JP3322932B2 - Magnetic bearing control device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic bearing control device for stably operating a rotor, suppressing unbalanced vibration of a rotor, and reducing a drive current.

[0002]

2. Description of the Related Art Various vibration control systems of a rotor supported by magnetic bearings are shown in FIGS. FIG. 6 has not been published at the time of filing the present application.

FIGS. 2 to 6 show a conventional example as described below. FIG. 2 is a diagram of a conventional example well known as a servo feedback control system. Figure 3 ABS (Automatic Balanc)
ing System) control method.
It is described in the issue. ABS can also be called N-cut because it cuts the rotation synchronous vibration component. Figure 4 ...
... Critical damping control system, which is described in JP-A-52-93853. FIG. 5... This is an improvement of the system of FIG. 4 and is called an N-cross system, which is described in Japanese Patent Application Laid-Open No. 61-262225. This is an invention proposed by the present applicant. Figure 6 ...
... This is an FF (Feed Forward) control system, and is an invention described in Japanese Patent Application No. 3-127845, which is a prior application. This is an invention proposed by the present applicant.

Hereinafter, FIGS. 2 to 6 will be described individually. FIG.
The rotor (rotor) supported by the magnetic bearings is deviated from the center of rotation (also called the neutral position) due to its shape, external force, and the like. It is necessary to control so as to be at the center position. In FIG. 2, electromagnets 2X, 2Y are provided on the left, right, upper and lower sides of the rotating body 1, and the position of the rotating body is controlled by controlling the exciting current to the electromagnets 2X, 2Y. Therefore, the control circuit 4X,
4Y and power amplifiers 5X and 5Y are provided. The control circuits 4X and 4Y are control circuits composed of PID elements. The control circuit 4X receives the detected displacement amount x from the displacement sensor 3X in the X-axis direction, and the control circuit 4Y receives the detected displacement amount y from the displacement sensor 3Y in the Y-axis direction. This displacement amount x
And y are amounts indicating the deviation from the rotation center, and are input to the control circuits 5X and 5Y. The control circuits 5X, 5Y
A control voltage P _x corresponding to a deviation from the center position of the rotor 1,
_Py is output and input to the power amplifier 5X (corresponding to the two coils 2X on the left and right) and 5Y (corresponding to the two coils 2Y on the upper and lower sides) so that the coils 2X and 2Y are prevented from being displaced from the center. exciting current i _x, by flowing a i _y, to correct the deviation of the rotor from the left and right upper and lower central position.

The PID elements constituting the control circuits 5X and 5Y are a combination of P (proportional), I (integral) and D (differential). Various control characteristics are obtained depending on the manner of this combination.

The servo feedback control method shown in FIG.
This is a basic control method for holding the rotor at the neutral position.
However, it is not the case that the neutral position can be maintained at all rotation speeds of the rotor. This is because it is not possible to cope with the bending resonance point at high speed rotation.

[0007] As the rotation speed of the rotor is increased, primary and secondary resonance phenomena appear as a rigid body. As the number of revolutions is further increased, the characteristics of the moving body as an elastic body due to unbalance appear from the moving body as a rigid body in the rotor. The primary and secondary bending phenomena appear due to the properties of the elastic body. The rotation speed at which these resonance phenomena appear is called a resonance frequency. The point at which the resonance phenomenon appears is called the resonance point. Eliminate the distinction between a rigid body and an elastic body.
The next and second resonance points are simply referred to as the first and second resonance points, (Nc
(1, Nc2) The primary and secondary resonance points as an elastic body may be simply referred to as tertiary and quaternary resonance points (Nc3, Nc4). FIG. 7 shows the relationship between the resonance point and the amplitude.

The servo feedback control method shown in FIG.
By performing the tuning, it is possible to control to maintain the neutral position over the entire rotation frequency range. Here, tuning is
Adjusting the control characteristics by PID. But,
Actually, in the servo feedback control method of FIG.
At most, it is possible to maintain a neutral position with respect to vibrations at the primary and secondary resonance points as a rigid body. It is difficult to maintain the bending primary and secondary resonance points and the neutral position before and after the resonance point only by the servo feedback control method.

FIG. 3 shows that the tracking filter 7 is provided in FIG. 2 and that the detected rotation speeds x _N and y _N are negatively fed back to the input sides of the control circuits 4X and 4Y. There is a feature. The tracking filter 7 receives the displacement signals x and y and a rotation pulse as inputs and receives a rotation synchronization component x
_N, is a circuit for extracting the (often referred to as N component) y _N. The subtraction points 9X and 9Y subtract βx _N and βy _N obtained by multiplying the rotation synchronization components x _N and y _N by the proportionality coefficient β (either 0 or 1) from the displacement signals x and y, and control the results. This is a circuit for inputting to the circuits 4X and 4Y.

According to the circuit of FIG. 3, the rotational bearings βx _N and βy _N obtained by multiplying the displacement signals x and y by the proportional coefficients β by the coefficient units 20X and 20Y are subtracted, so that the magnetic bearing is unbalanced in rotational synchronization. It will not respond to vibration. (Vibration insulation). Therefore, the spring constant K _N and the damping constant C _N are K _N = 0 and C _N = 0 with respect to the rotation synchronous component. This ABS
Β = 1 when control is applied, β = 0 when control is not applied
Becomes Applying ABS control with β = 1 has the advantage that a current for suppressing unbalanced vibration at that time is not required. This ABS control is not applied during the passage through the resonance point (β
= 0), and applied after passing through the resonance point (β = 1). ABS control is optional.

FIG. 4 is intended to reduce the resonance amplitude at the resonance point in the bending mode by providing the differentiating circuits 6X and 6Y and the rotation synchronous tracking filter 7 in the control device shown in FIG. . The detected displacement signals x and y are PI
The signals are input to the D-type control circuits 4X, 4Y and also to the differentiating circuits 6X, 6Y. Differentiating circuit 6X is Kx +
By calculating C (dx / dt), an amount proportional to the speed of the displacement x is calculated, and a component synchronized with the rotation speed N of the rotor 1 is calculated from this amount.

(Equation 1) Is detected by the rotation synchronous tracking filter 7. Here, K is a spring constant, and C is a damping constant. Similarly, the displacement signal y
From the differential circuit 6Y and the rotation synchronous tracking filter 7 are components synchronized with the rotational speed N.

(Equation 2) Is detected. Thus, the rotation synchronous component x ₀ of displacement and velocity,
Only y ₀ is extracted, and only the unbalanced vibration synchronized with the rotation speed is controlled. According to this configuration, the bearing stiffness can be adjusted by control according to the magnitude of the displacement component (this is adjusted by the magnitude of the spring constant K), and the damping of the bearing displacement is reduced by the magnitude of the speed component. Adjustment is possible (this is adjusted by the magnitude of the damping constant C), and the amplitude of the bending mode resonance point can be kept small. However, this method requires a differentiating circuit. However, in general, the realization of mathematical differentiation by electronic circuits induces the generation of high-frequency noise and is accompanied by restrictions, so in reality the perfect thing is infinite and the only way is to substitute a simulated one. .

FIG. 5... In the conventional example of FIG. 4, the differentiating circuits 6X and 6Y are used for speed detection, but FIG. 5 detects this by another method. FIG. 5 shows a configuration in which the unbalanced vibration of the rotor is directed forward, utilizing the fact that the derivative in the x direction is proportional to the −y displacement signal, and the derivative of the vibration in the y direction is proportional to the x displacement signal. . That is, instead of the outputs of the differentiating circuits 6X and 6Y of FIG.
_N, a 5 that using x _N, it is possible to take out the rotation synchronization component of the velocity of the displacement by the rotation synchronous tracking filter 7. This is crossed to obtain coefficient units 21X, 2
This is given to the subtraction point and the addition point on the output side of the control circuits 4X and 4Y via 1Y.

In the N-cross control, a differentiating circuit can be completely realized, and has the same effect as generating a damping constant C _N on unbalanced vibration. Therefore, the resonance amplitude can be significantly reduced. Therefore, it is an optional circuit used during passage through the resonance point.

