JP3284822B2 - Liquid crystal injection method, plasma addressed display device manufacturing method and device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for injecting liquid crystal into a device having a liquid crystal layer, a method for manufacturing a plasma addressed display device comprising a stack of such electro-optical cells and plasma cells, and a device therefor. About.

[0002]

2. Description of the Related Art As a flat panel display device, a liquid crystal display (Li) using a liquid crystal cell as an electro-optical cell is used.
Quid Crystal Display (LCD) is widely known.
In particular, a TFT LCD in which a thin film transistor (TFT) is provided as an active element for each pixel is rapidly spreading as a device capable of increasing the response speed and increasing the contrast. However, such a display device has a problem that a sufficient yield cannot be obtained at the time of manufacture because an active element such as a TFT must be formed for each pixel. In particular, the problem is remarkable in a large-area display.

Therefore, a plasma addressed display device that drives an electro-optical cell using plasma discharge instead of a switching element such as a TFT has been proposed. The plasma address display device will be described with reference to FIGS.

First, the structure of a plasma addressed display device will be described with reference to FIG. FIG. 5 is a diagram showing the structure of the plasma addressed display device 1. The plasma addressed display device 1 has a plasma section 2 and a liquid crystal section 4 laminated on the plasma section 2 via a dielectric sheet 3.

[0005] The plasma section 2 is provided with a dielectric sheet 3 opposed to the plasma glass 21 at a predetermined interval via a partition formed on the plasma glass 21, and the plasma glass 2 is separated by the partition. Each space between 21 and the dielectric sheet 3 forms a plasma chamber 24.
The partition walls are provided on the plasma glass 21 in parallel in the row direction at predetermined intervals. Therefore, the plasma chamber 2
Numerals 4 are arranged in parallel in the row direction and each extend in the column direction. The partition has a strip-shaped electrode 22 formed in parallel with the row direction on the plasma glass 21, and a state in which the electrode 22 has a width slightly smaller than the electrode 22, that is, both sides of the electrode 22 are exposed. And barrier ribs 23 formed by laminating insulating ceramics or the like. Also,
An ionizable gas such as helium is sealed in the plasma chamber 24.

The liquid crystal unit 4 further joins a color filter 41 on the dielectric sheet 3 constituting the upper surface of the plasma unit 2 so as to maintain a predetermined interval, and forms a gap between the dielectric sheet 3 and the color filter 41. Is filled with a liquid crystal to form a liquid crystal layer 43. On the surface of the color filter 41 on the dielectric sheet 3 side, band-shaped data electrodes 42 having a row direction as a longitudinal direction are formed in parallel with a predetermined interval in a column direction. As described above, in the plasma addressed display device 1, the plasma chamber 24 of the plasma unit 2 and the liquid crystal unit 4
Are perpendicular to each other, and each pixel of the plasma addressed display device 1 is defined at these intersections.

FIG. 5 is a diagram schematically showing the structure of the plasma addressed display device 1 for easy understanding. The dimensions such as the thickness and size of each part and each layer and their ratios are shown. Not shown. Their actual sizes are illustrated in FIG. FIG. 6 is a diagram showing an example of the actual size of each part of the plasma addressed display device 1. As shown in FIG. 6, in the plasma addressed display device 1, the plasma glass 21 and the color filter 41 are relatively thick members having a thickness of about 1 mm to 2 mm. On the other hand, the dielectric sheet 3 is a thin member of 50 μm, and the liquid crystal layer 43 is a very thin layer of 7 μm.

Next, the operation of the plasma addressed display device 1 will be described. The plurality of strip-shaped electrodes 22 formed on the plasma glass 21 are alternately connected to the anode electrodes 22.
A and a drive circuit (not shown) are connected so as to be A and the cathode electrode 22K. The anode electrode 22 is driven by the driving circuit.
When a predetermined voltage is applied between A and the cathode electrode 22K, the gas in the plasma chamber 24 is ionized to generate a plasma discharge, and the inside thereof is maintained substantially at the anode potential. At this time, when a data voltage is applied to the data electrode 42 on the plasma chamber 24, the data voltage is written to the liquid crystal layer 43 between the plasma chamber 24 and the data electrode 42 via the dielectric sheet 3. Thereafter, when the plasma discharge ends, the plasma chamber 24 becomes a floating potential, and the voltage written in the liquid crystal layer 43 of the corresponding pixel is maintained as it is.

Therefore, a predetermined voltage is sequentially applied to the plasma chambers 24 arranged in parallel with the row direction, and when the plasma chambers 24 in each row are active, data in the column direction corresponding to the row is applied to the data electrodes 42. Thus, a two-dimensional image can be displayed.

