JP3271137B2 - Organic solvent recovery device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention can easily control the cooling and heating temperatures in a condenser tank, can recover organic solvents safely, reasonably and efficiently, and can use a plurality of types of organic solvents having different boiling points and strong corrosiveness. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an organic solvent recovery apparatus capable of recovering an organic solvent, freezing water frozen in a condenser tank easily and quickly, and reducing the size and production cost of this type of apparatus.

[0002]

2. Description of the Related Art Most of chlorine-based organic solvents used for cleaning semiconductors and electronic equipment have a low boiling point and a high vapor pressure. . Since most of these organic solvents are toxic, they cause environmental pollution and adverse effects on the human body, and promote the consumption of the solvent. Therefore, these organic solvents have been conventionally recovered and reused.

[0003] For example, in Japanese Patent Application Laid-Open No. 7-100301, vapors of an object to be treated containing a plurality of organic solvents are collected and introduced into a plurality of serially connected cooling units having different cooling conditions. By collecting the condensate in the cooling section,
It recovers at once in many kinds of organic solvents.

However, in this conventional recovery apparatus, hot water and tap water having different temperatures are refluxed in each cooling section, and these are sequentially arranged from the upstream side of the organic solvent in descending order of cooling temperature. Requires cooling water supply equipment and cooling water temperature management for the cooling unit, which increases the size of the equipment, increases equipment costs and complicates temperature management, and obtains accurate temperature of each cooling unit. However, there is a problem in that the recovery accuracy is generally poor.

[0005]

DISCLOSURE OF THE INVENTION The present invention solves the above-mentioned problems, makes it easy to control the cooling and heating temperatures in the condenser tank, recovers the organic solvent safely, reasonably and efficiently, and has a different boiling point. In addition to being able to collect multiple types of organic solvents and highly corrosive organic solvents, water that has frozen in the condenser tank can be easily and quickly thawed,
In addition, it is an object of the present invention to provide an organic solvent recovery apparatus capable of reducing the size and the manufacturing cost of this type of apparatus.

[0006]

According to a first aspect of the present invention, there is provided a plurality of condenser tanks capable of condensing a vapor of an organic solvent contained therein by pressurizing and cooling the condenser, and providing these condenser tanks with an organic solvent. In an organic solvent recovery device arranged in series along a solvent vapor flow path, the plurality of condenser tanks are arranged in series along a refrigerant conduit constituting a refrigeration cycle, and the refrigerator is cooled when the condenser tank is cooled. Discharged refrigerant can be sequentially supplied to the upstream condenser tank from the most downstream condenser tank arranged in the vapor flow path, and the refrigerant conduit is piped inside and outside at least one of the condenser tanks, and the condenser The refrigerant discharged from the refrigerator when the tank is heated,
It is possible to sequentially supply the downstream side from the most upstream condenser tank disposed in the vapor flow path, it is easy to control the cooling and heating temperatures in the condenser tank, and it is possible to recover the organic solvent rationally and efficiently and have different boiling points. While being able to collect multiple types of organic solvents and highly corrosive organic solvents,
The icing of water in the condenser tank can be easily and quickly thawed, and the size of such a device can be reduced and the manufacturing cost can be reduced.

According to a second aspect of the present invention, the condenser tank disposed at the most upstream side of the vapor flow of the organic solvent is cooled only in the inside thereof.
By disposing a medium conduit, the cooling of the tank is eased, the freezing of water inside the tank is suppressed, the vapor of the organic solvent is moved to the condenser tank on the downstream side, and the recovery of the organic solvent is performed for a long time and precisely. To do it. According to a third aspect of the present invention, the refrigerant conduits arranged inside and outside the condenser tank are wound into a cylindrical coil shape, and the refrigerant conduits are arranged long and at a high density so that the cooling and heating of the condenser tank are efficiently performed. .

