. Two wirings 33 are drawn out from the voice coil motor 32. Same voice coil motor 3
2 generates a magnetic field having an intensity corresponding to the intensity of the current supplied from these wirings 33. On the other hand, a permanent magnet 34 is joined to the upper end surface of the rod 1. The upper end of the rod 1 having the permanent magnet 34 is inserted through the through-hole 35 of the voice coil motor 32 in a non-contact manner. By changing the amount of current supplied to the voice coil motor 32, the magnetic field changes, and as a result, the thrust (pressing force) of the rod 1 is determined.

Next, the operation of the vacuum suction device D1 of this embodiment will be described. First, the wiring board 7 before component mounting is set on the mounting stage. At this time, a predetermined amount of the bonding material 8 is previously provided in the mounting area of the wiring board 7.
Is applied. In use, first, the vacuum pump connected to the evacuation port 20 is driven. Then, evacuation is started via the evacuation path described above,
The chip capacitor 6 can be attracted to the lower end of the rod 1. In this state, the head unit 3 is moved onto the component tray, and the three types of chip capacitors 6 are attracted to the contact members 11 of the rods 1. Next, the head unit 3 horizontally moves to a position above the wiring board 7 with the chip capacitor 6 being sucked (see FIG. 1). Head unit 3 moved to a position above wiring board 7
After the alignment of each chip capacitor 6 with the mounting area, each chip capacitor 6
At a predetermined pressure (see FIG. 2). Thereafter, the evacuation by the vacuum pump is released, and each chip capacitor 6 is released from the rod 1. As a result, the chip capacitor 6 is bonded on the mounting area by the adhesive force of the bonding material 8. Thereafter, the head unit 3 returns to the position on the component tray again. When the component-mounted wiring board 7 is carried out, another wiring board 7 is newly carried in. Then, the vacuum suction device D1 repeats the same operation as described above.

Now, three rods 1 projecting in the same direction
According to the vacuum suction apparatus D1 of the present embodiment, three chip capacitors 6 on the component tray can be simultaneously suctioned and conveyed, and they can be simultaneously mounted on three mounting areas on the wiring board 7. Therefore, the mounting operation can be completed in a shorter time in the chip mounter of the present embodiment than in the conventional device in which the chip capacitors 6 are individually mounted one by one. Therefore, the mounting efficiency of the electronic component is reliably improved.

Further, in the vacuum suction device D1 of this embodiment, a static pressure bearing 2 for supporting the rod 1 in a non-contact manner by ejecting pressurized air to the bearing surface is used. For this reason, the movement resistance of the rod 1 can be reduced as compared with the conventional one. Particularly, in this embodiment, since the sleeve 17 is made of a porous material, there is an advantage that the pressurized air is uniformly and uniformly injected from the inner wall surface.
This certainly contributes to the reduction of the movement resistance. Further, with the configuration as in the present embodiment, a suitable pressing force can be set for each rod 1 even if the thickness of the chip capacitor 6 is different. Therefore, each rod 1
The control accuracy of the pressing force is surely improved as compared with the related art. Therefore, the chip capacitor 6 is not destroyed or deformed due to too strong pressing force, and the bonding of the chip capacitor 6 is not incomplete due to too weak pressing force.

In the vacuum suction device D1 of this embodiment, since the permanent magnet 34 is provided on the rod 1 side and the voice coil motor 32 is provided on the head unit 3 side, the wiring 33
Can be provided on the head portion 3 side which is relatively fixed. Therefore, even when the rod 1 moves, the wiring 33
Is not in the way. In addition, since the second evacuation passage 27 and the evacuation port 20 are provided in the hydrostatic bearing 2, unlike the related art, the exhaust pipe does not become an obstacle during movement. That is, according to this embodiment, since the rod 1 is completely floating, there is an advantage that the movement of the rod 1 becomes extremely smooth. This also surely contributes to the reduction of the movement resistance of the rod 1.

As described in detail above, according to the configuration of this embodiment, it is possible to improve the mounting efficiency while improving the accuracy of controlling the pressing force of the rod 1. [Second Embodiment] Next, a vacuum suction device D2 for a chip mounter according to a second embodiment will be described with reference to FIG. In addition, about the part common to Embodiment 1, detailed description is abbreviate | omitted instead of attaching the same member number.

