JP3275303B2 - Dicing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dicing apparatus, and more particularly, to a dicing apparatus having a plurality of vacuum lines used for vacuum suction of a work.

[0002]

2. Description of the Related Art Conventionally, there has been known a dicing apparatus which takes out a work from a cassette in which a plurality of works such as semiconductor wafers are stored, sequentially conveys the taken out work to a cutting section by a conveying mechanism, and cuts the work into a predetermined shape. . As such a dicing apparatus, there is known a dicing apparatus that uses vacuum suction in order to hold a work at a cutting table of a cutting unit on which a work is mounted or a cutting unit that mounts the work. For example, when transporting a workpiece, the workpiece is vacuum-adsorbed by the suction pad at the tip of the movable arm and transported to the desired position. There is one in which the position of the work is fixed.

Further, as a means for evacuating a vacuum pipe (vacuum line) connected to each part such as a suction pad and a suction table, there is a means using an ejector vacuum pump (hereinafter simply referred to as an “ejector”). The ejector blows compressed air into the tube of the ejector to generate a force for sucking outside air from a hole formed in the wall of the tube, and the suction force reduces the pressure of the vacuum line.

[0004]

However, conventionally,
When vacuum suction is used, a vacuum generator (for example, the above-mentioned ejector) is mounted for each vacuum line, so that there is a problem that the efficiency of compressed air consumption during suction is low. Further, in the conventional dicing apparatus, there is a case where a liquid such as water enters from a suction hole of a vacuum pad or the like and reaches the ejector. When the liquid enters the ejector, the function of the ejector is reduced, and a problem arises that the suction cannot be performed properly.

[0005] The present invention has been made in view of such circumstances, to save energy by efficiently operating the vacuum generator, and to make it possible to discharge the liquid flowing from the vacuum line in a suitable manner. It is an object of the present invention to provide a dicing apparatus that prevents a decrease in the function of a generator.

[0006]

In order to achieve the above object, the present invention provides a first tank in which one or a plurality of vacuum lines used for vacuum suction of a work are communicated with each other; A second tank that stores the liquid that has flowed into the first tank from the vacuum line, and a pressure reducing unit that reduces the pressure of the second tank. depressurizing the pressure in the first tank through said comprises a decompression means for reducing the pressure of the vacuum line, a switching valve for communicating or disconnecting the first tank and the second tank, by the switching valve Draining means for discharging the liquid stored in the second tank after shutting off the first tank and the second tank;
It is characterized by having.

According to the present invention, a plurality of vacuum lines are connected to one tank (first tank), and the first tank is depressurized so that each vacuum line is maintained at a vacuum. The number of machines can be reduced. When an ejector is used as a vacuum generator, air consumption can be reduced. In addition, the first tank is used as a tank for maintaining a vacuum, the second tank is used as a storage tank for the liquid flowing from the vacuum line, and the first tank and the second tank are shut off to form a second tank. Since the liquid stored in the second tank can be discharged, the liquid stored in the second tank can be discharged while maintaining the vacuum of the vacuum line. Further, the problem that the liquid flows into the vacuum generator is eliminated, and the efficient operation of the vacuum generator is maintained, so that the efficient consumption of the compressed air is guaranteed.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A dicing apparatus according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a perspective view of a semiconductor wafer dicing apparatus 1 to which the present invention is applied, and FIG. 2 is a plan view thereof. As shown in FIG.
The dicing apparatus 1 mainly includes a cutting section 10, a cleaning section 20, a cassette storage section 30, an elevator section 40, a transport apparatus 50, and the like.