According to a fourth aspect of the present invention, the refrigerant conduit disposed outside the condenser tank is disposed in close contact with the outer peripheral surface of the tank so that cooling and heating from the outer peripheral surface of the tank can be efficiently performed. I have. According to a fifth aspect of the present invention, the refrigerant conduit disposed inside the condenser tank is formed of a corrosion-resistant member so that it can be used to recover highly corrosive organic chlorine-based solvent vapor or the like. According to a sixth aspect of the present invention, the refrigerant conduit disposed outside the condenser tank is made of a member having good heat conductivity, so that the condenser tank is efficiently cooled and heated.

According to a seventh aspect of the present invention, a recovery pipe is provided at a lower portion of each condenser tank, a plurality of recovery tanks capable of storing an organic solvent or drain water which can communicate with the pipes are provided, and a recovery valve is provided in the recovery pipe. The opening and closing timings of these recovery valves are made different from each other to prevent the situation where they flow into other condenser tanks when recovering the organic solvent or drain water, to reliably recover the organic solvent or drain water, and to perform the recovery operation. To prevent the decline. The invention according to claim 8 is characterized in that a collecting pipe is provided at a lower part of each condenser tank, a plurality of collecting tanks capable of containing an organic solvent or drain water which can communicate with the pipes are provided, and a collecting valve is provided in an introduction path of the tank. When recovering the organic solvent or drain water in each condenser tank, the recovery valve corresponding to the recovery tank can be opened, for example, during the daytime solvent recovery, only the liquefied organic solvent is recovered in the solvent recovery tank, When the condenser tank is heated, the thawed water is recovered in a drain water recovery tank, and the organic solvent and the water are separated and recovered.

According to a ninth aspect of the present invention, at least a take-out pipe is provided in the solvent recovery tank, an electromagnetic valve is provided in the pipe, and the electromagnetic valve can be opened only when the power of the organic solvent recovery apparatus is turned off.
At the time of recovery of the solvent, a situation in which the solvent ignites an electric spark is prevented beforehand, and the safety of the work is ensured. According to a tenth aspect of the present invention, the upper portions of the plurality of recovery tanks are communicated via a bypass pipe, and when the organic solvent or drain water is recovered, the recovery tanks are communicated with the respective condenser tanks via the bypass pipes. When recovering the solvent or drain water, the pressure is released to the condenser tank to prevent squirting or scattering of the solvent, etc., to ensure the safety of the work, and to prevent the loss of the squirting and scattered organic solvent. We are trying to use it.

[0011] The invention according to an eleventh aspect of the present invention is that, in the lower part of the plurality of collection tanks, an extraction pipe communicable with the collection container is provided, and a communication pipe communicable with each of the collection containers is provided, and one end of the communication pipe is connected. Can be communicated to the atmosphere side, and when collecting organic solvent or drain water, when they fall into the collection container, exhaust air or solvent vapor in the collection container pushed out by the organic solvent or drain water to the exhaust pipe through the communication pipe This prevents a situation in which air containing the solvent vapor is blown out to the worker, thereby ensuring the safety of the recovery operation.
The invention according to claim 12 is characterized in that the downstream end of the take-out pipe has an inner / outer double pipe structure, and both the inner and outer pipes communicate with the collection container, and one of the inner and outer pipes communicates with the communication pipe. ,
With a simple structure, the safety of the recovery operation of the organic solvent or the drain water is ensured, and the downstream end of the take-out pipe is simply and compactly piped to easily fix each pipe.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below. FIGS. 1 to 3 show principle diagrams of the present invention.
In FIG. 1, reference numeral 1 denotes an organic solvent vapor generation source such as a closed space or an open space, and one end of a suction conduit 3 communicating with a vacuum pump 2 serving as an air supply means is disposed at the generation source 1 and communicates with the pump 2. The discharge pipe 4 is connected to a lower part of the first condenser tank 5. In the figure, reference numeral 6 denotes a buffer tank inserted in the suction conduit 3 between the organic solvent vapor generation source 1 and the suction pump 2. In this case, an air compressor or a blower can be used instead of the vacuum pump 2 as the air supply means.

