JP3329709B2 - Reactor - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reactor in which a stirrer is not required and a liquid or gas undergoes a flow contact reaction in a fine cavity. Therefore, the present reactor has a structure that does not cause an explosion or the like, and is provided with an independent chamber for circulating a refrigerant to gradually cool the heat of chemical reaction or for circulating a heating medium to promote a heating reaction. In addition, the structure is such that the reaction liquid is not brought into direct contact with the equipment through which the cooling medium or the like flows.

[0002]

2. Description of the Related Art Generally, a stirrer is provided in a reactor, and a batch system in which a mixture is uniformly dispersed by rotating or reciprocating blades of the stirrer is generally used.

[0003]

However, the uniform dispersion according to this method has a problem that a great deal of time is required for stirring, in addition to the complexity of requiring a power mechanism. In addition, depending on the type of reactants and mixing conditions, an abnormal reaction may be induced to cause an explosion. In addition, when a substance is polycondensed by a chemical reaction, impurities may occur frequently due to generation of heat of the chemical reaction during the reaction. To prevent this, a slow cooling process of gradually cooling at an appropriate speed is required. Therefore, conventionally, a method of introducing impurities into a separation tower through a cooler to separate impurities has been adopted. On the other hand, on the contrary, there is a case where it is desired to promote a chemical reaction by a heat treatment. The present invention has been made in view of these problems, and it is an object of the present invention to provide a reactor that does not require a power mechanism such as a blade required for stirring and that does not cause a risk of explosion. I do. In addition, it can suitably cope with the case where slow cooling treatment or heat treatment is required.Furthermore, it is possible to reduce the generation of impurities by making the gas and liquid into fine particles and continuously contacting and reacting at a high pressure to cause reaction and polymerization. It is also an object to provide a reactor which requires very few columns.

[0004]

In order to achieve the above-mentioned object, a reactor according to the present invention is provided with a hot isostatic pressing sintering method in a plurality of concentrically arranged metal cylinders having different diameters. A reactor mainly comprising a first reaction tube formed by forming a metal porous body chamber made of a united body, and an inlet for each of the chambers is provided on one side of the first reaction tube. In each of the chambers except for the outermost in the radial direction, a shielding plate that blocks an axial flow path from the inflow port is provided so that a chamber located radially outward is gradually distant from the inflow port. Except for those located on the outermost side in the radial direction, a through hole is formed in the outer peripheral portion of each of the metal cylinders on the inflow side from the shielding plate in close proximity to the shielding plate located inside. The fluid that has moved through the inner chamber in the radial direction To the outer chamber in the radial direction, and mixes and reacts with other fluids in the metal porous body made of hot isostatically pressed sintered body. A second reaction tube is connected to the outlet of the chamber, and a hollow chamber for heat exchange surrounded by each reaction tube is formed between the first reaction tube and the second reaction tube.