As shown in FIG. 3, there is a difference between the present embodiment and the above embodiment mainly in the configuration of the hydrostatic bearing. That is, in the first embodiment, the static pressure bearing portion is configured by the three static pressure bearings 2 having one rod insertion hole 16, whereas here, the static pressure bearing portion is configured by the three rod insertion holes 16. One hydrostatic bearing 42 is provided.

The block 4 constituting the hydrostatic bearing 42
The rod insertion holes 16 formed in 3 have the same cross-sectional shape and are in a mutually parallel relationship. In each rod insertion hole 16, a sleeve 17 made of a porous body having a bearing surface is provided. When the rods 1 are inserted into these rod insertion holes 16, each rod 1 can move in the same direction. A pressure port 18, a suction port 19, and a vacuum port 20 are formed one by one on the side surface of the block 43 as in the first embodiment. The intake passage 21 formed inside the block 43 is
8 and air pockets 2 provided for each rod insertion hole 16
And 2 are communicated. The exhaust passage 25 is connected to the suction port 1
9 and suction ports 23, 2 provided for each rod insertion hole 16.
4 is communicated. The second evacuation passage 27 communicates the evacuation port 20 with a suction port 26 provided for each rod insertion hole 16. That is, this block 4
Reference numeral 3 denotes a manifold.

On the other hand, on the lower end surface of the head portion 40, one block mounting portion 41 larger than that in the first embodiment is provided. In three places in this block attachment part 41,
Rod insertion holes 5 are formed for inserting the upper ends of the three rods 1 respectively. The static pressure bearing 42 is fixed to the block mounting portion 41.

The vacuum suction device D2 constructed as described above
However, it goes without saying that the same operation and effect as those of the first embodiment can be obtained. In particular, according to the configuration of the present embodiment, the manifold 43 is designed to be a manifold, so that the hydrostatic bearing 42 can be reduced in size (specifically, the spacing between the rods 1 can be reduced), the number of ports can be reduced, and the configuration can be simplified. Achieved.

The present invention can be modified, for example, as follows. (1) Sleeve 1 made of porous material used for hydrostatic bearing 2
7 does not need to be made of resin as in the first and second embodiments, and may be made of, for example, metal or ceramic. In addition to the above-mentioned sleeve 17 made of a porous body, it is of course allowable to use a sleeve having a plurality of holes penetrating from the outer peripheral surface to the inner wall surface.

(2) The rod 1, which is a moving body, is not limited to the shapes of the first and second embodiments. For example, the cross-sectional shape may be a shape other than a rectangle (for example, a triangular shape). Further, by making the cross-sectional shape circular, the rod 1 can be made rotatable about the axis.

(3) 4, 5, 6, 7, 8, ... 2
Of course, it is possible to increase the number of rods 1 to more than three, such as 0, 30,. When a plurality of rods 1 are used, the length and cross-sectional shape of each rod 1 may be the same as in the first and second embodiments, or may not be the same. Of course, the arrangement of the rods 1 is not limited to a straight line.

(4) It is not essential that the rod 1 has only one projecting direction as in the first and second embodiments, and it is also possible to use a plurality of projecting directions depending on the application. (5) Instead of the voice coil motor 32, for example, a step motor or the like may be used. Alternatively, the permanent magnet 34, the voice coil motor 32, and the like may be omitted and the rod 1 may be pressed only by its own weight.

(6) In addition to the chip capacitor 6, the electronic components to be adsorbed include, for example, a chip resistor, a chip thermistor, a chip transistor, a chip diode, and an IC.
Chips and various semiconductor packages may be used. Of course, the object to be adsorbed may not necessarily be an electronic component. Further, the vacuum suction devices D1 and D2 of the present invention are provided with an uneven surface.
Wiring board 5 used for mounting one electronic component 50 (see FIG. 4),
6 may be used for mounting electronic components (see FIG. 5).

(7) The head sections 3 and 40 are not necessarily movable but may be fixed. In this case, the wiring board 7
It is only necessary that the mounting stage on which is mounted moves.