Next, a method of manufacturing the plasma addressed display device 1 will be described with reference to FIGS. FIG. 7 is a diagram showing a manufacturing process of the plasma addressed display device 1, and FIG. 8 is a diagram for explaining each process of FIG. First, as shown in FIG.
The electrode 22 is printed on the belt 1 by screen printing,
The electrode 22 is formed (Step S1). Next, as shown in FIG. 8B, a barrier rib 23 is similarly laminated on the band-shaped electrode 22 by screen printing. The barrier rib 23 is a partition forming the plasma chamber 24 and has a thickness of 200 μm.
This screen printing is repeatedly performed until the height of the barrier rib 23 becomes equal to or more than a predetermined height. When the barrier ribs 23 are higher than a predetermined height,
Baking is performed to complete the formation of the barrier ribs 23 (step S
2).

When the formation of the barrier ribs 23 is completed, FIG.
As shown in (C), a thin glass sheet as the dielectric sheet 3 is bonded on the barrier rib 23. In that case, the surface of the barrier rib 23 is first polished and flattened. Then, a frit seal 25 is attached to the peripheral portion of the plasma glass 21.
Is applied with a dispenser, and the frit seal 25 is
The electrode sheet 22 and the barrier rib 2
3 so as to be opposed to the plasma glass 21. As a result, the plasma glass 21, the dielectric sheet 3,
Then, a plasma chamber 24 surrounded by the electrodes 22 and the barrier ribs 23 is formed, and a gas is injected into the plasma chamber 24 to form the plasma section 2 (step S3).

Next, as shown in FIG. 8D, a gap spacer 45 for securing a gap between the liquid crystal layers is scattered on the upper surface of the dielectric sheet 3 joined to the plasma glass 21, and the color is further dispersed. A liquid crystal sealing material 44 for joining the filter 41 is applied to the periphery of the dielectric sheet 3 with a dispenser (step S4). As shown in FIG. 8E, a color filter 41 is placed on the dielectric sheet 3 to which the liquid crystal sealing material 44 has been applied.
And the dielectric sheet 3 are joined by a liquid crystal sealing material 44.
As a result, a liquid crystal chamber 48 is formed between the color filter 41 and the dielectric sheet 3 with a predetermined space secured by the gap spacer 45 (step S5).

Next, the liquid crystal 9 is filled in the liquid crystal chamber 48 to form the liquid crystal layer 43 (step S6). The step of filling the liquid crystal 9 will be described with reference to FIGS.
9 is a top view of the plasma addressed display device 1 as viewed from the liquid crystal unit 4, and FIG. 10 is a cross-sectional view taken along line AA of FIG. FIG. In a normal liquid crystal display device, liquid crystal is injected in a vacuum chamber. However, in a plasma address display device, when the liquid crystal display device is put in a vacuum chamber, the dielectric sheet 3 made of thin glass is broken, so that this method cannot be used. . Therefore, the liquid crystal is injected into the liquid crystal chamber by a simple one-side injection and one-side vacuuming method.

That is, as shown, the liquid crystal injection port 4 is provided in the color filter 41 of the plasma addressed display device 1.
6 and an exhaust port 47 are provided, and the liquid crystal 9 is injected into the liquid crystal chamber 48 from the liquid crystal injection port 46. Specifically, the liquid crystal 9 is injected by bringing the injection port of the tank 5 into contact with the liquid crystal injection port 46, and the vacuum pad 6 connected to an exhaust pump (not shown) is brought into contact with the exhaust port 47 by using the liquid crystal 9. The inside of the chamber 48 is evacuated.
Thus, the liquid crystal 9 is gradually injected into the liquid crystal chamber 48. As a result, as shown in FIG. 8F, the liquid crystal chamber 48 is filled with the liquid crystal 9 and the liquid crystal layer 43 is formed.

Thus, the plasma addressed display 1 is manufactured.

[0016]

However, in the method of manufacturing a plasma addressed display device, the injection time of the liquid crystal into the liquid crystal chamber is greatly different depending on the panel.
There was a problem that mass production was difficult. That is, when the above-described process of injecting liquid crystal into a liquid crystal chamber having a thickness of about 7 μm is attempted to be simultaneously performed on a plurality of plasma addressed display devices, a slight shape during manufacturing of the plasma addressed display device is required. The time required for injecting the liquid crystal greatly differs depending on the plasma addressed display device, depending on the difference and the working conditions.

Therefore, generally, a time with a sufficient margin is set as the liquid crystal injection time, or the liquid crystal injection time is determined according to the panel which takes the longest time for liquid crystal injection. Thus, a plurality of plasma addressed display devices are manufactured. However, in such a method, in a plasma addressed display device in which the injection of liquid crystal has been completed early, the excess liquid crystal continues to flow, causing a problem that the liquid crystal is wasted. Further, when there is a plasma address display device in which the liquid crystal chamber leaks and the liquid crystal chamber cannot be decompressed and the liquid crystal injection is very slow, the above problem becomes more serious, and other normal plasma address display devices are used. In addition, there arises a problem that the liquid crystal injection step cannot be completed normally.

