JP3285691B2 - Laser processing machine - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser beam machine having an optical path bellows, which is used for preventing the optical path bellows from burning.
The present invention relates to a laser beam machine that improves the degree of sealing.

[0002]

2. Description of the Related Art Generally, a laser beam machine irradiates a work (workpiece) with a laser beam,
Performs various processes such as cutting, drilling, welding, and heat treatment of the work. Various methods have been proposed for the relative movement method between the laser beam and the work, but many systems for fixing the work and moving the laser beam have been proposed. In such a system, the processing head with a bent mirror that deflects the laser beam moves, and the optical path of the laser beam expands and contracts in order to secure safety and maintain its sealing. Flexible optical path tubes and bellows are used.

In addition, since only the bellows on the optical path side breathes (pressure fluctuation) during operation, bellows are generally provided on the opposite side of the optical path. For this configuration,
This is disclosed in Japanese Patent Publication No. Sho 62-11953, entitled "Laser Processing Machine", and FIG. In the figure, 50 corresponds to the optical path bellows, and 52 corresponds to the anti-optical path bellows.

A more specific configuration of a conventional laser beam machine will be described with reference to FIGS. In the drawing, reference numeral 1 indicated by a dashed line indicates a laser beam which travels in the direction of the arrow, is deflected by a vent mirror 3a attached to the upper part of the processing head 2, is condensed by a processing head tip 4, and is converted into a laser beam 5 by a work head. Is emitted.

Reference numeral 6 denotes a frame, which is a long structure provided in parallel with the traveling direction of the laser beam 1 toward the bent mirror 3a. The processing head 2 is configured to move in the direction of the arrow along the frame 6 by a guide structure or a driving mechanism (not shown). Reference numeral 7 denotes an optical path bellows provided so as to extend and contract so as to cover an optical path of the laser beam 1 toward the vent mirror 3a.
The laser beam incident opening is provided at one end of the processing head 2 and the other end thereof is connected to a box 8 provided at the upper end of the processing head 2 so as to cover around the vent mirror 3a.

Reference numeral 9 denotes an anti-optical path bellows, one end of which is fixed to an end of the frame 6 and the other end of which is connected to the box 8 with an opening. The light path bellows 7 and the anti-light path bellows 9 are sealed from the outside air via the box body 8 and
It is connected so that the air inside flows. Reference numeral 10 denotes an inspection lid provided on the box 8 for adjusting the optical path of the vent mirror 3a and performing maintenance inspection (cleaning and the like). Here, 11 is a reflected beam, and 15 is a laser beam focusing unit.

Next, the operation will be described. Since the processing head 2 moves along the frame 6, a relative movement operation occurs between the laser beam that irradiates the work 5 from the processing head tip 4 and the work 5, and laser processing is performed on the work 5. For example, if the work 5 is operated in a direction perpendicular to the moving direction of the processing head 2, two-dimensional laser processing on the XY plane can be realized.

The optical path of the laser beam 1 is the optical path bellows 7
The optical path bellows is protected and hermetically sealed, and the optical path bellows is secured so as to ensure that the optical path is tight against ingress of dust and the like that impedes the propagation of a laser beam from the outside due to respiration (pressure fluctuation) due to expansion and contraction of the optical path bellows 7. 9 also performs a telescopic operation at the same time. Since the optical path bellows 7 and the anti-optical path bellows 9 are required to have elasticity as described above, they are made of a cloth or a chemically synthesized material as is well known.

[0009] Other reference documents relating to the present invention include a "laser torch" disclosed in Japanese Utility Model Laid-Open No. 4-39587, a "laser processing head" disclosed in JP-A-63-188490, JP-A-61-1
"Processing head for laser heat treatment" disclosed in JP-A-36615, "Laser processing machine" disclosed in JP-A-63-104794, and "Carbonate" disclosed in JP-A-63-2577. There is a "laser processing machine" disclosed in Japanese Utility Model Laid-Open No. 4-113183.

[0010]

The conventional laser beam machine has the following problems since it is constructed as described above. First, there is a problem that the reflected beam 11 and the like from the work 5 are radiated to the optical path bellows 7 and the anti-optical path bellows 9, and the optical path bellows are burnt. Second, when maintaining the vent mirror 3a,
There is a problem that the inspection must be performed with the inspection lid 10 removed, and the box 8 obstructs the adjustment work, and the work efficiency is poor. Thirdly, although not shown, a cooling water hose is connected to the vent mirror 3a from the outside. As a result, the structure of the box 8 becomes complicated, and the cost of the apparatus itself is increased in order to increase the tightness of the optical path. There was a problem of bringing up.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and there is no burnout of bellows, it is safe, the adjustment and maintenance of the bent mirror are easy, and the sealing of the optical path is inexpensive. It aims to obtain a high laser processing machine.