FIG. 6 is a circuit for realizing a new vibration limiting method. The conventional example described above can be called feedback control because current control is performed depending on a displacement signal by providing a tracking filter. FIG. 8 does not provide a tracking filter using the displacement signals x and y, and is therefore called an FF control method. This FF control is
An exciting force is applied by feed forward, the exciting force is applied so as to have a phase opposite to the unbalance, and the vibration is reduced by canceling the unbalance. In FIG. 6, the two-phase oscillator 10 has a sine wave signal Asin (Ωt + φ) synchronized with the rotation pulse with respect to the rotor rotation speed Ω.
And a cosine wave signal Acos (Ωt + φ). An output of the control circuit 4X and an amount proportional to the cosine wave signal Acos (Ωt + φ) (proportional coefficient γ given by the coefficient units 22X and 22Y) are added, thereby performing current control. An addition is performed with an amount proportional to the sine wave signal Asin (Ωt + φ) (proportional coefficient γ), and current control is performed using this. If the amplitude A and the phase φ are properly selected, vibration can be applied so as to cancel the imbalance force due to unbalance at the resonance point, and the resonance amplitude can be kept small. This excitation is called FF excitation. As shown by the dotted lines in FIG.
A two-phase output may be given to the input side of Y. This FF control is also optional. The purpose of use, the number of rotations, and the control current (excitation current) of the conventional example and the prior application shown in FIGS.
Is shown in FIG.

[0015]

In a critical damping device using a differentiating circuit disclosed in Japanese Patent Application Laid-Open No. 52-93853, a velocity signal (dx / dt, dy / d) is obtained from a displacement signal (x, y).
A differentiation circuit for making t) is required, and the circuit becomes complicated. In addition, there is a problem that the vibration amplitude is large at the time of passing the critical speed due to unbalance vibration, and the current flowing through the magnetic bearing increases. Also, in the control of the N-cross in Japanese Patent Application Laid-Open No. 61-262225, there is a problem that the current increases because a resonance vibration signal flows through the original PID control circuit. Increasing these currents requires increasing the dynamic range of the power amplifier, which is difficult to achieve. If the ABS is used, the vibration of the rotational speed synchronization component due to the unbalance is filtered, and the current flowing through the electromagnet coil can be extremely reduced. However, if the ABS control is performed alone during the passage through the resonance point, the vibration increases, so that the vehicle must be operated after passing through the critical speed. Therefore, the ABS control is ineffective during the passage of the critical speed which is the resonance point,
Only the PID control circuit was required, and a large control current was required.

More specifically, the method of making the ABS control effective involves the problem of system stability / instability such as fluctuation other than the reduction of unbalanced vibration. FIG. 9 shows an example of a vibration response when the ABS control is activated. Looking around the third resonance point, A
When there is no BS or when the ABS control is weak, the resonance amplitude curve is stable. However, if the ABS control is strengthened, the amplitude curve fluctuates after passing through the tertiary resonance point and is not stable. That is, it is extremely dangerous to make the ABS control effective around the resonance point. Therefore, in this example, it is effective to make the ABS control effective between the third and fourth resonance points after sufficiently passing through the resonance points. As described above, in the current technology, the ABS is limited so that the operating speed range avoids the resonance region.

Accordingly, it is an object of the present invention to provide a method and an apparatus for controlling a magnetic bearing which can stably pass through a resonance point even while ABS control is performed.

Further, as can be seen from FIG. 8, although it is necessary to sufficiently suppress the vibration with a small current when passing through the resonance point, this has not been realized yet. Further, what is important for the vibration control of the rotor is that, at a rotational speed at which it is necessary to control the vibration such as a rotational frequency region passing through a resonance point, the vibration is suppressed as small as possible with a small current, and
When the rotational speed does not require vibration control, it is necessary not to flow the current thoroughly. Achieving low vibration with small currents is the goal, and energy saving operation can provide many other attendant benefits, such as longer equipment life.

Accordingly, another object of the present invention is to reduce the resonance amplitude of unbalance vibration synchronized with the rotation speed and reduce the current flowing through the electromagnet coil of the magnetic bearing, thereby improving the proof stress of the magnetic bearing. An object of the present invention is to provide a bearing control device.

It is a further object of the present invention to provide a magnetic bearing control device which enables a thorough energy saving operation.

It is a further object of the present invention to provide a magnetic bearing control device which enables a control method predetermined according to the number of revolutions to be appropriately adopted.

[0022]

According to the present invention, the ABS control and the N-cross control are used together to control the magnetic bearing, and the ABS control and the N-cross control can be set from outside. Terms 1, 2).

Further, according to the present invention, the ABS control, the N-cross control and the FF control are used together to control the magnetic bearing. Further, the ABS control, the N-cross control, and the FF control can be set from the outside (claim 4).

Further, according to the present invention, the magnetic bearing is controlled by using the ABS control and the N straight control together (claims 5 and 6). Further, the ABS control and the N straight control can be set from outside (claims 7 and 8).

Further, according to the present invention, the magnetic bearing is controlled by using the ABS control, the N straight control, and the FF control together (claim 9). Further, it can be set from the outside (claim 10).

Further, in the present invention, control of the magnetic bearing is performed by using both the ABS claim, the N-cross control, and the N-straight control (claims 11 and 12). Further, it can be set from outside (claims 13 and 14).

Further, according to the present invention, the magnetic bearing is controlled by using the ABS control and the FF control in combination (claims 17 and 18). Furthermore, it can be set from outside (Claim 1
9, 20).

Further, according to the present invention, control of the magnetic bearing is performed by N straight control.

Further, according to the present invention, the ABS control, the N-cross control, the FF control and the N-straight control are used together to control the magnetic bearing. Further, the ABS control, the N-cross control, and the FF control can be set from the outside (claim 16).

Further, in the present invention, the magnetic bearing is controlled by using the N cross control, the N straight control, and the FF control together.

Further, in the present invention, each coefficient takes a value between 0 and 1 (Claim 23), and the rotation speed range includes the first to fourth resonance points (Claim 24).

Further, according to the present invention, schedule control is performed using a memory table (claim 25), and control processing is performed by software processing (claim 26).

[0033]

According to the present invention, under any selection of N-cross control, N-straight control or FF control with ABS control applied, attenuation of resonance amplitude, stable passage of resonance point,
The current flowing through the electromagnet is reduced.

Further, according to the present invention, since each proportional coefficient can be variously set according to the number of revolutions, optimal control for each number of revolutions can be achieved.

[0035]

【Example】

(1), N straight (FIG. 10) FIG. 10 is an embodiment showing the control method of the present invention. In the present embodiment, the rotation synchronization components x _N and y _{N obtained} by multiplying the proportional coefficients δ given by the coefficient units 23 (or gain setting units) X and 23Y.
Is added to the outputs of the control circuits 4X and 4Y. The aim is to increase the spring constant K _N , thereby shifting the resonance point higher. Vibration can be reduced by shifting the resonance point to a higher rotation speed in the rotation speed range just before the resonance point. This control method is contrasted with the N cross control method and can be called an N straight control method. The N straight control method is used as an option that works in the rotation speed range before the resonance point.

The proportional coefficient δ is preferably in the range of 0 ≦ δ. δ =
At 0, the amounts to be added are δx _N = 0, δy _N = 0,
This is an example where N straight is not applied. When δ = large, the amount to be added is δ times x _N and y _N , and becomes the N straight itself. The selection of 0 <δ is an example in which the ratio of N straights changes.

On the other hand, the proportional coefficient δ may be set to δ <0. This is used for the purpose of shifting the resonance point to a lower point and reducing vibration by avoiding resonance.