Accordingly, an object of the present invention is to provide a liquid crystal injection method capable of appropriately performing a process of injecting liquid crystal into a plurality of panels. Another object of the present invention is to provide a method of manufacturing a plasma addressed display device that can appropriately perform a process of injecting liquid crystal into a liquid crystal chamber of a plurality of plasma addressed display devices. . It is another object of the present invention to provide a plasma addressed display device manufacturing apparatus capable of appropriately performing a process of injecting liquid crystal into a liquid crystal chamber of a plurality of plasma addressed display devices. .

[0019]

In order to solve the above-mentioned problems, while simultaneously injecting liquid crystal into a plurality of panels using a common exhaust pump, the liquid crystal injection state of each panel is individually controlled. After comprehending, based on the result, the evacuation was stopped for each panel and the injection of the liquid crystal was terminated.

Therefore, the liquid crystal injection method of the present invention is a liquid crystal injection method for injecting liquid crystal into a liquid crystal chamber of each panel when a plurality of panels having a liquid crystal layer are manufactured simultaneously. While evacuating each liquid crystal chamber from at least one exhaust port provided in the liquid crystal chamber, liquid crystal is injected from at least one liquid crystal injection port provided in the liquid crystal chamber of each panel, and The arrival at a predetermined position of the panel is detected for each of the plurality of panels, the completion time of liquid crystal injection is determined for each of the plurality of panels based on the detection of the arrival of the liquid crystal, and the panel is determined at the determined time. Then, the evacuation through the exhaust port and the injection of the liquid crystal from the liquid crystal injection port are ended.

Further, the method of manufacturing a plasma addressed display device according to the present invention is a manufacturing method for simultaneously manufacturing a plurality of plasma addressed display devices in which a plasma cell portion and a liquid crystal cell portion are stacked via a dielectric sheet. Wherein, for a plurality of plasma addressed display devices, at least one liquid crystal provided in the liquid crystal chamber is evacuated from at least one exhaust port provided in the liquid crystal chamber of the liquid crystal cell section while the respective liquid crystal chambers are evacuated. Liquid crystal is injected from an inlet, and the arrival of the injected liquid crystal at a predetermined position in the liquid crystal chamber is detected for each of the plurality of plasma addressed display devices, and the injection of liquid crystal is performed based on the detection of the arrival of the liquid crystal. Finding the completion time for each of the plurality of plasma address display devices,
At the determined time, the evacuation of the exhaust port and the injection of the liquid crystal from the liquid crystal injection port in the plasma addressed display device are completed.

Preferably, the arrival of the injected liquid crystal is
Detecting at two or more predetermined positions in the liquid crystal chamber,
Based on the detection time of the arrival of the liquid crystal at the two or more positions, the completion time of the liquid crystal injection in the plasma addressed display device is obtained.

Further, the apparatus for manufacturing a plasma addressed display device of the present invention is a manufacturing apparatus for simultaneously manufacturing a plurality of plasma addressed display devices in which a plasma cell portion and a liquid crystal cell portion are stacked via a dielectric sheet. Exhaust means for exhausting gas in each liquid crystal chamber from at least one exhaust port provided in the liquid crystal chamber of the liquid crystal cell section for each of the plurality of plasma addressed display devices, and drawing the liquid crystal chamber to a vacuum;
For each of the plurality of plasma addressed display devices, a liquid crystal injection means for injecting liquid crystal from at least one liquid crystal injection port provided in the liquid crystal chamber, and a step of causing the injected liquid crystal to reach a predetermined position in the liquid crystal chamber. Liquid crystal detecting means for detecting each of the plurality of plasma address display devices; completion time calculating means for obtaining completion time of liquid crystal injection for each of the plurality of plasma address display devices based on detection of arrival of the liquid crystal; Control means for ending the evacuation of the plasma addressed display device by the evacuation means and injecting the liquid crystal by the liquid crystal injecting means at a given time.

[0024] Preferably, the exhaust means is connected to the exhaust ports of the plurality of plasma address display devices, and exhaust pumps for exhausting gas in each liquid crystal chamber, and are provided near the exhaust ports of each plasma address display device. A vacuum evacuation valve that is provided and closes the exhaust port from the exhaust port by the exhaust pump, and a leak valve that is provided near the exhaust port of each plasma address display device and opens the exhaust port to the atmosphere when opened. The control means closes the evacuation valve, opens the leak valve, and terminates the evacuation of the liquid crystal chamber of the plasma addressed display device at the determined completion time of the liquid crystal injection. The liquid crystal injection is terminated.

