JP3312003B2 - X-ray fluorescence analyzer - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray fluorescence analyzer for performing a process control analysis for controlling analysis accuracy.

[0002]

2. Description of the Related Art In X-ray fluorescence analysis, in order to perform highly reliable analysis, PHA adjustment, standardization, and analysis other than analysis of an analysis sample are performed as a process control analysis for controlling analysis accuracy.
Check analysis is routinely performed. The PHA adjustment is for adjusting the fluctuation of the peak value of a PHA (peak height analyzer), and a sample that does not include an interference spectrum close to the measurement line is used for the PHA adjustment. In the standardization, the X-ray intensity is measured using a standardized sample to obtain a drift correction coefficient, and the measured X-ray intensity of the analysis sample is corrected by the drift correction coefficient to correct the X-ray intensity of the device. . The standardized sample must be unchanged and uniform over time. Check analysis uses a check sample with a known composition close to the analysis sample to confirm that the analysis value of each component is within a predetermined standard value before analyzing the analysis sample. In order to obtain a highly accurate analysis value, it must be performed before the analysis of the analysis sample.

The standardization is based on the assumption that PHA adjustment is performed, and the check analysis is based on the assumption that standardization is performed.
The frequency is determined in advance according to the use situation. PHAs
Adjustment and standardization are performed, for example, every day, and check analysis is performed before analysis of an analysis sample is performed.

[0004] However, when there are many types of analysis samples, it is necessary to measure a standardized sample of each component, and it takes too much time to measure the standardized sample. In addition, since the multi-element simultaneous analyzer has many measurement channels, the PHA adjustment time cannot be ignored. On the other hand, PHA adjustment and standardization are not performed periodically, and only check analysis is performed before analysis of an analysis sample. In this case, the operator checks the analysis result of the check analysis for each component of the check sample, and if even one component is out of the standard value, a large number of standardized samples specified in advance for standardization of the component outside the standard value are used. The standardized sample is searched for, and the intensity of the fluorescent X-ray generated from the standardized sample is measured.

[0005] Also, with regard to PHA adjustment, when the drift correction coefficient obtained from the standardized sample is out of the standard, the PHA adjustment sample used for the element which is out of the standard value is measured to adjust the peak value of the peak analyzer.

[0006]

However, when the analysis result of the check analysis is out of the standard value, it is difficult for an operator to search for a standardized sample according to the analysis result of the check analysis, and it takes a long time. It costs .

Accordingly, an object of the present invention is to provide a fluorescent X-ray analyzer in which a process control analysis for automatically controlling analysis accuracy is performed with a reduced burden on an operator.

[0008]

In order to achieve the above object, an X-ray fluorescence spectrometer according to a first configuration of the present invention comprises a storage unit for storing a standardized sample, and a standardized sample stored in the storage unit. An automatic sample changer having a moving mechanism for moving the sample to the sample inlet of the measuring section, a first storage means for storing a position of each standardized sample in a storage section of the automatic sample changer, and a known composition close to the analysis sample. Check analysis result determining means for determining whether or not the analysis result of each component of the check sample is within a predetermined standard value, and when the check sample has a component outside the standard value, the automatic sample changer A standardized sample exchange control means for exchanging the check sample with a standardized sample designated in advance for the standardization of a component outside the standard value; and measuring the fluorescent X-ray intensity of the exchanged standardized sample. Results and a drift correction coefficient calculating means for calculating a drift correction coefficient from.

According to this configuration, the check analysis result discriminating means automatically determines whether or not the analysis result of the check sample is within the standard value. Therefore, whether or not the analysis result is within the standard value can be accurately and promptly determined. Is determined. In addition, since the X-ray intensity of the standardized sample is measured only when the check sample has a component outside the standard value, unnecessary measurement of the standardized sample can be omitted. Further, by using the automatic sample changer, the check sample is accurately and quickly replaced with the standardized sample, and the operator does not need to search for the standardized sample, so that the operator is not burdened.

[0010] The X-ray fluorescence apparatus according to the second configuration of the present invention comprises an output means for displaying an instruction to an operator, a second storage means for storing a sample name of a standardized sample, and a known storage element close to the analysis sample. A check analysis result determining means for determining whether or not an analysis result of each component of a check sample having a composition is within a predetermined standard value; and The sample name of the standardized sample specified in advance for standardizing the
And a control unit for outputting the retrieved standardized sample name and the work guidance for setting the standardized sample to the output unit.

