JP3226521B2 - Reflective liquid crystal display - Google Patents

Reflective liquid crystal display

Info

Publication number
JP3226521B2
JP3226521B2 JP2000349023A JP2000349023A JP3226521B2 JP 3226521 B2 JP3226521 B2 JP 3226521B2 JP 2000349023 A JP2000349023 A JP 2000349023A JP 2000349023 A JP2000349023 A JP 2000349023A JP 3226521 B2 JP3226521 B2 JP 3226521B2
Authority
JP
Japan
Prior art keywords
liquid crystal
crystal display
reflection
electrode
scattering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000349023A
Other languages
Japanese (ja)
Other versions
JP2001201743A (en
Inventor
直樹 加藤
智明 関目
義夫 岩井
鉄 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2000349023A priority Critical patent/JP3226521B2/en
Publication of JP2001201743A publication Critical patent/JP2001201743A/en
Application granted granted Critical
Publication of JP3226521B2 publication Critical patent/JP3226521B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Optical Elements Other Than Lenses (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、反射型液晶表示装
置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a reflection type liquid crystal display device.

【0002】[0002]

【従来の技術】近年、液晶表示装置は目ざましい進歩を
遂げ、ノート型パソコン、小型TVなどに積極的に応用
されている。反射型液晶表示装置は、光源となるバック
ライトが不要であるため、透過型液晶表示装置よりもよ
り低消費電力化、薄型軽量化が可能であるために注目さ
れている。
2. Description of the Related Art In recent years, liquid crystal display devices have made remarkable progress, and have been actively applied to notebook personal computers, small TVs, and the like. The reflective liquid crystal display device has attracted attention because it does not require a backlight as a light source, and thus can consume less power and can be thinner and lighter than the transmissive liquid crystal display device.

【0003】反射型液晶表示装置では、外部から入射し
た光を反射させるための反射板が必須であるが、どの角
度から見ても明るく、かつぼけのない表示を得るために
は、反射と散乱の両方の機能を有する凹凸散乱反射電極
を液晶層に隣接して設け、かつその凹凸形状を最適にし
て、あらゆる方向からの入射光を、効率的に液晶表示装
置前方に反射させる必要がある。
In a reflection type liquid crystal display device, a reflection plate for reflecting light incident from the outside is indispensable. However, in order to obtain a bright display without any blur from any angle, reflection and scattering are required. It is necessary to provide an uneven scattering reflective electrode having both functions adjacent to the liquid crystal layer, optimize the uneven shape, and efficiently reflect incident light from all directions toward the front of the liquid crystal display device.

【0004】光散乱層を利用した反射型液晶表示装置の
従来例としては、特開昭58−125084号公報に記
載された凹凸散乱反射電極を用いたものがある。高分子
樹脂からなる凹凸をフォトリソグラフィ技術により形成
し、その上に反射膜となる金属膜を成膜することによ
り、凹凸散乱反射電極を実現している。
[0004] As a conventional example of a reflection type liquid crystal display device using a light scattering layer, there is one using an uneven scattering reflection electrode described in JP-A-58-125084. Irregularity scattering reflective electrodes are realized by forming irregularities made of a polymer resin by photolithography technology and forming a metal film as a reflective film thereon.

【0005】[0005]

【発明が解決しようとする課題】しかしながら、反射板
表面の凹凸が同一形状で規則的に並んだ構造を有する前
記従来例のような反射型液晶表示装置では、反射光の干
渉が発生し、反射板に色付きが発生するという問題があ
った。
However, in the reflection type liquid crystal display device of the prior art having a structure in which the irregularities on the surface of the reflection plate are regularly arranged in the same shape, interference of reflected light occurs, There is a problem that coloring occurs on the plate.

【0006】本発明は、上記従来技術の問題点を解消す
るもので、反射板に色付きが発生しない反射型液晶表示
装置を提供することを目的とする。
An object of the present invention is to solve the above-mentioned problems of the prior art, and an object of the present invention is to provide a reflection type liquid crystal display device in which the reflection plate is not colored.