More specifically, the liquid crystal detecting means includes a light projecting means for projecting the liquid crystal chamber of the plasma addressed display device at a predetermined position through a polarizing plate, and a light projecting means for projecting the light by the light projecting means. A light receiving unit that receives light transmitted through a predetermined position in the liquid crystal chamber through a polarizing plate and detects a change in transmittance.

[0026]

In the liquid crystal injection method of the present invention, liquid crystal is injected from the liquid crystal injection port while evacuating each liquid crystal chamber from the exhaust port provided in each panel, and a predetermined position of the panel is set for each panel. To detect whether the liquid crystal has reached
When the arrival of the liquid crystal at the position is detected, the completion time of the liquid crystal injection is obtained based on the detection, and the injection of the liquid crystal in the panel is completed at the obtained completion time.

In the method of manufacturing a plasma addressed display device according to the present invention, the plasma addressed display device is provided in a liquid crystal chamber of the liquid crystal cell portion of a plasma addressed display device in which a plasma cell portion and a liquid crystal cell portion are stacked via a dielectric sheet. Liquid crystal is injected from a liquid crystal injection port while evacuating each liquid crystal chamber from the exhaust port provided, and for each plasma address display device, whether or not the liquid crystal has reached a predetermined position in the liquid crystal chamber of the plasma address display device. Is detected, and when the arrival of the liquid crystal at the position is detected, the completion time of the liquid crystal injection is obtained based on the detection, and the injection of the liquid crystal in the plasma addressed display device is completed at the obtained completion time.

In the plasma addressed display device manufacturing apparatus according to the present invention, the plasma addressed display device in which the plasma cell portion and the liquid crystal cell portion are stacked via the dielectric sheet is provided to the liquid crystal cell portion by the exhaust means. While evacuating each liquid crystal chamber from the exhaust port provided in the liquid crystal chamber, liquid crystal is injected from the liquid crystal injection port by the liquid crystal injection means,
For each plasma address display device, the liquid crystal detection means detects whether or not the liquid crystal has reached a predetermined position in the liquid crystal chamber of the plasma address display device. The completion time of the liquid crystal injection is obtained by the completion time calculating means, and the injection of the liquid crystal in the plasma addressed display device is ended by the control means at the obtained completion time.

[0029]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to FIGS. The manufacturing apparatus for a plasma addressed display device according to the present embodiment is a device for injecting liquid crystal into a liquid crystal chamber for n plasma addressed display devices at a time. The configuration and manufacturing procedure of the plasma addressed display device are shown in FIG.
8 is the same as the plasma addressed display device described above with reference to FIG. FIG. 1 is a diagram showing an embodiment of a plasma addressed display device manufacturing apparatus of the present invention for describing an embodiment of a plasma addressed display device manufacturing method of the present invention. Manufacturing apparatus 100 for plasma address display device
Are the liquid crystal tank 110, the exhaust pump 120, the exhaust pipe 13
0, evacuation valve 140, leak valve 150, liquid crystal sensor 1
60 and a control unit 170.

First, the configuration of each section will be described. liquid crystal
The tank 110 is filled into the plasma address display device 1.
Is a tank that contains liquid crystal, and has n plasma addresses.
Display device 1_-1~ 1_-nIt is provided for each. liquid
The crystal tank 110 has the tip
Ma address display device 1_-1~ 1_-nLiquid crystal inlet 46_-1~ 4
6_-nTo the liquid crystal injection port 46._-1~ 46_-nThan
The liquid crystal 9 is used for the plasma address display 1_-1~ 1_-nLCD room
48 _-1~ 48_-nInject into.

The exhaust pump 120 is a pump for reducing the pressure by discharging gas in the plasma addressed display device 1 _-1 to 1 _-n liquid chamber 48 _-1 to 48 in _-n of, one exhaust pump 120 N plasma address display devices _1-1 to 1
_-n All are supported.

The exhaust pipe 130 includes an exhaust pump 120 and n
Plasma address display devices 1_-1~ 1_-nConnect
Piping for One end of the exhaust pipe 130 is the exhaust pump 1
20 and the other end is branched into n pieces, each having n pieces
Plasma address display device 1 _-1~ 1_-nExhaust vent 47_-1~
47_-nIt is set to abut on.

The vacuum evacuation valve 140 is an electromagnetic valve for switching whether or not the evacuation by the evacuation pump 120 is enabled in each of the plasma address display devices _1-1 to 1- _n .
Exhaust ports 47 _{-1 to} 47 -47 of the plasma addressed display devices 1 _-1 to 1 _-n in each of the n branches of the exhaust pipe 130.
Each is provided near _-n . Therefore, if the vacuum valve 140 _-i (i = 1~n) opens, the liquid crystal chamber 48 _-i plasma addressed display device 1 _-i is evacuated by the exhaust pump 120, vacuum valve 140 _-i (I = 1 to n)
Is closed, the exhaust by the exhaust pump 120 does not act on the plasma address display device 1- _i .

