JP3231943U - Load cell for linear actuator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a load cell for a linear actuator that facilitates calibration of a force generated by the linear actuator under a specific range. A load cell (30a) for a linear actuator, which is configured to measure a force applied by a rotary motor, includes a spring element 32, a hollow portion 33, and at least one strain gauge S1 to S4. The spring element has a first side 301 and a second side 302. The first side and the second side face each other. The hollow portion penetrates the spring element. At least one strain gauge is fixed to the spring element and is located between the first side and the second side. When the rotary motor is driven to move along the first direction and a force is applied to the spring element, the second side moves relative to the first side, the spring element deforms and at least one strain gauge Due to the deformation, the force is measured and standardized in a specific range. [Selection diagram] FIG. 14

Description

The present disclosure relates to a load cell, more specifically a load cell for a linear actuator to facilitate calibrating the force generated by the linear actuator under a particular range.

Currently, commercially available small linear actuators are mainly used in the vertical type. Due to its high speed and precision characteristics, linear actuators have become an integral part of the major semiconductor and panel industries.

However, with such improvements in product specifications, the technical requirements for picking and arranging parts have become relatively strict in the manufacturing industry. In addition to maintaining the accuracy of the position of each reciprocating motion, force reproducibility is also an important part. If a manufactured part is fragile and cannot withstand pressure, without a force feedback mechanism, there is a risk of overcompression or chipping during the part picking and placement process, which tends to reduce product yield. Currently, commercially available small linear actuators can perform force calibration via a drive unit, but conventional linear actuators do not have a feedback mechanism, so they need to be adjusted once before use. However, the linear actuator has a temperature effect during operation, and the operating temperature is in the range of room temperature to 120 ° C. or higher. Due to the temperature difference during operation, thermal expansion and contraction of machine parts are caused, resulting in non-uniform dimensions. The magnetic force of the magnet is also affected by the temperature change. At that time, the magnetic field becomes unstable and a non-uniform force is generated. An error occurs for each force output.

Therefore, in order to eliminate problems from the prior art, it is necessary to provide a load cell for the linear actuator to facilitate calibration of the force generated by the linear actuator under a specific range.

An object of the present disclosure is to provide a load cell for a linear actuator in order to facilitate calibration of the force generated by the linear actuator under a particular range.
Since the linear motor and the rotary motor are connected to the two opposite sides of the load cell, the load cell and the linear motor are partially overlapped and stacked on the base so as to minimize the size of the entire linear actuator. Also, at least two of the main components are arranged along the first direction in order to minimize the offset of the entire linear actuator with respect to the center of gravity in the first direction. This makes it easier to hang the linear actuator and is more likely to be applied to the process of picking and arranging parts in the first direction. That is, the linear actuator of the present disclosure is arranged in a slim manner by attaching a load cell. When a linear actuator is applied to the part picking and placement process, the support and center of gravity of the entire linear actuator is offset in the direction of the part picking and placement. Along with the slim layout, it becomes easier to prevent shaking due to movement or applied force.

Another object of the present disclosure is to provide a load cell for a linear actuator to facilitate calibration of the force generated by the linear actuator under a particular range so that the linear actuator can be applied to the part picking and placement process. It is to be.
A load cell is used to calibrate the force generated by the linear actuator, and when the linear actuator is applied to the part picking and placement process in reciprocating motion, the force applied to the component is measured by the load cell and the reciprocating motion Calibrate the force and position inside. Therefore, the position accuracy in each reciprocating motion is maintained. This prevents overcompression and chipping in the component picking and placement process. Further, the load cell is a strain gauge load cell that includes, for example, a spring element and a set of strain gauges for measuring force in a particular range. When a force is applied to the load cell, the spring element of the load cell is slightly deformed and always returns to its original shape unless it is overloaded. When the spring element is deformed, the strain gauge arranged on the spring element is also deformed, and the deformation of the strain gauge is converted into an electric signal and fed back to the drive unit connected to the linear actuator. That is, the magnitude of the force is calculated based on the output of the load cell and fed back to the drive unit connected to the linear actuator. This makes it easier for the drive unit connected to the linear actuator to control the linear actuator and maintain position accuracy in the process of picking and arranging parts. In addition, the temperature effect during operation is eliminated and the reproducibility of force is realized. On the other hand, in order to avoid irreversible permanent deformation of the load cell and overload causing material damage, a special design of the limiting part is introduced in the structure of the load cell. The load cell deforms in a specific space. Due to the effect of supporting and limiting the displacement through the limiting portion, it is possible to prevent the load cell from being damaged due to excessive force deformation.

According to one aspect of the present invention, the load cell is a linear actuator, the linear actuator includes a linear motor and a rotary motor, and the load cell is such that the linear actuator connects the rotary motor via the load cell. It is configured to measure the force applied by the rotary motor when driven to move along a first direction, and the load cell comprises a spring element, a hollow portion penetrating the spring element, and at least one. The spring element comprises a strain gauge and at least one limiting portion, the spring element comprises a first side and a second side, the first side and the second side face each other, and the linear motor is the first side. The rotary motor is mounted on the second side, the at least one strain gauge is fixed to the spring element and is located between the first side and the second side of the rotary. When the force is applied to the second side of the spring element in the first direction by the motor, the second side moves with respect to the first side, the spring element is deformed, and the at least one strain. Due to the deformation of the gauge, a load cell for a linear actuator is provided in which the force applied by the rotary motor in the first direction is measured and standardized in a specific range.

In one embodiment, the load cell further comprises at least one limiting portion, the at least one limiting portion being connected to the spring element and said to be hollow along the direction from the first side to the second side. It extends to the portion and spatially corresponds to the at least one strain gauge. Further, at least one gap is formed between the spring element and the at least one limiting portion in the first direction.

In one embodiment, an opposing distance is formed in the at least one gap, the opposing distance is inversely proportional to the force, and when the opposing distance decreases to zero, the force is greater than the particular range. The spring element is supported by the limiting portion so that deformation is limited.

In one embodiment, the load cell further comprises a connecting portion connected between the first side of the spring element and the at least one limiting portion.

In one embodiment, the first side is parallel to the first direction and the second side is parallel to the first direction.

In one embodiment, the spring element comprises a third side and a fourth side, the third side and the fourth side facing each other, between the first side and the second side, respectively. The hollow portion is arranged between the first side, the second side, the third side, and the fourth side, and the at least one strain gauge is the third side or the third side. Arranged along the four sides.