【0007】[0007]

【課題を解決するための手段】上記目的を達成するため
に、本発明の反射型液晶表示装置は、透明電極を有する
第一の基板と、凹凸散乱反射電極からなる画素電極を有
する第二の基板との間に液晶を介在させた反射型液晶表
示装置において、単位画素における前記凹凸散乱反射電
極の形成領域を、凸部または凹部を規則正しく配置した
領域と、凸部または凹部をランダムに配置した領域とか
らなる複数の領域によって構成し、前記複数の領域を行
列状に配列したことを特徴とする。
In order to achieve the above object, a reflection type liquid crystal display device according to the present invention comprises a first substrate having a transparent electrode and a second substrate having a pixel electrode comprising an uneven scattering reflection electrode. In a reflective liquid crystal display device in which a liquid crystal is interposed between a substrate and a substrate, a formation region of the concave / convex scattering / reflection electrode in a unit pixel, a region where convex portions or concave portions are regularly arranged, and convex portions or concave portions are randomly arranged. And a plurality of regions, and the plurality of regions are arranged in a matrix.

【0008】この構成によれば、反射光の干渉による色
付きのない反射板を得ることができる。
[0008] According to this configuration, it is possible to obtain a reflector having no coloring due to interference of reflected light.

【0009】[0009]

【発明の実施形態】以下、本発明の実施の形態につい
て、図面を参照しながら詳細に説明する。
Embodiments of the present invention will be described below in detail with reference to the drawings.

【0010】図1は、本発明の一実施の形態における反
射型液晶表示装置の単位画素の凹凸散乱反射電極の平面
図を示したものである。ここでは、単位画素における凹
凸散乱反射電極は、互いに隣接する凹部または凸部(円
で表示)の中心間距離分布の標準偏差が異なる4つの領
域から構成されている。
FIG. 1 is a plan view of an uneven scattering reflective electrode of a unit pixel of a reflective liquid crystal display device according to an embodiment of the present invention. Here, the concavo-convex scattering reflection electrode in the unit pixel is composed of four regions having different standard deviations in the center-to-center distance distribution of concave portions or convex portions (represented by circles) adjacent to each other.

【0011】図2は、凹凸散乱反射電極の形成方法を示
したものである。まず、図2(a)に示したように、ガ
ラス基板1上にアクリル系樹脂(日本合成ゴム、商品名
PC335)を1000rpmで30秒間スピンナー塗
布し、感光性有機絶縁膜2を形成する。90℃で2分間
のプリベークをした後、図2(b)に示したように、マ
スク3を用いてUV露光し、更に図2(c)に示したよ
うに、現像、リンスをして凸部2aを形成する。次に、
図2(d)に示したように、ホットプレートにて160
℃で2分間のポストベークをして丸みを持った凸部2b
とし、更に220℃で1時間の本硬化を行う。更に図2
(e)に示したように、アルミニウムをスパッタ成膜し
て約200nmの金属薄膜を形成し、凹凸散乱反射電極
4を形成する。凹凸散乱反射電極4の反射面は所定の形
状の凹凸面となる。
FIG. 2 shows a method of forming the uneven scattering reflective electrode. First, as shown in FIG. 2A, an acrylic resin (Japanese synthetic rubber, trade name PC335) is spin-coated on the glass substrate 1 at 1000 rpm for 30 seconds to form the photosensitive organic insulating film 2. After pre-baking at 90 ° C. for 2 minutes, as shown in FIG. 2B, UV exposure was performed using a mask 3 and, as shown in FIG. The part 2a is formed. next,
As shown in FIG. 2D, 160
Post bake for 2 minutes at ℃ and rounded convex part 2b
Then, main curing is performed at 220 ° C. for 1 hour. FIG. 2
As shown in (e), an aluminum film is formed by sputtering to form a metal thin film of about 200 nm, and the uneven scattering reflective electrode 4 is formed. The reflection surface of the concave / convex scattering / reflection electrode 4 is a concave / convex surface having a predetermined shape.