According to this structure, the check analysis result discriminating means automatically determines whether or not the analysis result of the check sample is within the standard value. Therefore, whether or not the analysis result is within the standard value can be accurately and promptly determined. Is determined. In addition, since the X-ray intensity of the standardized sample is measured only when the check sample has a component outside the standard value, unnecessary measurement of the standardized sample can be omitted. In addition, a work guidance for setting the standardized sample name and the standardized sample on the output means is output, and the operator only follows the instructions displayed on the output means, so that the worker can check the standardized sample or learn the contents of the work. It is not necessary to do so, and the burden on the operator is reduced.

In a preferred embodiment of the present invention,
When all the components of the check sample are within the standard value, but the check sample has a component of an analysis result different from the preset reference value, the bias correction amount for calculating the bias correction amount from the reference value and the analysis value A calculating unit.

According to this configuration, even if each component of the check sample is within the standard value, when the analysis result is different from the reference value, fine adjustment of the analysis value is performed by bias correction. Value can be obtained.

[0014]

[0015]

[0016]

[0017]

[0018]

[0019]

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an X-ray fluorescence analyzer according to a first embodiment of the present invention will be described with reference to the drawings. As shown in FIG. 1A, the X-ray fluorescence analyzer is a measuring unit 11.
And an automatic sample changer 20. The measurement unit 11
The apparatus includes a sample stage 4 on which the sample 3 is fixed, an X-ray source 1 for irradiating the sample 3 with primary X-rays 2, and a detecting means 10 for measuring the intensity of fluorescent X-rays 5 generated from the sample 3. . Sample table 4
Is disposed on a turret 14 in the sample chamber 13, and the sample 3 input from the sample input port 15 of the sample chamber 13 is moved to the X-ray analysis position by rotation of the turret. The detecting means 10 includes a spectroscope 6 for separating the secondary X-rays 5 generated from the sample 3, a detector 8 for measuring the intensity of each of the separated fluorescent X-rays 7, and an analysis of the detected fluorescent X-rays 7. And a counter 16 for counting the analyzed spectrum. The inside of the sample chamber 13 and the inside of a chamber (not shown) containing the X-ray source 1, the spectroscope 6, and the detector 8 are evacuated. Note that a detector having a high energy resolution may be used as the detection unit without using the spectroscope 6. The measurement unit 1 further includes a controller 12 that controls the entire measurement unit.

The automatic sample changer 20 includes a plurality of samples 3
A fixed table 21 as a storage unit for storing the sample, a moving mechanism 24 for moving the sample 3 on the fixed table 21 to the X-ray analysis position, and a moving mechanism control means 23 for controlling the moving mechanism 24. The fixed table 21 has a rectangular shape,
Samples can be stored side by side at equal intervals in the horizontal direction of the arrow X direction and in the vertical direction of the arrow Y direction (FIG. 1B). As shown in FIGS. 1A, 1B, and 1C, the moving mechanism 24 includes an arm 25 that grasps the sample 3, a bar 26 that slides the arm 25 in the Y direction, and a bar 26.
27 that slides up and down in the direction of arrow Z
And a rail 28 for sliding the stand 27 in the direction of the arrow X. The arm 25 can grasp the sample 3 at any position in the X and Y directions and carry it to the sample inlet 15 for analysis. The moving mechanism 24 may be of a crane type and may hold the sample 3 at an arbitrary position on the fixed table 21.

Fixed table 21 of automatic sample changer 20
Can store all samples such as standardized samples, check samples and analysis samples.

