JP3250948B2 - Piezoelectric vibrator - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibrator for an angular velocity sensor.

[0002]

2. Description of the Related Art Various angular velocity sensors have been proposed for use in camera shake correction, car navigation, and attitude control of moving bodies.

For example, US Pat. No. 4,524,619.
And Japanese Patent Application Laid-Open No. 3-291517 disclose a piezoelectric device that also utilizes a tuning fork vibration mode in which a driving-side tuning-fork-shaped vibrating portion and a tuning-fork-shaped detecting-side vibrating portion are integrated, and the piezoelectric substrate is entirely H-shaped. An angular velocity sensor having a vibrating body has been proposed.

Further, the present applicant has disclosed a piezoelectric vibrating body which achieves mechanical holding of the piezoelectric vibrating body and electrical connection with an external processing circuit by an intermediate holding branch which is a vibration branch independent of each vibration. It was proposed (see FIGS. 5 and 6).

As shown in FIGS. 5 and 6, the piezoelectric vibrator is
A piezoelectric substrate whose overall shape is a “king” shape is used. The drive-side vibrating section 1A and the detection-side vibrating section 1B are disposed at both ends of the coupling base 20 of the piezoelectric vibrator. The driving-side vibrating section 1A includes two driving vibrating branches 3 and 4 and an input holding branch 5, and the detecting-side vibrating section 1B includes two detecting vibrating branches 6 and 7 and an output holding branch 8. Have been. The input holding branch 5 is arranged between the driving vibration branches 3 and 4, and the output holding branch 8 is arranged between the detection vibration branches 6 and 7. , 8.

[0006] Drive electrodes 31 to 34 and 41 to 44 are formed on four side surfaces of the drive vibrating branches 3 and 4.

On both main surfaces of the detecting vibrating branches 6 and 7,
Two detection electrodes 61-63, 71-
74 are formed. For example, detection electrodes 61 and 62 are provided on one main surface of the detection vibrating branch 6, detection electrodes 63 and 64 are provided on the other main surface, and detection electrodes 71 and 72 are provided on one main surface of the detection vibrating branch 7. On the other main surface, detection electrodes 73 and 74 are formed, respectively.

The intermediate holding branch 5 has driving electrodes 31 to
Drive input electrodes 51 and 52 for applying a predetermined signal to the drive input electrodes 34, 41 to 44 are formed. In particular, a drive input electrode 51 is formed on one main surface, and a drive input electrode 51 is formed on the other main surface. An electrode 52 is formed.

The intermediate holding branches 8 have detection electrodes 61-61.
The detection output electrodes 81 and 82 for deriving signals from 64, 71 to 74 are formed. In particular, the detection output electrode 81 is formed on one main surface, and the detection output electrode 81 is formed on the other main surface. An output electrode 82 is formed.

Further, the coupling base 20, the driving vibration branch 3,
4, the drive input electrode 51 and the drive electrodes 31, 33, 4
2 and 44 are electrically connected to each other.
1, 35, 46 are formed, and the drive input electrodes 52
In order to electrically connect the drive electrodes 32, 34, 41, and 43, routing conductors 22, 36, and 45 are formed.

Similarly, the coupling base 20, the detecting vibrating branch 6,
7 includes a detection output electrode 81 and detection electrodes 61, 71, 6
4 and 74 to electrically connect them to each other.
3, 26, 65 are formed, and similarly, the detection output electrode 82
In order to electrically connect the detection electrodes 62, 72, 63, and 73, routing conductors 24, 25, and 75 are formed.

The piezoelectric vibrator having such a structure is mounted on a printed wiring board, a housing case, or the like.
The spacer can be easily fixed by interposing a conductive spacer member between the back surfaces of the two intermediate holding branches 5 and 8 and the substrate or the case. At the same time, the electrical connection with the external processing circuit can be made via the conductive spacer member at the drive input electrode 52 and the detection output electrode 82 formed on the back surfaces of the two intermediate holding branches 5 and 8, The drive input electrode 51 and the detection output electrode 81 formed on one main surface of the intermediate holding branches 5 and 8 can be connected via a wire bonding thin wire or the like.

