JP3278785B2 - Manufacturing method of surface coated cutting tool - Google Patents
Manufacturing method of surface coated cutting toolInfo
- Publication number
- JP3278785B2 JP3278785B2 JP23562593A JP23562593A JP3278785B2 JP 3278785 B2 JP3278785 B2 JP 3278785B2 JP 23562593 A JP23562593 A JP 23562593A JP 23562593 A JP23562593 A JP 23562593A JP 3278785 B2 JP3278785 B2 JP 3278785B2
- Authority
- JP
- Japan
- Prior art keywords
- coating layer
- hard coating
- ticn
- coated cutting
- cutting tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【産業上の利用分野】この発明は、炭化タングステン
（以下、ＷＣで示す）基超硬合金または炭窒化チタン
（以下、ＴｉＣＮで示す）基サーメットからなる基体の
焼肌面の一部または全部を研摩し、その研摩面に従来よ
りも一層密着性の優れたＴｉＣＮ硬質被覆層を形成し、
使用寿命の長い表面被覆切削工具を製造する方法に関す
るものである。BACKGROUND OF THE INVENTION The present invention relates to a method for removing a part or all of the surface of a substrate made of a cemented carbide based on tungsten carbide (hereinafter, referred to as WC) or a cermet based on titanium carbonitride (hereinafter, referred to as TiCN). Polishing, forming a TiCN hard coating layer with better adhesion than before on the polished surface,
The present invention relates to a method for producing a surface-coated cutting tool having a long service life.
【０００２】[0002]
【従来の技術】ＷＣ基超硬合金やＴｉＣＮ基サーメット
を基体とし、その表面にさらに化学蒸着法によりＴｉＣ
Ｎ硬質被覆層を形成してなる表面被覆切削工具の製造法
は知られており、このＴｉＣＮ硬質被覆層を形成するこ
とにより使用寿命が長くなることも知られている。2. Description of the Related Art A WC-based cemented carbide or a TiCN-based cermet is used as a base material, and the surface thereof is further coated with
A method for producing a surface-coated cutting tool having an N-hard coating layer is known, and it is also known that forming the TiCN-hard coating layer increases the service life.
【０００３】上記ＷＣ基超硬合金やＴｉＣＮ基サーメッ
トからなる基体の上にＴｉＣＮ硬質被覆層を化学蒸着す
るには、 温度：９１０〜９６０℃、 圧力：３０〜２００Torr、 反応ガス組成：１≦ＴｉＣｌ4 ／ＣＨ3 ＣＮ≦４ の条件で行なうことも知られている。In order to chemically deposit a TiCN hard coating layer on a substrate made of the WC-based cemented carbide or TiCN-based cermet, a temperature: 910-960 ° C., a pressure: 30-200 Torr, and a reaction gas composition: 1 ≦ TiCl It is also known to carry out under the condition of 4 / CH 3 CN ≦ 4.
【０００４】[0004]
【発明が解決しようとする課題】一方、近年の切削加工
の高速化および省力化に対する要求は厳しく、これに伴
ない高速切削や、高切込みおよび高送りなどの重切削が
強いられる傾向にあるが、上記の従来表面被覆切削工具
の場合、このような苛酷な条件下での切削では、表面被
覆層の基体表面に対する密着性が不十分であるために、
剥離が発生し易く、比較的短時間で使用寿命に至るのが
現状である。On the other hand, in recent years, there has been a severe demand for high-speed and labor-saving cutting, and accompanying this, high-speed cutting and heavy cutting such as high cutting and high feed tend to be forced. In the case of the above-mentioned conventional surface-coated cutting tool, the cutting under such severe conditions has an insufficient adhesion of the surface coating layer to the substrate surface.
At present, peeling tends to occur, and the service life is reached in a relatively short time.