(2) ABS + N cross (FIG. 11) FIG. 11 is a view showing the embodiment. The purpose of this example is
This is to pass through the resonance point stably with the ABS control applied. The outputs x _N , y _N of the tracking filter 7 are multiplied by the proportional coefficient β on the input addition points 9X, 9Y side and negatively fed back, and the amount multiplied by the proportional coefficient α is crossed to output the control circuits 4X, 4Y. Is to give to. That is, in the PID control circuit, K _N = 0 and C _N = 0 are set in the PID control circuit by the ABS control, and the damping constant C _N (≠ 0) is separately given by the N cross control, so that the resonance amplitude is controlled only by the damping of the magnetic bearing. That's what you want to control. The control method of FIG. 11 is used for reducing the resonance amplitude during passage through the resonance point. However, β = 1, α = large, complete ABS
Control and N-cross control can be combined, but 0 ≦
By appropriately selecting α and β in β ≦ 1, 0 ≦ α, the merging strength can be arbitrarily selected. The selection of α and β is performed by the CPU 20 that has received the rotation pulse.

FIG. 12 shows experimental data when the channel cross control and the ABS control of the rotation synchronous tracking filter of this embodiment are used at the same time. The number of rotations is shown on the horizontal axis and the vibration amplitude is shown on the vertical axis. In the figure, ON is when the operation of FIG. 11 is performed (α = large), and OFF is when the channel cross is cut (corresponding to α = 0). It can be seen that the vibration amplitude is significantly reduced by turning ON, and the vibration amplitude returns to the original large vibration by turning OFF. Therefore, according to the present embodiment, the resonance amplitude of the bending mode is appropriately damped, and the critical speed can be passed with a small amplitude.

FIG. 13 shows a comparison with the conventional device, in which the horizontal axis represents the maximum amplitude at resonance and the vertical axis represents the control current. From the figure,
In the case of N crosses, both the vibration amplitude and the control current are greatly reduced as compared with the PID control of the main servo circuit alone. However, in the case of the embodiment of FIG. It is clear that a smaller current is required than in the case of. It can be seen that the current is greatly reduced as compared to the FF control. Incidentally, the data in the present invention is obtained with the set values of β = 1 and α = large. Smaller currents less than this cannot be expected in principle.

Incidentally, such a method of obtaining the coefficient is for suppressing the resonance amplitude to be small, and is an effective method only when the vehicle passes through the critical speed. After passing the critical speed considerably, such a method is unnecessary, and control of only the ABS is desired. Therefore, it is preferable to select β ≒ 1 and α = 0. Therefore, FIG.
With such a configuration, if the values of α and β are selected in accordance with the rotation speed range, the most efficient control with the minimum control current can be performed in the entire rotation speed range.

(3) ABS + N cross + FF (FIG. 1)
4) FIG. 14 shows this embodiment. In the circuit of FIG.
A two-phase / synchronous oscillator 10 is added to add a proportional coefficient γ to this output.
Is added to the outputs of the control circuits 4X and 4Y. In this circuit, the ABS control and the N cross are used together, and the FF control is used at the same time, so that the resonance amplitude during passage through the resonance point can be further reduced.

With such a configuration, when the proportional coefficients of α, β, and γ are applied according to the schedule for each rotation speed, the operation can be performed with a sufficiently small control current in the entire rotation speed range. FIG. 15 shows an example of this schedule. Let's assume a case where the operation is performed up to the fourth resonance. Since the primary and secondary resonance points are still slow, N crosses (α) are required at the resonance points as necessary.
Is used and the normal PID control is applied to other than resonance. Since it is expected that the passage of the resonance becomes considerably severe at the tertiary resonance point, N cross (α) and ABS (β) are used together near the resonance point. In addition, between the third and fourth resonance points, the number of revolutions is considerably high, so that a current reduction measure is required, and ABS (β) acts. Next, when passing through the fourth resonance point, it is considered that the acting force is insufficient with only the N cross (α) + ABS (β),
FF vibration (γ) is input for further reinforcement. After passing through the fourth resonance point, the current is reduced again at the time of non-resonance by the action of only the ABS (β).

As described above, by changing the proportional constants of α, β, and γ according to the rotation speed and the schedule, efficient operation can be performed with a small current in the entire rotation speed range.
Regarding the setting of the proportional coefficients α, β, and γ, since the number of rotations of each resonance point is known by calculation or the like before operation, such a rotation speed range is specified and α, β, and γ are set. It's easy to schedule how it works. These can be easily realized by the CPU 20. Note that α, β, and γ are
It can be set in the range of 0 ≦ α ≦ large, 0 ≦ β ≦ 1, and 0 ≦ γ ≦ large. As it approaches 0, the control associated with that coefficient becomes weaker,
Conversely, it gets stronger as you approach the upper limit.

(4) ABS + N straight (FIG. 16) FIG. 16 shows this embodiment. Fig. 1 for ABS control
This is an embodiment in which N straight control of 0 is used together. According to this embodiment, there is an advantage that the resonance point can be shifted to the higher side under the condition that the ABS control is performed, and the margin between the resonance point and the resonance point can be increased. The embodiment of FIG.
It is used to reduce the amplitude at the rotation speed just before the resonance point. Of course, δ
May be δ ≦ 0 in addition to 0 ≦ δ ≦ large. When δ is negative, the resonance point can be pushed to a smaller value at the number of revolutions after passing through the resonance point, and the margin with the resonance point can be increased to reduce the vibration.

(5) ABS + N cross + N straight (FIG. 17) FIG. 17 shows this embodiment. The N-cross control and the N-straight control are performed together with the ABS control. According to this embodiment, the current can be omitted and the oscillation amplitude can be reduced.

(6) ABS + FF (FIG. 18) FIG. 18 shows this embodiment. The FF control is performed while the ABS control is performed.

(7) ABS + N straight + FF (FIG. 20) FIG. 20 shows this embodiment. N while applying ABS control
Straight and FF are used together.

(8) N cross + N straight + FF
(Or a combination of any two) (FIG. 19) FIG. 19 is a diagram showing this embodiment. The ABS control is not performed, and N cross, N straight, and FF are used together. Furthermore, the combination of N cross and N straight, N
There may be a combination of straight and FF, and a combination of N cross and FF.

(9) ABS + N cross + N straight + FF (FIG. 1) FIG. 1 shows an embodiment thereof. The purpose of this embodiment is to achieve low vibration and low current by using ABS, N cross, N straight, and FF arbitrarily according to the number of rotations. That is, what is important for the rotor vibration control is to suppress the vibration with a current as small as possible at a rotation speed at which it is necessary to control the vibration such as the rotation speed region at the resonance point. In addition, when the rotational speed does not require vibration control, the current should not be applied thoroughly. Achieving low vibration at low currents is a goal, and energy saving operation can provide many other attendant benefits, such as long equipment life.
Therefore, it is important what kind of optional function is activated for each rotation speed range of the rotor. Speaking of unbalanced vibration, it is necessary to attenuate the system with sufficient control to suppress vibration in the rotational speed range during the passage of the resonance point. On the other hand, it is advisable to take no control over unbalanced vibration in the rotational speed range other than the resonance point.

It is the same as the case where the top rotates independently without any support, and it may be considered that it is not necessary to control the rotation speed component in the non-resonant point region. In addition, when it is close to the resonance point and wants to avoid it, increase the resonance point margin by increasing the spring force of the rotation synchronization component positively and pushing it up, or increasing it negatively and pushing it down. By doing so, control for avoiding an increase in resonance amplitude should also be established. The embodiment of FIG. 1 achieves a magnetic bearing control capable of suppressing a small driving current and low vibration over the entire rotation speed range by performing control according to the rotation speed range in consideration of such a resonance point. Things.