Operationally, when a driving signal is given to the drive electrodes 31 to 34 and 41 to 44 of the drive side vibrating section 1A via the drive input electrodes 51 and 52, the drive side vibrating section 1A is driven. Tuning fork vibration occurs. In this state, when a rotational motion (angular velocity) is applied to the piezoelectric vibrator, the tuning fork vibration and the Coriolis force act on the piezoelectric vibrator, so that the vibrating branches 6 and 7 of the drive-side vibrating portion 1B
Vertical vibration (fluttering vibration or bedding vibration) is generated alternately in a direction perpendicular to the plane of the piezoelectric substrate with an amplitude proportional to the angular velocity of the rotational motion. This vibration is hereinafter referred to as fluttering vibration.

In the fluttering vibration, an electric field is generated which is determined by the direction of the vibration and the polarization direction of the piezoelectric substrate (the crystal axis direction in the case of a quartz substrate). By converting the electric signals into electric signals at 61 to 64 and 71 to 74, a detection signal corresponding to a predetermined angular velocity can be extracted from between the detection output electrodes 81 and 82. Incidentally, the angular velocity of the rotational motion can be obtained by processing this detection signal by an external processing circuit.

That is, the tuning-fork vibration is generated mainly in the plane direction of the piezoelectric substrate in the driving-side vibrating section 1A, and the flapping feet are generated in the detecting-side vibration section 1B mainly in the vertical direction orthogonal to the plane direction of the piezoelectric substrate. Vibration will occur.

When such a piezoelectric vibrator 1 is used as an angular velocity sensor, it is mounted on a printed wiring board or housed in a case in order to connect to an external processing circuit as described above. It is desirable that the fixed structure portion, such as, does not adversely affect the vibration mode and can be performed stably and easily.

It is also important that the input / output connection method for the signal applied to the piezoelectric vibrating body 1 and the derived signal be made simple and stable. At the same time, it is important that the manufacturing process is simple.

In this manufacturing method, the piezoelectric substrate having a substantially "O" shape is composed of, for example, the vibrating branches 3 and 4 constituting the driving-side vibrating portion 1A and the intermediate holding branches from both end surfaces in the longitudinal direction of the rectangular piezoelectric substrate. In this case, two cuts may be formed so as to partition the three branches of No. 5 and to partition the three branches of the vibrating branches 6, 7 and the intermediate holding branch 8, which constitute the detection-side vibrating portion 1B. In addition, since the cut can be formed with a wire saw or the like, it can be said that the manufacturing method is relatively simple.

[0019]

However, according to various experiments and studies conducted by the present inventors, in the above-described piezoelectric vibrator 1, the fluttering vibration generated in the detecting-side vibrating portion 1B is reduced by the coupling base 20 and the driving side. It is easy to transmit to the vibration part 1A. The influence on the drive side vibrating portion 1B is that the vibration branch 6 of the detection side vibration portion 1B and the vibration branch 3 of the drive side vibration portion 1A, and the vibration branch 7 and the vibration branch 4 are on the same straight line. It is thought that it is due to.

Further, since the vibrating branches 6 and 7 alternately vibrate in a fluttering manner, there is a problem that the torsional stress acts on the coupling base 20 due to insufficient rigidity of the coupling base 20.
In any case, the rigidity of the joint base 20 is increased to solve the problem at the same time. Here, the bonding base 2
If the dimension in the longitudinal direction is increased in order to increase the area of No. 0 and increase rigidity, the distance between the driving-side vibrating portion 1A and the detecting-side vibrating portion 1B is increased, and the tuning fork generated in the driving-side vibrating portion 1A. The efficiency of converting the vibration into the fluttering vibration in the detection-side vibration unit 1B is reduced. When the dimension in the width direction is increased, the driving-side vibrating portion 1A and the detecting-side vibrating portion 1B
In comparison, the binding base 20 protrudes in the width direction,
In particular, the overall shape of the piezoelectric substrate becomes different, and the manufacturing method becomes complicated.

The present invention has been devised in view of the above-mentioned problems, and its purpose is to substantially increase the rigidity at the coupling base, thereby reducing the vibration of the fluttering foot vibration of the detection-side vibrating portion 1B. An object of the present invention is to provide a piezoelectric vibrator that reduces loss and is simple in manufacturing method.

[0022]

SUMMARY OF THE INVENTION According to the present invention, a drive-side vibrating portion comprising two driving vibrating branches that vibrate a tuning fork and an input holding branch formed between the two driving vibrating branches; A detection-side vibrating section having two detection vibration branches, an output holding branch formed between the two detection vibration branches, and a reinforcing branch extending in the same direction as the detection vibration branch and the output holding branch; And a drive input electrode and a drive electrode for generating a tuning fork vibration on the input holding branch and the drive vibration branch of the drive-side vibrating portion, respectively. A detection output electrode and a detection electrode for detecting fluttering vibration on the output holding branch and the detection vibration branch of the detection vibrating section, respectively, and the input holding branch and the output holding branch are joined to a substrate. Angular velocity sensor A use piezoelectric vibrator, the driving-side vibration unit, detecting side oscillating section, a piezoelectric vibrator for the angular velocity sensor and the width of the binding base and the same people each.

