JP3250948B2 - Piezoelectric vibrator - Google Patents
Piezoelectric vibratorInfo
- Publication number
- JP3250948B2 JP3250948B2 JP25162995A JP25162995A JP3250948B2 JP 3250948 B2 JP3250948 B2 JP 3250948B2 JP 25162995 A JP25162995 A JP 25162995A JP 25162995 A JP25162995 A JP 25162995A JP 3250948 B2 JP3250948 B2 JP 3250948B2
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- detection
- branch
- vibration
- vibrating
- branches
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Description
【0001】[0001]
【発明が属する技術分野】本発明は、角速度センサ用圧
電振動体に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibrator for an angular velocity sensor.
【0002】[0002]
【従来の技術】カメラのブレ補正、自動車のナビゲーシ
ョン、移動体の姿勢制御に用いられる角速度センサが種
々提案されている。2. Description of the Related Art Various angular velocity sensors have been proposed for use in camera shake correction, car navigation, and attitude control of moving bodies.
【0003】例えば、米国特許明細書第4524619
号や特開平3−291517号などは、駆動側の音叉形
状の振動部と音叉形状の検出側振動部が一体化され、圧
電基板が全体としてH字状となった音叉振動モードも利
用した圧電振動体を有する角速度センサが提案されてい
る。For example, US Pat. No. 4,524,619.
And Japanese Patent Application Laid-Open No. 3-291517 disclose a piezoelectric device that also utilizes a tuning fork vibration mode in which a driving-side tuning-fork-shaped vibrating portion and a tuning-fork-shaped detecting-side vibrating portion are integrated, and the piezoelectric substrate is entirely H-shaped. An angular velocity sensor having a vibrating body has been proposed.
【0004】また、本出願人は、圧電振動体の機械的な
保持と外部処理回路との電気的な接続を、各振動とは無
関係ない振動枝である中間保持枝で達成する圧電振動体
を提案した(図5、図6参照)。Further, the present applicant has disclosed a piezoelectric vibrating body which achieves mechanical holding of the piezoelectric vibrating body and electrical connection with an external processing circuit by an intermediate holding branch which is a vibration branch independent of each vibration. It was proposed (see FIGS. 5 and 6).
【0005】図5、図6に示すように、圧電振動体は、
全体略形状が「王」字状の圧電基板を用いている。そし
て、この圧電振動体の結合基部20の両端部に、駆動側
振動部1Aと検出側振動部1Bとが配置されている。こ
の駆動側振動部1Aは、2つの駆動用振動枝3、4と入
力保持枝5とから成り、検出側振動部1Bは、2つの検
出用振動枝6、7と出力保持枝8とから構成されてい
る。尚、入力保持枝5は、駆動用振動枝3と4との中間
に配置され、出力保持枝8は、検出用振動枝6と7との
中間に配置されており、以下、中間保持枝5、8とい
う。As shown in FIGS. 5 and 6, the piezoelectric vibrator is
A piezoelectric substrate whose overall shape is a “king” shape is used. The drive-side vibrating section 1A and the detection-side vibrating section 1B are disposed at both ends of the coupling base 20 of the piezoelectric vibrator. The driving-side vibrating section 1A includes two driving vibrating branches 3 and 4 and an input holding branch 5, and the detecting-side vibrating section 1B includes two detecting vibrating branches 6 and 7 and an output holding branch 8. Have been. The input holding branch 5 is arranged between the driving vibration branches 3 and 4, and the output holding branch 8 is arranged between the detection vibration branches 6 and 7. , 8.
【0006】また、駆動用振動枝3、4の4つの側面に
は駆動電極31〜34、41〜44が形成されている。[0006] Drive electrodes 31 to 34 and 41 to 44 are formed on four side surfaces of the drive vibrating branches 3 and 4.
【0007】また、検出用振動枝6、7の両主面には、
互いに平行に延びる2つの検出電極61〜63、71〜
74が形成されている。例えば、検出用振動枝6の一方
主面には検出電極61、62が、他方主面には検出電極
63、64が、検出用振動枝7の一方主面には検出電極
71、72が、他方主面には検出電極73、74が夫々
形成されている。On both main surfaces of the detecting vibrating branches 6 and 7,
Two detection electrodes 61-63, 71-
74 are formed. For example, detection electrodes 61 and 62 are provided on one main surface of the detection vibrating branch 6, detection electrodes 63 and 64 are provided on the other main surface, and detection electrodes 71 and 72 are provided on one main surface of the detection vibrating branch 7. On the other main surface, detection electrodes 73 and 74 are formed, respectively.
【0008】また、中間保持枝5には、駆動電極31〜
34、41〜44に所定信号を与えるための駆動入力電
極51、52が形成されており、特に、一方側主面に
は、駆動入力電極51が形成され、他方側主面には、駆
動入力電極52が形成されている。The intermediate holding branch 5 has driving electrodes 31 to
Drive input electrodes 51 and 52 for applying a predetermined signal to the drive input electrodes 34, 41 to 44 are formed. In particular, a drive input electrode 51 is formed on one main surface, and a drive input electrode 51 is formed on the other main surface. An electrode 52 is formed.
【0009】また、中間保持枝8には、検出電極61〜
64、71〜74からの信号を導出するための検出出力
電極81、82が形成されており、特に、一方側主面に
は、検出出力電極81が形成され、他方側主面には、検
出出力電極82が形成されている。The intermediate holding branches 8 have detection electrodes 61-61.
The detection output electrodes 81 and 82 for deriving signals from 64, 71 to 74 are formed. In particular, the detection output electrode 81 is formed on one main surface, and the detection output electrode 81 is formed on the other main surface. An output electrode 82 is formed.
【0010】さらに、結合基部20、駆動用振動枝3、
4には、駆動入力電極51と駆動電極31、33、4
2、44とを電気的に接続するために、引き回し導体2
1、35、46が形成され、同様に、駆動入力電極52
と駆動電極32、34、41、43とを電気的に接続す
るために、引き回し導体22、36、45が形成されて
いる。Further, the coupling base 20, the driving vibration branch 3,
4, the drive input electrode 51 and the drive electrodes 31, 33, 4
2 and 44 are electrically connected to each other.
1, 35, 46 are formed, and the drive input electrodes 52
In order to electrically connect the drive electrodes 32, 34, 41, and 43, routing conductors 22, 36, and 45 are formed.