In one embodiment, the third side is perpendicular to the first direction and the fourth side is perpendicular to the first direction.

In one embodiment, the at least one strain gauge comprises two strain gauges, the two strain gauges being symmetrically arranged on the third side and the fourth side, respectively.

In one embodiment, the load cell further comprises two limiting portions, the two limiting portions being connected to the spring element and in the hollow portion along the direction from the first side to the second side. Two gaps are formed between the spring element and the two limiting portions, which extend and spatially correspond to the two strain gauges.

In one embodiment, facing distances are formed in the two gaps, and when the facing distance of one of the two gaps is reduced to zero, the force becomes larger than the specific range. The spring element is supported by the two limiting portions so that deformation is limited.

In one embodiment, the two gaps are each arcuate.

In one embodiment, the at least one strain gauge comprises four strain gauges, the four strain gauges are symmetrically arranged on the third side and the fourth side, respectively, and a bridge circuit is provided. It is configured to form.

In one embodiment, the spring element comprises at least one first fixing hole and at least one second fixing hole that spatially correspond to the first side and the second side, respectively. The rotary motor is attached to the first side via the at least one first fixing hole, the rotary motor is attached to the second side through the at least one second fixing hole, and the load cell is the rotary motor. It is configured to receive the force applied by the device, become parallel to the first direction, and convert the force into an electric signal.

In one embodiment, at least two of the linear motor, the load cell, and the rotary motor are arranged along the first direction, and the linear motor and the load cell are stacked along the second direction. The second direction is perpendicular to the first direction.

According to another aspect of the present invention, the load cell for a linear actuator includes a linear motor and a rotary motor, and the load cell is such that the linear actuator passes through the load cell to the rotary motor. Is configured to measure the force applied by the rotary motor as it is driven to move along a first direction, the load cell comprises a spring element, a hollow portion penetrating the spring element, and at least one. With one strain gauge and at least one limiting portion, the spring element comprises a first side and a second side, the first side and the second side being parallel to the first direction. The first side and the second side face each other, the linear motor and the rotary motor are attached to the first side and the second side, respectively, and the at least one strain gauge is fixed to the spring element. And, when the force is applied to the spring element in the first direction by the rotary motor, the first side and the second side are arranged between the first side and the second side. Since the spring element is deformed and the at least one strain gauge is deformed, the force applied by the rotary motor in the first direction is measured in a specific range and standardized. The at least one limiting portion is connected to the spring element and extends to the hollow portion so as to form at least one gap in the first direction with the spring element. ..

In one embodiment, the at least one limiting portion extends in the hollow portion along the direction from the first side to the second side and spatially corresponds to the at least one strain gauge.

In one embodiment, the spring element comprises a third side and a fourth side, the third side and the fourth side facing each other, between the first side and the second side, respectively. Connected, the hollow portion is disposed between the first side, the second side, the third side, and the fourth side, and the at least one strain gauge is the third side or the fourth side. Arranged along the sides, the third side is perpendicular to the first direction and the fourth side is perpendicular to the first direction.

In one embodiment, the at least one strain gauge comprises at least one set of strain gauges symmetrically arranged on the third side and the fourth side, respectively, and the load cell is spatially said to be at least one set. It is provided with at least one set of limiting portions corresponding to the strain gauges of the above, and at least one set of gaps is formed between the spring element and the at least one set of limiting portions.

In one embodiment, the facing distances are formed in the at least one set of gaps, and the facing distance is the force when the facing distance of one of the at least one set of gaps is reduced to zero. Is greater than the particular range, and the spring element is supported by the set of limiting portions so that deformation is restricted.

In one embodiment, the at least one set of gaps is arcuate.

The above contents of the present disclosure will be more easily understood by those skilled in the art after reference to the following detailed description and accompanying drawings.

It is a schematic external view which shows the linear actuator by 1st Embodiment of this disclosure. It is a schematic internal view which shows the linear actuator by 1st Embodiment of this disclosure. It is a schematic exploded view which shows the linear actuator by 1st Embodiment of this disclosure. A movable magnetic backplane that slides relative to a fixed coil module of a linear actuator according to a first embodiment of the present disclosure is shown. A circuit connection diagram of a linear actuator according to the first embodiment of the present disclosure is shown. The behavior of the linear actuator according to the first embodiment of the present disclosure is schematically shown. The behavior of the linear actuator according to the first embodiment of the present disclosure is schematically shown. The behavior of the linear actuator according to the first embodiment of the present disclosure is schematically shown. An exemplary process for picking and arranging parts is outlined. Another exemplary process of picking and placement of parts is outlined. Another exemplary process of picking and placement of parts is outlined. Another exemplary process of picking and placement of parts is outlined. Another exemplary process of picking and placement of parts is outlined. An exemplary first structure of a load cell used in the present disclosure is schematically shown. An exemplary structure of the strain gauge used in the present disclosure is shown schematically. It is a circuit diagram of the load cell of this disclosure. It shows the deformation of the load cell when a force is applied to the load cell. It shows an exemplary shape of a strain gauge stretched by the force applied to the load cell. It shows an exemplary shape of a strain gauge compressed by the force applied to the load cell. An exemplary second structure of a load cell used in the present disclosure is schematically shown. An exemplary third structure of a load cell as used in the present disclosure is schematically shown. An exemplary third structure of a load cell as viewed from another perspective angle, as used in the present disclosure, is schematically shown. It is a front view of the load cell of FIG. It is an enlarged view of the zone P1 of FIG. An exemplary fourth structure of a load cell used in the present disclosure is schematically shown. It is a front view of the load cell of FIG. It is a schematic external view which shows the linear actuator by the 2nd Embodiment of this disclosure. It is a schematic internal view which shows the linear actuator by the 2nd Embodiment of this disclosure. It is a schematic exploded view which shows the linear actuator by the 2nd Embodiment of this disclosure. A movable magnetic backplane that slides relative to a fixed coil module of a linear actuator according to a second embodiment of the present disclosure is shown. It is a schematic external view which shows the linear actuator according to the 3rd Embodiment of this disclosure. It is a schematic internal view which shows the linear actuator according to the 3rd Embodiment of this disclosure. It is a schematic exploded view which shows the linear actuator according to the 3rd Embodiment of this disclosure. A movable magnetic backplane that slides relative to a fixed coil module of a linear actuator according to a third embodiment of the present disclosure is shown.

Next, the present disclosure will be described more specifically with reference to the following embodiments. It should be noted that the following description of preferred embodiments of the present disclosure is presented herein for purposes of illustration and description only. It is not intended to be exhaustive or limited to the exact form disclosed.

