JP3245675B2 - Structure of servo accelerometer - Google Patents

Structure of servo accelerometer

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Publication number
JP3245675B2
JP3245675B2 JP08360098A JP8360098A JP3245675B2 JP 3245675 B2 JP3245675 B2 JP 3245675B2 JP 08360098 A JP08360098 A JP 08360098A JP 8360098 A JP8360098 A JP 8360098A JP 3245675 B2 JP3245675 B2 JP 3245675B2
Authority
JP
Japan
Prior art keywords
magnet
cylindrical
magnetic core
pendulum
pole piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP08360098A
Other languages
Japanese (ja)
Other versions
JPH11281670A (en
Inventor
暁 新野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Aviation Electronics Industry Ltd
Original Assignee
Japan Aviation Electronics Industry Ltd
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Filing date
Publication date
Application filed by Japan Aviation Electronics Industry Ltd filed Critical Japan Aviation Electronics Industry Ltd
Priority to JP08360098A priority Critical patent/JP3245675B2/en
Publication of JPH11281670A publication Critical patent/JPH11281670A/en
Application granted granted Critical
Publication of JP3245675B2 publication Critical patent/JP3245675B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、サーボ加速度計
の構造に関し、特にペンデュラム(振子)及びトルカコ
イルを収納する壺形磁心を構成する中央磁心と円筒状磁
心の接合構造の改良に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a servo accelerometer structure, and more particularly to an improvement in a joint structure between a central magnetic core and a cylindrical magnetic core constituting a pot-shaped core for accommodating a pendulum (pendulum) and a torque coil.

【0002】[0002]

【従来の技術】図5に示すサーボ加速度計のペンデュラ
ム6は、それを支えるヒンジ6aと一体となっており、
ペンデュラム6の素材の性質は、加速度計の性能に大き
な影響を与える。そのため、ペンデュラム6の素材はバ
ネ特性が極めて良好で、熱応力を生じにくい素材、たと
えば溶融石英などが用いられる。従って溶融石英などの
ペンデュラムの素材は一般に熱膨張係数が小さい。この
ため加速度計としての性能を良好に保つためには、ペン
デュラム6を支える構造体であるマグネットハウジング
(円筒状磁心とも言う)3の素材も熱膨張係数の小さい
インバータ材等が用いられる。
2. Description of the Related Art A pendulum 6 of a servo accelerometer shown in FIG. 5 is integrated with a hinge 6a for supporting it.
The nature of the material of pendulum 6 has a significant effect on the performance of the accelerometer. For this reason, the material of the pendulum 6 has a very good spring characteristic and hardly generates thermal stress, such as fused quartz. Therefore, pendulum materials such as fused quartz generally have a small coefficient of thermal expansion. Therefore, in order to maintain good performance as an accelerometer, the material of the magnet housing (also referred to as a cylindrical magnetic core) 3, which is a structure supporting the pendulum 6, is made of an inverter material having a small coefficient of thermal expansion.

【0003】しかしながら、Sm−Co系材料より成る
マグネット1の熱膨張係数は、一般にマグネットハウジ
ング3の素材の熱膨張係数と比べると極めて大きい。そ
のため、単純にマグネット1とマグネットハウジング3
を接着接合すると温度変化により接合部がはがれてしま
う。そのため従来は、 (a)図6Aに示すように、マグネット1を柔軟性のあ
る接着剤2を用いてマグネットハウジング3に接合す
る。
However, the thermal expansion coefficient of the magnet 1 made of a Sm-Co-based material is generally much larger than the thermal expansion coefficient of the material of the magnet housing 3. Therefore, simply magnet 1 and magnet housing 3
When adhesive bonding is performed, the bonded portion is peeled off due to a temperature change. Therefore, conventionally, (a) as shown in FIG. 6A, the magnet 1 is joined to the magnet housing 3 using a flexible adhesive 2.

