JP3227346B2 - Method of manufacturing inkjet head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing an ink jet head, and more particularly, to a method of manufacturing an ink jet head having a manufacturing step of forming a groove in a piezoelectric body and forming an electrode on the surface of the piezoelectric body. It is about.

[0002]

2. Description of the Related Art In recent years, among the non-impact type recording apparatuses which have been replacing the conventional impact type recording apparatuses and have been greatly expanding the market, the principle is the simplest, and the multi-gradation and colorization are realized. Is easy,
An ink-jet type recording device is exemplified. 2. Description of the Related Art Inkjet printers have attracted attention because of their advantages such as high-speed printing, low noise, high printing quality, and a relatively simple configuration that can reduce manufacturing costs.

[0003] A plurality of types of ink jet heads have been proposed for use in ink jet printers. Among them, a drop head that ejects only ink droplets used for recording is proposed.
The on-demand type is rapidly spreading due to its good injection efficiency and low running cost.

As one example, a piezoelectric ink jet head has been proposed. This is because a plurality of ink chamber grooves are formed in the piezoelectric body, and the volume of the ink chamber can be changed by dimensional displacement of the piezoelectric body when a voltage pulse is applied to the piezoelectric body. Thus, when the volume is reduced, the ink in the ink chamber is ejected from a nozzle connected to the ink chamber, and when the volume is increased, the ink is introduced into the ink chamber. By ejecting ink from the ink chamber at a predetermined position, a desired character or image can be formed.

An example of such a piezoelectric ink jet head will be described with reference to FIGS. 6 and 7. The head described here is of a shear mode type.

In the ink-jet head, grooves are formed in parallel with each other by dicing or the like on a piezoelectric ceramic substrate 51 which is a piezoelectric body, and a large number of ink chambers 52 are formed. A nozzle plate 53 is connected to one end of the ink chamber 52. As shown in FIG. 7A, the piezoelectric side wall 57 forming the ink chamber 52 is formed by two piezoelectric side walls having different polarization directions 58.
An electrode 59 is formed on the surface of the piezoelectric side wall 57. A nozzle plate 53 is provided at one end of the ink chamber 52.
The nozzle plate 53 has a nozzle 54 formed therein. Further, the upper portion of the piezoelectric ceramic substrate 51 in which the ink chamber 52 is formed is covered by an upper cover 56 having an ink supply port 55. Ink chamber 52
Are connected to an ink storage tank (not shown) via an ink supply port 55. With such a configuration, the cross-sectional shape of the ink chamber 52 has a rectangular shape surrounded by the piezoelectric side wall 57 and the upper lid 56.

In the conventional ink jet head having such a structure, when a voltage pulse is applied to the electrode 59, the piezoelectric side wall 57 is sheared inward as shown in FIG. Is positive pressure, ink droplets are ejected from a nozzle 54 on a nozzle plate 53 connected to one end of the ink chamber 52.

When the application of the voltage pulse to the electrode 59 is stopped, the piezoelectric side wall 57 returns to the state shown in FIG.
At this time, ink is supplied to the ink chamber 52 from the ink supply port 55 by the negative pressure.

In the ink-jet head having such a configuration, it is necessary to have a large number of ink chambers 52 and selectively eject ink droplets from the nozzles 54 at the tip of each ink chamber. Therefore, the electrodes 59 formed on the surface of the piezoelectric side wall 57 of each ink chamber 52 need to be electrically independent of each other.

As a method for forming the electrode 59,
Generally, a metal thin film forming means such as vacuum deposition, sputtering, or plating is used. However, it is difficult to efficiently and stably form electrically independent electrodes by the above-described means. Therefore, an electrode is once formed on the entire surface of the piezoelectric body by the above-described means, and then a portion of the electrode is selectively removed, whereby an electrically discontinuous portion is arbitrarily formed. A way is being considered.

As a method of removing part of the electrode, mechanical processing such as dicing has been conventionally considered, and recently, a laser processing method capable of performing non-contact processing at a higher speed has been considered. .

FIGS. 8 and 9 show an example of a conventional method of manufacturing an ink jet head including such steps.

The laser beam 61 emitted from the laser oscillator 60 is changed in direction by a reflecting mirror 62 disposed on the optical path, and then enters a condenser lens 63 disposed below the reflecting mirror 62. The laser beam 61 passes through a condenser lens 63
And a focal point 64 is formed at a position of a predetermined focal length F from the condenser lens 63.