The process of cutting the wafer W by the dicing apparatus 1 will be described. First, the unprocessed wafers W stored in the cassette storage unit 30 are sequentially pulled out by the elevator unit 40, and are drawn out. The wafer W is set at the position P4 shown in FIG. Next, the wafer W is transferred to the suction pad 50 of the transfer device 50.
A, 50A,... Are conveyed onto the cutting table (position P2) of the cutting section 10 via the preload stage at the position P1. Subsequently, the wafer W
Is sucked and held on the cutting table. The wafer W held by suction is subjected to image recognition of the pattern on the wafer W by the alignment units 18 and 19, and is aligned based on the image. Then, in the aligned wafer W, two streets are cut at the same time by the movement in the Y-axis direction indicated by arrows A and B of the cutting unit 10 and the movement in the X-axis direction indicated by arrows C and D on the cutting table. . When the first two streets are cut, the cutting section 1
The spindle 0 is moved in the Y-axis direction by the pitch of the street, and the cutting table is moved again in the X-axis direction. As a result, the next two streets are cut. This cutting operation is repeatedly performed, and when the cutting of all the streets in one direction (X direction) is completed, the cutting table is rotated by 90 ° and the other direction orthogonal to the cut street (the Y direction in FIG. 2). ) Is cut sequentially. Thereby, the wafer W is finally cut into a dice.

After the cut wafer W is returned to the position P2 by the cutting table, the transfer device 50
Is transported to the spinner table of the cleaning unit 20 at the position P3. Here, the wafer W is dried by the air blow after being washed with the washing water. The dried wafer W is transferred to the position P4 by the transfer device 50, transferred to the cassette unit 30 by the elevator unit 40, and stored in a predetermined cassette. The above is the flow of the process of cutting one wafer W by the dicing apparatus 1.

As shown in FIG. 2, the cutting section 10 of the dicing apparatus 1 has a pair of cutting devices 14 and 16, and the cutting devices 14 and 16 are spindles 60 and 62 and the tip portions of the spindles 60 and 62. Blades 64, 6 mounted on
6 is provided. The cutting devices 14 and 16 are independently moved in a Y-axis direction and a vertical direction (Z-axis direction) by a spindle feed mechanism described later.

FIG. 3 is a configuration diagram showing an embodiment of a vacuum piping system in the above dicing apparatus.
The suction pads 50A, 50A,... Of the transfer means 50 for vacuum-sucking the wafer W, the cutting table, and the like are connected to a tank T1 shown in FIG. This tank T1
For example, it has a capacity of 2 liters and mainly functions as a tank for maintaining a vacuum. That is, by making the tank T1 vacuum, each of the vacuum lines 100, 100,.

A tank T2 is connected to the tank T1 via a pipe via a valve V4. The valve V4 connects or disconnects the tank T1 and the tank T2. When the valve V4 is off (the state shown in the figure), the tank T1 and the tank T2 are turned off.
The tank T1 and the tank T2 are shut off in the ON state. The tank T2 has a capacity of, for example, 0.3 liter, and functions as a vacuum storage and a water storage tank similarly to the tank T1. That is, a liquid such as water (hereinafter, simply referred to as water) flowing into the tank T1 from the vacuum lines 100, 100,... Is stored in the tank T2 via a pipe.

An ejector E2 and an air source 102 are connected to the tank 2 via a valve V2 by piping. In addition, it is connected to a drain through a check valve 104. The valve V2 switches the pressure of the tank T2 to a negative pressure (vacuum) or a positive pressure, and connects the tank T2 to the ejector E2 or the air source 102. Off state (state shown in the figure)
Then, the tank T2 communicates with the ejector E2, and in the on state, the tank T2 communicates with the air source 102.

The ejector E2 is a device for generating a vacuum. When compressed air from the air source 102 is blown into the compressed air inlets / outlets a and b of the ejector E2, air is discharged from a suction port c connected to the tank T2. Aspirate. Therefore, when the valve V2 communicates the tank T2 with the ejector E2, the pressure in the tank T2 is reduced (made vacuum).

The air source 102 is a device for sending high-pressure air, and is provided in a factory or the like. When the valve V2 connects the tank T2 and the air source 102, the pressure of the tank T2 is increased by the compressed air sent from the air source 102. Thereby, the water stored in the tank T2 is discharged from the drain port through the check valve 104.

