JP3288126B2 - Thin film forming apparatus and thin film forming method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION The present invention relates to an intaglio roll in which the body surface (including ink cells) of the intaglio roll can be easily wiped and / or dried, and the wiper is automatically pressed against the intaglio roll at a predetermined contact pressure. The present invention relates to a thin film forming apparatus and a thin film forming method capable of forming a thin film after automatically and uniformly wiping and / or drying a body surface of an intaglio roll.

As an apparatus for forming a polymer thin film pattern used for electronic parts such as a liquid crystal alignment film, for example, an intaglio roll having a large number of ink cells, an ink supply apparatus having a doctor blade for filling the ink cells with ink, and an intaglio roll There is a thin film forming apparatus including a printing roll having an elastic plate to which the ink is transferred on a plate cylinder, and a printing table for fixing a printing medium to which the ink of the printing roll is transferred.

[0003]

2. Description of the Related Art Normally, not all of the ink filled in the ink cells of the intaglio roll is transferred to the printing roll, and some ink remains in the ink cells of the intaglio roll. If left as it is, the remaining ink dries or hardens to become an ink solid and sticks to the back of the ink cell. If the intaglio roll is used while it is stuck, the ink stuck on the intaglio roll will be dissolved again in the new ink, or the ink solids will fall off and mix with the new ink supplied to the intaglio roll. Will be done. In addition, since the ink stuck in the ink cell reduces the capacity of the ink cell, the transfer amount of the ink to the printing roll is correspondingly reduced. Therefore, conventionally, the ink remaining in the ink cells of the intaglio roll is wiped off, but all of the cleaning is performed manually. In other words, first, the wiper impregnated with the solvent that dissolves the ink is pressed by a human hand on the body surface of the intaglio roll so as to have a predetermined contact pressure, and the intaglio roll is pressed while being pressed. While rotating, it is moved along the axial direction of the intaglio roll. Next, the intaglio roll is dried in order to remove a solvent or the like remaining on the body surface of the intaglio roll. That is, first, a state in which a predetermined distance is provided between the gas ejection means for injecting the gas for drying the intaglio roll by a human hand and the surface of the body of the intaglio roll, and the surface of the body of the rotating intaglio roll is blown. The intaglio roll is moved along the axial direction of the intaglio roll by a human hand while rotating while being attached.

[0004] Next, ink is filled into a large number of ink cells of the intaglio roll by the ink supply device, the ink is transferred from the intaglio roll to the elastic plate of the printing roll, and the printing medium fixed to the printing table from the printing roll. The ink is transferred to and printed.

[0005]

Conventionally, there have been the following problems. (1) Since the printing is performed after all the wiping and drying of the intaglio roll by hand, it is troublesome and the efficiency of thin film formation is very poor.

(2) Since a person enters and exits to wipe the intaglio roll, dust and dust fly from the person and his clothes and the ground, causing a decrease in the cleanliness of the surroundings. Also, the wiper will be grasped by hands with dust or oil. Therefore, even if the intaglio roll is wiped, dust, dust, dirt and oil will adhere to the intaglio roll, so that the intaglio roll will not be wiped cleanly even if it takes time and effort, and work efficiency is poor. In addition, when the ink is transferred from the intaglio roll to which dust, dust, dirt, or oil has adhered, dust, dust, dirt, or oil is mixed with the ink. Therefore, using such ink,
For example, in the case of forming a polymer thin film such as a liquid crystal alignment film, there is a problem in that the insulating property is reduced, alignment unevenness occurs, and a part of the film is chipped, so that the function of the thin film is reduced. I do.