[0023]

According to the present invention, at least on the detecting side vibrating portion, a vibrating branch for fluttering vibration, an output holding branch for mechanically holding and electrically connecting the piezoelectric vibrating body, and a reinforcing branch are formed. ing. That is, the width of the coupling base is substantially increased by the addition of the reinforcing branch, thereby improving the rigidity of the coupling base.

Further, since the widths of the coupling portion, the detection-side vibrating portion, and the drive-side vibrating portion are set to be the same, the overall shape of the piezoelectric vibrating member is substantially rectangular. Therefore, when a piezoelectric substrate having a predetermined shape is formed, an actual piezoelectric substrate is formed only by cutting the piezoelectric substrate from both ends in the longitudinal direction so as to be divided into branches. In addition, the manufacturing method does not become complicated.

As described above, by improving the rigidity of the coupling base, the torsion caused by the fluttering foot vibration is effectively suppressed, the mechanical resonance sharpness Q at the detecting-side vibrating part is improved, and the manufacturing method is simplified. Can be maintained as it is.

[0026]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a piezoelectric vibrator of the present invention will be described with reference to the drawings.

FIG. 1 is an external perspective view of the front side of the piezoelectric vibrator of the present invention, FIG. 2 is a perspective view of the rear side thereof, and FIG.
FIG. 4 is a schematic diagram illustrating an electrical connection state of a drive-side vibration unit of the piezoelectric vibrator, and FIG. 4 is a schematic diagram illustrating an electrical connection state of a detection-side vibration unit of the piezoelectric vibrator. 5 and 6
The same parts as those described above are described with the same symbols.

The piezoelectric vibrating body 1 of the present invention comprises a driving-side vibrating section 1
A, the detection-side vibrating portion 1B, and the coupling base portion 2.

The piezoelectric vibrator 1 may be, for example, a quartz substrate cut in a predetermined manner, for example, a Z-cut according to the crystal polarization axis of the quartz. Other examples include a piezoelectric ceramic substrate polarized in a predetermined direction.

A driving-side vibrating portion 1A and a detecting-side vibrating portion 1B are integrally disposed on one side of a pair of opposed end surfaces (hereinafter, referred to as longitudinal end surfaces) of the coupling base portion 2 respectively. Have been.

The driving-side vibrating portion 1A mainly includes two driving vibrating branches 3 and 4 and an input holding branch 5 (hereinafter, referred to as an intermediate holding branch because it is located in the middle of the driving vibrating branches 3 and 4). The drive vibration branches 3 and 4, the intermediate holding branch 5, and the reinforcement branches 93 and 94 extend in the same direction. Then, with the center holding branch 5 as a center, the vibration branch 3
4. The reinforcing branches 93 and 94 are arranged.

The detection-side vibrating section 1B mainly includes two detection vibrating branches 6, 7, and an output holding branch 8 (detecting vibrating branches 6, 7).
(Hereinafter, referred to as an intermediate holding branch), and two reinforcing branches 96 and 97, and the detection vibration branches 6, 7, the intermediate holding branch 8, and the reinforcing branches 96 and 97 are the driving vibration branches 3,
4, the intermediate holding branch 5 and the reinforcing branches 93 and 94 extend in a direction opposite to the other direction. And centering on the intermediate holding branch 8,
The vibrating branches 6 and 7 and the reinforcing branches 96 and 97 are arranged on the width direction side.

Here, what is important is that the driving vibration branch 3,
4, a drive-side vibrating section 1A including a middle holding branch 5, reinforcing branches 91 and 92, a driving-side vibrating section 1B including detection vibration branches 6, 7, an intermediate holding branch 8, and reinforcing branches 96 and 97; That is, the dimensions in the width direction of the coupling base 2 are the same.

With the above configuration, the shape of the substrate constituting the piezoelectric vibrator 1 is substantially rectangular in outer shape.

The vibrating branch 3, which becomes the driving side vibrating portion 1A,
4, an intermediate holding branch 5, a vibration branch 6 serving as a detection-side vibration unit 1B,
7, a predetermined electrode and a conductor film are formed on the main surface and / or side surface of the intermediate holding branch 8 and the coupling base 2, respectively. still,
The predetermined electrode and the conductor film are formed by a thin film technique such as vapor deposition of chromium, Au, or the like, or sputtering.

