JP3303573B2 - Pulse power supply - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-output pulse power supply such as a klystron pulse power supply.

[0002]

2. Description of the Related Art In a klystron pulse power supply device or the like, a large output with a peak power of 10 to 100 MW and a pulse width of 1 to 0.1 μs in a pulse waveform of 10 to 100 μs are included.
% Flat parts are required.

[0003] In order to realize such a pulse waveform, as a conventional first device, for example, a document (Proceedings of t.
he 18th Linear Accelerator Meeting in Japan, Tsuku
ba, 21-23 July 1993, p. 182-184), the PFN circuit shown in FIG. 14 was used. In this circuit, 4 is a switching element, 20 is an induced voltage regulator, 21 is a transformer and rectifier, 22 is a charging circuit, and 23 is De.
A Qing circuit, 24 is a shunt diode, 25 is a pulse shaping network, 26 is a pulse transformer, and 27 is a klystron. In this circuit shown in FIG. 14, first, C in the pulse shaping network 25 is charged by the induction voltage regulator 20, the transformer / rectifier 21, and the charging circuit 22. De
The 'Qing circuit 23 stops charging when the charging voltage of C in the pulse shaping network 25 reaches a predetermined value. Next, when the switch element 4 connected to the load side of the pulse shaping network 25, for example, the thyratron is turned from the off state to the on state, a current flows through the pulse transformer 26 of the load, and the voltage is boosted and the high voltage pulse is applied to the klystron 27. Is applied. If the number of stages of the pulse shaping network 25 is small, the output waveform becomes close to a sine wave, and the flatness of the pulse waveform deteriorates, so that it is necessary to increase the number of stages to 10 to 20 stages.

Further, as a second conventional device, a simple capacitor discharging circuit shown in FIG. 15 has been used. In this circuit, 3 is a discharge capacitor, 28 is a converter, 29 is an inverter, and 30 is a charging resistor. FIG.
In this circuit shown in (1), first, the large-capacity discharge capacitor 3 is charged by the converter 28, the inverter 29, the transformer / rectifier 21, and the charging resistor 30. Next, a switching element 4 connected to the load side of the discharge capacitor 3 and capable of performing on-off operation during energization, for example, an IGBT switch is turned off.
When the state is changed from the on state to the on state, a current flows through the pulse transformer 26 of the load, the voltage is increased, and a high voltage pulse is applied to the klystron 27. When a predetermined pulse width is obtained, the switching element 4 is turned off.

As a third conventional device, for example, a voltage clamp circuit is used on the secondary side of a pulse transformer disclosed in Japanese Patent Application Laid-Open No. 48-13073. In this circuit shown in FIG. 16, 31 is a diode for preventing discharge, 32 is a smoothing capacitor, and 33 is a bias power supply. In the circuit shown in FIG. 16, first, the smoothing capacitor 32 is charged by the secondary voltage of the pulse transformer 28 exceeding the voltage of the bias power supply 33. At this time, if the capacity of the smoothing capacitor 32 is sufficiently large, the secondary voltage of the pulse transformer 28 is kept almost constant. Next, the smoothing capacitor 32 discharges to the voltage of the bias power supply 33 via the bias power supply 33 during the pulse pause period. The discharge preventing diode 31 prevents the smoothing capacitor 32 from discharging via the load 29 during the pulse pause period.

[0006]

However, the conventional pulse power supply as described above has the following problems. First, in the first device, since the pulse shaping network 25 is composed of a large number of capacitors and inductors, there is a disadvantage that the power supply device becomes large and expensive. In particular, since the pulse shaping network 25 is charged at a high voltage, there is a drawback that the increase in size causes a decrease in reliability against dielectric breakdown. Further, in the second device, the output voltage is reduced (that is, a sag voltage is generated) with the discharge of the discharge capacitor 3, so that it is necessary to use an extremely large-capacity discharge capacitor 3, and the power supply device becomes large,
There was a disadvantage that it became expensive. Further, in the third device, since the voltage clamp circuit is connected to a high voltage part by a number of capacitors 32, diodes 31, and a bias power supply 33, there is a disadvantage that the power supply device becomes large and expensive. Was. In particular, the connection to the high-voltage portion has a drawback such that the reliability of insulation breakdown is reduced due to the increase in size.

SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and a pulse power supply capable of obtaining a flat pulse waveform without increasing the size of the device, increasing the cost and reducing the reliability with respect to dielectric breakdown. It is intended to provide a device.