FIG. 1 is a schematic external view showing a linear actuator according to the first embodiment of the present disclosure. FIG. 2 is a schematic internal view showing a linear actuator according to the first embodiment of the present disclosure. FIG. 3 is a schematic exploded view showing a linear actuator according to the first embodiment of the present disclosure. FIG. 4 shows a movable magnetic backplane that slides relative to a fixed coil module of a linear actuator according to a first embodiment of the present disclosure. FIG. 5 shows a circuit connection diagram of a linear actuator according to the first embodiment of the present disclosure. As shown in FIGS. 1 to 5, the linear actuator 1 of the present disclosure can be suspended via a connecting component along a first direction. The first direction is, for example, the Z-axis direction, but this is not the case. Preferably, but not limited to, the connecting component is a cable 81 or a cable 82, which connects the linear actuator 1 to the drive unit 80. That is, the connecting components can be adjusted according to the actual requirements, and the present disclosure is not limited thereto. In one embodiment, the linear actuator 1 includes a base 10, a linear motor 20, a linear encoder 74, a load cell 30, and a rotary motor 40. The linear motor 20 is arranged on the base 10. The linear motor 20 includes a fixed coil module 21 and a movable magnetic backplane 22. The fixed coil module 21 is fixed to the base 10, and the movable magnetic backplane 22 is configured to slide with respect to the fixed coil module 21 along the first direction (that is, the Z-axis direction). The fixed coil module 21 includes a plurality of coil members 211. The plurality of coil members 211 are arranged one by one along the first direction (that is, the Z-axis direction). The movable magnetic backplane 22 spatially corresponds to the fixed coil module 21 and includes a first group 221 of magnet members and a second group 222 of magnet members. The first group 221 of the magnet member and the second group 222 of the magnet member are arranged on the two opposing inner surfaces of the movable magnetic backplane 22 and spatially correspond to the two opposing outer surfaces of the fixed coil module 21 respectively. Preferably, but not limited to, the base 10 further includes a linear guide rail 12, and the linear motor 20 further includes a slide member 23 fixed to a movable magnetic backplane 22. The slide member 23 is slidably coupled to the linear guide rail 12, and freely reciprocates with respect to the linear guide rail 12, for example, along the length direction of the linear guide rail 12. Although not limited, preferably, the length direction of the linear guide rail 12 is the same as or parallel to the first direction (that is, the Z-axis direction). In one embodiment, the plurality of coil members 211 are arranged along a line parallel to the linear guide rail 12. Preferably, the first group 221 of the magnet members is arranged in a row parallel to the linear guide rail 12, and the second group 222 of the magnet members is arranged in a row parallel to the linear guide rail 12. That is, a plurality of coil members 211, a first group 221 of magnet members, and a second group 222 of magnet members are arranged along the first direction (that is, the Z-axis direction). Each of the first group 221 of the magnet members has an N pole or an S pole. Each of the second group 222 of the magnet members has an N pole or an S pole. In one embodiment, the N-poles and S-poles of the first group 221 of the magnet member are alternately arranged, and the N-poles and S-poles of the second group 222 of the magnet member are alternately arranged. The first group 221 of the magnet member of the movable magnetic backplane 22 and the second group 222 of the magnet member are configured to generate a magnetic field. The coil member 211 of the fixed coil module 21 arranged corresponding to the first group 221 of the magnet member of the movable magnetic back plane 22 and the second group 222 of the magnet member is via the coil member 211 of the fixed coil module 21. When an AC current is supplied, a shift magnetic field is generated. As a result, a magnetic repulsive force or a magnetic attractive force is generated to form a driving force that pushes and moves the movable magnetic backplane 22. Therefore, the movable magnetic backplane 22 slides along the first direction with respect to the fixed coil module 21.

In one embodiment, the linear encoder 74 is arranged between the base 10 and the movable magnetic backplane 22 of the linear motor 20 so as to detect the linear displacement of the movable magnetic backplane 22 with respect to the fixed coil module 21 and the base 10. It is composed.

In one embodiment, the load cell 30 has two opposite sides parallel to the first direction (ie, the Z-axis direction). The movable magnetic backplane 22 of the rotary motor 40 and the linear motor 20 are connected to two opposite sides of the load cell 30, respectively. That is, the load cell 30 is mounted between the rotary motor 40 and the movable magnetic backplane 22. Further, at least two of the load cell 30, the movable magnetic backplane 22 and the fixed coil module 21 are partially overlapped and stacked on the base 10 in the second direction. The second direction is, for example, the Y-axis direction, but is not limited to this, and is a direction perpendicular to the first direction (that is, the Z-axis direction). In one embodiment, the projection of the load cell 30 on the base 10 and the projection of the movable magnetic backplane 22 of the linear motor 20 on the base 10 partially overlap. Further, the projection of the movable magnetic backplane 22 on the base 10 and the projection of the fixed coil module 21 on the base 10 partially overlap. This facilitates minimization of the overall size of the linear actuator 1. Although not limited, the load cell 30 is preferably a type of force transducer. The movable magnetic backplane 22 drives the load cell 30 and the rotary motor 40 to move together. When the end of the rotary motor 40 receives a force applied in the first direction, the load cell 30 is configured to convert the force applied by the rotary motor 40 into an electrical signal, resulting in generation from the rotary motor 40. Measure and standardize the force. As the force applied to the load cell 30 increases, the electrical signal changes proportionally. Without limitation, preferably, the load cell 30 is a strain gauge load cell, which is ideal because it is very accurate, versatile and cost effective. The structure of the load cell 30 will be described later.

In one embodiment, the rotary motor 40 is rotated about a central axis C parallel to the first direction and further includes a connecting portion 41. The rotary motor 40 is attached to the load cell 30 via the connecting portion 41, and is configured to move along the first direction together with the load cell 30 and the movable magnetic backplane 22 of the linear motor 20. The first direction is, for example, the Z-axis direction, but this is not the case. Although not limited, the connecting portion 41 is preferably L-shaped. Further, the rotary motor 40 can rotate about a central axis C parallel to the first direction (that is, the Z-axis direction). In one embodiment, the rotary motor 40 further includes, but is not limited to, a machining head 42 that is located at the end of the rotary motor 40 and is configured to perform the process of picking and arranging parts.

