JP3303331B2 - Semiconductor simulation equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor simulation apparatus, and more particularly, a beginner or a non-specialized person can easily input data of a semiconductor manufacturing process. The present invention relates to a semiconductor simulation device that can be found instantaneously and that can perform efficient simulation.

[0002]

2. Description of the Related Art In order to simulate a semiconductor manufacturing process using a conventional semiconductor simulation device, data to be input is found from a manufacturing process data sheet, and the data is input from a keyboard of the simulation device. . At the time of data input, the manufacturing process is displayed on the display screen of the simulation device in a predetermined format described by symbols and numbers, and while looking at the display screen, data is input with the input editor. Become. Then, after all the input of the data is completed, the calculation by the simulation device is performed to perform the simulation.

[0003]

However, in such a conventional simulation apparatus, a sequence of symbols and numbers described in a format suitable for various simulations is displayed on a display screen at the time of inputting work, so that the user is not accustomed to the operation. There is a problem that data input is not easy to a simple operator or a non-specialized operator, and an input error or the like is likely to occur. At the same time, there is a problem that it is difficult to find an input error. As a result, if there is an input error or erroneous data, all calculations by the simulation device are completed, and only after looking at the simulation results,
I often notice erroneous input or erroneous data.

There is also a simulation apparatus for inputting data while displaying a process process diagram by performing a simulation for each manufacturing process. However, depending on the type of manufacturing process, it takes a long time to calculate, and efficient data input is required. Can not. In addition, there is a problem in that if a simulation is to be calculated by a supercomputer or the like, the number of communications increases and it takes time. As described above, the conventional semiconductor simulation apparatus has one or both of the drawbacks, such as difficulty in finding a data input error and an extremely long input time.

The present invention has been made in view of such circumstances, and enables a beginner or a non-specialized person to easily input data of a semiconductor manufacturing process, reduce input errors, and find erroneous data instantaneously. It is an object of the present invention to provide a semiconductor simulation device which can perform a simulation capable of inputting data in a short time.

[0006]

In order to achieve the above object, a semiconductor simulation apparatus according to the present invention comprises: a simple simulation means for sequentially performing a simple simulation operation for each process based on input data; Based on the calculation result by the above, a simulation result is formed into a graphic processing unit for each manufacturing process of the semiconductor device by a graphic processing unit; a process diagram display unit for displaying an image formed by the graphic processing unit; An input display unit for inputting in a menu format, and a process display unit for displaying a semiconductor device manufacturing process in a standard format.
Display control means for dividing the display screen into three parts and displaying the divided parts simultaneously.

[0007]

In the simulation apparatus according to the present invention, the display screen is divided into three parts. In the input display part, data can be input in the form of a menu. Therefore, even a beginner or a non-specialized operator can easily input data. When the data is input, the simple simulation means instantly performs a simulation calculation for each manufacturing process based on the data, and the graphic processing means forms the simulation result based on the result, and the display control means A graphic is displayed on the process diagram display section of the display screen divided into three parts. Therefore, when there is an error or the like in the data input from the input display unit, an erroneous input or data error can be instantaneously detected by observing the process diagram display unit. When an erroneous input or the like is found, data input is started again from the step where the error was found, instead of starting from the beginning. Therefore, the input of all data is completed accurately in a relatively short time.

According to the present invention, in which all data is transferred to the high-speed operation device when all data input is completed, and a simulation operation is performed there, an accurate simulation result is finally obtained by the high-speed operation device. Can be At that time, since the erroneous data is checked at the time of input, the danger of being simulated by erroneous data is avoided.

In the present invention having means for converting a standard format indicating a manufacturing process of a semiconductor device into various simulation formats, it is necessary to input data in accordance with various simulation formats at the time of data input. Instead, it is automatically converted from one standard format to various simulation formats, greatly improving input operability and the like.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a semiconductor simulation apparatus according to one embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a schematic configuration diagram of a semiconductor simulation apparatus according to an embodiment of the present invention, FIG. 2 is a flowchart illustrating a simulation method by the semiconductor simulation apparatus of the embodiment, and FIG. 3 is a display screen of a workstation shown in FIG. FIGS. 4 to 6 are schematic diagrams showing an example, FIGS. 4 to 6 are schematic diagrams showing an image change of a process diagram display section on a display screen, FIG. 7 is a schematic diagram showing an example of a result display based on a final simulation result by a simulation device, FIGS. FIG. 4 is a schematic explanatory view showing an example of the operation and effect of the present invention.