【0011】同様に、結合基部20、検出用振動枝6、
7には、検出出力電極81と検出電極61、71、6
4、74とを電気的に接続するために、引き回し導体2
3、26、65が形成され、同様に、検出出力電極82
と検出電極62、72、63、73とを電気的に接続す
るために、引き回し導体24、25、75が形成されて
いる。Similarly, the coupling base 20, the detecting vibrating branch 6,
7 includes a detection output electrode 81 and detection electrodes 61, 71, 6
4 and 74 to electrically connect them to each other.
3, 26, 65 are formed, and similarly, the detection output electrode 82
In order to electrically connect the detection electrodes 62, 72, 63, and 73, routing conductors 24, 25, and 75 are formed.
【0012】このような構造の圧電振動体は、プリント
配線基板や収容ケースなどに実装されることになるが、
この2つの中間保持枝5、8の裏面と基板やケースとの
間に導電性スペーサー部材を介在させて簡単に固定する
ことができる。同時に、外部処理回路との電気的な接続
も、この2つの中間保持枝5、8の裏面に形成された駆
動入力電極52、検出出力電極82においては、導電性
スペーサー部材を介して接続でき、また、中間保持枝
5、8の一方主面に形成された駆動入力電極51、検出
出力電極81においては、ワイヤボンディング細線など
を介して接続することができる。The piezoelectric vibrator having such a structure is mounted on a printed wiring board, a housing case, or the like.
The spacer can be easily fixed by interposing a conductive spacer member between the back surfaces of the two intermediate holding branches 5 and 8 and the substrate or the case. At the same time, the electrical connection with the external processing circuit can be made via the conductive spacer member at the drive input electrode 52 and the detection output electrode 82 formed on the back surfaces of the two intermediate holding branches 5 and 8, The drive input electrode 51 and the detection output electrode 81 formed on one main surface of the intermediate holding branches 5 and 8 can be connected via a wire bonding thin wire or the like.
【0013】動作的には、駆動のための信号が駆動入力
電極51、52を介して、駆動側振動部1Aの駆動電極
31〜34、41〜44に与えられると、駆動側振動部
1Aに音叉振動が発生する。この状態で、圧電振動体に
回転運動(角速度)が加わると、この音叉振動とコリオ
リ力が作用して、駆動側振動部1Bの振動枝6、7に、
回転運動の角速度に比例した振幅で、圧電基板の平面に
対して垂直な方向に、交互に上下振動(バタ足振動やベ
ッディング振動)が発生する。この振動を以下バタ足振
動という。Operationally, when a driving signal is given to the drive electrodes 31 to 34 and 41 to 44 of the drive side vibrating section 1A via the drive input electrodes 51 and 52, the drive side vibrating section 1A is driven. Tuning fork vibration occurs. In this state, when a rotational motion (angular velocity) is applied to the piezoelectric vibrator, the tuning fork vibration and the Coriolis force act on the piezoelectric vibrator, so that the vibrating branches 6 and 7 of the drive-side vibrating portion 1B
Vertical vibration (fluttering vibration or bedding vibration) is generated alternately in a direction perpendicular to the plane of the piezoelectric substrate with an amplitude proportional to the angular velocity of the rotational motion. This vibration is hereinafter referred to as fluttering vibration.
【0014】このバタ足振動は、振動の方向、圧電基板
の分極方向(水晶基板においては結晶軸方向)によって
決定された電界が発生することになり、この電界を駆動
側振動部1Bの検出電極61〜64、71〜74で電気
信号に変換することにより、所定角速度に対応した検出
信号を検出出力電極81、82間から抽出することがで
きる。尚、この検出信号を外部処理回路で処理すること
によって回転運動の角速度を求めることができる。In the fluttering vibration, an electric field is generated which is determined by the direction of the vibration and the polarization direction of the piezoelectric substrate (the crystal axis direction in the case of a quartz substrate). By converting the electric signals into electric signals at 61 to 64 and 71 to 74, a detection signal corresponding to a predetermined angular velocity can be extracted from between the detection output electrodes 81 and 82. Incidentally, the angular velocity of the rotational motion can be obtained by processing this detection signal by an external processing circuit.
【0015】即ち、駆動側振動部1Aには、主に圧電基
板の平面方向に音叉振動が発生し、検出側振動部1Bに
は、主に圧電基板の平面方向と直交する上下方向にバタ
足振動が発生することになる。That is, the tuning-fork vibration is generated mainly in the plane direction of the piezoelectric substrate in the driving-side vibrating section 1A, and the flapping feet are generated in the detecting-side vibration section 1B mainly in the vertical direction orthogonal to the plane direction of the piezoelectric substrate. Vibration will occur.
【0016】このような圧電振動体1を角速度センサと
して用いる場合は、上述のように外部の処理回路と接続
するために、プリント配線基板に実装したり、ケースに
収納するが、配線基板やケースなどとの固定構造部分が
振動モードに悪影響を与えず、安定して且つ簡単に行え
ることが望ましい。When such a piezoelectric vibrator 1 is used as an angular velocity sensor, it is mounted on a printed wiring board or housed in a case in order to connect to an external processing circuit as described above. It is desirable that the fixed structure portion, such as, does not adversely affect the vibration mode and can be performed stably and easily.
【0017】また、圧電振動体1に与えられる信号、導
出される信号のための入出接続方法も簡単で且つ安定し
て行えることが重要である。同時に、製造工程が簡単で
あることが重要である。It is also important that the input / output connection method for the signal applied to the piezoelectric vibrating body 1 and the derived signal be made simple and stable. At the same time, it is important that the manufacturing process is simple.
【0018】この製造方法において、概略「王」字状の
圧電基板は、例えば矩形状の圧電基板の長手方向の両端
面から、駆動側振動部1Aを構成する振動枝3、4、中
間保持枝5の3つの枝を仕切るように、また、検出側振
動部1Bを構成する振動枝6、7、中間保持枝8の3つ
の枝を仕切るように、夫々に2つの切り込みを形成すれ
ばよい。しかも、この切り込みはワイヤソーなどで形成
することができるため、製造方法が比較的に簡単である
と言える。In this manufacturing method, the piezoelectric substrate having a substantially "O" shape is composed of, for example, the vibrating branches 3 and 4 constituting the driving-side vibrating portion 1A and the intermediate holding branches from both end surfaces in the longitudinal direction of the rectangular piezoelectric substrate. In this case, two cuts may be formed so as to partition the three branches of No. 5 and to partition the three branches of the vibrating branches 6, 7 and the intermediate holding branch 8, which constitute the detection-side vibrating portion 1B. In addition, since the cut can be formed with a wire saw or the like, it can be said that the manufacturing method is relatively simple.
