JP3322714B2 - Panel interlock - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement in panel interlock of various devices such as a semiconductor manufacturing device.
In particular, the present invention relates to a simplified configuration.

[0002]

2. Description of the Related Art Various internal processing apparatuses such as semiconductor manufacturing apparatuses are provided with openable panels such as doors and covers on each surface such as a front surface or a rear surface for internal maintenance. A processing apparatus that uses a chemical solution or gas that is harmful to the human body is dangerous if operated with the panels such as doors and covers open. For this reason, conventionally, in this type of apparatus, a panel interlock that prevents the operation of the processing apparatus when the opening of the panel is detected is used.

In this panel interlock, a detecting means for detecting the opening of a panel is provided for each panel, and when any panel is opened, the opening is detected and the apparatus is stopped.

[0004]

However, in the conventional panel interlock, a detecting means is provided for each panel. For this reason, the number of detecting means also increases as the number of panels increases, and there is a disadvantage that the number of manufacturing steps of the panel interlock and the possibility of failure of the detecting means increase. In particular, when the panel where the detecting means has a failure is opened, the operation of the apparatus is not stopped, and there is a problem that harmful chemicals and gases diffuse to the surroundings.

Conventionally, as the number of detecting means increases, a signal processing circuit for processing a signal from the detecting means has to be complicated, and there is a disadvantage that the number of manufacturing steps and the possibility of failure also increase. .

The present invention has been proposed to solve the above-mentioned problems of the prior art, and an object thereof is to provide a panel interlock having a simple structure.

[0007]

In order to achieve the above object, according to the first aspect of the present invention, a plurality of panels are mounted on a housing so as to be openable and closable, and these panels start with a predetermined panel. In a device configured to be opened only in a certain order and closed only in a certain order with the predetermined panel last, a switch for detecting the opening of the predetermined panel and a switch for detecting the opening It is characterized by having a stopping means for stopping the device when the operation is performed.

According to a second aspect of the present invention, there is provided an apparatus in which a plurality of panels are attached to the housing so as to be freely opened and closed.
Each panel is provided with at least one conductive portion, and the device is provided with each auxiliary conductive portion connecting a pair of conductive portions, and each of the conductive portions and the auxiliary conductive portion is provided on the entire panel. When closed, they are arranged to be connected in series to form a single energizing circuit, in which the
When the energizing circuit is interrupted, a stop means for stopping the device is provided.

According to a third aspect of the present invention, there is provided an apparatus in which a plurality of panels are attached to the housing so as to be freely opened and closed.
The panels are configured so that they can only be opened in a certain order beginning with a given panel, and can be closed only in a certain order ending with the given panel. One conductive part is provided,
The device is provided with respective auxiliary conductive parts for connecting a pair of conductive parts, and these conductive parts and auxiliary conductive parts are connected in series when all panels are closed to form a single energizing circuit. A switch for detecting the opening of the predetermined panel, and a stop means for stopping the device when the opening is detected, wherein the energizing circuit is shut off in the energizing circuit. A second stopping means for stopping the apparatus when the operation is performed.

[0010]

According to the first aspect of the present invention, since a plurality of panels can be opened only in a certain order starting with a predetermined panel, all other panels are opened unless the predetermined panel is opened. It will be closed. In addition, since these panels are configured to be closed only in a certain order ending with the predetermined panel, if only the predetermined panel is closed, all other panels are closed. . For this reason, if only the closure of a predetermined panel can be confirmed, the closure of all panels can be confirmed, and when any panel is opened, the predetermined panel is always opened.

Therefore, in the present invention, the switch for detecting the opening of the predetermined panel and the stopping means for stopping the apparatus when the opening is detected are provided. As a result, even if any panel is opened, the apparatus is stopped, and panel interlock for all panels can be realized.

In particular, according to the present invention, since the panel interlock can be realized with only one switch, a panel interlock having a simple configuration can be provided.

In the invention of claim 2, since a limit switch is used as the switch, the durability of the switch is improved, and the reliability of the panel interlock is improved.

