JP3232446B2 - Temperature test equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a temperature test apparatus suitable for performing a durability test on a semiconductor circuit board or the like under a high temperature.

[0002]

2. Description of the Related Art A temperature test apparatus of this type is called a burn-in apparatus.
2. Description of the Related Art A device having a configuration as shown in FIG. this is,
A box-shaped space surrounded by the heat-insulating wall 1 is separated by a partition plate 4 provided with a gap between the left and right heat-insulating side walls 1a and 1b at the upper part of the box-shaped space, forming an air inlet 2 and an outlet 3. , An air flow path 5 is defined above the horizontal partition plate 4 and a temperature test chamber 6 is defined below the horizontal partition plate 4. A pair of the left and right ends 4a, 4b of the horizontal partition plate 4 is formed on the floor surface 1c. The air flow distribution chambers 8 are defined on one of the left and right sides of the temperature test chamber 6 and the air flow collecting chamber 9 is defined on the other side by suspending the air flow distribution plates 7a and 7b. An air cooler 11 comprising an evaporator of a refrigerator, an air heater 12 and a blower fan 13 are housed to form a constant temperature air supply means 10, and the constant temperature air supplied from the constant temperature air supply means 10 Between the air flow path 5 and the temperature test chamber 6 via the distribution chamber 8 and the airflow collecting chamber 9 It is configured to ring.

In this apparatus, a device under test such as a semiconductor circuit board is loaded on a predetermined rack 100 or the like, carried into a temperature test chamber 6, and subjected to a current test at a high temperature of, for example, 125 ° C. for several days. This is performed for the purpose of excluding in advance parts having concerns about durability in the future under sieving conditions such as the above-mentioned bad conditions. In order to increase the test efficiency (also the production efficiency), the test equipment having such a purpose is to shorten the time required for the test by making the temperature in the test chamber uniform in as short a time as possible. Since the test period is as long as several days, it is desired to increase the number of test items that can be processed in one test as much as possible. Conventionally, a plurality of blower fans 13 are used in accordance with the size of the apparatus, and are arranged so as to cross the air flow path 5 at right angles as shown in FIG.

[0004] However, the dimensions of the test equipment depend on the material,
Due to transportation, loading and unloading of the DUT, and other operations,
Since there is naturally a certain limit, there is no other way but to achieve the above-mentioned demand by increasing the constant temperature air supply capacity without increasing the size of the constant temperature air supply means. For that purpose, it is first required to increase the blowing capacity without enlarging the volume of the air flow path. Further, the blower fan is also required to perform severe continuous operation. However, in the conventional apparatus, a through hole is formed in the top plate 1d, and the rotation shaft of the blower fan is made to penetrate the through hole. If the blower fan breaks down because it is configured to connect to the output shaft of the unit, it is not easy to repair and replace it. There was a drawback that it took time, during which time the temperature test had to be interrupted.

[0005]

SUMMARY OF THE INVENTION A first object of the present invention is to disclose a temperature test apparatus in which a blower fan can be easily repaired and replaced in a short time.

A second object of the present invention is to disclose a temperature test apparatus capable of increasing test efficiency without increasing the size of the apparatus.

[0007]

A first gist of the present invention is that a room surrounded by a heat insulating wall (1) is partitioned by a partition plate (4), and an air flow path (5) is provided on one side of the partition plate. A temperature test chamber (6) is defined on the other side, an airflow distribution chamber (8) is defined on one side of the temperature test chamber, and an airflow collecting chamber (9) is defined on the other side. The air flow distribution chamber and the air flow collecting chamber communicate with each other through the air flow path, and an air cooler (1) is provided in the air flow path.
1), an air heater (12), and a plurality of blower fans are housed to form a constant-temperature air supply unit, and the constant-temperature air supplied from the constant-temperature air supply unit passes through the airflow distribution chamber and is subjected to the temperature test. In a temperature test apparatus which circulates through the airflow collecting chamber and then returns to the constant temperature air supply means again, the heat insulating wall constituting the air flow path includes a plurality of slightly larger impellers than the impeller of the blower fan. Openings are respectively formed corresponding to the respective blower fans, and a casing of the blower fan having a protruding edge projecting at a slight width toward the center of the opening is provided on the inner surface of the heat insulating wall, and the opening is provided. An impeller that is removably fitted into the opening, and has a fan drive motor of the blower fan mounted on the outer surface and an impeller rotated by the output shaft of the fan drive motor on the inner surface. There it was closed by the closure member and the heat insulating properties packing through between said projecting edge the closing member to a temperature test apparatus characterized.