【0019】[0019]
【発明が解決しようとする課題】しかし、本発明者等が
種々実験・検討したところ、上述の圧電振動体1におい
て、検出側振動部1Bで発生するバタ足振動が、結合基
部20や駆動側振動部1Aにまで伝達しやすい。駆動側
振動部1Bへの影響は、検出側振動部1Bの振動枝6と
駆動側振動部1Aの振動枝3とが、また、振動枝7と振
動枝4とが夫々同一直線上に存在していることによるも
のと考えられる。However, according to various experiments and studies conducted by the present inventors, in the above-described piezoelectric vibrator 1, the fluttering vibration generated in the detecting-side vibrating portion 1B is reduced by the coupling base 20 and the driving side. It is easy to transmit to the vibration part 1A. The influence on the drive side vibrating portion 1B is that the vibration branch 6 of the detection side vibration portion 1B and the vibration branch 3 of the drive side vibration portion 1A, and the vibration branch 7 and the vibration branch 4 are on the same straight line. It is thought that it is due to.
【0020】また、振動枝6、7とが交互にバタ足振動
するために、結合基部20の剛性不足により、結合基部
20にネジレ応力が働いてしまうという問題があった。
いずれも、結合基部20での剛性を高めることによっ
て、同時に解決するもののである。ここで、結合基部2
0の面積を増加させて剛性を高めるために、長手方向の
寸法を大きくすると、駆動側振動部1Aと検出側振動部
1Bとの距離が離れることになり、駆動側振動部1Aで
発生した音叉振動を、検出側振動部1Bでバタ足振動に
変換させる効率が低下してしまう。また、幅方向の寸法
を大きくすると、駆動側振動部1Aと検出側振動部1B
に比較して、結合基部20が幅方向に突出してしまい、
特に、圧電基板の全体形状が異形状となり、製造方法が
複雑となる。Further, since the vibrating branches 6 and 7 alternately vibrate in a fluttering manner, there is a problem that the torsional stress acts on the coupling base 20 due to insufficient rigidity of the coupling base 20.
In any case, the rigidity of the joint base 20 is increased to solve the problem at the same time. Here, the bonding base 2
If the dimension in the longitudinal direction is increased in order to increase the area of No. 0 and increase rigidity, the distance between the driving-side vibrating portion 1A and the detecting-side vibrating portion 1B is increased, and the tuning fork generated in the driving-side vibrating portion 1A. The efficiency of converting the vibration into the fluttering vibration in the detection-side vibration unit 1B is reduced. When the dimension in the width direction is increased, the driving-side vibrating portion 1A and the detecting-side vibrating portion 1B
In comparison, the binding base 20 protrudes in the width direction,
In particular, the overall shape of the piezoelectric substrate becomes different, and the manufacturing method becomes complicated.
【0021】本発明は上述の課題に鑑みて案出されたも
のであり、その目的は実質的に結合基部での剛性を高め
ることができ、これより、検出側振動部1Bのバタ足振
動の損失を低下させ、しかも製造方法の簡単な圧電振動
体を提供するものである。The present invention has been devised in view of the above-mentioned problems, and its purpose is to substantially increase the rigidity at the coupling base, thereby reducing the vibration of the fluttering foot vibration of the detection-side vibrating portion 1B. An object of the present invention is to provide a piezoelectric vibrator that reduces loss and is simple in manufacturing method.
【0022】[0022]
【問題点を解決するための手段】本発明は、音叉振動す
る2つの駆動振動枝及び該2つの駆動振動枝間に形成さ
れた入力保持枝とからなる駆動側振動部と、バタ足振動
する2つの検出振動枝及び該2つの検出振動枝間に形成
された出力保持枝、該検出振動枝及び出力保持枝と同一
方向に延びる補強枝を有する検出側振動部とを、矩形状
の結合基部の対向しあう一対の長手方向の端面に夫々一
体的に配置させるとともに、前記駆動側振動部の入力保
持枝及び駆動振動枝に音叉振動を発生させるための駆動
入力電極及び駆動電極をそれぞれ形成し、前記検出振動
部の出力保持枝及び検出振動枝にバタ足振動を検出させ
るための検出出力電極及び検出電極をそれぞれ形成して
成り、前記入力保持枝及び前記出力保持枝が基板に接合
される角速度センサ用圧電振動体であって、前記駆動側
振動部、検出側振動部、結合基部の幅を夫々同一にした
角速度センサ用圧電振動体である。SUMMARY OF THE INVENTION According to the present invention, a drive-side vibrating portion comprising two driving vibrating branches that vibrate a tuning fork and an input holding branch formed between the two driving vibrating branches; A detection-side vibrating section having two detection vibration branches, an output holding branch formed between the two detection vibration branches, and a reinforcing branch extending in the same direction as the detection vibration branch and the output holding branch; And a drive input electrode and a drive electrode for generating a tuning fork vibration on the input holding branch and the drive vibration branch of the drive-side vibrating portion, respectively. A detection output electrode and a detection electrode for detecting fluttering vibration on the output holding branch and the detection vibration branch of the detection vibrating section, respectively, and the input holding branch and the output holding branch are joined to a substrate. Angular velocity sensor A use piezoelectric vibrator, the driving-side vibration unit, detecting side oscillating section, a piezoelectric vibrator for the angular velocity sensor and the width of the binding base and the same people each.
【0023】[0023]
【作用】本発明によれば、少なくとも検出側振動部に
は、バタ足振動する振動枝、圧電振動体の機械的な保持
及び電気的な接合を行う出力保持枝、さらに、補強枝が
形成されている。即ち、結合基部の幅は、実質的に補強
枝を付加した分だけ向上し、これによって結合基部の剛
性が向上する。According to the present invention, at least on the detecting side vibrating portion, a vibrating branch for fluttering vibration, an output holding branch for mechanically holding and electrically connecting the piezoelectric vibrating body, and a reinforcing branch are formed. ing. That is, the width of the coupling base is substantially increased by the addition of the reinforcing branch, thereby improving the rigidity of the coupling base.
【0024】また、この結合部、検出側振動部と、駆動
側振動部の幅が同一に設定されているため、圧電振動体
の全体形状が概略矩形状となる。従って、所定形状の圧
電基板を形成する場合には、圧電基板の長手方向の両端
部から、各枝に区画するように切り込み加工をするだけ
で、実際の圧電基板が形成されることになるため、製造
方法も複雑化することがなくなる。Further, since the widths of the coupling portion, the detection-side vibrating portion, and the drive-side vibrating portion are set to be the same, the overall shape of the piezoelectric vibrating member is substantially rectangular. Therefore, when a piezoelectric substrate having a predetermined shape is formed, an actual piezoelectric substrate is formed only by cutting the piezoelectric substrate from both ends in the longitudinal direction so as to be divided into branches. In addition, the manufacturing method does not become complicated.
