JP3280005B2 - Ceramic cloth with non-frayed outer periphery and method of manufacturing the same - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic cloth whose outer peripheral edge is not frayed, and a method of manufacturing the same.

[0002]

2. Description of the Related Art Ceramic cloth, which is made by braiding alumina fiber or alumina silica fiber, has excellent heat resistance, high strength, and has many excellent properties such as electrical insulation. It is used for various filters, catalyst carriers, electrical insulating materials, printed circuit boards, etc.

[0003] When a ceramic cloth is used for various purposes, a large original cloth is cut into a predetermined size. However, the cut ceramic cloth easily frays the warp and the weft of the ceramic fibers from the outer peripheral edge. For this reason, it is difficult to handle the cut ceramic cloth, and troubles are liable to occur in a subsequent processing step according to the application.

On the other hand, Japanese Patent Application Laid-Open No. 9-279481 describes a method for fixing an end or cut portion of a glass fiber yarn or a woven fabric using an active energy ray-curable resin composition. The active energy ray-curable resin composition may be any one that can be cured by an active energy ray, and specific examples thereof include oligomers such as urethane (meth) acrylate, epoxy (meth) acrylate, and polyester (meth) acrylate. ing.

[0005]

Problems to be Solved by the Invention
According to the method described in Japanese Patent No. 481, it is possible to fix the outer periphery of the ceramic cloth and prevent fraying. However, in this method, since the active energy ray-curable resin composition is used, the frayed portion has poor heat resistance and has a drawback that it cannot be used at a temperature of several hundred degrees Celsius or more.

The present invention has been made in view of such a conventional situation,
An object of the present invention is to provide a ceramic cloth having excellent heat resistance, which can be used even at a high temperature, and has a non-frayed outer periphery, and a method for manufacturing the same.

[0007]

To achieve the above object, according to an aspect of the ceramic cloth of the present invention it has been stopped periphery fraying provided, including an outer peripheral edge of the ceramic cloth, the intersection of at least the outermost periphery of the braided fibers, inorganic It is characterized by being fixed with an adhesive.

A method for producing a ceramic cloth with a non-frayed outer periphery is obtained by temporarily fixing a cut portion of a ceramic cloth original cloth with a water-soluble organic adhesive and cutting the temporarily fixed cut portion. Outer edge of ceramic cloth
Contains at least the outermost intersection of the braided fibers
An inorganic adhesive agent is applied to so that, and firing.

The inorganic adhesive used in the present invention is 5
0-80 wt% of _SiO 2, 5 to 15 wt% of _Al 2 O
_3, 5 to 15 wt% of CaO, 1-15 wt% Na ₂
O and / or K ₂ O, and the firing temperature is 850 to 120
It is characterized by a temperature of 0 ° C. The average particle size of the inorganic adhesive is preferably 5 μm or less.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, there is no particular limitation on the ceramic cloth, and the weaving method, thickness and the like are not particularly limited. Therefore, it is possible to use an ordinary ceramic cloth currently on the market, for example, an alumina-based, mullite-based, silicon carbide-based, or other ceramic cloth.

The inorganic adhesive used for preventing fraying is as follows:
It is necessary to be excellent in heat resistance, and in particular, a material that is fired at a temperature of 850 ° C. or more so as to withstand a use temperature of 600 ° C. or more is preferable. However, the firing temperature is 1200 ° C
If the temperature exceeds 1,200 ° C. is set as the upper limit of the firing temperature because the ceramic cloth itself may be deteriorated. Furthermore, it is desirable that the adhesive strength to the ceramic cloth be high and the difference in thermal expansion coefficient from the ceramic cloth be small.

As the inorganic adhesive to be used, 50 to 80
And SiO ₂ weight%, 5 to 15 wt% _Al 2 _{O 3,}
5-15% by weight of CaO, 1 to 15 wt% of _Na 2 O
And / or a composition containing K ₂ O is preferable. By adjusting the content of Na ₂ O and K ₂ O among these main components, the firing temperature of the inorganic adhesive can be controlled. If the particle size of the inorganic adhesive is large, it is difficult to adhere to the intersection of the braided fibers on average, so the particle size is preferably 5 μm or less on average,
0.5 μm or less is more preferable. Also, when the particle diameter is small, there is an advantage that the sintering temperature of the inorganic adhesive is lowered and sintering is easy.

In order to prevent the outer periphery of the ceramic cloth from being frayed with an inorganic adhesive, first, a water-soluble organic adhesive is applied with a width of about 10 mm to a portion to be cut of the original ceramic cloth, dried and temporarily fixed. I do. As the water-soluble organic adhesive, polyvinyl acetate, polyvinyl alcohol and the like can be used. Thereafter, the temporarily fixed portion of the original ceramic cloth to be cut is cut within a range where the organic adhesive is applied. Since the outer peripheral portion of the cut ceramic cloth is fixed with an organic adhesive, it is possible to prevent the occurrence of fraying in the subsequent application and firing steps of the inorganic adhesive.