(3) Since the intaglio roll is wiped while holding the wiper by hand and pressing against the intaglio roll, the wiper is pressed against the intaglio roll with a predetermined contact pressure, and the wiper is moved in the axial direction of the intaglio roll. During this time, it is extremely difficult to maintain a predetermined contact pressure, and the contact pressure increases or decreases. As a result, sufficient wiping and insufficient wiping are generated, and the residual ink or the like stuck in the ink cells cannot be sufficiently removed. In addition, the body surface of the intaglio roll cannot be wiped uniformly. If you supply ink to an intaglio roll that has not been sufficiently wiped,
Since the ink sticking to the intaglio roll mixes with the new ink supplied to the intaglio roll, different kinds of ink are mixed each time the ink is replaced with another type. Further, since the adhered ink remains in the ink cell without being transferred to the printing roll, the transfer amount of the ink to the printing roll is reduced accordingly, and a thin film having a sufficient film thickness cannot be formed on the printing medium. In addition, if the ink is not sufficiently and uniformly wiped, there are places where the ink well enters and places where the ink does not enter the ink cells, and therefore the amount of the ink transferred to the printing rolls becomes uneven and the film thickness is not uniform. . Therefore, for example, when a polymer thin film pattern such as a liquid crystal alignment film is formed, there is a problem that the uniformity of the film thickness is deteriorated, display unevenness is caused, and the function of the thin film is reduced.

(4) Since the intaglio roll is dried by holding the gas ejecting means by a human hand, a predetermined distance is provided between the gas ejecting means and the body surface of the intaglio roll, and the intaglio roll is moved in the axial direction. It is extremely difficult to maintain a predetermined distance while moving the gas blowing means, and the distance increases or decreases. As a result, there are places where drying is sufficient and places where drying is insufficient, and the body surface of the intaglio roll cannot be dried uniformly. When the ink is supplied to the intaglio roll that has not been dried uniformly, the solvent used for wiping is mixed with the new ink supplied to the intaglio roll as impurities. For this reason, when a polymer thin film pattern such as a liquid crystal alignment film is formed using such an ink, for example, the insulating property is reduced, and the film thickness and the alignment unevenness are caused. Problem arises.

[0009]

In order to achieve the above object, the present invention provides a hand body, a wiper holder means for wiping an intaglio roll attached to one end of the hand body via a repulsive pressing means. Is composed of an intaglio roll automatic wiping device attached to the arm of an articulated robot, an intaglio roll having a large number of ink cells, an ink supply device for filling the ink cells with ink, and ink transfer of the intaglio roll. A printing device comprising a printing roll having an elastic plate to be carried on a plate cylinder and a printing table for fixing a printing medium to which the ink of the printing roll is transferred.
A thin film forming apparatus, wherein the repulsion pressing means comprises a hand body
Of the repulsive force generator fixed at one end of the
Consists of a bearing body fixed at the end, for wiping intaglio rolls
Wiper holder means can rotate to one end of the bearing body
It was configured to be attached to .

According to the thin film forming method of the present invention, in the thin film forming method of performing printing after wiping the intaglio roll with a wiper, the wiper holder means of the intaglio roll automatic wiping device according to the present invention holds the wiper. By driving the arm of the articulated robot, the wiper holder means is moved, the wiper is pressed against the body surface of the intaglio roll with a predetermined contact pressure, and then the intaglio roll is rotated and the intaglio roll is rotated. By driving the arm of the articulated robot while maintaining the contact pressure of the wiper against the body surface, the hand is moved along the axial direction of the intaglio roll, and then the arm of the articulated robot is driven. By separating the wiper from the body surface of the intaglio roll, the wiping of the intaglio roll is completed,
Next, the printing device was configured to print on the printing medium.

The thin film forming method according to the present invention is characterized in that, in the thin film forming method according to the present invention, after the automatic wiping of the intaglio roll is completed, the arm of the articulated robot is driven, so that the body surface of the intaglio roll is charged. Claims 2 and 3
Moving the gas injecting means for drying the intaglio roll of the intaglio roll automatic wiping device according to any one of the above, and then rotating the intaglio roll, while injecting gas from the gas injecting means for intaglio roll drying, By driving the arm of the articulated robot, the gas ejection means is moved along the axial direction of the intaglio roll together with the hand.