【0025】以上のように、結合基部の剛性の向上によ
り、バタ足振動に起因する捩じれを有効に抑え、検出側
振動部での機械的共振尖鋭度Qが向上し、しかも、製造
方法の簡便さがそのまま維持できる。As described above, by improving the rigidity of the coupling base, the torsion caused by the fluttering foot vibration is effectively suppressed, the mechanical resonance sharpness Q at the detecting-side vibrating part is improved, and the manufacturing method is simplified. Can be maintained as it is.
【0026】[0026]
【発明の実施の形態】以下、本発明の圧電振動体を図面
を用いて説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a piezoelectric vibrator of the present invention will be described with reference to the drawings.
【0027】図1は本発明の圧電振動体の表面側の外観
斜視図であり、図2はその裏面側の斜視図であり、図3
は圧電振動体の駆動側振動部の電気的接続状況を説明す
る概略図であり、図4は圧電振動体の検出側振動部の電
気的接続状況を説明する概略図である。尚、図5、図6
と同一部分は同一記号で説明する。FIG. 1 is an external perspective view of the front side of the piezoelectric vibrator of the present invention, FIG. 2 is a perspective view of the rear side thereof, and FIG.
FIG. 4 is a schematic diagram illustrating an electrical connection state of a drive-side vibration unit of the piezoelectric vibrator, and FIG. 4 is a schematic diagram illustrating an electrical connection state of a detection-side vibration unit of the piezoelectric vibrator. 5 and 6
The same parts as those described above are described with the same symbols.
【0028】本発明の圧電振動体1は、駆動側振動部1
Aと検出側振動部1Bと結合基部2とから構成されてい
る。The piezoelectric vibrating body 1 of the present invention comprises a driving-side vibrating section 1
A, the detection-side vibrating portion 1B, and the coupling base portion 2.
【0029】圧電振動体1は、例えば水晶の結晶分極軸
に応じて所定カット、例えばZカットされた水晶基板な
どが例示できる。その他に所定方向に分極処理された圧
電性セラミック基板なども例示できる。The piezoelectric vibrator 1 may be, for example, a quartz substrate cut in a predetermined manner, for example, a Z-cut according to the crystal polarization axis of the quartz. Other examples include a piezoelectric ceramic substrate polarized in a predetermined direction.
【0030】結合基部2の対向しあう一対の端面(以
下、長手方向の端面という。)の一方側には、駆動側振
動部1Aが、他方側に検出側振動部1Bが夫々一体的に
配置されている。A driving-side vibrating portion 1A and a detecting-side vibrating portion 1B are integrally disposed on one side of a pair of opposed end surfaces (hereinafter, referred to as longitudinal end surfaces) of the coupling base portion 2 respectively. Have been.
【0031】駆動側振動部1Aは主に、2つの駆動用振
動枝3、4、入力保持枝5(駆動用振動枝3、4との中
間に位置するため以下、中間保持枝という)、2つの補
強枝91、92から成り、駆動振動枝3、4、中間保持
枝5、補強枝93、94は同一方向に延びている。そし
て、中間保持枝5を中心にして、幅方向側に振動枝3、
4、補強枝93、94が配置されている。The driving-side vibrating portion 1A mainly includes two driving vibrating branches 3 and 4 and an input holding branch 5 (hereinafter, referred to as an intermediate holding branch because it is located in the middle of the driving vibrating branches 3 and 4). The drive vibration branches 3 and 4, the intermediate holding branch 5, and the reinforcement branches 93 and 94 extend in the same direction. Then, with the center holding branch 5 as a center, the vibration branch 3
4. The reinforcing branches 93 and 94 are arranged.
【0032】また、検出側振動部1Bは主に、2つの検
出用振動枝6、7、出力保持枝8(検出用振動枝6、7
の中間に位置するため以下、中間保持枝という)、2つ
の補強枝96、97から成り、検出振動枝6、7、中間
保持枝8、補強枝96、97は、上述の駆動振動枝3、
4、中間保持枝5、補強枝93、94と別の方向に逆方
向に延びている。そして、中間保持枝8を中心にして、
幅方向側に振動枝6、7、補強枝96、97が配置され
ている。The detection-side vibrating section 1B mainly includes two detection vibrating branches 6, 7, and an output holding branch 8 (detecting vibrating branches 6, 7).
(Hereinafter, referred to as an intermediate holding branch), and two reinforcing branches 96 and 97, and the detection vibration branches 6, 7, the intermediate holding branch 8, and the reinforcing branches 96 and 97 are the driving vibration branches 3,
4, the intermediate holding branch 5 and the reinforcing branches 93 and 94 extend in a direction opposite to the other direction. And centering on the intermediate holding branch 8,
The vibrating branches 6 and 7 and the reinforcing branches 96 and 97 are arranged on the width direction side.
【0033】ここで、重要なことは、駆動振動枝3、
4、中間保持枝5、補強枝91、92から成る駆動側振
動部1Aと、検出振動枝6、7、中間保持枝8、補強枝
96、97とから成る駆動側振動部1Bと、さらに、結
合基部2の幅方向の寸法が同一となっていることであ
る。Here, what is important is that the driving vibration branch 3,
4, a drive-side vibrating section 1A including a middle holding branch 5, reinforcing branches 91 and 92, a driving-side vibrating section 1B including detection vibration branches 6, 7, an intermediate holding branch 8, and reinforcing branches 96 and 97; That is, the dimensions in the width direction of the coupling base 2 are the same.
【0034】以上のような構成により、圧電振動体1を
構成する基板の形状は、外形形状が概略矩形状を成すこ
とになる。With the above configuration, the shape of the substrate constituting the piezoelectric vibrator 1 is substantially rectangular in outer shape.
【0035】また、駆動側振動部1Aとなる振動枝3、
4、中間保持枝5、検出側振動部1Bとなる振動枝6、
7、中間保持枝8及び結合基部2の主面及びまたは側面
には夫々各種所定電極、導体膜が形成されている。尚、
この所定電極や導体膜は、例えばクロム、Auなどの蒸
着やスッパタリングなどの薄膜技法によって形成されて
いる。The vibrating branch 3, which becomes the driving side vibrating portion 1A,
4, an intermediate holding branch 5, a vibration branch 6 serving as a detection-side vibration unit 1B,
7, a predetermined electrode and a conductor film are formed on the main surface and / or side surface of the intermediate holding branch 8 and the coupling base 2, respectively. still,
The predetermined electrode and the conductor film are formed by a thin film technique such as vapor deposition of chromium, Au, or the like, or sputtering.