A piezoelectric ceramic substrate 51 as a workpiece
Is mounted on the precision table 65 and is arranged below the condenser lens 63. Here, the positional relationship is such that the focal point 64 of the laser beam 61 is formed in the vicinity of the surface of the electrode 59 which is a portion to be processed.

Since the power density is high at the focal point of the laser beam 61, the electrode 59 irradiated with the laser beam 61 is heated in a very short time, and melts and evaporates.

By controlling the drive of the precision table 65 in the above process, the electrode 59 can be removed with high accuracy.

By the above processing, the electrode 59 is removed from the surface of the piezoelectric ceramic substrate 51, and an electrically discontinuous portion can be formed on the surface of the piezoelectric ceramic substrate 51.

[0018]

However, the conventional method of manufacturing an ink jet head has the following problems.

That is, in the above-described processing, the laser beam 6
By the irradiation of 1, when the metal thin film component of the electrode 59 melts and evaporates, the molten thin film 66 of the metal thin film having various acceleration vectors is scattered. Such a molten scattered matter 66
However, when it adheres to the electrode 59 at another portion again, the molten scattered matter 66 enters the electrode 59 due to the collision energy at the time of adhesion. Further, the molten scattered matter 66 is rapidly cooled by heat conduction due to the adhesion and re-solidified. Since the melted scattered matter 66 thus adhered is fixed to the electrode 59, it is difficult to remove the scattered matter 66 by washing or the like.

In ordinary laser processing, the workpiece is not significantly affected by such a melted and scattered substance. However, in the piezoelectric ceramic substrate used in the above-described ink jet head, since it is necessary to perform minute displacement with good responsiveness, the influence of such foreign matter adhesion cannot be ignored. For example, the fouling of the electrode 59 due to the adhesion of the molten scattered matter 66 may have an adverse effect such as deteriorating the electrical characteristics of the electrode. In addition, there is a concern that such foreign matter may adversely affect the characteristics of the piezoelectric ceramic substrate. Therefore, it is necessary to minimize the adhesion of the molten scattered matter to the electrodes and the like.

In the conventional laser processing, in order to remove the scattered material generated in the laser processing part, generally, FIG.
As shown in FIG. 0, suction is performed by a dust collecting nozzle 67 connected to a dust collector, or as shown in FIG. 11, a method of injecting a gas 69 from a nozzle 68 arranged coaxially with a laser beam is employed. I have.

However, the suction by the dust collector is not expected to be so effective as to prevent the molten scattered matter from adhering in the groove because the scattered matter is scattered at a high speed. In addition, the method of injecting gas from a nozzle arranged coaxially with the laser beam can be expected to be effective in processing a flat surface. However, when processing a component having a groove as in the present case, foreign matter in the groove is required. The effect of preventing the adhesion of the particles is small, and may accumulate foreign matter in the grooves depending on the injection conditions.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and when removing a part of an electrode formed on the surface of a piezoelectric body, foreign matter such as scattered molten matter is transferred to another part. An object of the present invention is to provide a method for manufacturing a high-quality inkjet head by preventing the ink from being attached.

[0024]

In order to achieve this object, in a method of manufacturing an ink jet head according to the present invention, at least a part of a side formed of piezoelectric ceramics is provided.
A substrate having a plurality of grooves between walls, formed on a surface of the side wall ;
And electrodes, the fixed grooves in busy physician to the substrate, before
And a cover member to form an ink chamber Kimizo, before
The side wall deforms and is accommodated in the ink chamber.
A method for manufacturing an ink jet head for applying a jetting pressure to a heated ink , wherein
A first step of forming the substrate having a groove of said first
Including the surface of the side wall forming the groove formed in the step.
A second step of forming an electrode on the surface of the substrate ;
While injecting a gas in a direction that is substantially parallel to the said substrate
Of the electrode formed on the surface by irradiating a high energy beam, and selectively removing portions of said electrode, said sidewall
And a third step of making the electrodes independent .

The gas may be introduced into the groove from one end of the groove.

The gas may be an inert gas.

[0027] Incidentally, in the third step, an electrode formed on the bottom surface of the groove may be removed.

