JP3235113B2 - Ion implanter - Google Patents
Ion implanterInfo
- Publication number
- JP3235113B2 JP3235113B2 JP14771091A JP14771091A JP3235113B2 JP 3235113 B2 JP3235113 B2 JP 3235113B2 JP 14771091 A JP14771091 A JP 14771091A JP 14771091 A JP14771091 A JP 14771091A JP 3235113 B2 JP3235113 B2 JP 3235113B2
- Authority
- JP
- Japan
- Prior art keywords
- ion
- beam line
- chamber
- line chamber
- ion implantation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005468 ion implantation Methods 0.000 claims description 17
- 239000003638 chemical reducing agent Substances 0.000 claims description 8
- 238000010884 ion-beam technique Methods 0.000 claims description 8
- 238000002513 implantation Methods 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 18
- 229910052731 fluorine Inorganic materials 0.000 description 9
- 239000011737 fluorine Substances 0.000 description 9
- 239000007789 gas Substances 0.000 description 9
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 8
- 238000011109 contamination Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Description
【０００１】[0001]
【産業上の利用分野】本発明はイオン注入装置に係り，
特に高速，高集積デバイス製造のためのイオン注入装置
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ion implantation apparatus,
In particular, the present invention relates to an ion implantation apparatus for manufacturing a high-speed, highly integrated device.
【０００２】近年の半導体デバイスの高集積化に伴い，
イオン注入法により深さ100 nm以下の浅いpn接合を形成
する技術が要求されている。このための一手段として,
ビームラインの後段に減速器を設けることで, 低エネル
ギー注入を実現する技術が開発されている。[0002] With the recent high integration of semiconductor devices,
A technique for forming a shallow pn junction with a depth of 100 nm or less by ion implantation is required. As a means for this,
A technology has been developed to achieve low-energy injection by providing a decelerator at the subsequent stage of the beam line.
【０００３】しかし，この方法で注入すると, 注入時に
ビームライン内を通過する一部のイオンが, 残留ガス
（主に水素，水）との衝突で中性化される。その結果，
中性化されたイオンは減速器で減速されないで，イオン
ソースから引き出された高エネルギーのまま注入される
ことになり，目的とする深さと異なる場所に注入される
成分（エネルギー汚染）が生ずる。However, when implanted by this method, some ions passing through the beam line at the time of implantation are neutralized by collision with residual gas (mainly hydrogen and water). as a result,
The neutralized ions are not decelerated by the reducer, but are implanted with the high energy extracted from the ion source, and a component (energy contamination) is implanted at a location different from the target depth.
【０００４】本発明はこのようなエネルギー汚染の低減
を行ったイオン注入法として利用できる。The present invention can be used as an ion implantation method for reducing such energy contamination.
【０００５】[0005]
【従来の技術】図２は従来例のイオン注入装置の模式断
面図である。図において，１はイオンソース，２は質量
分析器，３はビームライン室，４は質量分離スリット，
５は減速器，６は注入室，Ｗは被注入基板で半導体ウエ
ハ，点線で示される矢印はイオンビームである。2. Description of the Related Art FIG. 2 is a schematic sectional view of a conventional ion implantation apparatus. In the figure, 1 is an ion source, 2 is a mass analyzer, 3 is a beam line chamber, 4 is a mass separation slit,
5 is a speed reducer, 6 is an implantation chamber, W is a substrate to be implanted, a semiconductor wafer, and an arrow shown by a dotted line is an ion beam.
【０００６】従来のイオン注入装置においては，質量分
析器２とビームライン室３との間に絞りを設けていなか
った。このため，イオンソース１内で発生するガスが容
易に質量分析器２を通り，ビームライン室３に入り込む
ことになる。[0006] In the conventional ion implantation apparatus, no diaphragm is provided between the mass analyzer 2 and the beam line chamber 3. Therefore, gas generated in the ion source 1 easily passes through the mass analyzer 2 and enters the beam line chamber 3.