【０００５】[0005]
【課題を解決するための手段】そこで、本発明者等は、
上述のような観点から、従来のＴｉＣＮ硬質被覆層より
も一層密着性および耐摩耗性に優れたＴｉＣＮ硬質被覆
層を形成し、表面被覆切削工具の使用寿命を延ばすべく
研究を行った結果、ＷＣ基超硬合金またはＴｉＣＮ基サ
ーメットからなる基体の焼肌面の一部または全部を研摩
し、この一部または全部を研摩した基体表面に、 温度：７００〜９００℃、 圧力：３０〜２００Torr、 反応ガス組成：４＜ＴｉＣｌ4 ／ＣＨ3 ＣＮ≦１３、 とした条件の化学蒸着法によりＴｉＣＮ硬質被覆層を形
成すると、上記基体の研摩面にＸ線回折における（４２
２）面に最高ピーク強度を示すＴｉＣＮ硬質被覆層が形
成され、この（４２２）面に最高ピーク強度を示すＴｉ
ＣＮ硬質被覆層は、従来の条件の化学蒸着法により形成
されるＸ線回折における最高ピーク強度が（２２０）
面、（１１１）面または（２００）面に現われるＴｉＣ
Ｎ硬質被覆層に比べて密着性が著しく高くなり、Ｘ線回
折における（４２２）面に最高ピーク強度を示すＴｉＣ
Ｎ硬質被覆層を基体表面に形成して得られた表面被覆切
削工具は、従来のＴｉＣＮ硬質被覆層を形成した表面被
覆切削工具に比べて、すぐれた切削性能を長期に亘って
発揮するという研究結果が得られたのである。Means for Solving the Problems Accordingly, the present inventors have
In view of the above, a study was conducted to form a TiCN hard coating layer having more excellent adhesion and wear resistance than the conventional TiCN hard coating layer and to extend the service life of the surface-coated cutting tool. A part or all of the burnt surface of a substrate made of a base cemented carbide or a TiCN-based cermet is polished, and a part or all of the polished substrate surface is subjected to a temperature of 700 to 900 ° C., a pressure of 30 to 200 Torr, and a reaction. When a TiCN hard coating layer is formed by a chemical vapor deposition method under the condition that the gas composition is 4 <TiCl 4 / CH 3 CN ≦ 13, (42)
2) A TiCN hard coating layer exhibiting the highest peak intensity is formed on the surface, and the Ti422 exhibiting the highest peak intensity is formed on the (422) surface.
The CN hard coating layer has the highest peak intensity in X-ray diffraction formed by a chemical vapor deposition method under conventional conditions (220).
TiC appearing on (111) or (200) plane
TiC, which has significantly higher adhesion than the N hard coating layer and exhibits the highest peak intensity on the (422) plane in X-ray diffraction.
Research shows that a surface-coated cutting tool obtained by forming an N-hard coating layer on a substrate surface exhibits superior cutting performance over a long period of time compared to a surface-coated cutting tool having a conventional TiCN hard coating layer. The result was obtained.
【０００６】この発明は、かかる研究結果にもとづいて
なされたものであって、焼結して得られたＷＣ基超硬合
金またはＴｉＣＮ基サーメットからなる基体焼肌面の一
部または全部を研摩し、この研摩面にＴｉＣＮ硬質被覆
層を化学蒸着法により形成することにより、Ｘ線回折に
おける（４２２）面に最高ピーク強度を示すＴｉＣＮ硬
質被覆層を形成する表面被覆切削工具の製造法に特徴を
有するものである。[0006] The present invention has been made based on the results of such research, and is intended to polish a part or the entire surface of a baked surface of a WC-based cemented carbide or TiCN-based cermet obtained by sintering. By forming a TiCN hard coating layer on this polished surface by a chemical vapor deposition method, a method of manufacturing a surface-coated cutting tool that forms a TiCN hard coating layer having the highest peak intensity on the (422) plane in X-ray diffraction is characterized by the following. Have
【０００７】上記Ｘ線回折による（４２２）面に最高ピ
ーク強度を示す密着性の優れたＴｉＣＮ硬質被覆層を形
成するには、（１） 基体の焼肌面が研摩されているこ
と、（２） 化学蒸着条件として、反応温度が７００〜
９００℃と相対的に低く、さらに反応ガス組成のＴｉＣ
ｌ4 ：ＣＨ3 ＣＮの比が高いこと、が必要である。In order to form a TiCN hard coating layer exhibiting the highest peak intensity on the (422) plane by X-ray diffraction and having excellent adhesion, (1) the burnt surface of the substrate must be polished; ) The reaction temperature is 700 ~
Relatively low at 900 ° C, and TiC with a reactive gas composition
It is necessary that the ratio of l 4 : CH 3 CN be high.
