JP3293891B2 - Means for supplying power to the electrostatic chuck of the sample holding part of the transfer robot, and a transfer robot having the power supply means - Google Patents
Means for supplying power to the electrostatic chuck of the sample holding part of the transfer robot, and a transfer robot having the power supply meansInfo
- Publication number
- JP3293891B2 JP3293891B2 JP23890692A JP23890692A JP3293891B2 JP 3293891 B2 JP3293891 B2 JP 3293891B2 JP 23890692 A JP23890692 A JP 23890692A JP 23890692 A JP23890692 A JP 23890692A JP 3293891 B2 JP3293891 B2 JP 3293891B2
- Authority
- JP
- Japan
- Prior art keywords
- transfer robot
- electrostatic chuck
- primary coil
- coil
- self
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は真空内で使用される搬
送用ロボットの試料把持部の静電チャックへの供電手段
に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a means for supplying power to an electrostatic chuck of a sample holding portion of a transfer robot used in a vacuum.
【０００２】[0002]
【従来の技術】従来のこの種の静電チャックへの供電手
段は、搬送用ロボットの試料把持部の静電チャックと、
固定された供電供給部との間に配線を施していた。即
ち、搬送用ロボットの試料把持部が運動できるに十分な
長さをもって配線されていたり、あるいは、３６０°エ
ンドレスで回転できるようにスリップリングやロータリ
ーコネクター等を経由して配線されていた。2. Description of the Related Art A conventional power supply means for an electrostatic chuck of this type includes an electrostatic chuck of a sample holding portion of a transfer robot,
Wiring was provided between the fixed power supply unit. That is, the wiring is made long enough to allow the sample gripping part of the transfer robot to move, or is wired via a slip ring, a rotary connector or the like so as to be able to rotate 360 ° endlessly.
【０００３】[0003]
【発明が解決しようとする課題】従来の静電チャックへ
の供電手段は、上記のように搬送用ロボットの試料把持
部が運動できるように、搬送用ロボットの試料把持部の
静電チャックと固定された供電供給部との間を配線して
いるが、搬送用ロボットの試料把持部の運動が頻繁に繰
り返されると、断線したり、あるいは配線の絶縁物が接
触により剥がれて危険になる問題があった。The conventional means for supplying power to the electrostatic chuck is fixed to the electrostatic chuck of the sample gripper of the transfer robot so that the sample gripper of the transfer robot can move as described above. However, if the movement of the sample gripping part of the transfer robot is repeated frequently, there is a danger that the wiring will break or the insulation of the wiring will come off due to contact and become dangerous. there were.
【０００４】また、ゴミの発生を問題とする半導体製造
装置に搬送用ロボットの試料把持部の静電チャックへの
供電の場合には、配線が他の部分と擦られて非常に多く
のゴミが発生する問題があった。In addition, in the case of supplying power to the electrostatic chuck of the sample holding part of the transfer robot in the semiconductor manufacturing apparatus in which the generation of dust is a problem, the wiring is rubbed with other parts, so that a large amount of dust is generated. There was a problem that occurred.
【０００５】更に、３６０°エンドレスで回転できるよ
うにスリップリングやロータリーコネクター等を用いて
配線することも考えられるが、配線が絡まなくなるもの
のゴミの発生は防止できず、真空中では接触部からのガ
スの発生や耐熱などに問題があった。Furthermore, it is conceivable to interconnect with 360 ° slip rings or a rotary connector for rotation endless like, which wiring is not tangled
The generation of dust can not be prevented, in a vacuum has a problem such as the gas generation and heat from the contact portion.