The X-ray fluorescence analyzer further comprises a processing unit 3
0, the processing means 30 includes a check analysis result determining means 31 for determining whether or not the analysis result of each component of the check sample is within a preset standard value, and the check sample includes a component outside the standard value. In this case, the standardized sample exchange control means 32 for exchanging the check sample by the automatic exchanger 20 with a standardized sample specified in advance for the standardization of components outside the standard value, and the measurement result of the fluorescent X-ray intensity of the exchanged standardized sample A drift correction coefficient calculating means 33 for calculating a drift correction coefficient, a drift correction coefficient determining means 34 for determining whether the drift correction coefficient is within a preset standard, and a case where there is an element outside the standard value in the standardized sample. A PHA adjusting means 35 for measuring a PHA adjustment sample used for an element outside the standard value and adjusting the peak value of the pulse height analyzer; If all be within standard value is a reference value different from the analysis results of the components previously set in the check sample, and a bias correction calculation means 36 for calculating the bias correction amount from the analysis value and the reference value. The processing means 30 further includes a first storage means 41 for storing a standardized sample name or a code number for sample identification and a sample position of the standardized sample in the storage unit 21 of the automatic sample changer 20;
A third storage unit 44 for storing a PHA sample name or a code number for sample identification and a sample position of the PHA adjustment sample in the storage unit 21 of the automatic sample changer 20; The processing means 30 controls the controller 12 in relation to the operations of the means 31 to 37. The X-ray fluorescence analyzer further includes a display screen 42 as an output unit.

Next, the operation of the X-ray fluorescence analyzer of the first embodiment will be described with reference to the flowchart of FIG. First, check sample 3 (FIG. 1A) is placed on sample stage 4 (FIG. 1A).
With (a)) fixed, check analysis is performed (S
1). This is performed by clicking the display of the check sample on the display screen 42. Check samples are available in multiple varieties, and among varieties with different component composition ratios,
A check sample having a known composition close to the analysis sample selected on the display screen is transferred to the sample input port 15 of the measuring unit 11 by the automatic exchange 20, controlled by the controller 12, and set on the sample table 4 by the turret 14. Then, X-ray analysis of the check sample is performed. The composition of the check sample is known, the standard of the analysis result is determined for each component as shown in Table 1, and the check sample is set in the processing means 30 in advance.

[0025]

[Table 1]

If the analysis result of the check sample is out of the standard value, it indicates that a correct analysis result cannot be obtained even if the analysis sample is analyzed in this state. The analysis result of the check sample is input from the counter 16 to the processing means 30. If the check analysis result determination means 31 is, for example, the product type 1 in Table 1, the component Si (silicon) is 1.0 to 1.1%. Within the range, or when the composition component Ni (nickel) is 0.5 to 0.6.
%, The composition component Mo (molybdenum) is in the range of 0.2 to 0.3%, and whether the analysis result of the composition component of the variety 1 is within a preset specification value. It is determined whether or not it is (S2). As described above, since the check analysis result determining means 31 automatically determines whether or not the analysis result of the check sample is within the standard value, it is possible to accurately and quickly determine whether or not the analysis result is within the standard value.

If the check sample has a composition component outside the standard value, the automatic sample changer 20 controlled by the standardized sample exchange control means 32 converts the check sample into a standardized sample designated in advance for the standardization of the component outside the standard value. Replace with a sample (S3). Specifically, for example, when the composition component Ni of the type 1 in Table 1 is 0.62% and out of the standard value, the standardized sample exchange control unit 32 stores the information in the first storage unit 41 in the processing unit 30. The standardized sample name or code number for standardizing Ni of the check sample and the sample position are checked, and the sample position is passed to the automatic sample changer 20. The sample position is passed by being input to the automatic sample changer 20 as data via a communication cable or the like. As described above, the first storage unit 41 of the processing unit 30 knows the standardized sample name or code number of each component for each type and the sample position where the sample is set in the automatic sample changer 20. According to the component that has become out of the standard value in the check sample analysis, the standardized sample name or code number and the sample position can be searched.

When the automatic sample changer 20 receives the sample position in the automatic sample changer 20 from the standardized sample change control means 32, the moving mechanism control means 23 controls the moving mechanism 24 and the arm 25 transfers the standardized sample 3 at that position. It is grasped and transported to the sample inlet 15 for analysis. By using the automatic sample changer 20 in this manner, the sample at the X-ray analysis position is accurately and quickly exchanged for the standardized sample 3, and there is no need for the operator to search for the standardized sample 3. Therefore, no burden is imposed on the operator. . Moreover, since the X-ray intensity of the standardized sample is measured only when the check sample has a component outside the standard value, useless measurement of the standardized sample can be omitted.