[0012]

According to the thin film forming apparatus and the thin film forming method of the present invention,
The intaglio roll automatic wiping unit automatically wipes and dries the intaglio roll using a hand attached to the arm of the articulated robot. Therefore, the intaglio roll can be automatically wiped and dried before and after the printing process performed by the printing device section, and the entire thin film formation process can be smoothly performed, thereby improving the efficiency of thin film formation. In the thin film forming apparatus and the thin film forming method according to the present invention, the wiper can always be pressed against the body surface of the intaglio roll with a predetermined contact pressure by the repulsion pressing means of the intaglio roll automatic wiping device. Therefore, the wiping and / or drying of the intaglio roll can be performed sufficiently and uniformly, so that foreign matter is not mixed into the thin film, and a thin film having a uniform thickness can be formed.

[0013]

Embodiments of the present invention will be described below with reference to the drawings. First, the intaglio roll automatic wiping unit of the thin film forming apparatus of the present invention will be described. As shown in FIGS. 1 and 3, the intaglio roll automatic wiping device according to the present invention includes a hand main body 1 and a wiper holder for wiping an intaglio roll which is attached to one end of the hand main body 1 through a repulsive pressing means 3. The hand 5 composed of the means 2 is connected to the arm 6 of the articulated robot 6.
0 is attached.

The articulated robot 6 is a widely used industrial robot in which a plurality of arms 60 are connected via a joint 61 so as to be able to freely bend horizontally and vertically. That is,
The articulated robot 6 may be a horizontal articulated robot, a vertical articulated robot, or an orthogonal robot. The hand 5 is attached to one end of an arm group in which a plurality of arms 60 are gathered, and the other end is supported by a robot base 62. The joint 61 is a part that bends and drives the arm 60 in multiple steps or steplessly by hydraulic pressure, water pressure, or a motor. The robot base 62 is a part that drives the arm group in multiple steps or steplessly in the vertical direction by hydraulic pressure, water pressure, or a motor.

The hand body 1 is fixed to the arm 60 of the articulated robot 6.
The drive 5 can move the hand 5 in an arbitrary direction (see FIGS. 1 and 3). More specifically, as shown in FIGS. 5 and 6, the hand body 1 has a receiving portion 10 for receiving a repulsive force generator 30 such as a spring described later and an arm 60 of the articulated robot 6 fixed to one end thereof. And a fixed portion 11.

The wiper holder means 2 has a mechanism capable of holding and releasing the wiper 8 on the pressing surface 23 of the wiper mounting portion 20. The pressing surface 23 of the wiper holder means 2 may be a flat surface or a curved surface following the curved surface of the body surface 71 of the intaglio roll A. The wiper holder means 2 repels with the hand main body 1 via a repulsion pressing means 3 described later, and presses the wiper 8 against the body surface 71 of the intaglio roll A with a predetermined contact pressure. (Figure 3,
5 and 6). As the wiper 8, a non-woven fabric impregnated with a solvent for dissolving the ink or any
There is no dry non-woven fabric . A more specific configuration of the wiper holder means 2 includes a wiper mounting portion 20 and a rotating shaft portion 21 as shown in FIGS.
The wiper mounting part 20 has a pressing surface 23 of the wiper 8. The rotating shaft portion 21 is fitted into the bearing portion 311 of the bearing body 31, and the wiper holder means 2 rotates about the rotating shaft portion 21 with respect to the bearing body 31. The wiper mounting part 20 has a pressing surface
23 to hold or release the wiper 8
A wiper chuck 24 is provided. Wiper
The chuck 24 is, for example, a metal material or a resin material.
And the pressing force 23
Hold the wiper 8.

The repulsive pressing means 3 is a repulsive force generator such as a spring or an air cylinder (not shown) for generating a repulsive force between the hand body 1 and the wiper holder means 2. 30. By this repulsive force, the wiper holder means 2 is pressed against the plate cylinder surface of the intaglio roll A with a predetermined contact pressure. One end of the spring is fixed to the receiving portion 10 of the mounting body 300, and the other end is fixed to the receiving portion 310 of the bearing body 31 (see FIGS. 5 and 6). The guide rod 32 and the stopper 33 provide a limit at which the hand body 1 and the bearing body 31 can be separated from each other so that the repulsive force of the spring does not cause the hand body 1 and the bearing body 31 to be separated.