The case where FIG. 1 is employed for rotor vibration control of a magnetic bearing type centrifugal compressor or the like will be described below. The operating range of this type of rotor is primary bending (Nc3) and secondary bending (Nc3).
4) Often taken between resonance points. Rotor levitation characteristics: Since only the non-rotating rotor levitation technology is used, the main PID control circuit 4 in the X direction and the Y direction plays the role. Therefore, the control of the relatively low frequency region of the rigid mode resonance including the levitation characteristics is given importance to the PID control circuit, and the bending mode resonance control of the high frequency region is provided as an option described later. Conceivable. Then, tuning work is greatly reduced. At present, both the levitation characteristics of the rotor, the control of the low-frequency range, which is the resonance point of the rigid body mode, and the control of the high-frequency range, of the bending mode resonance, are borne by the main PID control circuit 4, making tuning difficult by that much. are doing. Here, the main PID control uses a type that emphasizes low frequency band control. In the present embodiment, the high frequency band control employs a control method that leaves it to an optional circuit governed by the coefficients β, α, δ, and γ. FIG. 21 shows a plan for supplying an optional circuit in this embodiment. First, a rigid mode resonance in a low frequency range appears. This may normally depend on the main PID control circuit 4. If necessary, an option for reducing the resonance amplitude such as an N cross may be inserted. The control so far can be tuned relatively easily.

Next, when the rotational speed is increased, the critical speed (resonance) of the primary bending mode of the rotor appears. At this time, since the main PID control circuit 4 has insufficient damping force, it is better to insert an option.

If the operating speed range is equal to or lower than the primary bending (Nc3) resonance point, as shown in FIG. 21, a low vibration can be obtained by pushing the primary bending point slightly upward using the N straight. If it is still insufficient and it is necessary to pass the resonance point, a method of passing the resonance point early using an N cross without using the N straight is adopted. When such an option is used, the main PID control circuit 4 does not need to be controlled, so it is preferable to operate ABS (N cut, β). Normally, in a magnetic bearing type centrifugal compressor, the operating range is set between the primary bending mode and the secondary bending mode, so that after the primary bending mode resonance point, only the ABS option control is sufficient. Extent that in the ABS function extracting rotation-synchronous components may deeper if _{deeper, (x-x N, y} -y N)
Is ideal, but (x−βx _N , y−βy _N ) and 0 <β ≦
1 may be adjusted to adjust the extraction amount. Even when the operating rotation speed is higher and the resonance point of the secondary bending mode is approaching, it is possible to make a plan for inputting the optional function based on the same idea as in the primary bending mode.

As described above, when the resonance amplitude is controlled during the passage of the bending mode primary or secondary resonance point, the unbalanced vibration is reduced by strengthening the damping constant C _N by the N cross. The control of the rotation synchronous vibration from the control circuit 4 is not required. Therefore, it is good to make the ABS function effective.

[0056] Moreover, since the by strengthening the spring K _N by N straight Similarly, when shifting the resonance point by N straight functionality, the contribution from the main PID control circuit 4 is unnecessary. Therefore, it is good to make the ABS function effective at this time. In any case, the ABS function is completely β =
Ideally, it is set to 1. However, it is actually necessary to set an appropriate value between 0 <β <1 in order to prevent instability due to switching. In any case, β may be gradually changed from 0 to 1, and a convenient value may be set as the ABS function value.

Of course, when switching from N cross to N straight (α ≠ 0, δ = 0) → (α = 0, δ ≠)
Rather than completely changing the ideal as in 0), it is actually desirable to have a measure that gradually changes the degree of α from large to small and δ from small to large or gradually changes the magnitude of both. .

The values of α, β, δ, and γ to be changed may be experimentally adjusted by actual rotation of the rotor. For example, β adjustment: monitor the current waveform and select so that the current is reduced by, for example, about ３. Adjustment of α: Select a point where the resonance amplitude can be reduced to about 1/3, for example. Adjustment of δ: Select a value such that the amplitude can be reduced to about で at the rotation speed near the resonance point. Adjustment of γ: Select a phase φ and a gain γ such that the resonance amplitude is reduced to about １ ／, for example. Alternatively, the coefficient setting value can be predicted in advance by simulation calculation.

During the passage through the resonance point, the FF excitation can be further optionally added. However, compared to unbalance cancellation by FF excitation, A
The data that allows the BS + N cross to pass through the resonance point with a smaller resonance amplitude and a smaller current are as shown in FIG. 13, and it may be unnecessary to use the FF excitation.
When a new unbalance is added to the rotor,
The phase in the canceling direction already adjusted by the FF vibration does not match, and there is a possibility that the vibration may be increased in a direction to increase the vibration. Therefore, attention must be paid to how to use the FF vibration function.

As described above, in the embodiment (9), as the optional functions utilizing the output signal of the tracking filter 7, the degree β of the ABS function, the degree α of the N cross function, and the degree Coefficients are provided as the degree δ and the degree γ of the FF vibration function. A feature is that scheduling is controlled by a strategy to change these coefficients in accordance with the rotation speed range, for example, before, during, or after passing the resonance point. In this way, optimal energy-saving magnetic bearing control with small vibration and small current is always achieved in the entire rotation speed range. Further, the load on the main PID control circuit 4 is reduced by this optional function, and tuning is facilitated. That is, the phase advance of the PID control circuit 4 is made as large as possible, and the oscillation phenomenon of the servo feedback system due to the high gain at high frequency is not bothered.

Changing the coefficient of the coefficient unit according to the plan by such a gain scheduling can be easily realized by using the computer (CPU) 20. That is, as shown in the concept of FIG. 1, the CPU 20 can recognize the rotation speed of the rotor and change the gain according to the stored schedule according to the rotation speed. Each coefficient unit may be a potentiometer, an amplifier whose gain can be adjusted, or a digital setting unit. Then, the CPU 20 mechanically or electronically sets the coefficient in accordance with the above. FIG. 22 shows an example of the gain schedule.

FIG. 22 (a) shows a plan in which vibration is reduced by the damping force of the N cross (α) during the passage of resonance in the primary bending or secondary bending mode while using the ABS function (β). .

FIG. 22B uses an N cross (α) to pass through the resonance point in the rigid body mode. Then, near the bending primary mode resonance point, FF excitation (γ) for imbalance cancellation is applied just before the resonance point, and finally an N cross (α) is applied at the time of passing the resonance point. Of course, the ABS function (β) is also used. In this way, the beam passes through the bending first mode resonance point and reaches the bending second mode resonance. Here, the strategy of shifting the bending second-order mode resonance point upwards is also adopted, and N straight (δ) is input while FF excitation (γ) for imbalance cancellation is input and the spring constant is enhanced. It is. In this way, the rotation speed range is finely divided,
An example is shown in which scheduling is performed while using and using the optimal optional functions according to the situation.

As described above, various schedules are established. This schedule can be easily realized by storing the schedule in the memory of the CPU 20 and changing the degrees of the coefficients α, β, γ, and δ.

FIG. 1 has been described according to an actual circuit configuration based on channels in the X and Y directions. FIG. 23 conceptually illustrates that a complex number representation is introduced and has a complex number representation.

In FIG. 1, the main PID control circuit 4, the power amplifier 5, and the electromagnet coil 2 are basically formed in the same specifications from the detected displacement signals (x, y) in the X direction and the Y direction, and are basically symmetrical. ing. Therefore, in order to simplify the expression, a complex number z = x + iy is set. The expression of the circuit diagram is also simplified by making the X direction channel correspond to the real part of the complex number and the Y direction channel to the imaginary part. That is FIG.

For example, as shown in FIG.
Are output in the X and Y directions respectively (x ′,
y ')

(Equation 3) Complex number z '= x' + iy '

(Equation 4) Thus, the expression of one channel is obtained, which is like the main control circuit of FIG.

Such simplification by introducing complex numbers can be applied to the cross circuit and the straight circuit of the output section of the tracking filter 7. Now, in FIG. 1, the correspondence of the complex number of FIG. 23 to the output signal (x _N , y _N ) of the tracking filter is shown.

(Equation 5) And Then, the input signal to the power amplifier is (P _X ,
P _Y ), the complex number correspondence in FIG.

(Equation 6) And Then in Figure 1

(Equation 7) So

(Equation 8)

As seen from the correspondence of complex numbers in FIG. 23, the transfer function from z _N to P _N for the output of the tracking filter 7 is

(Equation 9) It is said that

(Equation 10) It is. Therefore, as can be understood by comparing Equations (1) and (2).