When the standardized sample 3 is fixed to the sample stage 4,
By the operation of the controller 12, the primary X-ray 2 is emitted from the X-ray source 1 to generate fluorescent X-rays. The fluorescent X-ray intensity is input from the counter 16 to the processing means 30, and the drift correction coefficient calculation means 33 calculates the drift correction coefficient α (S4). The relationship between the reference intensity IS of the standardized sample, the measured intensity IM of the standardized sample, and the drift correction coefficient α is expressed by the following equation (1). α = IS / IM (1) By calculating the drift correction coefficient α using the standardized sample as described above, the deviation of the X-ray intensity caused by the aging of the instrument can be obtained. In the present embodiment,
The one-point correction method represented by the equation (1) is used in which the X-ray intensity is standardized using one point of the standardized sample, but the two-point correction method is used in which the X-ray intensity is standardized using two points of the standardized sample. Is also good.

When the drift correction coefficient α is calculated, the drift correction coefficient determining means 34 determines whether the drift correction coefficient α is within a preset standard (S5). For example, if the drift correction coefficient α is within the range of 1.0 ± 0.1, if a value outside the range is calculated for the element Si, the PHA used for detecting Si in the fixed table 21 of the automatic sample changer 20 is used. The adjusted sample is exchanged by the automatic sample changer 20 as in the case of the standardized sample, the PHA adjusted sample is measured, and the peak value of the pulse height analyzer is adjusted based on the X-ray intensity and the reference intensity of the PHA adjusted sample (S
6). Specifically, for example, when the drift correction coefficient α is 1.1
If the value is 1 and out of specification, the PHA adjustment unit 35 adjusts the peak value of the peak height analyzer stored in the third storage unit 44 or the PHA sample name or the code number for sample identification and the sample position. And the sample position is passed to the automatic sample changer 20.

The automatic sample changer 20 is an automatic sample changer 20.
When the position of the PHA sample is received, the moving mechanism control means 23 controls the moving mechanism 24 so that the arm 25 grasps the PHA sample 3 at that position, and the sample input port 15 for analysis is received.
Carry on. When the PHA sample 3 is fixed to the sample table 4, the controller 12 operates to irradiate the primary X-rays 2 from the X-ray source 1 to generate fluorescent X-rays, thereby measuring the peak value.
An adjustment value is determined. Therefore, in the subsequent measurement, the adjusted peak value of the relevant peak analyzer is used. As described above, the PHA adjustment sample is measured and the peak value of the pulse height analyzer is adjusted only when there is an element whose drift correction coefficient is out of the standard, so that unnecessary measurement of the PHA adjustment sample can be omitted. After adjusting the peak value of the peak analyzer,
The analysis of the standardized sample is performed again to calculate the drift correction coefficient α (S7).

After calculating the drift correction coefficient α, the standardized sample at the X-ray analysis position is returned to the check sample, and
Check analysis is performed again (S8). In the check analysis, the intensity of the measured fluorescent X-ray must be corrected for drift. The intensity Ic after drift correction is represented by the following equation (2) using the X-ray intensity Im measured in the check analysis and the drift coefficient α. Ic = α × Im (2) After the check analysis, it is determined again whether or not the analysis result of each component of the check sample is within a predetermined standard value by using the intensity Ic after the drift correction. (S9),
If not, it is determined that a serious failure has occurred, and an error output such as displaying a message on the display screen 42 is performed (S10).

In Steps S2 and S9, if the analysis results of all the components of the check sample are within the preset specification values, the bias correction amount calculating means 36 sets the analysis results of the check sample in advance. When there is a component of the analysis result different from the reference value, the bias correction amount is calculated from the reference value and the analysis value. Specifically, first, it is determined whether or not the analysis result of each composition component of the check sample includes an analysis result different from a preset reference value (S11). For example, the analysis value of the component Si is 1.02, which is within the standard range of 1.0 to 1.1%.
Is different from the reference value of 1.05, the analysis value of Si is slightly shifted even if it is within the standard value. Therefore, if this analysis value is not equal to the reference value, it is necessary to correct the analysis value, so that bias correction is performed.