【0012】このようにして形成した凹凸散乱反射電極
の反射特性の測定結果を図3に示す。この結果から、本
実施の形態による凹凸散乱反射電極は、非常に明るいこ
とが判る。また、このようにして形成した凹凸散乱反射
電極を白色ランプのもとで観察したところ、干渉による
色付きは観察されなかった。
FIG. 3 shows the measurement results of the reflection characteristics of the uneven scattering reflection electrode thus formed. From this result, it can be seen that the uneven scattering reflective electrode according to the present embodiment is very bright. In addition, when the uneven scattering reflective electrode thus formed was observed under a white lamp, no coloring due to interference was observed.

【0013】散乱反射特性は、互いに隣接する凸部間距
離に大きく依存し、凸部が、その距離が一定で、規則正
しく並んだ状態にすると、散乱反射特性が最適となる
が、干渉による色付きが起こる。そこで、最適な散乱反
射特性が得られる隣接凸部間距離がほぼ一定の領域と、
隣接凸部間距離が大きくばらついている領域を混合させ
ることにより、非常に明るく、干渉による色付きのない
反射電極を得ることができる。
The scattering and reflection characteristics greatly depend on the distance between adjacent projections. When the projections are arranged in a state where the distance is constant and regularly arranged, the scattering and reflection characteristics are optimal, but coloring due to interference occurs. Occur. Therefore, a region where the distance between adjacent convex portions where the optimal scattering and reflection characteristics are obtained is substantially constant,
By mixing regions in which the distance between adjacent convex portions varies greatly, it is possible to obtain a reflective electrode that is very bright and has no coloring due to interference.

【0014】さらに、干渉による色付きを抑制するため
には、互いに隣接する凹部または凸部の中心間距離分布
の標準偏差が異なる複数の領域が行列状に配列されてい
るものにおいて、奇数行と偶数行または奇数列と偶数列
の凹凸散乱反射電極の凹凸の分布形状が異なることが望
ましい。
Further, in order to suppress coloring due to interference, an odd-numbered row and an even-numbered area are arranged in a matrix in which a plurality of regions having different standard deviations in the center-to-center distance distribution of adjacent concave portions or convex portions are arranged in a matrix. It is desirable that the unevenness distribution shape of the uneven scattering reflective electrodes in the rows or odd columns and the even columns be different.

【0015】図4は、本発明の一実施の形態における反
射型液晶表示装置の断面を示したものである。図4にお
いて、5は偏光板、6は複屈折フィルム、7は上側透明
基板、8はカラーフィルタ、9は透明電極、10は配向
膜、11は液晶層、12は凹凸散乱反射電極、13は感
光性有機絶縁膜、14は下側基板である。ここでは、上
側透明基板7および下側基板14としてガラス基板を用
いた。
FIG. 4 shows a cross section of a reflection type liquid crystal display device according to an embodiment of the present invention. In FIG. 4, 5 is a polarizing plate, 6 is a birefringent film, 7 is an upper transparent substrate, 8 is a color filter, 9 is a transparent electrode, 10 is an alignment film, 11 is a liquid crystal layer, 12 is an uneven scattering reflective electrode, and 13 is The photosensitive organic insulating film 14 is a lower substrate. Here, a glass substrate was used as the upper transparent substrate 7 and the lower substrate 14.

【0016】透明電極9および凹凸散乱反射電極12の
上にポリイミド樹脂を印刷、熱硬化した後、ラビングが
互いに反平行になるように、レーヨン布を用いたラビン
グ法による配向処理を行うことにより配向膜10を形成
した。
After a polyimide resin is printed on the transparent electrode 9 and the uneven scattering / reflection electrode 12 and cured by heat, an alignment process is performed by a rubbing method using a rayon cloth so that the rubbing is antiparallel to each other. The film 10 was formed.