The hand 5 may be provided with a gas jetting means 4 for drying an intaglio roll, in addition to the wiper holder means 2. Examples of the gas for drying the intaglio roll include a gas such as nitrogen. The gas ejecting means 4 is a gas ejecting device such as a nozzle, and is attached to a side of the wiper holder means 2.

The elastic plate automatic attachment / detachment means 10 is attached to another part of the hand body 1 to which the wiper holder means 2 for wiping the intaglio roll is attached via the repulsion pressing means 3.
A wiper holder means 200 for wiping 0 and / or doctor blades may be mounted (not shown). The elastic plate automatic attaching / detaching means 100 is attached to the hand main body 1 via the elastic plate tension automatic adjusting means 101 as shown in FIG. The elastic plate automatic mounting / removing means 100 has a fixed chuck means and a tension chuck means, and the fixed chuck means is fixed to the lower surface of the hand body 1 together with the elastic plate tension automatic adjusting means 101. Accordingly, the distance between the tension chuck means and the hand body 1 is adjusted. When it becomes necessary to attach the elastic plate to the printing roll plate cylinder with a predetermined tension, first, both ends of the elastic plate are held by the fixed chuck means and the tension chuck means, and only the fixed chuck means side of the elastic plate is the printing roll plate cylinder. The elastic plate is wound around the printing roll plate cylinder while rotating the printing roll plate cylinder and adjusting the tension applied to the elastic plate by the elastic plate tension automatic adjusting means 101. The fixed chuck means and the tension chuck means are means for holding both ends of the elastic plate by a chuck mechanism, an electromagnet, or the like. The elastic plate tension automatic adjusting means 101 is composed of a spring, an air cylinder, or the like.

The wiper holder means 200 for wiping the doctor blade is, for example, as shown in FIG.
At a position facing the elastic plate automatic attachment / detachment means 100,
It is attached to the hand main body 1 via the repulsion pressing means 201. When it becomes necessary to remove unnecessary ink remaining on the doctor blade, the wiper holder 200 of the doctor blade holds a wiper made of non-woven fabric or the like impregnated with a solvent or the like, and rotates the hand main body 1 by 90 °. Then, the arm 60 of the articulated robot 6 is driven to wipe the surface of the doctor blade. Rebound pressing means 2
01 uses a repulsive force of a spring, an air cylinder, or the like to bring the wiper into contact with the tip of the doctor blade at a predetermined contact pressure, so that the upper and lower surfaces of the doctor blade are pinched by the wiper at a predetermined pinching pressure. It is a means to do.

The printing unit of the thin film forming apparatus according to the present invention will be described. The printing device section of the present invention includes an intaglio roll A having a large number of ink cells, ink supply means B for filling the ink cells with ink, and a printing roll C having an elastic plate on the plate cylinder to which the ink of the intaglio roll is transferred. Table D for fixing the printing medium to which the ink of the printing roll is transferred
Consists of

In the printing unit, a support frame F is formed in the center of a base E formed of a rectangular base, and an intaglio roll A and a print roll C are rotatably supported on the support frame F.
Above the intaglio roll A, an ink supply means B is arranged. A print table D is arranged on the upper surface of the base 1.

The intaglio roll A has a body fixed to the rotating shaft, and has a large number of ink cells on the surface of the body. The ink cell has a depth of, for example, 10 to several tens of μm. The barrel is in contact with the convex portion of the elastic plate of the printing roll C plate cylinder at a constant pressure.