[0008]

Pulse power supply device according to the invention SUMMARY OF THE INVENTION 請 Motomeko 1 described, a discharge capacitor is charged, the switching element, a load, a variable impedance TogaTadashi
A discharge capacitor connected or charged to the
A switching element, a load, a connected body of a plurality of charged control capacitors connected in series, a unit for detecting an output voltage of the discharge capacitor after the switching element is turned on, and a detection value of the detection unit. the compared with a reference voltage voltage or above of the variable impedance to compensate for the reduction in the output voltage due to the discharge of the discharge capacitor
Means for controlling the voltage of the connected body of the plurality of charged control capacitors .

Further, the pulse power source apparatus according to the second aspect of the present invention, a variable impedance according to claim 1 transistor, thereby controlling to increase the gate voltage of the transistor stages.

According to a third aspect of the present invention, there is provided a pulse power supply device, wherein the variable impedance of the first aspect is a plurality of control resistors each having a series connection and a sag compensation switching element connected in parallel. The sag compensation switching elements are controlled so as to be sequentially short-circuited.

According to a fourth aspect of the present invention, in the pulse power supply device, the variable impedance according to the first aspect is a plurality of control resistors each having a parallel connection and a sag compensation switching element connected in series. The sag compensation switching elements are controlled so as to be sequentially short-circuited or short-circuited and then opened.

[0012] The pulse power supply device according to the fifth aspect of the present invention, the connection of a plurality of charged control capacitor of claim 1, sag compensation switching element respectively connected in series are connected in parallel It is a connection body of a plurality of positively charged control capacitors, and controls so as to sequentially short-circuit the switching elements for sag compensation.

[0013] The pulse power supply device according to the invention of claim 6, wherein the connection of a plurality of charged control capacitor of claim 1, sag compensation switching element are connected in series to each connected in parallel It is a connected body of a plurality of positively charged control capacitors, and controls so that the sag compensation switching elements are sequentially short-circuited and then opened.

[0014] The pulse power supply device according to the invention of claim 7, wherein the connection of a plurality of charged control capacitor of claim 1, the negative connected to sag compensation switching element to each are connected in series A connection body of a plurality of charged control capacitors, wherein the sag compensation switching element controls the capacitors to be sequentially connected to a load current path.

[0015] The pulse power supply device according to the invention of claim 8, the connection of a plurality of charged control capacitor according to claim 1, sag compensation switching element are connected in series to each connected in parallel It is a connection of a plurality of negatively charged control capacitors, and controls the sag compensation switching elements so as to be sequentially short-circuited or short-circuited and then opened.

According to a ninth aspect of the present invention, the charged first capacitor, the second capacitor, the switching element, and the load are connected in series, and the switching element is turned on. Means for detecting the sum voltage of the first and second capacitors after the detection, and comparing the detected value of the detection means with a reference voltage so as to keep the sum voltage constant. Means for flowing current.

[0017]

In accordance with the invention 請 Motomeko 1, wherein a discharge capacitor is charged, the switching element, a load, and a variable impedance connected in series, or charged discharged
A capacitor, a switching element, a load, and a connected body of a plurality of charged control capacitors are connected in series;
Detecting the output voltage of the discharge capacitor, as compared with the reference voltage of the variable impedance to compensate for the reduction in the output voltage due to the discharge of the discharge capacitor voltage or the
Controls the voltage at the junction of multiple charged control capacitors, thus eliminating the need for pulse-shaping networks and discharge capacities.
To compensate for the decrease in output voltage due to the discharge of the

According to the second aspect of the invention, the variable impedance according to claim 1 is a transistor, and controls to raise the gate voltage of the transistor stages, the output voltage due to discharge of the discharge capacitor Step-by-step compensation for degradation .

According to the third aspect of the present invention, the variable impedance according to the first aspect is a plurality of control resistors connected in series and each of which has a switching element for sag compensation connected in parallel. The output of the discharge capacitor is controlled by controlling the
Compensate for drop in force voltage.

According to the fourth aspect of the present invention, the variable impedance according to the first aspect is a plurality of control resistors connected in parallel and each having a switching element for sag compensation connected in series. Controlled so that elements are short-circuited sequentially or short-circuited and then opened
To compensate for the decrease in output voltage due to the discharge of the discharge capacitor
I do.