【０００６】この発明の目的は、従来の上記問題を解決
して、非接触の状態で静電チャックへの供電を可能にす
る搬送用ロボットの試料把持部の静電チャックへの供電
手段を提供することである。SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned conventional problems and to provide a means for supplying power to an electrostatic chuck of a sample holding portion of a transfer robot which enables power supply to an electrostatic chuck in a non-contact state. It is to be.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するため
に、請求項１記載の発明は、自励発振器と、前記自励発
振器に接続された一次コイルと、前記一次コイルと同軸
状に配置され、搬送用ロボットの試料把持部に配置され
た静電チャックに接続された二次コイルとを有し、前記
一次コイルは固定され、前記二次コイルは左右に回転可
能に構成され、前記一次コイルには前記自励発振器の周
波数で電力が供給され、前記一次コイルによって前記二
次コイルに誘導起電力が発生させられるように構成され
た搬送用ロボットの試料把持部の静電チャックへの供電
手段である。請求項２記載の発明は、左右に回転可能な
試料把持部と、前記試料把持部に設けられた静電チャッ
クと、前記静電チャックに接続され、前記試料把持部と
共に左右に回転可能な二次コイルと、前記二次コイルと
同軸状に配置され、固定された一次コイルと、前記一次
コイルに接続され、前記二次コイルに誘導起電力を誘起
させる自励発振器とを有し、前記自励発振器の周波数で
前記一次コイルに電力が供給される搬送用ロボットであ
る。請求項３記載の発明は、前記搬送用ロボットは真空
中で使用される請求項２記載の搬送ロボットである。In order to achieve the above object, according to the present invention, there is provided a self-excited oscillator, a primary coil connected to the self-excited oscillator, and a coaxial arrangement with the primary coil. And a secondary coil connected to an electrostatic chuck disposed on a sample gripper of the transfer robot, wherein the primary coil is fixed, the secondary coil is configured to be rotatable left and right, and the primary coil is Power is supplied to the coil at the frequency of the self-excited oscillator, and power is supplied to the electrostatic chuck of the sample gripper of the transfer robot configured so that the primary coil generates an induced electromotive force in the secondary coil. Means. According to a second aspect of the present invention, there is provided a sample gripper rotatable left and right, an electrostatic chuck provided on the sample gripper, and a two-stage rotatable connector connected to the electrostatic chuck and rotatable left and right with the sample gripper. A secondary coil, a primary coil arranged coaxially with the secondary coil and fixed, and a self-excited oscillator connected to the primary coil and inducing an induced electromotive force in the secondary coil. A transfer robot in which power is supplied to the primary coil at a frequency of an excitation oscillator. The invention according to claim 3 is the transfer robot according to claim 2, wherein the transfer robot is used in a vacuum.
【０００８】[0008]
【作用】この発明においては、固定された一次コイル
に、自励発振器より電力が供給されると、一次コイルに
磁束が生じ、その磁束が二次コイルと鎖交して、二次コ
イルに誘導起電力が発生する。そして、二次コイルに発
止した誘導起電力は、搬送用ロボットの試料把持部の静
電チャックに供給される。静電チャックは試料を静電エ
ネルギーによって吸着する。静電チャックはキャパシタ
ンスを有するため、誘導起電力を交流で静電チャックに
供電する場合、二次コイルとの共振を考慮する必要があ
る。吸着する試料の有無により、静電チャックのキャパ
シタンスの大きさが変化するので、固定した周波数で励
磁しようとすると、共振状態が外れてしまう。そのた
め、自励発振器により、二次コイルと静電チャックのキ
ャパシタンスとで決まる周波数で一次コイルに電力を供
給すると、いつも共振状態になり、効率のよい供電が可
能になる。According to the present invention, when power is supplied from the self-excited oscillator to the fixed primary coil, a magnetic flux is generated in the primary coil, and the magnetic flux links with the secondary coil and is induced in the secondary coil. An electromotive force is generated. The induced electromotive force generated in the secondary coil is supplied to the electrostatic chuck of the sample holding unit of the transfer robot. The electrostatic chuck attracts a sample by electrostatic energy. Since the electrostatic chuck has capacitance, it is necessary to consider resonance with the secondary coil when supplying induced electromotive force to the electrostatic chuck with AC. The magnitude of the capacitance of the electrostatic chuck changes depending on the presence or absence of the sample to be adsorbed. Therefore, when the excitation is performed at a fixed frequency, the resonance state is lost. Therefore, if power is supplied to the primary coil at a frequency determined by the secondary coil and the capacitance of the electrostatic chuck by the self-excited oscillator, the primary coil is always in a resonance state, and efficient power supply becomes possible.
【０００９】[0009]
【実施例】以下、この発明の実施例について図面を参照
しながら説明する。この発明の第１実施例は図１に示さ
れており、同図において、搬送用ロボットの試料把持部
に左右に回転自在な二次コイル１が固定された一次コイ
ル２と同軸状に設けられ、その二次コイル１は搬送用ロ
ボットの試料把持部の静電チャック３に接続されてい
る。図２は第１実施例の電気回路を示しており、同図に
よれば、固定された一次コイル２は自励発振器４に接続
され、その自励発振器４より一次コイル２に電力が供給
されている。Embodiments of the present invention will be described below with reference to the drawings. A first embodiment of the present invention is shown in FIG. 1, in which a secondary coil 1 rotatable left and right is provided coaxially with a primary coil 2 which is fixed to a sample gripper of a transfer robot. The secondary coil 1 is connected to the electrostatic chuck 3 of the sample holding part of the transfer robot. FIG. 2 shows an electric circuit of the first embodiment. According to the figure, a fixed primary coil 2 is connected to a self-excited oscillator 4, and power is supplied from the self-excited oscillator 4 to the primary coil 2. ing.