In one embodiment, the linear actuator 1 further includes a fall prevention module 50. Although not limited, preferably, the fall prevention module 50 is arranged between the base 10 and the movable magnetic backplane 22 of the linear motor 20 in order to prevent the movable magnetic backplane 22 from falling. Preferably, but not limited to, the fall prevention module 50 is a spring and includes two opposing ends, respectively, connected to the base 10 and the movable magnetic backplane 22 of the linear motor 20. In some other embodiments, the fall prevention module 50 is located between the base 10 and the rotary motor 40 to prevent the rotary motor 40 from falling. Of course, this disclosure is not limited to this.

In one embodiment, the linear actuator 1 further includes a communication printed circuit board 60 and a connection board 70. Since the communication printed circuit board 60 is attached to the base 10 via a fixing element (that is, a screw), the communication printed circuit board 60 is firmly connected to the base 10. Since the connecting board 70 is attached to the movable magnetic backplane 22 of the linear motor 20 via a fixing element (that is, a screw), the connecting board 70 is firmly connected to the movable magnetic backplane 22. The communication printed circuit board 60 includes a first flexible printed circuit (FPC) panel 61, a first connector 62, a second connector 63, and a third connector 64, and is arranged on the surface of the communication printed circuit board 60. The connection board 70 includes a fourth connector 71, a fifth connector 72, and a sixth connector 73, and is arranged on the surface of the connection board 70. In one embodiment, the linear encoder 74 is arranged between the connection board 70 mounted on the movable magnetic backplane 22 and the communication printed circuit board 60 mounted on the base 10, and the movable magnetism with respect to the fixed coil module 21 and the base 10. It is configured to detect the linear displacement of the backplane 22. Although not limited, the linear encoder 74 is preferably an optical ruler. The 61 is connected to the sixth connector 73 of the connection board 70, and as a result, the communication printed circuit board 60 is electrically connected to the connection board 70. Although not limited, the sixth connector 73 is preferably a 14-pin connector. Although not limited, the fourth connector 71 is preferably a 6-pin connector and is configured to be connected to the encoder of the rotary motor 40. The load cell 30 further includes a second FPC 31, and is connected to the fifth connector 72 of the connection board 70. Although not limited, the fifth connector 72 is preferably an 8-pin connector. In addition, the first connector 62 is, for example, a 6-pin connector for the output of the encoder of the rotary motor 40, but the present invention is not limited to this. Although not limited, the second connector 63 is preferably a 6-pin connector for communication output. Preferably, but not limited to, the third connector 64 is an 8-pin connector for a Hall sensor or a negative temperature coefficient (NTC) sensor.

Preferably, but not limited to, the linear actuator 1 is a cover assembled to the base 10 to accommodate the linear motor 20, the load cell 30, the rotary motor 40, the fall prevention module 50, the communication printed circuit board 60 and the connecting board 70. 11 is further included.

In one embodiment, the linear actuator 1 is further externally connected to the drive unit 80. Although not limited, preferably, the drive unit 80 is electrically connected to the linear motor 20 and the rotary motor 40, respectively, and is configured to control the linear motor 20 and the rotary motor 40, respectively. Although not limited, for example, the linear guide rail 12 is arranged along the Z-axis direction, and the movable magnetic backplane 22 is configured to slide with respect to the fixed coil module 21 under the control of the drive unit 80. The linear motor 20 is electrically connected to the drive unit 80 via a cable 81, and power and control signals are supplied to the linear motor 20.

In one embodiment, the communication printed circuit board 60 is further electrically connected to the drive unit 80 via a cable 82. As a result, the load cell 30 and the rotary motor 40 are electrically connected to the drive unit 80 via the connection board 70 and the communication printed circuit board 60, and the drive unit 80 receives the feedback of the load cell 30 and the information of the rotary motor 40. Can be done. On the other hand, the rotary motor 40 is further electrically connected to the drive unit 80 via the power cable 83, and electric power is supplied to the rotary motor 40 via the power cable 83. The present disclosure is not limited thereto.

On the other hand, in order to minimize the offset of each main component with respect to the center of gravity of the entire linear actuator 1 in the first direction (that is, the Z-axis direction), the linear motor 20, the load cell 30, the communication printed board 60, the connection board 70, and the rotary At least two of the motors 40 are arranged along the first direction (that is, the Z-axis direction). In one embodiment, the load cell 30, the connection board 70, and the communication printed circuit board 60 are arranged in the first direction. The linear motor 20 and the communication printed circuit board 60 are also arranged along the first direction. In one embodiment, the projection of the load cell 30 onto the base 10 and the projection of the linear motor 20 onto the base 10 of the movable magnetic backplane 22 partially overlap. Further, the projection of the movable magnetic backplane 22 onto the base 10 and the projection of the fixed coil module 21 onto the base 10 partially overlap. That is, at least two of the load cell 30, the movable magnetic backplane 22, and the fixed coil module 21 are stacked on the base 10 in the second direction. The second direction is, for example, the Y-axis direction, but is not limited to this, and is a direction perpendicular to the first direction (that is, the Z-axis direction). Therefore, when the linear actuator 1 is lifted and applied to the process of picking and arranging parts in the first direction, the linear actuator 1 can be easily lifted.

6 to 8 schematically show the behavior of the linear actuator according to the first embodiment of the present disclosure. As shown in FIGS. 5 to 7, when the linear motor 20 is operated by the drive unit 80, the movable magnetic backplane 22 slides with respect to the fixed coil module 21, and the movable magnetic backplane 22 directs the rotary motor 40 in the first direction. Further drive to move along. The first direction is, for example, the Z-axis direction, but this is not the case. At that time, the processing head 42 is used for picking and arranging the parts 90. On the other hand, as shown in FIGS. 5, 7, and 8, when the rotary motor 40 is operated by the drive unit 80, the rotary motor 40 is centered on the central axis C parallel to the first direction (that is, the Z-axis direction). Rotate to. At that time, the processing head 42 is used to rotate the part 90 picked by the processing head 42.

Preferably, but not limited to, the linear actuator 1 of the present disclosure is further applied to the process of picking and arranging parts. FIG. 9 schematically illustrates an exemplary process of picking and arranging parts. The plurality of linear actuators 1 of the present disclosure are arranged in a row parallel to, for example, the Y-axis direction, but the present invention is not limited to this. Since the plurality of linear actuators 1 are driven by the corresponding drive unit 80 (see FIG. 5), the process of picking and arranging the parts 90 arranged on the plurality of first receiving seats 92 of the first stage 91 is smooth. It is done in.