【0017】次に、上側透明基板7上の表示画素領域の
周囲部分に、直径5.7μmのガラスファイバを1.5
重量%混合させた熱硬化性シール樹脂をスクリーン印刷
し、下側基板14上には直径4.5μmの樹脂ビーズを
150個/mm2の密度で散布し、上側透明基板7と下
側基板14を互いに貼り合わせ、150℃でシール樹脂
を硬化させた。その後、屈折率異方性Δnが0.14の
ネマティック液晶を真空注入し、紫外線硬化樹脂で封口
した後、紫外線を照射して硬化させた。
Next, a glass fiber having a diameter of 5.7 μm is placed around the display pixel area on the upper transparent substrate 7 by 1.5 μm.
The thermosetting sealing resin mixed by weight% is screen-printed, and resin beads having a diameter of 4.5 μm are sprayed on the lower substrate 14 at a density of 150 / mm 2 , and the upper transparent substrate 7 and the lower substrate 14 are dispersed. Were bonded together, and the sealing resin was cured at 150 ° C. Thereafter, a nematic liquid crystal having a refractive index anisotropy Δn of 0.14 was vacuum-injected, sealed with an ultraviolet curable resin, and then cured by irradiating ultraviolet rays.

【0018】上述した方法で作製した液晶セルの上側透
明基板7の上に、複屈折フィルム6としてリタデーショ
ン値が490nmのものをその遅相軸が上側透明基板7
のラビング方向と直交するように貼り合わせ、更にその
上に偏光板5としてニュートラルグレーの偏光板をその
吸収軸が上側透明基板7のラビング方向と45°の角度
をなすように貼り合わせた。
On the upper transparent substrate 7 of the liquid crystal cell produced by the above-described method, a birefringent film 6 having a retardation value of 490 nm is used.
And a neutral gray polarizing plate as the polarizing plate 5 was bonded thereon such that the absorption axis thereof forms an angle of 45 ° with the rubbing direction of the upper transparent substrate 7.

【0019】偏光板5側から入射した光は、複屈折フィ
ルム6、液晶層11を通過して凹凸散乱反射電極12に
到達する。複屈折フィルム6と液晶層11のリタデーシ
ョンの差を光の波長の1/4に設定しているがために、
反射面においては光は円偏光状態になり、反射光が再び
偏光板5に到達したところでは入射直線偏光とは直交す
る方向の直線偏光状態となる。このとき、暗状態が実現
できる。
Light incident from the polarizing plate 5 side passes through the birefringent film 6 and the liquid crystal layer 11 and reaches the uneven scattering reflective electrode 12. Since the difference in retardation between the birefringent film 6 and the liquid crystal layer 11 is set to 1 / of the wavelength of light,
On the reflection surface, the light is in a circularly polarized state, and when the reflected light reaches the polarizing plate 5 again, the light is in a linearly polarized state in a direction orthogonal to the incident linearly polarized light. At this time, a dark state can be realized.

【0020】さらに、液晶層11に電圧を印加すること
により、液晶層11を通過する光を変調することができ
る。印加する電圧とともに液晶層11の有効なリタデー
ション値は減少する。液晶層11と複屈折フィルム6の
リタデーション値が等しくなった時、反射光は再び偏光
板5に到達したところでは入射直線偏光状態と同じ方向
の直線偏光状態となる。この時、明状態が実現できる。
Further, by applying a voltage to the liquid crystal layer 11, light passing through the liquid crystal layer 11 can be modulated. The effective retardation value of the liquid crystal layer 11 decreases with the applied voltage. When the retardation values of the liquid crystal layer 11 and the birefringent film 6 become equal, when the reflected light reaches the polarizing plate 5 again, it becomes a linearly polarized light in the same direction as the incident linearly polarized light. At this time, a bright state can be realized.

【0021】以上のように、凹凸散乱反射電極の形状を
最適にすることにより、非常に明るい反射特性が得られ
た。
As described above, an extremely bright reflection characteristic was obtained by optimizing the shape of the uneven scattering reflection electrode.