【０００７】[0007]
【発明が解決しようとする課題】したがって，ビームラ
イン室内の真空度はこの部分をポンプで排気しても，2
×10-6 Torr 程度より上げることが困難で, これが原因
でイオン注入の際にエネルギー汚染が生ずるという問題
があった。Therefore, the degree of vacuum in the beam line chamber can be reduced to 2 even if this part is evacuated by a pump.
It is difficult to increase the pressure above about × 10 -6 Torr, which causes a problem that energy contamination occurs during ion implantation.
【０００８】本発明は減速イオン注入の際のエネルギー
汚染を低減し，浅い接合の形成を可能とすることを目的
とする。SUMMARY OF THE INVENTION It is an object of the present invention to reduce energy contamination at the time of slow ion implantation and to enable formation of a shallow junction.
【０００９】[0009]
【課題を解決するための手段】上記課題の解決は， １）イオンソースと，質量分析器と，ビームライン室
と，質量分析スリットと，減速器と，被注入基板を挿入
する注入室とを順に配列して構成されるイオン注入装置
であって，該質量分析器と該ビームライン室の間を仕切
り且つイオンビームが通過する孔が開口された絞りと，
該ビームライン室を独立に排気する手段とを有し，該イ
オンビームは該ビームライン室に入射後は偏向されるこ
となく該注入室に到るイオン注入装置，あるいは ２）前記絞りは孔径可変構造を有する前記１）記載のイ
オン注入装置により達成される。To solve the above problems, 1) an ion source, a mass analyzer, a beam line chamber, a mass analysis slit, a speed reducer, and an implantation chamber into which a substrate to be implanted is inserted. An ion implanter configured to be arranged in order, said diaphragm having a hole separating said mass analyzer and said beam line chamber and having an opening through which an ion beam passes;
Means for independently evacuating the beam line chamber, wherein the ion beam is deflected after being incident on the beam line chamber.
The ion implantation apparatus which reaches the implantation chamber soon , or 2) the aperture is achieved by the ion implantation apparatus according to the above 1) having a variable hole diameter structure .
【００１０】[0010]
【作用】本発明は質量分析器と質量分離スリットを持つ
ビームライン室との間に絞りを設けて，ビームライン室
をイオンソースとこの絞りを介して隔離し，ビームライ
ン室の真空度を上げているため（従来装置では不可能で
あった 1×10-6 Torr より良い10-7程度），残留ガスが
約１桁程度少なくなり，その結果ビームライン室を通過
するイオンは残留ガスと衝突する割合が少なくなり，し
たがってイオンソースから出た高エネルギーのイオンが
中性化されて減速されないままウエハに衝突することに
よるエネルギー汚染が低減される。According to the present invention, an aperture is provided between the mass spectrometer and the beam line chamber having the mass separation slit, the beam line chamber is isolated from the ion source through the aperture, and the degree of vacuum in the beam line chamber is increased. (Approximately 10 -7 which is better than 1 × 10 -6 Torr which was impossible with the conventional equipment), the residual gas is reduced by about one digit, and as a result, ions passing through the beam line chamber collide with the residual gas. Therefore, the energy contamination due to the high-energy ions emitted from the ion source being neutralized and colliding with the wafer without being decelerated is reduced.
【００１１】さらに, フッ素をビームライン室に導入す
ることにより,残留ガスをフッ素と置換するようにすれ
ば, フッ素は電気陰性度が最も高いため, 従来の残留ガ
ス（水素，水）よりも中性化が起こりにくくなる。Further, if the residual gas is replaced with fluorine by introducing fluorine into the beam line chamber, fluorine has the highest electronegativity, and therefore is more intermediate than the conventional residual gas (hydrogen, water). It is less likely to be activated.
