JP3265913B2 - Vibrating gyro - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrating gyroscope, and more particularly, to a navigation system for detecting a position of a moving body by detecting a rotational angular velocity and providing appropriate guidance, or detecting an external vibration. The present invention relates to a vibration gyro that can be applied to a vibration isolation system such as a camera shake prevention device that performs appropriate vibration suppression.

[0002]

2. Description of the Related Art Conventionally, many vibrating gyroscopes of this type using a column-shaped vibrating bar vibrator made of a Ni alloy or the like have been put into practical use. However, such a vibration gyro is
Since an expensive metal material such as a Ni alloy is used for the vibrator, there is a problem that the cost is high and a detected signal is easily affected by a magnetic field.

[0003] In order to solve these problems,
The present applicant has proposed a vibrating gyroscope 41 shown in FIGS. 10 and 11, as shown in Japanese Patent Application No. 6-145527 already filed.

The vibrating gyroscope 41 includes, for example, a regular quadrangular prism-shaped vibrator 43. The vibrator 43 is formed by laminating a substantially rectangular first piezoelectric substrate 45a and a second piezoelectric substrate 45b. The first piezoelectric substrate 45a and the second piezoelectric substrate 45b are polarized in opposite thickness directions, as indicated by an arrow P in FIG. The main surface of the first piezoelectric substrate 45a is spaced apart in the width direction by two.
Two divided electrodes 47a and 47b are formed, and a common electrode 49 is formed on the main surface of the second piezoelectric substrate 45b. Further, a dummy electrode 51 is formed between the first piezoelectric substrate 45a and the second piezoelectric substrate 45b.

[0005] The two divided electrodes 47a, 47 of the vibrator 43
b, one output terminal of the oscillation circuit 61 is connected to the resistors 63a and 63b.
3b. The other output terminal of the oscillation circuit 61 is connected to the common electrode 49 of the vibrator 43. Further, the two divided electrodes 47a and 47b of the vibrator 43 are connected to two input terminals of the differential amplifier circuit 67 via the resistors 65a and 65b, respectively. Further, a resistor 65c is connected between the output terminal and one input terminal of the differential amplifier circuit 67.

In this vibrator 43, the first piezoelectric substrate 4
5a and the second piezoelectric substrate 45b are polarized in opposite thickness directions, so that the two polarized electrodes 47a and 47b
b and the common electrode 49, a driving signal such as a sine wave signal output from the oscillation circuit 61 is connected to the resistors 63a and 63b.
, The first piezoelectric substrate 45a and the second piezoelectric substrate 45b vibrate in opposite directions. In this case, when the first piezoelectric substrate 45a extends in the longitudinal direction, the second piezoelectric substrate 45b contracts in the longitudinal direction. Conversely, when the first piezoelectric substrate 45a is contracted in the longitudinal direction, the second piezoelectric substrate 45b is extended in the longitudinal direction. Therefore, as shown in FIG. 12, the vibrator 43 bends and vibrates in a direction perpendicular to the main surface thereof.

In this state, when the vibrating gyroscope 41 rotates about the central axis O of the vibrator 43 shown in FIG. 11, a Coriolis force corresponding to the rotational angular velocity is applied to the first piezoelectric substrate 4.
It works in a direction parallel to the main surfaces of 5 a and the second piezoelectric substrate 45 b and perpendicular to the central axis O of the vibrator 43. Therefore, the direction of the bending vibration of the vibrator 43 changes, and a signal corresponding to the rotational angular velocity is generated between the two polarization electrodes 47a and 47b. And two polarization electrodes 47a, 47b
The signal generated between them is detected by the differential amplifier circuit 67 via the resistors 65a and 65b. Therefore, in the vibration gyro 41, the rotational angular velocity can be known from the output signal of the differential amplifier circuit 67.

In such a vibrating gyroscope 41, since a relatively inexpensive piezoelectric substrate is used for the vibrator without using an expensive metal material such as a Ni alloy, the cost can be reduced.
The detected signal is hardly affected by the magnetic field.

[0009]

By the way, in such a vibrating gyroscope 41, the vibrator 43 composed of the first piezoelectric substrate 45a and the second piezoelectric substrate 45b is flexibly vibrated in a direction orthogonal to the main surface thereof. However, the present invention improves the impedance of the vibrator by bending and vibrating the vibrator in the width direction.

[0010] Therefore, a main object of the present invention is to provide a vibrating gyroscope that can reduce power consumption without lowering sensitivity by improving the impedance of the vibrator.

[0011]

[Means for Solving the Problems]

(1) A vibrating gyroscope according to the present invention has a substantially rectangular strip-shaped first piezoelectric substrate that is polarized in the thickness direction, and is laminated on the first piezoelectric substrate, and has a reverse polarization direction of the first piezoelectric substrate. A substantially rectangular second piezoelectric substrate polarized in the direction, two divided electrodes formed on the main surface of the first piezoelectric substrate, and a common electrode formed on the main surface of the second piezoelectric substrate. An electrode, a driving unit for applying a driving signal between the two divided electrodes, and a detecting unit for detecting a signal generated between at least one of the two divided electrodes and the common electrode. Features.

(2) Another vibrating gyroscope according to the present invention is a substantially rectangular strip-shaped first piezoelectric substrate which is polarized in a thickness direction, and is laminated on the first piezoelectric substrate. A substantially strip-shaped second piezoelectric substrate polarized in a direction opposite to the polarization direction of the first piezoelectric substrate, two first divided electrodes formed on the main surface of the first piezoelectric substrate, and a second piezoelectric substrate , Two first divided electrodes, one first divided electrode and one second divided electrode, and the other first divided electrode and the other second divided electrode. Driving means for applying a driving signal therebetween, and detecting means for detecting a signal generated between at least one of the two first divided electrodes and at least one of the two second divided electrodes. It is characterized by including.