【0022】なお、本発明の実施の形態において、液晶
の動作モードとしては、電界制御複屈折効果を利用した
例で説明したが、この動作モードに限定されるものでは
なく、1枚偏光板構成のTNモード、STNモード、ま
たは偏光板を用いない動作モードであるゲストホストモ
ード、高分子分散型液晶モードなどで、凹凸散乱反射面
を用いた構成においても実質的に同様の効果を得ること
ができる。
In the embodiment of the present invention, the operation mode of the liquid crystal has been described using an example in which the electric field control birefringence effect is used. However, the present invention is not limited to this operation mode. In the TN mode, the STN mode, the guest-host mode which is an operation mode without using a polarizing plate, the polymer dispersion type liquid crystal mode, and the like, substantially the same effect can be obtained even in the configuration using the uneven scattering reflection surface. it can.

【0023】また、本発明の実施の形態において、凹凸
散乱反射電極の凸部または凹部の平面形状を円とした
が、発明のねらいとする効果はそれによって限定的に得
られるものではなく、例えば三角形、四角形、五角形、
六角形、八角形、楕円においても同様の効果を得ること
ができる。
In the embodiment of the present invention, the planar shape of the convex or concave portion of the concave / convex scattering / reflecting electrode is a circle. However, the effect aimed at by the invention is not limited to this. Triangle, square, pentagon,
Similar effects can be obtained with hexagons, octagons, and ellipses.

【0024】また、本発明の実施の形態において、反射
膜としてアルミニウムを構成金属とする反射電極を用い
たが、発明のねらいとする効果はそれによって限定的に
得られるものではなく、例えば銀を構成金属とする反射
電極を用いても同様の効果を得ることができる。
Further, in the embodiment of the present invention, a reflective electrode using aluminum as a constituent metal is used as the reflective film. However, the effect aimed at by the present invention is not limited to this. The same effect can be obtained by using a reflective electrode made of a constituent metal.

【0025】さらに、本発明の内容は、単純マトリクス
駆動、TFTなどのスイッチング素子による駆動のいず
れに対しても適用できることは明らかである。
Further, it is clear that the contents of the present invention can be applied to any of simple matrix driving and driving by a switching element such as a TFT.

【0026】[0026]

【発明の効果】以上のことから明らかなように、本発明
の反射型液晶表示装置では、単位画素における前記凹凸
散乱反射電極の形成領域を、凸部または凹部を規則正し
く配置した領域と、凸部または凹部をランダムに配置し
た領域とからなる複数の領域によって構成することによ
り、非常に明るく、かつ干渉による色付きのない、優れ
た反射特性を得ることができる。
As is apparent from the above description, in the reflection type liquid crystal display device of the present invention, the formation area of the uneven scattering / reflection electrode in the unit pixel is divided into the area where the convex portions or the concave portions are regularly arranged, and the convex area. Alternatively, by forming a plurality of regions including regions in which the concave portions are randomly arranged, it is possible to obtain excellent reflection characteristics that are extremely bright and free from coloring due to interference.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施の形態における反射型液晶表示
装置の1画素の凹凸散乱反射電極の平面図
FIG. 1 is a plan view of an uneven scattering reflective electrode of one pixel of a reflective liquid crystal display device according to an embodiment of the present invention.

【図2】本発明の一実施の形態における凹凸散乱反射電
極の形成方法を示す工程断面図
FIG. 2 is a process cross-sectional view illustrating a method for forming a concave-convex scattering reflection electrode according to an embodiment of the present invention.

【図3】本発明の一実施の形態における凹凸散乱反射電
極の反射特性図
FIG. 3 is a reflection characteristic diagram of the uneven scattering reflection electrode according to the embodiment of the present invention.

