JP3264512B2 - Solvent processing equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solvent (concentration of about 30 to 300 ppm of an organic solvent represented by toluene or xylene) discharged from a coating plant or a semiconductor manufacturing plant.
Among the technologies for treating the exhaust gas containing, that is, removing the solvent in the exhaust gas, this technology concentrates the concentration of the solvent so as to reduce the final treatment amount.Specifically, it mainly uses an adsorbent such as activated carbon. Using a strip-shaped solvent adsorbent, a solvent-containing gas to be treated is supplied so as to cross the solvent adsorbent in the thickness direction, and the solvent in the gas to be treated is adsorbed by the solvent adsorbent. The technology relates to removing.

[0002]

In the case of processing a SOLVENTS using BACKGROUND ART strip solvent adsorbent (belt), for example, the fibrous activated carbon paper of, formed into a honeycomb shape having a plurality of gas passages by stage process By using a block-shaped solvent adsorbent supported by a frame and passing the gas to be treated along the gas passage of the solvent adsorbent, the fibrous activated carbon is brought into contact with the peripheral wall of the gas passage where it is dispersed. There are the following advantages as compared with the case where the solvent is adsorbed by using the honeycomb rotor type. In other words, in the case of the honeycomb rotor type, the gas to be treated flows along the peripheral wall of the gas passage and is adsorbed by being brought into contact with the adsorbent. poor contact efficiency between the adsorbent and the solvent contact area rather small, its upper, machining large number, in spite of the size of the solvent the adsorbent becomes higher cost with a small capacity. Moreover, when the solvent adsorbent is heated and desorbed, the solvent adsorbent is large and, in addition, heat is taken by the supporting frame, so that a large amount of heat is required, and the desorbable state is obtained after desorption. In some cases, cooling is required for returning, and the running cost is high. On the other hand, in the case of the belt type to which the present invention is applied, the solvent adsorbent can be made to have a large contact area and excellent contact efficiency by forming fibrous activated carbon into a felt shape. In part, the thickness of the solvent adsorber can be reduced, and as a result,
Since the solvent adsorbent can be easily heated and cooled, the running cost required for heating for desorption can be reduced, and cooling for adsorption after desorption can be performed without requiring special equipment. Conventionally, as a solvent processing technique having such an advantage, as shown in FIG. 4, the solvent adsorbent 3 is unwound from a first roll R1, wound up by a second roll R2, and is rolled up by a first roll R1. In the course of the transfer from the second roll R2 to the second roll R2, the processing target gas G1 is supplied to cause the solvent to be adsorbed by the solvent adsorbent 3, and the heated air serving as the desorption gas G2 is placed in the heating chamber H containing the second roll R2. Is known to desorb the solvent from the solvent adsorbent 3 by supplying the solvent (for example, Japanese Patent Publication No. 53-9587).

[0003]

However, in the case of the above prior art, the solvent adsorbent is moved by being wound up by the second roll while being unwound from the first roll, so that the solvent is adsorbed by the solvent adsorbent. by supplying in parallel heated air in the heating chamber in such a time of movement, but allows at the same time adsorption and desorption, the solvent adsorbent to a second roll that is taken either wound to the end, the first roll It is necessary to rewind the solvent adsorbent, and the processing form must be a form in which adsorption and desorption and rewind are alternately repeated. As a result, in order to perform a long-time treatment, it is necessary to lengthen one adsorption work time by feeding out all of the solvent adsorbent from the first roll, or to provide a plurality of solvent treatment devices and provide one solvent treatment device. Or be used alternately so that the other is unwound as it is adsorbing and desorbing. In the former case, the winding diameter of the solvent adsorbent increases, which not only leads to an increase in the size of the accompanying device and cost, but also causes the heating chamber to be wound around the second roll. The longer time the solvent adsorbent is heated while adsorbing the solvent may cause an abnormal rise in the temperature of the solvent adsorbent, and a configuration for preventing this is required separately. Inevitably increase the size and cost of This is particularly remarkable when the moving speed of the solvent adsorber is increased in order to process a high concentration gas to be processed. On the other hand,
In the latter case, the number of solvent processing units increases, and again,
Inevitably increase the size of the device and increase the cost. An object of the present invention is to solve the above-described drawbacks, that is, even if the concentration of the gas to be treated is higher than the concentration of the main use area in the conventional example, without increasing the size and cost of the apparatus. The point is to enable continuous processing for a long time.