(8) As long as it is a type of bearing that can be supported in a non-contact manner, for example, a magnetic bearing may be used. However, when the rod 1 is driven by magnetism, it is desirable to take measures to prevent mutual magnetic forces from interfering with each other (for example, securing a certain distance). Embodiment 1,
2 are excellent in that they have a function of cooling the rod 1.

(9) The present invention can be applied not only to the vacuum suction devices D1 and D2 of the chip mounter but also to, for example, a vacuum suction device of a die bonder. In addition, not only the vacuum suction device of the mounting machine as described above,
It may be applied to various inspection / measurement equipment, precision processing equipment, medical equipment, micromanipulation equipment, and the like.

(10) In the vacuum suction devices D1 and D2 of the mounting machines according to the first and second embodiments, the vacuum pump connected to the evacuation port 20 is changed to, for example, an air supply source to thereby provide an air supply device. Can also be configured. In this case, the pressurized air supplied to the vacuum evacuation port 20 passes through the second vacuum evacuation passage 27 to the first air
And emanates from the lower end of each rod 1. It is also possible to use all of the plurality of rods 1 for ejection in this way, or to use only some of the rods 1 for ejection. In addition, the same rod 1 may be switched between evacuation and ejection in a predetermined time.

Here, in addition to the technical ideas described in the claims, the technical ideas grasped by the above-described embodiment and other examples are listed below. (1) In addition to having the same configuration as the vacuum suction device of the mounting machine according to claims 1 to 5 , the gas supplied to the evacuation port of the static pressure bearing is transferred to the gas passage on the rod side via the gas passage on the block side. A gas supply device that introduces the gas and ejects the gas from the tip of the rod.

The technical terms used in the present specification are defined as follows. "Porous body: A structure having fine pores inside, made of synthetic resin material such as sintered trifluoride resin, sintered tetrafluoride resin, sintered nylon resin, sintered polyacetal resin, etc. In addition to those made of metal materials such as sintered aluminum, sintered copper, and sintered stainless steel, those made of soft minerals such as graphite, and those made of sintered ceramics. "

[0049]

As described in detail above, according to the first to fifth aspects of the present invention, it is possible to improve the mounting efficiency of electronic parts while improving the control accuracy of the rod pressing force. An adsorption device can be provided. In particular, claim 1,
According to the inventions described in 3 to 5 , it is possible to further improve the control accuracy of the pressing force of the rod. Further, according to the invention described in claim 6 , it is possible to provide a hydrostatic bearing suitable for manufacturing the above-described excellent vacuum suction means.

[Brief description of the drawings]

FIG. 1 is a schematic cross-sectional view showing a vacuum suction device of a chip mounter according to a first embodiment (a state before component mounting).

FIG. 2 is a schematic cross-sectional view showing the vacuum suction device (when a component is mounted).

FIG. 3 is a schematic sectional view showing a vacuum suction device for a chip mounter according to a second embodiment.

FIG. 4 is a schematic cross-sectional view showing another method of using the vacuum suction device of the chip mounter.

FIG. 5 is a schematic sectional view showing another method of using the vacuum suction device for the chip mounter.

FIG. 6 is a schematic sectional view showing a conventional vacuum suction device for a chip mounter.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Rod, 2, 42 ... Static pressure bearing as a static pressure bearing part, 3, 40 ... Head part, 6 ... Chip condenser as an object to be adsorbed, 10 ... Suction port, 13 ... Exhaust port, 14 ... As gas passage , The first evacuation passage, 3, 16 ... rod insertion hole, 17 ... sleeve, 15, 43 ... block, 18 ...
Pressurizing port, 19: suction port, 20: vacuum port, 26: suction port, 27: second vacuum path as gas path, 32: voice coil motor as coil,
34: (permanent) magnets, D1, D2: vacuum suction devices.