An upper end of the first condenser tank 5 is connected to one end of a communication pipe 7, and the other end of the pipe 7 is connected to a lower part of the second condenser tank 8. One end of a communication pipe 9 is connected to the upper end of the second condenser tank 8, and the other end of the pipe 9 is connected to the lower part of the third condenser tank 10. In the figure, reference numeral 11 denotes an exhaust pipe having one end connected to the upper end of the third condenser tank 10, the other end of which is open to the atmosphere via a pressure regulating valve 12.

The first, second, third condenser tanks 5,
A single refrigerant conduit 13 communicating with each other is wound in a coil shape and connected to each of the pipes 8 and 10, and both ends thereof are connected to the refrigerator 1.
4 is connected.

In the case of the embodiment, the refrigerator 14 is a heat pump type air conditioner utilizing a heat pump type refrigerating cycle, and discharges refrigerant from the third condenser tank 10 through the second condenser tank 8 during the cooling operation. In the heating operation, the refrigerant discharged from the first condenser tank 5 can be supplied to the third condenser tank 10 via the second condenser tank 8 during the heating operation.

Of these, the second and third condenser tanks 8,
Reference numerals 10 are substantially the same, and coil-shaped inner and outer refrigerant conduits 13a and 13b communicating with each other are provided inside and outside thereof. That is, the second and third condenser tanks 8,
10 inner and outer refrigerant conduits 13a, 13b have inner and outer diameters,
The coil diameter, coil pitch, and number of turns are configured in the same manner.

Also, the first condenser tank 5 is
The condenser tanks 8 and 10 are formed in the same shape, and a coil-shaped inner refrigerant conduit 13c is provided inside the condenser tanks 8 and 10.
Both ends of 3c communicate with the refrigerant conduit 13, and the outer refrigerant conduit 13b as described above is not piped. The inner and outer diameters, the coil diameter, the coil pitch, and the number of turns of the inner refrigerant conduit 13c are substantially the same as those of the inner refrigerant conduit 13a.

These inner refrigerant pipes 13a and 13c are formed by winding a corrosion-resistant metal pipe such as a stainless steel pipe into a cylindrical coil shape, and this is disposed inside each of the condenser tanks 5, 8, and 10 as shown in FIG. are doing. Of these, the second
In the three condenser tanks 8 and 10, the upper end of the inner refrigerant conduit 13a communicates with the outer refrigerant conduit 13 and the lower end communicates with the outer refrigerant conduit 13b.

The outer refrigerant conduit 13b is formed by winding a metal tube having good thermal conductivity, such as a copper tube, into a cylindrical coil shape, which is closely attached to the outer peripheral surfaces of the condenser tanks 8, 10 as shown in FIG. And the upper end thereof communicates with the outer refrigerant conduit 13 and the lower end communicates with the inner refrigerant conduit 13a. In the figure, reference numeral 15 denotes a heat insulating member provided on the outer peripheral surface of each of the condenser tanks 5, 8, and 10.

First, second, third condenser tanks 5, 8, 1
The collection pipes 16, 17, and 18 are connected to the lower end of 0,
Their tips are connected to a single communication tube 19.
The collection pipes 16, 17, and 18 have first and second solenoid valves.
2, 3 recovery valves 20, 21, 22 are interposed intermittently when the organic solvent is recovered, their opening and closing timings are set to be shifted from each other, and each of the condenser tanks 5, 8, 10 is set. The valve can be opened when the ice melts.

Dividing pipes 23 and 24 are connected to the communication pipe 19, and their distal ends are connected to a drain recovery tank 25 and a solvent recovery tank 26. The diverter 23,
The recovery valves 27 and 28, which are electromagnetic valves, are interposed in 24,
The recovery valve 27 is opened during the heating operation of the refrigerator 14, and the recovery valve 28 is opened during the cooling operation of the refrigerator 14.