[Equation 11] Therefore

(Equation 12) Is established. 1 can be processed in the same way, and it can be understood that FIG. 1 showing two channels in the X and Y directions can be simplified to one channel display by introducing complex numbers as shown in FIG. . Therefore, referring to FIG. 23, when the N cross function is activated, α ≠
0, δ = 0, which corresponds to setting θ = 90 °.

When the N straight function is activated, α
= 0, δ ≠ 0, which is equivalent to setting θ = 0 °.

In the case of the two-phase oscillator 10 in FIG.
Cos wave and sine wave are generated in the direction and the Y direction.

(Equation 13) In the complex correspondence of FIG. 23, the output of the two-phase oscillator is

[Equation 14] Assuming that the amplitude is A and the phase is φ

(Equation 15) By adjusting A and φ, it is possible to search for a phase in which the unknown imbalance is canceled.

In this way, the actual X and Y direction representations of FIG. 1 are conceptually converted to one-channel representations as shown in FIG. 23 by introducing the complex Z representation. While monitoring the number of rotations, the gain G and phase θ of the output of the tracking filter 7 manually assembled in the feedback system, and the gain A and phase φ indicating the amount of FF excitation.
Can be realized by changing.

As shown in FIG. 23, the computer (CPU) monitors the number of revolutions and makes the gains G and A and the phases θ and φ variable in a predetermined gain phase schedule. By doing so, optimal energy-saving control (small vibration and small current) can always be realized.

(10) α, β,
Setting of γ and δ (FIGS. 24 and 25) α, β,
FIG. 24 shows a circuit for setting γ and δ. This is a kind of computer, and the CPU 20 and the main memory 2
1, an input unit 22 and an output unit 24 are commonly connected. The main memory 21 stores the original O for operating the CPU 20.
It has schedule software in addition to S (operating system). The input unit 22 is a circuit that captures a rotation pulse. The output unit 24 is a circuit that outputs the coefficients (α, β, γ, δ) set by the CPU 20. According to the circuit of FIG. 24, the CPU 20 successively takes in rotation pulses from the input unit 22, activates schedule software, and stores coefficients α, β, γ, and δ determined according to the number of rotations in the memory 2.
Read from 1. This is set for each coefficient via the output unit 24. As a matter of course, in FIG. 10, only δ is set, in FIG. 11, α and β are set, and in FIG. 1, α, β, γ, and δ are set.
Make the settings for

FIG. 25 shows a schedule control table 22 provided in the main memory 21. A necessary coefficient is read out by accessing the table 22 using the rotation speed as an address. In some cases, the schedule software is stored in a ROM provided separately from the main memory 21.

(11) Example of control by computer (FIG. 26) In FIGS. 10, 11 and 1, etc., the power amplifiers 5X, 5Y
The preceding circuit was an example of a discrete circuit. Instead of this discrete circuit, it is also possible to carry out by software processing of a computer. This embodiment is shown in FIG. In the main memory 21, in addition to the schedule software,
The functions of the PID control circuits 4X and 4Y, the function of the tracking filter 7, the function of each coefficient (α, β, γ, δ) setting device,
It has control software to achieve various addition and subtraction functions. Then, a rotation pulse from the outside is taken in through the input unit 22 and the displacement is taken in through the input unit 26, and the CPU 20 activates the control software and the schedule software to execute FIG.
0, the processing determined by FIG. The result through the output unit 24 to P _x, provided to the drive unit 25 as P _y command. The drive unit 25 creates actual P _x and P _y from the command, and supplies these to the power amplifiers 5X and 5Y.

According to this embodiment, complete softwareization could be achieved. The schedule software and control software are RO
There is also an example in which it is provided in M.

(12) x _N , y _N under ABS control
(FIGS. 27 to 30) This is a modified form of the ABS control, in which the output signals x _N and y _N of the rotation synchronous tracking filter 7 are fed back so as to be subtracted from the original displacement signals x and y. Is the way. Assuming that the proportionality constant indicating the amount of this feedback is β ′, there is a difference between β and β in FIG.

(Equation 16) There is a relationship. Therefore, β ′ = infinity in order to completely remove the rotation synchronization components x _N and y _N from the original signals x and y. Therefore, β 'may be set to a larger value to obtain a strong ABS that increases the sampling amount.

Embodiments in this feedback type ABS are shown in FIGS. 27 to 33, and the correspondence is as follows. Fig. 27 Fig. 1 Fig. 28 Fig. 16 Fig. 29 Fig. 29 Fig. 30 Fig. 30 Fig. 31 Fig. 31 Fig. 18 Fig. 32 Fig. 32 Fig. 17 Fig. 33 Fig. 20 Even in such various embodiments of the feedback type ABS, the CPU 20 24 and FIG. 2
Needless to say, the processing in step 6 may be performed. still,
In the claims relating to the feedback type ABS, β is indicated in place of β ′, but this is for convenience of description.

[0080]

According to the present invention, the damping force against the forward vibration when passing through the resonance point can be improved, so that the vibration can be passed with a small resonance amplitude against the unbalanced vibration, and the resonance point can be obtained even if the balance accuracy of the rotor is somewhat poor. Has the effect of simplifying the balance work, and even if the unbalance increases due to foreign matter adhering to the rotor during rotation, vibration at the resonance point is small. Since the current can be passed, the current flowing through the electromagnet coil can be reduced, and there is an effect that the proof strength of the power amplifier is improved.

Further, by adjusting each of the proportional coefficients α, β, and γ according to the number of rotations, it is possible to achieve optimal control (small current and small vibration) for each number of rotations. Thus, the life of the electronic circuit of the power amplifier is prolonged by always performing the operation with the small current. Since the force on the magnetic bearing is also reduced, the life of the parts is extended.

By using the δ function of the N straight, the resonance point can be shifted upward, and the operating range can be extended up to high speed rotation.

[Brief description of the drawings]

FIG. 1 is an embodiment diagram for performing a combined control of ABS control, N cross control + N straight control, and FF control of the present invention.

FIG. 2 is a diagram showing conventional PID control.

FIG. 3 is a diagram showing conventional ABS control.

FIG. 4 is a diagram showing conventional criticality control.

FIG. 5 is a diagram showing conventional N-cross control.

FIG. 6 is a diagram showing the FF control of the prior application.

FIG. 7 is an explanatory diagram of first to fourth order resonance points.

FIG. 8 is a diagram showing the relationship between the operating speed range and the control current in the conventional and prior applications.

FIG. 9 is a vibration response diagram by ABS control.

FIG. 10 is an embodiment diagram for performing N straight control according to the present invention.

FIG. 11 is an embodiment diagram for performing combined control of ABS control and N-cross control according to the present invention.

FIG. 12 is a diagram illustrating an example of vibration response under ABS control and N-cross control.

FIG. 13 is a diagram showing test data indicating a relationship between a vibration amplitude at the time of resonance by various controls and a drive current.

FIG. 14 is an embodiment diagram for performing combined control of ABS control, N-cross control, and FF control of the present invention.

FIG. 15 is a diagram showing an example of a time schedule in the embodiment of FIG.

FIG. 16 is an embodiment diagram for performing combined control of ABS control and N straight control of the present invention.

FIG. 17 is an embodiment diagram for performing combined control of ABS control, N cross control, and N straight control of the present invention.

FIG. 18 is an embodiment diagram for performing combined control of ABS control and FF control of the present invention.

FIG. 19 shows N cross and N straight control and FF of the present invention.
FIG. 9 is an embodiment diagram for performing combined control with control.

FIG. 20 shows ABS control, N straight control, and F of the present invention.
It is an Example figure for performing combination control with F control.

FIG. 21 is a diagram illustrating an example of schedule control in the embodiment of FIG. 1;

FIG. 22 is a diagram illustrating another example of schedule control in FIG. 1;

FIG. 23 is a diagram showing an equivalent circuit of the embodiment of FIG. 1 of the present invention.

FIG. 24 is a diagram showing an embodiment of computer control according to the present invention.

FIG. 25 is a diagram showing an example of a memory table according to the present invention.

FIG. 26 is a control system diagram by computer processing of the present invention.

FIG. 27 is an embodiment diagram for performing a combined control of the feedback type ABS control, the N cross control, the N straight control, and the FF control according to the present invention.