【０００８】上記基体の表面が焼肌面のままの状態で上
記条件の化学蒸着を行っても、Ｘ線回折における（４２
２）面に最高ピークを示す密着性の優れたＴｉＣＮ硬質
被覆層は形成されない。[0008] Even when the chemical vapor deposition under the above conditions is performed with the surface of the above-mentioned substrate kept as it is, the (42)
2) No TiCN hard coating layer exhibiting the highest peak on the surface and having excellent adhesion is formed.
【０００９】また、基体表面を研摩しても、化学蒸着条
件の温度が９００℃を越えると、Ｘ線回折における（２
２０）面、（１１１）面または（２００）面に最高ピー
ク強度を示すＴｉＣＮ硬質被覆層が形成され、密着性が
低下して好ましくなく、一方、７００℃未満であるとＴ
ｉＣｌ4 に由来する塩素が膜中に取り込まれ、膜の強度
が低下するので好ましくない。したがって、この発明の
化学蒸着条件の温度は７００〜９００℃に定めた。Further, even if the substrate surface is polished, if the temperature of the chemical vapor deposition condition exceeds 900 ° C., (2)
A TiCN hard coating layer having the highest peak strength is formed on the (20), (111) or (200) plane, and the adhesion is undesirably reduced.
It is not preferable because chlorine derived from iCl 4 is taken into the film and the strength of the film is reduced. Therefore, the temperature of the chemical vapor deposition conditions of the present invention is set to 700 to 900 ° C.
【００１０】さらに、上記化学蒸着において使用する反
応ガス組成は、ＴｉＣｌ4 ／ＣＨ3ＣＮの値が４を越え
ることが必要であり、４以下であると（２２０）面、
（１１１）面、または（２００）面に最高ピーク強度を
示すＴｉＣＮ硬質被覆層が形成されるので密着性が低下
し、一方、ＴｉＣｌ4 ／ＣＨ3 ＣＮの値が１３を越える
と膜の生成速度が著しく低下するので、実際上の生産に
おいては好ましくない。Further, the reaction gas composition used in the chemical vapor deposition needs to have a value of TiCl 4 / CH 3 CN exceeding 4, and if it is 4 or less, the (220) plane,
Since a TiCN hard coating layer exhibiting the highest peak intensity is formed on the (111) plane or the (200) plane, the adhesion is reduced. On the other hand, when the value of TiCl 4 / CH 3 CN exceeds 13, the film formation rate is increased. Is significantly reduced, which is not preferable in practical production.
【００１１】したがって、ＴｉＣｌ4 ／ＣＨ3 ＣＮの値
は４＜ＴｉＣｌ4 ／ＣＨ3 ＣＮ≦１３となるように定め
た。Accordingly, the value of the TiCl 4 / CH 3 CN is determined such that 4 <TiCl 4 / CH 3 CN ≦ 13.
【００１２】このようにして得られたＸ線回折による
（４２２）面に最高ピーク強度を示すＴｉＣＮ硬質被覆
層は、基体に対する密着性が優れているために、複層か
らなる硬質被覆層の下地層として使用することもでき
る。The thus obtained TiCN hard coating layer exhibiting the highest peak intensity on the (422) plane by X-ray diffraction has excellent adhesion to the substrate, and thus has a lower thickness than the multilayer hard coating layer. It can also be used as a stratum.
【００１３】なお、この発明の表面被覆切削工具の製造
法を実施するに際し、基体の焼肌面を研摩して得られた
研摩面は鏡面であるほどＸ線回折による（４２２）面に
最高ピーク強度を示すＴｉＣＮ硬質層が得られやすく、
研摩面の表面荒さは７０Ｓ以下とすることが好ましい。When the method for producing a surface-coated cutting tool of the present invention is carried out, the polished surface obtained by polishing the burnt surface of the substrate has the highest peak on the (422) plane by X-ray diffraction as the surface becomes more specular. A TiCN hard layer showing strength is easily obtained,
The surface roughness of the polished surface is preferably 70S or less.