The configuration of the computer system for realizing the semiconductor simulation apparatus according to the present invention is not particularly limited. For example, as shown in FIG. 1, a man-machine interface unit (data input, process diagram display, job Control and display of results) are performed by the workstation 2. The final simulation performed after all data input from the workstation 2 is completed is performed by the supercomputer 4.

As shown in FIG.
Is operated to start the simulation control in step 10, data input is started in step 12. When inputting data, the display screen (display) of the workstation 2 is, for example, shown in FIG.
As shown in the figure, a process diagram display unit 32 and an input display unit 34
Is controlled by the display control means so as to be divided and displayed on three screens, ie, the process display unit 36.

The input display section 34 is a screen for inputting data, and is capable of inputting data in a menu format. The operator selects the type of data to be input while viewing the menu on the input display unit 34.
The type of data is selected by a numeral or the like, and input is performed using an auxiliary input device such as a keyboard or a mouse. When the menu is selected, the screen of the input display unit 34 changes and requests data necessary for input, so that the operator can input data interactively. At that time, the input display unit displays data required for performing the process,
Since the data that is not always required is displayed separately,
Easy to understand for beginner operators.

When data input in one process is completed, process data representing the process in a standard format is displayed on the process display section 36 in a time series for each process. That is, every time process data is input to the input display unit 34 for one process, the process display unit 36 displays the process data in one line. The process data in the process display unit 36 can be scrolled sequentially by moving a cursor, for example, and the data already input can be observed.

When the data input in one process is completed, the process proceeds to step 14 shown in FIG. 2, and a simple simulation operation is instantaneously performed for each process by the simple simulation means based on the input data. On the basis of the result of the simulation calculation, in step 16, the graphic processing means performs the graphic processing, and displays the graphic image on the process diagram display unit 32. For example, when the data selected and input from the input display unit 34 is the data of the oxidation step, as shown in FIG.
The graphic image before oxidation is changed to the graphic image after oxidation. When the data selected and input from the input display unit 34 is the data of the deposition process, as shown in FIG. 5, the screen of the process diagram display unit 32 displays the graphic image before the deposition from the deposition image. It changes to the later graphic image. Further, when the data selected and input from the input display unit 34 is the data of the etching process, as shown in FIG. 6, the screen of the process diagram display unit 32 displays the graphic image before etching from the graphic image after etching. Changes to an image. In each of the steps, the diffusion ion implantation step is not normally displayed, and the deposition step and the etching step are displayed so as to be overlapped or cut by the "thickness" in the data. Also,
In the oxidation process, oxidation is performed by the "thickness" in the data.
The ratio of the amount that goes into the silicon and the amount that goes up is 4.5:
5.5 (see FIG. 4). The mask process
A mask is applied to a portion where the process is not performed (displayed on the process diagram display unit 32 in FIG. 1).

When there is an error or the like in the data input interactively from the input display screen, the operator can instantly detect an erroneous input or data error by observing the process diagram display section 32. When step 16 shown in FIG. 2 is completed, the process goes to step 18 where it is determined whether all inputs in all processes have been completed.
Steps 12 to 18 will be repeated. Step 1
If it is determined in step 8 that the input has been completed, the process proceeds to step 20, and all the data input to the workstation 2 is transferred to the supercomputer 4. In super computer 4, in step 22,
A job is started based on the transferred data, and a process simulation operation is performed in step 24. This simulation calculation is not a simple simulation performed for each process by the workstation 2 but a simulation that is finally performed with high accuracy. The type of simulation to be calculated is not particularly limited, and various simulations can be performed.

If the simulation calculation is completed in step 24, the simulation result is transferred to the workstation 2 in step 26. In the workstation 2, based on the simulation result transferred from the supercomputer 4, the simulation result is displayed on the display screen of the workstation 2 in step 28.

An example of the simulation result displayed on the display screen of the workstation 2 includes, for example, current / voltage characteristics at the drain as shown in FIG. In addition, as an example of a simulation result displayed on the display screen, a simulation result such as an impurity distribution and a current density distribution can be exemplified.