In the organic solvent recovery apparatus thus configured, coiled refrigerant conduits 13a, 13c similarly manufactured are arranged inside the condenser tanks 5, 8, 10 as cooling means, and the inner refrigerant is cooled. Conduits 13a, 13c
The inner and outer diameters, the coil diameter, the coil pitch, and the number of turns are similarly configured.

Also, the second and third condenser tanks 8, 10
A coil-shaped refrigerant conduit 13b manufactured in the same manner is arranged on the outside, and the inner and outer diameters, the coil diameter, the coil pitch, and the number of turns of the outer refrigerant conduit 13b are similarly configured.

The second and third condenser tanks 8, 1
0, the respective conduits 13a, 13b may be connected in series, and in the first condenser tank 5, the inner refrigerant conduit 13c may be connected in series to the refrigerant conduit 13 between the first and second condenser tanks 5, 8. Since no special cooling equipment is required for each of the condenser tanks 5, 8, and 10, the production can be rationalized and facilitated, and the production cost can be reduced.

Next, when recovering the organic solvent using the apparatus of the present invention, the refrigerator 14 is first cooled and the discharged refrigerant is discharged to the refrigerant conduit 13 and the inner and outer refrigerant conduits 1 as shown by arrows in FIG.
3a and 13b to cool the first, second and third condenser tanks 5, 8, and 10.

In this case, the inside of the first condenser tank 5 is cooled by the inside refrigerant conduit 13c.
3 The condenser tanks 8 and 10 are provided with inner and outer refrigerant conduits 13.
Since the inside and outside are cooled by the a and 13b, and the outside peripheral surface is cooled by the outside refrigerant conduit 13b having good heat conduction, the tanks 8 and 10 are quickly cooled.

Under such circumstances, the vacuum pump 2 is driven, for example, in the daytime, and the vapor of the organic solvent diffused to the organic solvent vapor generation source 1 is sucked from the suction conduit 3 and is discharged to the discharge pipe 4.
To the first condenser tank 5 via the

The above-mentioned steam is supplied from the first condenser tank 5
Guided by the communication pipe 7 and moved to the second condenser tank 8,
It is guided from the tank 8 to the communication pipe 9 and moves to the third condenser tank 10. In this case, the inner refrigerant conduit 13a comes into contact with the vapor of the organic solvent. However, since the conduit 13a has corrosion resistance, there is no need to worry about corrosion, and the conduit 13a can be used to recover a highly corrosive organic chlorine-based solvent or the like.

The above-mentioned steam is gradually cooled in each of the tanks 5, 8 and 10, and is compressed and liquefied. That is, the vapor is efficiently and quickly liquefied by the synergistic effect of the pressure in each of the tanks 5, 8, and 10 and the cooling by the refrigerant, and this is stored in each of the tanks 5, 8, and 10.

At this time, the discharged refrigerant moves from the third condenser tank 10 to the second condenser tank 8 and then to the first condenser tank 5 to exchange heat, and the refrigerant temperature gradually increases toward the first condenser tank 5 side. To rise.

On the other hand, the vapor of the organic solvent introduced into each of the tanks 5, 8, and 10 releases heat during the introduction process, and the vapor temperature gradually decreases toward the downstream side, that is, toward the third condenser tank 10 side. I do.

Therefore, the organic solvent is first recovered in the first condenser tank 5, then recovered in the second condenser tank 8 cooled more than the tank 5, and further recovered in the third condenser tank cooled more than the tank 8. It is collected at 10 and is surely collected.

In this case, the first condenser tank 5 retains the required recovery capacity of the organic solvent, while the inner refrigerant conduit 1
3c is located downstream of the refrigerant conduit 13, the cooling capacity of the refrigerant is reduced, the icing of water in the tank 5 is suppressed, and instead, the movement of the vapor of the organic solvent is promoted. And the recovery of this kind of organic solvent can be carried out precisely over time.