[0028]

According to the method of manufacturing an ink jet head according to the first aspect of the present invention having the above-described structure, a high energy beam is irradiated while injecting a gas in a direction substantially parallel to a groove of a substrate to thereby form a beam. The gas effectively removes the molten scattered matter generated when the electrode is irradiated with light from the groove without interruption by the gas.

Further, according to the method of manufacturing an ink jet head according to the second aspect, a gas can be efficiently flowed to each end of the groove of the actuator member.

According to the method of manufacturing an ink jet head according to the third aspect, since an inert gas is injected, an oxidation reaction or the like generated when the electrode is irradiated with a laser beam can be suppressed. Therefore, the characteristics of the electrode and the piezoelectric ceramic are not impaired.

In the method of manufacturing an ink jet head according to a fourth aspect, in the third step, the electrode formed on the bottom surface of the groove is removed, so that the electrode on the side wall is formed alone.
Is set up.

[0032]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below in detail with reference to the drawings.

First, with reference to FIGS. 1 to 3, a description will be given of an example of a structure and a manufacturing method of the ink jet head of the present invention.

As shown in FIG. 3, the piezoelectric ceramic substrate 1, which is a piezoelectric body, is provided with a number of grooves which become ink chambers 2 parallel to each other, and is a side wall of the groove and a piezoelectric side wall 7 separating each groove. Are formed. Piezoelectric ceramic substrate 1
A lid 6 having an ink supply port 5 is adhered to the surface on the groove processing side (the upper surface in FIG. 3), and the groove becomes the ink chamber 2.
The nozzle plate 3 is bonded to one end surface of the piezoelectric ceramic substrate 1 and the lid 6 so that the nozzle 4 corresponds to one end of the ink chamber 2. The ink chamber 2 is connected to an ink storage tank (not shown) via an ink supply port 5.

With such a configuration, the cross section of the ink chamber 2 has a rectangular shape surrounded by the piezoelectric side wall 7 and the upper lid 6. The piezoelectric side wall 7 is composed of two piezoelectric portions whose polarization directions 8 are opposite to each other.
An electrode 9 is formed on the surface of the piezoelectric side wall 7. Each electrode 9 is connected to a pattern (not shown) formed on the upper surface of the piezoelectric ceramic substrate 1, and the pattern is connected to a control unit via a flexible substrate (not shown).

The ink jet head having the above configuration is formed by the following manufacturing method.

First, a large number of grooves which become ink chambers 2 parallel to each other are formed on a piezoelectric ceramic substrate 1 to which piezoelectric layers whose polarization directions are opposite to each other are bonded. As a means for forming the groove, a diamond blade having a thickness capable of forming a desired ink chamber groove width is used, and the groove is formed by dicing.

Next, an electrode 9 is formed on the surface of the piezoelectric ceramic substrate 1 by a metal thin film forming means such as vacuum evaporation, sputtering, or plating. At this time, the electrodes 9 are also formed on the entire surface in the groove and on the upper end surface of the piezoelectric side wall 7. In the case where the portion where the formation of the electrode is not necessary is extensive, after separately applying a resist film, the electrode is formed by the above-described means, and then the unnecessary portion of the electrode is chemically removed by a lift-off method. In some cases, a method is applied.

Next, a high energy beam YAG is applied to the electrode 9 formed on the bottom of the groove as the ink chamber 2.
The electrode 9 is removed by irradiating a laser beam 10. At this time, an inert gas 19 is introduced at one end of the ink chamber 2 from the opening end 17 to which the nozzle plate 3 is connected. The inert gas 19 prevents the molten scattered matter 16 generated when the electrode 9 is irradiated with the YAG laser beam 10 from adhering to the inside of the ink chamber 2.

Hereinafter, an example of electrode removal in the method of manufacturing an ink jet head according to the present invention will be described in detail with reference to FIGS.

A YAG (yttrium aluminum garnet) laser oscillator 11 emits a light having a wavelength of 1.
06 μm (micrometer) YAG laser beam 10
Is incident on the reflection mirror 12 disposed on the optical path, is changed direction, and is incident on the f · θ lens 13 disposed below the reflection mirror 12. YAG laser beam 10
Is focused by the f · θ lens 13 and forms a focal point 14 at a position of a predetermined focal length F from the f · θ lens 13.