The ink supply means B includes an ink supply nozzle B
1 and a doctor blade B2. Ink is supplied from the ink supply nozzle B1 to the intaglio roll A so that the ink is accumulated in a portion where the doctor blade B2 and the intaglio roll A are in contact. Ink has, for example, a viscosity of several tens to
It is about 30,000 cps and is composed of a mixture of a synthetic resin or a resin precursor and a solvent. Doctor blade B
Reference numeral 2 denotes a plate-like body, which is attached to a doctor blade support rod B3 attached to a support frame F. By rotating the doctor blade supporting rod B3, the doctor blade B2 comes into contact with or separates from the surface of the intaglio roll A. The ink supplied from the ink supply nozzle B1 is measured and scraped by a doctor blade B2. In this way, the ink supply means B converts the ink dropped on the surface of the intaglio roll A into the intaglio roll A.
The ink is spread on the surface and the ink is filled in the ink cells, and a highly uniform ink film is formed on the surface of the intaglio roll A.

The printing roll C has a body fixed to its rotating shaft. The body has a soft elastic material made of rubber such as butyl rubber, synthetic resin such as nylon resin, or photosensitive rubber or photosensitive resin. The plate 7 is installed or removed. The ink of the intaglio roll A is transferred to the elastic plate 7.

The printing table D is mounted on a base E. On the upper surface of the base E, a printing position b below the support frame F and a printing medium placement position a away from the lower side of the support frame F toward the print medium loading side and a print position b below the support frame F and away from the support frame F below Guide rails D1 are fixed to both sides between the carry-out positions c. The printing table D moves between the positions a, b, and c along the guide rails on the base E. The printing medium D2 is mounted on the printing table D at the printing medium mounting position a of the base E,
At the printing position b of the base E, the ink of the elastic plate 7 of the printing roll C is transferred onto the printing material D2 by contacting the printing roll C to form a print, and the printing material D2 is transferred at the unloading position c of the base E. Is carried out. The print table D has a plate-shaped print medium D2 placed on the upper surface thereof, determines the position of the print medium D2, and holds it. A rack D3 parallel to the guide rail D1 is attached to a lower end surface of the printing table D.
A pinion D4 is interlocked with the rack D3, and the print table D is reciprocally slid together with the rack D3 by forward / reverse rotation of the pinion D4. The thin film forming apparatus according to the present invention includes a
Operation of intaglio roll A and automatic wiping device for intaglio roll
For linking wiping and drying operations
It may have a control device incorporating a computer.

The method for forming a thin film according to the present invention will be described. First, in the intaglio roll automatic wiping device, the body surface 71 of the intaglio roll A to which unnecessary ink or the like has adhered is wiped by the wiper 8 to automatically remove unnecessary ink. The intaglio roll A is a cylindrical ceramic or metal body having a rotating shaft 70, and has a body surface 71 provided with a large number of ink cells. The ink enters the ink cell and transfers the ink into the ink cell on the surface of the printing roll C arranged in contact with the plate cylinder of the intaglio roll A.

First, the wiper 8 is held on the pressing surface 23 of the wiper holder means 2 of the intaglio roll automatic wiping device. For example, the wiper may be fixed by a plurality of wiper chucks 24 attached to the side of the wiper attachment portion 20 of the wiper holder 2.

Next, by driving the arm 60 of the articulated robot 6, the wiper holder means 2 is moved, and the wiper 8 is placed on the body surface 71 of the intaglio roll A.
Is pressed with a predetermined contact pressure. Arm 60
Is driven by bending the arm 60 appropriately via the joint 61 of the articulated robot 6 or by moving the robot base 62.
Is moved vertically. The predetermined contact pressure means that the wiper 8 is brought into contact with the body surface 71 of the intaglio roll A, and by rotating the intaglio roll A, the solvent impregnated in the wiper 8 causes the body surface 71 of the intaglio roll A to rotate. This is the pressure when the unnecessary ink that has entered the ink cell of No. 1 is sufficiently dissolved, and is further contacted so as to be completely wiped off by the wiper 8.