[0008] In the above, since the blower fan needs to generate a large air volume compared to the volume occupied by the fan, a multi-blade fan or the like is preferable. In the temperature test apparatus according to the first aspect, if the blower fan, the closing member, and the fan drive motor are unitized as replacement parts, in the event of a failure, the repair is completed in an extremely short time, and No special skills are required for repair.

According to a second aspect of the present invention, in the temperature test apparatus defined in the first aspect, a virtual connection is established between the rotation centers of a plurality of blowing fans arranged side by side in the air flow path in a direction transverse to the air flow direction. Line segments (L) are provided adjacent to each other so as to form an acute angle or a zigzag shape with respect to the airflow direction, and a pair of air blowers which are close to the left and right side wall surfaces of the air flow path. The temperature test apparatus is characterized in that the outlet of the fan is open along the left and right side walls of the air flow path.

The temperature test apparatus according to the second aspect uses a sirocco fan as a blower fan under a condition that the width of the air flow path in the left and right direction (based on the air flow direction) is limited to a fixed value. Is a pair, so that the virtual line segment forms an acute angle with respect to the airflow direction,
In the case of three or more, when the virtual line segments are arranged adjacent to each other so as to form a zigzag shape, the maximum air volume can be obtained. In addition, the airflow causes a loss of blowing pressure on the wall surface due to contact resistance with the wall surface, but by providing the blower fan outlets located close to the left and right wall surfaces along the wall surface, the center of the air flow path is reduced. The non-uniformity of the flow velocity between the part and the left and right wall surfaces is eliminated.

[0011]

1 to 3 show a main part of a first embodiment of a temperature test apparatus according to the present invention. As a conventional technique, the temperature test apparatus shown in FIG. 5 is different from the temperature test apparatus shown in FIG. 5 only in the mounting structure of the blower fan. , The same symbols are used, and detailed description is omitted. In FIG. 1, a box-shaped space surrounded by a heat insulating wall 1 is
In the upper part of the space, a horizontal partition plate 4 is used, and an air flow path 5 is defined above the partition plate, and a temperature test chamber 6 is defined below the partition.

A slight gap is provided between the left and right side edges 4a, 4b of the partition plate 4 and the left and right heat insulating wall surfaces 1a, 1b to form a circulating air inlet 3 and an outlet 2. From the left and right ends 4a and 4b, air flow distribution plates 7a and 7b each formed of a perforated plate are vertically installed toward the floor of the temperature test chamber 5 to surround the temperature test chamber 6 from the left and right. An airflow distribution chamber 8 and an airflow collecting chamber 9 are defined between the airflow distribution chamber 8 and the heat insulating wall. On the front side of the temperature test chamber 6, there is an opening (not shown) for taking in and out a rack for accommodating a DUT at an equal interval with an appropriate space therebetween, and is configured to be openable and closable by a door. Further, a current-carrying portion (not shown) to the DUT is provided on the back side.

An air flow path 5 surrounded by a top plate 1d, left and right side walls 1e and 1f and a partition plate 4 has an air cooler 11 comprising an evaporator of a refrigerator from an inlet 3 to an outlet 2 of circulating air. An air heater 12 composed of a heating wire heater and a blower fan are provided in this order. The blower fan is constituted by a pair of sirocco fans 20. One sirocco fan 20 has a rectangular panel 22 that can be fitted into the substantially square opening 21 formed in the top plate 1d, and a rectangular block-shaped motor fixed on the panel 22. Support stand 25 and motor support stand 25
And the output shaft of the motor M is provided with rotary shaft insertion holes 23 and 26 provided concentrically through the center of the motor support 25 and the center of the rectangular panel 22.
And the extension shaft 24 rotatably housed therein and integrally rotatably connected thereto.

An impeller 27 of a sirocco fan is fixed to a protruding end of the extension shaft 24 from the rotation shaft insertion hole 23 at a rotation center thereof. One opening 21 provided on the top plate is preferably provided with an impeller 2 as shown in FIG.
The size is determined to be slightly larger than 7. From the lower edge of the opening 21 to the center of the opening,
A protruding edge portion 21a having a slight width is provided, and a peripheral portion of the panel 22 is slightly pressed against the protruding edge portion 21a via a heat insulating packing 28, and a peripheral edge of the opening 21 on the top plate upper surface side. Then, a pressing plate 29 fixed by screws is provided to fix the panel 22 to the opening 21 so as to straddle the butted portion with the upper peripheral edge of the panel 22. The other sirocco fan 2
The 0 side is similarly configured as shown in FIG.