According to the fifth aspect of the invention, connection of a plurality of charged control capacitor of claim 1, sag compensation switching element respectively connected in series are connected positively charged in parallel Since it is a connected body of a plurality of control capacitors and is controlled so as to sequentially short-circuit the switching element for sag compensation, compensation for a decrease in output voltage due to discharge of the discharge capacitor is performed by switching a positively charged capacitor. Power loss
No.

According to the sixth aspect of the present invention, connection of a plurality of charged control capacitor of claim 1, sag compensation switching element is charged positively connected in series to each connected in parallel a connection of a plurality of control capacitors, and controls so as to open after sequentially shorting the sag compensation switching element, Ru can drive each sag compensation switching element for switching the capacitors at the same potential.

According to the invention of claim 7, wherein the connection of a plurality of charged control capacitor according to claim 1 are connected in series a plurality of the sag compensation switching element is charged negatively are connected to each It is a connected body of control capacitors, and the sag compensation switching element controls the capacitors to be sequentially connected to the path of the load current. are carried at the switching of the capacitor, part further has little to loss of power in comparison to that of claim 5.

According to the invention of claim 8, connection of a plurality of charged control capacitor according to claim 1, sag compensation switching element is charged negatively are connected in series to each connected in parallel a connection of a plurality of control capacitors, and controls so as to open after or are short and sequentially shorting the sag compensation switching element, Ru can drive each sag compensation switching element for switching the capacitors at the same potential .

According to the ninth aspect of the present invention, the charged first capacitor, the second capacitor, the switching element, and the load are connected in series, and the second capacitor after the switching element is turned on. Means for detecting the voltage of the sum of the first and second capacitors, and comparing the detection value of the detection means with a reference voltage to maintain the sum voltage constant.
Means for flowing current to the capacitor of the discharge capacitor without using a pulse shaping network.
Compensate for drop in force voltage.

[0026]

Embodiment 1 FIG. 1 is a configuration diagram illustrating a first embodiment of the present invention. In the figure, reference numeral 1 denotes a DC power source, 2 is charged reactor, 3 is a discharge capacitor of capacity C _1, 4 are on-off operation is possible switching element in IGBT etc. energized, 5 load such as a pulse transformer, 6 a discharge A voltage dividing resistor for detecting the discharge voltage of the capacitor 3 or the voltage between both ends of the load 5, 7 is an error amplifier, 70 is an insulating amplifier, 8 is a reference power supply, 10 is an output-variable impedance, such as a transistor. Is a drive circuit of the transistor 10. As is clear from the figure, the discharge capacitor 3, the switching element 4, the load 5, and the transistor 10 are connected in series. 2A to 2E show voltage waveforms at various parts of the circuit of FIG. 1, wherein FIG. 2A shows a voltage V ₁ (t) across the discharge capacitor 3 and FIG. 2B shows a switching signal of the switching element 4. v ₀ (t), (c) is the output voltage V ₂ (t) of the switching element 4, and (d) is the voltage V across the transistor 10.
₃ (t) and (e) show the voltage V ₂ (t) −V ₃ (t) across the load 5, respectively. V ₀ is the charging voltage of the discharge capacitor 3 and ΔV is the sag voltage.

In the circuit configured as described above, first,
In FIG. 1A, the discharging capacitor 3 is connected to the charging reactor 2.
Is charged by the DC power supply 1 via the. Next, when the switching element 4 changes from the off state to the on state, the discharge capacitor 3 is discharged, and the current i ₁ flows to the load 5. The voltage between both ends of the load 5 is monitored by a voltage-dividing resistor 6, and is combined with a reference voltage 8 by an error amplifier 7 to generate an error voltage v ₁ (t). The error voltage v ₁ (t) is input to the drive circuit 9,
The DC resistance of the transistor 10 (on-voltage of the transistor) is controlled so that the voltage across the load 5 becomes constant. When a predetermined pulse width τ is obtained, the switching element 4 is turned off. In the case of the circuit of FIG. 1A, as shown in FIG. 2E, both ends of the load 5 are V ₀ −ΔV
Is maintained at a constant voltage. Here, it is represented by ΔV = i ₁ τ / C ₁ .

In the pulse power supply device configured as described above, since a pulse shaping network is not used unlike the conventional example, a single capacitor can be used instead of a large number of capacitors and inductances. Costs. Further, since the high-voltage section is downsized, the reliability against dielectric breakdown is greatly improved. Further, since a decrease in output voltage due to discharging of the capacitor is compensated, a flat pulse waveform can be obtained even when discharging a capacitor having a small capacitance.