[0012]

To achieve the above object, according to the Invention The laser processing machine according to claim 1, the machining head moves
Optical path for laser beams arranged parallel to the direction of motion
A bellows and an optical path bellows;
While moving along the frame,
Laser processing machine that performs laser processing by irradiating the
And one end of the optical path bellows and the anti-optical path bellows.
The laser beam traveling parallel to the frame.
Deflected in the direction perpendicular to the direction of movement of the processing head
Optical path through the bent mirror to the processing head
It is characterized by being directly connected to a pipe .

[0013] The laser processing machine according to claim 2, 請
2. The optical path bellows and the anti-optical path according to claim 1,
The tip of the processing head with the bellows sandwiching the frame
And provided on the opposite side .

[0014]

The laser processing machine according to the present invention (Claim 1)
Connect one end of the light path bellows and
A laser beam traveling parallel to the
Deflection in the direction perpendicular to the moving direction of the
Directly connected to the optical path tube leading to the processing head via the mirror
Adjustment of the vent mirror and maintenance work.
To facilitate the sealing of the optical path .

A laser processing machine according to the present invention (Claim 2)
Between the optical path bellows and the anti-optical path bellows
On the tip of the processing head and on the opposite side.
The reflected beam path bellows and anti-path
Impinge was prevented by frame over arm for bellows, or
To facilitate adjustment and maintenance of the bent mirror,
Improve sealing performance .

[0016]

Embodiment Reference Example Hereinafter, a reference example of a laser beam machine according to the present invention will be described with reference to the drawings. 1, FIG. 2 is an explanatory view showing the front and side of the record over The machine respectively, in FIG, 1 indicated by a one-dot chain line is a laser beam travels from the direction of the arrow,
Vent mirror 3a mounted on top of processing head 2
The laser beam is condensed from the processing head tip 4 and emitted to the work 5 as a laser beam. Reference numeral 6 denotes a frame, which is a long structure provided in parallel with the traveling direction of the laser beam 1 toward the bent mirror 3a.

The processing head 2 is moved in the direction of the arrow along the frame 6 by a guide structure or a driving mechanism (not shown). As a result, a relative movement operation occurs between the laser beam that irradiates the work 5 from the processing head tip 4 and the work 5, and laser processing is performed. Reference numeral 12 denotes a light shielding plate mounted on the processing head 2 side between the processing head distal end portion 4 and the optical path bellows 7, and 13 denotes a hinge provided at the base of the light shielding plate 12.

Next, the operation will be described. Those that travel in the direction of the optical path bellows 7 due to the reflected beam 11 from the work 5 or the like during laser processing are blocked by the light shielding plate 12 and do not hit the optical path bellows 7. This light shielding plate 12
Is made of metal and may be a reflector or an absorber of a laser beam, and the dimensions can be appropriately determined by studying the reflection angle or the like. Further, the light shielding plate 12 is attached to the processing head 2 side, and moves together with the point where the reflected beam 11 is generated. Therefore, it is possible to completely prevent the reflected beam 11 from hitting the optical path bellows 7.

Next, when the laser processing is stopped, adjustment and maintenance of the processing head 2 and the processing head tip 4 are performed. At this time, since the light shielding plate 12 hinders the work, the light shielding plate 12 is moved by the hinge 13. Rotate and fold. The opening / closing operation of the light-shielding plate 12 may be a receding operation of linear motion, or the like, and a limit switch or the like may be provided to interlock with the laser beam emission (for example, stop the laser beam emission when the light-shielding plate 12 is open). Etc. are also possible.

[0020] Then Example 1, described in Example 1. 3, 4, and 5
FIG. 3 is an explanatory diagram illustrating a front surface, a side surface, and a plane of the first embodiment, respectively. Also, here, conventional laser processing machines and figures
1 and FIG. 2 are denoted by the same reference numerals, and description thereof will be omitted.

The laser beam 1 travels in parallel with the frame 6 and is deflected in a direction perpendicular to the direction of movement of the processing head 2 by a bent mirror 3b. Through the processing head 2. Since the vent mirror 3b is provided on the opposite side of the processing head tip 4 with the frame 6 interposed therebetween, the optical path bellows 7 are also provided on the opposite side of the processing head tip 4 with the anti-optical path bellows 9 also sandwiching the frame 6. Configuration. One end of the anti-light path bellows 9 is directly connected to the light path tube 14, and has a structure in which the light path bellows 7 and the air communicate with each other via the light path tube 14.