【００１２】[0012]
【実施例】図１は実施例のイオン注入装置の模式断面図
である。図において，１はイオンソース，２は質量分析
器，３はビームライン室，４は質量分離スリット，５は
減速器，６は注入室，７は本発明による絞り，８はビー
ムライン室にゲートバルブを介して設けられた排気ポン
プ，９はビームライン室にバルブを介して設けられたフ
ッ素導入口，Ｗは被注入基板で半導体ウエハ，点線で示
される矢印はイオンビームである。FIG. 1 is a schematic sectional view of an ion implantation apparatus according to an embodiment. In the figure, 1 is an ion source, 2 is a mass analyzer, 3 is a beam line chamber, 4 is a mass separation slit, 5 is a speed reducer, 6 is an injection chamber, 7 is an aperture according to the present invention, and 8 is a gate in the beam line chamber. An exhaust pump provided via a valve, 9 denotes a fluorine inlet provided in the beam line chamber via the valve, W denotes a substrate to be implanted, a semiconductor wafer, and an arrow indicated by a dotted line denotes an ion beam.
【００１３】ここで，絞り７は厚さ約10mmのアルミニウ
ム(Al)合金板で質量分析器２とビームライン室３の間を
仕切り, イオンビームの通過する中央部に直径約20mmの
孔が開口されている。The aperture 7 is an aluminum (Al) alloy plate having a thickness of about 10 mm and partitions the mass spectrometer 2 from the beam line chamber 3. A hole having a diameter of about 20 mm is opened at the center where the ion beam passes. Have been.
【００１４】イオンソース１でガスはイオン化されて，
一定のエネルギーで引き出され，質量分析器２で目的の
イオンだけが選択される。質量分析器２から絞り７を経
由してビームライン室３を通過したイオン電流は質量分
離スリット４で適当な値にされ，減速器５でイオンは減
速されてウエハＷに注入される。The gas is ionized by the ion source 1 and
The ions are extracted with a constant energy, and only the target ions are selected by the mass analyzer 2. The ion current passing through the beam line chamber 3 from the mass analyzer 2 via the aperture 7 is adjusted to an appropriate value by the mass separation slit 4, and the ions are decelerated by the speed reducer 5 and injected into the wafer W.
【００１５】この場合，ビームライン室にフッ素を導入
しながら，真空度を悪くても例えば1×10-6 Torr 程度
になった後，注入を行う。この真空度は，ビームライン
室の長さやイオンビームのエネルギーによってエネルギ
ー汚染の生ずる割合が異なるので，その条件に応じて多
少変える必要がある。In this case, while the fluorine is being introduced into the beam line chamber, the implantation is carried out, for example, at about 1 × 10 −6 Torr even if the degree of vacuum is poor. The degree of vacuum varies depending on the length of the beam line chamber and the energy of the ion beam, and hence the rate of energy contamination varies.
【００１６】実施例では電気陰性度の高いガスとしてフ
ッ素を用いたが，これの代わりに水素や水より電気陰性
度の高い物質である塩素あるいは臭素のハロゲンガス等
であってもよい。In the embodiment, fluorine is used as the gas having a high electronegativity, but a halogen gas such as chlorine or bromine, which is a substance having a higher electronegativity than hydrogen or water, may be used instead.
【００１７】また，フッ素を用いない場合は真空度をよ
り上げることができるので，実施例のように必ずしもフ
ッ素を導入する必要はない。また，装置の汎用化の点を
考慮して, 後段の減速器に印加する電圧の極性を変えて
加速器として使用するとビーム径は小さくなるから，絞
りの孔径を可変可能な構造（例えば，直径10mm〜30mm）
にすることもできる。When fluorine is not used, the degree of vacuum can be further increased, so that it is not always necessary to introduce fluorine as in the embodiment. In addition, considering the generalization of the device, the beam diameter becomes smaller if the voltage applied to the subsequent reducer is changed and used as an accelerator, so that the beam diameter becomes smaller. ~ 30mm)
You can also
【００１８】[0018]
【発明の効果】減速イオン注入の際のエネルギー汚染を
低減し，100 nm以下の浅い接合の形成が可能となった。According to the present invention, energy contamination during slow ion implantation is reduced, and a shallow junction of 100 nm or less can be formed.