Next, while rotating the intaglio roll A and maintaining the contact pressure of the wiper 8 against the body surface 71 of the intaglio roll A, the arm 6 of the articulated robot 6 is rotated.
0, the hand 5 is intaglio roll A
To move along the axial direction. When the curvature of the body surface 71 of the intaglio roll A is large and the wiper 8 held by the wiper holder means 2 is flat, the body surface 71 of the intaglio roll A and the wiper 8 are in line contact with each other. Floats out of contact. If the wiper 8 is strongly pressed against the plate cylinder surface of the intaglio roll A so that the entire surface of the wiper 8 does not float, a portion having a strong contact pressure and a portion having a weak contact pressure may be formed. In this case, the ink is actually wiped off only at the line contact portion or the portion where the contact pressure is the maximum, and there are a portion where the dirt adheres well and a portion where the dirt does not adhere so much that the entire surface of the wiper is not wasted. It cannot be used and the wiping efficiency is poor. In such a case,
As shown in FIG. 4, the direction in which the hand 5 is moved may be moved in a direction at a fixed angle with respect to the axial direction. By doing so, the wiper 8 and the intaglio roll A
Since the portion that is in line contact with the portion or the portion where the contact pressure is maximum moves over the entire surface of the wiper 8, the entire surface of the wiper can be used without waste and the wiping efficiency is improved.

The intaglio roll A rotated by the wiper 8
While wiping the torso surface 71, the angle between the bearing body 31 and the wiper holder means 2 is adjusted while maintaining a predetermined contact pressure of the wiper 8 against the torso surface 71 of the intaglio roll A. (See FIG. 6). The rotation of the wiper holder 2 is caused by the slight movement of the hand 5 while the wiper holder 2 is moving the plate cylinder of the intaglio roll A and the pressing surface 23 of the wiper holder 2 and the intaglio roll. This is performed as needed when the plate cylinder surface 71 of A is not parallel and tilts. That is, the pressing surface 23 of the wiper holder means 2 is
Of the wiper 8 is lifted from the plate cylinder surface 71 of the intaglio roll A, and the body surface 71 of the intaglio roll A and the wiper 8 are contacted with a uniform contact pressure. The contact is lost, and it cannot be wiped cleanly. Then, by rotating the wiper holder means 2 by a predetermined angle about the rotation shaft 21 in accordance with the inclination, the pressing surface 23 of the wiper holder means 2 and the plate cylinder surface 71 of the intaglio roll A are in parallel. Thus, the pressing surface 23 of the wiper holder means 2 and the plate cylinder surface 71 of the intaglio roll A can be brought into contact with a uniform contact pressure without any gap.

Next, the arm surface 60 of the intaglio roll A is driven by driving the arm 60 of the articulated robot 6.
The wiper 8 is pulled away from the roller, and the wiping of the intaglio roll A is completed.

An automatic drying method after wiping the intaglio roll A will be described. First, the arm 5 of the articulated robot 6 is driven to move the hand 5 so as to be at a predetermined distance from the body surface 71 of the intaglio roll A. The gas jetting means 4 for drying the intaglio roll is moved. The driving of the arm 60 is performed via the joint 61 of the articulated robot 6.
Is appropriately bent or stretched, or the robot base 62 is vertically moved.

Next, while rotating the intaglio roll A and injecting gas from the gas injecting means 4 for drying the intaglio roll, the articulated robot 6 is driven so that the gas injecting means 4 is rotated by the axis of the intaglio roll A. Move along the direction. The intaglio roll A is rotated at a constant rotation speed. The rotation speed of the intaglio roll A depends on the gas ejection means 4.
It is set depending on the amount and temperature of the gas ejected from the ink, the speed of movement of the intaglio roll A in the axial direction, and the like. For example,
When the amount of gas ejected from the gas ejection means 4 is large, or when the temperature is high, or when the speed of movement of the gas ejection means 4 in the axial direction of the intaglio roll A is low, the rotation of the intaglio roll A Should be relatively quick. When the amount of gas ejected from the gas ejection means 4 is small, the temperature is low, or the speed of movement of the gas ejection means 4 in the axial direction of the intaglio roll A is high, the intaglio roll A is used. It is good to make the rotation of the motor relatively slow .

After the intaglio roll A has been wiped / dried, a thin film is formed on the printing medium in the printing unit. That is, first, ink is supplied to the surface of the intaglio roll A by the ink supply nozzle B1 that reciprocates in the longitudinal direction of the intaglio roll A,
Next, scraping is performed by the doctor blade B2, and the ink is filled into the ink cell and measured.