【0036】まず、駆動側振動部1Aにおいて、2つの
振動枝3、4の各4面には、所定駆動信号を振動に変換
させるための駆動電極31〜34、41〜44が形成さ
れている。また、中間保持枝5の両主面には駆動信号が
入力される駆動入力電極51、駆動入力電極52が形成
されている。First, in the driving side vibrating portion 1A, driving electrodes 31 to 34, 41 to 44 for converting a predetermined driving signal into vibration are formed on each of four surfaces of the two vibration branches 3, 4. . Further, a drive input electrode 51 and a drive input electrode 52 to which a drive signal is input are formed on both main surfaces of the intermediate holding branch 5.
【0037】次に、検出側振動部1Bにおいて、2つの
振動枝6、7及び中間保持枝8には、角速度に対応する
バタ足振動等を検出信号に変換するための検出電極61
〜64、71〜74が、中間保持枝8の両主面には変換
された検出信号を外部回路に出力するための検出出力電
極81、82が夫々形成されている。詳しくは、振動枝
6の一方主面には、2つの検出電極61、62とが振動
枝6の長さ方向に所定間隔を隔てて平行に並んで形成さ
れており、振動枝7の一方主面には2つの検出電極7
1、72とが振動枝7の長さ方向に所定間隔を隔てて平
行に並んで形成されており、同様に、振動枝6、7の他
方主面にも2つの検出電極63、73と検出電極64、
74とが平行に並んで形成されている。Next, in the detecting-side vibrating section 1B, the two vibrating branches 6, 7 and the intermediate holding branch 8 are provided with detection electrodes 61 for converting a flutter vibration corresponding to the angular velocity into a detection signal.
, 64 and 71 to 74 are formed on both main surfaces of the intermediate holding branch 8 with detection output electrodes 81 and 82 for outputting the converted detection signal to an external circuit. More specifically, two detection electrodes 61 and 62 are formed on one main surface of the vibrating branch 6 in parallel with a predetermined interval in the longitudinal direction of the vibrating branch 6. Two detection electrodes 7 on the surface
1 and 72 are formed in parallel in the longitudinal direction of the vibrating branch 7 at predetermined intervals, and similarly, the other main surfaces of the vibrating branches 6 and 7 are also provided with two detecting electrodes 63 and 73 and a detecting electrode 63. Electrode 64,
74 are formed side by side in parallel.
【0038】即ち、振動枝6、7の検出電極61、6
2、71、72は、中間保持枝8の検出出力電極81と
同一主面に形成され、検出電極63、64、73、74
は、中間保持枝8の検出出力電極82と同一主面に形成
されている。That is, the detection electrodes 61, 6 of the vibrating branches 6, 7
2, 71, 72 are formed on the same main surface as the detection output electrode 81 of the intermediate holding branch 8, and the detection electrodes 63, 64, 73, 74
Are formed on the same main surface as the detection output electrode 82 of the intermediate holding branch 8.
【0039】また、駆動側振動部1Aの駆動入力電極5
1と振動枝3、4の駆動電極31、33、42、44と
を接続するために、結合基部2、振動枝3、4の先端ま
たは基部には、引き回し導体膜21、36、45が形成
されており、駆動入力電極52と駆動電極32、34、
41、43とを接続するために、結合基部2、振動枝
3、4の先端または基部には、引き回し導体膜22、4
6、35が形成されている。The drive input electrode 5 of the drive side vibrating section 1A
In order to connect 1 to the drive electrodes 31, 33, 42, 44 of the vibrating branches 3, 4, lead-out conductor films 21, 36, 45 are formed at the tips or bases of the coupling base 2 and the vibrating branches 3, 4. The drive input electrode 52 and the drive electrodes 32, 34,
In order to connect the connecting conductors 41, 43, the leading conductor films 22, 4,
6, 35 are formed.
【0040】また、検出側振動部1Bの検出出力電極8
1と振動枝6、7の検出電極61、71、64、74と
を接続するために、結合基部2、振動枝3、4の先端に
は、引き回し導体膜23、26、65が形成され、検出
出力電極82と検出電極62、72、63、73とを接
続するために、結合基部2、振動枝3、4の先端には、
引き回し導体膜24、25、75が形成されている。The detection output electrode 8 of the detection-side vibrating section 1B
In order to connect 1 to the detection electrodes 61, 71, 64, 74 of the vibrating branches 6, 7, leading conductor films 23, 26, 65 are formed at the ends of the coupling base 2, the vibrating branches 3, 4, In order to connect the detection output electrode 82 and the detection electrodes 62, 72, 63, 73, the coupling base 2 and the tips of the vibrating branches 3, 4
The lead conductor films 24, 25, and 75 are formed.
【0041】これによって、駆動側振動部1Aの駆動入
力電極51、52、駆動電極31〜34、41〜44
は、図3に示すような接続状態となり、検出側振動部1
Bの検出出力電極81、82、検出電極61〜64、7
1〜74は、図4に示すような接続状態となる。As a result, the drive input electrodes 51 and 52 and the drive electrodes 31 to 34 and 41 to 44 of the drive side vibrating section 1A are formed.
Is connected as shown in FIG.
B detection output electrodes 81 and 82 and detection electrodes 61 to 64 and 7
1 to 74 are connected as shown in FIG.
【0042】上述の構造の圧電振動体1において、駆動
入力電極51、52間に駆動交流電圧を与えることによ
り、駆動側振動部1Aに、図中実線矢印のように、また
次の瞬間、図中点線矢印のように音叉振動モードが発生
する。尚、この音叉振動は、固有共振周波数が異なる検
出側振動部1Bに伝わらない。In the piezoelectric vibrating body 1 having the above-described structure, a driving AC voltage is applied between the driving input electrodes 51 and 52, so that the driving-side vibrating portion 1A is turned on at the next instant, as indicated by the solid arrow in the drawing. A tuning fork vibration mode is generated as indicated by the middle dotted arrow. Note that this tuning fork vibration is not transmitted to the detection-side vibration section 1B having a different natural resonance frequency.
【0043】この状態で、圧電振動体1全体に、回転運
動が加わると、コリオリ力が作用して、例えば図4に示
す検出側振動部1Bには、図中実線矢印のように、また
次の瞬間、図中点線矢印のようにバタ足振動が発生す
る。In this state, when a rotational motion is applied to the entire piezoelectric vibrating body 1, Coriolis force acts, for example, on the detecting-side vibrating section 1B shown in FIG. At the moment, a fluttering foot vibration is generated as indicated by the dotted arrow in the figure.