On the other hand, during the operation of the vacuum pump 2, that is, during the recovery of the organic solvent, the first, second, and third recovery valves 20, 21, 22
Open intermittently and with a mutually shifted timing to guide the organic solvent stored in each of the condenser tanks 5, 8, and 10 to the communication pipe 19, and the collected solvent and the solvent vapor in the condenser tank become This prevents a situation in which the fluid flows into another condenser tank and disrupts the recovery operation. In this case, the recovery valve 28 is always open during the solvent recovery operation, and stores the organic solvent in the solvent recovery tank 26.

After completion of the recovery operation of the organic solvent,
The operation of the vacuum pump 2 is stopped, the recovery valve 28 is closed, and the cooling operation of the refrigerator 14 is stopped. Then, for example, the refrigerator 14 is heated at night, and the high-temperature discharged refrigerant is sent to the refrigerant conduit 13 and the inner and outer refrigerant conduits 13a, 13b, 13c as shown by arrows in FIG.
With the recovery valves 20, 21, 22 remaining open, the recovery valve 27
Is opened.

In this manner, the inside and outside of each of the condenser tanks 5, 8, and 10 are heated by the refrigerant, and the water frozen on the inner surface and the inside and outside of the refrigerant conduits 13a and 13b is thawed, and this is collected by the respective recovery valves 20 and 21 and 22 and is led from the communication pipe 19 to the branch pipe 23,
From the drain recovery tank 25.

In this case, the discharged refrigerant flows from the first condenser tank 5 on the upstream side to the second and third condenser tanks 8 and 10.
In order to exchange heat, the first condenser tank 5 having the largest amount of freezing is promoted to thaw and dry, and then the frozen water in the second and third condenser tanks 8 and 10 is thawed.

FIGS. 4 and 5 show application examples of the present invention.
The same reference numerals are used for portions corresponding to the configuration of the above-described embodiment. In this embodiment, a plurality of suction conduits 3 are arranged in the organic solvent vapor generation source 1 so that vapor of the organic solvent from each generation source 1 can be introduced, and a plurality of vacuum pumps 2 are provided in preparation for an increase in the amount of vapor to be suctioned. Has been installed. Further, the first condenser tank 5 has only the piping of the inner refrigerant conduit 13a,
As described above, the freezing of the water in the tank 5 is suppressed.

In this embodiment, discharge pipes 29 and 30 are connected to the drain recovery tank 25 and the solvent recovery tank 26, and the distal ends of the pipes 29 and 30 are connected to the respective recovery vessels 31 and 32.
So that the drain water and the organic solvent in the tanks 25 and 26 can be taken out to the containers 31 and 32.

Of these, a solenoid valve 33 and a manually operated opening / closing valve 34 such as a ball valve are inserted into the take-out pipe 29, and the take-out pipe 3 is inserted.
The solenoid valve 35 having the solenoid valve 35 and an on-off valve 36 similar to that described above interposed at 0 is closed when the power of the solvent recovery device is turned on, and can be opened when the power of the solvent recovery device is turned off. The operation of recovering the solvent in the solvent recovery tank 26 by the on-off valve 36 is enabled only when the power is turned off. Therefore, it is possible to prevent the ignition of the organic solvent by the electric spark at the time of the solvent recovery, and to ensure the safety of the operation.

The drain recovery tank 25 and the solvent recovery tank 26 communicate with each other via a bypass pipe 37 disposed above them. Therefore, the tanks 25, 2
When recovering the drain water or the organic solvent in 6, the pressure of the drain water or the organic solvent is changed from the bypass pipe 37 to the branch pipe 23,
24, and is led to the communication pipe 19, from which the recovery pipe 1
After being absorbed through the first to third condenser tanks 5, 8, and 10 under substantially atmospheric pressure through the air passages 6, 17, and 18, their ejection and scattering are prevented beforehand, and the safety of the work is secured.

Extraction tube 2 connected to collection containers 31 and 32
The downstream end of 9, 30 has an inner / outer double tube structure,
Both of the inner and outer tubes are communicated with the collection containers 31 and 32, and one of the inner and outer tubes is communicated with the communication tube 38. In this embodiment, as shown in FIG. 5, the inner pipe is constituted by the extraction pipes 29 and 30, and the outer pipe is constituted by the communication pipe 38 and each upstream end of a branch pipe described later.