[0005] Here, the metal porous body chamber may be filled with a plurality of types of metal powders having different particle sizes and material types between metal cylinders and subjected to hot isostatic pressing, or the shape of each metal cylinder. It is preferable to form a hot isostatically pressurized sintered body having different porosity and pore diameter individually and press-fit it into a metal cylinder arranged concentrically. Further, the surface of the metal powder forming the metal porous body chamber was previously set to Zn,
If the coating is performed by metal plating or vapor deposition of Cr, Cu, Ag, Pt, and Ti, the action of a metal catalyst during a chemical reaction can be performed. In addition, the hot isostatic pressing process is a process in which a processing material is inserted into a pressure vessel, and a high isostatic pressure is applied using a gas as a pressure medium under a high temperature, thereby utilizing a synergistic effect of a high temperature and a high pressure. It refers to the process of sintering metal powder under pressure. However, if the temperature and pressure are too high, the porosity will decrease. On the other hand, if the temperature and pressure are insufficient, the adhesion between the particles will be lacking. Therefore, the temperature and pressure are adjusted to the optimum values according to the type of metal powder used. There is a need.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in more detail based on embodiments. FIG. 1 is an external view of a reactor 1 according to the present invention, and FIG. 2 is a plan view (a) and a partial cross-sectional view (b). As shown in FIG. 2, the reactor 1 is equipped with an upper reaction tube 2 having a concentric triple structure and a lower reaction tube 3 formed in a funnel shape, and an independent cooling hollow chamber 4 therebetween. It is provided and configured. A required gap is provided on the outer peripheral portion of the upper reaction tube 2 and the lower reaction tube 3 to provide a water jacket casing 27 for cooling.
28 are mounted. The upper water jacket 27 is provided with flow passages 27a and 27b connected to its casing, and communicates with a cooling device and a heating device as necessary. Similarly, the lower water jacket 28
Also, they communicate with the cooling device and the heating device via the flow paths 28a and 28b. With such a configuration, the reaction generally has an optimum temperature range, and when the temperature is higher than the temperature, a side reaction occurs to cause a large number of impurities, and when the temperature is too low, a predetermined reaction rate is obtained. Because there is no.
A coil 29 used for cooling or the like is provided in the hollow chamber 4. The coil 29 has a spiral shape as shown in FIG. 3B, and a plurality of fin members 30 are provided on the outer peripheral portion of the coil 29. The coil 29
Passes through the water jacket 28 and passes through the flow paths 29a,
29b. The hollow chamber 4 is
It is formed in a chamber of independent structure. Therefore,
The cooling water can be directly introduced into the chamber 4 without being provided with the cooling coil 29 and circulated for cooling. It is desirable that the position of the cooling water supply pipe be 28a, and that a drainage pipe 28b be drilled above this position. Further, as shown in FIG. 2, the small-diameter cylinder 5 has a portion below the circular plate 11 serving as the bottom plate of the chamber 2A as a part of the hollow chamber 4, and a portion below the annular plate 12 serving as the bottom plate of the chamber 2B has a hollow portion. Since it is provided so as to protrude into the chamber 4, the protruding portion acts like a radiation fin. However, the present invention is not limited to this configuration, and the internal volume of the hollow chamber 4 may be increased without the small-diameter cylinder 5 projecting into the hollow chamber 4. The upper reaction cylinder 2 includes metal porous bodies 8 having a predetermined porosity and a predetermined pore diameter in large, medium, and small metal cylinders 5, 6, and 7 formed of a corrosion-resistant metal such as stainless steel, titanium, and an alloy. 9 and 10 are press-fitted to form porous body chambers 2A to 2C (FIGS. 4 to 6). And
A disk 11 is in close contact with the inner peripheral portion of the small-diameter cylinder 5, and an annular plate 12 is in close contact between the small-diameter cylinder 5 and the medium-diameter cylinder 6 (FIGS. 5 and 6). A plurality of through-holes 5a and 6a are formed in the outer peripheral portions of the small-diameter cylinder 5 and the medium-diameter cylinder 6, respectively, in the vicinity of the upper side of the disk 11 and the upper side of the annular plate 12, in the circumferential direction. The through holes 5a and 6a are provided above the circular plate 11 and the circular plate 12, respectively.
Are in close contact with the metal cylinders 5 and 6, the through-hole 5a functions as a flow path from the chamber 2A to the chamber 2B, and the through-hole 6a functions as a flow path from the chamber 2B to the chamber 2C. Become. The lower part of the porous body chamber 2C is connected to the metal porous chamber of the lower reaction tube 3 and functions as a flow path.

The metal porous bodies 8, 9 and 10 are hot isostatically pressed sinters formed in a columnar or cylindrical shape. The sintering raw material powder is, for example, stainless steel (SUS3).
04, SUS630 etc.), tool steel (SKD61, S
KD11), maraging steel (18Ni, 2
Various metals such as ONi-based metals, high-speed steels (such as SKH51 and SKH55), and non-ferrous metals (such as aluminum alloys and titanium alloys) are used. The porosity and pore diameter of the metal porous body are appropriately selected as necessary, but the porosity is 7.0.
In the case where the pore size is set to 50.0% or less and the pore diameter is set to 500 μm or less, it is desirable to use the one disclosed in the specification of Japanese Patent Application No. 6-255228. That is, the raw material powder having a particle size corresponding to the porosity and the pore diameter is vacuum-sealed in a capsule,
Low processing temperature, low pressure,
The hot isostatic pressing (HIP) process is performed under short-time processing conditions. For example, in HIP processing using stainless steel or alloy tool steel-based powder as raw material powder, the temperature is about 400 to 800 ° C., the pressure is about 50 to 150 MPa, and the processing time is 0.5 to
When the high-speed steel-based powder is used as the raw material powder, the temperature is about 300 to 800 ° C., and the pressing force is 50 to 150 M.
The processing time is about 0.5 to 4 hours. In addition,
Porosity and pore diameter of the porous metal body obtained as a sintered body,
Adjustment is performed using the pressurizing temperature, pressing force, processing time, and the like as control factors. Further, after the HIP treatment, if a heat treatment for maintaining the temperature range of 60 to 90% of the melting point for about 2 to 10 hours is performed without substantially changing the porosity and the pore diameter of the sintered body, The bonding between particles can be strengthened. Alternatively, the raw material powder is filled in a rubber mold, cold isostatic pressing is performed to form a green compact, and then the powder compact is encapsulated or HIP-treated without being encapsulated. You may. In this manufacturing process, the particle size of the raw material powder, the cold pressing pressure, and the HI
The porosity and pore diameter of the sintered body can be controlled by the P treatment conditions (temperature, pressure, time).

