JP3258097B2 - Planar split projection element - Google Patents

Planar split projection element

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Publication number
JP3258097B2
JP3258097B2 JP30590192A JP30590192A JP3258097B2 JP 3258097 B2 JP3258097 B2 JP 3258097B2 JP 30590192 A JP30590192 A JP 30590192A JP 30590192 A JP30590192 A JP 30590192A JP 3258097 B2 JP3258097 B2 JP 3258097B2
Authority
JP
Japan
Prior art keywords
light
image
dove prism
plane
convex lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP30590192A
Other languages
Japanese (ja)
Other versions
JPH06130325A (en
Inventor
則司 大石
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Chemical Corp
Mitsubishi Rayon Co Ltd
Original Assignee
Mitsubishi Chemical Corp
Mitsubishi Rayon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Chemical Corp, Mitsubishi Rayon Co Ltd filed Critical Mitsubishi Chemical Corp
Priority to JP30590192A priority Critical patent/JP3258097B2/en
Publication of JPH06130325A publication Critical patent/JPH06130325A/en
Application granted granted Critical
Publication of JP3258097B2 publication Critical patent/JP3258097B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明はスリット露光方式のアナ
ログ複写機に使われる拡大、縮小機能をもつ面分割投影
素子に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plane-divided projection device having an enlargement / reduction function used in a slit exposure type analog copying machine.

【0002】[0002]

【従来の技術】スリット露光方式のアナログ複写機に
は、読取りライン上の複写体を感光体上に投影する投影
素子が使われており、とくに小型の複写機には屈折率分
布型棒状レンズの配列体であるロッドレンズアレイに代
表される面分割投影素子が便利に使われている。このよ
うな面分割投影素子は、コンパクトな光学系であり、そ
の組立や焦点距離の調整が行いやすいという長所がある
反面、等倍率の結像しか得られないため、拡大、縮小コ
ピーの必要な面分割投影素子とはならないという難点が
ある。
2. Description of the Related Art A slit exposure type analog copying machine uses a projection element for projecting a copy on a reading line onto a photoreceptor. A surface-divided projection element represented by a rod lens array, which is an array, is conveniently used. Such a surface-divided projection element is a compact optical system, and has the advantage of being easy to assemble and adjust the focal length. There is a drawback that it does not become a plane division projection element.

【0003】[0003]

【発明が解決しようとする課題】上述したごとく、ロッ
ドレンズアレイ等の面分割投影素子では、拡大、縮小機
能を付与することが極めて難しく、拡大、縮小機能を備
えた面分割投影素子の開発が待たれている。
As described above, it is extremely difficult to provide an enlargement / reduction function with a plane division projection element such as a rod lens array, and development of a plane division projection element having an enlargement / reduction function is required. I have been waiting.

【0004】[0004]

【課題を解決するための手段】そこで本発明者は、画像
の拡大、縮小機能を備えた面分割素子を開発することを
目的として検討した結果、本発明を完成したものであ
り、その要旨とするところは、ダブプリズム2つを、そ
の光反射面が外側となるように、対称型に組立たダブ
リズム組立体複数個を、その光反射面が対面するように
直線状に配列し、直線状に配列したダブプリズム組立体
の光入・出射端面に焦点距離の異なる2種の凸レンズ
を、光入射端側に配設する凸レンズの配列間隔Dと、光
出射端側に配設する凸レンズの配列間隔dとの比を、光
入射端側に配設する凸レンズの焦点距離と、光出射端側
に配設する凸レンズの焦点距離の比に等しくなるように
配設したことを特徴とする面分割投影素子にある。
SUMMARY OF THE INVENTION The present inventor has studied the purpose of developing a plane-splitting element having a function of enlarging and reducing an image, and as a result, has completed the present invention. to place, the two Dove prism, so the light reflection surface is outside, the assembly was double flop <br/> rhythm assembly plurality in symmetrical, straight as the light reflective surface facing And two types of convex lenses having different focal lengths are arranged on the light entrance / exit end faces of the Dove prism assembly linearly arranged. The ratio between the arrangement distance d of the convex lenses to be arranged and the focal length of the convex lens arranged on the light incident end side is equal to the ratio of the focal length of the convex lens arranged on the light exit end side. The surface-division projection element is characterized in that:

【0005】本発明で用いるダブプリズム3の断面を図
5に示した。このダブプリズムの軸との角αをもって入
射した光はダブプリズムの斜辺で、その光反射面側へ屈
折され、光反射面で反射した光は、ダブプリズムの光出
射面側の斜辺より、その軸とのなす角度αで反転方向に
出射する。
FIG. 5 shows a cross section of the Dove prism 3 used in the present invention. In hypotenuse of this double light dove prism which is incident with a corner α of the axis of the prism is refracted to the light reflecting surface, the light reflected by the light reflecting surface than hypotenuse of the light emitting surface side of the dove prism, the The light is emitted in the reverse direction at an angle α formed with the axis.

【0006】ダブプリズムの斜辺と底面とのなす角度は
θであり、この角度θが大きくなると、物体面より発し
た光がダブプリズムの光反射面で反射せず、直接出射面
から出射する迷光を生ずるようになり、得られる像のコ
ントラストが低下する。このような観点より、角度θは
θ≦90°−sin-1(1/n)、(ただし、nはダブプリズムを
構成する素材の屈折率)なる条件を満足させておくこと
が好ましい。
The angle between the oblique side and the bottom surface of the Dove prism is θ, and when this angle θ is large, the light emitted from the object surface is not reflected by the light reflection surface of the Dove prism, but becomes stray light directly emitted from the emission surface. And the contrast of the obtained image decreases. From such a viewpoint, it is preferable that the angle θ satisfy the condition of θ ≦ 90 ° −sin −1 (1 / n), where n is the refractive index of the material constituting the Dove prism.

【0007】またダブプリズムの巾方向の長さbと、軸
方向の底辺の長さaとの比a/bは[数1]を満足せし
めることにより、レンズの収差の少ない光軸付近が最も
明るくなる意味で好ましいが、全体的な像の明るさはa
/bが[数1]よりやや小さい方が明るくなる。また、
像の均一さはa/bに敏感に依存し、最適な値は、使用
するレンズの焦点距離やダブプリズム組立体の配列間隔
などによっても変わるため、実験あるいはコンピュータ
シュミレーション等を活用して[数1]の値よりやや小
さい最適値を決めるのがよい。
The ratio a / b of the length b in the width direction of the Dove prism to the length a in the base direction in the axial direction satisfies the expression (1). Although it is preferable in terms of increasing the brightness, the overall image brightness is a
If / b is slightly smaller than [Equation 1], the image becomes brighter. Also,
The uniformity of the image depends sensitively on a / b, and the optimal value varies depending on the focal length of the lens to be used, the arrangement interval of the Dove prism assembly, and the like. It is preferable to determine an optimum value slightly smaller than the value of [1].

【数1】 (Equation 1)

【0008】図4は本発明で用いるダブプリズム組立体
の斜視図であり、同図中8は2つのダブプリズムを接合
する黒色接着剤による接合面である。
FIG. 4 is a perspective view of a Dove prism assembly used in the present invention. In FIG. 4, reference numeral 8 denotes a joining surface made of a black adhesive for joining two Dove prisms.

【0009】レンズアレイにて構成されたライン結像素
子では、各ユニットが正立像を結ぶことが、つながりの
あるライン像を結像させるための必須条件となる。ただ
し、この正立像の条件はライン結像素子のライン方向で
のみ成り立てば十分であるため、本発明ではライン方向
ダブプリズムの像反転作用を使ってレンズの負担を低
減し、色収差の少ない、かつ、組立容易なライン結像素
子とすることに成功した。本発明ではライン方向と垂直
な方向には像は倒立するが、正立像が必要な場合は、鏡
を使って像を反転し、正立像に変えて用いればよい。
In a line imaging element constituted by a lens array, it is an essential condition that each unit forms an erect image in order to form a connected line image. However, since the condition of the erect image is sufficient if the condition is satisfied only in the line direction of the line imaging element, the present invention reduces the load on the lens by using the image inverting action of the Dove prism in the line direction, and reduces chromatic aberration. In addition, it succeeded in making the line imaging element easy to assemble. In the present invention, the image is inverted in the direction perpendicular to the line direction. However, if an erect image is required, the image may be inverted using a mirror and changed to an erect image.