【００１４】[0014]
実施例１ すくい面寸法：１２．７０mm×１２．７０mm、厚さ：
３．１８mm、逃げ角度：１１度、コーナー半径：０．８
mmおよびチャンファーホーニングの刃先部を有し、焼肌
面を有するＷＣ基超硬合金基体ａ（成分組成：ＷＣ−１
０％Ｃｏ）を作製した。Example 1 Rake face dimensions: 12.70 mm x 12.70 mm, thickness:
3.18mm, clearance angle: 11 degrees, corner radius: 0.8
WC-based cemented carbide substrate a having an edge portion of 0.5 mm and chamfer honing and having a burnt surface (component composition: WC-1
0% Co).
【００１５】このＷＣ基超硬合金基体ａの逃げ面、すく
い面および刃先部を表１〜表２に示される表面粗さとな
るように研摩してＷＣ基超硬合金基体Ａ−１〜Ａ−１０
を作製した。The flank, rake face and cutting edge of the WC-based cemented carbide substrate a are polished so as to have the surface roughness shown in Tables 1 and 2, and the WC-based cemented carbide substrates A-1 to A- 10
Was prepared.
【００１６】上記ＷＣ基超硬合金基体Ａ−１〜Ａ−１０
および無研摩のＷＣ基超硬合金基体ａを通常の化学蒸着
装置に装入し、表１〜表２に示される条件で平均層厚：
４μｍのＴｉＣＮ硬質被覆層を形成することにより本発
明表面被覆切削工具の製造法（以下、本発明法という）
１〜１０、比較表面被覆切削工具の製造法（以下、比較
法という）１〜７および従来表面被覆切削工具の製造法
１〜３を実施した。上記本発明法１〜１０、比較法１〜
７および従来法１〜３で得られた表面被覆切削工具のＴ
ｉＣＮ硬質被覆層をＸ線回折することにより最大ピーク
強度結晶面を測定し、ついで、これら表面被覆切削工具
を用い、 被削材：ＳＮＣＭ４３９（硬さ：ＨB ２７０）、 切削速度：２００ｍ／min 、 切り込み：２．０mm、 送り：０．３mm／分（単刃切削）、 切削時間：５０分、 の条件で乾式フライス切削試験を行ない、ＴｉＣＮ硬質
被覆層の状況を観察し、これら測定および観察結果を表
１〜表２に示した。The WC-based cemented carbide substrates A-1 to A-10
And an unpolished WC-based cemented carbide substrate a were placed in a conventional chemical vapor deposition apparatus, and the average layer thickness was obtained under the conditions shown in Tables 1 and 2.
A method for producing a surface-coated cutting tool of the present invention by forming a 4 μm TiCN hard coating layer (hereinafter, referred to as the present method).
Examples 1 to 10, methods 1 to 7 for producing comparative surface-coated cutting tools (hereinafter referred to as comparative methods), and methods 1 to 3 for producing conventional surface-coated cutting tools were carried out. The above methods 1 to 10 of the present invention and comparative methods 1 to
7 and T of surface-coated cutting tools obtained by conventional methods 1 to 3
measuring the maximum peak intensity crystal plane by X-ray diffraction iCN hard layer, then using these surface-coated cutting tool, work material: SNCM439 (Hardness: H B 270), Cutting speed: 200 meters / min , Depth of cut: 2.0 mm, feed: 0.3 mm / min (single-edge cutting), cutting time: 50 minutes, dry milling test was conducted, and the condition of the TiCN hard coating layer was observed, and these measurements and observations were made. The results are shown in Tables 1 and 2.