Also, FIGS. 10-10 schematically show another exemplary process of picking and arranging parts. As shown in FIGS. 4, 5 and 10, the movable magnetic backplane 22 of the linear actuator 1 of the present disclosure is driven so as to slide with respect to the fixed coil module 21, and the movable magnetic backplane 22 is a rotary motor 40. Is further driven to move downward along the first direction. The first direction is, for example, the Z-axis direction, but this is not the case. At that time, the processing head 42 is displaced to forcibly press the surface of the component 90, and the component 90 is picked from the first receiving seat 92 of the first stage 91. After the component 90 is picked from the first receiving seat 92 of the first stage 91, the movable magnetic backplane 22 of the linear actuator 1 slides against the fixed coil module 21 as shown in FIGS. 4, 5 and 11. The movable magnetic backplane 22 further drives the rotary motor 40 to move upward along the first direction, but the first direction is, for example, the Z-axis direction, but this is not the case. At that time, the processing head 42 and the picked part 90 are displaced upward. Under such circumstances, the rotary motor 40 can be operated to rotate the part 90 picked by the machining head 42, and the entire linear actuator 1 can be driven and moved to carry the part 90. .. As shown in FIGS. 4, 5 and 12, when the entire linear actuator 1 is moved above the second stage 93 having the plurality of second receiving seats 94, the rotary motor 40 receives the corresponding second receiving. The component 90 is driven to rotate to fit the seat 94. Then, as shown in FIGS. 4, 5 and 13, the movable magnetic backplane 22 of the linear actuator 1 of the present disclosure is driven so as to slide with respect to the fixed coil module 21, and the movable magnetic backplane 22 is driven. The rotary motor 40 is further driven so as to move downward along the first direction. The first direction is, for example, the Z-axis direction, but this is not the case. When the component 90 is attached to the corresponding second receiving seat 94, the machining head 42 releases the component 90 and the component 90 is placed in the corresponding second receiving seat 94 of the second stage 93. Of course, the present invention is not limited to this, and is not described in duplicate in the present specification.

It should be noted that the movable magnetic backplane 22 of the rotary motor 40 and the linear motor 20 has the load cell 30 having two opposite sides parallel to the first direction (that is, the Z-axis direction). Since they are connected to the opposite side surfaces of the load cell 30, the force generated between the machining head 42 and the component 90 during picking in the first direction can be calibrated. Although not limited, the load cell 30 is preferably a type of force transducer. When the linear actuator 1 is applied to the process of picking and arranging a part in reciprocating motion along the first direction, the force applied to the part 90 is measured by the load cell 30 and reciprocates along the first direction. Force and position calibration during exercise is performed. Therefore, the position accuracy of each reciprocating motion is maintained. This prevents overcompression and chipping in the picking and placement process of the component 90.

Although not limited, preferably, the load cell 30 of the present disclosure is a strain gauge load cell. FIG. 14 schematically illustrates an exemplary first structure of a load cell as used in the present disclosure. FIG. 15 schematically illustrates an exemplary structure of a strain gauge used in the present disclosure. FIG. 16 is a circuit diagram of the load cell of the present disclosure. FIG. 17 shows the deformation of the load cell when a force is applied to the load cell. FIG. 18 shows an exemplary shape of a strain gauge stretched by the force applied to the load cell. FIG. 19 shows an exemplary shape of a strain gauge compressed by the force applied to the load cell. In one embodiment, the linear motor 20 and the rotary motor 40 of the linear actuator 1 are attached to two opposite sides of the load cell 30a. The load cell 30a is configured to measure the force applied by the rotary motor 40 when the linear motor 20 drives the rotary motor 40 to move along the first direction via the load cell 30a. The first direction is, for example, the Z-axis direction, but this is not the case. The load cell 30a includes a spring element 32, four strain gauges S1 to S4, and a hollow portion 33. The spring element 32 includes a first side 301, a second side 302, a third side 303, and a fourth side 304. The first side 301 and the second side 302 face each other. The third side 303 and the fourth side 304 face each other. Further, the third side 303 and the fourth side 304 are connected between the first side 301 and the second side 302, respectively. Without limitation, preferably, the first side 301 is parallel to the first direction (ie, the Z-axis direction) and the second side 302 is parallel to the first direction (ie, the Z-axis direction). Further, the third side 303 is perpendicular to the first direction (that is, the Z-axis direction), and the fourth side 304 is perpendicular to the first direction (that is, the Z-axis direction). Of course, this disclosure is not limited to that. In one embodiment, the four strain gauges S1 to S4 are fixed to the third side 303 and the fourth side 304 of the spring element 32 and arranged symmetrically. Without limitation, preferably, the strain gauges S1 and S4 are two strain gauges that spatially correspond to each other and are arranged symmetrically on the third side 303 and the fourth side 304, respectively. Without limitation, preferably, the strain gauges S2 and S3 are two strain gauges that spatially correspond to each other and are symmetrically arranged on the third side 303 and the fourth side 304, respectively. Preferably, but not limited to, the spring element 32 of the load cell 30a is made of aluminum, alloy steel, or stainless steel. The hollow portion 33 penetrates the spring element 32. When the rotary motor 40 applies a force to the second side 302 of the load cell 30a in the first direction (that is, the Z-axis direction), the second side 302 moves with respect to the first side 301, and the spring element 32 is slightly deformed. However, it always returns to its original shape unless it becomes overloaded. When the spring element 32 is deformed, the strain gauges S1 to S4 fixed to the spring element 32 also change in shape, and the force applied by the rotary motor 40 in the first direction (that is, the Z-axis direction) is within a specific range. It is measured and standardized. Each strain gauge S1 to S4 is composed of a wire W0 or a piece of metal provided in a zigzag shape, and is attached to a spring element 32. In one embodiment, as shown in FIG. 16, four strain gauges S1 to S4 are set in the bridge circuit. When the shape of the strain gauges S1 to S4 changes, the electric resistances R1 to R4 change. Changes that occur in the electrical resistances R1 to R4 of the strain gauges S1 to S4 can be measured as a voltage V. The change in voltage V is proportional to the amount of force applied to the load cell 30a, that is, the amount of force can be calculated from the output of the load cell 30a. As shown in FIGS. 17 to 19, when the end of the load cell 30a receives a force from the rotary motor 40, the load cell 30a is configured to convert the force applied from the rotary motor 40 into an electric signal, and the rotary The force generated from the motor 40 is measured and standardized. As the force applied to the load cell 30a increases, the electrical signal changes proportionally. Although not limited, preferably, when a force is applied to the end of the load cell 30a, the strain gauges S1 and S3 are stretched by the tensile force, and the wire W1 of the strain gauges S1 and S3 becomes long, so that the electrical resistances R1 and R3 are increased. To increase. The compressive force works in the opposite way. When a force is applied to the end of the load cell 30a, the strain gauges S1 and S3 are compressed, the wires W2 of the strain gauges S1 and S3 are shortened, and the electric resistances R1 and R3 corresponding to the strain gauges S1 and S3 are reduced. The state in which the strain gauges S1 to S4 are attached to the spring element 32 makes it easy for the load cell 30a to reflect minute changes that should be measured in a specific range and standardized. Of course, this disclosure is not limited to this.