【0010】図1は本発明の面分割投影素子のxz面と
その結像機構を示す平面図であり、図2はそのyz面の
平面図と結像機構を示す図であり、図3はその斜視図で
ある。これら図中の符号のうち、1はダブプリズム組立
体の光入射端に設けた凸レンズを、2はその光出射端に
設けた凸レンズを、3はダブプリズムであり、4は遮光
部材、5は物体面、6は像面を示す。物体面5、像面6
はそれぞれの凸レンズからの焦点距離だけ離れた位置に
あり、y方向には図3に示すごとく倒立像が結像し、x
方向ではダブプリズム3の働きで図3に示すごとく正立
像が結像する。
FIG. 1 is a plan view showing an xz plane and an image forming mechanism of the surface-divided projection element of the present invention, FIG. 2 is a plan view showing the yz plane and an image forming mechanism, and FIG. It is the perspective view. Of the reference numerals in these figures, 1 is a convex lens provided at the light incident end of the dove prism assembly, 2 is a convex lens provided at the light output end, 3 is a dove prism, 4 is a light shielding member, and 5 is a light shielding member. The object plane 6 indicates an image plane. Object plane 5, image plane 6
Are located at positions separated by a focal distance from the respective convex lenses, an inverted image is formed in the y direction as shown in FIG.
In the direction, the erect image is formed by the action of the Dove prism 3 as shown in FIG.

【0011】説明を分かりやすくするために、具体的な
実施例を示す。底辺長20mm、底辺巾5mm、高さ10mm、斜
辺角θ=45°の2つのポリメチルメタクリレート製ダブ
プリズムを上底面が合うように黒色接着剤にて接合した
ダブプリズム組立体4個と、焦点距離F=60mmの凸レン
ズ(A) 4個と、焦点距離f=45mmの凸レンズ(B) 4個を
用意し、ダブプリズム組立体4個を、図1に示すごとく
厚さ6.6mm の遮光部材4をダブプリズム組立体間に配し
て組立てた。次に凸レンズ(A) は2個を光軸が中心にな
るように10mm×20mmの長方形に切り、残りの2個はこの
半分の10mm×10mmに切って図1のように入射側に軸間隔
D=20mmで配設し、さらに凸レンズ(B)は10mm×15mmの
長方形に切って、出射側に軸間隔d=15mmで配設して、
本発明の面分割投影素子とする。
To make the description easier to understand, a specific embodiment will be described. Two polymethyl methacrylate dove prisms having a base length of 20 mm, a base width of 5 mm, a height of 10 mm, and a hypotenuse angle of θ = 45 ° were joined with a black adhesive so that the top and bottom surfaces matched.
Four Dove prism assemblies, four convex lenses (A) having a focal length of F = 60 mm, and four convex lenses (B) having a focal length of f = 45 mm are prepared. The four Dove prism assemblies are shown in FIG. The light-shielding member 4 having a thickness of 6.6 mm was assembled between the Dove prism assemblies. Next, the convex lens (A) is cut into two 10mm x 20mm rectangles with the optical axis at the center, and the other two are cut into half of this, 10mm x 10mm. D = 20 mm, and the convex lens (B) is cut into a rectangle of 10 mm × 15 mm, and is arranged at the output side with an axial distance d = 15 mm.
This is a surface-division projection element of the present invention.