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-2-162800 (JP, A) JP-A-6-307448 (JP, A) Japanese Utility Model Showa 57-89000 (JP, U) Japanese Utility Model Showa 57- 196042 (JP, U) Japanese Utility Model Hei 4-74499 (JP, U) (58) Field surveyed (Int. Cl. ⁷ , DB name) H05K 13/04 F16C 32/06

Claims (6)

(57) [Claims] 1. A suction port (10) formed at a distal end for vacuum-sucking an object (6), an exhaust port (13) formed on an outer peripheral surface, and the suction port (10) and the exhaust port. A plurality of rods (1) each having a gas passage (14) communicating with the port (13); and a hydrostatic bearing ( 2 ) movably and non-contactly supporting each rod (1) by a pressure fluid. ) and, and a head portion for fixing the hydrostatic bearing unit (2) (3, 40), the hydrostatic bearing unit, have a single rod insertion hole (16)
A plurality of static pressure bearings (2)
The bearing (2) has one rod insertion hole (16)
A block (15) having a bearing surface;
Three-piece made of a porous body provided in the pad insertion hole (16)
And pressurized fluid to the sleeve (17)
Pressurizing port (18) and the sleeve (1)
7) pressurized fluid ejected from the bearing surface
Suction port (19) for discharging to the outside of (15)
And an outer peripheral surface of the rod in the rod insertion hole (16).
Is formed at a position corresponding to the exhaust port (13).
The gas discharged from the exhaust port (13) is
Suction port (26) introduced to the suction (15) side and vacuum
A vacuum port (20) connected to the means;
The drawing port (20) communicates with the suction port (26).
A vacuum suction device of a mounting machine having a gas passage (27) . 2. A method for vacuum-adsorbing an object to be adsorbed (6).
Suction port (10) formed at the end, formed at the outer peripheral surface
An exhaust port (13), the suction port (10), and the exhaust port
A plurality of gas passages (14) communicating with (13)
Rods (1) and each of said rods by pressure fluid
Hydrostatic bearing for movably and non-contactly supporting (1)
Part (42) and the static pressure bearing part (42).
The static pressure bearing unit comprises a head portion of the eye and (3, 40) has one hydrostatic bearing (4 2) a vacuum suction device mounter is having a plurality of rod insertion holes (16). 3. The hydrostatic bearing (42) includes a plurality of locks.
Block (43) having a through hole (16), and a bearing
Surface and are provided in the rod insertion holes ( 16).
A sleeve (17) made of a porous material,
Pressurizing port for supplying pressurized fluid to the valve (17)
(18) and injection from the bearing surface of each sleeve (17).
Discharging the pressure fluid to the outside of the block (43)
Suction port (19) for inserting the rod insertion hole (1)
6) corresponding to the exhaust port (13) on the outer peripheral surface of the rod.
At the same time as the exhaust port (13).
Suction for introducing the gas to be discharged to the block (43) side
Port (26) and a vacuum port connected to the vacuum means
(20), the evacuation port (20) and the suction
The vacuum suction device for a mounting machine according to claim 2 , further comprising a gas passage (27) communicating with the port (26) . 4. A magnet (34) is provided on the rod (1) side.
And at the head (3, 40) side,
A coil (32) is provided at a position corresponding to the magnet (34).
The vacuum suction device of a mounting machine according to any one of claims 1 to 3 . 5. The rods (1) project in substantially the same direction.
Vacuum suction device of the mounting apparatus according to any one of claims 1 to 4 is set. 6. An apparatus for vacuum-adsorbing an object to be adsorbed (6).
Suction port (10) formed at the end, formed at the outer peripheral surface
An exhaust port (13), the suction port (10), and the exhaust port
A plurality of gas passages (14) communicating with (13)
Hydrostatic bearing for non-contact support of two rods (1)
Block (43) having a plurality of rod insertion holes (16).
And a bearing surface, and each of the rod insertion holes (1
6) a porous sleeve (17) provided therein;
A pressure supply for supplying a pressure fluid to each of the sleeves (17).
Pressure port (18) and bearing of each sleeve (17)
The pressure fluid ejected from the surface is supplied to the outside of the block (43).
Suction port (19) for discharging to the
Exhaust port (13) of rod outer peripheral surface in through hole (16)
And the exhaust port (1
The gas discharged from 3) is guided to the block (43) side.
Suction inlet (26) and a true
Empty port (20) and said vacuum port (20)
A gas passageway (27) for communicating the suction port with the suction port (26);
And a hydrostatic bearing with: