JP3288313B2 - Ultrasonic cleaning device and cleaning / drying device using the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning apparatus and a cleaning / drying apparatus using the same, and a hoop type (continuous type).
The present invention relates to an ultrasonic cleaning apparatus and a cleaning / drying apparatus suitable for use in cleaning or cleaning and drying thin and long objects represented by lead frames.

[0002]

2. Description of the Related Art As shown in FIG. 6, a conventional ultrasonic cleaning apparatus for a hoop type lead frame includes a pair of throw-in type ultrasonic vibrators 3 in a cleaning tank 2 filled with a cleaning liquid 1.
A and 3B are vertically opposed to each other, and the lead frame 4 is inserted between the throw-in type ultrasonic transducers 3A and 3B arranged to face each other.
Is sent from the entrance slit 7 to the exit slit 8 to ultrasonically clean the front and rear surfaces thereof. The washing liquid spilling from the inlet slit 7 and the outlet slit 8 is collected by a washing liquid collecting tank 9 arranged around the washing tank 2, and is collected by the circulation path 10, the filter (F).
11, returned to the cleaning tank 2 again via the pump (P) 12 and the valve (V) 13, and reused.

[0003]

However, in the case of the above-described conventional ultrasonic cleaning device, the throw-in type ultrasonic transducers 3A and 3B need to have a large ultrasonic irradiation area and a large output. For this reason, the volume becomes considerably large, and the volume of the cleaning tank 2 accommodating them becomes large, and the volume of the cleaning liquid recovery tank 9 correspondingly becomes large, which causes a problem that the whole apparatus becomes large. Was. In addition, since the cleaning tank 2 and the cleaning liquid recovery tank 9 are large, there is a problem that the amount of the cleaning liquid used increases and the power consumption of the pump 12 also increases.

In the conventional ultrasonic cleaning apparatus described above, for example, when a lead frame having a width of 80 mm and a thickness of 0.1 to 0.2 mm is cleaned while being fed at a rate of 10 to 20 m / min, a throw-in type ultrasonic vibrator is used. As 3A and 3B,
Each length 300 × width 80 × height 200 mm, output 6
A device of about 00 W (oscillation frequency 38 KHz) was required.

In an actual semiconductor manufacturing process,
As shown in FIG. 7, by combining the conventional ultrasonic cleaning device 71 having the above configuration with a drying device 72 such as a hot air drying tank, cleaning and drying are performed continuously in one process. Although the device is often configured, since the volume of the ultrasonic cleaning device 71 is large as described above,
There is a problem that the volume of the entire washing / drying device becomes large.

In the case where interference between the throw-in type ultrasonic transducers 3A and 3B disposed opposite to each other poses a problem,
As shown in FIG. 8, it is also performed to displace the ultrasonic transducers back and forth along the transport direction of the lead frame 4, but in such a case, the ultrasonic cleaning device 71 is used.
However, there is a problem that the size of the entire washing and drying apparatus is further increased because the volume of the cleaning and drying apparatus is further increased.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and an ultrasonic cleaning apparatus capable of reducing the size of an apparatus and using a small amount of a cleaning liquid, and a cleaning and drying apparatus using the ultrasonic cleaning apparatus. It is intended to provide a device.

[0008]

Means for Solving the Problems To achieve the above object, an ultrasonic cleaning apparatus of the present invention performs ultrasonic cleaning while dipping a thin long object to be cleaned in a cleaning liquid in a cleaning tank, In the ultrasonic cleaning apparatus, the cleaning liquid spilling from the cleaning tank is collected by a cleaning liquid collecting tank disposed around the cleaning tank, and the collected cleaning liquid is filtered by a filter, and then returned to the cleaning tank and circulated again. A metal horn-type ultrasonic vibrator is located on one of the upper surface and the lower surface of the thin long object passing through the cleaning tank, facing the thin long object, and the thin long object is arranged. The ultrasonic reflection plate is disposed opposite to the metal horn type ultrasonic vibrator with the interposed therebetween.

In the case of an ultrasonic cleaning apparatus having such a configuration, the metal horn type ultrasonic wave is disposed such that one of the upper surface and the lower surface of the thin long object to be cleaned is opposed to the surface. The cleaning is performed directly by the ultrasonic waves emitted from the vibrator 21. Further, part of the ultrasonic wave radiated from the metal horn type ultrasonic vibrator 21 is transmitted through the thin and long object and is also radiated to the opposite surface side. The light reflected by the plate is applied to the other surface of the thin long object, and the other surface of the thin long object is subjected to ultrasonic cleaning. Therefore, in the case of the ultrasonic cleaning apparatus of the present invention, it is possible to clean the front and back surfaces of a thin long object using only one ultrasonic transducer, and it is possible to reduce the size of the ultrasonic cleaning apparatus. .