【0012】図1により本発明の面分割投影素子のxz
面内の結像機構について説明する。まず、凸レンズ(A)
アレイの要素内に含まれる単レンズ(A) の光軸と物体面
5との交点を0とし、レンズ(B) アレイの要素内に含ま
れる単レンズ(B) の光軸と像面6との交点を0'とする。
物体面5上の点0よりx1の距離離れた点x1より発した光
は凸レンズ(A) に入り、凸レンズ(A) の作用で光軸(z
軸)と角度−tan-1(x1/F) をなす平行光に変換される
(ただし、Fは凸レンズ(A) の焦点距離を示す)。次い
ダブプリズムの作用により、この光は光軸とのなす角
度tan-1(x1/F) をなす平行光に変換され、凸レンズ(B)
の作用によって、像面6上の点0'からx1'=x1×f/F だ
け離れた距離に結像する(ただし、fは凸レンズ(B) の
焦点距離を示す)。
FIG. 1 shows the xz of the surface-divided projection element of the present invention.
The in-plane imaging mechanism will be described. First, the convex lens (A)
The intersection point between the optical axis of the single lens (A) included in the array element and the object plane 5 is set to 0, and the optical axis of the single lens (B) included in the array element and the image plane 6 are set to zero. Is 0 '.
Light emitted from the distance apart points x 1 of x 1 from the point 0 on the object surface 5 enters the convex lens (A), the optical axis by the action of the convex lens (A) (z
Axis) and is converted into parallel light having an angle of −tan −1 (x 1 / F) (where F indicates the focal length of the convex lens (A)). Then, due to the action of the Dove prism, this light is converted into a parallel light that forms an angle tan -1 (x 1 / F) with the optical axis, and the convex lens (B)
The image is formed at a distance x 1 ′ = x 1 × f / F from the point 0 ′ on the image plane 6 (where f indicates the focal length of the convex lens (B)).

【0013】すなわち、像面上の像は、像面上の原点0
が結像面の原点0'に移ったf/F 倍の縮小像として結像す
る。隣り合う凸レンズ間の距離は物体面側でD(=20m
m)であるのに対し、像面側ではd(=15mm)となって
おり、d/D =f/F (3/4 倍)であるから、隣り合う凸レ
ンズの投影する縮小像はずれを生ずることなく、図3に
示すごとき連続像として結像する。
That is, the image on the image plane has an origin 0 on the image plane.
Is formed as a reduced image of f / F times moved to the origin 0 'of the image plane. The distance between adjacent convex lenses is D (= 20m
m), d (= 15 mm) on the image plane side, and d / D = f / F (3/4 times), so that the reduced images projected by the adjacent convex lenses are shifted. Instead, the image is formed as a continuous image as shown in FIG.

【0014】図2は本発明の面分割投影素子のyz面の
結像機構を説明する図である。凸レンズ(A) および凸レ
ンズ(B) はタンデムに使われていることより、その倍率
はf/F (3/4倍)の倒立像となる(図3参照)。
FIG. 2 is a view for explaining an image forming mechanism on the yz plane of the plane division projection element of the present invention. Since the convex lens (A) and the convex lens (B) are used in tandem, the magnification becomes an inverted image of f / F (3/4 times) (see FIG. 3).

【0015】すなわち各投影要素については、(イ) レン
ズ(A) による位置−角度変換、(ロ)ダブプリズムによる
xz面内の角度反転、(ハ) 凸レンズ(B) による角度−位
置変換、によってy方向のみ倒立したf/F 倍像が得ら
れ、これら像間の間隔f/F (d/D)倍に縮小されるため、
全体として倒立したf/F 倍の連続した倒立像が得られ
る。また、本面分割投影素子は物体面と結像面とを逆に
することにより、F/f 倍の拡大投影素子として使うこと
もできる。
That is, for each projection element, (a) position-angle conversion by the lens (A), (b) angle inversion in the xz plane by the Dove prism, and (c) angle-position conversion by the convex lens (B) Inverted f / F images are obtained only in the y direction, and the distance between these images is reduced to f / F (d / D) times.
As a whole, a continuous inverted image of f / F times inverted can be obtained. Also, the main-plane split projection element can be used as an F / f-fold enlarged projection element by reversing the object plane and the image plane.