【0004】(b)図6B,Cに示すように、マグネッ
ト1を、マグネット1と熱膨張係数の差が小さい金属
(純鉄など)より成るポールピース・ボトム5と接着接
合し、ポールピース・ボトム5とマグネットハウジング
3は、マグネットハウジング3の底に透孔3aをあけ、
ポールピース・ボトム5の下部を透孔3aに嵌合させ、
透孔3aの円周部分で接着又は溶接等で接合する。この
ようにすると、熱応力が加わった際、径方向には圧縮応
力が加わるが、せん断応力ではないため、接合部に亀裂
は生じにくい。というような方法がとられていた。
(B) As shown in FIGS. 6B and 6C, the magnet 1 is adhesively bonded to a pole piece bottom 5 made of metal (pure iron or the like) having a small difference in thermal expansion coefficient from the magnet 1. The bottom 5 and the magnet housing 3 are provided with a through hole 3a at the bottom of the magnet housing 3,
The lower part of the pole piece bottom 5 is fitted into the through hole 3a,
The circumferential portion of the through hole 3a is joined by bonding or welding. With this configuration, when a thermal stress is applied, a compressive stress is applied in the radial direction, but it is not a shear stress. Such a method was taken.

【0005】[0005]

【発明が解決しようとする課題】従来技術で述べた
(a)は接着剤に柔軟性があるがゆえに、温度変化や振
動などの環境条件に対して、マグネット1の位置が安定
しない。そのため、マグネット1の微小な位置ずれによ
り磁気回路を通る磁束に変動が生じ、加速度計の性能に
悪影響を与えるという問題があった。
In the case of (a) described in the prior art, the position of the magnet 1 is not stable against environmental conditions such as temperature change and vibration because the adhesive has flexibility. For this reason, there has been a problem that a slight displacement of the magnet 1 causes a change in magnetic flux passing through the magnetic circuit, which adversely affects the performance of the accelerometer.

【0006】また(b)は、マグネットハウジング3と
ポールピース・ボトム5の嵌合部の径をあわせなければ
ならず、精密な加工が必要となり、コスト高となる欠点
があった。この発明はこれら従来の問題を解決して、温
度変化や振動などに対して、マグネット1の位置を安定
化すると共に、従来行っていたポールピース・ボトム5
と円筒状磁心3を嵌合させる精密加工を不要にすること
を目的としている。
In the case (b), the diameter of the fitting portion between the magnet housing 3 and the pole piece / bottom 5 must be matched, so that precise processing is required and the cost is increased. The present invention solves these conventional problems, stabilizes the position of the magnet 1 against temperature changes, vibrations, and the like, as well as the conventional pole piece bottom 5.
It is an object of the present invention to eliminate the need for precision machining for fitting the cylindrical core 3 with the magnetic core 3.

【0007】[0007]

【課題を解決するための手段】(1)請求項1のサーボ
加速度計の構造では、加速度を検知するペンデュラム
と、そのペンデュラムの位置の変化を検出するピックオ
フと、そのピックオフ出力に応じてトルカ電流を発生す
るサーボアンプと、ペンデュラムに取付けられ、トルカ
電流の流れるトルカコイルと、ペンデュラム及びトルカ
コイルを収納する壺形磁心とを有し、その壺形磁心は、
互いに対称な上下一対の壺形磁心がギャップを介して近
接対向して配され、その上下の壺形磁心は、軸線方向に
配された中央磁心と、内端が開放され、外端が閉塞され
た円筒状磁心とより成り、ギャップ内にペンデュラムが
軸線と直角に配され、上下の壺形磁心内に、軸線を中心
線とした円筒状のトルカコイルがそれぞれ収納されてい
る。
According to a first aspect of the present invention, there is provided a servo accelerometer having a pendulum for detecting acceleration, a pickoff for detecting a change in the position of the pendulum, and a torquer current corresponding to the pickoff output. A servo amplifier that generates the following, a Toruca coil attached to the pendulum and through which a Toruca current flows, and a pot-shaped core that houses the pendulum and the Toruca coil.
A pair of upper and lower pot-shaped cores symmetrical to each other are arranged close to and opposed to each other via a gap, and the upper and lower pot-shaped cores have a central core arranged in the axial direction, an inner end opened, and an outer end closed. The pendulum is disposed in the gap at right angles to the axis, and the upper and lower pot-shaped cores accommodate the cylindrical torquer coils with the axis as the center line.