The leak valve 150 is an electromagnetic valve for switching whether or not the exhaust ports 47 _{-1 to} 47 _-n of the plasma address display devices 1 _-1 to 1 _-n are open to the atmosphere. Each of the n branch portions corresponding to the plasma address display devices 1 is further provided at a branch portion between the evacuation valve 140 and the exhaust port 47. Therefore, the plasma address display device 1 _-i (i =
If the leak valve 150 _-i is open, the exhaust port 47 _-i is opened to the atmosphere, if the leak valve 150 _-i is closed, it is closed and if the evacuation valve 140 _-i is open, It becomes possible to evacuate.

The liquid crystal sensor 160 is a sensor for detecting whether or not the liquid crystal injected from the liquid crystal injection port 46 has reached a predetermined position near the exhaust port 47 of the plasma addressed display device 1. The plasma addressed display device 1 is disposed so as to be sandwiched from above and below. The configuration of the liquid crystal sensor 160 will be described with reference to FIG. FIG.
FIG. 3 is a diagram illustrating a configuration of a liquid crystal sensor 160. The liquid crystal sensor 160 includes a light projecting unit 161 and a light receiving unit 164. The light projecting unit 161 includes a light projecting unit 162 and a polarizing plate 163. It has a plate 165 and a light receiver 166.

In the liquid crystal sensor 160, the light emitting section 16
The light projected from the light projector 162 is polarized by the polarizing plate 163, and the polarized light is transmitted to the plasma address display device 1.
Is irradiated vertically to a predetermined position. Then, the light transmitted through the plasma addressed display device 1 is received by a light receiving unit 164 provided at a position facing the light emitting unit 161 with the plasma addressed display device 1 interposed therebetween. In the light receiving section 164, the light received by the polarizing plate 165 is polarized, and
Detects the intensity of the light.

Thus, based on the intensity of the light projected by the light projector 162 and the intensity of the light received by the light receiver 166 and transmitted through the plasma address display device 1, the light transmittance of the plasma address display device 1 is changed. You can ask.

The control unit 170 controls each of the above components,
This is a control unit that causes the entire manufacturing apparatus 100 of the plasma addressed display device to perform a desired operation. The configuration of the control unit 170 will be described with reference to FIG. The control unit 170 includes a liquid crystal detection unit 171, an end time calculation unit 172, a control unit 173, an input / output unit 174, a vacuum valve control unit 175, a leak valve control unit 176, an exhaust pump control unit 177, and a floodlight control unit 178. .

The liquid crystal detector 171 determines whether or not the liquid crystal has reached a predetermined position of the plasma addressed display 1 based on the intensity of the transmitted light of the plasma addressed display 1 received by the light receiver 166 of the liquid crystal sensor 160. Is determined. Since the intensity of light emitted by the light projector 162 of the liquid crystal sensor 160 is determined in advance, the liquid crystal detector 171
In, the presence or absence of liquid crystal is determined by simply comparing the intensity of the received light with a predetermined threshold. That is, it is determined that the liquid crystal has reached when the intensity of the light received is smaller than the threshold, and it is determined that the liquid crystal has not yet reached when the intensity of the light received is larger than the threshold. Note that the liquid crystal detection unit 171 repeatedly performs the determination on the outputs of the n liquid crystal sensors 160 sequentially. In addition, the liquid crystal detector 1
If it is determined that the liquid crystal has arrived, the 71 outputs a signal to that effect to the end time calculation unit 172 together with the identification signal of the plasma address display device 1.

The end time calculating section 172 is provided with the liquid crystal detecting section 17.
Based on the signal of the arrival of the liquid crystal input from 1, the completion time of liquid crystal injection in the plasma address display device 1 _-i (i = 1 to n) is calculated and output to the control unit 173.
The completion time of the liquid crystal injection is determined to be a predetermined time after the arrival signal of the liquid crystal is input from the liquid crystal detection unit 171.

The control unit 173 is a component of the control unit 170.
Is a central processing unit that controls
It is composed of The control unit 173 controls the end time calculation unit 17
The completion time of the liquid crystal injection input from 2 is stored in the control unit 173.
In the memory. And when that time comes,
Sonoplasma address display device 1_-i(I = 1 to n)
A process for ending the liquid crystal injection is performed on the structure. Sand
That is, the evacuation valve 1 is supplied to the evacuation valve controller 175.
40_-iIs closed, and the leak valve control unit 176 is instructed.
On the other hand, the leak valve 150 _-iTo open. Ma
In addition, n plasma addressed display devices 1_-i~ 1_-nAll of
When the liquid crystal injection processing is completed, the exhaust pump control unit 177
And the projector control unit 178 includes an exhaust pump and a projector.
To end the operation of.