On the other hand, an ejector E1 is connected to the tank T1 via a pipe via a valve V3. The valve V3 connects or disconnects the tank T1 and the ejector E1. The valve V3 shuts off the tank T1 and the ejector E1 in an off state (the state shown in the figure), and disconnects the tank T1 and the ejector E1 in an on state. Communicate. Ejector E1
Is the same device as the ejector E2, and the ejector E1
When compressed air is blown to the compressed air inlets / outlets a and b, the air is sucked from the suction port c connected to the tank T1. However, a valve V1 is provided between the ejector E1 and the air source 102.
Is connected, and the compressed air is supplied to the ejector E1 only when the valve V1 is in the on state, and the compressed air is not supplied to the ejector E1 in the off state (the state shown in the drawing). I have. Therefore, the valve V1
Ejector E1 only when valve V3 is ON
As a result, the pressure in the tank T1 is reduced.

Further, the tank T1 has a degree of vacuum (atmospheric pressure).
Is installed, and a water level sensor Se2 for detecting the amount of stored water (water level) is installed in the tank T2. These vacuum sensors Se
1 and the detected values of the water level sensor Se2 are transmitted to a control unit (not shown). The control unit controls ON / OFF of the valves V1 to V4 based on the detection values transmitted from these sensors, and automatically controls the pressure of the tank T1, the discharge of water stored in the tank T2, and the like.

Next, the processing procedure of the control unit will be described with reference to the flowchart of FIG. When the control unit starts the control (step S10), first, all the valves V1
Turn off V4. That is, the tank T1 communicates with the tank T2, and the tank T2 communicates with the ejector E2. Thereby, the tank T is moved by the ejector E2.
2 and the pressure in the tank T1 are reduced, and the vacuum line 1
.. Are evacuated.

Next, the controller detects the level of the water stored in the tank T2 from the water level sensor Se2 installed in the tank T2 (step S14). Then, it is determined whether or not the amount of water stored in the tank T2 has risen to a predetermined amount or more (step S16). If NO, the process returns to step S14,
Steps S14 and S16 are repeatedly executed. On the other hand, if YES, the valve V2 and the valve V4
Is turned on (step S18). That is, the tank T1 and the tank T2 are shut off, and the air source 1 is connected to the tank T2.
Compressed air is supplied from 02 to make the pressure in the tank T2 positive. As a result, the vacuum in the tank T1 is maintained, and the water stored in the tank T2 is discharged from the drain through the check valve 104.

Subsequently, the control unit controls the tank T2 as described above.
While the water is being discharged, the vacuum degree of the tank T1 is detected by the vacuum sensor Se1 installed in the tank T1 (step S20). Then, it is determined whether or not the degree of vacuum of the tank T1 has dropped below a predetermined value (step S2).
2). If YES, it is determined that the pressure in the tank T1 is not maintained at the vacuum, and the valve V1 and the valve V
3 is turned on (step S24). That is, compressed air is supplied to the ejector E1 from the air source 102 to operate the ejector E1, and the ejector E1 is connected to the tank T1.
And the pressure in the tank T1 is reduced by the ejector E1. Thus, even when the ejector E2 is not in communication with the tank T1, the vacuum line 10
.. 0, 100,. On the other hand, if NO in step S22, the degree of vacuum in the tank T1 is sufficiently maintained, so that the process proceeds to the next step S28 while keeping the valves V1 and V3 off (step S26).

Next, the control section detects the water level of the tank T2 by the water level sensor Se2 of the tank T2 (step S2).
28), it is determined whether or not the water stored in the tank T2 has been completely drained (step S30). If NO
The processing from step S20 is repeatedly executed.
In the repetitive processing from step S20 to step S30, if the valve V1 and the valve V3 are once turned on in step S24, the next step S22
Then, it is determined whether or not the degree of vacuum of the tank T2 has reached a predetermined upper limit. Only when YES is determined at this time, the process of step S26, that is, the operation of the ejector E1 is stopped, and the ejector E1 and the tank T1 are shut off.

On the other hand, if YES is determined in step S30, that is, if the drainage of the water stored in the tank T2 is completed, only the valve V2 is turned off without turning off the valve V4 (step S32). ), The tank T2 is communicated with the ejector E2. Thereby, the air in the tank T2 is exhausted for a certain period of time, and the tank T2 is evacuated. Then, when this process ends, the process returns to the step S12,
All the valves V1 to V4 are turned off, and the above processing is repeatedly executed. That is, the valve V4 is turned off and the tank T
1 and the tank T2 are communicated with each other, and the tank T1 is evacuated by the ejector E2. Further, the valve V1 and the valve V
When the switch 3 is ON, the ejector E1 is stopped and the tank T1 and the ejector E1 are shut off.