FIG. 28 is an embodiment diagram for performing combined control of feedback type ABS control and N straight control according to the present invention.

FIG. 29 is an embodiment diagram for performing combined control of feedback type ABS control, N-cross control, and FF control according to the present invention.

FIG. 30 is an embodiment diagram for performing combined control of feedback ABS control and N-cross control according to the present invention.

FIG. 31 shows feedback type ABS control and FF of the present invention.
FIG. 9 is an embodiment diagram for performing combined control with control.

FIG. 32 is an embodiment diagram for performing combined control of ABS control, N cross control, and N straight control of the present invention.

FIG. 33 shows ABS control, N straight control, and F of the present invention.
It is an Example figure for performing combination control with F control.

[Explanation of symbols]

 2X, 2Y Electromagnetic coil 4X, 4Y Control circuit using PID element 5X, 5Y Power amplifier 7 Tracking filter 10 Two-phase / synchronous oscillator 20 CPU

──────────────────────────────────────────────────の Continuing from the front page (72) Inventor Yasuo Fukushima 603 Tsuchiura-machi, Tsuchiura-shi, Ibaraki Pref. Hitachi, Ltd. Tsuchiura Plant, Hitachi, Ltd. (72) Inventor Tadashi Kanagi 603, Kandamachi, Tsuchiura-shi, Ibaraki Pref., Hitachi, Ltd. Tsuchiura Plant, Hitachi, Ltd. Person Naofumi Sakanashi 603, Kandate-cho, Tsuchiura-city, Ibaraki Pref. Hitachi, Ltd. Tsuchiura Works (56) References JP-A-1-126424 (JP, A) JP-A-52-93853 (JP, A) JP-A-3- 124242 (JP, A) JP-A-61-262225 (JP, A) JP-A-3-255240 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) F16C 32/04

Claims (27)