First, in the driving side vibrating portion 1A, driving electrodes 31 to 34, 41 to 44 for converting a predetermined driving signal into vibration are formed on each of four surfaces of the two vibration branches 3, 4. . Further, a drive input electrode 51 and a drive input electrode 52 to which a drive signal is input are formed on both main surfaces of the intermediate holding branch 5.

Next, in the detecting-side vibrating section 1B, the two vibrating branches 6, 7 and the intermediate holding branch 8 are provided with detection electrodes 61 for converting a flutter vibration corresponding to the angular velocity into a detection signal.
, 64 and 71 to 74 are formed on both main surfaces of the intermediate holding branch 8 with detection output electrodes 81 and 82 for outputting the converted detection signal to an external circuit. More specifically, two detection electrodes 61 and 62 are formed on one main surface of the vibrating branch 6 in parallel with a predetermined interval in the longitudinal direction of the vibrating branch 6. Two detection electrodes 7 on the surface
1 and 72 are formed in parallel in the longitudinal direction of the vibrating branch 7 at predetermined intervals, and similarly, the other main surfaces of the vibrating branches 6 and 7 are also provided with two detecting electrodes 63 and 73 and a detecting electrode 63. Electrode 64,
74 are formed side by side in parallel.

That is, the detection electrodes 61, 6 of the vibrating branches 6, 7
2, 71, 72 are formed on the same main surface as the detection output electrode 81 of the intermediate holding branch 8, and the detection electrodes 63, 64, 73, 74
Are formed on the same main surface as the detection output electrode 82 of the intermediate holding branch 8.

The drive input electrode 5 of the drive side vibrating section 1A
In order to connect 1 to the drive electrodes 31, 33, 42, 44 of the vibrating branches 3, 4, lead-out conductor films 21, 36, 45 are formed at the tips or bases of the coupling base 2 and the vibrating branches 3, 4. The drive input electrode 52 and the drive electrodes 32, 34,
In order to connect the connecting conductors 41, 43, the leading conductor films 22, 4,
6, 35 are formed.

The detection output electrode 8 of the detection-side vibrating section 1B
In order to connect 1 to the detection electrodes 61, 71, 64, 74 of the vibrating branches 6, 7, leading conductor films 23, 26, 65 are formed at the ends of the coupling base 2, the vibrating branches 3, 4, In order to connect the detection output electrode 82 and the detection electrodes 62, 72, 63, 73, the coupling base 2 and the tips of the vibrating branches 3, 4
The lead conductor films 24, 25, and 75 are formed.

As a result, the drive input electrodes 51 and 52 and the drive electrodes 31 to 34 and 41 to 44 of the drive side vibrating section 1A are formed.
Is connected as shown in FIG.
B detection output electrodes 81 and 82 and detection electrodes 61 to 64 and 7
1 to 74 are connected as shown in FIG.

In the piezoelectric vibrating body 1 having the above-described structure, a driving AC voltage is applied between the driving input electrodes 51 and 52, so that the driving-side vibrating portion 1A is turned on at the next instant, as indicated by the solid arrow in the drawing. A tuning fork vibration mode is generated as indicated by the middle dotted arrow. Note that this tuning fork vibration is not transmitted to the detection-side vibration section 1B having a different natural resonance frequency.

In this state, when a rotational motion is applied to the entire piezoelectric vibrating body 1, Coriolis force acts, for example, on the detecting-side vibrating section 1B shown in FIG. At the moment, a fluttering foot vibration is generated as indicated by the dotted arrow in the figure.

As described above, the detection-side vibrating section 1B
Between the detection electrodes 61 and 62, 63 and 64, 7
A predetermined electric field is generated between 1 and 72 and between 73 and 74 depending on the relationship between the fluttering vibration and the polarization direction (orientation) of the piezoelectric substrate, and a potential difference is generated.

This potential is formed on one main surface side of the intermediate holding branch 8 and the detection output electrode 81 and the detection output electrode 82
(Detection signal).

The detection signals obtained from the detection output electrodes 81 and 82 are processed by an external circuit including an amplifier (op-amp).