The bias correction amount calculating means 36 calculates a bias correction amount from the reference value 1.05 and the analysis value 1.02 (S12). The relationship among the reference value WS, the analysis value WM, and the bias correction coefficient A is expressed by the following equation (3). The reference value WS is measured by chemical analysis. A = WS−WM (3) As described above, the bias correction coefficient A is obtained from the reference value and the analysis value.
By calculating, a slight shift in the X-ray intensity caused by the aging of the device can be obtained. In this manner, fine adjustment of the analysis value is performed, so that an accurate analysis value can be obtained. In the present embodiment, the bias correction coefficient A is obtained by the equation (3). However, the bias correction coefficient B expressed by the following equation (4) may be obtained. It is determined by the content rate and the like. Also,
If there is both a constant deviation error that can be corrected by equation (3) and a constant ratio error that can be corrected by equation (4), both coefficients A and B are used. B = WS / WM (4)

After calculating the bias correction coefficient A, the analysis is started by fixing the analysis sample at the X-ray analysis position. In the analysis of the analysis sample, the measured fluorescent X-ray analysis value must be subjected to bias correction. The analysis value Wc after the bias correction is obtained by calculating the analysis value Wm of the analysis sample and the bias correction coefficient A when the bias correction coefficient A is obtained by the equation (3).
When the bias correction coefficient B is obtained by the equation (5), the bias correction coefficient B is calculated by the following equation (6) using the analysis value Wm of the analysis sample and the bias correction coefficient B. Wc = Wm + A (5) Wc = B × Wm (6)

When all the analysis results of the components of the check sample are equal to the preset reference value or after calculating the bias correction coefficient A, the analysis sample is analyzed, that is, the unknown sample is analyzed (S13). As described above, the process management analysis is automatically performed in steps S1 to S12, and the analysis accuracy is managed, so that accurate and quick process management analysis can be performed.

Next, an X-ray fluorescence analyzer according to a second embodiment of the present invention will be described. As shown in FIG. 3, the difference from the X-ray fluorescence analyzer of the first embodiment is that an automatic sample changer is not provided, and the processing means 30 has the analysis result of each component of the check sample having a known composition close to the analysis sample. Is a check analysis result determining means 31 for determining whether or not each is within a preset standard value, and when a check sample has a component outside the standard value, the check sample result is specified in advance for standardization of the component outside the standard value. Output means 42 for standardized sample name search means 37 for searching the sample name or code number for sample identification of the standardized sample from the second storage means 43 and work guidance for setting the searched standardized sample name and the standardized sample. Output control means 38 for outputting the sample name or code number of the standardized sample.
The storage means 43 is provided.

The operation of the fluorescent X-ray analyzer according to the second embodiment will be described with reference to the flowchart of FIG.
First, a check analysis is performed (S1), and it is determined whether or not all the analysis results of each composition component of the check sample are within a preset standard value (S2).

If the check sample has a component outside the standard value, the standardized sample name search means 37 stores the sample name or code number of the standardized sample specified in advance for standardizing the component outside the standard value in the second storage. Search from the means 43 (S
14). The second storage means 43 stores sample names or code numbers and components of all prepared standardized samples. When the corresponding standardized sample is searched, the output control means 38 displays the searched standardized sample name and the work guidance for setting the standardized sample on the display screen 42 as the output means, thereby giving an instruction to the operator. It is displayed (S15). The operator can use this display screen 4
The operation may be performed in accordance with the operation guidance for setting the standardized sample displayed in 2 and the standardized sample having the standardized sample name displayed on the display screen 42 may be selected and set from a large number of prepared standardized samples. In this way, the standardized sample name or code number and the work guidance are output to the output means, and the operator simply follows the instructions displayed on the output means.
There is no need to remember the work content, and the burden on the worker is small.

In step S2, if the analysis results of all the components of the check sample are within the predetermined standard values, but the analysis results of the check sample include components of analysis results different from the predetermined reference value, In the same manner as in the first embodiment, the bias correction coefficient A is calculated and the analysis sample is measured (S11 to S13).

In this embodiment, the standardized sample name or code number and the work guidance are output on the display screen. However, if the output means is a printer, an instruction to the operator may be displayed by printing.

Next, the fluorescent X according to the first reference example of the present invention will be described.
The line analyzer will be described. As shown in FIG.
The difference from the fluorescent X-ray analyzer of the embodiment is that the processing means 3
0 indicates that the check sample was analyzed within the predetermined time up to the time when the analysis sample was measured, and the check sample was not analyzed within the predetermined time up to that time. In this case, a check sample movement control means 40 for moving the corresponding check sample to the X-ray analysis position by the automatic sample changer 20 is provided. The fixed table 21 of the automatic sample changer 20
Stores the check sample, not the standardized sample.