The metal porous bodies 8, 9 and 10 are manufactured by the above-described method, and the porosity and the pore diameter of each porous body are largest in the columnar porous body 8 located at the center.
The ring-shaped porous body 10 located on the outer peripheral portion is set to be the smallest. This is also to rectify the fluid and prevent backflow. In this example, the porous bodies 8 to 10 are press-fitted to the metal cylinders 5 to 7. However, the present invention is not limited to this, and the metal cylinders 5, 6, and 7 are arranged at equal intervals. In this state, raw material powders having different particle diameters may be filled and HIP-treated. In this case, a metal porous body having a triple structure having a different pore distribution is preferably formed integrally, but the metal cylinders 5, 6, and 7 are preferably formed to have a cross-sectional shape as shown in FIG. . In addition, each of the porous bodies 8, 9, and 10 may have a multilayer structure in the axial direction, so that the pore distribution can be varied not only in the radial direction of the upper reaction tube 2 but also in the axial direction. preferable. In this case, for example, the porosity or the like may be reduced from the upper part to the lower part of the porous bodies 8 to 10. The manufacturing method is disclosed in Japanese Patent Application No. 7-111.
No. 593. In other words, multiple types of metal powders with different particle sizes and materials are stacked and filled,
Temperature 0.2 ~ 0.85mpK, pressure 0.5 ~ 150M
It suffices to perform hot isostatic pressing under the condition of Pa to produce the multilayer metal porous bodies 7, 8, and 9. Here, mpK is the melting point (absolute temperature) of the powder, and refers to the melting point of the low melting point powder when different kinds of powders are stacked and filled. Alternatively, a plurality of kinds of metal powders having different particle sizes and materials may be stacked and filled, and after the cold pressing, a hot isostatic pressing may be performed. The lower reaction tube 3 is, as shown in FIG.
3, a metal porous body 14 inside thereof, and a funnel cylinder 15. The lower reaction tube 3 is formed by press-fitting the metal porous body 14 manufactured by the HIP processing into the metal cylinder 13 or by filling the metal cylinder 13 with metal powder and integrally forming the metal cylinder 13 by the HIP processing. Manufactured.
The funnel cylinder 15 is used for pre-processing or post-processing.
It is fixed to the metal cylinder 13 by welding or the like.

Next, the assembling state of the reactor 1 shown in FIG. 1 will be described. The cooling water is circulated in the lower water jacket casing 28 attached to the mounting base 16 with a required gap. The lower reaction tube 3 is fitted, and a reactant transfer pipe 18 is mounted below the funnel 15 via a screw pump 24. An upper water jacket casing 27 is formed by fitting the upper reaction tube 2 on the lower reaction tube 3 and forming cooling water to circulate at the outer periphery of the upper reaction tube 2 with a required gap. Attach and fix. A pressure-resistant casing cover 19 is mounted on the upper part of the upper reaction tube 2. The casing cover 19 has press-fit pipes 8P, 9P for press-fitting a liquid or gas into a chamber made of porous metal bodies 8, 9, 10. , 10P. The casing cover 19 is fixedly secured by fixing bolts 20. The casing cover 19, the upper water jacket / casing 27, and the lower water jacket / casing 28 are respectively provided with flange portions 19F,
They are connected via 27F and 28F.