(3) Still another vibrating gyroscope according to the present invention is a substantially rectangular strip-shaped first piezoelectric substrate which is polarized in the thickness direction, and is laminated on the first piezoelectric substrate. A substantially strip-shaped second piezoelectric substrate polarized in a direction opposite to the polarization direction of the substrate, and a first piezoelectric substrate formed on a main surface of the first piezoelectric substrate.
A common electrode, a second common electrode formed on the main surface of the second piezoelectric substrate, two divided electrodes formed between the first piezoelectric substrate and the second piezoelectric substrate, It is characterized by including driving means for applying a driving signal between the two divided electrodes, and detecting means for detecting a signal generated between the first common electrode and the second common electrode.

(4) Still another vibrating gyroscope according to the present invention is a substantially rectangular strip-shaped first piezoelectric substrate polarized in the thickness direction, and the first piezoelectric substrate is laminated on the first piezoelectric substrate. A substantially strip-shaped second piezoelectric substrate polarized in a direction opposite to the polarization direction of the substrate, two first split electrodes formed on a main surface of the first piezoelectric substrate, and a second piezoelectric member Two second divided electrodes formed on the main surface of the substrate, two third divided electrodes formed between the first piezoelectric substrate and the second piezoelectric substrate, and one of the first divided electrodes A drive signal is applied between the electrode, one second divided electrode and one third divided electrode, and the other first divided electrode, the other second divided electrode, and the other third divided electrode. For driving, at least one of the two first divided electrodes, and at least the two second divided electrodes. Characterized in that it comprises a detection means for detecting a signal generated between one.

(5) Still another vibrating gyroscope according to the present invention is a substantially rectangular strip-shaped first piezoelectric substrate polarized in the thickness direction, and the first piezoelectric substrate is laminated on the first piezoelectric substrate. A substantially strip-shaped second piezoelectric substrate polarized in the same direction as the polarization direction of the substrate, two divided electrodes formed on the main surface of the first piezoelectric substrate, and a main electrode of the second piezoelectric substrate. A first common electrode formed on the surface, a second common electrode formed between the first piezoelectric substrate and the second piezoelectric substrate, and a drive signal applied between the two divided electrodes. It is characterized by including driving means, at least one of the two divided electrodes and the first common electrode, and detection means for detecting a signal generated between the second common electrode and the second common electrode.

(6) Still another vibrating gyroscope according to the present invention is a substantially rectangular strip-shaped first piezoelectric substrate that is polarized in the thickness direction, and is laminated on the first piezoelectric substrate. A substantially rectangular second piezoelectric substrate polarized in the same direction as the polarization direction of the substrate, two first divided electrodes formed on a main surface of the first piezoelectric substrate, and a second piezoelectric member Two second split electrodes formed on the main surface of the substrate, a common electrode formed between the first piezoelectric substrate and the second piezoelectric substrate, one first split electrode and one first split electrode Two split electrodes and the other first
Driving means for applying a drive signal between the first divided electrode and the other second divided electrode, at least one of the two first divided electrodes and the two second divided electrodes, and the common electrode. Detecting means for detecting a signal generated therebetween.

[0017]

[Action]

(1) According to the vibrating gyroscope according to the present invention, the driving signal is applied between the two divided electrodes by the driving means.
By this drive signal, the first piezoelectric substrate and the second piezoelectric substrate cause the half on the side where one split electrode is arranged and the half on the side where the other split electrode is arranged to be opposite to each other. Vibrate. In this case, when one half of the side on which one divided electrode is arranged extends in the longitudinal direction, the half on the side on which the other divided electrode is arranged contracts in the longitudinal direction. Conversely, when the half on the side on which one of the divided electrodes is arranged is contracted in the longitudinal direction, the half on the side on which the other divided electrode is arranged extends in the longitudinal direction. Therefore, the first piezoelectric substrate and the second piezoelectric substrate flex and vibrate in the width direction. If the vibrating gyroscope is rotated in this state, a signal corresponding to the angular velocity of rotation is generated between each divided electrode and the common electrode. This signal is detected by the detecting means.

(2) According to another vibrating gyroscope according to the present invention, the driving means causes one of the first divided electrode and the one of the second divided electrode, and the other of the first divided electrode and the other of the first divided electrode. A drive signal is applied between the two divided electrodes. By this drive signal, the first piezoelectric substrate and the second piezoelectric substrate are separated from the half on the side where one of the first divided electrodes and the one second divided electrode are disposed, and the other of the first divided substrate. The electrode and the other half of the side on which the second split electrode is arranged vibrate in opposite directions. In this case, one of the first
When the half of the side on which the second divided electrode and one of the second divided electrodes are arranged extends in the longitudinal direction, the half of the side on which the other first divided electrode and the other second divided electrode are arranged is arranged. Half shrinks in its longitudinal direction. Conversely, one of the first
When the half of the side where the second divided electrode and one of the second divided electrodes are arranged is contracted in the longitudinal direction, the other half of the divided electrode on the side where the first divided electrode and the other second divided electrode are arranged is arranged. One half extends in its longitudinal direction. Therefore, the first
The piezoelectric substrate and the second piezoelectric substrate vibrate flexibly in the width direction. If the vibrating gyroscope is rotated in this state, a signal corresponding to the rotational angular velocity is generated between each first divided electrode and each second divided electrode. This signal is detected by the detecting means.