【0008】請求項1では特に、中央磁心は、円柱状の
マグネットと、そのマグネットと熱膨張係数がほぼ等し
くマグネットの円筒状磁心側端面に接着された円板状の
ポールピース・ボトムを有し、円筒状磁心は、その閉塞
端部にマグネットの径よりかなり小さな透孔が軸線に沿
って形成され、閉塞端部とポールピース・ボトムは、互
いに接する透孔の内周縁に沿って溶接される。
In particular, the central magnetic core has a columnar magnet and a disk-shaped pole piece bottom bonded to the cylindrical core side end surface of the magnet having substantially the same thermal expansion coefficient as the magnet. At the closed end of the cylindrical core, a through hole considerably smaller than the diameter of the magnet is formed along the axis, and the closed end and the pole piece bottom are welded along the inner peripheral edge of the through hole that is in contact with each other. .

【0009】(2)請求項2の発明では、前記(1)に
おいて、円筒状磁心の閉塞端部に形成された透孔が中空
円筒状とされ、閉塞端部とポールピース・ボトムとは、
透孔の内周縁に沿った複数箇所でスポット溶接されてい
る。 (3)請求項3の発明では、前記(1)において、円筒
状磁心に形成された透孔が、ポールピース・ボトム側の
径の小さなろうと(漏斗)状とされている.
(2) In the second aspect of the present invention, in the above (1), the through hole formed at the closed end of the cylindrical magnetic core has a hollow cylindrical shape, and the closed end and the pole piece bottom are
Spot welding is performed at a plurality of locations along the inner peripheral edge of the through hole. (3) In the invention of claim 3, in (1), the through-hole formed in the cylindrical magnetic core has a funnel shape with a small diameter on the bottom side of the pole piece.

【0010】[0010]

【発明の実施の形態】この発明の実施例を図1及び図4
に、図5と対応する部分に同じ符号を付けて示す。図1
において、6は加速度を検知するペンデュラムで、ヒン
ジ6aにより支えられ、入力加速度により上下に振動す
る。7はペンデュラム6の位置を静電容量の変化によっ
て検出するピックオフ、8はピックオフ7の出力に応じ
てトルカ電流を発生するサーボアンプで、配線基板9に
実装される。10はトルカ電流が流れるトルカで、トル
カコイル10aが軸線Lを中心線とする円筒状のボビン
10bに巻かれている。ボビン10bはペンデュラム6
の両面に接合される。
1 and 4 show an embodiment of the present invention.
The same reference numerals as in FIG. 5 denote the same parts. FIG.
In the figure, reference numeral 6 denotes a pendulum for detecting an acceleration, which is supported by a hinge 6a and vibrates up and down by an input acceleration. Reference numeral 7 denotes a pick-off for detecting the position of the pendulum 6 based on a change in capacitance. Numeral 10 denotes a torquer through which a torquer current flows. A torquer coil 10a is wound around a cylindrical bobbin 10b having an axis L as a center line. Bobbin 10b is pendulum 6
Bonded on both sides.

【0011】11(11a,11b,11cより成る)
は加速度計のハウジングであり、Lを軸線として上端、
下端が閉塞された円筒状となっている。12,13は
上、下のマグネットハウジング3の周りに装着されたC
リング、14は配線基板9より外部に導出された端子で
ある。図1の例では、マグネット1と、その両端面に接
着されたポールピース・トップ4及びポールピース・ボ
トム5とにより中央磁心20が構成される。
11 (comprising 11a, 11b, 11c)
Is the housing of the accelerometer, the upper end of which is L axis,
It has a cylindrical shape with its lower end closed. Reference numerals 12 and 13 denote C mounted around the upper and lower magnet housings 3.
The ring 14 is a terminal led out from the wiring board 9. In the example of FIG. 1, a center core 20 is formed by the magnet 1 and the pole piece top 4 and the pole piece bottom 5 adhered to both end surfaces thereof.