A galvanometer 21 and a control device 22 thereof are connected to one end of the reflection mirror 12 so that the reflection mirror 12 can be swung at high speed.

Piezoelectric ceramic substrate 1 to be processed
Is mounted on the precision table 15 and is disposed below the f · θ lens 13. Here, the piezoelectric ceramics substrate 1 is arranged so that the focal point 14 of the YAG laser beam 10 is located near the electrode 9 formed on the bottom surface of the groove that is the ink chamber 2 which is the portion to be processed. .

At the focus of the YAG laser beam 10, the spot diameter of the laser beam is generally 0.1 mm or less, and a high power density can be obtained. The electrode 9 irradiated with the high power density YAG laser beam 10 is heated in a very short time, leading to evaporation. The molten scattered material 16 which is a metal thin film component of the electrode 9 is formed by the vapor pressure at the time of evaporation.
It scatters in various directions such as upwards.

At one end of the groove-shaped ink chamber 2, a gas injection nozzle 18 is provided in the vicinity of an opening end 17 where the nozzle plate 3 is to be connected. Can be introduced. Here, the inert gas 19 is an Ar (argon) gas,
It is supplied from a gas cylinder (not shown) connected to the gas injection nozzle 18. The above-mentioned molten splatters 16
Is the inert gas 19 introduced into the ink chamber 2.
As a result, the ink is quickly removed to the outside of the ink chamber 2. Thus, it is possible to prevent the melted scattered matter 16 from adhering to the inside of the groove of the ink chamber 2 which is a functionally important part. In particular, since an inert gas is injected, an oxidation reaction or the like that occurs when the electrode 9 is irradiated with a laser beam can be suppressed. Therefore, the characteristics of the electrode and the piezoelectric ceramic are not impaired. Note that the YAG laser light 10 is incident on the electrode 9 substantially perpendicularly. Therefore, the jet direction of the inert gas 19 is substantially parallel to the groove of the ink chamber 2 and substantially perpendicular to the YAG laser beam 10.

Then, by the swing of the reflection mirror 12,
While scanning at high speed in the longitudinal direction of the groove serving as the ink chamber 2,
By irradiating the YAG laser beam 10, the electrode removal processing of one groove bottom is completed. After that, the precision table 15 moves in the direction perpendicular to the longitudinal direction of the groove by the distance between the groove centers, and processes the bottom surface of the adjacent groove. Thereafter, by repeating the above process, the processing of the electrodes formed on the plurality of groove bottoms is completed.

By the above processing, the electrode 9 is removed from the surface of the piezoelectric ceramic substrate 1, and an electrically discontinuous portion can be formed on the surface of the piezoelectric ceramic substrate 1. The reflection mirror 12 and the precision table 1
By controlling the driving of No. 5, a desired removal pattern can be easily obtained.

The scanning of the YAG laser beam 10 is performed as follows.
Although it is a high speed of 100 mm or more per second, it is possible to process with the minimum heat input necessary for removing the electrode. Also,
Since the speed is 100 mm / sec or more, the heat input to the piezoelectric ceramic substrate 1 is minimal and local, and the effect on the characteristic change of the piezoelectric ceramic substrate 1 is negligible.

Further, the focal length F of the f / θ lens 13 is selected so that the minimum diameter of the YAG laser beam 10 is smaller than the groove width of the ink chamber 2 to be processed.
The inconvenience of irradiating the YAG laser beam 10 to the portion other than the bottom of the groove is prevented, and the characteristic change of the piezoelectric sidewall 7 is prevented.

Then, a lid 6 having an ink supply port 5 is adhered to the surface (the upper surface in FIG. 2) on the groove processing side of the piezoelectric ceramic substrate 1 to form the ink chamber 2. The nozzle plate 3 is bonded to one end surface of the piezoelectric ceramic substrate 1 and the lid 6 such that the nozzle 4 corresponds to one end of the ink chamber 2.

Next, the ink jetting operation of the ink jet head will be described with reference to the sectional view of the piezoelectric ink jet head shown in FIG.