(3) According to still another vibrating gyroscope according to the present invention, the driving signal is applied between the two divided electrodes by the driving means. By this drive signal, the first piezoelectric substrate and the second piezoelectric substrate cause the half on the side where one split electrode is arranged and the half on the side where the other split electrode is arranged to be opposite to each other. Vibrate. In this case, when one half of the side on which one divided electrode is arranged extends in the longitudinal direction, the half on the side on which the other divided electrode is arranged contracts in the longitudinal direction. Conversely, when the half on the side on which one of the divided electrodes is arranged is contracted in the longitudinal direction, the half on the side on which the other divided electrode is arranged extends in the longitudinal direction. Therefore, the first piezoelectric substrate and the second
Of the piezoelectric substrate vibrates flexibly in the width direction. If the vibrating gyroscope is rotated in this state, the first common electrode and the second
A signal corresponding to the rotational angular velocity is generated between the common electrodes. This signal is detected by the detecting means.

(4) According to still another vibrating gyroscope according to the present invention, the driving means causes the one first divided electrode, the one second divided electrode, the one third divided electrode, and the other A drive signal is applied between the first divided electrode, the other second divided electrode, and the other third divided electrode. By the drive signal, the first piezoelectric substrate and the second piezoelectric substrate are separated from each other by a half of the side on which one of the first divided electrodes, one of the second divided electrodes, and one of the third divided electrodes are arranged. And the other half of the side where the other first divided electrode, the other second divided electrode, and the other third divided electrode are arranged vibrate in opposite directions. In this case, when one half of the side on which one of the first divided electrodes, one of the second divided electrodes, and one of the third divided electrodes are arranged extends in the longitudinal direction, the other first divided electrode is formed. The half on the side where the electrode and the other second divided electrode and the other third divided electrode are arranged contracts in the longitudinal direction. vice versa,
When one half of the side on which one of the first divided electrodes, one of the second divided electrodes, and one of the third divided electrodes are shrunk in the longitudinal direction, the other first divided electrode and the other are divided. The half on the side on which the second divided electrode and the other third divided electrode are arranged extends in the longitudinal direction. Therefore, the first piezoelectric substrate and the second piezoelectric substrate flex and vibrate in the width direction. If the vibrating gyroscope is rotated in this state, a signal corresponding to the rotational angular velocity is generated between each first divided electrode and each second divided electrode. This signal is detected by the detecting means.

(5) According to still another vibrating gyroscope according to the present invention, a driving signal is applied between two divided electrodes by the driving means. By this drive signal, the first piezoelectric substrate and the second piezoelectric substrate cause the half on the side where one split electrode is arranged and the half on the side where the other split electrode is arranged to be opposite to each other. Vibrate. In this case, when one half of the side on which one divided electrode is arranged extends in the longitudinal direction, the half on the side on which the other divided electrode is arranged contracts in the longitudinal direction. Conversely, when the half on the side on which one of the divided electrodes is arranged is contracted in the longitudinal direction, the half on the side on which the other divided electrode is arranged extends in the longitudinal direction. Therefore, the first piezoelectric substrate and the second
Of the piezoelectric substrate vibrates flexibly in the width direction. By rotating the vibrating gyroscope in this state, each divided electrode or the first
A signal corresponding to the rotational angular velocity is generated between the common electrode and the second common electrode. This signal is detected by the detecting means.

(6) According to still another vibrating gyroscope according to the present invention, the driving means causes one of the first divided electrodes and the one of the second divided electrodes, and the other of the first divided electrodes and the other of the divided electrodes. A drive signal is applied between the second divided electrode. Due to this drive signal, the first piezoelectric substrate and the second piezoelectric substrate are separated from the half on the side where one of the first divided electrodes and the other second divided electrode are disposed, and the other of the first divided substrate. The electrode and the half on the side where the second split electrode is arranged vibrate in opposite directions. In this case, when the half on the side on which one of the first divided electrodes and the other second divided electrode are arranged extends in the longitudinal direction, the other first divided electrode and the one second divided electrode are extended. The half on the side where the electrodes are arranged contracts in its longitudinal direction. Conversely, when the half on the side on which one first split electrode and the other second split electrode are arranged is contracted in its longitudinal direction, the other first split electrode and one second split electrode The half of the side on which the electrodes are arranged extends in its longitudinal direction. for that reason,
The first piezoelectric substrate and the second piezoelectric substrate flex and vibrate in the width direction. If the vibrating gyroscope is rotated in this state, a signal corresponding to the rotational angular velocity is generated between each of the first divided electrodes or each of the second divided electrodes and the common electrode. This signal is detected by the detecting means.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is an illustrative view showing a vibrating gyroscope 1 according to a first embodiment of the present invention, and FIG. 2 is a perspective view of a main part showing a vibrator used in the vibrating gyroscope.

The vibrating gyroscope 1 includes a substantially quadrangular prism-shaped vibrator 3, and the vibrator 3 includes a substantially rectangular first piezoelectric substrate 5.
a and the second piezoelectric substrate 5b are laminated and bonded. In this case, the first piezoelectric substrate 5a and the second piezoelectric substrate 5b are polarized in directions opposite to each other as shown by an arrow P in FIG. The polarization directions of the first piezoelectric substrate 5a and the second piezoelectric substrate 5b may be opposite to each other.

On the main surface of the first piezoelectric substrate 5a, two divided electrodes 7a and 7b are formed at an interval in the width direction, and on the main surface of the second piezoelectric substrate 5b, a common electrode is formed. 9 is formed. Further, a dummy electrode 11 is formed between the first piezoelectric substrate 5a and the second piezoelectric substrate 5b as necessary.