FIG. 12 is a flow sheet showing an example of use of the reactor 1 according to the present invention. Liquid hoppers 21a, 21
The liquids A, B, and C of b, 21c are supplied to the reactor 1 via the on-off valve 22, the pressure pump 23, and the check valve 22a.
Press-fit. On the other hand, the output of reactor 1 is pump 2
4 and supplied to the next stage via the check valve 25. The pressurizing pump 23 is controlled by a computer controller 26. The additive liquid hopper 21d and the catalyst hopper 21e are
The additive liquid and the catalyst are stored. As shown in the figure, in the case of the reactor 1, the water jackets 27 and 28 are both connected to the radiator 30, and the cooling water pressurized by the circulation pump 30P is supplied to the water jackets 27 and 2.
8. The cooling spiral coil 29 is connected to the cooler 31, and the refrigerant pressurized by the pressurizing pump 31P is supplied to the cooling spiral coil 29. As described above, since the cooling water and the refrigerant circulate in the reactor 1, the heat generated during the chemical reaction can be gradually cooled, and the generation of impurities and the like can be prevented.

Next, referring to FIG. 12, FIG.
An example of the operation contents of the reactor 1 shown in FIG. The liquid A to liquid C from the liquid hoppers 21a to 21c pass through the press-fit pipes 8P to 10P, respectively, and the porous material chamber 2A
~ 2C. In addition, the porous body chamber 2A ~
Although the porosity of 2C is different from each other, the computer controller 26 controls the pressurizing pump 23 to an optimum operation state in consideration of the difference in the porosity. Each of the liquids A to C pressed into the liquids 2A to 2C pressed into the porous body chambers 2A to 2C is filled with the metal porous body 8, 9, 10 (2A, 2
B, 2C) to be finely divided into fine particles. The flow rate at this time is determined by the porosity of the porous body and the pressure of the liquid. However, since the porosity of the porous body chamber 2A is large, the flow rate and the flow rate are generally large. Then, the liquid A that has descended from the porous body chamber 2A flows out of the through-hole 5a provided on the outer periphery of the metal cylinder 5, and flows into the porous body chamber 2B. On the other hand, the porosity of the porous body chamber 2B is formed to be smaller than the porosity of the porous body chamber 2A. Instead, the solution A and the solution B are uniformly mixed and synthesized in the vicinity of flowing out of the through hole 5a. Similarly, since the porosity of the porous body chamber 2C is smaller than the porosity of the porous body chamber 2B, the liquid A and the liquid B are uniformly mixed with the liquid C near the outlet of the through hole 6a. Synthesized. FIG. 2 (b)
As shown in the above, the synthesis solution A + B + C
The reaction liquid is further subdivided and uniformly dispersed by the porous body chamber of the lower reaction tube 3 connected to the lower end of the reaction tube. In addition, the porous body of the lower reaction tube 3 is formed such that the particles of the metal powder forming the porous body are slightly larger than the upper porous body 2C in order to reduce the resistance when the reaction solution passes therethrough. It is formed so as to obtain a porosity and a pore diameter.
The lower ends of the medium-diameter cylinder 6 and the large-diameter cylinder 7 are shown in FIG.
8 (b), the casing 13 and the bottom plate 14
To form an independent chamber 4.
A cooling coil 29 is provided inside the chamber 4 and is connected to an external cooler for slow cooling, or cooling water can be directly circulated in the chamber 4 for slow cooling.
In addition, the viscosity of the reaction solution may increase when the polymerization reaction occurs. However, even in such a case, since the porous chamber 3 of the lower reaction tube and the porous chamber 2C of the upper reaction tube 2 are directly connected, the resistance is low. It is very easy to distribute. As shown in FIGS. 6 and 9, a shoulder S is formed inside the lower end of the middle diameter cylinder 6 of the upper reaction tube 2, a circular bottom plate b is fitted and sealed, and the lower end of the large diameter cylinder 7 is sealed. May be fitted to the casing 13 of the lower reaction tube 3 and sealed.
In this configuration, as described above, the internal porous body 2C and the porous body 3 of the lower reaction tube are directly connected to each other, so that the flow resistance of the reaction solution is small and the polymerization reaction is extremely easy. In the case of this embodiment, if a small gap is formed between the lower surface of the bottom plate b of the upper reaction tube 2 and the porous chamber of the lower reaction tube 3, the mixed solution of the upper reaction tube 2 can be used. 3 is preferable because it can uniformly diffuse to the upper surface of the porous body. By the way, an independent hollow chamber 4 is formed inside the medium-diameter cylinder 6, and a cooling coil 29 is provided therein, which is connected to an external cooler to help slow cooling (FIG. 2). The cooling water can be directly circulated through the pipe through the chamber 4 to be cooled slowly (FIG. 9). FIG. 10 illustrates the lower reaction tube 3 used in the reactor of FIG. 9, but when the present invention is used as a simple mixer, the lower reaction tube may be omitted.