【0012】サーボ加速度計の磁気回路はマグネット1
とマグネットハウジング(円筒状磁心)3で主に構成さ
れている。前述したように円筒状磁心3は、溶融石英な
どの熱膨張係数の小さい材料で作られたペンデュラム6
と接合するため、インバー材などの熱膨張係数の小さな
金属材料が用いられる。この円筒状磁心3に取付けられ
るマグネット1は例えばSm−Co(サマリウム−コバ
ルト)系材料で作られ、一般にインバー材のような小さ
な熱膨張係数のものは存在しない。従って、そのままマ
グネット1と円筒状磁心3を接合しただけでは、温度変
化の際に両者の熱膨張係数差によって、接合部に剥離が
生じてしまう。これを防ぐために、 (a)マグネット1との熱膨張係数差の小さい材質、例
えば純鉄などでできたポールピース・ボトムをマグネッ
ト1と接合する。
The magnetic circuit of the servo accelerometer is a magnet 1
And a magnet housing (cylindrical magnetic core) 3. As described above, the cylindrical core 3 is made of a pendulum 6 made of a material having a small coefficient of thermal expansion such as fused silica.
A metal material having a small coefficient of thermal expansion, such as an invar material, is used for bonding. The magnet 1 attached to the cylindrical magnetic core 3 is made of, for example, an Sm-Co (samarium-cobalt) -based material, and generally does not have a material having a small thermal expansion coefficient such as an invar material. Therefore, if the magnet 1 and the cylindrical magnetic core 3 are simply joined as they are, the joint will peel off due to the difference in thermal expansion coefficient between the two when the temperature changes. In order to prevent this, (a) A pole piece bottom made of a material having a small difference in thermal expansion coefficient from the magnet 1, for example, pure iron, is joined to the magnet 1.

【0013】(b)ポールピース・ボトム5と円筒状磁
心3の接合は、円筒状磁心3の底の中心部に透孔3aを
あけて、この透孔3aの内周部の壁とポールピース・ボ
トム5の接触部を溶接で接合する。透孔3aの径は、マ
グネット1の径に比べて十分に小さいものとする。
(a)により、マグネット1とポールピース・ボトム5
は熱膨張係数差が小さいため、温度変化による剥離は生
じない。また(b)により、円筒状磁心3とポールピー
ス・ボトム5の接合部は、透孔3aの内周部分だけとな
る。この接合部となる透孔3aはマグネット1の径に対
しかなり小さい径(例えば1/2以下)となっているた
め、この接合部はマグネット1を直接接合した場合に比
べると、温度変化の際の、両接合材料の熱膨張係数差に
よる伸びの差が少なく、熱応力が小さくなる。また、接
合部より外側では図3に示すように、ポールピース・ボ
トム5が円筒状磁心3の底に接触したまま、伸び縮みす
るため応力を生じない。
(B) The pole piece bottom 5 and the cylindrical magnetic core 3 are joined by forming a through hole 3a in the center of the bottom of the cylindrical magnetic core 3 and the inner peripheral wall of the through hole 3a and the pole piece. -The contact part of the bottom 5 is joined by welding. The diameter of the through hole 3a is sufficiently smaller than the diameter of the magnet 1.
According to (a), magnet 1 and pole piece bottom 5
Has a small difference in thermal expansion coefficient, so that peeling due to a temperature change does not occur. According to (b), the joint between the cylindrical magnetic core 3 and the pole piece bottom 5 is only the inner peripheral portion of the through hole 3a. Since the diameter of the through hole 3a serving as the joining portion is considerably smaller than the diameter of the magnet 1 (for example, 以下 or less), the joining portion has a larger temperature difference than the case where the magnet 1 is directly joined. However, the difference in elongation due to the difference in thermal expansion coefficient between the two joining materials is small, and the thermal stress is reduced. In addition, as shown in FIG. 3, no stress is generated outside the joint because the pole piece bottom 5 expands and contracts while being in contact with the bottom of the cylindrical magnetic core 3.

【0014】なお溶接による接合は、円周部全周の溶接
でもよいし、図4に示すように数点のスポット溶接でも
よい。図2Aは、円筒状磁心3の透孔3aを中空円筒状
にした場合である。この透孔3aを極めて小さい径と
し、この部分を一点あるいは極めて一点に近い状態で溶
接接合することも可能である。
[0014] The joining by welding may be welding of the entire circumference or a spot welding of several points as shown in FIG. FIG. 2A shows a case where the through hole 3a of the cylindrical magnetic core 3 is formed in a hollow cylindrical shape. It is also possible to make the through hole 3a extremely small in diameter and to weld this portion at one point or in a state very close to one point.

【0015】レーザ溶接などで溶接する際、レーザの照
射が容易となるように透孔3aの形状は図2Bに示すよ
うに、底面の径が大きく、ポールピース・ボトム5側の
接触部の径が小さいろうと(漏斗)状とすることもでき
る。マグネット1は焼結加工などで作られており、溶接
することは難しい。そのためマグネット1を溶接容易な
純鉄などのポールピース・ボトム5に接着してから、ポ
ールピース・ボトム5と円筒状磁心3を溶接している。
At the time of welding by laser welding or the like, the shape of the through hole 3a has a large diameter at the bottom surface and a diameter at the contact portion on the pole piece bottom 5 side as shown in FIG. Can be funnel-shaped. The magnet 1 is made by sintering or the like, and is difficult to weld. Therefore, the magnet 1 is bonded to the pole piece bottom 5 made of pure iron or the like, which is easy to weld, and then the pole piece bottom 5 and the cylindrical magnetic core 3 are welded.