FIG. 20 schematically illustrates an exemplary second structure of a load cell as used in the present disclosure. In one embodiment, the structure, elements and functions of the load cell 30b are similar to those of the load cell 30a of FIG. The elements and features represented by the same numbers as in the above embodiments mean similar elements and features and are not duplicated herein. In one embodiment, the load cell 30b further includes two limiting portions 34, the two limiting portions 34 being connected to the spring element 32. Further, the two limiting portions 34 extend to the hollow portion 33 along the direction from the first side 301 to the second side 302, and spatially correspond to the strain gauge S2 and the strain gauge S3. ing. Further, in the first direction of deformation, two gaps g are formed between the spring element 32 and the two limiting portions 34. Although not limited, preferably, the two gaps g each have an arc shape. When an excessive force is applied to the load cell 30b, the spring element 32 is deformed until the spring element 32 comes into contact with the two limiting portions 34, and the corresponding gap g disappears. At that time, the deformation of the load cell 30b is limited in a specific space. Due to the effect of supporting and limiting the displacement via the limiting portion 34, it is possible to prevent the load cell 30b from being damaged due to excessive force deformation. In other embodiments, the cross sections of the hollow portion 33 and the limiting portion 34 can be adjusted according to actual requirements, and is not limited to this. In one embodiment, the load cell 30b further includes two first fixing holes 35 and two second fixing holes 36. The two first fixing holes 35 are configured to engage screws or bolts to attach the load cell 30b to the movable magnetic backplane 22. The two second fixing holes 36 are configured to engage screws or bolts to attach the load cell 30b to the connecting portion 41 of the rotary motor 40. Therefore, the linear motor 20 and the rotary motor 40 are connected to the first side 301 and the second side 302 of the load cell 30b, respectively, and the load cell 30b acts as a force converter between the linear motor 20 and the rotary motor 40 in the first direction. Works with. As a result, the force applied in parallel to the first direction by the rotary motor 40 is converted into an electric signal.

21 and 22 schematically show an exemplary third structure of a load cell as used in the present disclosure. FIG. 23 is a front view of the load cell of FIG. 21. FIG. 24 is an enlarged view of zone P1 of FIG. 23.
In one embodiment, the structure, elements, and functions of the load cell 30c are similar to those of the load cell 30b of FIG. The elements and features represented by the same numbers as in the above embodiments mean similar elements and features and are not duplicated herein. In one embodiment, the load cell 30c includes two limiting portions 34, the two limiting portions 34 extending into the hollow portion 33 along the direction from the first side 301 to the second side 302. The direction from the first side 301 to the second side 302 is opposite to the X-axis direction. The two limiting portions 34 spatially correspond to the two strain gauges S2 and S3, respectively, and are adjacent to the corresponding strain gauges S2 and S3. Without limitation, preferably, the spring element 32 and the limiting portion 34 are integrally formed and made of aluminum, alloy steel, or stainless steel. Two gaps g are formed, and each gap g is formed between the spring element 32 and the corresponding limiting portion 34 in the first direction. The two gaps g spatially correspond to a set of strain gauges S2 and S3, respectively. In one embodiment, the gap g includes a facing distance D, which is between the spring element 32 and the corresponding limiting portion 34 in the first direction. The first direction is, for example, the Z-axis direction, but this is not the case. When a force is applied to the load cell 30c, for example, along the first direction (that is, the Z-axis direction), or when a force is applied in the opposite direction of the first direction, the spring element 32 is deformed and the corresponding gap g is formed. The facing distance D gradually decreases. The force applied to the load cell 30c in a specific range is accurately measured by the load cell 30c until the facing distance D of the gap g disappears. On the other hand, when an excessive force is applied to the load cell 30c beyond a specific range, the facing distance D of the corresponding gap g disappears completely, but the deformation of the load cell 30c is limited to the specific space by the limiting portion 34. Will be done. That is, the facing distance D is inversely proportional to the force. When the facing distance D of one of the two gaps g is reduced to zero, the force becomes greater than a particular range and the spring element 32 is supported by the two limiting portions 34, limiting the deformation of the spring element 32. Preferably, but not limited to, the load cell 30c includes two gaps g having a 0.2 mm facing distance D between the limiting portion 34 and the spring element 32 and is used to measure a force of less than 5 kg. Will be done. Due to the design of the two gaps g between the two limiting portions 34 and the spring element 32, an excessive force of 50 kg applied to the load cell 30c is available without damaging the spring element 32 of the load cell 30c. Due to the effect of supporting and limiting the displacement via the limiting portion 34, it is possible to prevent the spring element 32 of the load cell 30c from being damaged due to excessive force deformation. In other embodiments, the cross sections of the hollow portion 33 and the limiting portion 34 can be adjusted according to actual requirements, and is not limited to this.

FIG. 25 schematically illustrates an exemplary fourth structure of a load cell as used in the present disclosure. FIG. 26 is a front view of the load cell of FIG. 25. In one embodiment, the structure, elements, and functions of the load cell 30d are similar to those of the load cell 30b of FIG. The elements and features represented by the same numbers as in the above embodiments mean similar elements and features and are not duplicated herein. In one embodiment, the load cell 30d further includes a connecting portion 37 connected between the first side 301 of the spring element 32 and the limiting portion 34. Preferably, but not limited to, the spring element 32 and the connection 37 are made of aluminum to provide the stretchability required for deformation. Without limitation, preferably, the limiting section 34 is made of stainless steel to provide the rigidity required to support and limit the displacement. On the other hand, as compared with the load cell 30c of FIG. 23, the volume of the limiting portion 34 of the load cell 30d is reduced, and the volume of the hollow portion 33 of the load cell 30d is increased. Each gap g of the load cell 30d has the same distance D as the distance D of the load cell 30c. By increasing the volume ratio of the hollow portion 33 to the limiting portion 34, the total weight of the load cell 30d can be easily reduced. In other embodiments, the cross sections of the hollow portion 33 and the limiting portion 34 can be adjusted according to actual requirements, and is not limited to this.