That is, on the collection container 31 side, the extraction pipe 29
And the upstream and downstream ends of the communication pipe 38 are formed into an inner / outer double pipe structure. On the recovery container 32 side, the downstream and downstream ends of the discharge pipe 30 and the branch pipe 39 are connected. To form an inner / outer double tube structure. By configuring the inner and outer pipes in this manner, pipes can be simply and compactly formed, and each pipe can be easily fixed as compared with a case where the inner and outer pipes are individually piped.

The downstream end of the communication pipe 38 is connected to the exhaust pipe 11, an opening / closing valve 40 similar to the above-mentioned opening / closing valve 34 is inserted into the pipe 38, and the downstream end of the branch pipe 39. The part is connected to the communication pipe 38.

When the organic solvent or the drain water is collected, when they fall into the collection containers 31 and 32, the air or the solvent vapor in the collection containers 31 and 32 is pushed out, and this is sent to the communication pipe 38 and the branch pipe 39. Guided exhaust pipe 11
It is released to the atmosphere. Therefore, during the collection operation,
Prevents air containing solvent vapor from gushing out to workers,
Ensure the safety of the above work.

[0046]

As described above, according to the first aspect of the present invention, the plurality of condenser tanks are arranged in series along the refrigerant conduit constituting the refrigeration cycle, and the refrigerant discharged from the refrigerator during cooling of the condenser tanks. The refrigerant can be supplied sequentially from the most downstream condenser tank disposed in the vapor flow path to the upstream condenser tank, and the refrigerant conduit is piped inside and outside at least one of the condenser tanks to heat the condenser tank. In this case, the refrigerant discharged from the refrigerator at the time can be sequentially supplied to the downstream side from the most upstream condenser tank disposed in the vapor flow path, so that the cooling and heating temperatures in the condenser tank can be easily controlled. Organic solvent can be recovered rationally and efficiently, and it can be used to recover multiple types of organic solvents with different boiling points or highly corrosive organic solvents. There is that effect. In addition, by the switching operation of the refrigerator, the freezing of water in the condenser tank can be easily and quickly thawed, and the refrigerant conduit is piped in and out of at least one condenser tank, so that the cooling efficiency is improved as compared with the conventional one. Accordingly, the size of the tank can be reduced, so that this type of apparatus can be reduced in size and manufacturing costs can be reduced.

According to a second aspect of the present invention, the condenser tank disposed on the most upstream side of the vapor flow of the organic solvent is cooled only inside the condenser tank.
Since the medium conduit is arranged, the cooling of the tank is eased, the freezing of water inside the tank is suppressed, the movement of the vapor of the organic solvent to the condenser tank on the downstream side is promoted, and the recovery of the organic solvent is performed for a long time and precisely. Can be performed. According to the third aspect of the invention, since the refrigerant conduits arranged inside and outside the condenser tank are wound into a cylindrical coil shape, the refrigerant conduits are arranged longer and at a higher density than those arranged in a straight tube, so that the condenser tank has Cooling and heating can be performed efficiently.

According to the fourth aspect of the present invention, since the refrigerant conduit disposed outside the condenser tank is disposed in close contact with the outer peripheral surface of the tank, cooling and heating from the outer peripheral surface of the tank can be efficiently performed. . According to the invention of claim 5, since the refrigerant conduit arranged inside the condenser tank is formed of a corrosion-resistant member, there is an effect that it is possible to respond to the recovery of highly corrosive organic chlorine-based solvent vapor or the like. According to the sixth aspect of the invention, since the refrigerant conduit disposed outside the condenser tank is formed of a member having good heat conductivity, the condenser tank can be efficiently cooled and heated.