The operation of this circuit may be performed continuously like a normal negative feedback circuit, but when the gain of the feedback loop is high, adverse effects such as oscillation of the system appear. In this case, several kinds of voltages to be applied to the gate of the transistor 10 may be prepared in advance, and the operation may be performed by switching the voltage discretely (stepwise). This operation will be described with reference to FIG. In FIG. 1B, the voltage of the discharge capacitor 3 is monitored by the voltage dividing resistor 6. 3A to 3C show voltage waveforms of the control system in this operation, and FIG. 3A shows the output voltage v of the reference power supply.
_s (t) and (b) are output voltages v ₁ (t) of the error amplifier 7,
(C) shows the drive voltage v ₂ (t) of the transistor 10. FIGS. 4A to 4E show voltage waveforms when the operation is performed by switching stepwise, and ΔV ₀ is the sag voltage after compensation. In this operation, a ripple (pulsation voltage) ΔV ₀ corresponding to the switching number n is generated, and the value is ΔV ₀
= ΔV / n, and when n = 10, the sag voltage is 1
/ 10. The voltage across the load 5 is V ₀ −ΔV
It is kept to _{-ΔV 0/2 ± ΔV 0/} 2. In this stepwise control operation, the output voltage of the reference power supply uses a waveform that gradually decreases as shown in FIG. Note that FIG. 4 is shown smaller than FIG. 3 due to space limitations.

Embodiment 2 FIG. FIG. 5 is a block diagram for explaining the second embodiment of the present invention. In FIG.
Is a switching element for sag compensation. In the configuration shown in the first embodiment, the on-voltage of the transistor 10 is switched to discrete (stepwise). However, the control resistor 11 is connected in series with the load 5, and the sag compensation in which each control resistor 11 is connected in parallel. The switching elements 12 are sequentially turned on, the control resistor 11 is short-circuited, and the voltage V
Control is performed so that the voltage across the load 5 is constant even if ₁ (t) drops. The voltage between both ends of the load 5 is V ₀ −ΔV−ΔV ₀ /
It is maintained at 2 ± ΔV _0/2. As described above, by configuring the variable impedance with the resistor 11 whose operation does not become unstable due to heat generation instead of the transistor 10 of the first embodiment, the cooling structure can be simplified and the reliability of the device is improved.

In this example, the control resistors 11 are connected in series, and the withstand voltage of each sag compensation switching element 12 can be made the same. FIG. 7 is an explanatory diagram of a drive signal of the switching element 12 for sag compensation with respect to the output voltage v ₁ (t) of the error amplifier, and FIG.
V ₃ signals b-1, b-2 of the (t) shown in, it is applied ... and sequentially to each sag compensation switching element 12, once shorted control resistor 11 is one cycle in pulsed operation is short-circuited Remains intact.

Embodiment 3 FIG. The resistor group may be connected in parallel as shown in FIG. 6, and the switching element 12 for sag compensation is connected in series with the control resistor 11. In this case, the switching elements 12 for sag compensation are driven at the same potential. And the circuit configuration is simplified. In the circuit of FIG. 6, v ₃ (t) shown in FIG. 7B or v ₃ (t) shown in FIG.
₄ (t) is b-1, b-2, ... or c-1, c-
Are applied to each sag compensation switching element 12 in the order of 2,. When a signal of v ₄ (t) is applied, the control resistor 11
Switch completely. When a signal of v ₃ (t) is applied, a desired resistance value is obtained by a combination of the control resistor 11, and the number of times of switching of the sag compensation switching element 12 can be reduced.