In the ink jet head, when, for example, the ink chamber 2b is selected according to the given print data, a positive drive voltage is applied to the metal electrodes 9a and 9d,
The metal electrodes 9b and 9c and other metal electrodes corresponding to the ink chambers are grounded. As a result, a driving electric field directed to the right in the drawing is generated on the piezoelectric side wall 7a, and a driving electric field directed to the left in the drawing is generated on the side wall 7b. At this time, since the direction of each drive electric field is orthogonal to the polarization direction 8 of the piezoelectric ceramic plate, the side walls 7a and 7b are bent inside the ink chamber 2b by the piezoelectric thickness-shear effect so as to bend at the joint of the piezoelectric ceramic plates. Rapidly deforms in the direction (Fig. 4
(B)).

Due to these deformations, the volume of the ink chamber 2b decreases, the ink pressure in the ink chamber 2b rapidly increases, a pressure wave is generated, and ink droplets are discharged from a nozzle (not shown) communicating with the ink chamber 2b. Is injected.

When the application of the driving voltage is stopped, the side walls 7a and 7b return to the positions before the deformation (see FIG. 4A), so that the ink pressure in the ink chamber 2b decreases and the ink supply port 5 Ink is supplied into the ink chamber 2b through the manifold.

However, the above operation is only a basic operation, and when the present invention is embodied as a product, a drive voltage is first applied in a direction of increasing the volume, and after the ink is first supplied to the ink chamber 2b, The application of the driving voltage is stopped, and the side walls 7a, 7
b may be returned to the position before the deformation (see FIG. 4A) to eject the ink droplets. Further, in order to attenuate the pressure wave in the ink chamber after the ejection of the ink droplet, a drive voltage pattern called a cancel pulse may be added after an appropriate time.

In the ink jet head having such a configuration, ink droplets cannot be ejected from two nozzles communicating with two adjacent ink chambers 2 at the same time.
For example, after ejecting ink droplets from nozzles communicating with odd-numbered ink chambers 2a and 2c from the left end, ink droplets are ejected from nozzles communicating with even-numbered ink chambers 2b.
Next, the ink chamber 2 and the nozzles are divided into two groups so that the ink droplets are ejected from the odd-numbered nozzles again. Further, the ink chamber 2 and the nozzles may be divided into three or more groups to eject ink droplets.

As described above, in the method of manufacturing the piezoelectric ink jet printer of this embodiment, the electrodes 9 corresponding to the ink chambers 2 are formed easily and precisely by laser processing as described above, and the electrodes 9 are formed by laser processing. The molten splatters 16 can be efficiently removed to prevent the molten splatters 16 from adhering to the inside of the groove of the ink chamber 2, and a high-quality inkjet head is manufactured.

The present invention is not limited to the embodiment described above, and various changes can be made without departing from the gist of the present invention.

For example, as shown in FIG. 5, the present invention is effective even when a portion other than the inside of the groove of the ink chamber 2 is processed. In particular, like the upper end of the illustrated piezoelectric side wall 7,
This is suitable for the case where the groove of the ink chamber 2 exists near the processed portion. In other words, the injection of the inert gas 19 prevents the molten scattered matter 16 from scattering into the inside of the groove of the ink chamber 2 and adhering or accumulating in the groove, thereby preventing foreign matter from interfering with a functionally important part. be able to.

The gas to be introduced is Ar, N
In the case where the influence of an oxidation reaction or the like on the site irradiated with the laser beam can be ignored in place of the inert gas such as e or He,
Dry air or carbon dioxide gas can also be used, so that the processing cost can be significantly reduced.

Further, by using two reflecting mirrors having different scanning directions in the laser processing apparatus, it is possible to supplement the scanning of the portion which has been moved by the precision table 15 in the above embodiment. As a result, the precision table 15
Becomes unnecessary. Further, the YAG laser beam 10 and the piezoelectric ceramic substrate 1 may be relatively moved and processed only by moving the precision table 15 without scanning the YAG laser beam 10 by the reflection mirror 12. Further, only the scanning of the YAG laser beam 10 by the reflection mirror 12 causes
Rather than relatively moving the AG laser beam 10 and the piezoelectric ceramic substrate 1, the YAG laser beam 10 and the piezoelectric ceramic substrate 1 are used by both the scanning of the YAG laser beam 10 by the reflection mirror 12 and the movement of the precision table 15. Substrate 1
May be relatively moved for processing.