【００１７】[0017]
【表１】 [Table 1]
【００１８】[0018]
【表２】 [Table 2]
【００１９】実施例２ 実施例１で作製したＷＣ基超硬合金基体ａと全く同一形
状同一寸法の焼肌面を有するＴｉＣＮ基サーメット基体
ｂ（成分組成：ＴｉＣＮ−１０％ＷＣ−１０％ＴａＣ−
２％ＮｂＣ−１０％Ｃｏ−１０％Ｎｉ）を作製し、この
ＴｉＣＮ基サーメット基体ｂの逃げ面、すくい面および
切刃部を研摩して表３〜表４に示される表面粗さとし、
ＴｉＣＮ基サーメット基体Ｂ−１〜Ｂ−１０を作製し
た。Example 2 A TiCN-based cermet substrate b having exactly the same shape and the same size as the WC-based cemented carbide substrate a produced in Example 1 (component composition: TiCN-10% WC-10% TaC-
2% NbC-10% Co-10% Ni), and the flank face, rake face and cutting edge of the TiCN-based cermet substrate b were polished to a surface roughness shown in Tables 3 and 4,
TiCN-based cermet substrates B-1 to B-10 were produced.
【００２０】上記ＴｉＣＮ基サーメット基体Ｂ−１〜Ｂ
−１０および無研摩のＴｉＣＮ基サーメット基体ｂを通
常の化学蒸着装置に装入し、表３〜表４に示される条件
で平均層厚：４μｍのＴｉＣＮ硬質被覆層を形成するこ
とにより本発明法１１〜２０、比較法８〜１４および従
来法４〜６を実施した。The TiCN-based cermet substrates B-1 to B
-10 and an unpolished TiCN-based cermet substrate b were loaded into a conventional chemical vapor deposition apparatus, and a TiCN hard coating layer having an average layer thickness of 4 μm was formed under the conditions shown in Tables 3 and 4 to obtain the method of the present invention. 11-20, Comparative Methods 8-14 and Conventional Methods 4-6 were performed.
【００２１】上記本発明法１１〜２０、比較法８〜１４
および従来法４〜６で得られた表面被覆切削工具のＴｉ
ＣＮ硬質被覆層をＸ線回折することにより最大ピーク強
度結晶面を測定し、ついでこれら表面被覆切削工具を用
い、実施例１で行った条件と同一条件にて乾式フライス
切削試験を行ない、ＴｉＣＮ硬質被覆層の状況を観察
し、これら測定および観察結果を表３〜表４に示した。The above methods 11 to 20 of the present invention and comparative methods 8 to 14
And Ti of the surface-coated cutting tool obtained by the conventional methods 4 to 6
The crystal plane of maximum peak intensity was measured by X-ray diffraction of the CN hard coating layer, and a dry milling test was performed using these surface-coated cutting tools under the same conditions as those in Example 1 to obtain a TiCN hard coating. The state of the coating layer was observed, and the results of these measurements and observations are shown in Tables 3 and 4.
【００２２】[0022]
【表３】 [Table 3]
【００２３】[0023]
【表４】 [Table 4]
【００２４】実施例３ 実施例１の本発明法５および実施例２の本発明法１５で
作製したＸ線回折における最大ピーク強度結晶面が（４
２２）のＴｉＣＮ硬質被覆層を有する表面被覆切削工具
を基体とし、その表面に、 温度：１０２０℃、 圧力：５０torr、 反応ガス組成：８６．２％Ｈ2 −３．５％ＴｉＣｌ4 −
１０．３％ＣＨ4 、 の条件で厚さ：４μｍのＴｉＣ硬質被覆層を形成し、本
発明法２１〜２２を実施した。Example 3 The crystal plane of the maximum peak intensity in the X-ray diffraction prepared by the method 5 of the present invention of Example 1 and the method 15 of the present invention of Example 2 was (4
22) A surface-coated cutting tool having a TiCN hard coating layer as a base material, on the surface of which a temperature: 1020 ° C., a pressure: 50 torr, a reaction gas composition: 86.2% H 2 -3.5% TiCl 4 −
A TiC hard coating layer having a thickness of 4 μm was formed under the conditions of 10.3% CH 4 , and the methods 21 to 22 of the present invention were carried out.