【００１９】この結果，高速, 高集積デバイスの形成に
寄与することができた。As a result, it was possible to contribute to the formation of a high-speed, highly integrated device.
【図１】 実施例のイオン注入装置の模式断面図FIG. 1 is a schematic sectional view of an ion implantation apparatus according to an embodiment.
【図２】 従来例のイオン注入装置の模式断面図FIG. 2 is a schematic cross-sectional view of a conventional ion implantation apparatus.
１ イオンソース ２ 質量分析器 ３ ビームライン室 ４ 質量分離スリット ５ 減速器 ６ 注入室 ７ 本発明による絞り ８ ビームライン室にゲートバルブを介して設けられた
排気ポンプ ９ ビームライン室にバルブを介して設けられたフッ素
導入口 Ｗ 被注入基板で半導体ウエハDESCRIPTION OF SYMBOLS 1 Ion source 2 Mass analyzer 3 Beam line room 4 Mass separation slit 5 Reducer 6 Injection room 7 Restriction according to the present invention 8 Exhaust pump provided in beam line room via gate valve 9 Beam line room through valve Fluorine introduction port provided W Semiconductor wafer with substrate to be injected
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平１−248451（ＪＰ，Ａ) 特開 昭63−218058（ＪＰ，Ａ) 特開 平１−220353（ＪＰ，Ａ) 実開 昭62−71865（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) H01J 37/317 H01J 37/18 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-1-248451 (JP, A) JP-A-62-118058 (JP, A) JP-A-1-220353 (JP, A) Real opening Sho 62- 71865 (JP, U) (58) Field surveyed (Int. Cl. 7 , DB name) H01J 37/317 H01J 37/18
Claims (2)
ライン室と，質量分離スリットと，減速器と，被注入基
板を挿入する注入室とを順に配列して構成されるイオン
注入装置であって， 該質量分析器と該ビームライン室の間を仕切り且つイオ
ンビームが通過する孔が開口された絞りと，該ビームラ
イン室を独立に排気する手段とを有し，該イオンビーム
は該ビームライン室に入射後は偏向されることなく該注
入室に到ることを特徴とするイオン注入装置。1. An ion implantation apparatus comprising an ion source, a mass analyzer, a beam line chamber, a mass separation slit, a speed reducer, and an implantation chamber into which a substrate to be implanted is sequentially arranged. Te has a diaphragm hole between the mass analyzer and the beam line chamber partition and ion beam passes is opened, and means for exhausting independently the beam line chamber, the ion beam
Is not deflected after entering the beamline chamber.
An ion implantation apparatus characterized by reaching an entrance .
特徴とする請求項１記載のイオン注入装置。2. The ion implantation apparatus according to claim 1, wherein said aperture has a variable hole diameter structure .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14771091A JP3235113B2 (en) | 1991-06-20 | 1991-06-20 | Ion implanter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14771091A JP3235113B2 (en) | 1991-06-20 | 1991-06-20 | Ion implanter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH056754A JPH056754A (en) | 1993-01-14 |
| JP3235113B2 true JP3235113B2 (en) | 2001-12-04 |
Family
ID=15436467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14771091A Expired - Fee Related JP3235113B2 (en) | 1991-06-20 | 1991-06-20 | Ion implanter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3235113B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2343546B (en) * | 1995-11-08 | 2000-06-21 | Applied Materials Inc | An ion implanter with deceleration lens assembly |
| GB2344214B (en) * | 1995-11-08 | 2000-08-09 | Applied Materials Inc | An ion implanter with improved beam definition |
| US5837568A (en) * | 1995-12-12 | 1998-11-17 | Sanyo Electric Co., Ltd. | Manufacturing method of semiconductor devices |
-
1991
- 1991-06-20 JP JP14771091A patent/JP3235113B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH056754A (en) | 1993-01-14 |
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