Embodiment 4 FIG. FIG. 8 is a block diagram for explaining a fourth embodiment of the present invention. In the drawing, 13 is a control capacitor, 14 is a short-circuit prevention diode, 15 is a discharge resistor,
Reference numeral 6 denotes a charging power supply. In the configuration shown in the first embodiment, the on-voltage of the transistor 10 is switched discretely. However, the control capacitors 13 that have been positively charged in advance are connected in series with the load 5, and the sag compensation connected in parallel to each control capacitor 13 is performed. The switching elements 12 are sequentially turned on so that the circuit of the control capacitor 13 is short-circuited, and the voltage across the load 5 is controlled to be constant even if the voltage V1 (t) across the discharge capacitor 3 drops. Since the control capacitor 13 is positively charged, it works in the direction of canceling the voltage across the discharge capacitor 3 at the initial stage of the pulse, and short-circuits the canceling voltage sequentially as the voltage V ₁ (t) across the discharge capacitor 3 drops. Work to do. Voltage across the load 5 is kept at _{V 0 -ΔV-ΔV 0/2} ± ΔV 0/2.
The short-circuit prevention diode 14 prevents the discharge of the control capacitor 13. Further, the control capacitor 13 is charged with the current flowing through the load 5 during operation, and the voltage across the control capacitor 13 slightly increases. Therefore, the control capacitor 13 is discharged to the initial voltage value via the discharge resistor 15 during the pause period of the pulse. As described above, by compensating for the decrease in the output voltage due to the discharge of the capacitor by switching the positively charged capacitor 13, the portion that loses power is small,
A highly efficient power supply can be realized.

In this example, the control capacitors 13 are connected in series, and the withstand voltage of each sag compensation switching element 12 can be made the same. The drive signal of the sag compensation switching element 12 of this circuit is represented by v in FIG.
₃ (t), and once short-circuited, the control capacitor 13 remains short-circuited during one cycle of the pulse operation.

Embodiment 5 FIG. The control capacitor 13 may be connected in parallel as shown in FIG. 9, and the sag compensation switching element 12 is connected in series with the control capacitor 13. In this case, each sag compensation switching element 12 can be driven with the same potential. The circuit configuration is simplified. The drive signal of the sag compensation switching element 12 of this circuit is v ₄ (t) in FIG. In this circuit, the diode 14 for preventing short circuit is not required.

Embodiment 6 FIG. FIG. 10 is a configuration diagram illustrating a sixth embodiment of the present invention, and FIGS. 11A to 11E are explanatory diagrams illustrating voltage waveforms at various parts of the circuit of FIG. In the configuration shown in the fourth embodiment, the control capacitor 13 previously charged positively is connected in series with the load 5, but the control capacitor 13 previously charged negatively is connected in series with the load 5, and the switching element for sag compensation is connected. 12 are sequentially turned on, and the control capacitor 13 is connected, so that the voltage across the load 5 is controlled to be constant even if the voltage V ₁ (t) across the discharge capacitor 3 drops. Since the control capacitor 13 is negatively charged, it does not operate at the initial stage of the pulse, but as the voltage V ₁ (t) across the discharge capacitor 3 drops,
In order, it works to compensate for the voltage of the droop. Voltage across the load 5, as shown in FIG. _{11, V 0 -ΔV 0/2} ± Δ
It is maintained at V _0/2. Since the energy stored in the control capacitor 13 is consumed by the load 5 during operation, it is not necessary to consume extra energy via the discharge resistor 15 as in the fourth embodiment, and a compensation circuit with high power efficiency is provided. Can be configured. In this example, the control capacitors 13 are connected in series, and the withstand voltage of each sag compensation switching element 12 can be made equal. The drive signal of the sag compensation switching element 12 of this circuit is represented by v in FIG.
₃ (t), and once short-circuited, the control capacitor 13 remains short-circuited during one cycle of the pulse operation.

Embodiment 7 FIG. The control capacitor 13 may be connected in parallel as shown in FIG. 12, and the sag compensation switching element 12 is connected in series with the control capacitor 13,
In this case, each sag compensation switching element 12 can be driven with the same potential, and the circuit configuration is simplified. As the drive signal of the sag compensation switching element 12 of this circuit, any of v ₃ (t) and v ₄ (t) in FIGS. 7B and 7C may be used.

Embodiment 8 FIG. FIG. 13 is a block diagram for explaining an eighth embodiment of the present invention. In FIG. 13, reference numeral 17 denotes a compensation DC power supply, 18 denotes a constant current control capacitor, and 19 denotes a constant current control circuit. In the circuit configured as described above, in addition to the DC power supply 1 and the first capacitor, that is, the discharge capacitor 3, the DC power supply 17 for sag compensation and the second capacitor, that is, the constant current control capacitor 18, are separately provided. The first and second capacitors 3 and 18, the switching element 4, and the load 5 are connected in series.
Then, a current that generates a voltage that compensates for the sag of the voltage of the discharge capacitor 3 is caused to flow, thereby making the voltage applied to the load 5 constant.