[0004]

Means for Solving the Problems [ Invention according to claim 1 ] The invention according to claim 1 relates to a solvent processing apparatus and its features.
Is a roller on which a belt-shaped solvent adsorber is
Adsorbent circulation route that circulates and moves in a ring
To move the solvent adsorbent linearly upward
And the solvent adsorbent at the position directly facing the rising path.
A descending path part that moves down linearly, and their ascending paths
Between the lower end and the lower path.
Adsorber circulation having a horizontal path for horizontally moving the body
An annular path is provided, and the solvent adsorbent contains a solvent containing
Adsorber that passes the solvent through the
The gas inlet of the treated gas exhaust duct
Is located at the gas receiving port, facing one side of
Supply the gas to be treated to the solvent adsorber from the other side
The suction part having a structure to pass through the ascending path portion and the descending path
Parts, and pass the desorption gas through the solvent adsorbent.
To remove the solvent from the solvent adsorbent.
The gas inlet of the concentrated gas recovery duct with a piece of solvent adsorbent.
Solvent located at the gas inlet with the surface facing
Desorption gas is supplied to the adsorbent from the other side and passed through
At the point where it is provided in the horizontal path
is there.

[Invention according to claim 2] The invention according to claim 2 is suitable for implementing the invention according to claim 1.
Identify suitable embodiments, the characteristics of which are described above.
A horizontal path portion includes the ascending path portion and the descending path portion
In the upper path portion extending between the upper ends of

[0006]