With the above configuration and control, by maintaining one tank T1 at a vacuum, a plurality of vacuum lines 100, 100,... Can be simultaneously evacuated, and the pressure of the tank T1 is always kept at a vacuum. While holding, the water flowing in from the vacuum lines 100, 100 can be appropriately discharged. In the above embodiment, the ejector E is used only when the drainage treatment of the tank T2 is performed.
1 is operated, but the invention is not limited to this.
Even when the drainage process is not performed, the degree of vacuum of the tank T1 is constantly monitored, and when it is determined that the exhaust of the ejector E2 alone cannot sufficiently evacuate the tank T1, the ejector E1 is also operated to operate the ejector E1. The exhaust of the tank T1 may be performed by both the ejector E2 and the ejector E2.

Although the two ejectors E1 and E2 are provided in the above embodiment, the ejector E1 is unnecessary if the ejector E2 is connected to the tank T1 while the tank T2 is being drained. is there. In the above embodiment, the ejector is used as the vacuum generator (decompression means). However, the invention is not limited to this, and another type of pump can be used instead of the ejector.

In the above embodiment, the dicing apparatus for cutting a wafer has been described. However, the present invention can be applied to a dicing apparatus for cutting a work.

[0027]

As described above, according to the dicing apparatus according to the present invention, a plurality of vacuum lines are connected to one tank (first tank), and the first tank is decompressed so that each vacuum line is reduced. Is kept in a vacuum, so that the number of vacuum generators can be reduced. When using an ejector as a vacuum generator,
Since the air supply for operating the ejector can be reduced, the air consumption can be reduced,
The plant can save energy.

Further, the first tank is used as a tank for holding a vacuum, the second tank is used as a storage tank for the liquid flowing from the vacuum line, and the first tank and the second tank are shut off to form a second tank. Since the liquid stored in the second tank can be discharged, the liquid stored in the second tank can be discharged while maintaining the vacuum of the vacuum line. Further, the problem that the liquid flows into the ejector is eliminated and the efficient operation of the vacuum generator is maintained, so that the efficient consumption of the compressed air is guaranteed.

[Brief description of the drawings]

FIG. 1 is a perspective view of a dicing apparatus to which the present invention is applied.

FIG. 2 is a plan view of a dicing apparatus to which the present invention is applied.

FIG. 3 is a configuration diagram showing one embodiment of a vacuum pipe in a dicing apparatus.

FIG. 4 is a flowchart illustrating a processing procedure of a control unit that controls a valve of a vacuum pipe.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Dicing device 10 ... Cutting part 14, 16 ... Cutting device 100 ... Vacuum line 102 ... Air source 104 ... Check valve V1-V4 ... Valve T1, T2 ... Tank Se1 ... Vacuum sensor Se2 ... Water level sensor E1, E2 ... Ejector

Claims (3)

(57) [Claims] A first tank connected to one or a plurality of vacuum lines used for vacuum suction of a work; a first tank connected to the first tank; and a first tank connected from the vacuum line to the first tank. A second tank for storing the inflowing liquid, and a pressure reducing means for reducing the pressure of the second tank,
A pressure reducing means for reducing the pressure of the first tank through the second tank and reducing the pressure of the vacuum line; and a switching valve for communicating or shutting off the first tank with the second tank. comprising, after blocking the first tank and the second tank by the switching valve, the dicing apparatus being characterized in that and a drainage means for discharging the liquid which is accumulated in the second tank. 2. The apparatus according to claim 1, further comprising: a pressure-reducing auxiliary means for reducing the pressure of the first tank while the first tank and the second tank are shut off by the drainage means. Item 10. The dicing apparatus according to Item 1. 3. A pressure detecting means for detecting the pressure of the first tank is provided. When the pressure detecting means detects that the degree of vacuum of the first tank has dropped below a predetermined value, the pressure reducing auxiliary means is activated. Actuation
Dicing equipment.