One output terminal of the driving means 21 including the oscillation circuit is connected to one divided electrode 7a of the vibrator 3, and the other output terminal of the driving means 21 is connected to the other divided electrode of the vibrator 3. 7b.

When a driving signal such as a sine wave signal output from the driving means 21 is applied between the two polarization electrodes 7a and 7b, the vibrator 3 is moved about the virtual line A in FIG. , The left half 3 on the side where one of the polarization electrodes 7a is disposed
a and the right half 3b on the side where the other polarization electrode 7b is arranged
And vibrate in opposite directions. In this case, when the left half 3a side of the vibrator 3 extends in the longitudinal direction, the right half 3a
The b side shrinks in the longitudinal direction. Conversely, the left half 3 of the vibrator 3
When the a side is contracted in the longitudinal direction, the right half 3b
The side extends in its longitudinal direction. Therefore, the vibrator 3 bends and vibrates in the width direction as shown in FIG.

In this state, when the vibrating gyroscope 1 rotates about the central axis O of the vibrator 3 shown in FIG. 2, a Coriolis force corresponding to the rotational angular velocity is applied to the first piezoelectric substrate 5a and the second piezoelectric substrate 5a. The vibrator 3 is orthogonal to the main surface of the piezoelectric substrate 5b and
In the direction orthogonal to the central axis O of Therefore, the vibrator 3
Changes the direction of the bending vibration of the two electrodes 7a and 7b
A signal corresponding to the rotational angular velocity is generated between and the common electrode 9. Then, by detecting a signal generated between the two divided electrodes 7a and 7b and the common electrode 9 by the detecting means 23 including a differential amplifier circuit or the like, the rotational angular velocity can be known.

The vibration gyro 1 according to the first embodiment described above.
Then, at the time of rotation, the two divided electrodes 7a and 7b and the common electrode 9
The rotation angular velocity could be known by detecting the signal generated between the common electrode 9 and the common electrode 9 by detecting the signal generated between the common electrode 9 and the one of the two divided electrodes 7a and 7b. The signal may be detected.

Next, a second embodiment of the present invention will be described with reference to FIG. FIG. 4 is an illustrative view showing a vibrating gyroscope 1 according to a second embodiment of the present invention. Parts that are the same as or equivalent to those in the first embodiment of the present invention are given the same numbers.

The vibrating gyroscope 1 includes a vibrator 3 having a substantially quadrangular prism shape, and the vibrator 3 includes a first piezoelectric substrate 5 having a substantially rectangular shape.
a and the second piezoelectric substrate 5b are laminated and bonded. In this case, the first piezoelectric substrate 5a and the second piezoelectric substrate 5b are polarized in directions opposite to each other as shown by an arrow P. The polarization directions of the first piezoelectric substrate 5a and the second piezoelectric substrate 5b may be opposite to each other.

On the main surface of the first piezoelectric substrate 5a, two first divided electrodes 7a and 7b are formed at intervals in the width direction, and on the main surface of the second piezoelectric substrate 5b. , Two second divided electrodes 9a and 9b are formed. Further, a dummy electrode 11 is formed between the first piezoelectric substrate 5a and the second piezoelectric substrate 5b as necessary.

Then, one output terminal of the driving means 21 including the oscillation circuit is divided by the variable resistor 25 and
Are connected to one of the first divided electrodes 7a and one of the second divided electrodes 9a, respectively, and the other output terminal of the driving means 21 is divided by the variable resistor 27 so that the other first divided electrode 7a And the other second divided electrode 9b. Here, the one variable resistor 25 is for distributing the output of the driving means 21 to the first divided electrode 7a and the second divided electrode 9a of the vibrator 3 with good balance. The other variable resistor 27 is for distributing the output of the driving means 21 to the other first divided electrode 7b and the other second divided electrode 9b of the vibrator 3 with good balance.

A driving signal such as a sine wave signal output from the driving means 21 is supplied to the first divided electrode 7a and the second divided electrode 9a via the variable resistors 25 and 27, respectively. If a voltage is applied between the other first divided electrode 7b and the other second divided electrode 9b, the vibrator 3 will have one first divided electrode 7a and one The left half 3a on the side where the second split electrode 9a is arranged and the right half 3b on the side where the other first split electrode 7b and the other second split electrode 9b are arranged vibrate in opposite directions. . In this case, when the left half 3a of the vibrator 3 extends in the longitudinal direction, the right half 3b contracts in the longitudinal direction. Conversely, when the left half 3a of the vibrator 3 is contracted in the longitudinal direction, the right half 3b is extended in the longitudinal direction. Therefore, the vibrator 3 bends and vibrates in the width direction.

In this state, when the vibrating gyroscope 1 rotates around the central axis of the vibrator 3, Coriolis force corresponding to the rotational angular velocity is applied to the main body of the first piezoelectric substrate 5a and the second piezoelectric substrate 5b. It works in a direction perpendicular to the plane and perpendicular to the central axis of the vibrator 3. Therefore, the direction of the bending vibration of the vibrator 3 changes, and a signal corresponding to the rotational angular velocity is generated between the two first divided electrodes 7a and 7b and the two second divided electrodes 9a and 9b. . Then, a signal generated between the two first divided electrodes 7a and 7b and the two second divided electrodes 9a and 9b is detected by a detecting means 23 including a differential amplifier circuit, etc. You can know.