【００２５】一方、実施例１の従来法１で作製したＸ線
回折における最大ピーク強度結晶面が（１１１）のＴｉ
ＣＮ硬質被覆層を有する表面被覆切削工具および実施例
２の従来法４で作製した最大ピーク強度結晶面が（２２
０）のＴｉＣＮ硬質被覆層を有する表面被覆切削工具を
それぞれ基体とし、それら基体の表面に上記条件でＴｉ
Ｃ硬質被覆層を形成し、従来法７〜８を実施した。On the other hand, the X-ray diffraction produced by the conventional method 1 of Example 1 has a maximum peak intensity of (111).
The surface coated cutting tool having a CN hard coating layer and the maximum peak strength crystal plane produced by the conventional method 4 of Example 2 were (22)
0) A surface-coated cutting tool having a TiCN hard coating layer was used as a substrate, and the surface of the substrate was coated with Ti under the above conditions.
C hard coating layer was formed, and conventional methods 7 and 8 were performed.
【００２６】上記本発明法２１〜２２で得られた表面綜
合複合切削工具および従来法７〜８で得られた表面複合
被覆切削工具を用い、実施例１で行った乾式フライス切
削試験条件と同一条件で乾式フライス切削試験を行な
い、乾式フライス切削試験後の複合被覆硬質層の剥離の
有無を調べたところ、Ｘ線回折における最大ピーク強度
結晶面が（４２２）のＴｉＣＮ硬質被覆層を下地層とし
た本発明法２１〜２２で得られた表面複合被覆切削工具
には剥離が発生しないに対し、最大ピーク強度結晶面が
（１１１）および（２２０）のＴｉＣＮ硬質被覆層を下
地層とした従来法７〜８で得られた表面被覆切削工具に
は剥離が見られた。Using the surface integrated composite cutting tool obtained by the above-mentioned present invention methods 21 to 22 and the surface composite coated cutting tool obtained by the conventional methods 7 to 8, the same conditions as in the dry milling cutting test conducted in Example 1 were used. A dry milling cutting test was performed under the conditions, and the presence or absence of peeling of the composite coated hard layer after the dry milling cutting test was examined. The TiCN hard coating layer having the maximum peak intensity crystal plane (422) in the X-ray diffraction was defined as an underlayer. The surface composite-coated cutting tools obtained by the methods 21 to 22 of the present invention did not peel off, while the conventional method using a TiCN hard coating layer having a maximum peak strength crystal plane of (111) and (220) as an underlayer. Peeling was observed in the surface-coated cutting tools obtained in Nos. 7 to 8.
【００２７】[0027]
【発明の効果】実施例１〜３に示される結果から明らか
なように、本発明法１〜２２によると、Ｘ線回折（４２
２）面に最大ピーク強度を示す基体に対する密着性のす
ぐれたＴｉＣＮ硬質被覆層を形成することができ、この
（４２２）面に最大ピーク強度を示すＴｉＣＮ硬質被覆
層は複合硬質被覆層の下地層としても有効であるが、こ
の発明の条件から外れた条件の比較法１〜１４および従
来法１〜８で形成したＴｉＣＮ硬質被覆層はＸ線回折に
おける最大ピーク強度が（１１１），（２２０）または
（２００）となって密着性に劣ることがわかる。As is clear from the results shown in Examples 1 to 3, according to the methods 1 to 22 of the present invention, X-ray diffraction (42
2) It is possible to form a TiCN hard coating layer having excellent adhesion to a substrate exhibiting the maximum peak intensity on the surface, and the TiCN hard coating layer exhibiting the maximum peak intensity on the (422) surface is an underlayer of the composite hard coating layer. However, the TiCN hard coating layer formed by the comparative methods 1 to 14 under the conditions deviating from the conditions of the present invention and the conventional methods 1 to 8 has a maximum peak intensity in X-ray diffraction of (111), (220). Or it becomes (200) and it turns out that adhesiveness is inferior.