The type of a high energy beam such as a laser beam, the beam focusing condition of an optical system and the like may be appropriately selected according to the size of a portion to be removed. For example, when a laser beam having a wavelength of 1.06 μm (micrometer), which is a standard wave of a YAG laser, is used, and a single mode (Gaussian mode) is used and an f · θ lens with a focal length of 150 mm is used, the minimum spot diameter is , About 60 to 80 μm. Shorter focal length f
If a θ lens is used, the minimum spot diameter can be further reduced. If a YAG laser beam having a wavelength of 532 nm (nanometer), which is the second harmonic of the YAG laser, is used, the minimum spot diameter can be reduced to 40 μm or less. Therefore, it goes without saying that it is possible to cope with high integration of future components.

In the ink jet head of this embodiment, the ink chambers 2 are adjacent to each other with the piezoelectric side wall 7 interposed therebetween.
A non-ejection area to which ink is not supplied may be provided on both sides of each ink chamber. For example, the electrodes formed on the inner surface of the ink chamber may be electrically connected instead of being separated, and the electrodes formed on the inner surface of the non-ejection area may be separated.

In this embodiment, the piezoelectric side wall 7 is composed of two piezoelectric layers whose polarization directions are opposite to each other. However, the piezoelectric side wall 7 is composed of a non-piezoelectric layer and a piezoelectric layer. Is also good.

[0065]

According to the manufacturing method of the ink jet head of the present invention as apparent from that described in the foregoing, while irradiating the laser beam to the electrodes of a groove serving as an ink chamber formed board surface, Inject gas in a direction substantially parallel to the groove .
Thereby, the molten scattered matter generated when the electrode is irradiated with the laser beam is efficiently removed from the inside of the groove . As a result, it is possible to prevent foreign matter from adhering to the inside of the groove, which is a functionally important portion on the substrate. The configuration for this is relatively simple.

As a result, an industrially remarkable effect such as the production of an inexpensive and high-quality inkjet head can be obtained.

[Brief description of the drawings]

FIG. 1 is a schematic view illustrating a method for manufacturing an ink jet head according to an embodiment of the present invention.

FIG. 2 is a schematic view showing an electrode separation step in the method of manufacturing an ink jet head according to the embodiment.

FIG. 3 is a perspective view showing an inkjet head according to an embodiment of the present invention.

FIG. 4 is a sectional view showing the operation of the ink jet head of the embodiment.

FIG. 5 is a schematic view showing another example of the method for manufacturing an ink jet head of the present invention.

FIG. 6 is a perspective view showing a conventional inkjet head.

FIG. 7 is a cross-sectional view illustrating an operation of a conventional inkjet head.

FIG. 8 is a schematic view showing an electrode separation step of a conventional method for manufacturing an ink jet head.

FIG. 9 is an explanatory view showing a conventional method for manufacturing an ink jet head.

FIG. 10 is an explanatory diagram showing another example of a conventional method for manufacturing an ink jet head.

FIG. 11 is an explanatory diagram showing another example of a conventional method for manufacturing an ink jet head.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Piezoelectric ceramic substrate 2 Ink chamber 7 Piezoelectric side wall 9 Electrode 10 YAG laser beam 15 Precision table 16 Melted splatter 17 Open end 18 Gas injection nozzle 19 Inert gas

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) B23K 26/14 B23K 26/00 B41J 2/16

Claims (4)

(57) [Claims] [Claim 1 wherein at least a portion is a substrate having a plurality of grooves between the side walls formed of a piezoelectric ceramic, of the side wall
An electrode formed on the surface, the solid Ide busy the groove on the substrate
Is wearing, and a cover member forming the grooves as ink chambers, said ink by said sidewall is operated deformed
In a method for manufacturing an ink jet head for applying an ejection pressure to ink contained in a chamber, the method further comprises the plurality of grooves having a size to be the ink chamber.
A first step of forming a substrate, and the side wall forming the groove formed in the first step;
A second step of forming an electrode on the surface of the substrate including the surface, while injecting gas into the groove and the direction which is substantially parallel, by irradiating a high energy beam to the electrode formed on the surface of the substrate To selectively remove a part of the electrode ,
And a third step of making the electrodes on the side walls independent . 2. The method according to claim 1, wherein the gas is introduced into the groove from one end of the groove. 3. The method according to claim 1, wherein the gas is an inert gas. The method according to claim 4, wherein the third step, the manufacturing method of the ink jet head according to claim 1, characterized in that the removal of the electrodes formed on the bottom surface of the groove.