First, the discharge capacitor 3 having the capacitance C ₁ is charged to the voltage V ₀ by the DC power supply 1 via the charging reactor 2. Next, when the switching element 4 is turned on from off state, the discharge capacitor 3 is discharged, the current i ₁ flows to the load 5 through a constant current control capacitor 18 of capacitance C _2. At the same time, the constant current control circuit 19 operates to supply the current i ₂ to the constant current control capacitor 18 to compensate for the voltage drop of the discharge capacitor 3. Now, let the voltage of the discharge capacitor 3 be V ₁ (t) and the voltage across the constant current control capacitor 18 be V ₁ (t).
When ₂ (t), the load 5 voltage across V (t) is _{V (t) = V 0 -} ∫i 1 dt / C 1 i 1 ~constant So _{V (t) = V 0 -} i 1 t / C ₁ V ₂ (t) is the load voltage V (t) when V ₂ (t) = (i ₂ −i ₁ ) t / C ₂ i ₁ t / C ₁ = (i ₂ −i ₁ ) t / C ₂ Is constant. That is, i ₁ / C ₁ = (i ₂ −i ₁ ) / C ₂ (1 / C ₁ + 1 / C ₂ ) i ₁ = i ₂ / C ₂ i ₂ = (C ₁ + C ₂ ) i ₁ / If C ₁ C ₁ = C ₂ , i ₂ = 2i ₁ and the load voltage V
(t) is constant.

In this operation, the discharge voltage of the discharge capacitor 3 is monitored by the voltage dividing resistor 6, and is combined with the reference voltage 8 by the error amplifier 7 to generate an error voltage v ₁ (t). The error voltage v ₁ (t) is input to the drive circuit 9 and controls the constant current control circuit 19 so that a desired constant current flows through the constant current control capacitor 18. When a predetermined pulse width is obtained, the switching element 4 is turned off. For the circuit of Figure 13, across the load 5 is kept at a constant voltage of V _0.

In the pulse power supply device configured as described above, since a pulse shaping network is not used unlike the conventional example, it can be configured by two capacitors instead of a large number of capacitors and inductances, and the device is small and low in size. Costs. Further, since the high-voltage section is downsized, the reliability against dielectric breakdown is greatly improved. Further, since a decrease in the output voltage due to the discharge of the capacitor is compensated, a flat pulse waveform can be obtained even when the capacitor having a small capacitance is discharged. Further, since the reduction of the output voltage due to the discharge of the capacitor can be continuously compensated, a flatter pulse waveform can be obtained as compared with the first to seventh embodiments.

In the first to seventh embodiments, the sag compensation circuit is connected in series to the ground side (low voltage side) of the load.
The insulation structure of the sag compensation circuit can be easily achieved, and the power supply becomes small, light and inexpensive. However, the power supply may be arranged on the high voltage side due to the grounding structure. Conversely, in the eighth embodiment, it is disposed on the high pressure side, but may be on the low pressure side.

In the example in which the sag compensation is performed stepwise in the first to seventh embodiments, the reference voltage is also changed stepwise.
As shown in (a), the voltage between both ends of the load may be detected through the insulating amplifier 70 and compared with a fixed reference voltage.

In each of the above embodiments, the description has been given of the generation of the positive pulse. However, the same configuration can be applied to the generation of the negative pulse by arranging the polarity of the capacitor, diode, transistor and the like in reverse. Can be realized.

[0045]

As is evident from the foregoing description, according to the invention 請 Motomeko 1, wherein a discharge capacitor is charged, the switching element, a load, and a variable impedance connected in series,
Or charged discharge capacitor and switching element
And a load, a connected body of the plurality of charged control capacitors are connected in series, and means for detecting an output voltage of the discharge capacitor after the switching element is turned on,
The detected value is compared with a reference voltage voltage or said plurality of of charging of said variable impedance to compensate for the reduction in the output voltage due to the discharge of the discharge capacitor of the detection means
Means for controlling the voltage of the connection of the connected control capacitors, so that a pulse shaping network is not used, so that a single capacitor can be used instead of a large number of capacitors and inductances, and the device is small and low cost. Becomes Further, since the high-voltage section is downsized, the reliability against dielectric breakdown is greatly improved. Further, since a decrease in output voltage due to discharging of the capacitor is compensated, a flat pulse waveform can be obtained even when discharging a capacitor having a small capacitance.