According to the above characteristic configuration of the invention according to claim 1 [Operation of the invention according to claim 1], the following
(A) to (e). (B) In the circular adsorbent circulation path,
It provided the suction unit and a horizontal path portion provided in the fine descending path portion
By circulating and moving the strip-shaped solvent adsorber so that it moves alternately and repeatedly to the desorption section , adsorption of the solvent from the gas to be treated by the solvent adsorber and desorption of the adsorbed solvent to the desorption gas are performed. Therefore, by continuously performing the circulation movement of the solvent adsorbent and the supply of the gas to be treated and the supply of the desorption gas in that state, the adsorption and desorption can be performed continuously without interruption. In addition, the solvent adsorbent is not excessively heated during desorption. (B) The circular adsorbent circulation path is divided
A path including a descending path section and a horizontal path section is provided.
The suction part and the desorption part are distributed and arranged in three paths
Depending on the structure, the adsorbent circulation path is
Minutes and the rest of the path (ie, the ascending path and the descending path)
Move the solvent adsorbent over the other end of the road
Circulating in a nearly rectangular shape with a small aspect ratio
Can be a path, for example, one long
Adsorbing part and desorbing part on a straight linear path
The overall configuration of the device is
Can be (C) The air volume of the gas to be treated is greater than the air volume of the desorption gas.
Much larger (ie proportional to the concentration of the solvent)
Therefore, in order to obtain a large processing capacity,
To ensure the largest ventilation area for the gas to be treated
Importantly, let the gas to be processed pass through the solvent adsorber
As described above, the suction part is divided into two parts, the rising path part and the descending path part.
As described above, the adsorbent circulation
The overall configuration of the device can be made compact by making the ring path rectangular.
Of the gas to be treated against the solvent adsorber
It is possible to obtain a large processing capacity by securing a large ventilation area
it can. (D) The above-mentioned rising path is used to compose the adsorption section and the desorption section.
In each of the road section, descending path section, and horizontal path section,
Treated gas exhaust on one side of a linear solvent adsorbent that moves linearly
Gas inlet and concentrated gas recovery duct
And the adsorbent circulation route as described above
Ascending path, descending path, horizontal path
Each one is a short one that easily keeps the solvent adsorbent flat.
Together, for example, the solvent adsorbent
Gas receiving compared to the type that requires a seal at the
Make a simple seal between the mouth edge and the solvent adsorber.
There et al can also be good seal, As a result, the Sea
Solvent remixing in the treated gas or leakage of concentrated gas due to defective
Inconveniences such as leaks or mixing of ambient gas into enriched gas
It can be effectively prevented. (E) The air volume of the gas to be treated is larger than the air volume of the desorption gas
Gas reception in the treated gas exhaust duct at the kikku adsorber
The opening is the gas inlet of the concentrated gas recovery duct at the desorption section.
Since the opening area often becomes larger than
Than the seal at the gas inlet of the concentrated gas recovery duct
Seal at the gas inlet of the treated gas exhaust duct
Becomes difficult (especially when molded into thin felt, etc.)
The softer the adsorbent, the more difficult it becomes)
Weight of the adsorbent keeps the solvent adsorber in a flat vertical position
Especially for the ascending path and descending path
By providing an adsorption part, the gas receiving port
In the above type of facing the adsorbent, the treated gas exhaust
Between the rim and the solvent adsorber at the gas inlet of the duct
Seal regardless of the large opening area of its gas inlet
Can be made more reliable,
Gas seal machine as a whole device in combination with the function of (d)
Performance can be enhanced more effectively,
The solvent processing performance can be further improved. [ Operation of the invention according to claim 2 ] According to the above-mentioned feature of the invention according to claim 2, the following features are provided.
The effect of (f) is achieved. (F) The horizontal path where the attachment / detachment section is provided is the upper path
Make the upper route part between the descending route part and the upper end
As a result, each of the ascending path and the descending path
Weight of the solvent adsorbent in the horizontal path (upper path)
To keep the solvent adsorbent in a horizontal position
Gas inlet through a flat solvent adsorbent
Gas receiving duct of the concentrated gas recovery duct
A better seal between the lip at the inlet and the solvent adsorber
Can be realistic, and this
(D) The gas of the whole device combined with the action of (e)
The sealing function can be more effectively enhanced.

[0007]