(57) [Claims] 1. A displacement detecting means for detecting displacements x and y of two rotors supported by a magnetic bearing device from two reference positions perpendicular to each other at a right angle to a rotation axis. The component x _N synchronized with the rotor speed of
filter means for extracting y _N , first control means for inputting a difference amount between the displacement amount x and an amount proportional to the component x _N (proportional coefficient β), and outputting a first control signal; A second control unit that receives a difference amount between the displacement amount y and an amount proportional to the component y _N (proportional coefficient β) and outputs a second control signal; and the first control signal and the component y _N. A power amplifying means for amplifying a difference amount from an amount (proportional coefficient α) proportional to the second control signal and an amount ( _N) proportional to the second control signal and the component xN. Second power amplifying means for controlling the current flowing through the coil of the magnetic bearing by amplifying the amount of addition with the proportional coefficient α), and making the proportional coefficients α and β adjustable according to the rotation speed of the rotor. A magnetic bearing control device comprising: setting means. 2. A displacement detecting means for detecting displacement amounts x and y of two rotors supported by a magnetic bearing device from two reference positions perpendicular to each other at right angles to a rotation axis, and first and second displacement detecting means.
First and second control means for respectively outputting the first and second control signals, and the first input signal to the first control means and the second input signal to the second control means, and the rotor speed is set to Filter means for extracting the synchronized components x _N , y _N , and a difference between the displacement x and an amount proportional to the component x _N (proportional coefficient β) as a first input to the first control means A first difference means to be a signal, the displacement amount y and the component y _N
A second difference unit that uses a difference amount from an amount (proportional coefficient β) proportional to the second control unit as a second input signal to the second control unit;
As input difference amount between an amount proportional to the first control signal and the component y _N is the output of the first control means (proportional coefficient alpha), a current flowing through the coil of the magnetic bearing by amplifying the difference amount a first power amplifier means for controlling inputs the addition amount of the quantity proportional to the second control signal and the component x _N, which corresponds to the output of the second control means (proportional coefficient alpha), the addition amount A power amplifying means for amplifying the current and controlling a current flowing through a coil of the magnetic bearing; and a setting means for adjusting and adjusting the proportional coefficients α and β in accordance with the rotation speed of the rotor. Bearing control device. 3. Displacement detecting means for detecting displacement amounts x and y of two rotors supported by a magnetic bearing device from two reference positions perpendicular to each other at right angles to the rotation axis, and detecting the displacement amounts x and y at that time. The component x _N synchronized with the rotor speed of
filter means for extracting y _N , first control means for inputting a difference amount between the displacement amount x and an amount proportional to the component x _N (proportional coefficient β), and outputting a first control signal; A second control unit that receives a difference amount between the displacement amount y and an amount proportional to the component y _N (proportional coefficient β) and outputs a second control signal; and the first control signal and the component y _N. the amount of the first power amplifying means for controlling the current flowing through the coils of the magnetic bearing by amplifying the difference amount, in proportion to the second control signal and the component x _N with quantity proportional (proportionality coefficient alpha) to (Proportional coefficient α)
And a second power amplifying means for controlling the current flowing through the coil of the magnetic bearing by amplifying the amount of addition of the sine wave and the cosine wave in synchronization with the rotation pulse. Means for applying an amount proportional to the cosine wave output (proportional coefficient γ) to the input or output side of the first control means, and an amount proportional to the sine wave output (proportional coefficient γ) Means for applying to the input or output side of the second control means. 4. The magnetic bearing control device according to claim 1, wherein
A two-phase synchronous oscillator that oscillates a sine wave and a cosine wave in synchronization with a rotation pulse, and an amount proportional to the cosine wave output (proportional coefficient γ)
Means for applying to the input or output side of the first control means, and means for applying an amount proportional to the sine wave output (proportional coefficient γ) to the input or output side of the second control means. A magnetic bearing control device provided with the setting means, wherein the setting means makes γ variable in addition to the proportional coefficients α and β according to the rotation speed of the rotor. 5. A displacement detecting means for detecting displacements x, y of a rotor supported by a magnetic bearing device from two reference positions perpendicular to each other at right angles to a rotation axis, and detecting the displacements x, y at that time. The component x _N synchronized with the rotor speed of
filter means for extracting y _N , first control means for inputting a difference amount between the displacement amount x and an amount proportional to the component x _N (proportional coefficient β), and outputting a first control signal; as input difference amount between an amount proportional to the displacement amount y with components y _N (proportionality factor beta), and second control means for outputting a second control signal, said first control signal and the component x _N an amount proportional to the first power amplifier means for controlling the current flowing through the coil of the magnetic bearing by amplifying the addition amount of the (proportional coefficient [delta]), an amount proportional to the second control signal and the component y _N ( And a second power amplifying means for amplifying the amount of addition with the proportional coefficient δ) to control the current flowing through the coil of the magnetic bearing. 6. A displacement detecting means for detecting displacement amounts x and y of two rotors supported by a magnetic bearing device from two reference positions perpendicular to each other at right angles to a rotation axis, and first and second displacement detecting means.
First and second control means for respectively outputting the first and second control signals, and the first input signal to the first control means and the second input signal to the second control means, and the rotor speed is set to Filter means for extracting the synchronized components x _N , y _N , and a difference between the displacement x and an amount proportional to the component x _N (proportional coefficient β) as a first input to the first control means a first differentiating means to the signal, the displacement y and an amount proportional to the component y _N (proportional coefficient beta) and difference amount and the second to a second input signal to said second control means Difference means, a first control signal output from the first control means, and a component x _N
A first power amplifying means for inputting an amount of addition to an amount proportional to (a proportional coefficient δ), amplifying the amount of addition and controlling a current flowing through a coil of the magnetic bearing, and an output of the second control means. in a second as input addition amount of the control signal and the amount proportional to the component y _N (proportional coefficient [delta]), a second power amplifier for controlling the current flowing through the coil of the magnetic bearing by amplifying the addition amount Means for controlling a magnetic bearing. 7. A displacement detecting means for detecting displacements x and y of two rotors supported by a magnetic bearing device from two reference positions perpendicular to each other at right angles to a rotation axis, and a component x synchronized with a rotor rotation speed. _N, and a filter means for removing the y _N, and inputs the difference amount between an amount proportional to the displacement x and the component x _N (proportionality factor beta), a first control means for outputting a first control signal A second control means for inputting a difference amount between the displacement amount y and an amount proportional to the component y _N (proportional coefficient β), and outputting a second control signal; a first power amplifier means for controlling the current flowing through the coil of the magnetic bearing by amplifying the addition amount of the quantity proportional to the x _N (proportional coefficient [delta]), in proportion to the second control signal and the component y _N The amount of addition to the amount (proportional coefficient δ) is amplified and the current flowing through the coil of the magnetic bearing is amplified. Second power amplification means for controlling the flow;
And a setting means for adjusting and adjusting the proportional coefficients β and δ according to the rotation speed of the rotor. 8. A displacement detecting means for detecting displacements x and y of two rotors supported by a magnetic bearing device from two reference positions perpendicular to each other at right angles to a rotation axis, and first and second displacement detecting means.
First and second control means for respectively outputting the first and second control signals, and the first input signal to the first control means and the second input signal to the second control means, and the rotor speed is set to Filter means for extracting the synchronized components x _N , y _N , and a difference between the displacement x and an amount proportional to the component x _N (proportional coefficient β) as a first input to the first control means a first differentiating means to the signal, the displacement y and an amount proportional to the component y _N (proportional coefficient beta) and difference amount and the second to a second input signal to said second control means Difference means, a first control signal output from the first control means, and a component x _N
A first power amplifying means for inputting an amount of addition to an amount proportional to (a proportional coefficient δ), amplifying the amount of addition and controlling a current flowing through a coil of the magnetic bearing, and an output of the second control means. in a second as input addition amount of the control signal and the amount proportional to the component y _N (proportional coefficient [delta]), a second power amplifier for controlling the current flowing through the coil of the magnetic bearing by amplifying the addition amount And a setting means for adjusting and adjusting the proportional coefficients β and δ according to the rotation speed of the rotor. 9. The magnetic bearing control device according to claim 5, wherein
A two-phase synchronous oscillator that oscillates a sine wave and a cosine wave in synchronization with a rotation pulse, and an amount proportional to the cosine wave output (proportional coefficient γ)
Means for applying to the input or output side of the first control means, and means for applying an amount proportional to the sine wave output (proportional coefficient γ) to the input or output side of the second control means. A magnetic bearing control device provided. 10. The magnetic bearing control device according to claim 7, wherein a sine wave and a cosine wave are oscillated in synchronization with the rotation pulse.
A phase-locked oscillator, a means for applying an amount proportional to the cosine wave output (proportional coefficient γ) to the input or output side of the first control means, and an amount proportional to the sine wave output (proportional coefficient γ) Means for applying to the input or output side of the second control means, and the setting means includes a proportional coefficient β,
A magnetic bearing control device in which γ in addition to δ can be adjusted according to the rotation speed of the rotor. 11. A displacement detecting means for detecting displacements x and y of two rotors supported by a magnetic bearing device from two reference positions perpendicular to each other at right angles to the rotation axis, and a displacement detecting means for detecting displacements x and y based on the displacements x and y. The component x _N synchronized with the rotor speed of
filter means for extracting y _N , first control means for inputting a difference amount between the displacement amount x and an amount proportional to the component x _N (proportional coefficient β), and outputting a first control signal; A second control unit that receives a difference amount between the displacement amount y and an amount proportional to the component y _N (proportional coefficient β) and outputs a second control signal; and the first control signal and the component y _N. a first power amplifier means for controlling the current flowing through the coil of the magnetic bearing to amplify the synthesis of an amount proportional amount proportional to the difference amount and components x _N and (proportionality factor alpha) (proportional coefficient [delta]) in , The second
Controlling the control signal and the current flowing through the coil of the magnetic bearing composite amount amplify the amount proportional to the addition amount and the component y _N and the amount proportional to the component x _N (proportionality factor alpha) (proportional coefficient [delta]) A magnetic bearing control device comprising: a second power amplifying means. 12. A displacement detecting means for detecting displacements x and y of a rotor supported by a magnetic bearing device from two reference positions perpendicular to each other at right angles to a rotation axis, and first and second control signals. First and second control means for respectively outputting a first input signal to the first control means and a second input signal to the second control means. A filter means for extracting x _N and y _N and a difference amount between the displacement amount x and an amount proportional to the component x _N (proportional coefficient β) are used as a first input signal to the first control means. A first difference unit, and a second difference unit that uses a difference amount between the displacement amount y and an amount proportional to the component y _N (proportional coefficient β) as a second input signal to the second control unit. , difference proportional to the first control signal and the component y _N is the output of the first control means (Proportionality factor alpha) and component _{x N}