Next, the operation will be described. Frame 6
The reflected beam 11 directed toward the optical path bellows 7 provided on the side opposite to the processing head tip 4 with the
The optical path does not reach the bellows 7. Since the frame 6 is usually a metal structure and extends along the moving direction of the processing head 2, even if the point of generation of the reflected beam 11 moves, the reflection beam 11 is completely prevented from being projected onto the optical path bellows 7. Is done.

Next, since one end of the anti-optical path bellows 9 is directly connected to the optical path tube 14 in a direction perpendicular to the moving direction of the processing head 2, there is no obstructive structure around the bent mirrors 3a and 3b. Adjustment and maintenance work can be easily performed, and the degree of sealing of the optical path can be easily improved.

Next, the optical path bellows 7 and Hanhikariro bellows 9 is provided with the opposite side of the machining head tip 4 across the frame 6, the optical path bellows 7 and Hanhikariro bellows 9
Since one end of which is connected directly to the optical path tube 14 in the direction perpendicular to the moving direction of the machining head 2, with impinge the reflected beam 11 to the optical path bellows 7 and <br/> Hanhikariro bellows 9 is avoided Since there are no obstructive structures around the bent mirrors 3a and 3b, adjustment and maintenance work can be performed easily, and the degree of sealing of the optical path can be easily improved.

In this embodiment, the processing head has been described as an example in a vertical direction. However, the processing head may be in a horizontal direction, or the processing head may rotate and tilt. The laser beam path to be provided is not limited to the present embodiment, and the same effects can be obtained with other structures.

[0026]

As described above, the laser beam machine according to the present invention (Claim 1) comprises an optical path bellows and an anti-optical path Java.
A laser beam traveling parallel to the frame
Direction perpendicular to the processing head movement direction by the bent mirror
To the processing head via the bent mirror
Direct connection to the optical path tube,
Adjustment and maintenance work are easy, and the sealing of the optical path is improved.
Can be done .

A laser processing machine according to the present invention (Claim 2)
Between the optical path bellows and the anti-optical path bellows
On the tip of the processing head and on the opposite side.
So that the reflected beam path bellows and
Prevents the illumination against the light path bellows by the frame,
It also facilitates adjustment and maintenance of the bent mirror,
Can be improved in airtightness .

[Brief description of the drawings]

FIG. 1 is a front view showing the configuration of a record over The processing machine.

2 is a side view showing the configuration of a record over THE machine.

FIG. 3 is a front view showing the configuration of the laser beam machine according to the first embodiment.

FIG. 4 is a side view illustrating a configuration of the laser processing machine according to the first embodiment.

FIG. 5 is a plan view showing a configuration of the laser beam machine according to the first embodiment.

FIG. 6 is a front view showing a configuration of a conventional laser beam machine.

FIG. 7 is a side view showing the configuration of a conventional laser beam machine.

[Explanation of symbols]

 Reference Signs List 1 laser beam 2 processing head 3a bent mirror 3b bent mirror 4 processing head tip 5 work 6 frame 7 optical path bellows 8 box 9 anti-optical path bellows 10 inspection lid 11 reflected beam 12 light shielding plate 13 hinge 14 optical path tube 15 laser beam focusing Department

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Atsuhiko Kawamura 5-1-1, Yadaminami, Higashi-ku, Nagoya-shi Nagoya Works, Mitsubishi Electric Corporation (72) Inventor Shuichi Sawai 5-1-1, Yadaminami, Higashi-ku, Nagoya No. Mitsubishi Electric Corporation Nagoya Works (56) References JP-A-53-66094 (JP, A) JP-A-61-144290 (JP, A) JP-A-61-224380 (JP, A) 61-53958 (JP, U) JP-B-62-11953 (JP, B2) Jiko 4-35028 (JP, Y2) (58) Fields investigated (Int. Cl. ⁷ , DB name) B23K 26/08 B23K 26/06

Claims (2)

(57) [Claims] 1. An optical path bellows and an anti- optical path Java for a laser beam arranged in parallel to a moving direction of a processing head.
Has La, while the machining head is moved along the frame, the by irradiating a laser beam to the workpiece the laser processing machine for performing laser processing, one end of the optical path bellows and Hanhikariro bellows, frame
Laser beam traveling parallel to the
In the direction perpendicular to the direction of movement of the machining head.
A laser processing machine directly connected to an optical path tube leading to a processing head via a bent mirror . Wherein said optical path bellows and Hanhikariro the tip portion of the processing head across the frame the bellows, laser beam machine according to claim 1, characterized in that provided on the opposite side.