Although the liquid mixing has been described above, the reactor according to the present invention can of course be used for gas mixing. In addition, even if a chemical reaction is involved, even if an abnormal reaction occurs, the risk of explosion is small and the safety factor is high.
This is because an extremely minute cavity in which the inside of the porous body is finely divided is formed. For example, it is said that the integrated area of the microcavities in activated carbon of 1 cm ³ is equivalent to 30 m ^2. However, although it is not discussed in the same way, the size of the internal area of the microcavities of the metal porous body is large. , Effectively eliminating the risk of explosion. In addition, the porous body chamber 2A
Pt, Ag, Cu, Z on the metal powder forming ~ 2C
If n, Cr, Ni, Ti, etc. are selected and subjected to HIP sintering, or a metal powder formed by plating or depositing these metals by HIP sintering to form a metal catalyst, various reaction mechanisms can be formed. Can be formed. Regarding this chemical reaction mechanism, when the cooling of the heat of the chemical reaction is necessary as described above, the cooling device is actuated to respond, and conversely, when heating is required to promote the chemical reaction, It is formed to circulate a heated medium (gas or liquid) to cope with the problem. Therefore, from simple mixing to fine synthetic chemistry, that is, polymerization reaction, polycondensation reaction by advanced chemical reaction,
It can also be used as a reaction mechanism requiring high temperature and pressure. The description of the embodiments does not limit the present invention, and various modifications can be made without departing from the spirit of the invention. For example, in the case of the embodiment, the fluid moves in the order of the small-diameter cylinder 5 → the medium-diameter cylinder 6 → the large-diameter cylinder 7, but conversely,
The fluid may be moved in the order of the large-diameter cylinder 7 → the medium-diameter cylinder 6 → the small-diameter cylinder 5. In this case, as shown in FIG. 11, an annular plate 11A is provided between the medium-diameter cylinder 6 and the large-diameter cylinder 7, and an annular plate 12A is provided between the small-diameter cylinder 5 and the medium-diameter cylinder 6. And an annular plate 12 on the outer circumference of the medium diameter cylinder 6, respectively.
A through holes 5a and 6a are provided near A and 11A. Also,
A shoulder S is provided inside the lower end portions of the large-diameter cylinder 7 and the small-diameter cylinder 5, and the annular plate 11b is fitted and sealed. The tubular porous body 3 is connected and reacts.
In this structure, the cooling chamber for the reaction heat is
The cooling water is circulated through a chamber sealed by the ring-shaped bottom plate 11b.

[0013]

As described above, according to the present invention, the lower end of the porous body chamber of the first reaction tube is connected to the porous body chamber of the second reaction tube. Therefore, when the liquid synthesized in the first reaction column flows to the next second reaction column,
Effective with low flow pressure. Further, since the cooling chamber for slow cooling is independently sealed, the synthetic solution does not directly contact the cooling coil provided therein. Further, cooling water can be introduced into the cooling chamber and circulated for slow cooling. In addition, the present invention can be used as a mere mixer. Even in this case, a power mechanism for rotating and reciprocating blades is not required for stirring, and the mixture can be homogenized simply by flowing a plurality of liquids and gases. Can be dispersed. Further, it is a very excellent reactor which can be made into fine particles of gas and liquid and continuously contacted at a high pressure for reaction polymerization, and which can maintain an optimum temperature range and function effectively for many purposes.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an example of a reactor according to the present invention.

FIG. 2 is a plan view (a) and a partial cross-sectional view (b) of the reactor of FIG.

3A is a sectional view taken along line AA of FIG. 2, FIG. 3B is a sectional view taken along line BB, and FIG.

FIG. 4 illustrates a metal porous body that is a component of an upper reaction tube.

FIG. 5 illustrates a metal cylinder which is a component of the upper reaction tube.