[Effects of the invention according to claim 1 ] According to the invention according to claim 1, the effect of the above (a) is achieved .
As a result, a high-concentration solvent-containing gas can be continuously processed for a long time without increasing the size and cost of the apparatus as compared with the conventional apparatus described above . The above (b), (c)
Of the equipment makes it possible to make the equipment more compact.
While gaining greater processing power, and
Due to the effects of (d) and (e), processing due to poor sealing
Solvent remixing in the used gas, leakage of concentrated gas or
Solvent treatment by effectively preventing ambient gas from entering the
Noh can also be effectively enhanced. [Effects of the invention according to claim 2 ] According to the invention according to claim 2, the effect of (f)
More effectively enhance the gas sealing function of the entire system
Can improve solvent treatment performance more effectively
Become.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS As shown in FIG. 3, a solvent processing equipment includes a solvent processing apparatus 1 for pretreatment for concentrating a processing target gas G1 containing a solvent and a final processing for removing the solvent from the concentrated gas g1 therefrom. Device 2. The solvent treatment device 1 includes:
As shown in FIG. 1, an endless strip-shaped solvent adsorbent 3 having air permeability is provided, and the solvent adsorbent 3 is connected to a circular adsorbent circulation path.
A guide means and a moving means for guiding the movement along L are provided,
The solvent adsorbent 3 moves up linearly in the circulation path L.
The rising path portion La to be changed and the rising path portion La
To move the solvent adsorbent 3 down linearly at the position
The processing target gas G is applied to the solvent adsorbent 3 so as to pass through the solvent adsorbent 3 in the thickness direction in each of the descending path portion Lb.
1 to supply the solvent to the solvent adsorbent 3 to adsorb the solvent.
A part A is provided, and the rising path portion La of the circulation path L
Solvent adsorption across the upper end of the descending path portion Lb
A horizontal path section as an upper path section for horizontally moving the body 3
The minute Lc, soluble to pass through a solvent adsorber 3 in the thickness direction
The desorbing section B is provided for supplying a desorption gas G2 to the agent adsorbent 3 to desorb the solvent from the solvent adsorbent 3. The solvent adsorbent 3 adsorbs the solvent in the gas G1 to be treated at normal temperature using activated carbon as an adsorbent, and heats it (100 to 100).
130 °), and specifically, as shown in FIG. 2, a fibrous activated carbon 3 formed into a felt shape.
A protective layer 3B made of a nonwoven fabric or the like for protecting the fibrous activated carbon 3A is superposed on the front and back of A. By the way,
To give a real example of the fibrous activated carbon 3A, the diameter of the activated carbon fiber is 10 to 20 μm, the thickness is 10 to 20 mm, and the basis weight is about 600 g / m ² . Although the drawing shows the protective layer 3B thickly for easy understanding, the protective layer 3B
The actual thickness of is very thin. The guide means is composed of a plurality of rollers 4 arranged at each path turning portion of the circulation path L to stretch the solvent adsorbent 3 (that is, to make the solvent adsorbent 3 flat) . The moving means comprises a motor 5 for driving one of the rollers 4. The adsorbing portion A is provided with the ascending path portion La and the descending path portion Lb.
Process to solvent adsorbent 3 in each of the supply duct 6 for supplying the untreated gas G1 from the outside of the circulation path L provided to the set discharging the treated gas g2 which has passed through the solvent adsorber 3
It is configured to provide a pre-gas exhaust duct 7, in more detail
As shown in FIG. 1, the gas receiving duct of the treated gas exhaust duct 7
The inlet 7a is connected to the ascending path portion La and the descending path portion Lb.
The inner surface of the circulation path of the planar solvent adsorbent 3
At the position corresponding to the facing position.
The gas supply port 6a of the supply duct 6 is replaced with its planar solvent adsorbent.
3 (ie, the gas facing the outer surface of the circulation path)
A planar solvent adsorption between the receiving port 7a and the gas supply port 6a
(In a state where the body 3 is sandwiched), the gas receiving port 6a receives the gas.
The processing target gas is applied to the solvent adsorbent 3 located at the entrance 7a.
The structure is such that the gas G1 is supplied and passed therethrough. The desorption
The part B is a supply duct 8 for supplying heated air as a desorption gas G2 to the solvent adsorbent 3 in the horizontal path portion Lc.
And a collection duct 9 for collecting the concentrated gas g1 that has passed through the solvent adsorbent 3 and supplying the concentrated gas g1 to the final processing apparatus 2. Specifically, as shown in FIG.
9 has a gas receiving port 9a in the horizontal path portion Lc in a planar shape.
Face the inner surface of the circulation path of the solvent adsorbent 3
Of the supply duct 8 at a position corresponding to the facing position of
The supply port 8a is placed outside the circulation path of the planar solvent adsorbent 3.
Surface (that is, the gas receiving port 9a and the gas
A state in which a planar solvent adsorbent 3 is sandwiched between the supply port 8a and the supply port 8a.
State), the gas supply port 8a corresponds to the gas receiving port 9a.
The gas as desorption gas G2 is applied to the solvent
It is structured to supply and pass hot air. Next, a processing method using the above-described solvent processing apparatus 1 will be described. The solvent adsorbent 3 is circulated by being driven by the motor 5, and in this state, the suction path La and the descending path Lb are sucked.
It supplies the processed gas G1 to the application section A, a horizontal through
The desorption gas G2 is supplied to the desorption portion B of the road portion Lc . As a result, the solvent in the gas to be treated G1 is increased in the rising path portion.
Solvent adsorber moving on each of La and descending path portion Lb
3 passes through in the thickness direction and is adsorbed by the solvent adsorbent 3 to remove the solvent from the gas G1 to be treated. On the other hand, the solvent adsorbed by the solvent adsorber 3 is a horizontal path portion L
The desorbed gas G2 that passes through the solvent adsorbent 3 moving in the direction c moves in the thickness direction and is desorbed by heating, is taken into the desorbed gas G2, and is discharged as a concentrated gas g1. According to the above embodiment, the solvent adsorbent 3 is mainly composed of the fibrous activated carbon 3A formed in a felt shape, and the gas to be treated G
Since the solvent in the gas to be treated G1 and the fibrous activated carbon 3A are brought into efficient contact with the passage of 1, the solvent adsorbent 3 can be thinned and heated and cooled while exhibiting good adsorption performance. can the excellent sex, therefore, desorption unit
Desorption by heating in B can be performed with a small amount of heating, and adsorption of the descending path portion Lb can be performed without requiring a special cooling configuration.
The cooling can be performed so that the adsorption in the section A can be performed efficiently.