The first power amplifying means for controlling the current flowing through the coil of the magnetic bearing by amplifying the input combined quantity and the output of the second control means, taking an added amount (proportional coefficient δ) proportional to the input. addition amount proportional to the second control signal and the component x _N (proportionality factor alpha) and addition amount proportional to component y _N (the proportional coefficient [delta]) as input, to the coil of the magnetic bearing by amplifying the input composite amount A magnetic bearing control device, comprising: a second power amplifier for controlling a flowing current. 13. A displacement detecting means for detecting displacements x and y of two rotors supported by a magnetic bearing device from two reference positions perpendicular to each other at right angles to a rotation axis, and detecting the displacements x and y based on the displacements x and y. The component x _N synchronized with the rotor speed of
filter means for extracting y _N , first control means for inputting a difference amount between the displacement amount x and an amount proportional to the component x _N (proportional coefficient β), and outputting a first control signal; A second control unit that receives a difference amount between the displacement amount y and an amount proportional to the component y _N (proportional coefficient β) and outputs a second control signal; and the first control signal and the component y _N. a first power amplifier means for controlling the current flowing through the coil of the magnetic bearing to amplify the synthesis of an amount proportional amount proportional to the difference amount and components x _N and (proportionality factor alpha) (proportional coefficient [delta]) in , The second
Controlling the control signal and the current flowing through the coil of the magnetic bearing composite amount amplify the amount proportional to the addition amount and the component y _N and the amount proportional to the component x _N (proportionality factor alpha) (proportional coefficient [delta]) A magnetic bearing control device comprising: a second power amplifying means; and a setting means for adjusting and adjusting the proportional coefficients α, β, and δ according to the rotation speed of the rotor. 14. A displacement detecting means for detecting displacements x and y of two rotors supported by a magnetic bearing device from two reference positions perpendicular to each other and perpendicular to the rotation axis, and first and second control signals. First and second control means for respectively outputting a first input signal to the first control means and a second input signal to the second control means. A filter means for extracting x _N and y _N and a difference amount between the displacement amount x and an amount proportional to the component x _N (proportional coefficient β) are used as a first input signal to the first control means. First difference means, the displacement amount y and the component y _N
A second difference means that uses a difference amount from a quantity (proportional coefficient β) proportional to the second control means as a second input signal to the second control means, and a first control which is an output of the first control means. The difference amount (proportional coefficient α) proportional to the signal and the component y _N and the component x
The first power amplifying means for inputting an addition amount (proportional coefficient δ) proportional to _N and amplifying the input synthesis to control the current flowing through the coil of the magnetic bearing, and the output of the second control means. addition amount proportional to the second control signal and the component x _N (proportionality factor alpha) and addition amount proportional to component y _N (the proportional coefficient [delta]) as input, to the coil of the magnetic bearing by amplifying the input composite amount A magnetic bearing control device comprising: second power amplifying means for controlling a flowing current; and setting means for adjusting and varying the proportional coefficients α, β, and δ according to the rotation speed of the rotor. 15. The two-phase synchronous oscillator according to claim 11, wherein a cosine wave and a sine wave are oscillated in synchronization with the rotation pulse and the phase of the rotation pulse is variably set, and the cosine wave output is proportional to the cosine wave output. Amount (proportional coefficient γ)
Means for applying to the input or output side of the first control means, and means for applying an amount proportional to the sine wave output (proportional coefficient γ) to the input or output side of the second control means. Equipped with magnetic bearing control device. 16. The magnetic bearing control device according to claim 15, wherein a sine wave and a cosine wave are oscillated in synchronization with the rotation pulse.
A phase-locked oscillator, a means for applying an amount proportional to the cosine wave output (proportional coefficient γ) to the input or output side of the first control means, and an amount proportional to the sine wave output (proportional coefficient γ) Means for applying to the input or output side of the second control means, and the setting means comprises a proportional coefficient α,
A magnetic bearing control device in which γ in addition to β and δ can be adjusted and changed according to the rotation speed of the rotor. 17. A displacement detecting means for detecting displacements x and y of two rotors supported by a magnetic bearing device from two reference positions perpendicular to each other at right angles to a rotation axis, and the displacement detecting means detects the displacements x and y at that time. The component x _N synchronized with the rotor speed of
filter means for extracting y _N , first control means for inputting a difference amount between the displacement amount x and an amount proportional to the component x _N (proportional coefficient β), and outputting a first control signal; A second control unit that receives a difference between the displacement y and an amount proportional to the component y _N (proportional coefficient β) and outputs a second control signal; and amplifies the first control signal. A first power amplifying means for controlling a current flowing in a coil of the magnetic bearing; a second power amplifying means for amplifying the second control signal to control a current flowing in the coil of the magnetic bearing; A two-phase synchronous oscillator that oscillates a sine wave and a cosine wave in synchronization with a pulse, and an amount proportional to the cosine wave output (proportional coefficient γ)
Means for applying to the input or output side of the first control means, and means for applying an amount proportional to the sine wave output (proportional coefficient γ) to the input or output side of the second control means. A magnetic bearing control device provided. 18. Displacement detecting means for detecting displacement amounts x and y of two rotors supported by a magnetic bearing device from two reference positions perpendicular to each other at right angles to a rotation axis, and first and second control signals. First and second control means for respectively outputting a first input signal to the first control means and a second input signal to the second control means. A filter means for extracting x _N and y _N and a difference amount between the displacement amount x and an amount proportional to the component x _N (proportional coefficient β) are used as a first input signal to the first control means. A first difference unit, and a second difference unit that uses a difference amount between the displacement amount y and an amount proportional to the component y _N (proportional coefficient β) as a second input signal to the second control unit. Amplifies the first control signal, which is the output of the first control means, and supplies it to the coil of the magnetic bearing. First power amplifying means for controlling a current to be supplied, and second power for controlling a current flowing through a coil of the magnetic bearing by amplifying a second control signal output from the second control means and the added amount. Amplifying means, and
A two-phase synchronous oscillator that oscillates a sine wave and a cosine wave in synchronization with a rotation pulse, and an amount proportional to the cosine wave output (proportional coefficient γ)
Means for applying to the input or output side of the first control means, and means for applying an amount proportional to the sine wave output (proportional coefficient γ) to the input or output side of the second control means. A magnetic bearing control device provided. 19. A displacement detecting means for detecting displacements x and y of two rotors supported by a magnetic bearing device from two reference positions perpendicular to each other at right angles to the rotation axis, and a displacement detecting means for detecting displacements x and y based on the displacements x and y. The component x _N synchronized with the rotor speed of
filter means for extracting y _N , first control means for inputting a difference amount between the displacement amount x and an amount proportional to the component x _N (proportional coefficient β), and outputting a first control signal; as input difference amount between an amount proportional to the displacement amount y with components y _N (proportionality factor beta), and second control means for outputting a second control signal, and said first control signal is amplified First power amplifying means for controlling the current flowing through the coil of the magnetic bearing
A second power amplifying means for amplifying the second control signal and controlling a current flowing through a coil of the magnetic bearing; and oscillating a sine wave and a cosine wave in synchronization with a rotation pulse.
A phase-locked oscillator, a means for applying an amount proportional to the cosine wave output (proportional coefficient γ) to the input or output side of the first control means, and an amount proportional to the sine wave output (proportional coefficient γ) A magnetic bearing control device comprising: means for applying to the input or output side of the second control means; and setting means for making the proportional coefficients β and γ adjustable and variable according to the rotation speed of the rotor. 20. Displacement detecting means for detecting displacements x and y of a rotor supported by a magnetic bearing device from two reference positions perpendicular to each other at right angles to a rotation axis, and first and second control signals. First and second control means for respectively outputting a first input signal to the first control means and a second input signal to the second control means. A filter means for extracting x _N and y _N and a difference amount between the displacement amount x and an amount proportional to the component x _N (proportional coefficient β) are used as a first input signal to the first control means. a first differentiating means, a second differential means for the second input signal of the difference amount between an amount proportional to the displacement amount y with components y _N (proportionality factor beta) to said second control means Amplifying the first control signal, which is the output of the first control means, to the coil of the magnetic bearing First power amplifying means for controlling a current to be supplied, and second power for controlling a current flowing through a coil of the magnetic bearing by amplifying a second control signal output from the second control means and the added amount. Amplifying means, and oscillates a sine wave and a cosine wave in synchronization with the rotation pulse.
A phase-locked oscillator, a means for applying an amount proportional to the cosine wave output (proportional coefficient γ) to the input or output side of the first control means, and an amount proportional to the sine wave output (proportional coefficient γ) A magnetic bearing control device comprising: means for applying to the input or output side of the second control means; and setting means for making the proportional coefficients β and γ adjustable and variable according to the rotation speed of the rotor. 21. A displacement detecting means for detecting displacements x and y of two rotors supported by a magnetic bearing device from two reference positions perpendicular to each other and perpendicular to the rotation axis, and inputting the displacements x and y. First and second control means for outputting first and second control signals, respectively, and a first input signal to the first control means and a second input signal to the second control means Filter means for extracting components x _N and y _N synchronized with the rotor speed, and a first control signal output from the first control means and a difference amount proportional to the component y _N (proportional coefficient α) first the differential amount and the addition amount proportional to components x _N as input (proportional coefficient [delta]), to control the current flowing through the coil of the magnetic bearing by amplifying the input composite of the
A two-phase synchronous oscillator that oscillates a sine wave and a cosine wave in synchronization with a rotation pulse, and an amount proportional to the cosine wave output (proportional coefficient γ). A means for applying an amount proportional to the sine wave output (proportional coefficient γ) to an input or output side of the second control means; and a means for applying the proportional coefficients β and γ
Setting means for adjusting the variable according to the rotation speed of the rotor,
A magnetic bearing control device comprising: 22. The magnetic bearing control device according to claim 21, further comprising setting means for adjusting and adjusting the proportional coefficients α, δ, and γ in accordance with the rotation speed of the rotor. 23. A magnetic bearing control device according to claim 15, wherein each proportional coefficient has an arbitrary value of 0 or more and 1 or less. 24. A magnetic bearing control device according to claim 15, wherein the rotation speed of the rotor includes the first to fourth resonance points of the magnetic bearing. 25. The setting of each coefficient according to claim 15,
A magnetic bearing control device in which a processor that refers to a table storing a relationship between a rotation speed and each coefficient performs monitoring while monitoring the rotation speed. 26. The magnetic bearing control device according to claim 15, wherein processing up to the input to the first and second power amplifying means is performed internally by a processor. 27. Displacement detecting means for detecting displacements x, y of two rotors supported by a magnetic bearing device from two reference positions perpendicular to each other at right angles to a rotation axis, and a displacement detecting means for detecting displacements x, y at that time. The component x _N synchronized with the rotor speed of
filter means for extracting y _N, and inputs the displacement x, the first control means for outputting a first control signal, and inputs the displacement y, the output of the second control signal and second control means, a first power amplifier means for controlling the current flowing through the first control signal and the coil of the magnetic bearing by amplifying the addition amount of the amount proportional to the component x _N (proportional coefficient [delta]) , the second control signal and a second power amplifier means an amount proportional to the component y _N amplifies the addition amount of the (proportional coefficient [delta]) for controlling the current flowing through the coil of the magnetic bearing, magnetic bearing more composed Control device.