According to the third aspect of the present invention, the conductive portions on each panel and the auxiliary conductive portions on the apparatus are connected in series only when all panels are closed to form a single energizing circuit. Has been established. Further, the power supply circuit has a stop means for stopping the device when the power supply circuit is interrupted. For this reason, even if any panel is opened, the energization circuit is cut off and the apparatus is stopped, and panel interlock for all panels can be realized.

In particular, according to the present invention, there is no need to provide independent switches and signal lines for each panel, so that a panel interlock having a simple configuration can be provided.

Further, since the invention of claim 4 has both the structure of claim 1 and the structure of claim 2, the reliability of the panel interlock is further improved.

[0017]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be specifically described below with reference to the drawings.

A. 1. First Embodiment (1) Configuration of First Embodiment FIG. 1 In this embodiment, a housing 7 has six panels 1, 2, 3, and 6.
Devices 4, 5, and 6 are attached so as to be freely opened and closed. These panels 1, 2, 3, 4, 5, and 6 can be opened only in the order of panels 1, 2, 3, 4, 5, and 6, with panel 1 as the first, and with panel 1 as the last. It is configured so that it can be closed only in the order of the panels 6, 5, 4, 3, 2, 1.

That is, the panel 1 prevents the opening and closing of the panel 2, but the panel 2 does not prevent the opening and closing of the panel 1. Panels 2 and 3, 3 and 4, 4
The same applies to the relationship between 5, 5, and 6. Specifically, for example, as shown in FIG. 2, each panel is screwed to the housing 7 and moved to the front side to be opened. A part of the panel 1 locks a part of the panel 2. Also, for example,
A part of the panel 2 may prevent the operation of the screw 9 of the panel 3.

The housing 7 is provided with a switch 8 for detecting the opening of the panel 1, and this switch 8 is connected to a control circuit of the apparatus. This control circuit is configured to stop the device when the switch 8 detects that the panel 1 is opened.

(2) Functions and Effects of the First Embodiment In this embodiment, the panels 1, 2, 3, 4, 5, and 6 are arranged in the order other than the panels 1, 2, 3, 4, 5, and 6. It cannot be released. Also, the panels cannot be closed in any order other than 6, 5, 4, 3, 2, 1.

Therefore, if only the panel 1 is closed, all the panels 2, 3, 4, 4, and 6 are also closed. Unless the panel 1 is opened, none of the other panels 2, 3, 4, 5, and 6 can be opened. Therefore, when any panel is to be opened for inspection or repair, the panel 1 is always opened first.

Opening of the panel 1 is detected by the switch 8, and if detected, the control circuit stops the apparatus. Therefore, according to this embodiment, the six panels 1, 2, 3,
There is no need to provide separate switches for each of 4, 5, and 6, and it is sufficient to provide only one switch for panel 1. For this reason, according to the present embodiment, the number of switches can be significantly reduced as compared with the related art, and accordingly, the configuration of the signal processing circuit can be simplified.

As described above, according to this embodiment, a panel interlock having a simple configuration can be provided.
According to the present embodiment, since a plurality of switches and a complicated signal processing circuit are not used, failures are reduced, and the reliability of the panel interlock is improved. Specifically, it is possible to prevent a situation in which the operation is not stopped due to the accidental opening of the panel where the sensor has failed. Further, it is possible to prevent the same itself from occurring due to a failure of the signal processing circuit.

B. 2. Second Embodiment (1) Configuration of Second Embodiment ... FIG. 2 In this embodiment, three panels 1
1, 12 and 13 are devices that can be freely opened and closed, and each panel 11, 12, and 13 is provided with one conductive portion. The conductive parts are provided on the panels 11, 12, 13
One contact 14 is provided on each of the left and right end faces, and this is connected by a lead wire 19. Case 1
7, the panels 11, 12 and 13 are closed when the panels 11, 12 and 13 are closed.
A contact 15 is provided at each position on the contacts 12 and 13 that contacts the contact 14.
Is provided.

As shown in FIG. 3, each contact 14 and each contact 15 are formed in a convex shape and a concave shape which fit each other, and both surfaces are covered with a conductive material 16.