[0046] According to the second aspect of the invention, the variable impedance according to claim 1 is a transistor, and controls to raise the gate voltage of the transistor stages, the output voltage due to discharge of the discharge capacitor The decline is compensated in stages, and in addition to the effect of claim 1 ,
Stable high-speed response can be realized as compared with a normal negative feedback circuit.

According to the third aspect of the present invention, the variable impedance of the first aspect is a plurality of control resistors connected in series and each having a switching element for sag compensation connected in parallel. Since the elements are controlled so as to be sequentially short-circuited, the variable impedance is constituted by resistors instead of transistors.
In addition to the effect of 2 , the cooling structure can be simplified and the reliability of the device is improved.

According to the fourth aspect of the present invention, the variable impedance according to the first aspect is a plurality of control resistors connected in parallel and each having a switching element for sag compensation connected in series. Since the elements are sequentially short-circuited or controlled so as to be opened after being short-circuited, the switching elements for sag compensation can be driven at the same potential, and the circuit configuration is simplified in addition to the effect of the third aspect .

[0049] According to the fifth aspect of the invention, connection of a plurality of charged control capacitor of claim 1, sag compensation switching element respectively connected in series are connected positively charged in parallel Since it is a connected body of a plurality of control capacitors and is controlled so as to sequentially short-circuit the switching element for sag compensation, compensation for a decrease in output voltage due to discharge of the discharge capacitor is performed by switching a positively charged capacitor. Therefore, there is little power loss, and in addition to the effect of the third aspect , a highly efficient power supply can be realized.

[0050] According to the sixth aspect of the present invention, connection of a plurality of charged control capacitor of claim 1, sag compensation switching element is charged positively connected in series to each connected in parallel a connection of a plurality of control capacitors, and controls so as to open after sequentially shorting the sag compensation switching element, can drive the sag compensation switching element for switching the capacitors at the same potential, the claim 5 In addition to the effect, the circuit configuration is simplified.

[0051] According to the invention of claim 7, wherein the connection of a plurality of charged control capacitor according to claim 1 are connected in series a plurality of the sag compensation switching element is charged negatively are connected to each It is a connected body of control capacitors, and the sag compensation switching element controls the capacitors to be sequentially connected to the path of the load current. are carried at the switching of the capacitor, is further reduced portion to loss of power in comparison to that of claim 5, in addition to the aforementioned advantage of claim 5, the power of higher efficiency can be realized.

[0052] According to the invention of claim 8, connection of a plurality of charged control capacitor according to claim 1, sag compensation switching element is charged negatively are connected in series to each connected in parallel It is a connected body of a plurality of control capacitors, and the sag compensation switching element is controlled to be short-circuited sequentially or opened after being short-circuited, so that each sag compensation switching element for switching the capacitor can be driven at the same potential, In addition to the effect of the seventh aspect , the circuit configuration is simplified.

According to the ninth aspect of the invention, the charged first capacitor, the second capacitor, the switching element, and the load are connected in series, and after the switching element is turned on, the first capacitor is charged. Means for detecting the voltage of the sum of the first and second capacitors, and comparing the detected value of the detecting means with a reference voltage to maintain the sum voltage constant.
Since a means for flowing a current to the capacitor is provided, a pulse shaping circuit network is not used, so that it is possible to use two capacitors instead of a large number of capacitors and inductances, and the device is small in size and low in cost. Further, since the high-voltage section is downsized, the reliability against dielectric breakdown is greatly improved. Further, since a decrease in the output voltage due to the discharge of the capacitor is compensated, a flat pulse waveform can be obtained even when the capacitor having a small capacitance is discharged. Further, since a decrease in the output voltage due to the discharge of the capacitor can be continuously compensated, a flatter pulse waveform can be obtained as compared with the second to eighth aspects.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram illustrating a first embodiment of the present invention.

FIG. 2 is a voltage waveform diagram of each unit for explaining the operation of the first embodiment of the present invention.

FIG. 3 is a voltage waveform diagram of a control unit for explaining the operation of the first embodiment of the present invention.

FIG. 4 is a voltage waveform diagram of each unit for explaining an operation of a modification of the first embodiment of the present invention.

FIG. 5 is a configuration diagram illustrating a second embodiment of the present invention.

FIG. 6 is a configuration diagram illustrating a third embodiment of the present invention.

FIG. 7 is a voltage waveform diagram of a control unit for explaining operations of Examples 2 to 5 of the present invention.