【００１０】このような第１実施例において、自励発振
器４より固定された一次コイル２に電力を供給すると、
一次コイル２に磁束が生じ、その磁束が二次コイル１と
鎖交して、二次コイル１に誘導起電力が発生するように
なる。そして、二次コイル１に発生した誘導起電力は搬
送用ロボットの試料把持部の静電チャック３へ供電され
る。静電チャック３では試料（図示せず）を静電エネル
ギーによって吸着する。誘導起電力を静電チャック３に
供電する場合、静電チャック３自身がキャパシタンスで
あるため、二次コイル１との共振を考慮する必要があ
る。吸着する試料の有無により、静電チャック３のキャ
パシタンスが変化するので、固定した周波数の励磁では
共振が外れていまう。そのため、二次コイル１と静電チ
ャック３のキャパシタンスとで決まる自励発振器４で一
次コイル２に電力を供給すると、いつも共振状態にな
り、効率のよい供電が可能になる。In the first embodiment, when power is supplied from the self-excited oscillator 4 to the fixed primary coil 2,
A magnetic flux is generated in the primary coil 2, and the magnetic flux links with the secondary coil 1 to generate an induced electromotive force in the secondary coil 1. Then, the induced electromotive force generated in the secondary coil 1 is supplied to the electrostatic chuck 3 of the sample holding part of the transfer robot. In the electrostatic chuck 3, a sample (not shown) is attracted by electrostatic energy. When supplying the induced electromotive force to the electrostatic chuck 3, it is necessary to consider resonance with the secondary coil 1 because the electrostatic chuck 3 itself has capacitance. Since the capacitance of the electrostatic chuck 3 changes depending on the presence or absence of the sample to be adsorbed, resonance is deviated by excitation at a fixed frequency. Therefore, when power is supplied to the primary coil 2 by the self-excited oscillator 4 determined by the secondary coil 1 and the capacitance of the electrostatic chuck 3, the primary coil 2 is always in a resonance state, and efficient power supply becomes possible.
【００１１】次に、図３は第２実施例を示しており、同
図において、５は搬送用ロボットの試料把持部のアー
ム、６は鉄芯でり、その他の符号で図１の第１実施例と
同一符号は同一又は相当部分を示すので説明を省略す
る。図４は第２実施例の電気回路を示しており、自励発
振器４にはピックアップコイル８が接続されている。Next, FIG. 3 shows a second embodiment, in which 5 is an arm of a sample holding portion of a transfer robot, 6 is an iron core, and other reference numerals are used to designate the first portion of FIG. Since the same reference numerals as those in the embodiment indicate the same or corresponding parts, the description is omitted. FIG. 4 shows an electric circuit of the second embodiment, and a pickup coil 8 is connected to the self-excited oscillator 4.
【００１２】[0012]
【発明の効果】この発明は、上器のように搬送用ロボッ
トの試料把持部に左右に回転自在な二次コイルを一次コ
イルと同軸状に設け、一次コイルによって二次コイルに
誘導起電力を発生させるようにしているので、非接触の
状態で静電チャックへの供電が可能になり、接触による
ダストの発生が少なくなると共に、真空中に配置される
のがコイルのみなので、放出ガスを少なくすることが出
来る。また、自励発振器を用いているので、試料の有無
にかかわらず、静電チャックへの供電が可能になる。According to the present invention, a secondary coil rotatable left and right is provided coaxially with the primary coil on the sample gripping portion of the transfer robot like an upper case, and the induced electromotive force is applied to the secondary coil by the primary coil. Because it is generated, power can be supplied to the electrostatic chuck in a non-contact state, dust generation due to contact is reduced, and since only coils are placed in a vacuum, gas emission is reduced. You can do it. Further, since the self-excited oscillator is used, power can be supplied to the electrostatic chuck regardless of the presence or absence of the sample.
【図面の簡単な説明】[Brief description of the drawings]
【図１】この発明の第１実施例の説明図FIG. 1 is an explanatory diagram of a first embodiment of the present invention.
【図２】この発明の第１実施例の電気回路図FIG. 2 is an electric circuit diagram of the first embodiment of the present invention.
【図３】この発明の第２実施例の説明図FIG. 3 is an explanatory view of a second embodiment of the present invention.
【図４】この発明の第２実施例の電気回路図FIG. 4 is an electric circuit diagram of a second embodiment of the present invention.