The operation of the fluorescent X-ray analyzer according to the first reference example will be described. The check sample analysis determining means 39 has a time measuring means, and stores the time t1 at which the last check analysis was performed as shown in FIG. When measuring the analysis sample, the check sample analysis determining means 39 determines whether the check sample has been analyzed during a predetermined time, for example, T1. Specifically, a time interval T2 between the current time t2 and the time t1 at which the last check analysis was performed.
Is longer than a predetermined time T1. Here, if it is longer than the predetermined time T1, it is determined that the check analysis has not been performed. If the check sample has not been analyzed within the predetermined time, the check sample movement control means 40 measures the corresponding check sample by the automatic sample changer 20.

More specifically, the processing means 30 reads out the sample position from the correspondence between the sample name or code number stored in the first storage means 41 and the sample position on the sample fixed table 21, and automatically reads the sample position. When the sample changer 20 receives the sample position from the check sample movement control means 39, the movement mechanism control means 23 controls the movement mechanism 24, the arm 25 grasps the check sample 3 at that position, and the sample input port of the measurement section 11 Transfer to 15. Next, it is set on the sample stage 4 by the turret 14 controlled by the controller 12,
An X-ray analysis of the check sample is performed.

When the measurement of the check sample 3 is performed, the processing means 30 stores the time of the end of the measurement, and uses this time as the time of the last check analysis when measuring the analysis sample next time. .

As described above, since it is determined whether or not the check sample has been analyzed within the predetermined time, even if the operator forgets to measure the check sample and starts to measure the analysis sample, it is automatically determined. Check sample is measured,
It is possible to prevent the analysis sample from being measured without measuring the check sample. In addition, by using an automatic sample changer as in the first embodiment, accurate and prompt X
Since the check sample is moved to the line analysis position and the operator does not need to search for the check sample, the operator is not burdened.

Next, the fluorescence X according to the second reference example of the present invention will be described.
The line analyzer will be described. As shown in FIG. 7, the first
The difference from the fluorescent X-ray analyzer of the reference example is that the processing means 30 is not provided with an automatic sample changer, the processing means 30 is provided with a check sample analysis determining means 39, and when the check sample has not been analyzed within a predetermined time before, A check sample name search unit 43 for searching the sample name or code number of the check sample to be checked from the second storage unit 43, and an output unit 42 for outputting the searched check sample name or code number and work guidance for setting the check sample. Output control means 3 for outputting to
8 and a second storage means 43 for storing a sample name or a code number of a check sample having a known composition close to the analysis sample. The X-ray fluorescence analyzer has a display screen 4 as an output means.
2 is provided.

The fluorescent X-ray apparatus according to the second reference example does not include the automatic sample changer 20. Therefore, similarly to the second embodiment, when a corresponding check sample is searched, the output control means 38 causes The operation guidance for setting the sample name or code number and the check sample is displayed on the display screen 42 as the output means. The operator only has to work in accordance with the operation guidance displayed on the display screen 42, and selects and sets a large number of check samples with check sample names or code numbers displayed on the display screen 42. I just need. In this way, even if the operator forgets to measure the check sample and tries to start measuring the analysis sample, the check sample name or code number and the work guidance are output to the output means.
It is possible to prevent the analysis sample from being measured without measuring the check sample. Further, since the operator only follows the instructions displayed on the output means, there is no need to check the check sample or memorize the contents of the operation, and the burden on the operator is reduced.

By combining the X-ray fluorescence analyzer of the first or second embodiment of the present invention with the X-ray fluorescence analyzer of the first or second reference example , the analysis sample can be obtained without measuring the check sample. If it is a fluorescent X-ray device that prevents measurement and automatically determines the result of check analysis,
Further, the process control analysis is performed without any burden on the operator.

[0050]

As described above, according to the first configuration of the present invention, the check analysis result determination means automatically determines whether or not the analysis result of the check sample is within the standard value.
It is accurately and quickly determined whether the value is within the standard value. In addition, since the X-ray intensity of the standardized sample is measured only when the check sample has a component outside the standard value, unnecessary measurement of the standardized sample can be omitted. Further, by using the automatic sample changer, the sample at the X-ray analysis position is accurately and quickly exchanged for the standardized sample, and there is no need for the operator to search for the standardized sample.