[Alternative Embodiment] In the above embodiment, a felt-like fibrous activated carbon was used as an adsorbent for the solvent adsorbent 3.
The adsorbent may be powdery or granular. In short, any adsorbent may be used if it is formed in a belt shape using fine activated carbon (having a high adsorption and desorption speed).

[0010] In the claims, reference numerals are provided for convenience of comparison with the drawings, but the present invention is not limited to the configuration of the attached drawings by the entry.

[Brief description of the drawings]

FIG. 1 is a perspective view of a solvent processing apparatus.

FIG. 2 is a cross-sectional view of a solvent adsorbent.

FIG. 3 is a schematic configuration diagram of a solvent processing facility.

FIG. 4 is a front view of a conventional example.

[Explanation of symbols]

3 Solvent adsorber 4 Roller 7 Treated gas exhaust duct 7a Gas inlet 9 Condensed gas recovery duct 9a Gas inlet A Adsorbing section B Desorption section G1 Gas to be treated G2 Desorption gas L Adsorbent circulation path La ascending path section Lb descending Path part Lc Horizontal path part

Continuation of the front page (56) References JP-A-50-147480 (JP, A) JP-A-51-32482 (JP, A) JP-A-55-51418 (JP, A) JP-A-57-75121 (JP) , A) JP 46-32828 (JP, B1) (58) Fields investigated (Int. Cl. ⁷ , DB name) B01D 53/34 B01D 53/72

Claims (2)

(57) [Claims] 1. A belt-shaped solvent adsorber (3) is used as a path diverting part.
It is circulated and moved in a ring by the guide by the arranged roller (4).
Path section for linearly moving the solvent adsorbent (3) as the adsorbent circulation path
Minute (La) and the position directly facing the rising path portion (La).
Moving the solvent adsorbent (3) down linearly
Road part (Lb), their ascending path part (La) and descending
Solvent adsorption across one end of the path (Lb)
A horizontal path portion (Lc) for horizontally moving the body (3).
The adsorbent circulation path (L) is provided, and the solvent-containing gas (G) is supplied to the solvent adsorbent (3).
The solvent is adsorbed on the solvent adsorbent (3) through 1).
The gas receiving port (7a) of the treated gas exhaust duct (7) is
The gas adsorbent (3) faces one side of the
The treatment for the solvent adsorbent (3) located at the inlet (7a)
Elephant gas (G1) is supplied from the other side and passed
The suction section (A) is connected to the ascending path portion (La) and the descending path.
And a gas (G2) for desorbing is passed through the solvent adsorbent (3).
As a desorption section for desorbing the solvent from the solvent adsorbent (3)
The gas inlet (9a) of the concentrated gas recovery duct (9)
The gas is received while facing one side of the adsorbent (3).
Remove the solvent for the solvent adsorbent (3) located at the mouth (9a).
Desorption of the structure to supply and pass the gas (G2) from the other side
Part (B) is connected to the horizontal path portion (Lc).
Agent processing equipment. 2. The apparatus according to claim 2, wherein said horizontal path portion (Lc) is lifted
Upper ends of the path portion (La) and the descending path portion (Lb)
2. The solvent processing apparatus according to claim 1, which is an upper path portion extending between the two .