When the print table D is to be moved from the print medium placing position a to the carry-out position c, after the print medium D2 is placed on the print table D, the print table D slides together with the rack D3. At the same time, the printing roll C and the intaglio roll A rotate in conjunction with the rotation of the printing table drive shaft. That is, the printing table D moves to the unloading position c via the printing position b in synchronization with the rotation of the printing roll C. At this time, the ink on the intaglio roll A is transferred onto the convex portion of the elastic plate 7 of the printing roll C, and the ink is further transferred to the printing medium D2.

Conversely, when the printing table D is moved from the unloading position c to the printing medium placing position a, the rotation of the printing roll C and the sliding movement of the printing table D are disconnected by a clutch device or the like. The printing table D is moved from the unloading position c to the printing position b regardless of the rotation of the printing roll C.
Is moved to the printing medium placing position a via the printer.

[0038]

The thin film forming apparatus and the thin film forming method of the present invention have the following effects because of the above configuration and operation. (1) Since there is no need for a person to come in and out to wipe the intaglio roll, dust and dirt do not flutter and the surroundings are improved in cleanliness. Since the hand automatically holds the wiper,
Dust, dust and dirt do not adhere to the intaglio roll. Therefore,
Since the intaglio roll is not contaminated at all and has no trouble, the wiping efficiency and the efficiency of thin film formation are improved.

(2) Dust, dust, dust and oil do not mix with the ink. Therefore, for example, when a polymer thin film pattern such as a liquid crystal alignment film is formed, a highly functional thin film can be stably obtained, for example, a desired insulating property and alignment performance can be obtained.

(3) Since the intaglio roll is wiped while automatically pressing the wiper with the hand attached to the arm of the articulated robot, the wiper can be pressed against the intaglio roll with a predetermined contact pressure. Further, the arm can be automatically moved in the axial direction of the intaglio roll while maintaining the predetermined contact pressure, so that the body surface of the intaglio roll can be wiped uniformly. Therefore, it is possible to sufficiently remove the remaining ink and the like stuck in the ink cells. Therefore, a thin film having a sufficient thickness can be formed on the printing medium. Further, the body surface of the intaglio roll can be wiped uniformly. For this reason, there is no unevenness in the transfer amount of the ink to the printing roll, and the film thickness is uniform. Therefore, for example, when a polymer thin film pattern such as a liquid crystal alignment film is formed, a thin film having a high function can be stably obtained, for example, the thickness of the thin film can be formed uniformly and display unevenness does not occur.

(4) Since the gas for drying the intaglio roll is automatically blown to the surface of the body of the intaglio roll by the hand attached to the articulated robot, there is a gap between the gas jetting means and the body of the intaglio roll. The predetermined distance can be automatically maintained easily while the gas ejection means is moved in the axial direction of the intaglio roll. Therefore, the body surface of the intaglio roll can be dried uniformly, the next printing process can be performed smoothly, and the efficiency of thin film formation can be improved.

[Brief description of the drawings]

FIG. 1 is a perspective view showing one embodiment of a thin film forming apparatus of the present invention.

FIG. 2 is an explanatory side view showing one embodiment of a printing unit of the thin film forming apparatus of the present invention.

FIG. 3 is an explanatory sectional view showing one embodiment of an automatic intaglio roll wiping device.

FIG. 4 is an explanatory diagram showing a trajectory in which the wiper holder means of the intaglio roll automatic wiping unit moves while contacting the plate cylinder surface of the intaglio roll.

FIG. 5 is an enlarged sectional explanatory view of a main part of another embodiment of the intaglio roll automatic wiping device.

6 is an A-A sectional view of FIG.