The contact 15 on the left side of the panel 11 and the contact 15 on the right side of the panel 13 are connected to a signal line 18 which is an auxiliary conductive part.
The contacts 15 on the right side of the panel 12 are connected to each other by a lead wire 20 to form an auxiliary conductive portion.

Therefore, each conductive part on the panels 11, 12, 13 and the auxiliary conductive part, together with the panels 11, 12, 1
3. When closed, a single energizing circuit is formed in series.

Although not shown, the signal line 18 is connected to a control circuit of the apparatus. This control circuit is configured to stop the device when the energization circuit connected to the signal line 18 is cut off.

(2) Operation and Effect of Second Embodiment In this embodiment, the conductive portions on each panel and the auxiliary conductive portions on the apparatus are connected in series only when all the panels 11, 12, and 13 are closed. Thus, a single energizing circuit is formed, and the entire apparatus is covered by a single energizing circuit. Therefore, even if any panel is opened, the energizing circuit is shut off, the apparatus is stopped, and all panels 11,
Panel interlocks for 12, 13 can be realized.

In particular, according to the present invention, each panel 11, 1
Since there is no need to provide independent switches and signal lines for the panels 2 and 13, a panel interlock having a simple configuration can be provided. C. Other Embodiments The present invention is not limited to the above embodiments, but includes the following other embodiments. For example, the application target of the present invention is not limited to a processing device such as a semiconductor manufacturing device, but can be applied to various devices such as a rotating machine such as a motor or a generator. Alternatively, the panel itself may be formed of a conductive material without providing an independent conductive portion on the panel.

As the conductive material in this case, a conductive resin material or the like for preventing electrostatic charge can be used.
Further, a conductive rubber packing may be attached in a strip shape to a contact portion where the panel contacts the frame of the device, and a conductive portion of both electrodes that conducts to the rubber packing may be provided in the contact portion on the device side. This embodiment has an advantage that the rubber packing and the conducting portion can be realized by a single member.

[0033]

As described above, according to the present invention, a panel interlock having a simple structure can be provided.

[Brief description of the drawings]

FIG. 1 is a perspective view of an apparatus according to a first embodiment.

FIG. 2 is a partial plan view of the device.

FIG. 3 is a front view of the device of the second embodiment.

FIG. 4 is a sectional view of contacts 14 and 15 of the device.

[Explanation of symbols]

 1, 2, 3, 4, 5, 6, 11, 12, 13 ... Panel 7 ... Case 8 ... Switch 9 ... Screws 14, 15 ... Contact 17 ... Case 18 ... Signal line 19, 20 ... Lead wire

Continuation of the front page (58) Fields investigated (Int. Cl. ⁷ , DB name) H01L 21/02 E06B 7/28 H01H 9/20 H01H 31/04 H04L 11/00 G07D 9/00

Claims (3)

(57) [Claims] A plurality of panels are attached to a housing so as to be openable and closable, and these panels can be opened only in a certain order starting with a predetermined panel, and certain panels ending with the predetermined panel. A panel interlock comprising: a switch for detecting the opening of the predetermined panel; and a stop means for stopping the device when the opening of the predetermined panel is detected. 2. An apparatus in which a plurality of panels are attached to a housing so as to be openable and closable, wherein each panel is provided with at least one conductive section, and the apparatus is connected to a pair of conductive sections. Each auxiliary conductive portion is provided, and each of these conductive portions and the auxiliary conductive portion is arranged so as to be connected in series to form a single energizing circuit when all panels are closed. A panel interlock having a stop means for stopping the device when the power supply circuit is interrupted. 3. An apparatus in which a plurality of panels are openably and closably mounted on a housing, these panels can be opened only in a predetermined order starting with a predetermined panel, and the predetermined panel is lastly opened. Each panel is provided with at least one conductive part, and the device is provided with each auxiliary conductive part for connecting a pair of conductive parts to each other. Each of these conductive portions and auxiliary conductive portions is arranged so as to be connected in series to form a single energizing circuit when all panels are closed, and has a switch for detecting opening of the predetermined panel, A panel having a stop means for stopping the device when the opening is detected, and a second stop means for stopping the device when the current supply circuit is cut off in the current supply circuit. interlock.