The vibrating gyroscope 1 of the second embodiment described above
Then, at the time of rotation, the two divided electrodes 7a and 7b and the two
By detecting a signal generated between the first and second divided electrodes 9a and 9b by the detection means 23, the rotational angular velocity could be known. However, any one of the two first divided electrodes 7a and 7b could be used. Alternatively, a signal generated between one of the two second divided electrodes 9a and 9b may be detected.
Further, a signal generated between any one of the two first divided electrodes 7a and 7b and the two second divided electrodes 9a and 9b may be detected. Furthermore, two first divided electrodes 7a, 7b and two second divided electrodes 9a, 9b
May be detected.

Next, a third embodiment of the present invention will be described with reference to FIGS.
This will be described with reference to FIG. FIG. 5 is an illustrative view showing a vibrating gyroscope 1 according to a third embodiment of the present invention, and FIG. 6 is an exploded perspective view thereof. The same or equivalent parts as those in the first and second embodiments of the present invention are denoted by the same reference numerals.

The vibrating gyroscope 1 includes a substantially quadrangular prism-shaped vibrator 3, and the vibrator 3 includes a substantially rectangular first piezoelectric substrate 5.
a and the second piezoelectric substrate 5b are laminated and bonded. In this case, the first piezoelectric substrate 5a and the second piezoelectric substrate 5b are polarized in directions opposite to each other as shown by an arrow P in FIG. The polarization directions of the first piezoelectric substrate 5a and the second piezoelectric substrate 5b may be opposite to each other.

The first common electrode 7 is formed on the main surface of the first piezoelectric substrate 5a, and the second common electrode 9 is formed on the main surface of the second piezoelectric substrate 5b. Further, two divided electrodes 8a and 8b are formed between the first piezoelectric substrate 5a and the second piezoelectric substrate 5b at intervals in the width direction. One of the divided electrodes 8a has a lead electrode 13a formed at an end of a side surface of the first piezoelectric substrate 5a.
Is connected to the other divided electrode 8b, and a lead-out electrode 13b formed at the end of the side surface of the second piezoelectric substrate 5b.

One output terminal of the driving means 21 including the oscillation circuit is connected to one divided electrode 8a of the vibrator 3 via the extraction electrode 13a, and the other output terminal of the driving means 21 is connected to the extraction electrode It is connected to the other split electrode 8b of the vibrator 3 via 13b.

The drive signal such as a sine wave signal output from the drive means 21 is applied to the extraction electrodes 13a and 13b.
When the voltage is applied between the divided electrodes 8a and 8b through the vibrator 3, the vibrator 3 makes the one divided electrode 8
a, the left half 3a on the side on which the
And the right half 3b on the side where.
In this case, when the left half 3a of the vibrator 3 extends in the longitudinal direction, the right half 3b contracts in the longitudinal direction. Conversely, when the left half 3a of the vibrator 3 is contracted in the longitudinal direction, the right half 3b is extended in the longitudinal direction. Therefore, the vibrator 3 bends and vibrates in the width direction.

In this state, when the vibrating gyroscope 1 rotates about the central axis of the vibrator 3, Coriolis force corresponding to the rotational angular velocity is applied to the main body of the first piezoelectric substrate 5a and the second piezoelectric substrate 5b. It works in a direction perpendicular to the plane and perpendicular to the central axis of the vibrator 3. Therefore, the direction of the bending vibration of the vibrator 3 changes, and a signal corresponding to the rotational angular velocity is generated between the first common electrode 7 and the second common electrode 9. Then, by detecting a signal generated between the first common electrode 7 and the second common electrode 9 by the detecting means 23 including a differential amplifier circuit or the like, the rotational angular velocity can be known.

Next, a fourth embodiment of the present invention will be described with reference to FIG. FIG. 7 is an illustrative view showing a vibrating gyroscope 1 according to a fourth embodiment of the present invention. In addition, about the same or equivalent part as 1st Example-3rd Example of this invention,
Assign the same number.

The vibrating gyroscope 1 includes a substantially quadrangular prism-shaped vibrator 3, and the vibrator 3 includes a substantially rectangular first piezoelectric substrate 5.
a and the second piezoelectric substrate 5b are laminated and bonded. In this case, the first piezoelectric substrate 5a and the second piezoelectric substrate 5b are polarized in directions opposite to each other as shown by an arrow P. The polarization directions of the first piezoelectric substrate 5a and the second piezoelectric substrate 5b may be opposite to each other.

On the main surface of the first piezoelectric substrate 5a, two first divided electrodes 7a and 7b are formed at an interval in the width direction, and on the main surface of the second piezoelectric substrate 5b. , Two second divided electrodes 9a and 9b are formed. Further, between the first piezoelectric substrate 5a and the second piezoelectric substrate 5b, two third divided electrodes 8a, 8b are spaced apart in the width direction.
Is formed. Then, a lead electrode 13a formed at an end of the side surface of the first piezoelectric substrate 5a is connected to one third divided electrode 8a, and the other third divided electrode 8a is connected to the third divided electrode 8a.
A lead electrode 13b formed at the end of the side surface of the second piezoelectric substrate 5b is connected to b.

One output terminal of the driving means 21 including the oscillation circuit is connected to one of the first terminals of the vibrator 3 via the three resistors 25a, 25b, 25c and the extraction electrode 13a.
, And one of the second divided electrodes 9a and one of the third divided electrodes 8a. The other output terminal of the driving means 21 is connected to three resistors 27a, 27b,
The other divided first electrode 7b, the other second divided electrode 9b, and the other third divided electrode 8b of the vibrator 3 are connected to each other via the extraction electrode 27c and the extraction electrode 13b. Here, the resistors 25a, 25b, and 25c output the output of the driving unit 21 to the first divided electrode 7a, the second divided electrode 9a, and the third divided electrode 9a of the vibrator 3 of the vibrator 3. 8a in a well-balanced manner. The resistors 27a, 27b, and 27c distribute the output of the driving unit 21 to the other first divided electrode 7b, the other second divided electrode 9b, and the other third divided electrode 8b of the vibrator 3 with good balance. It is for doing.