If the display of the simulation result is finished in step 28, the simulation control ends in step 30. In the present invention, the final simulation may be performed in the workstation 2 without performing the final simulation in the supercomputer 4.

With the system configuration of the simulation apparatus according to the present embodiment, as shown in FIG. 8, the time required for analysis and the time required for data input are significantly reduced as compared with the conventional old system. Thus, the time required for the entire simulation can be significantly reduced.

As shown in FIG. 9, in this embodiment,
Process data is input as data displayed in the standard format 40, and means for automatically converting the data displayed in the standard format 40 into various simulation formats is provided. This eliminates the need to input data, thereby facilitating data input for the simulation, and displaying the simulation results in a unified manner, greatly improving the usability.

The present invention is not limited to the above-described embodiment, but can be variously modified within the scope of the present invention.

[0023]

As described above, according to the present invention, the display screen is divided into three parts, and the input display part thereof includes:
Since data can be entered in menu format,
While watching the menu screen, even a beginner or a non-specialized operator can easily input data according to the instructions on the menu screen. Further, when there is an error or the like in the data input from the input display unit, an erroneous input or data error can be instantaneously detected by observing the process diagram display unit. In addition, if an erroneous input is found, data input is started again from the process where the error was found, instead of starting from the beginning, so all data can be input accurately in a relatively short time. finish. This reduces the possibility of performing a simulation with incorrect data. Further, there is an advantage that even a beginner or a non-specialized person can quickly input while watching the process of making the device.

According to the present invention, in which all data is transferred to the high-speed arithmetic device when all data input is completed, and a simulation operation is performed there, an accurate simulation result is finally obtained by the high-speed arithmetic device. Can be At that time, since the erroneous data is checked at the time of input, the danger of being simulated by erroneous data is avoided.

In the present invention having means for converting a standard format indicating a manufacturing process of a semiconductor device into various simulation formats, it is necessary to input data in accordance with various simulation formats at the time of data input. Instead, it is automatically converted from one standard format to various simulation formats, greatly improving input operability and the like.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a semiconductor simulation device according to one embodiment of the present invention.

FIG. 2 is a flowchart showing a simulation method by the semiconductor simulation device of the embodiment.

FIG. 3 is a schematic diagram showing an example of a display screen of the workstation shown in FIG.

FIG. 4 is a schematic diagram showing an image change of a process diagram display section on a display screen.

FIG. 5 is a schematic diagram showing an image change of a process diagram display section on a display screen.

FIG. 6 is a schematic diagram showing an image change of a process diagram display section on a display screen.

FIG. 7 is a schematic diagram showing an example of a result display based on a final simulation result by the simulation device.

FIG. 8 is a schematic explanatory view showing an example of the operation and effect of the present invention.

FIG. 9 is a schematic explanatory view showing an example of the operation and effect of the present invention.

[Explanation of symbols]

 2 workstation 4 supercomputer 10-30 step 32 process diagram display 34 input display 36 process display 40 standard format

──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-4-65146 (JP, A) JP-A-2-85981 (JP, A) JP-A-63-249328 (JP, A) (58) Field (Int.Cl. ⁷ , DB name) H01L 21/02 G06F 17/00 G06F 19/00

Claims (3)

(57) [Claims] 1. A semiconductor simulation apparatus for inputting necessary data while watching a display screen, comprising: a simple simulation means for sequentially performing a simple simulation operation for each process based on the input data; Based on the simulation result, a graphic processing unit for performing a graphic processing for each semiconductor device manufacturing process, a process diagram display unit for displaying an image formed by the graphic processing unit, and inputting data in a menu format And a display control means for dividing the display screen into three parts and simultaneously displaying the divided display screens. 2. The semiconductor simulation apparatus according to claim 1, further comprising means for converting a standard format indicating a manufacturing process of the semiconductor device into various simulation formats. 3. The simple simulation means, the graphic processing means, and the display control means are built in a workstation, and when all necessary manufacturing process data are input at the workstation, the input is performed. The data is transferred, and based on the input data, a more accurate simulation operation than the simple simulation is performed,
3. The semiconductor simulation device according to claim 1, further comprising a high-speed operation device that transfers the simulation result to a workstation.