FIG. 8 is a configuration diagram illustrating a fourth embodiment of the present invention.

FIG. 9 is a configuration diagram illustrating a fifth embodiment of the present invention.

FIG. 10 is a configuration diagram illustrating a sixth embodiment of the present invention.

FIG. 11 is a voltage waveform diagram of each section for explaining the operation of the sixth and seventh embodiments of the present invention.

FIG. 12 is a configuration diagram illustrating a seventh embodiment of the present invention.

FIG. 13 is a configuration diagram illustrating Embodiment 8 of the present invention.

FIG. 14 is a configuration diagram illustrating Conventional Example 1.

FIG. 15 is a configuration diagram illustrating a second conventional example.

FIG. 16 is a configuration diagram illustrating a third conventional example.

[Explanation of symbols]

1 DC power supply, 2 charging reactor, 3 discharge capacitor, 4 switching element, 5 load, 6
Voltage divider, 7 error amplifier, 70 isolation amplifier,
8 reference voltage, 9 drive circuit, 10 transistor, 11 control resistor, 12 switching element for sag compensation, 13 control capacitor, 14 diode for short circuit prevention, 15 discharge resistor, 16 power supply for charging,
17 DC power supply for compensation, 18 Capacitor for constant current control, 19 Constant current control circuit, 20 Induction voltage regulator, 21 Transformer / rectifier, 22 Charging circuit, 23
De'Qing circuit, 24 shunt diode, 25
Pulse forming network, 26 pulse transformer, 27
Klystron, 28 converter, 29 inverter, 30 charge resistance, 31 discharge prevention diode, 32 smoothing capacitor, 33 bias power supply.

Claims (9)

(57) [Claims] 1. A charged discharge capacitor, a switching element, a load, and a variable impedance are connected in series.
Connected or charged discharge capacitors and switches
Means for detecting an output voltage of the discharge capacitor after the switching element is turned on, wherein a switching element , a load, and a connected body of a plurality of charged control capacitors are connected in series; and a detection value of the detection means. the compared with a reference voltage voltage or said plurality of said variable impedance to compensate for the reduction in the output voltage due to the discharge of the discharge capacitor
Means for controlling the voltage of the connected body of the charged control capacitor . Wherein the variable impedance is a transistor, the pulse power supply device according to claim 1, wherein the control to increase the gate voltage of the transistor stages. Wherein the variable impedance is a plurality of control resistors sag compensation switching element respectively connected in series are connected in parallel, according to claim 1 for controlling so as to sequentially shorting the sag compensation switching element A pulse power supply as described. 4. The variable impedance is a plurality of control resistors connected in parallel and each having a sag compensation switching element connected in series, and the sag compensation switching elements are sequentially short-circuited or opened after short-circuiting. The pulse power supply device according to claim 1 , wherein the pulse power supply device is controlled so as to cause the pulse power supply to perform the control. 5. A connection body of a plurality of positively charged control capacitors, wherein a connection body of a plurality of charged control capacitors is connected in series and switching elements for sag compensation are connected in parallel to each other. pulse power supply device according to claim 1, wherein the controls to sequentially shorting the compensation switching element. 6. A connection of a plurality of positively charged control capacitors, wherein a connection of a plurality of charged control capacitors is connected in parallel, and a switching element for sag compensation is connected in series. pulse power supply device according to claim 1 wherein the control so as to open after the compensation switching element are sequentially short-circuited. 7. A connected body of a plurality of charged control capacitors, which is connected in series, and each of which is connected to a sag compensation switching element, and is a connected body of a plurality of negatively charged control capacitors. pulse power supply device according to claim 1, wherein the switching element is controlled so as to sequentially connect the capacitor in the path of the load current. 8. A connection body of a plurality of negatively charged control capacitors, wherein a connection body of a plurality of charged control capacitors is connected in parallel and switching elements for sag compensation are connected in series, respectively. pulse power supply device according to claim 1 wherein the control so as to open after the compensation switching element is or shorted are sequentially short-circuited. 9. A charged first capacitor, a second capacitor, a switching element, and a load are connected in series, and the first capacitor after the switching element is turned on.
Means for detecting the sum voltage of the second capacitor and the second capacitor; and means for flowing a current through the second capacitor so as to keep the sum voltage constant by comparing the detection value of the detection means with a reference voltage. Equipped with a pulse power supply.