According to a seventh aspect of the present invention, a collecting pipe is provided at a lower portion of each condenser tank, a plurality of collecting tanks capable of containing an organic solvent or drain water which can communicate with the pipes are provided, and a collecting valve is provided in the collecting pipe. Since the opening and closing times of these recovery valves are different from each other, it is possible to prevent the situation where they flow into other condenser tanks when recovering the organic solvent or drain water,
It is possible to reliably recover the organic solvent or the drain water, and prevent a reduction in the recovery action. According to the invention of claim 8, a collection pipe is provided at a lower portion of each condenser tank, a plurality of collection tanks capable of containing an organic solvent or drain water that can communicate with the pipes are provided, and a collection valve is provided in an introduction path of the tank. , When collecting organic solvent or drain water in each condenser tank,
Since the recovery valve corresponding to the recovery tank can be opened, for example, during the daytime solvent recovery, only the liquefied organic solvent is recovered in the solvent recovery tank, and when the condenser tank is heated at night or the like, only the thawed water is recovered. Can be collected in a drain water recovery tank to separate and collect the organic solvent and water.

According to a ninth aspect of the present invention, at least a take-out pipe is provided in the solvent recovery tank, an electromagnetic valve is provided in the pipe, and the electromagnetic valve can be opened only when the power of the organic solvent recovery apparatus is turned off. A situation in which the solvent ignites the electric spark at the time of recovery can be prevented beforehand, and the safety of the operation can be ensured. According to the invention of claim 10, since the upper portions of the plurality of recovery tanks are communicated via a bypass pipe, and when the organic solvent or drain water is recovered, the recovery tanks are communicated with the respective condenser tanks via the bypass pipes. When recovering organic solvent and drain water, the pressure is released to the condenser tank to prevent ejection and scattering of the solvent, etc., and to ensure the safety of the work, and to prevent loss of the ejected and scattering organic solvent. Effective utilization can be achieved.

According to the eleventh aspect of the present invention, a take-out pipe communicable with a collection container is provided below the plurality of collection tanks, a communication pipe communicable with each of the collection vessels is provided, and one end of the communication pipe is connected to the collection pipe. Since it is possible to communicate with the atmosphere side, when collecting organic solvent or drain water, when they fall into the collection container, air or solvent vapor in the collection container pushed out by the organic solvent or drain water to the exhaust pipe through the communication pipe It is possible to prevent the situation in which the air containing the solvent vapor is blown out to the worker by discharging the solvent, and the safety of the collecting operation can be ensured. The invention according to claim 12 is characterized in that the downstream end of the take-out pipe has an inner / outer double pipe structure, and both the inner and outer pipes communicate with the collection container, and one of the inner and outer pipes communicates with the communication pipe. Therefore, the safety of the recovery operation of the organic solvent or the drain water can be ensured with a simple structure, and the downstream end of the discharge pipe can be simply and compactly piped to easily fix each pipe.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing the principle of an embodiment of the present invention, and shows a state when a condenser tank is pressurized and cooled.

FIG. 2 is an enlarged sectional view showing a capacitor tank applied to the present invention.

FIG. 3 is an explanatory view showing the principle of the embodiment of the present invention, and shows a state of dissolving water frozen in the condenser tank by heating the condenser tank.

FIG. 4 is an explanatory view showing an application example of the present invention, and shows a situation at the time of pressurized cooling of a condenser tank.

FIG. 5 is an enlarged explanatory view showing a main part of the application example, showing a state of an inner / outer double pipe structure at a downstream end of each extraction pipe.

[Explanation of symbols]

 5 First condenser tank 8 Second condenser tank 10 Third condenser tank 11 Exhaust pipe 12 Pressure regulator 13 Refrigerant conduit 13a, 13c Inner refrigerant conduit 13b Outer refrigerant conduit 14 Heat pump air conditioner 16, 17, 18 Recovery pipe 20 First recovery Valve 21 Second recovery valve 22 Third recovery valve 25 Drain water recovery tank 26 Solvent recovery tank 29, 30 Extraction pipe 33, 35 Solenoid valve 34, 36 Open / close valve  37 Bypass pipe 38 Communication pipe 31,32 Collection container