FIG. 7: Automatic installation of an elastic plate on the intaglio roll automatic wiping unit
FIG. 4 is a schematic view showing a state in which a detaching unit and a wiper holder unit for wiping a doctor blade are attached.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Hand main body 10 Receiving part 11 Fixed part 2 Wiper holder means 20 Wiper attaching part 21 Rotating shaft part 23 Pressing surface 24 Wiper chuck 3 Repulsion pressing means 30 Repulsive force generator 31 Bearing body 310 Receiving part 311 Bearing part 32 Guide Rod 33 Stopper 300 Mounting body 4 Gas ejection means 5 Hand 6 Articulated robot 60 Arm 61 Joint 62 Robot base 7 Elastic plate 70 Rotating shaft 71 Body surface 72 Printing roll 8 Wiper 100 Elastic plate automatic attaching and detaching means 101 Elastic plate tension Automatic adjustment means 200 Wiper holder means for wiping doctor blade 201 Repulsion pressing means A Intaglio roll B Ink supply means C Printing roll D Printing table B1 Ink supply nozzle B2 Doctor blade B3 Doctor blade support rod D1 plan Rail D2 printing substrate D3 rack D4 pinion E base F supporting frame

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-5-31882 (JP, A) JP-A-2-28084 (JP, A) JP-A-63-295262 (JP, A) 138547 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) B41F 9/00-9/08 B41F 17/14 B41F 35/00

Claims (6)

(57) [Claims] An intaglio roll attached to an arm of an articulated robot comprises a hand including a hand body and a wiper holder means for wiping an intaglio roll attached to one end of the hand body via a repulsive pressing means. An automatic wiping unit, an intaglio roll having a large number of ink cells, an ink supply device for filling the ink cells with ink, a printing roll having an elastic plate on the plate cylinder to which the ink of the intaglio roll is transferred, and an ink for the printing roll there a thin film forming apparatus comprising a printing device portion comprising a printing table for fixing the printing material to be transferred, means Te rebound pressing is, the hand body one
The repulsive force generator fixed to the end and the other end of the repulsive force generator
It consists of a fixed bearing body and a wiper
Iper holder means is rotatably mounted on one end of the bearing body.
A thin film forming apparatus characterized by being attached. 2. The thin film forming apparatus according to claim 1, wherein the gas jetting means for drying the intaglio roll is provided together with the wiper holder means. 3. An elastic plate tension automatic attachment / removal means and / or a wiper holder for wiping a doctor blade at another position of a hand body to which a wiper holder means for wiping an intaglio roll is attached via a repulsive pressing means. 3. A thin film forming apparatus according to claim 1, wherein said means is attached. 4. After wiping the intaglio roll with a wiper,
4. A method for forming a thin film for printing, comprising the steps of:
The wiper of the intaglio roll automatic wiping device section according to any of the above.
-Hold the wiper on the holder means, and then
By driving the robot arm, the wiper
Move the holder means and place it on the surface of the body of the intaglio roll.
Press the wiper with a constant contact pressure, then remove the intaglio roll
While rotating the intaglio roll against the body surface.
While maintaining the contact pressure of the
Drive the arm to move the hand
The robot moves along the axial direction.
By driving the arm, the body surface of the intaglio roll
The wiper from the intaglio roll to complete the
Printing on the printing medium by the printing device
A method for forming a thin film, comprising: A predetermined contact pressure is applied to the surface of the body of the intaglio roll.
Then, after pressing the wiper, rotate the intaglio roll
In both cases, the wiper contacts the surface of the body of the intaglio roll
While maintaining the pressure, the bearing body and the wiper holder
Drive the arm of the articulated robot while adjusting the angle
The hand in the axial direction of the intaglio roll.
5. The method for forming a thin film according to claim 4, wherein the thin film is moved together. 6. The method for forming a thin film according to claim 4 or 5.
After completing the automatic wiping of the intaglio roll,
By driving the arm of the knotting robot,
4. The method according to claim 2 or claim 3, wherein
Gas injection for drying the intaglio roll of the intaglio roll automatic wiping device
Move the means and then rotate the intaglio roll
In addition, gas is ejected from the gas ejection means for drying the intaglio roll
While driving the arm of the articulated robot
Therefore, the gas ejection means together with the hand is
Thin film forming method characterized by moving along a direction
Law.