【図4】本発明の一実施の形態における反射型液晶表示
装置の基本構成を示す断面図
FIG. 4 is a cross-sectional view illustrating a basic configuration of a reflective liquid crystal display device according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 ガラス基板 2 感光性有機絶縁膜 3 マスク 4 凹凸散乱反射電極 5 偏光板 6 複屈折フィルム 7 上側透明基板 8 カラーフィルタ 9 透明電極 10 配向膜 11 液晶層 12 凹凸散乱反射電極 13 感光性有機絶縁膜 14 下側基板 DESCRIPTION OF SYMBOLS 1 Glass substrate 2 Photosensitive organic insulating film 3 Mask 4 Irregular scattering reflective electrode 5 Polarizer 6 Birefringent film 7 Upper transparent substrate 8 Color filter 9 Transparent electrode 10 Alignment film 11 Liquid crystal layer 12 Irregular scattering reflective electrode 13 Photosensitive organic insulating film 14 Lower substrate

───────────────────────────────────────────────────── フロントページの続き (72)発明者 小川 鉄 大阪府門真市大字門真1006番地 松下電 器産業株式会社内 (56)参考文献 特開 平5−323371(JP,A) 特開 平10−221704(JP,A) 特開 平8−184846(JP,A) 特開 平2−280335(JP,A) 特開 平4−258901(JP,A) 特開 平11−7032(JP,A) 特開 平11−52416(JP,A) (58)調査した分野(Int.Cl.7,DB名) G02F 1/1343 G02F 1/1362 G02F 1/1335 ────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Ogawa Tetsudo 1006 Kadoma, Kadoma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. (56) References JP-A-5-323371 (JP, A) JP-A-10- 221704 (JP, A) JP-A-8-184846 (JP, A) JP-A-2-280335 (JP, A) JP-A-4-258901 (JP, A) JP-A-11-7032 (JP, A) JP-A-11-52416 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) G02F 1/1343 G02F 1/1362 G02F 1/1335

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 透明電極を有する第一の基板と、凹凸散
乱反射電極からなる画素電極を有する第二の基板との間
に液晶を介在させた反射型液晶表示装置において、 単位画素における前記凹凸散乱反射電極の形成領域を、
凸部または凹部を規則正しく配置した領域と、凸部また
は凹部をランダムに配置した領域とからなる複数の領域
によって構成し、前記複数の領域を行列状に配列したこ
とを特徴とする反射型液晶表示装置。
1. A reflection type liquid crystal display device in which a liquid crystal is interposed between a first substrate having a transparent electrode and a second substrate having a pixel electrode formed of an uneven scattering reflective electrode, wherein the unevenness in a unit pixel is provided. The formation area of the scattering reflection electrode is
A reflection type liquid crystal display comprising a plurality of regions consisting of regions in which projections or depressions are regularly arranged and regions in which projections or depressions are randomly arranged, wherein the plurality of regions are arranged in a matrix. apparatus.
JP2000349023A 2000-11-16 2000-11-16 Reflective liquid crystal display Expired - Fee Related JP3226521B2 (en)

Priority Applications (1)

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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000349023A JP3226521B2 (en) 2000-11-16 2000-11-16 Reflective liquid crystal display

Related Parent Applications (1)

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JP14976798A Division JP3203331B2 (en) 1998-05-29 1998-05-29 Reflective liquid crystal display

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JP2001201743A JP2001201743A (en) 2001-07-27
JP3226521B2 true JP3226521B2 (en) 2001-11-05

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100484953B1 (en) * 2002-08-12 2005-04-22 엘지.필립스 엘시디 주식회사 reflective electrode of reflection or transflective type LCD and fabrication method of thereof
JP3800186B2 (en) 2003-02-21 2006-07-26 セイコーエプソン株式会社 Liquid crystal display device, reflector, and electronic device
JP4480599B2 (en) 2005-02-14 2010-06-16 Nec液晶テクノロジー株式会社 Reflector, method for manufacturing the same, and liquid crystal display device
JP2010085588A (en) * 2008-09-30 2010-04-15 Sony Corp Manufacturing method of optical component, and optical component, and manufacturing method of display device, and display device
TWI683162B (en) * 2018-08-15 2020-01-21 友達光電股份有限公司 display system
CN109785757B (en) * 2019-03-20 2021-04-20 合肥鑫晟光电科技有限公司 Display substrate, display panel and display device

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