Further, according to the second configuration of the present invention, the operation guidance for setting the standardized sample name and the standardized sample is output to the output means, and the operator only follows the instructions displayed on the output means. The operator does not need to check the standardized sample or memorize the contents of the operation, and the burden on the operator is reduced.

[0052]

[0053]

[0054]

[Brief description of the drawings]

FIG. 1A shows a fluorescent X according to a first embodiment of the present invention.
FIG. 2 is a schematic configuration diagram illustrating a X-ray analyzer, and FIG.
(C) is a side view.

FIG. 2 is a flowchart showing a process control analysis process in the X-ray fluorescence spectrometer according to the first embodiment of the present invention.

FIG. 3 is a schematic configuration diagram illustrating a fluorescent X-ray analyzer according to a second embodiment of the present invention.

FIG. 4 is a flowchart illustrating a process control analysis process in the X-ray fluorescence spectrometer according to the second embodiment of the present invention.

FIG. 5 is a schematic configuration diagram showing an X-ray fluorescence analyzer according to a first reference example of the present invention.

FIG. 6 shows the fluorescence X of the first reference example and the second reference example of the present invention.
It is explanatory drawing which shows the time interval of the process of a process management analysis in a line analyzer.

FIG. 7 is a schematic configuration diagram showing a fluorescent X-ray analyzer according to a second reference example of the present invention.

[Explanation of symbols]

3 sample, 11 measuring unit, 15 sample inlet, 20 automatic sample changer, 21 storage unit, 24 moving mechanism, 31
Check analysis result determination means, 32: standardized sample exchange control means, 33: drift correction coefficient calculation means, 34: drift correction coefficient determination means, 35: PHA adjustment means, 36: bias correction amount calculation means, 37: standardized sample name search means,
38: output control means, 39: check sample analysis determining means, 40: check sample movement control means, 42: output means.

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-62-209345 (JP, A) JP-A-7-63712 (JP, A) JP-A-3-94147 (JP, A) JP-A-57-1987 142549 (JP, A) Japanese Utility Model Showa 58-26656 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01N 23/00-23/227

Claims (3)

(57) [Claims] 1. A fluorescent X-ray analyzer, comprising: a measuring unit that irradiates a sample with X-rays and detects fluorescent X-rays generated from the sample; and analyzes the sample based on a detection result of the measuring unit. A storage unit in which the standardized sample is stored, and an automatic sample changer having a moving mechanism for moving the standardized sample in the storage unit to the sample inlet of the measurement unit; and a position of each standardized sample in the storage unit of the automatic sample changer. First storage means for storing; check analysis result discriminating means for discriminating whether or not the analysis result of each component of the check sample having a known composition close to the analysis sample is within a preset standard value; When there is a component outside the standard value in the check sample, the automatic sample changer replaces the check sample with a standard sample specified in advance for standardization of the component outside the standard value. And control means, the fluorescent X-ray analysis apparatus provided with a drift correction coefficient calculating means for calculating a drift correction coefficient from the measurement results of the fluorescent X-ray intensity of the exchanged standardized sample. 2. A fluorescent X-ray analyzer, comprising: a measuring unit that irradiates a sample with X-rays and detects fluorescent X-rays generated from the sample; and analyzes the sample based on a detection result of the measuring unit. Output means for displaying instructions to the operator; second storage means for storing the sample name of the standardized sample; analysis results of each component of the check sample having a known composition close to the analysis sample; A check analysis result determining means for determining whether or not the component is within, and when the check sample has a component outside the standard value, the sample name of the standardized sample specified in advance for standardization of the component outside the standard value is used. Fluorescent X comprising: a standardized sample name search unit for searching from the second storage unit; and an output control unit for outputting the searched standardized sample name and a work guidance for setting the standardized sample to the output unit. Analyzer. 3. The reference value according to claim 1, wherein each component of the check sample is within a standard value, but the check sample includes a component of an analysis result different from a preset reference value. Fluorescence X provided with a bias correction amount calculating means for calculating a bias correction amount from the data and the analysis value.
Line analyzer.