The control unit 173 performs processing such as setting conditions and setting parameters of the plasma addressed display device manufacturing apparatus 100 based on a signal input from the input / output unit 174. Then, based on those conditions, the control unit 173 causes the exhaust pump control unit 177 to
, And outputs data such as the amount of light projected to the light projecting unit 161 of the liquid crystal sensor 160 to the projector control unit 178. Further, the control unit 173 outputs data on the manufacturing status of the plasma addressed display device 1 to the input / output unit 174.
It also performs processing such as outputting to

The input / output unit 174 is an input / output means for inputting various operating conditions and parameters of the plasma addressed display device manufacturing apparatus 100 and outputting the operating state of the plasma addressed display apparatus manufacturing apparatus 100. , A keyboard and a monitor.

The evacuation valve control section 175 includes a leak valve control section 176, an exhaust pump control section 177, and a projector control section 178. The evacuation valve 140 _-1 is based on a signal input from the control section 173. ~ 140- _n , leak valve 1
50 _{-1 to} 150 _-n , the exhaust pump 120, and the light emitting units 161 _{-1 to} 161 _-n of the liquid crystal sensors 160 _{-1 to} 160 _-n are controlled.

Next, a plasma address display device manufacturing apparatus will be described.
The operation of the device 100 will be described. First, the plasma ad
The plasma display device manufacturing apparatus 100 includes n plasma addresses.
Display device 1_-1~ 1_-nIs set. That is,
Plasma address display device 1 _-1~ 1_-nIs mounted on a flat support
Mounted, the liquid crystal injection port 46_-1~ 46_-nHas a liquid crystal tank 11
0_-1~ 110_-nThe liquid crystal discharge port of the_-1
~ 47_-nEnd of each of the n branches of the exhaust pipe 130
Touched. The plasma address display device 1_-1~
1_-nIs already shown in the flow chart of the manufacturing process shown in FIG.
Plasma address display device after completion of the steps up to step S5
Therefore, the liquid crystal filling in the remaining step S6 is performed.
After processing, it is completed as a plasma addressed display.
Things.

In this state, injection of liquid crystal is started. That is, by closing the leak valve 0.99 _-1 to 150 DEG _-n, the vacuum valve 140 _-1 opened 140 _-n, a plasma addressed display device 1 _-1 to 1 through the exhaust pipe 130 by operating the exhaust pump 120 _The vacuum is applied to the liquid crystal chambers 48 _{-1 to} 48 _-n of _-n . Thus, the liquid crystal chamber 48 _-1 to 48 in _-n becomes low, the liquid crystal injection from the liquid crystal tank 110 _-1 to 110 _-n is promoted.

The controller 170 constantly monitors the output of the liquid crystal sensor 160 and detects the arrival of the liquid crystal at the monitored position. When the liquid crystal reaches the position where the liquid crystal sensor 160 is provided in the liquid crystal chamber 48 of the plasma addressed display device 1, the transmittance of the polarized light changes.
66 changes the intensity of the received light. Control unit 170
Detects a change in the output of the liquid crystal sensor 160. When the liquid crystal reaches the monitoring position in any one of the plasma addressed display devices 1- _i (i = 1 to n), the completion time of the liquid crystal injection is determined for the plasma addressed display device 1- _i . Then, when came the completion time, opening the leak valve 150 _-i to close the plasma address display device 1 _-i of the vacuum valve 140 _-i, the exhaust port 47 _-i is opened to the atmosphere.
Thus, the injection of the liquid crystal from the liquid crystal tank 110- _i ends.

The process of terminating the liquid crystal injection is sequentially performed on the plasma address display devices 1 _-i (i = 1 to n) where the liquid crystal has reached the monitoring position, and all the plasma address display devices 1 _-1 to 1 _-n Is completed, the liquid crystal filling process in step S6 for the n plasma addressed display devices _1-1 to 1- _n is completed.

As described above, according to the plasma addressed display device manufacturing apparatus 100 of this embodiment, the injection state of the liquid crystal injection processing is grasped in the middle, and the end of this processing is determined based on the result. I have. Therefore, liquid crystal can be injected under conditions suitable for each plasma addressed display device, and liquid crystal can be appropriately injected into each plasma addressed display device, as compared with the conventional method of injecting liquid crystal at a predetermined time from the beginning. can do.

The method of manufacturing a plasma addressed display device according to the present invention is not limited to the present embodiment, and various modifications are possible.