The driving signal such as a sine wave signal output from the driving means 21 is applied to one of the first divided electrodes 7a, one of the second divided electrodes 9a and one of the third divided electrodes 8a, and to the other. When the voltage is applied between the first divided electrode 7b, the other second divided electrode 9b, and the other third divided electrode 8b, the vibrator 3 is moved to the boundary of the virtual line A approximately, The left half 3a on the side where one divided electrode 7a, one second divided electrode 9a and one third divided electrode 8a are arranged, the other first divided electrode 7b and the other second divided electrode 9b and the other third divided electrode 8
The right half 3b on the side where b is disposed vibrates in the opposite direction. In this case, when the left half 3a of the vibrator 3 extends in the longitudinal direction, the right half 3b contracts in the longitudinal direction. Conversely, when the left half 3a of the vibrator 3 is contracted in the longitudinal direction, the right half 3b is extended in the longitudinal direction. Therefore, the vibrator 3 bends and vibrates in the width direction.

In this state, when the vibrating gyroscope 1 rotates about the center axis of the vibrator 3, Coriolis force corresponding to the rotational angular velocity is applied to the main body of the first piezoelectric substrate 5a and the second piezoelectric substrate 5b. It works in a direction perpendicular to the plane and perpendicular to the central axis of the vibrator 3. Therefore, the direction of the bending vibration of the vibrator 3 changes, and a signal corresponding to the rotational angular velocity is generated between the two first divided electrodes 7a and 7b and the two second divided electrodes 9a and 9b. . Then, a signal generated between the two first divided electrodes 7a and 7b and the two second divided electrodes 9a and 9b is detected by a detecting means 23 including a differential amplifier circuit, etc. You can know.

The vibrating gyroscope 1 of the fourth embodiment described above
Then, at the time of rotation, the two divided electrodes 7a and 7b and the two
By detecting a signal generated between the first and second divided electrodes 9a and 9b by the detection means 23, the rotational angular velocity could be known. However, any one of the two first divided electrodes 7a and 7b could be used. , A signal generated between one of the two second divided electrodes 9a and 9b may be detected.
Further, a signal generated between any one of the two first divided electrodes 7a and 7b and the two second divided electrodes 9a and 9b may be detected. Furthermore, two first divided electrodes 7a, 7b and two second divided electrodes 9a, 9b
May be detected.

Next, a fifth embodiment of the present invention will be described with reference to FIG. FIG. 8 is an illustrative view showing a vibrating gyroscope 1 according to a fifth embodiment of the present invention. In addition, about the same or equivalent part as 1st Example-4th Example of this invention,
Assign the same number.

The vibrating gyroscope 1 includes a vibrator 3 having a substantially quadrangular prism shape, and the vibrator 3 has a substantially rectangular first piezoelectric substrate 5.
a and the second piezoelectric substrate 5b are laminated and bonded. In this case, the first piezoelectric substrate 5a and the second piezoelectric substrate 5b are polarized in the same direction as indicated by an arrow P. Note that the polarization directions of the first piezoelectric substrate 5a and the second piezoelectric substrate 5b may be the same as the directions shown in FIG.

On the main surface of the first piezoelectric substrate 5a, two divided electrodes 7a and 7b are formed at an interval in the width direction, and on the main surface of the second piezoelectric substrate 5b, Is formed. Further, a second common electrode 8 is formed between the first piezoelectric substrate 5a and the second piezoelectric substrate 5b. The extraction electrode 13 formed at the end of the side surface of the second piezoelectric substrate 5b is connected to the second common electrode 8. Note that the extraction electrode 13 may be formed at the end of the side surface of the first piezoelectric substrate 5a.

One output terminal of the driving means 21 including the oscillation circuit is connected to one divided electrode 7a of the vibrator 3, and the other output terminal of the driving means 21 is connected to the other divided electrode 7a of the vibrator 3. 7b.

When a driving signal, such as a sine wave signal, output from the driving means 21 is applied between the two polarization electrodes 7a and 7b, the vibrator 3 is driven around the imaginary line A as a boundary. The left half 3a on the side where 7a is arranged and the right half 3b on the side where the polarization electrode 7b is arranged vibrate in opposite directions. In this case, when the left half 3a of the vibrator 3 extends in the longitudinal direction, the right half 3b contracts in the longitudinal direction. Conversely, when the left half 3a of the vibrator 3 is contracted in the longitudinal direction, the right half 3b is extended in the longitudinal direction. Therefore, the vibrator 3 bends and vibrates in the width direction.

In this state, when the vibrating gyroscope 1 rotates about the central axis of the vibrator 3, Coriolis force corresponding to the rotational angular velocity is applied to the main body of the first piezoelectric substrate 5a and the second piezoelectric substrate 5b. It works in a direction perpendicular to the plane and perpendicular to the central axis of the vibrator 3. Therefore, the direction of the bending vibration of the vibrator 3 changes, and a signal corresponding to the rotational angular velocity is generated between the two divided electrodes 7 a and 7 b and the first common electrode 9 and the second common electrode 8. I do. And two divided electrodes 7
a, 7b and the first common electrode 9 and the second common electrode 8
Through the extraction electrode 13,
The rotational angular velocity can be known by detecting the rotation angular velocity by the detection means 23 including a differential amplifier circuit and the like.