In the piezoelectric vibrating body 1 having such a structure, two conductive spacer (holder) members are arranged at a predetermined interval on a part of a case accommodating the piezoelectric vibrating body 1, for example, on a substrate (not shown). Then, they are arranged on the two holder members via a conductive adhesive so as to be in contact with the drive input electrodes 52 and the detection output electrodes 82 of the intermediate holding branches 5 and 8. Thereby, the mechanical holding of the piezoelectric vibrator 1 is achieved, and the connection between the predetermined circuit wiring on the surface of the substrate and the drive input electrode 52 and the detection output electrode 82 is achieved. The drive input electrode 51 and the detection output electrode 81 on one main surface side of the piezoelectric vibrating body 1
Is connected by, for example, a thin wire bonding wire.

As described above, the detection-side vibrating portion 1B, the driving-side vibrating portion 1A, and the coupling base 2 of the piezoelectric vibrating body 1 of the present invention have the same width-wise dimensions.
In the structure of B, since the reinforcing branches 96 and 97 are formed in addition to the two vibrating branches 6 and 7 and the intermediate holding branch 8, the dimension of the coupling base 2 in the width direction is substantially reduced. Will be increased by the additional amount.

Thus, the rigidity of the coupling base 2 is improved,
The torsion effect given to the coupling base 2 by the fluttering vibration of the detection-side vibrating portion 1B can be effectively suppressed. That is, the amount of amplitude in the vertical direction due to rolling of the entire piezoelectric vibrating body 1 becomes relatively small, and as a result, the mechanical resonance sharpness Q of the detection-side vibrating portion 1B is improved.

The driving-side vibrating section 1A and the detecting-side vibrating section 1
B, since the width directions of the coupling bases 2 are the same, the piezoelectric substrate used for the piezoelectric vibrating body 1 can be easily formed using a rectangular piezoelectric substrate.

That is, the rectangular piezoelectric substrate is moved from its longitudinal end face to each branch 3, 4, 5, 9 of each vibrating portion 1A, 1B.
Considering the length of each branch 3, 4, 5, 93, 94, 6, 7, 8, 96, 97 so as to partition 3, 94, 6, 7, 8, 96, 97, a wire saw, diamond The cut may be formed using a saw or the like. For this reason, the manufacturing method can be made very simple.

[0052]

[Experimental example] The present inventors added a reinforcing branch 96, 97, and made the present invention product in which the width direction of the drive side vibration part 1A, the detection side vibration part 1B, and the coupling base 2 were the same, The mechanical resonance sharpness Q of the detection-side vibrating portion 1B was measured for a conventional product having the same width direction of the side-vibrating portion 1A, the detection-side vibrating portion 1B, and the coupling base 2.

In Table 1, WS represents the detection side vibrating section 1B.
WD is the width of the driving side vibrating portion 1A.
Are the widths of the vibration branches 3 and 4, and Wm is the detection-side vibration section 1B.
And the width of the intermediate holding branches 5, 8 of the driving-side vibrating portion 1A.
Wp is the interval between the adjacent vibrating branches 3, 4, 6, 7 and the intermediate holding branches 5, 8, Wo is the width of the reinforcing branches 96, 97 of the detection-side vibrating portion 1B, and W is a substantially rectangular shape. L is the length of the piezoelectric vibrator 1, and t is the thickness of the piezoelectric vibrator 1.

The reinforcing branches 93 and 94 of the driving side vibrating portion 1A are provided.
Is added in order to make the width the same as the width of the piezoelectric vibrating body 1. In this experiment, WS, WD, Wm, and Wp are the same, so that the width of the reinforcing branches 93 and 94 of the driving-side vibrating portion 1A is , Wo.

Therefore, in the conventional product, since the reinforcing branches 96 and 97 of the detection-side vibrating portion 1B do not exist, Wo =
0, and the overall width W is very small.

The mechanical resonance sharpness Q of these piezoelectric vibrators is
Are shown in Table 1.

[0057]

[Table 1]

As described above, the mechanical resonance sharpness Q of the conventional product (sample No. 3) was 9000, whereas the reinforcing branches 96 and 97
Is provided, the mechanical resonance sharpness Q can be dramatically improved.

In the above embodiment, the detecting section vibrating section 1B
Detection electrodes 61-64, 71-74, and detection output electrode 8
Reference numerals 1 and 82 are mainly formed on both main surfaces of the detection-side vibrating portion 1B. However, only the detection electrode or only a part of the detection output electrode is provided on a side surface orthogonal to the main surface of the detection-portion vibration portion 1B. It may be formed.