Reference numeral 30 denotes a sirocco fan casing fixed to the lower surface of the top plate so as to surround the impeller 27.
As shown in FIG. 2, the pair of sirocco fans has an imaginary line segment L connecting the rotation centers (24) and (24) obliquely crosses the air flow path (forms an acute angle with respect to the direction of the air flow). And the casings of the two sirocco fans constitute the outlets 20a, 20a of the two sirocco fans. Are replaced by a part of the left and right side walls 1e, 1f of the air flow path 5, respectively, so that the two outlets 20a, 20a
They are provided along the left and right side wall surfaces 1e, 1f. The angle between the direction of the airflow (the direction of the left and right wall surfaces) and the virtual line segment is 3
In the range of 0 to 45 degrees, the installation efficiency is high and the amount of air flow obtained for the installation area is large.

FIG. 3 shows a second example using three sirocco fans.
This shows an embodiment, and like the first embodiment, parts having the same functions as those of the prior art are denoted by the same reference numerals and description thereof will be omitted. Sirocco fan 20, 20, 20
The virtual line segment L connecting the rotation centers 24 is in a zigzag broken line state, and each straight line segment forming the broken line is
It forms an acute angle in the airflow direction. The casings 30, 30, 30 of these three sirocco fans are partly close to or in contact with each other, and
outlets 20a, 20a of the fans disposed on the e and f sides
Are provided along the left and right side walls, and only the outlet 20b of the central sirocco fan has both outlets 20a. 20
It is open at the position sandwiched by a. Other configurations are not different from the first embodiment. When there are four or more blowing fans, virtual line segments connecting the rotation centers are sequentially turned in the reverse direction at the rotation center 24 and arranged in a zigzag shape.

[0017]

[Effect] In a conventional temperature test apparatus, an increase in the blowing capacity directly leads to an increase in the installation area as compared with an increase in the capacity of an air cooler or an air heater, and an increase in the size of the apparatus is inevitable. However, in the above device, the installation space is effectively used when installing the blower fan,
Extremely high-density mounting is possible, and the air outlet that opens along the left and right walls of the air flow path eliminates the gap between the flow velocity along the left and right walls decelerated by the resistance of the wall and the flow velocity at the center. This has the effect of supplying a uniform airflow to the temperature test chamber and improving the test accuracy. In the event of a failure of the blower fan, the holding piece 29 may be removed and replaced with a new blower fan unit prepared in advance, so that a person who has found a failure can respond immediately and reduce the influence of the interruption of the test.

[Brief description of the drawings]

FIG. 1 is an explanatory sectional view showing a main part of a first embodiment of the present invention.

FIG. 2 is an explanatory sectional view taken along line AA of FIG. 1;

FIG. 3 is an explanatory sectional view showing a main part of a second embodiment of the present invention.

FIG. 4 is an explanatory cross-sectional view showing an example of a conventional technique.

FIG. 5 is a sectional view taken along the line BB in FIG. 4;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Insulation wall 2 Outlet 3 Inlet 4 Partition plate 5 Air flow path 6 Temperature test room 7a, b Air flow distribution plate 8 Air flow distribution room 9 Air flow collection room 11 Air cooler 12 Air heater 20 Sirocco fan 21 Opening 22 Square panel 25 Motor Support base 28 heat-insulating packing 27 impeller 30 casing

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G01R 31/26 H01R 21/66

Claims (1)

(57) [Claims] 1. A room surrounded by a heat insulating wall is partitioned by a partition plate, an air flow path is defined on one side of the partition plate, and a temperature test chamber is defined on the other side, and the temperature test chamber is sandwiched therebetween. An airflow distribution chamber is defined on one side and an airflow collection chamber is defined on the other side, and the airflow distribution chamber and the airflow collection chamber are communicated with each other through the air flow path. A constant temperature air supply unit is formed by housing the heater and the plurality of blower fans, and constant temperature air supplied from the constant temperature air supply unit enters the temperature test chamber via the air flow distribution chamber, and then enters the air flow collection unit. In a temperature test apparatus that circulates back to the constant temperature air supply means again through the chamber, a plurality of openings slightly larger than the impeller of the blower fan correspond to each blower fan in the heat insulating wall constituting the air flow path. Respectively, and on the inner surface of the heat insulating wall, At the center of the opening, a casing of a blower fan having a protruding edge portion with a slight width is provided, the opening is removably fitted to the opening, and the fan of the blower fan is provided on the outer surface. A temperature which is closed by a closing member to which the driving motors are respectively mounted and an impeller arranged on the inner surface thereof to be rotated by the output shaft of the fan driving motor, and a heat insulating packing interposed between the closing member and the protruding edge portion. Testing equipment.