The vibrating gyroscope 1 of the fifth embodiment described above.
In the above, the rotation angular velocity could be known by detecting the signal generated between the two divided electrodes 7a and 7b and the first common electrode 9 and the second common electrode 8 by the detecting means 23. Alternatively, a signal generated between one or some of the two divided electrodes 7 a and 7 b and the first common electrode 9 and the second common electrode 8 may be detected.

Next, a sixth embodiment of the present invention will be described with reference to FIG. FIG. 9 is an illustrative view showing a vibrating gyroscope 1 according to a fifth embodiment of the present invention. In addition, about the same or equivalent part as 1st Example-5th Example of this invention,
Assign the same number.

The vibrating gyroscope 1 includes a substantially quadrangular prism-shaped vibrator 3, and the vibrator 3 includes a substantially rectangular first piezoelectric substrate 5.
a and the second piezoelectric substrate 5b are laminated and bonded. In this case, the first piezoelectric substrate 5a and the second piezoelectric substrate 5b are polarized in the same direction as indicated by an arrow P. It should be noted that the polarization directions of the first piezoelectric substrate 5a and the second piezoelectric substrate 5b may be opposite to the directions shown in FIG.

On the main surface of the first piezoelectric substrate 5a, two first divided electrodes 7a and 7b are formed at an interval in the width direction, and on the main surface of the second piezoelectric substrate 5b. , Two second divided electrodes 9a and 9b are formed at intervals in the width direction. Further, a common electrode 8 is formed between the first piezoelectric substrate 5a and the second piezoelectric substrate 5b. The common electrode 8 is connected to an extraction electrode 13 formed at an end of the side surface of the first piezoelectric substrate 5a. In addition,
The lead electrode 13 may be formed at the end of the side surface of the second piezoelectric substrate 5b.

Then, one output terminal of the driving means 21 is divided by the variable resistor 25 and connected to the first divided electrode 7a and the second divided electrode 9b of the vibrator 3, respectively. The other output terminal of the driving means 21 is divided by the variable resistor 27 and connected to the other first divided electrode 7b and the other second divided electrode 9a of the vibrator 3, respectively. Here, one variable resistor 25 is connected to the driving unit 21.
Is distributed to the first divided electrode 7a and the second divided electrode 9b of the vibrator 3 in a well-balanced manner. The other variable resistor 27 is for distributing the output of the driving means 21 to the other first divided electrode 7b and the other second divided electrode 9a of the vibrator 3 with good balance.

A driving signal such as a sine wave signal output from the driving means 21 is supplied to the first divided electrode 7a and the second divided electrode 9b via the variable resistors 25 and 27, respectively. If a voltage is applied between the other first divided electrode 7b and the other second divided electrode 9a, the vibrator 3 will have one of the first divided electrodes 7a and the other The left half 3a on the side where the second split electrode 9a is arranged and the right half 3b on the side where the other first split electrode 7b and one second split electrode 9b are arranged vibrate in opposite directions. . In this case, when the left half 3a of the vibrator 3 extends in the longitudinal direction, the right half 3b contracts in the longitudinal direction. Conversely, when the left half 3a of the vibrator 3 is contracted in the longitudinal direction, the right half 3b is extended in the longitudinal direction. Therefore, the vibrator 3 bends and vibrates in the width direction.

In this state, when the vibrating gyroscope 1 rotates about the central axis of the vibrator 3, Coriolis force corresponding to the rotational angular velocity is applied to the main body of the first piezoelectric substrate 5a and the second piezoelectric substrate 5b. It works in a direction perpendicular to the plane and perpendicular to the central axis of the vibrator 3. Therefore, the direction of the bending vibration of the vibrator 3 is changed, and between the two first divided electrodes 7a and 7b and the two second divided electrodes 9a and 9b and the common electrode 8 according to the rotational angular velocity. Signal is generated. And
A signal generated between the two first divided electrodes 7a and 7b and the two second divided electrodes 9a and 9b and the common electrode 8 is detected via a lead-out electrode 13 including a differential amplifier circuit and the like. By detecting with the means 23, the rotational angular velocity can be known.

The vibrating gyroscope 1 of the sixth embodiment described above
Then, by detecting the signal generated between the common electrode 8 and the two first divided electrodes 7a and 7b and the two second divided electrodes 9a and 9b during rotation by the detecting means 23,
Although the rotation angular velocity could be known, any one or some of the two first divided electrodes 7a and 7b and the two second divided electrodes 9a and 9b was connected to the common electrode 8. May be detected.

The vibrating gyroscope 1 according to the first to sixth embodiments is different from the conventional vibrating gyroscope that vibrates the vibrator in a direction orthogonal to the main surfaces of the first piezoelectric substrate and the second piezoelectric substrate. In addition, the impedance of the vibrator 3 can be improved about twice, and the power consumption can be reduced to about 1/2 without lowering the sensitivity.

In the vibrating gyroscopes 1 of the first to sixth embodiments, a relatively inexpensive piezoelectric substrate is used for the vibrator without using an expensive metal material such as a Ni alloy. And the detected signal is not easily affected by the magnetic field.

[0066]

As described above, according to the vibrating gyroscope of the present invention, by vibrating the vibrator formed by laminating the first piezoelectric substrate and the second piezoelectric substrate in the width direction thereof, In addition, it is possible to improve the impedance of the vibrator and reduce the power consumption without lowering the sensitivity.

Further, the vibrating gyroscope of the present invention uses a relatively inexpensive piezoelectric substrate without using an expensive metal material such as a Ni alloy for the vibrator, so that the cost can be reduced.
The detected signal is hardly affected by the magnetic field.

[Brief description of the drawings]

FIG. 1 is an illustrative view showing a vibrating gyroscope according to a first embodiment of the present invention;

FIG. 2 is a perspective view of a main part of the vibrating gyroscope of FIG.