In FIGS. 1 and 2, the reinforcing branches 96 and 97 of the detection-side vibrating section 1B are arranged outside the vibrating branches 6 and 7. It may be arranged so as to be located between the vibration branches 6 and 7.

The same applies to the reinforcing branches 93 and 94 of the driving-side vibrating portion 1A. The branch widths of the vibrating branches 3 and 4 and the intermediate holding branch 5 of the driving-side vibrating portion 1A are increased, and
3, 94 may be omitted.

Further, the structure of the electrode for converting the fluttering vibration generated in the detecting section vibrating section 1B into an electric signal can be variously changed.

[0063]

As described above, by adding the reinforcing branch to the detection-side vibrating portion, the rigidity of the coupling base is substantially increased, and this is caused by fluttering foot vibration generated in the detection-side vibrating portion. To reduce the torsional action of the coupling base and the effect on the driving side vibration part, thereby reducing the vibration loss of fluttering foot vibration, improving the mechanical resonance sharpness Q, and detecting high sensitivity. A signal can be obtained.

Further, since the twist at the coupling base due to the vibration of the fluttering foot and the influence on the driving-side vibrating portion can be effectively suppressed, the reliability of the mechanical joining between the intermediate holding branch and the printed wiring board is particularly improved. In addition, the reliability of electrical connection between the drive input electrode and the detection output electrode formed on the intermediate holding branch and the external detection circuit can be improved.

Further, since the driving-side vibrating section, the detecting-side vibrating section, and the coupling base have the same width dimension and the piezoelectric substrate constituting the piezoelectric vibrating body is substantially rectangular, the driving-side vibrating section, In forming the detection-side vibrating portion, a cut may be formed in the longitudinal direction of the piezoelectric substrate so as to partition the branch of each vibrating portion, so that the manufacturing process is not complicated at all.

[Brief description of the drawings]

FIG. 1 is an external perspective view of a front surface side of a piezoelectric vibrating body of the present invention.

FIG. 2 is an external perspective view of the back surface side of the piezoelectric vibrating body of the present invention.

FIG. 3 is a schematic diagram illustrating an electrical connection state of a driving-side vibrating portion that forms a piezoelectric vibrator.

FIG. 4 is a schematic diagram illustrating an electrical connection state of a detection-side vibrating portion constituting the piezoelectric vibrator.

FIG. 5 is an external perspective view of the front side of a conventional piezoelectric vibrator.

FIG. 6 is an external perspective view of the back side of a conventional piezoelectric vibrator.

[Explanation of symbols]

 1 ····· Piezoelectric vibrating body 1A ····· Drive side vibrating section 1B ····· Detection side vibrating section 2 ····· Coupling base section 3, 4 ···· Vibrating branch of driving side vibrating section 5... Middle holding branch of drive side vibrating section (input holding branch) 6, 7,... Vibrating branch of detection side vibrating section 8. Holding branches) 93, 94, 96, 97: reinforcing branches 31 to 34, 41 to 44: drive electrodes 61, 63, 71, 73 62, 64, 72, 74, ... detection electrodes

 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-1-146416 (JP, A) JP-A-2-7610 (JP, A) JP-A-51-15388 (JP, A) JP-A-51- 67086 (JP, A) JP-A-3-10507 (JP, A) JP-A-7-83671 (JP, A) JP-A-60-239613 (JP, A) JP-A-62-188975 (JP, A) JP-A-60-192206 (JP, A) JP-A-60-73414 (JP, A) JP-A-9-178492 (JP, A) JP-A-3-3835 (JP, U) JP-A-3-3841 (JP, U) Japanese Utility Model Showa 58-64128 (JP, U)

Claims (1)

(57) [Claims] 1. A drive-side vibrating section comprising two driving vibrating branches that vibrate a tuning fork and an input holding branch formed between the two driving vibrating branches, and two detecting vibrating branches that vibrate in a fluttering manner.
A detection-side vibrating section having a reinforcing branch extending in the same direction as the output-holding branch formed between the two detection-vibration branches and the detection-vibration branch and the output-holding branch; And a drive input electrode and a drive electrode for generating a tuning fork vibration on the input holding branch and the drive vibration branch of the drive side vibrating portion, respectively, and the output holding of the detection vibrating portion. A piezoelectric vibrator for an angular velocity sensor, comprising a detection output electrode and a detection electrode for detecting a fluttering vibration on the branch and the detection vibration branch, wherein the input holding branch and the output holding branch are joined to a substrate. The drive-side vibrator, the detection-side vibrator, and the coupling base have the same width, respectively.