[0010] The cleaning and drying apparatus of the present invention comprises the ultrasonic cleaning apparatus having the above-described configuration, and a drying apparatus for drying a thin and long object after being cleaned by the ultrasonic cleaning apparatus. . A plurality of the ultrasonic cleaning devices are arranged along a traveling path of a thin and long object, and a cleaning liquid recovery tank independently provided for each ultrasonic cleaning device is integrated into one, and one ultrasonic cleaning device is provided. The cleaning liquid recovery tank may be configured to be shared by the plurality of ultrasonic cleaning apparatuses. Further, as the drying device, an air nozzle type drying unit, a moisture absorbing roller type drying unit, and a hot air type drying unit are arranged, and a cleaning device other than an ultrasonic type is added. It may be.

In the case of the cleaning / drying apparatus having such a configuration, the ultrasonic cleaning apparatus is downsized, so that the entire cleaning / drying apparatus can be downsized. Further, even if a plurality of ultrasonic cleaning devices are installed, the overall volume does not become so large. In addition, when one cleaning liquid recovery tank is shared by the plurality of ultrasonic cleaning devices, the increase in the volume of the entire cleaning / drying device can be further reduced. In addition, when an air nozzle type drying unit, a moisture absorbing roller type drying unit, and a hot air type drying unit are used as the drying device, a thin long object wet with the cleaning liquid can be dried more quickly. Further, when a cleaning device of another cleaning type other than the ultrasonic type is added, the cleaning effect can be further enhanced.

[0012]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic sectional view showing an embodiment of the ultrasonic cleaning apparatus according to the present invention. In the figure, the same parts as those of the conventional device (FIG. 6) are denoted by the same reference numerals.

The embodiment shown in FIG. 1 has a configuration similar to that of a conventional ultrasonic cleaning apparatus, and instead of a pair of throw-in type ultrasonic transducers 3A and 3B conventionally used, ultrasonic waves are concentrated. Horn type ultrasonic vibrator 2 which can emit light
1 and an ultrasonic reflector 22 for reflecting the ultrasonic waves radiated from the metal horn type ultrasonic vibrator 21.

That is, the metal horn type ultrasonic vibrator 21
Are disposed on the upper surface side of the lead frame 4, and the ultrasonic reflection plate 22 is disposed on the lower surface side of the lead frame 4 so as to face the metal horn type ultrasonic vibrator 21. The metal horn type ultrasonic vibrator 22 has a width of 80 mm and a thickness of 0.1 to 0.2 having the same dimensions as the conventional one.
mm lead frame at 10 to 20 m / min for cleaning, horn tip cross-sectional area 77 × 20 mm, vibration amplitude width 20 μmm pp (oscillation frequency 19.5 KHz)
What is necessary is just to arrange | position the thing of about 10 mm or less from the upper surface of the lead frame 4. Further, as the ultrasonic reflection plate 22, for example, stainless steel or the like may be used, and the ultrasonic reflection plate 22 may be disposed within a distance of 10 mm or less from the lower surface of the lead frame 4.

In such a configuration, the upper surface of the lead frame 4 is directly cleaned by the ultrasonic waves radiated from the metal horn type ultrasonic vibrator 21. On the other hand, no ultrasonic transducer is arranged on the lower surface side of the lead frame 4, but since the lead frame 4 is a thin metal plate, strong ultrasonic waves radiated from the metal horn type ultrasonic transducer 21 At the same time that the upper surface of the lead frame 4 is cleaned, a part of the upper surface is transmitted to the lower surface side of the lead frame 4.

The transmitted ultrasonic waves are reflected by the ultrasonic reflecting plate 22 and strike the lower surface of the lead frame 4, and the lower surface of the lead frame 4 is ultrasonically cleaned. In general, the lead frame 4 has a large number of punched holes having a pattern necessary for mounting a semiconductor chip. Ultrasonic waves passing through these holes are also reflected by the ultrasonic reflection plate 22, and the lead frame 4 Wash by touching the lower surface. For this reason, even if the ultrasonic transducer is not arranged on the lower surface side of the lead frame 4, it is possible to realize the same ultrasonic cleaning as the conventional ultrasonic cleaning device.

The horn tip cross-sectional area is 7
When the metal horn type ultrasonic transducer 21 of 7 × 20 mm was used, the length L of the cleaning tank 2 in the lead frame feed direction could be reduced to about 100 mm. In the case of the conventional ultrasonic cleaning device, the throw-in type ultrasonic transducers 3A, 3
B (see FIG. 6) requires a length of about 300 mm in the lead frame feeding direction. Therefore, the length of the cleaning tank 2 in the lead frame feeding direction is at least 340 to 350 m.
m or more was required. Therefore, according to the ultrasonic cleaning apparatus of the present invention, the volume of the cleaning tank 2 can be reduced to about 1/3 or less of the conventional one.