【0016】なお各部材の熱膨張係数は次のような値で
ある。 ペンデュラム6(溶融石英):0.4〜0.55〔ppm
/℃〕 円筒状磁心3(インバー) :1.8〜2程度〔ppm /
℃〕 ポールピース・ボトム5(鉄):11.8〔ppm /℃〕 マグネット1(Sm−Co系):12〜13程度〔ppm
/℃〕
The thermal expansion coefficient of each member is as follows. Pendulum 6 (fused quartz): 0.4 to 0.55 [ppm
/ ° C] Cylindrical magnetic core 3 (invar): about 1.8 to 2 [ppm /
° C] Pole piece bottom 5 (iron): 11.8 [ppm / ° C] Magnet 1 (Sm-Co type): about 12 to 13 [ppm
/ ℃]

【0017】[0017]

【発明の効果】本発明によれば、マグネット1と円筒状
磁心(マグネットハウジング)3の接合が、両者の熱膨
張係数差によって破壊されることなく、なおかつ温度変
化や振動などの環境条件に対して、マグネット1が安定
して保持されているため、加速度計性能も安定する。し
かも従来のようにポールピース・ボトム5と円筒状磁心
3を嵌合させるために、これらに対して複雑かつ精密な
加工を行うことなく実現することができる。
According to the present invention, the joint between the magnet 1 and the cylindrical magnetic core (magnet housing) 3 is not destroyed due to the difference in thermal expansion coefficient between the two, and is resistant to environmental conditions such as temperature change and vibration. Since the magnet 1 is stably held, the performance of the accelerometer is also stabilized. In addition, since the pole piece bottom 5 and the cylindrical magnetic core 3 are fitted to each other as in the related art, it can be realized without performing complicated and precise processing on these.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の実施例を示す縦断面図。FIG. 1 is a longitudinal sectional view showing an embodiment of the present invention.

【図2】図1のマグネットハウジング(円筒状磁心)3
と中央磁心20との接合状態を示す縦断面図。
FIG. 2 is a magnet housing (cylindrical magnetic core) 3 of FIG.
FIG. 3 is a vertical cross-sectional view showing a joint state between the magnetic core and a central magnetic core 20.

【図3】図2Aの溶接箇所Pの周辺を拡大して示した断
面図。
FIG. 3 is an enlarged cross-sectional view showing the periphery of a welding location P in FIG. 2A.

【図4】図3の溶接箇所Pの配置を示した透孔3aの平
面図。
FIG. 4 is a plan view of a through hole 3a showing an arrangement of a welding portion P in FIG. 3;

【図5】従来のサーボ加速度計の構造を示す図で、Aは
一部を破断して示した斜視図、Bは原理的な構造図。
FIG. 5 is a view showing a structure of a conventional servo accelerometer, wherein A is a perspective view with a part cut away, and B is a principle structural view.

【図6】図5の中央磁心20とマグネットハウジング3
の接合状態を示す縦断面図。
FIG. 6 is a view showing a center magnetic core 20 and a magnet housing 3 shown in FIG. 5;
FIG. 3 is a longitudinal sectional view showing a joined state of FIG.