【００２８】上述のように、この発明によると密着性に
優れたＴｉＣＮ硬質被覆層を形成することができ、この
密着性に優れたＴｉＣＮ硬質被覆層を基体表面に形成し
た表面被覆切削工具は従来よりも長期に亘って優れた性
能を発揮し、産業上すぐれた効果をもたらすものであ
る。As described above, according to the present invention, a TiCN hard coating layer having excellent adhesion can be formed. It exhibits superior performance over a longer period of time, and brings about industrially superior effects.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) C23C 16/00 - 16/56 B23P 15/28 ＪＩＣＳＴファイル（ＪＯＩＳ)──────────────────────────────────────────────────続 き Continuation of front page (58) Field surveyed (Int. Cl. 7 , DB name) C23C 16/00-16/56 B23P 15/28 JICST file (JOIS)
Claims (2)
化チタン基サーメットからなる基体の焼肌面の一部また
は全部を研摩し、その研摩した面に、Ｘ線回折における
（４２２）面に最高ピーク強度を示す炭窒化チタン硬質
被覆層を化学蒸着法により形成することを特徴とする表
面被覆切削工具の製造法。1. A burnt surface of a substrate made of a tungsten carbide-based cemented carbide or a titanium carbonitride-based cermet is partially or entirely polished, and the polished surface has a highest peak on a (422) plane in X-ray diffraction. A method for producing a surface-coated cutting tool, comprising forming a titanium carbonitride hard coating layer exhibiting strength by a chemical vapor deposition method.
高ピーク強度を示す炭窒化チタン硬質被覆層は、 温度：７００〜９００℃、 圧力：３０〜２００Torr、 反応ガス組成：４＜ＴｉＣｌ4 ／ＣＨ3 ＣＮ≦１３、 の条件で形成することを特徴とする請求項１記載の表面
被覆切削工具の製造法。2. The titanium carbonitride hard coating layer exhibiting the highest peak intensity on the (422) plane in the X-ray diffraction, temperature: 700 to 900 ° C., pressure: 30 to 200 Torr, reaction gas composition: 4 <TiCl 4 / preparation of the surface-coated cutting tool according to claim 1, characterized in that formed in CH 3 CN ≦ 13, conditions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23562593A JP3278785B2 (en) | 1993-08-27 | 1993-08-27 | Manufacturing method of surface coated cutting tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23562593A JP3278785B2 (en) | 1993-08-27 | 1993-08-27 | Manufacturing method of surface coated cutting tool |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0762542A JPH0762542A (en) | 1995-03-07 |
| JP3278785B2 true JP3278785B2 (en) | 2002-04-30 |
Family
ID=16988787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23562593A Expired - Lifetime JP3278785B2 (en) | 1993-08-27 | 1993-08-27 | Manufacturing method of surface coated cutting tool |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3278785B2 (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE527346C2 (en) * | 2003-04-24 | 2006-02-14 | Seco Tools Ab | Cutter with coating of layers of MTCVD-Ti (C, N) with controlled grain size and morphology and method of coating the cutter |
| JP4518258B2 (en) * | 2004-08-11 | 2010-08-04 | 三菱マテリアル株式会社 | A surface-coated cermet cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed intermittent cutting |
| US7597970B2 (en) * | 2005-03-22 | 2009-10-06 | Kyocera Corporation | Surface coated member and cutting tool |
| US7906230B2 (en) * | 2006-09-05 | 2011-03-15 | Tungaloy Corporation | Coated cutting tool and method for producing the same |
| EP2692466B1 (en) * | 2011-03-31 | 2019-10-02 | Sumitomo Electric Hardmetal Corp. | Surface-coated cutting tool |
| JP6039481B2 (en) * | 2013-03-27 | 2016-12-07 | 京セラ株式会社 | Surface covering member |
| JP6519936B1 (en) * | 2018-03-16 | 2019-05-29 | 住友電工ハードメタル株式会社 | Surface-coated cutting tool and method of manufacturing the same |
| JP6519935B1 (en) * | 2018-03-16 | 2019-05-29 | 住友電工ハードメタル株式会社 | Surface-coated cutting tool and method of manufacturing the same |
| US20220288697A1 (en) * | 2019-08-30 | 2022-09-15 | Seco Tools Ab | Coated cutting tool |
-
1993
- 1993-08-27 JP JP23562593A patent/JP3278785B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0762542A (en) | 1995-03-07 |
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