FIG. 27 is a schematic external view showing a linear actuator according to the second embodiment of the present disclosure. FIG. 28 is a schematic internal view showing a linear actuator according to the second embodiment of the present disclosure. FIG. 29 is a schematic exploded view showing a linear actuator according to the second embodiment of the present disclosure. FIG. 30 shows a movable magnetic backplane that slides relative to a fixed coil module of a linear actuator according to a second embodiment of the present disclosure. In one embodiment, the structure, elements, and functions of the linear actuator 1a are the same as those of the linear actuator 1 of FIGS. 1 to 5. The elements and features represented by the same numbers as in the above embodiments mean similar elements and features and are not duplicated herein. In one embodiment, the connecting board 70, the load cell 30, and the rotary motor 40 are arranged along the first direction (that is, the Z-axis direction). Further, the load cell 30 and the rotary motor 40 are assembled via an L-shaped connecting portion 41. Compared with the arrangement of the linear actuator 1 in the first embodiment, the arrangement of the linear actuator 1a has an advantage of saving space and minimizing the overall size. Of course, the arrangement of the linear actuator 1 and the linear actuator 1a can be adjusted according to the actual requirements. The present disclosure is not limited thereto and is not duplicated herein.

FIG. 31 is a schematic external view showing a linear actuator according to the third embodiment of the present disclosure. FIG. 32 is a schematic internal view showing a linear actuator according to the third embodiment of the present disclosure. FIG. 33 is a schematic exploded view showing a linear actuator according to the third embodiment of the present disclosure. FIG. 34 shows a movable magnetic backplane that slides relative to a fixed coil module of a linear actuator according to a third embodiment of the present disclosure. In one embodiment, the structure, elements, and functions of the linear actuator 1b are the same as those of the linear actuator 1 of FIGS. 1 to 5. The elements and features represented by the same numbers as in the above embodiments mean similar elements and features and are not duplicated herein. In one embodiment, the load cells 30 are mounted and stacked in a second direction on a movable magnetic backplane 22. The second direction is a direction perpendicular to the first direction, such as the Y-axis direction. That is, the projection of the load cell 30 onto the base 10 and the projection of the movable magnetic backplane 22 onto the base 10 partially overlap. Further, since the load cell 30 and the rotary motor 40a are attached adjacent to the connecting portion 41, the load cell 30 and the rotary motor 40a are arranged in the first direction. The first direction is, for example, the Z-axis direction, but this is not the case. Further, the communication printed circuit board 60a is arranged in the first direction (that is, in the Z-axis direction) adjacent to the linear motor 20 and the load cell 30. The connection board 70a is attached to and stacked on the linear motor 20. As a result, the linear motor 20, the load cell 30, the rotary motor 40a, the communication printed circuit board 60a, and the connection board 70a realize a slim arrangement of the linear actuator 1b arranged in the first direction. The first direction is, for example, the Z-axis direction, but this is not the case. Due to the slim arrangement of the linear actuator 1b, when the linear actuator 1b is suspended in the first direction (that is, the Z-axis direction), each element arranged along the first direction (that is, the Z-axis direction) becomes the first direction. (That is, it approaches the center of gravity of the entire linear actuator 1b in the Z-axis direction). Applying a linear actuator 1b to the process of picking and arranging parts in the first direction (ie, the Z-axis direction) makes it easier to hang the linear actuator 1b and minimizes the offset of each element with respect to the center of gravity of the entire linear actuator 1b in the first direction. Easy to turn into. As a result, it becomes easy to prevent the linear actuator 1b from moving in the direction along the X-axis direction or the Y-axis direction and from shaking due to the force applied to the rotary motor 40a of the linear actuator 1b along the first direction. On the other hand, in one embodiment, the communication printed circuit board 60a includes an integrated connector 61a and is electrically connected to the drive unit 80 via a cable 82a for transmitting feedback of the load cell 30 and information of the rotary motor 40a to the drive unit 80. It is configured to connect to the target. Further, since the linear motor 20 and the rotary motor 40a are electrically connected to the drive unit 80 via the power cable 81a, power is supplied to the linear motor 20 and the rotary motor 40a. In one embodiment, the linear encoder 74a is further placed under the connecting board 70a attached to the movable magnetic backplane 22 to minimize the volume of the entire linear actuator 1b. In one embodiment, the fall prevention module 50 is arranged between the base 10 and the connecting portion 41, and the rotary motor 40a, the load cell 30, and the movable magnetic backplane 22 of the linear motor 20 are attached to the connecting portion 41. ing. At that time, it is possible to prevent the movable magnetic backplane 22, the load cell 30, and the rotary motor 40a from falling. Preferably, but not limited to, the fall prevention module 50 is a spring and includes two opposing ends that are connected to the base 10 and the connecting portion 41, respectively. Of course, in other embodiments, the arrangement of the linear motor 20, the load cell 30, the rotary motor 40a, the fall prevention module 50, the communication printed circuit board 60a, and the connection board 70a can be adjusted according to practical requirements. The present disclosure is not limited thereto and is not duplicated herein.

From the above description, the present disclosure provides a load cell for a linear actuator so that the linear actuator can easily calibrate the force generated under a particular range. Since the linear motor and the rotary motor are connected to the two opposite sides of the load cell, the load cell and the linear motor are partially overlapped and stacked on the base so as to minimize the overall size of the linear actuator. Further, at least two of the main components are arranged along the first direction in order to minimize the offset of the entire linear actuator in the first direction with respect to the center of gravity. This makes it easier to hang the linear actuator and apply it to the process of picking and arranging parts in the first direction. That is, the linear actuator of the present disclosure is equipped with a load cell to form a slim arrangement. When a linear actuator is applied to the part picking and placement process, the support and center of gravity of the entire linear actuator is offset in the direction of the part picking and placement. Along with the slim layout, it becomes easier to prevent shaking due to movement and force. Also, when a load cell is used to calibrate the force generated by a linear actuator and the linear actuator is applied to the process of picking and arranging parts in reciprocating motion, the force applied to the component is measured by the load cell and during reciprocating motion. Force and position calibration is performed. As a result, the position accuracy of each reciprocating motion is maintained. This prevents overcompression and chipping in the process of picking and arranging parts. Further, the load cell is, for example, a strain gauge load cell that includes a spring element and a set of strain gauges for measuring a range of forces. When a force is applied to the load cell, the spring element of the load cell is slightly deformed and always returns to its original shape unless it is overloaded. When the spring element is deformed, the strain gauge arranged on the spring element is also deformed, and the deformation of the strain gauge is converted into an electric signal and fed back to the drive unit connected to the linear actuator. That is, the magnitude of the force is calculated based on the output of the load cell and fed back to the drive unit connected to the linear actuator. Thereby, the drive unit connected to the linear actuator controls the linear actuator, and it becomes easy to maintain the position accuracy of the picking and placement process of the parts. It also eliminates the temperature effect during operation and realizes force reproducibility. On the other hand, in order to avoid overload that causes irreversible permanent deformation and material damage of the load cell, a special design of the limiting part is introduced in the structure of the load cell. The load cell deforms in a specific space. Due to the effect of supporting and limiting the displacement through the limiting portion, it is possible to prevent the load cell from being damaged due to excessive force deformation.