FIG. 6 illustrates the arrangement of large, medium and small metal cylinders.

FIG. 7 illustrates a cross-sectional shape of a metal cylinder.

FIG. 8 illustrates a lower reaction tube.

FIG. 9 is a sectional view of another reactor according to the present invention.

FIG. 10 illustrates a lower reaction tube of the reactor of FIG. 9;

FIG. 11 shows a modification of the upper reaction tube of the present invention.

FIG. 12 is a flow sheet showing a use state of the reactor of FIG. 1;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Reactor 2 Upper (first) reaction tube 2A-2C Porous chamber 3 Lower (second) reaction tube 4 Cooling chamber 5-7 Large / medium / small metal cylinder 5a, 6a Through-hole 8-10 Metal porous body Hot isostatic pressing sintered body) 8P-10P Press-fit pipe (inlet) 11-12, b Bottom plate 27-28 Water jacket casing (heat exchange channel) 29 Spiral coil (heat exchange channel)

Continued on the front page (72) Inventor Ryutaro Motoki 1-1-1, Nakamiya Oike, Hirakata City, Osaka Prefecture Inside Kubota Hirakata Plant (72) Inventor Jun Funakoshi 1-1-1, Nakamiya Oike, Hirakata City, Osaka Stock Inside the Kubota Hirakata Plant (72) Takashi Nishi 1-1-1, Nakamiya Oike, Hirakata City, Osaka Prefecture Inside the Kubota Hirakata Plant Co., Ltd. (72) Takahiro Kitagawa 1-1-1, Nakamiya Oike, Hirakata City, Osaka Prefecture Shares (72) Inventor Akira Kosaka 1-1-1 Nakamiya Oike, Hirakata City, Osaka Prefecture Inspector Koichi Nakano, Kubota Corporation Hirakata Factory (56) References JP-A-57-94342 (JP, A) JP-A-52-96979 (JP, A) JP-A-52-44777 (JP, A) JP-A-52-83308 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) B01J 10/00-12/02 B01J 14/00-19/32

Claims (5)

(57) [Claims] 1. A first reaction cylinder comprising a metal porous chamber formed of a hot isostatically pressed sintered body in a plurality of metal cylinders having different diameters arranged concentrically. A reactor as an element, wherein an inlet for each of the chambers is provided on one side of the first reaction tube, and each of the chambers except for a radially outermost portion is provided with an inlet from the inlet. A shielding plate that blocks the axial flow path is provided so as to be gradually distant from the inflow port as the chamber is positioned radially outward, except for the radially outermost chamber, except for the outermost chamber. In the outer peripheral portion, a through hole is formed in the inflow side from the shielding plate in close proximity to the shielding plate located inside, and the fluid that has moved through the radially inner chamber passes through the respective through holes. Move to the chamber outside in the direction The second reaction tube is connected to the outlet of the radially outermost chamber in the metal porous body made of the first reaction tube and the second reaction tube. A reactor characterized in that a hollow chamber for heat exchange surrounded by each reaction tube is formed between the reaction tube and the reaction tube. 2. The metal porous body chamber is subjected to hot isostatic sintering of a metal powder whose surface is coated in advance by metal plating or vapor deposition of Zn, Cr, Cu, Ag, Pt, Ti for each metal type. 2. The reactor according to claim 1, wherein the reactor is formed by hot isostatic pressing by mixing the metal powder. Wherein the second reaction barrel, according to claim 1 or claim characterized by comprising formed of a metal porous metal porous body has large open porosity than body in said first reaction tubular Item 3. The reactor according to Item 2. 4. The inner and outer metal cylinders constituting the radially outermost chamber of the first reaction cylinder, the lower end of the outer metal cylinder is connected to the upper end of the outer peripheral wall of the second reaction cylinder, while The lower end of the metal cylinder is closed by a bottom plate to form the hollow chamber, and in a region surrounded by the bottom plate and the outer peripheral wall of the second reaction cylinder,
The reactor according to claim 1, wherein the reactor is filled with a porous metal body. 5. A minute gap is formed between a lower surface of a bottom plate of the first reaction tube and a porous body chamber of the second reaction tube, and a mixed solution of the first reaction tube is supplied to a porous plate of the second reaction tube. 5. The reactor according to claim 4, wherein the reactor is uniformly diffused to the upper surface of the substrate.