For example, in this embodiment, the liquid crystal sensor 160 is provided at one location near the exhaust port 47,
The completion time of the liquid crystal injection was determined based on the arrival of the liquid crystal at that point. However, the position at which the arrival of the liquid crystal is detected is not limited to one position, and a plurality of positions may be detected. FIG. 4 shows a configuration of a manufacturing apparatus of such a plasma addressed display device. FIG. 4 is a diagram showing a configuration of a manufacturing apparatus 101 of the plasma addressed display device. Manufacturing apparatus 101 of the plasma addressed display device, for each plasma addressed display device 1 _-1 to 1 _-n, liquid crystal sensors 160 _-11 to 160 _-ln and crystal sensor 160
_{-21 to} 160 _-2n are provided for each of the two liquid crystal sensors, so that the arrival of the liquid crystal at each point can be detected.

With this configuration, the control unit 170 determines the distance between the two liquid crystal arrival positions and the distance between the two liquid crystal arrival positions.
The liquid crystal injection speed can be determined based on the arrival time of the liquid crystal at one position, and the end time calculation unit 172 can determine the time at which the liquid crystal injection is completed using this speed. Therefore, the liquid crystal injection completion time can be obtained more accurately, and the liquid crystal can be more appropriately injected into each of the plasma addressed display devices _1-1 to 1- _n .

In the present embodiment, only one exhaust pump is provided. However, a plurality of exhaust pumps may be provided, or n exhaust pumps may be provided for each of the n plasma addressed display devices. A configuration having multiple exhaust pumps may be used. Further, the vacuum evacuation valve and the leak valve are not limited to the electromagnetic valves, and any components and mechanisms having the same function may be used. Further, the positions of the liquid crystal injection port 46 and the exhaust port 47 may be provided at arbitrary positions.

[0054]

According to the liquid crystal injection method of the present invention, while simultaneously injecting liquid crystal into a plurality of panels, the injection state of liquid crystal is individually grasped for each panel, and each liquid crystal is injected based on the result. Since the injection of the liquid crystal is terminated for each panel, the processing of injecting the liquid crystal can be appropriately performed on a plurality of panels. Further, according to the method of manufacturing a plasma addressed display device of the present invention, a process of injecting liquid crystal into a liquid crystal chamber can be appropriately performed on a plurality of plasma addressed display devices. Further, if the manufacturing apparatus of the plasma addressed display device of the present invention is used,
The process of injecting the liquid crystal into the liquid crystal chamber of each of the plurality of plasma addressed display devices is appropriately performed, and an appropriate plasma addressed display device can be manufactured.

[Brief description of the drawings]

FIG. 1 is a diagram showing a manufacturing apparatus of a plasma addressed display device according to a method of manufacturing a plasma addressed display device of the present invention.

FIG. 2 is a diagram showing a configuration of a liquid crystal sensor of the manufacturing apparatus of the plasma addressed display device shown in FIG.

FIG. 3 is a block diagram showing a configuration of a control unit of the manufacturing apparatus of the plasma addressed display device shown in FIG.

FIG. 4 is a diagram showing another example of a plasma addressed display device manufacturing apparatus according to the plasma addressed display device manufacturing method of the present invention.

FIG. 5 is a diagram showing a structure of a plasma addressed display device.

6 is a diagram illustrating dimensions of respective parts of the plasma addressed display device shown in FIG. 5;

FIG. 7 is a flowchart showing a manufacturing procedure of the plasma addressed display device shown in FIG.

8A to 8C are diagrams showing manufacturing steps of the plasma addressed display device shown in FIG. 7, in which FIG. 8A shows a step of forming an electrode, FIG. 8B shows a step of forming a barrier rib, and FIG. FIG. 4 is a view showing a joining step of thin glass, (D) is a view showing a coating step of a liquid crystal sealing material, (E) is a view showing a joining step of a color filter, and (F) is a view showing a filling step of liquid crystal. .

9 is a top view of the plasma addressed display device shown in FIG.

FIG. 10 is a diagram showing a state in which liquid crystal is filled in the plasma addressed display device shown in FIG. 5;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Plasma address display device 2 ... Plasma part 21 ... Plasma glass 22 ... Electrode 23 ... Barrier rib 24 ... Plasma chamber 25 ... Frit seal 3 ... Dielectric sheet 31 ... Application surface 4 ... Liquid crystal part 41 ... Color filter 42 ... Data electrode 43 ... Liquid crystal layer 44 ... Liquid crystal sealing material 45 ... Gap spacer 46 ... Liquid crystal injection port 47 ... Exhaust port 48 ... Liquid crystal chamber 5 ... Tank 6 ... Vacuum pad 9 ... Liquid crystal 100 ... Plasma address display device manufacturing apparatus 110 ... Liquid crystal tank 120 ... Exhaust pump 130 Exhaust pipe 140 Vacuum evacuation valve 150 Leak valve 160 Liquid crystal sensor 161 Light emitting unit 162 Light emitting unit 163 Polarizing plate 164 Light receiving unit 165 Polarizing plate 166 Light receiving unit 170 Control unit 171 Liquid crystal Detecting unit 172 End time calculating unit 173 Control unit 174 Input / output unit 175 Vacuum valve controller 176 ... leak valve controller 177 ... exhaust pump control unit 178 ... projector controller