【0044】また、上述したように、検出側振動部1B
の振動枝6、7の各主面に互いに対向するように並設さ
れた検出電極61と62との間、63と64との間、7
1と72との間、73と74との間に、バタ足振動と圧
電基板の分極方向(配向)との関係により所定の電界が
発生し、電位差が発生する。As described above, the detection-side vibrating section 1B
Between the detection electrodes 61 and 62, 63 and 64, 7
A predetermined electric field is generated between 1 and 72 and between 73 and 74 depending on the relationship between the fluttering vibration and the polarization direction (orientation) of the piezoelectric substrate, and a potential difference is generated.
【0045】そして、この電位は、中間保持枝8の一方
主面側に形成され検出出力電極81と検出出力電極82
とから抽出(検出信号)されることになる。This potential is formed on one main surface side of the intermediate holding branch 8 and the detection output electrode 81 and the detection output electrode 82
(Detection signal).
【0046】そして、この検出出力電極81、82から
得られる検出信号は、増幅器(オプアンプ)などを含む
外部回路で処理される。The detection signals obtained from the detection output electrodes 81 and 82 are processed by an external circuit including an amplifier (op-amp).
【0047】このような構造の圧電振動体1は、圧電振
動体1を収容するケースの一部、例えば基板(図示せ
ず)上に、所定間隔で2つの導電性スペーサ(ホルダ
ー)部材を配置して、この2つのホルダー部材上に中間
保持枝5、8の駆動入力電極52、検出出力電極82と
接触するように導電性接着材を介して配置する。これに
より、圧電振動体1の機械的な保持が達成されるととも
に、基板の表面の所定回路配線と駆動入力電極52、検
出出力電極82との接続が達成される。尚、圧電振動体
1の一方主面側の駆動入力電極51、検出出力電極81
との接続は、例えばワイヤボンディング細線で行われ
る。In the piezoelectric vibrating body 1 having such a structure, two conductive spacer (holder) members are arranged at a predetermined interval on a part of a case accommodating the piezoelectric vibrating body 1, for example, on a substrate (not shown). Then, they are arranged on the two holder members via a conductive adhesive so as to be in contact with the drive input electrodes 52 and the detection output electrodes 82 of the intermediate holding branches 5 and 8. Thereby, the mechanical holding of the piezoelectric vibrator 1 is achieved, and the connection between the predetermined circuit wiring on the surface of the substrate and the drive input electrode 52 and the detection output electrode 82 is achieved. The drive input electrode 51 and the detection output electrode 81 on one main surface side of the piezoelectric vibrating body 1
Is connected by, for example, a thin wire bonding wire.
【0048】以上のように、本発明の圧電振動体1の検
出側振動部1B、駆動側振動部1A、結合基部2との幅
方向の寸法が同一であり、しかも、前記検出側振動部1
Bの構造が、2つの振動枝6、7、中間保持枝8に加
え、補強枝96、97が形成されているため、実質的に
結合基部2の幅方向の寸法が、補強枝96、97の付加
分だけ増加されることになる。As described above, the detection-side vibrating portion 1B, the driving-side vibrating portion 1A, and the coupling base 2 of the piezoelectric vibrating body 1 of the present invention have the same width-wise dimensions.
In the structure of B, since the reinforcing branches 96 and 97 are formed in addition to the two vibrating branches 6 and 7 and the intermediate holding branch 8, the dimension of the coupling base 2 in the width direction is substantially reduced. Will be increased by the additional amount.
【0049】これにより、結合基部2の剛性が向上し、
検出側振動部1Bのバタ足振動が、結合基部2に与える
ネジレ作用を有効に抑えることができる。即ち、圧電振
動体1全体のローリングによる上下方向の振幅量が相対
的に小さくなり、その結果、検出側振動部1Bの機械的
共振尖鋭度Qが向上する。Thus, the rigidity of the coupling base 2 is improved,
The torsion effect given to the coupling base 2 by the fluttering vibration of the detection-side vibrating portion 1B can be effectively suppressed. That is, the amount of amplitude in the vertical direction due to rolling of the entire piezoelectric vibrating body 1 becomes relatively small, and as a result, the mechanical resonance sharpness Q of the detection-side vibrating portion 1B is improved.
【0050】また、駆動側振動部1A、検出側振動部1
B、結合基部2の幅方向が同一であることから、圧電振
動体1に用いる圧電基板として、矩形状の圧電基板を用
いて簡単に形成することができる。The driving-side vibrating section 1A and the detecting-side vibrating section 1
B, since the width directions of the coupling bases 2 are the same, the piezoelectric substrate used for the piezoelectric vibrating body 1 can be easily formed using a rectangular piezoelectric substrate.
【0051】即ち、矩形状の圧電基板を、その長手方向
の端面から各振動部1A、1Bの各枝3、4、5、9
3、94、6、7、8、96、97を仕切るように、各
枝3、4、5、93、94、6、7、8、96、97の
長さを考慮して、ワイヤソー、ダイヤモンドソーなどを
用いて切り込みを形成すればよい。このため、製造方法
が非常に簡単にできることになる。That is, the rectangular piezoelectric substrate is moved from its longitudinal end face to each branch 3, 4, 5, 9 of each vibrating portion 1A, 1B.
Considering the length of each branch 3, 4, 5, 93, 94, 6, 7, 8, 96, 97 so as to partition 3, 94, 6, 7, 8, 96, 97, a wire saw, diamond The cut may be formed using a saw or the like. For this reason, the manufacturing method can be made very simple.
【0052】[0052]
【実験例】本発明者らは、補強枝96、97を付加する
とともに、駆動側振動部1A、検出側振動部1B、結合
基部2の幅方向を同一にした本発明品と、単に、駆動側
振動部1A、検出側振動部1B、結合基部2の幅方向を
同一の従来品について、検出側振動部1Bの機械的共振
尖鋭度Qを測定した。[Experimental example] The present inventors added a reinforcing branch 96, 97, and made the present invention product in which the width direction of the drive side vibration part 1A, the detection side vibration part 1B, and the coupling base 2 were the same, The mechanical resonance sharpness Q of the detection-side vibrating portion 1B was measured for a conventional product having the same width direction of the side-vibrating portion 1A, the detection-side vibrating portion 1B, and the coupling base 2.