──────────────────────────────────────────────────続 き Continuing on the front page (72) Keiji Hirako, Inventor 237-2 Sayamagahara, Iruma-shi, Saitama G-Science, Inc. Musashi Factory (72) Inventor, Katsutoshi Kamei 4-, Tomuro, Atsugi-shi, Kanagawa 3-10 (72) Inventor Shigeaki Nakajima 36-21 Udagawa-cho, Shibuya-ku, Tokyo No.501 No.2 Shibuya Part 2 Building Daiwa Giken Kogyo Co., Ltd. (56) References JP-A-9-117603 (JP, A JP-A-57-19001 (JP, A) JP-A-56-102905 (JP, A) JP-T-56-500838 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) B01D 5/00

Claims (12)

(57) [Claims] 1. A plurality of condenser tanks capable of compressing and condensing the vapor of an organic solvent contained therein under pressure and cooling,
In an organic solvent recovery device in which these condenser tanks are arranged in series along the vapor path of the organic solvent, the plurality of condenser tanks are arranged in series along a refrigerant conduit constituting a refrigeration cycle, and Refrigerant discharged from the refrigerator at the time of cooling can be sequentially supplied to the upstream condenser tank from the most downstream condenser tank disposed in the vapor flow path, and the refrigerant conduit is provided inside and outside at least one of the condenser tanks. Wherein the refrigerant discharged from the refrigerator at the time of heating the condenser tank can be sequentially supplied to the downstream side from the most upstream condenser tank disposed in the vapor flow path. . 2. A condenser tank disposed on the most upstream side of the steam flow of the organic solvent, the recovery device of the organic solvent therein only according to claim 1, wherein placing the refrigerant conduits. 3. The organic solvent recovery device according to claim 1, wherein the refrigerant conduit disposed inside and outside the condenser tank is wound into a cylindrical coil shape. 4. A refrigerant conduit disposed outside a condenser tank is disposed in close contact with an outer peripheral surface of the tank.
An apparatus for recovering an organic solvent according to the above. 5. The organic solvent recovery device according to claim 1, wherein the refrigerant conduit disposed inside the condenser tank is formed of a corrosion-resistant member. 6. The organic solvent recovery device according to claim 1, wherein the refrigerant conduit disposed outside the condenser tank is made of a member having good heat conductivity. 7. A collecting pipe is provided at a lower part of each condenser tank, a plurality of collecting tanks capable of storing an organic solvent or drain water which can communicate with the pipes are provided, and a collecting valve is provided in the collecting pipe. The organic solvent recovery device according to claim 1, wherein the opening and closing times of the organic solvent are different from each other. 8. A collecting pipe is provided at a lower part of each condenser tank, a plurality of collecting tanks capable of containing an organic solvent or drain water which can communicate with the pipes are provided, and a collecting valve is provided in an introduction path of the tank. The organic solvent recovery device according to claim 1, wherein a recovery valve corresponding to the recovery tank can be opened when recovering the organic solvent or the drain water in the condenser tank. 9. The organic solvent according to claim 7, wherein at least an extraction pipe is provided in the solvent recovery tank, and an electromagnetic valve is provided in the pipe, and the electromagnetic valve can be opened only when the power of the organic solvent recovery apparatus is turned off. Recovery equipment. 10. An upper part of the plurality of recovery tanks is communicated via a bypass pipe, and when recovering an organic solvent or drain water, the recovery tank can be communicated with each condenser tank via the bypass pipe. The organic solvent recovery device according to claim 7 or claim 8. 11. An extraction pipe that can communicate with a collection container below the plurality of collection tanks, and a communication pipe that can communicate with each of the collection vessels, and one end of the communication pipe can communicate with the atmosphere. 11. The organic solvent recovery device according to claim 7, wherein the organic solvent is collected. 12. The downstream end of the take-out pipe has an inner / outer double pipe structure, and both the inner and outer pipes communicate with the collection container,
The organic solvent recovery device according to claim 11, wherein one of the inner and outer tubes is communicated with the communication tube.