１・・・・・・・二次コイル ２・・・・・・・一次コイル ３・・・・・・・静電チャック ４・・・・・・・自励発振器 1 Secondary coil 2 Primary coil 3 Electrostatic chuck 4 Self-excited oscillator
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平４−2487（ＪＰ，Ａ) 特開 昭63−188541（ＪＰ，Ａ) 特開 昭63−169244（ＪＰ，Ａ) 特開 昭62−277234（ＪＰ，Ａ) 特開 平４−127409（ＪＰ，Ａ) 実開 昭63−90842（ＪＰ，Ｕ) 特表 平２−503376（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) B25J 15/00 B25J 15/06 H01L 21/68 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-4-2487 (JP, A) JP-A-63-188541 (JP, A) JP-A-63-169244 (JP, A) JP-A-62 277234 (JP, A) JP-A-4-127409 (JP, A) JP-A-63-90842 (JP, U) JP-A-2-503376 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) B25J 15/00 B25J 15/06 H01L 21/68
Claims (3)
試料把持部に配置された静電チャックに接続された二次
コイルとを有し、 前記一次コイルは固定され、前記二次コイルは左右に回
転可能に構成され、 前記一次コイルには前記自励発振器の周波数で電力が供
給され、前記一次コイルによって前記二次コイルに誘導
起電力が発生させられるように構成された 搬送用ロボッ
トの試料把持部の静電チャックへの供電手段。1. A and the self-excited oscillator, wherein a primary coil connected to the self-excited oscillator, disposed in the primary coil coaxially, the carrier robot
Secondary connected to an electrostatic chuck placed on the sample gripper
And the primary coil is fixed, and the secondary coil is turned left and right.
Rolling capable constructed, provided the power at the frequency of the self-excited oscillator in the primary coil
Supplied to the secondary coil by the primary coil.
Means for supplying power to the electrostatic chuck of the sample gripper of the transfer robot configured to generate an electromotive force .
把持部に設けられた静電チャックと、 前記静電チャックに接続され、前記試料把持部と共に左
右に回転可能な二次コイルと、 前記二次コイルと同軸状に配置され、固定された一次コ
イルと、 前記一次コイルに接続され、前記二次コイルに誘導起電
力を誘起させる自励発振器とを有し、 前記自励発振器の周波数で前記一次コイルに電力が供給
される搬送用ロボット。 2. A sample gripper rotatable left and right, an electrostatic chuck provided on the sample gripper, and a secondary coil connected to the electrostatic chuck and rotatable left and right with the sample gripper. A primary coil disposed coaxially with and fixed to the secondary coil, and a self-excited oscillator connected to the primary coil and inducing an induced electromotive force in the secondary coil; A transfer robot, wherein power is supplied to the primary coil at a frequency.
請求項２記載の搬送ロボット。 3. The transfer robot according to claim 2, wherein the transfer robot is used in a vacuum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23890692A JP3293891B2 (en) | 1992-08-14 | 1992-08-14 | Means for supplying power to the electrostatic chuck of the sample holding part of the transfer robot, and a transfer robot having the power supply means |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23890692A JP3293891B2 (en) | 1992-08-14 | 1992-08-14 | Means for supplying power to the electrostatic chuck of the sample holding part of the transfer robot, and a transfer robot having the power supply means |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0663885A JPH0663885A (en) | 1994-03-08 |
| JP3293891B2 true JP3293891B2 (en) | 2002-06-17 |
Family
ID=17037030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23890692A Expired - Fee Related JP3293891B2 (en) | 1992-08-14 | 1992-08-14 | Means for supplying power to the electrostatic chuck of the sample holding part of the transfer robot, and a transfer robot having the power supply means |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3293891B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012077296A1 (en) * | 2010-12-07 | 2012-06-14 | 株式会社アルバック | Power supply device |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1217655A1 (en) * | 2000-12-23 | 2002-06-26 | VenTec Gesellschaft für Venturekapital und Unternehmensberatung | Method of handling a thin wafer |
| JP3894562B2 (en) | 2003-10-01 | 2007-03-22 | キヤノン株式会社 | Substrate adsorption apparatus, exposure apparatus, and device manufacturing method |
| JP2007123334A (en) * | 2005-10-25 | 2007-05-17 | Nikon Corp | Stage apparatus, aligner, and manufacturing method of device |
| JP5501375B2 (en) * | 2009-01-11 | 2014-05-21 | アプライド マテリアルズ インコーポレイテッド | System, apparatus, and method for electrically connecting to robot and electrical end effector of robot |
| JP5957287B2 (en) * | 2012-05-10 | 2016-07-27 | 株式会社アルバック | Power supply device |
| WO2016194336A1 (en) * | 2015-05-29 | 2016-12-08 | 株式会社アルバック | Control system for electrostatic chuck-equipped transport robot |
-
1992
- 1992-08-14 JP JP23890692A patent/JP3293891B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012077296A1 (en) * | 2010-12-07 | 2012-06-14 | 株式会社アルバック | Power supply device |
| JPWO2012077296A1 (en) * | 2010-12-07 | 2014-05-19 | 株式会社アルバック | Power supply device |
| JP5581400B2 (en) * | 2010-12-07 | 2014-08-27 | 株式会社アルバック | Power supply device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0663885A (en) | 1994-03-08 |
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