【0053】表1において、WSは、検出側振動部1B
の振動枝6、7の幅であり、WDは、駆動側振動部1A
の振動枝3、4の幅であり、Wmは、検出側振動部1B
及び駆動側振動部1Aの中間保持枝5、8の幅であり、
Wpは、隣接する振動枝3、4、6、7、中間保持枝
5、8間の間隔であり、Woは、検出側振動部1Bの補
強枝96、97の幅であり、Wは概略矩形状の圧電振動
体1の幅であり、Lは圧電振動体1の長さであり、tは
圧電振動体1の厚さである。In Table 1, WS represents the detection side vibrating section 1B.
WD is the width of the driving side vibrating portion 1A.
Are the widths of the vibration branches 3 and 4, and Wm is the detection-side vibration section 1B.
And the width of the intermediate holding branches 5, 8 of the driving-side vibrating portion 1A.
Wp is the interval between the adjacent vibrating branches 3, 4, 6, 7 and the intermediate holding branches 5, 8, Wo is the width of the reinforcing branches 96, 97 of the detection-side vibrating portion 1B, and W is a substantially rectangular shape. L is the length of the piezoelectric vibrator 1, and t is the thickness of the piezoelectric vibrator 1.
【0054】尚、駆動側振動部1Aの補強枝93、94
は、圧電振動体1の幅と同一にするために付加してお
り、この実験では、WS、WD、Wm、Wpを同一とし
ているため、駆動側振動部1Aの補強枝93、94の幅
は、Woと同一となる。The reinforcing branches 93 and 94 of the driving side vibrating portion 1A are provided.
Is added in order to make the width the same as the width of the piezoelectric vibrating body 1. In this experiment, WS, WD, Wm, and Wp are the same, so that the width of the reinforcing branches 93 and 94 of the driving-side vibrating portion 1A is , Wo.
【0055】従って、従来品においては、検出側振動部
1Bの補強枝96、97が存在していないため、Wo=
0となり、全体の幅もWは非常に小さくなる。Therefore, in the conventional product, since the reinforcing branches 96 and 97 of the detection-side vibrating portion 1B do not exist, Wo =
0, and the overall width W is very small.
【0056】これらの圧電振動体の機械的共振尖鋭度Q
を表1に示す。The mechanical resonance sharpness Q of these piezoelectric vibrators is
Are shown in Table 1.
【0057】[0057]
【表1】 [Table 1]
【0058】以上、従来品(試料番号3)では、機械的
共振尖鋭度Qが9000であったのに対して、試料番号
1、2のように、検出側振動部1Bに補強枝96、97
を設けることによって、飛躍的に械的共振尖鋭度Qを向
上させることができる。As described above, the mechanical resonance sharpness Q of the conventional product (sample No. 3) was 9000, whereas the reinforcing branches 96 and 97
Is provided, the mechanical resonance sharpness Q can be dramatically improved.
【0059】尚、上述の実施例では、検出部振動部1B
の検出電極61〜64、71〜74、検出出力電極8
1、82は、主に検出側振動部1Bの両主面に形成され
ているが、検出電極のみ、または検出出力電極の一部の
みを、検出部振動部1Bの主面と直交する側面に形成し
てもよい。In the above embodiment, the detecting section vibrating section 1B
Detection electrodes 61-64, 71-74, and detection output electrode 8
Reference numerals 1 and 82 are mainly formed on both main surfaces of the detection-side vibrating portion 1B. However, only the detection electrode or only a part of the detection output electrode is provided on a side surface orthogonal to the main surface of the detection-portion vibration portion 1B. It may be formed.
【0060】また、図1、2では、検出側振動部1Bの
補強枝96、97は、振動枝6、7の外側に配置されて
いるが、この補強枝96、97を中間保持枝8と振動枝
6、7との間に位置するように配置しても構わない。In FIGS. 1 and 2, the reinforcing branches 96 and 97 of the detection-side vibrating section 1B are arranged outside the vibrating branches 6 and 7. It may be arranged so as to be located between the vibration branches 6 and 7.
【0061】駆動側振動部1Aの補強枝93、94につ
いても、同様であり、また、駆動側振動部1Aの振動枝
3、4や中間保持枝5の枝幅を大きくして、補強枝9
3、94を省略しても構わない。The same applies to the reinforcing branches 93 and 94 of the driving-side vibrating portion 1A. The branch widths of the vibrating branches 3 and 4 and the intermediate holding branch 5 of the driving-side vibrating portion 1A are increased, and
3, 94 may be omitted.
【0062】また、検出部振動部1Bで発生するバタ足
振動を電気信号に変換するための電極の構造も種々に変
更することができる。Further, the structure of the electrode for converting the fluttering vibration generated in the detecting section vibrating section 1B into an electric signal can be variously changed.
【0063】[0063]
【発明の効果】以上のように、検出側振動部に補強枝を
付加したことにより、実質的に結合基部の剛性が高ま
り、これにより、検出側振動部で発生するバタ足振動な
どにに起因する結合基部の捩じれ作用、駆動側振動部に
対する影響を軽減することができ、これによって、バタ
足振動の振動損失を減少させることができ、機械的共振
尖鋭度Qが向上し、高い感度の検出信号を得ることがで
きる。As described above, by adding the reinforcing branch to the detection-side vibrating portion, the rigidity of the coupling base is substantially increased, and this is caused by fluttering foot vibration generated in the detection-side vibrating portion. To reduce the torsional action of the coupling base and the effect on the driving side vibration part, thereby reducing the vibration loss of fluttering foot vibration, improving the mechanical resonance sharpness Q, and detecting high sensitivity. A signal can be obtained.
【0064】また、バタ足振動による結合基部での捩じ
れ、駆動側振動部への影響を有効に抑えることができる
ため、特に中間保持枝とプリント配線基板との機械的な
接合の信頼性、また、中間保持枝に形成された駆動入力
電極、検出出力電極と外部検出回路との電気的な接続信
頼性を向上させることができる。Further, since the twist at the coupling base due to the vibration of the fluttering foot and the influence on the driving-side vibrating portion can be effectively suppressed, the reliability of the mechanical joining between the intermediate holding branch and the printed wiring board is particularly improved. In addition, the reliability of electrical connection between the drive input electrode and the detection output electrode formed on the intermediate holding branch and the external detection circuit can be improved.