FIG. 2 shows a first embodiment of the lead frame cleaning / drying apparatus according to the present invention, which is constructed using the above ultrasonic cleaning apparatus. In the figure, reference numeral 31 denotes the above-described ultrasonic cleaning apparatus of the present invention, and reference numeral 32 denotes a drying apparatus for forcibly drying the cleaning liquid adhered to the surface of the lead frame 4 cleaned by the ultrasonic cleaning apparatus 31. In this example, the drying device 32 includes an air nozzle type drying unit 33 including an air nozzle 33a that blows out high-pressure air for blowing down the cleaning liquid attached to the surface of the lead frame 4, and a cleaning liquid attached to the surface of the lead frame 4. Roller-type drying unit 34 composed of a moisture-absorbing roller 34a that absorbs moisture
And hot air drying unit 3 for drying by blowing hot air
And 5.

In the case of the cleaning and drying apparatus shown in FIG. 2, the ultrasonic cleaning apparatus 31 can be miniaturized as described above, and can be systemized by combining with other drying units 33 to 35. It is possible to reduce the size.

FIG. 3 shows a lead frame cleaning / drying apparatus according to a second embodiment of the present invention constructed using the above-mentioned ultrasonic cleaning apparatus. The cleaning and drying apparatus of FIG. 3 has the same configuration as that of FIG.
1B and 31C are arranged along the traveling path of the lead frame 4. With such a configuration, the cleaning effect can be improved while suppressing an increase in the volume of the entire cleaning and drying.

FIG. 4 shows a third embodiment of the lead frame cleaning / drying apparatus of the present invention which is constructed by using the above ultrasonic cleaning apparatus. The cleaning / drying apparatus of FIG. 4 has the same configuration as the cleaning apparatus of FIG. 3 and combines the cleaning liquid recovery tanks 9 provided independently for each of the ultrasonic cleaning apparatuses 31A, 31B, and 31C into one. The cleaning liquid recovery tank 9 is configured to be shared by a plurality of ultrasonic cleaning devices 31A, 31B, 31C. With such a configuration, the increase in the volume of the entire washing / drying apparatus can be further suppressed.

FIG. 5 shows a fourth embodiment of the lead frame cleaning / drying apparatus of the present invention constructed using the above ultrasonic cleaning apparatus. The cleaning and drying apparatus shown in FIG. 5 has a configuration similar to that of the cleaning and drying apparatus shown in FIG. It is attached to a stand. When the ultrasonic cleaning device 31 of the present invention is used, the size of the entire cleaning device can be reduced. Therefore, even if another cleaning device is added, the size of the device is not so large.

In each of the above embodiments, the metal horn type ultrasonic vibrator 21 is connected to the lead frame 4.
And the ultrasonic reflection plate 22 is disposed on the lower surface of the lead frame 4. On the contrary, the metal horn type ultrasonic vibrator 21 is disposed on the lower surface of the lead frame 4 so that The plate 22 may be arranged on the upper surface side of the lead frame 4. Further, the case where a hoop-type lead frame is used as an object to be cleaned has been described as an example, but the present invention is not limited to this, and any thin and long object that can transmit ultrasonic waves can be applied.

[0024]

As described above, according to the ultrasonic cleaning apparatus of the first aspect, the metal horn is located on one of the upper surface and the lower surface of the thin and long object passing through the cleaning tank. Type ultrasonic transducer is arranged facing the thin and long object, and the ultrasonic reflector is disposed opposite to the metal horn ultrasonic transducer with the thin and long object interposed therebetween, so that it is used for cleaning. Need only one ultrasonic transducer. This makes it possible to reduce the size of the cleaning tank and the cleaning liquid recovery tank for accommodating the cleaning liquid and to reduce the amount of the cleaning liquid used. Can be In addition, since a small amount of the cleaning liquid is required, the capacity of the pump for circulating the cleaning liquid may be small, and the power consumption may be reduced.

In the case of using the cleaning and drying apparatus according to the second aspect, the ultrasonic cleaning apparatus according to the first aspect is combined with a drying apparatus for drying a thin and long object that has been cleaned by the ultrasonic cleaning apparatus. Therefore, the entire washing / drying apparatus can be made compact.

Further, in the case of the cleaning and drying apparatus according to the third aspect, since a plurality of ultrasonic cleaning apparatuses according to the first aspect are arranged along the traveling path of the thin and long object, the volume of the entire apparatus is so large. The cleaning effect can be improved without performing.