FIG. 3 is a plan view showing a state in which the vibrating gyroscope of FIG. 1 performs bending vibration.

FIG. 4 is an illustrative view showing a vibrating gyroscope according to a second embodiment of the present invention;

FIG. 5 is an illustrative view showing a vibrating gyroscope according to a third embodiment of the present invention;

6 is an exploded perspective view of the vibrating gyroscope of FIG.

FIG. 7 is an illustrative view showing a vibrating gyroscope according to a fourth embodiment of the present invention;

FIG. 8 is an illustrative view showing a vibrating gyroscope according to a fifth embodiment of the present invention;

FIG. 9 is an illustrative view showing a vibrating gyroscope according to a sixth embodiment of the present invention;

FIG. 10 is an illustrative view showing a conventional vibrating gyroscope;

FIG. 11 is a perspective view of a main part of the vibrating gyroscope of FIG. 10;

12 is a side view showing a state in which the vibrating gyroscope of FIG. 10 bends and vibrates.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Vibration gyroscope 3 Vibrator 5a 1st piezoelectric substrate 5b 2nd piezoelectric substrate 7a, 7b Split electrode 9 Common electrode 21 Driving means 23 Detection means

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G01C 19/56 G01P 9/04

Claims (6)

(57) [Claims] 1. A substantially strip-shaped first piezoelectric substrate polarized in a thickness direction, laminated on the first piezoelectric substrate, and polarized in a direction opposite to a polarization direction of the first piezoelectric substrate. A substantially rectangular second piezoelectric substrate, two divided electrodes formed on the main surface of the first piezoelectric substrate, and a common electrode formed on the main surface of the second piezoelectric substrate. A driving unit for applying a driving signal between the two divided electrodes; and a detecting unit for detecting a signal generated between at least one of the two divided electrodes and the common electrode. A vibrating gyro characterized by the following. 2. A substantially rectangular strip-shaped first piezoelectric substrate which is polarized in a thickness direction, laminated on the first piezoelectric substrate, and polarized in a direction opposite to a polarization direction of the first piezoelectric substrate. A substantially strip-shaped second piezoelectric substrate, two first split electrodes formed on the main surface of the first piezoelectric substrate, and a second piezoelectric substrate formed on the main surface of the second piezoelectric substrate Driving between two second divided electrodes, one of the first divided electrodes and one of the second divided electrodes, and the other of the first divided electrodes and the other of the second divided electrodes Driving means for applying a signal; at least one of the two first divided electrodes;
Detecting means for detecting a signal generated between at least one of the two second divided electrodes. 3. A substantially strip-shaped first piezoelectric substrate which is polarized in a thickness direction, and is laminated on the first piezoelectric substrate, and is polarized in a direction opposite to a polarization direction of the first piezoelectric substrate. A substantially rectangular second piezoelectric substrate, a first common electrode formed on the main surface of the first piezoelectric substrate, and a second common electrode formed on the main surface of the second piezoelectric substrate. A common electrode, two divided electrodes formed between the first piezoelectric substrate and the second piezoelectric substrate, a driving unit for applying a driving signal between the two divided electrodes, A detecting means for detecting a signal generated between the first common electrode and the second common electrode. 4. A substantially strip-shaped first piezoelectric substrate which is polarized in a thickness direction, and is laminated on the first piezoelectric substrate, and is polarized in a direction opposite to a polarization direction of the first piezoelectric substrate. A substantially strip-shaped second piezoelectric substrate, two first split electrodes formed on the main surface of the first piezoelectric substrate, and a second piezoelectric substrate formed on the main surface of the second piezoelectric substrate Two second divided electrodes; two third divided electrodes formed between the first piezoelectric substrate and the second piezoelectric substrate; one of the first divided electrodes and one of the first divided electrodes; A drive signal is applied between the second divided electrode and one of the third divided electrodes, and the other of the first divided electrode, the other of the second divided electrodes, and the other of the third divided electrodes. Driving means for performing at least one of the two first divided electrodes;
Detecting means for detecting a signal generated between at least one of the two second divided electrodes. 5. A substantially strip-shaped first piezoelectric substrate polarized in a thickness direction, laminated on the first piezoelectric substrate, and polarized in the same direction as the polarization direction of the first piezoelectric substrate. A substantially strip-shaped second piezoelectric substrate, two divided electrodes formed on the main surface of the first piezoelectric substrate, and a first divided electrode formed on the main surface of the second piezoelectric substrate. A common electrode; a second common electrode formed between the first piezoelectric substrate and the second piezoelectric substrate; a driving unit for applying a driving signal between the two divided electrodes; A vibrating gyroscope comprising: at least one of two divided electrodes and the first common electrode; and a detecting unit for detecting a signal generated between the divided electrode and the second common electrode. 6. A substantially strip-shaped first piezoelectric substrate polarized in a thickness direction, laminated on the first piezoelectric substrate, and polarized in the same direction as the polarization direction of the first piezoelectric substrate. A substantially strip-shaped second piezoelectric substrate, two first split electrodes formed on the main surface of the first piezoelectric substrate, and a second piezoelectric substrate formed on the main surface of the second piezoelectric substrate Two second divided electrodes; a common electrode formed between the first piezoelectric substrate and the second piezoelectric substrate; one of the first divided electrodes and one of the second divided electrodes And the other first split electrode and the other second electrode
A driving means for applying a driving signal between the common electrode and a common electrode, and a driving means for applying a driving signal between the common electrode and at least one of the two first divided electrodes and the two second divided electrodes. A vibrating gyroscope, comprising: detecting means for detecting a vibration.