【0016】図1の面分割投影素子では、像側の凸レン
ズの光軸が、物体側の凸レンズの光軸に比べて、両端の
レンズでd/2 ずつ内側に移動し、縮小像を投影してい
る。このように1組の凸レンズアレイとダブプリズム組
立体の配列体とを組合せた本発明の面分割投影素子の投
影像の縮小長さは投影側のレンズアレイのピッチが限界
である。従って、凸レンズとダブプリズム組立体光学ユ
ニットの配列数が多いほど、その投影素子の縮小倍率の
限界も大きくなる。一方、光学ユニットの配列数を少な
くするほど、面分割して投影することによる装置の小型
化(投影距離の短縮)の効果が薄くなるため、あまり配
列数を少なくすることはできない。
In the plane-divided projection device shown in FIG. 1, the optical axis of the convex lens on the image side is moved inward by d / 2 by the lenses at both ends with respect to the optical axis of the convex lens on the object side to project a reduced image. ing. As described above, the pitch of the projection side lens array is limited to the reduction length of the projected image of the surface division projection element of the present invention in which one set of the convex lens array and the array of the Dove prism assembly are combined. Therefore, as the number of arrays of the convex lens and the Dove prism assembly optical unit increases, the limit of the reduction magnification of the projection element also increases. On the other hand, as the number of arrays of the optical units is reduced, the effect of miniaturizing the device (shortening of the projection distance) by projecting by dividing the plane becomes thinner, so that the number of arrays cannot be reduced much.

【0017】図6は本発明の面分割投影素子の他の一例
のxz面の平面図である。この例においては投影素子の
結像の明るさを向上させるため、図1で用いたものと同
ダブプリズム組立体の配列間隔をなくし、薄い遮光板
7を挿入した型とし、凸レンズアレイ9、10としては単
純な凸レンズの配列体とはせず、単レンズの一部を少し
ずつ位置を変えながら切り取った形の凸レンズを用い
た。具体的には、凸レンズ9の焦点距離Fは60mm、凸レ
ンズ10の焦点距離fは40mmとし、凸レンズアレイ9の凸
レンズ(A) の光軸間距離Dを12mm、凸レンズアレイ10の
凸レンズ(B) の光軸間距離dを8mmとすると、この投影
素子による投影像の縮小倍率は2/3 、拡大倍率は3/2 と
なる。
FIG. 6 is a plan view of an xz plane of another example of the surface division projection element of the present invention. In this example, in order to improve the brightness of the image formed by the projection elements, the same array of Dove prism assemblies as those used in FIG. Instead of using a simple array of convex lenses, a convex lens in which a part of a single lens was cut out while changing its position little by little was used. More specifically, the focal length F of the convex lens 9 is 60 mm, the focal length f of the convex lens 10 is 40 mm, the distance D between the optical axes of the convex lens (A) of the convex lens array 9 is 12 mm, and the convex lens (B) of the convex lens array 10 is Assuming that the distance d between the optical axes is 8 mm, the reduction magnification of the projected image by this projection element is 2/3 and the enlargement magnification is 3/2.

【0018】図7はダブプリズム組立体を8個用いた本
発明の面分割投影素子の他の実施例を示す平面図であ
り、この投影素子の縮小倍率は87.5%(拡大倍率では11
4 %)である。
FIG. 7 is a plan view showing another embodiment of the surface-divided projection element according to the present invention using eight Dove prism assemblies. The reduction magnification of this projection element is 87.5% (the magnification is 11%).
4%).

【0019】図1および図6に示した投影素子において
は、レンズアレイ1、2、9、10の各単レンズの光軸間
隔を一定に並べたものを用いたが、これは本発明の面分
割投影素子の必要条件ではなく、物体面側と結像面側に
対応する凸レンズの光軸間隔が、それぞれの凸レンズの
焦点距離の比、すなわち縮小、拡大倍率に等しければ、
場所によってその間隔が異なってもよい。
In the projection elements shown in FIGS. 1 and 6, the single lenses of the lens arrays 1, 2, 9, and 10 are arranged with a constant optical axis interval, which is an aspect of the present invention. Not the necessary condition of the divided projection element, but if the optical axis interval of the convex lens corresponding to the object plane side and the imaging plane side is equal to the ratio of the focal length of each convex lens, that is, the reduction, the enlargement magnification,
The interval may be different depending on the location.

【0020】本発明の面分割投影素子は、従来用いられ
ていたロッドレンズアレイ、三層レンズアレイを用いた
投影素子では不可能であった、縮小、拡大像を結像しう
る投影素子となし得た点、および色収差の少ない結像が
できるという点に大きな特徴を有するものである。
The surface-divided projection device of the present invention is not a projection device capable of forming a reduced or enlarged image, which was impossible with a projection device using a rod lens array or a three-layer lens array conventionally used. This is a major feature in that the obtained point and that an image with less chromatic aberration can be formed.