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. ⁷ , DB name) G02F 1/1341 G02F 1/13 101 G02F 1/1333 G09F 9/00 343

Claims (6)

(57) [Claims] 1. A liquid crystal injection method for injecting liquid crystal into a liquid crystal chamber of each panel when simultaneously manufacturing a plurality of panels having a liquid crystal layer, wherein at least one of the panels provided in the liquid crystal chamber of each panel is provided. While evacuating each liquid crystal chamber from the two exhaust ports, liquid crystal is injected from at least one liquid crystal injection port provided in the liquid crystal chamber of each panel, and the injected liquid crystal reaches a predetermined position of the panel. Is detected for each of the plurality of panels. Completion time of liquid crystal injection is determined for each of the plurality of panels based on the detection of the arrival of the liquid crystal. At the determined time, vacuum through the exhaust port in the panel is obtained. A liquid crystal injection method for ending the pulling and the liquid crystal injection from the liquid crystal injection port. 2. A manufacturing method for simultaneously manufacturing a plurality of plasma addressed display devices in which a plasma cell portion and a liquid crystal cell portion are laminated via a dielectric sheet, wherein the plurality of plasma addressed display devices are provided. The liquid crystal is injected from at least one liquid crystal injection port provided in the liquid crystal chamber while evacuating each liquid crystal chamber from at least one exhaust port provided in the liquid crystal chamber of the liquid crystal cell section. Detecting the arrival of liquid crystal at a predetermined position in the liquid crystal chamber for each of the plurality of plasma address display devices, and, based on the detection of the arrival of the liquid crystal, determining the completion time of liquid crystal injection for each of the plurality of plasma address display devices At the determined time, evacuating through the exhaust port and injecting liquid crystal from the liquid crystal injection port in the plasma addressed display device. Ending the plasma address display device manufacturing method. 3. An arrival of the injected liquid crystal is detected at two or more predetermined positions in the liquid crystal chamber, and the plasma address display is performed based on detection times of the arrival of the liquid crystal at the two or more positions. 3. The method for manufacturing a plasma addressed display device according to claim 2, wherein the completion time of the liquid crystal injection in the device is obtained. 4. A manufacturing apparatus for simultaneously manufacturing a plurality of plasma address display devices in which a plasma cell portion and a liquid crystal cell portion are stacked via a dielectric sheet, wherein each of the plurality of plasma address display devices is Exhaust means for exhausting gas in each liquid crystal chamber from at least one exhaust port provided in the liquid crystal chamber of the liquid crystal cell unit to evacuate the liquid crystal chamber, and provided in the liquid crystal chamber for each of the plurality of plasma addressed display devices. Liquid crystal injection means for injecting liquid crystal from at least one of the liquid crystal injection ports provided; and liquid crystal detection means for detecting the arrival of the injected liquid crystal at a predetermined position in the liquid crystal chamber for each of the plurality of plasma addressed display devices. Completion time calculation for obtaining a completion time of liquid crystal injection for each of the plurality of plasma addressed display devices based on the detection of the arrival of the liquid crystal. An apparatus for manufacturing a plasma addressed display device, comprising: a discharge unit; and a control unit for terminating the exhaust of the plasma addressed display device by the exhaust unit and the injection of the liquid crystal by the liquid crystal injection unit at the determined time. 5. An exhaust pump connected to the exhaust ports of the plurality of plasma address display devices for exhausting gas in each liquid crystal chamber, and provided in the vicinity of the exhaust ports of each plasma address display device. A vacuum valve that closes the exhaust port to terminate the exhaust by the exhaust pump, and a leak valve that is provided near the exhaust port of each plasma address display device and that opens the exhaust port to the atmosphere when opened. At the completion time of the obtained injection of the liquid crystal, the control means closes the evacuation valve, opens the leak valve, terminates the exhaust of the liquid crystal chamber of the plasma addressed display device, 5. The apparatus for manufacturing a plasma addressed display device according to claim 4, wherein the injection is terminated. 6. A liquid crystal detecting means, comprising: a light projecting means for projecting the liquid crystal chamber of the plasma addressed display device at a predetermined position through a polarizing plate; and a light projecting means for projecting the light by the light projecting means. 5. The apparatus for manufacturing a plasma addressed display device according to claim 4, further comprising light receiving means for receiving light transmitted through a predetermined position through a polarizing plate and detecting a change in transmittance.