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】加速度を検知するペンデュラムと、そのペ
ンデュラムの位置の変化を検出するピックオフと、その
ピックオフ出力に応じてトルカ電流を発生するサーボア
ンプと、前記ペンデュラムに取付けられ、前記トルカ電
流の流れるトルカコイルと、前記ペンデュラム及びトル
カコイルを収納する壺形磁心とを有し、 その壺形磁心は、互いに対称な上下一対の壺形磁心がギ
ャップを介して近接対向して配され、その上下の壺形磁
心は、軸線方向に配された中央磁心と、内端が開放さ
れ、外端が閉塞された円筒状磁心とより成り、前記ギャ
ップ内に前記ペンデュラムが軸線と直角に配され、前記
上下の壺形磁心内に、前記軸線を中心線とした円筒状の
前記トルカコイルがそれぞれ収納されているサーボ加速
度計の構造において、 前記中央磁心は、円柱状のマグネットと、そのマグネッ
トと熱膨張係数がほぼ等しくマグネットの前記円筒状磁
心側側面に接着された円板状のポールピース・ボトムを
有し、 前記円筒状磁心は、その閉塞端部に前記マグネットの径
よりかなり小さい透孔が軸線に沿って形成され、前記円板状のポールピース・ボトムのマグネットが接着
された面とは反対側の面と、この面と接する前記閉塞端
部の透孔の内周縁が溶接されている ことを特徴とするサ
ーボ加速度計の構造。
1. A pendulum for detecting acceleration, a pickoff for detecting a change in the position of the pendulum, a servo amplifier for generating a torquer current in accordance with the pickoff output, and a servo amplifier attached to the pendulum and through which the torquer current flows. A torca coil, and a pot-shaped core for accommodating the pendulum and the toruca coil. The magnetic core comprises a central magnetic core arranged in the axial direction, a cylindrical magnetic core having an open inner end and a closed outer end, wherein the pendulum is arranged in the gap at a right angle to the axis, and the upper and lower pots are provided. In the structure of a servo accelerometer in which a cylindrical Toruca coil having the axis as a center line is housed in a shaped magnetic core, Has a cylindrical magnet, a disk-shaped pole piece bottom adhered to the cylindrical core side of the magnet having substantially the same thermal expansion coefficient as the magnet, and the cylindrical core has a closed end. A hole substantially smaller than the diameter of the magnet is formed in the part along the axis, and the disc-shaped pole piece bottom magnet is bonded
And the closed end in contact with this surface
A structure of a servo accelerometer, wherein an inner peripheral edge of a through hole of a portion is welded .
【請求項2】請求項1に記載のサーボ加速度計の構造に
おいて、 前記円筒状磁心の前記閉塞端部に形成された前記透孔が
中空円筒状とされ、前記閉塞端部と前記ポールピース・
ボトムとは、前記透孔の内周縁に沿った複数箇所でスポ
ット溶接されていることを特徴とするサーボ加速度計の
構造。
2. The structure of the servo accelerometer according to claim 1, wherein the through-hole formed in the closed end of the cylindrical magnetic core has a hollow cylindrical shape, and the closed end has Part and the pole piece
The servo accelerometer structure, wherein the bottom is spot-welded at a plurality of locations along the inner peripheral edge of the through hole.
【請求項3】請求項1に記載のサーボ加速度計の構造に
おいて、 前記円筒状磁心に形成された前記透孔が、前記ポールピ
ース・ボトム側の径の小さなろうと(漏斗)状とされて
いることを特徴とするサーボ加速度計の構造。
3. The structure of the servo accelerometer according to claim 1, wherein the through hole formed in the cylindrical magnetic core has a small diameter funnel (funnel) on the bottom side of the pole piece. ) The structure of a servo accelerometer, characterized in that
JP08360098A 1998-03-30 1998-03-30 Structure of servo accelerometer Expired - Lifetime JP3245675B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08360098A JP3245675B2 (en) 1998-03-30 1998-03-30 Structure of servo accelerometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08360098A JP3245675B2 (en) 1998-03-30 1998-03-30 Structure of servo accelerometer

Publications (2)

Publication Number Publication Date
JPH11281670A JPH11281670A (en) 1999-10-15
JP3245675B2 true JP3245675B2 (en) 2002-01-15

Family

ID=13806989

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8459113B2 (en) 2010-02-26 2013-06-11 Japan Aviation Electronics Industry, Limited Magnetically reinforced servo accelerometer

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7100447B2 (en) * 2004-12-07 2006-09-05 Honeywell International Inc. Super Invar magnetic return path for high performance accelerometers
CA2596304C (en) * 2006-08-16 2011-03-29 Japan Aviation Electronics Industry Limited Servo accelerometer
JP2010175453A (en) 2009-01-30 2010-08-12 Japan Aviation Electronics Industry Ltd Servo accelerometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8459113B2 (en) 2010-02-26 2013-06-11 Japan Aviation Electronics Industry, Limited Magnetically reinforced servo accelerometer

Also Published As

Publication number Publication date
JPH11281670A (en) 1999-10-15

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