【0021】[0021]

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の面分割投影素子のxz面の結像機構を
示す平面図である。
FIG. 1 is a plan view showing an image forming mechanism on an xz plane of a surface-division projection element of the present invention.

【図2】図1の投影素子のyz面の結像機構を示す平面
図である。
FIG. 2 is a plan view showing an imaging mechanism on the yz plane of the projection element of FIG. 1;

【図3】図1の投影素子をセンサとした例を示す斜視図
である。
FIG. 3 is a perspective view showing an example in which the projection device of FIG. 1 is used as a sensor.

【図4】ダブプリズムの光伝送機構を示す平面図であ
る。
FIG. 4 is a plan view showing an optical transmission mechanism of a Dove prism.

【図5】ダブプリズム組立体の斜視図である。FIG. 5 is a perspective view of a Dove prism assembly.

【図6】本発明の面分割投影素子の他の例のxz面の平
面図である。
FIG. 6 is a plan view of an xz plane of another example of the plane division projection element of the present invention.

【図7】本発明の面分割投影素子の他の例のxz面の平
面図である。
FIG. 7 is a plan view of an xz plane of another example of the surface division projection element of the present invention.

【符号の説明】[Explanation of symbols]

1,2,9,10 … 凸レンズアレイ 3 ………………… ダブプリズム 4 ………………… 遮光体部 5 ………………… 物体面 6 ………………… 結像面 7 ………………… 遮光板 8 ………………… ダブプリズム接合面 11,12 …………… 凸レンズの光軸 Tc ………………… 共役長1, 2, 9, 10… Convex lens array 3… Dove prism 4… ………… Shielding body 5 …………… Object surface 6 …………… image plane 7 ..................... shielding plate 8 ..................... optical axis Tc ..................... conjugate length of Dove prism joining surfaces 11 and 12 ............... lens

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 ダブプリズム2つを、その光反射面が外
側となるように、対称型に組立たダブプリズム組立体複
数個を、その光反射面が互いに対面するように直線状に
配列し、この直線状に配列したダブプリズム組立体の光
入・出射端面に、焦点距離の異なる2種の凸レンズを光
入射端側に配設する凸レンズの配列間隔D(レンズ軸間
距離)と、光出射端側に配設する凸レンズの光軸の配列
間隔d(レンズ軸間距離)との比を、光入射端側に配設
する凸レンズの焦点距離と、光出射端側に配設する凸レ
ンズの焦点距離の比に等しくなるように配設したことを
特徴とする面分割投影素子。
1. A with two Dove prism, so the light reflection surface is outside, the assembly was Dove prism assembly plurality symmetrically type, arranged in a straight line as the light reflecting surface face each other The arrangement interval D (distance between lens axes) of a convex lens in which two types of convex lenses having different focal lengths are arranged on the light incident end side on the light entrance / exit end faces of the linear Dove prism assembly. The ratio of the arrangement distance d (inter-lens axis distance) of the optical axes of the convex lenses disposed on the light exit end side is determined by the focal length of the convex lens disposed on the light incident end side and the convex lens disposed on the light exit end side. A plane-segmented projection element, which is disposed so as to be equal to a focal length ratio.
JP30590192A 1992-10-21 1992-10-21 Planar split projection element Expired - Fee Related JP3258097B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30590192A JP3258097B2 (en) 1992-10-21 1992-10-21 Planar split projection element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30590192A JP3258097B2 (en) 1992-10-21 1992-10-21 Planar split projection element

Publications (2)

Publication Number Publication Date
JPH06130325A JPH06130325A (en) 1994-05-13
JP3258097B2 true JP3258097B2 (en) 2002-02-18

Family

ID=17950665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30590192A Expired - Fee Related JP3258097B2 (en) 1992-10-21 1992-10-21 Planar split projection element

Country Status (1)

Country Link
JP (1) JP3258097B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005015743B4 (en) * 2005-04-06 2018-08-23 Dr. Johannes Heidenhain Gmbh Scanning unit for a position measuring device for optically scanning a material measure and position measuring device

Also Published As

Publication number Publication date
JPH06130325A (en) 1994-05-13

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