Next, an inorganic adhesive is applied so that the outer periphery of the ceramic cloth obtained by cutting includes at least the outermost intersection of the braided fibers. The method for applying the inorganic adhesive is not particularly limited, but may be ordinary dipping or brush coating. In addition, the inorganic adhesive is knitted on the outer peripheral edge so as not to close the opening of the braided fiber .
Preferably it is applied to average the intersection of the set fibers,
It is particularly preferable to apply the inorganic adhesive only to the outermost intersection. After drying the inorganic adhesive at about 120 ° C., the ceramic cloth coated with the inorganic adhesive as described above is dried at 850 to 1 in an atmosphere corresponding to the material of the ceramic cloth.
Baking at a temperature of 200 ° C.

As a result, the inorganic adhesive is sintered, so that the outer peripheral edge of the ceramic cloth can be prevented from being frayed. Moreover, since the outer peripheral edge of the ceramic cloth is fixed with an inorganic adhesive having excellent heat resistance, the fixing with the inorganic adhesive does not deteriorate even when used at a temperature of usually 600 ° C. or higher. Therefore, the outer peripheral frayed ceramic cloth is
Various heat treatments can be performed according to the application, and a high temperature can be used as a jig for mounting and firing the semiconductor element.

In addition, the inorganic adhesive has a high adhesive strength to the ceramic cloth, and does not peel off or crack in ordinary handling. Further, if only the intersections of the braided fibers of the outer peripheral edge are fixed with the inorganic adhesive, the flexibility of the ceramic cloth is not impaired, and further, the permeability may be reduced due to clogging. In particular, when used as a firing jig such as a green sheet kneaded with an organic binder in a process of manufacturing a ceramic electronic component or the like, it has extremely excellent properties such as easy removal of the binder.

[0017]

EXAMPLE Nextel cloth # 26 (Al ₂ O) having a width of 1 m was used.
_{A 3-} SiO ₂ -B ₂ O ₃ system (manufactured by Isolite Industries Co., Ltd.) was prepared, and masking was performed for each square of 300 mm in length and width, and a non-masking portion having a width of 10 mm was left between each masking portion. A bond CF785W (polyvinyl acetate resin, manufactured by Konishi Co., Ltd.), which is a water-soluble organic adhesive, is applied to the non-masking portion having a width of 10 mm with a brush.
Dry at 15 ° C. for 15 minutes.

After that, cut at the non-masking portion,
A plurality of 300 mm-wide square cloths were produced. Cut
65mm% from each edge of the outer edge of the cloth to 2mm in width
SiO₂And 15% by weight of Al₂O₃And 12% by weight
Of CaO and 8% by weight of Na ₂Remove the inorganic adhesive containing O
And applied. Dry the cloth at 120 ° C for 15 minutes
Then, it was baked at 1100 ° C. for 30 minutes in the air.

In the cloth which has been prevented from fraying in the outer periphery in this way, only the intersection of the outermost periphery of the fiber is fixed at the outer peripheral edge with an inorganic adhesive, and the inorganic adhesive is firmly adhered to the cloth while the softness of the cloth as a whole is maintained. Sex was kept. Place this cloth on a ceramic lightweight setter, and further place a ceramic glass multilayer laminated substrate on it,
The firing was performed at 900 ° C. for 1 hour. The obtained multilayer laminated substrate had been sufficiently baked without degassing of the organic binder and without being affected by the degranulation from the lightweight setter.

[0020]

According to the present invention, it is possible to provide an inexpensive ceramic cloth which has been prevented from fraying by a simple method using an inorganic adhesive. This ceramic cloth has a high adhesive strength between the inorganic adhesive and the ceramic cloth. If only the intersections of the braided fibers on the outer peripheral edge are fixed with the inorganic adhesive, the flexibility of the ceramic cloth is not impaired, and furthermore, the eyes are not damaged. Since there is no decrease in air permeability due to clogging, it is suitable as a firing jig for a semiconductor element.

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Claims (4)

(57) [Claims] 1. A non-frayed ceramic cloth, wherein the outer peripheral edge of the ceramic cloth is fixed with an inorganic adhesive, including at least the outermost intersection of the braided fibers. 2. The method of claim 1, wherein the inorganic adhesive comprises 50 to 80% by weight of SiO ₂ , 5 to 15% by weight of Al ₂ O ₃ , 5 to 15% by weight of CaO, 1 to 15% by weight of Na ₂ O and / or Or K ₂
The outer peripheral frayed ceramic cloth according to claim 1, comprising O and a firing temperature of 850 to 1200C. 3. The average particle diameter of the inorganic adhesive is 5 μm.
The ceramic cloth whose outer peripheral fraying is prevented according to claim 1 or 2, characterized in that: 4. A portion to be cut of the original ceramic cloth is temporarily fixed with a water-soluble organic adhesive, and the temporarily cut portion to be cut is cut, and then the outer peripheral edge of the obtained ceramic cloth is cut.
Contains at least the outermost intersection of the braided fibers
A method for producing a ceramic cloth having a non-frayed outer periphery , wherein an inorganic adhesive is applied in such a manner as to be fired.