In the cleaning and drying apparatus according to the fourth aspect, the cleaning liquid recovery tank independently provided for each ultrasonic cleaning apparatus is integrated into one, and one cleaning liquid recovery tank is provided by a plurality of supersonic cleaning apparatuses. Since the ultrasonic cleaning apparatus is used in common, the volume of the entire cleaning / drying apparatus can be further reduced.

In the cleaning and drying apparatus according to the fifth aspect, an air nozzle type drying unit, a moisture absorbing roller type drying unit, and a hot air type drying unit are arranged as the drying device, so that the thin and long wall wet with the cleaning liquid is provided. The object can be dried more quickly.

Further, in the case of using the cleaning and drying apparatus according to the sixth aspect, since a cleaning apparatus of another cleaning type other than the ultrasonic method is added, dust and dirt that cannot be removed by ultrasonic waves can be effectively removed. And the cleaning effect can be further enhanced.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view showing one embodiment of an ultrasonic cleaning apparatus according to the present invention.

FIG. 2 is a schematic structural view showing a first embodiment of a cleaning and drying apparatus for a lead frame configured by using the ultrasonic cleaning apparatus of the present invention.

FIG. 3 is a schematic structural view showing a second embodiment of a cleaning and drying apparatus for a lead frame configured by using the ultrasonic cleaning apparatus of the present invention.

FIG. 4 is a schematic structural diagram showing a third embodiment of a lead frame cleaning / drying apparatus configured by using the ultrasonic cleaning apparatus of the present invention.

FIG. 5 is a schematic structural view showing a fourth embodiment of a lead frame cleaning / drying apparatus configured by using the ultrasonic cleaning apparatus of the present invention.

FIG. 6 is a schematic sectional view showing a configuration of a conventional ultrasonic cleaning apparatus.

FIG. 7 is a schematic structural view showing an example of a lead frame cleaning / drying apparatus configured using a conventional ultrasonic cleaning apparatus.

FIG. 8 is a schematic structural view showing another example of a lead frame cleaning / drying apparatus configured using a conventional ultrasonic cleaning apparatus.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cleaning liquid 2 Cleaning tank 4 Lead frame 5, 6 Feed roller 7 Inlet slit 8 Outlet slit 9 Cleaning liquid recovery tank 10 Circulation path 11 Filter 12 Pump 13 Valve 21 Metal horn type ultrasonic transducer 22 Ultrasonic reflection plate 31, 31A-31C Ultrasonic cleaning device 32 Drying device 33 Air nozzle type drying unit 34 Moisture absorbing roller type drying unit 35 Hot air type drying unit 36 Cleaning device that becomes a cleaning type other than the ultrasonic type

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Koji Katsura 5 Kaiyo Co., Ltd., 3-1-1, Sakaemachi, Hamura-shi, Tokyo (56) References JP-A-10-323635 (JP, A) 6-182304 (JP, A) JP-A-7-290008 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) B08B 3/12 B08B 3/08 H01L 23/50

Claims (6)

(57) [Claims] An ultrasonic cleaning of a thin long object to be cleaned is carried out while dipping in a cleaning liquid in a cleaning tank, and a cleaning liquid spilling from the cleaning tank is collected by a cleaning liquid collecting tank disposed around the cleaning tank. Then, after the collected cleaning liquid is filtered by a filter, the ultrasonic cleaning apparatus is configured to return to the cleaning tank and circulate again, wherein either one of the upper surface or the lower surface of the thin long object passing through the cleaning tank. The metal horn-type ultrasonic vibrator is located toward the thin-walled long object and the ultrasonic reflector is opposed to the metal-horn-type ultrasonic vibrator with the thin long object interposed therebetween. An ultrasonic cleaning device characterized by being arranged. 2. A cleaning / drying apparatus comprising: the ultrasonic cleaning apparatus according to claim 1; and a drying apparatus for drying a thin and long object that has been cleaned by the ultrasonic cleaning apparatus. 3. The cleaning and drying apparatus according to claim 2, wherein a plurality of the ultrasonic cleaning apparatuses according to claim 1 are arranged along a traveling path of a thin and long object. 4. The cleaning liquid recovery tank provided independently for each ultrasonic cleaning apparatus is integrated into one, and one cleaning liquid recovery tank is shared by a plurality of ultrasonic cleaning apparatuses. 3. The washing and drying apparatus according to 3. 5. The washing and drying method according to claim 2, wherein the drying device includes an air nozzle type drying unit, a moisture absorbing roller type drying unit, and a hot air type drying unit. apparatus. 6. The cleaning / drying apparatus according to claim 2, further comprising a cleaning apparatus of a cleaning type other than the ultrasonic type.