Although the present disclosure has described what is currently considered to be the most practical and preferred embodiment, it should be understood that the present disclosure need not be limited to the disclosed embodiments. On the contrary, it is intended to cover the various modifications and similar arrangements contained within the scope of the appended claims, and the broadest interpretation is intended to include all such modifications and similar structures. Should be applied.

1, 1a, 1b: Linear actuator 10: Base 11: Cover 12: Linear guide rail 20: Linear motor 21: Fixed coil module 211: Coil member 22: Movable magnetic back plane 221: Magnet member first group 222: Magnet member 2nd group 23: Slide members 30, 30a, 30b, 30c, 30d: Load cell 301: 1st side 302: 2nd side 303: 3rd side 304: 4th side 31: 2nd FPC
32: Spring element 33: Hollow part 34: Limiting part 35: First fixing hole 36: Second fixing hole 37: Connecting part 40, 40a: Rotary motor 41: Connecting part 42: Machining head 50: Fall prevention module 60, 60a : Communication printed board 61: 1st FPC panel 61a: Integrated connector 62: 1st connector 63: 2nd connector 64: 3rd connector 70, 70a: Connection board 71: 4th connector 72: 5th connector 73: 6th connector 74 , 74a: Linear encoder 80: Drive unit 81, 82, 82a: Cable 81a, 83: Power cable 90: Parts 91: First stage 92: First receiving seat 93: Second stage 94: Second receiving seat g: Gap C: Central axis D: Opposing distances R1, R2, R3, R4: Resistors S1, S2, S3, S4: Strain gauges W0, W1, W2: Wires X, Y, Z: Axis

Claims (10)

A load cell for linear actuators
The linear actuator includes a linear motor and a rotary motor.
The load cell is configured to measure the force applied by the rotary motor as the linear actuator drives the rotary motor to move along a first direction through the load cell.
The load cell comprises a spring element, a hollow portion penetrating the spring element, at least one strain gauge, and at least one limiting portion.
The spring element comprises a first side and a second side.
The first side and the second side face each other, the linear motor is attached to the first side, the rotary motor is attached to the second side, and the like.
The at least one strain gauge is fixed to the spring element and is arranged between the first side and the second side.
When the force is applied to the second side of the spring element by the rotary motor in the first direction, the second side moves with respect to the first side, and the spring element is deformed and Because the at least one strain gauge is deformed, the force applied by the rotary motor in the first direction is measured and standardized in a specific range.
The at least one limiting portion is a linear actuator connected to the spring element and extending into the hollow portion so as to form at least one gap in the first direction with the spring element. Load cell for. The load cell according to claim 1.
A load cell in which the at least one limiting portion extends in the hollow portion along a direction from the first side to the second side and spatially corresponds to the at least one strain gauge. The load cell according to claim 1.
An opposing distance is formed in the at least one gap.
The facing distance is inversely proportional to the force.
A load cell in which when the facing distance is reduced to zero, the force is greater than the particular range and the spring element is supported by the limiting portion to limit deformation. The load cell according to claim 1.
The spring element comprises a third side and a fourth side.
The third side and the fourth side face each other and are connected between the first side and the second side, respectively.
The hollow portion is arranged between the first side, the second side, the third side, and the fourth side.
The at least one strain gauge is a load cell arranged along the third side or the fourth side. The load cell according to claim 4.
A load cell in which the third side is perpendicular to the first direction and the fourth side is perpendicular to the first direction. The load cell according to claim 4.
The at least one strain gauge comprises four strain gauges.
A load cell in which the four strain gauges are symmetrically arranged on the third side and the fourth side, respectively, and are configured to form a bridge circuit. The load cell according to claim 1.
The spring element comprises at least one first fixing hole and at least one second fixing hole that spatially correspond to the first side and the second side, respectively.
The linear motor is mounted on the first side via the at least one first fixing hole.
The rotary motor is mounted on the second side via the at least one second fixing hole.
The load cell is configured to receive the force applied by the rotary motor, become parallel to the first direction, and convert the force into an electric signal. A load cell for linear actuators
The linear actuator includes a linear motor and a rotary motor.
The load cell is configured to measure the force applied by the rotary motor as the linear actuator drives the rotary motor to move along a first direction through the load cell.
The load cell comprises a spring element, a hollow portion penetrating the spring element, at least one strain gauge, and at least one limiting portion.
The spring element comprises a first side and a second side.
The first side and the second side are parallel to the first direction, the first side and the second side face each other, and the linear motor and the rotary motor are the first side and the rotary motor, respectively. Attached to the second side,
The at least one strain gauge is fixed to the spring element and is arranged between the first side and the second side.
When the force is applied to the spring element in the first direction by the rotary motor, the first side and the second side move with respect to each other, the spring element is deformed, and at least one is described. As one strain gauge deforms, the force applied by the rotary motor in the first direction is measured and standardized in a specific range.
The at least one limiting portion is a linear actuator connected to the spring element and extending into the hollow portion so as to form at least one gap in the first direction with the spring element. Load cell for. The load cell according to claim 8.
A load cell in which the at least one limiting portion extends in the hollow portion along a direction from the first side to the second side and spatially corresponds to the at least one strain gauge. The load cell according to claim 8.
The spring element comprises a third side and a fourth side.
The third side and the fourth side face each other and are connected between the first side and the second side, respectively.
The hollow portion is arranged between the first side, the second side, the third side, and the fourth side.
The at least one strain gauge is arranged along the third side or the fourth side.
A load cell in which the third side is perpendicular to the first direction and the fourth side is perpendicular to the first direction.

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