【0065】さらに、駆動側振動部、検出側振動部、結
合基部の幅方向の寸法が同一であり、圧電振動体を構成
する圧電基板が実質的に矩形状となるため、駆動側振動
部、検出側振動部を形成するにあたって、圧電基板の長
手方向に、各振動部の枝を仕切るように切り込みを形成
すればよいため、製造工程を複雑化することが一切な
い。Further, since the driving-side vibrating section, the detecting-side vibrating section, and the coupling base have the same width dimension and the piezoelectric substrate constituting the piezoelectric vibrating body is substantially rectangular, the driving-side vibrating section, In forming the detection-side vibrating portion, a cut may be formed in the longitudinal direction of the piezoelectric substrate so as to partition the branch of each vibrating portion, so that the manufacturing process is not complicated at all.
【図1】本発明の圧電振動体の表面側の外観斜視図であ
る。FIG. 1 is an external perspective view of a front surface side of a piezoelectric vibrating body of the present invention.
【図2】本発明の圧電振動体の裏面側の外観斜視図であ
る。FIG. 2 is an external perspective view of the back surface side of the piezoelectric vibrating body of the present invention.
【図3】圧電振動体を構成する駆動側振動部の電気的接
続状態を説明する概略図である。FIG. 3 is a schematic diagram illustrating an electrical connection state of a driving-side vibrating portion that forms a piezoelectric vibrator.
【図4】圧電振動体を構成する検出側振動部の電気的接
続状態を説明する概略図である。FIG. 4 is a schematic diagram illustrating an electrical connection state of a detection-side vibrating portion constituting the piezoelectric vibrator.
【図5】従来の圧電振動体の表面側の外観斜視図であ
る。FIG. 5 is an external perspective view of the front side of a conventional piezoelectric vibrator.
【図6】従来の圧電振動体の裏面側の外観斜視図であ
る。FIG. 6 is an external perspective view of the back side of a conventional piezoelectric vibrator.
1・・・・・圧電振動体 1A・・・・駆動側振動部 1B・・・・検出側振動部 2・・・・・結合基部 3、4・・・・・駆動側振動部の振動枝 5・・・・・駆動側振動部の中間保持枝(入力保持枝) 6、7・・・・・検出側振動部の振動枝 8・・・・・検出側振動部の中間保持枝(出力保持枝) 93、94、96、97・・・補強枝 31〜34、41〜44・・・・駆動電極 61、63、71、73 62、64、72、74・・・・の検出電極 1 ····· Piezoelectric vibrating body 1A ····· Drive side vibrating section 1B ····· Detection side vibrating section 2 ····· Coupling base section 3, 4 ···· Vibrating branch of driving side vibrating section 5... Middle holding branch of drive side vibrating section (input holding branch) 6, 7,... Vibrating branch of detection side vibrating section 8. Holding branches) 93, 94, 96, 97: reinforcing branches 31 to 34, 41 to 44: drive electrodes 61, 63, 71, 73 62, 64, 72, 74, ... detection electrodes
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平1−146416(JP,A) 特開 平2−7610(JP,A) 特開 昭51−15388(JP,A) 特開 昭51−67086(JP,A) 特開 平3−10507(JP,A) 特開 平7−83671(JP,A) 特開 昭60−239613(JP,A) 特開 昭62−188975(JP,A) 特開 昭60−192206(JP,A) 特開 昭60−73414(JP,A) 特開 平9−178492(JP,A) 実開 平3−3835(JP,U) 実開 平3−3841(JP,U) 実開 昭58−64128(JP,U) ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-1-146416 (JP, A) JP-A-2-7610 (JP, A) JP-A-51-15388 (JP, A) JP-A-51- 67086 (JP, A) JP-A-3-10507 (JP, A) JP-A-7-83671 (JP, A) JP-A-60-239613 (JP, A) JP-A-62-188975 (JP, A) JP-A-60-192206 (JP, A) JP-A-60-73414 (JP, A) JP-A-9-178492 (JP, A) JP-A-3-3835 (JP, U) JP-A-3-3841 (JP, U) Japanese Utility Model Showa 58-64128 (JP, U)
Claims (1)
の駆動振動枝間に形成された入力保持枝とからなる駆動
側振動部と、バタ足振動する2つの検出振動枝及び該2
つの検出振動枝間に形成された出力保持枝、該検出振動
枝及び出力保持枝と同一方向に延びる補強枝を有する検
出側振動部とを、矩形状の結合基部の対向しあう一対の
長手方向の端面に夫々一体的に配置させるとともに、 前記駆動側振動部の入力保持枝及び駆動振動枝に音叉振
動を発生させるための駆動入力電極及び駆動電極をそれ
ぞれ形成し、 前記検出振動部の出力保持枝及び検出振動枝にバタ足振
動を検出させるための検出出力電極及び検出電極をそれ
ぞれ形成して成り、前記入力保持枝及び前記出力保持枝
が基板に接合される角速度センサ用圧電振動体であっ
て、 前記駆動側振動部、検出側振動部、結合基部の幅を夫々
同一にしたことを特徴とする角速度センサ用圧電振動
体。1. A drive-side vibrating section comprising two driving vibrating branches that vibrate a tuning fork and an input holding branch formed between the two driving vibrating branches, and two detecting vibrating branches that vibrate in a fluttering manner.
A detection-side vibrating section having a reinforcing branch extending in the same direction as the output-holding branch formed between the two detection-vibration branches and the detection-vibration branch and the output-holding branch; And a drive input electrode and a drive electrode for generating a tuning fork vibration on the input holding branch and the drive vibration branch of the drive side vibrating portion, respectively, and the output holding of the detection vibrating portion. A piezoelectric vibrator for an angular velocity sensor, comprising a detection output electrode and a detection electrode for detecting a fluttering vibration on the branch and the detection vibration branch, wherein the input holding branch and the output holding branch are joined to a substrate. The drive-side vibrator, the detection-side vibrator, and the coupling base have the same width, respectively.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25162995A JP3250948B2 (en) | 1995-09-28 | 1995-09-28 | Piezoelectric vibrator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25162995A JP3250948B2 (en) | 1995-09-28 | 1995-09-28 | Piezoelectric vibrator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0989574A JPH0989574A (en) | 1997-04-04 |
JP3250948B2 true JP3250948B2 (en) | 2002-01-28 |
Family
ID=17225674
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25162995A Expired - Fee Related JP3250948B2 (en) | 1995-09-28 | 1995-09-28 | Piezoelectric vibrator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3250948B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0939296A3 (en) | 1996-03-29 | 2001-01-17 | Ngk Insulators, Ltd. | Vibration gyro sensor, combined sensor, and method for producing vibration gyro sensor |
-
1995
- 1995-09-28 JP JP25162995A patent/JP3250948B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0989574A (en) | 1997-04-04 |
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