JP3225265U - Positioning table with built-in actuator - Google Patents

Abstract

A positioning table with a built-in actuator is provided.
The apparatus includes a base, a table, a plurality of guide moving devices, and a plurality of actuators, wherein the base is arranged to face the table and a plurality of actuators are provided on the base. Each of the guide moving devices enters the corresponding through hole, and each of the actuators is provided at a bottom edge of each of the guide moving devices. It is possible to suppress that a control signal from each of the actuators to each of the guide moving devices is affected by the outside world and generate noise, and it is possible to effectively reduce an operation error of each of the guide moving devices. As a result, operation accuracy and reliability can be improved.
[Selection diagram] Fig. 1

Description

  The present invention relates to a positioning table, and more particularly to the disclosure of a novel structure of a positioning table with a built-in actuator.

  With the advancement of science and technology, the processing modes of various manufacturing processes are already evolving to the nano level. Many precision products are subject to higher and more stringent precision requirements in the manufacturing process, especially for photoelectric products and wafer products, where precision positioning technology is a prerequisite.

  The positioning table is equipment applied to the precision machining manufacturing process. A conventional alignment table mainly includes a base, a table, and a plurality of guide moving devices, among which the base is disposed so as to face the table, and the base and the table Each of the guide moving devices is installed between the guide moving devices, and the table can be displaced or rotated relative to the base via each of the guide moving devices.

  The guide moving device is mainly divided into two different types of guide moving devices of a feed screw shaft type and a slide rail type. Among them, the feed screw shaft type guide moving device mainly uses a rotary motor. By driving the feed screw shaft and screwing it into the screw sleeve using the feed screw shaft, the rotary operation is converted to a linear operation to urge the table to operate, while the slide rail type is used. The guide moving device mainly drives a slide rail using a linear motor that operates linearly, thereby urging the table to operate.

  The guide moving device is controlled and operated by an actuator, and the actuator is mainly configured by an electronic electric circuit, and is used to control a current flowing to the rotary motor or the linear motor. The operation displacement of the moving device is controlled. A conventional positioning table is provided separately from a plurality of the guide moving devices and a plurality of actuators for adaptively controlling the respective guide moving devices, and each of the actuators is provided separately from the positioning table. Each of the actuators is electrically connected to a corresponding one of the guide moving devices using an electrical wire.

  However, according to the study, in the above-described conventional positioning table, the actuator is installed separately from the positioning table, and it is possible to reduce the possibility that the actuator is subjected to contamination induced in the surrounding environment of the positioning table. Rather, there will be a considerable distance between the actuator and the guide moving device, and the electrical lead between the actuator and the guide moving device must also have a corresponding length. When a current flows through the electric conductor, a damping phenomenon occurs in the current, and a control signal transmitted from the actuator to the guide moving device is easily affected by an external environment, thereby generating noise. However, in spite of a high demand for the accuracy of the operation of the guide moving device, an operation error of the guide moving device is likely to occur due to an attenuation phenomenon and a noise phenomenon due to a current flowing through the electric conductor. The longer the length of the electric conductor, the higher the amount of current attenuation, the higher the probability of generating noise, and the greater the operating error of the guide moving device. In addition, since a large number of the electric conductors coexist in the space, a problem that the electric wires are entangled or entangled with each other and interfere with each other easily occurs.

  The main object of the present invention is to provide a positioning table with a built-in actuator, and the technical problem to be solved is how the operation error can be reduced, which is more ideal and practical. The goal is to break through innovation with the goal of researching and developing the structure of the original positioning table.

Based on the above object, the present invention provides a positioning table having a built-in actuator, which includes a base, a table, a plurality of guide moving devices, and a plurality of actuators, wherein the base is provided. , The guide moving devices are arranged to face each other, the guide moving devices are respectively joined to the base and the table, and the actuators are respectively electrically connected to the guide moving devices. In each of the guide moving devices, the table is driven to operate relative to the base, and each of the guide moving devices has a power unit and an operating unit. The working part of the device is joined to one side of the table facing the base, and the power part of each guide moving device is A plurality of through-holes are formed in the base, and a power unit of each of the guide moving devices enters each of the through-holes, and each of the actuators has a corresponding one of the actuators. Are respectively provided at the bottom edge of each of the guide moving devices, the power unit is mainly composed of a primary side and a secondary side, an isolation part is formed on the outer periphery of the primary side, and the isolation part is It is formed of a resin having dustproof, waterproof and insulating properties, thereby positioning the primary side, and a plurality of protective portions are provided on a bottom edge of the base, and each of the protective portions is provided with a corresponding one of the through holes. It is joined to the periphery of the bottom end to protect each of the actuators and avoid contamination by foreign matter.

  According to such a novel and unique design, the present invention can improve the current decay phenomenon between each of the actuators and each of the guide moving devices as compared with the prior art, and can reduce The control signal to each of the guide moving devices can be suppressed from generating noise due to the influence of the outside world, and the operation error of each of the guide moving devices can be effectively reduced. Accuracy and reliability can be increased, and practical breakthroughs can be achieved.

FIG. 2 is a perspective view of the first embodiment of the present invention in an elevation angle state. FIG. 2 is an exploded perspective view showing an elevation angle state of the first embodiment of the present invention. FIG. 2 is a partial cross-sectional view showing Embodiment 1 of the present invention. FIG. 4 is a perspective view of the second embodiment of the present invention in an elevation angle state. FIG. 4 is a bottom view of the second embodiment of the present invention. FIG. 8 is a perspective view of the third embodiment of the present invention in an elevation angle state.

  Referring to FIGS. 1 to 6, these figures show specific embodiments of the positioning table with built-in actuator of the present invention, respectively, but these embodiments are used only for description. However, when requesting the registration of a utility model, it shall not be restricted to those structures.

  As shown in FIGS. 1 to 3, the first embodiment of the positioning table with a built-in actuator according to the present invention includes a base 10, a table 20, a plurality of guide moving devices 30, and a plurality of actuators 40. The base 10 is disposed so as to face the table 20, and the guide moving devices 30 are joined to the base 10 and the table 20, respectively, and the actuators 40 are By being electrically connected to each of the guide moving devices 30, each of the guide moving devices 30 drives the table 20 to relatively operate with the base 10.

  Each of the guide moving devices 30 has a power unit 32 and an operating unit 34, of which the operating unit 34 of each of the guide moving devices 30 is located on one side of the table 20 facing the base 10. And the power unit 32 of each of the guide moving devices 30 is connected to one side of the base 10 facing the table 20, and each of the actuators 40 is mainly composed of an electronic circuit. , Is used to control the current flowing through the power unit 32 of each of the guide moving devices 30, thereby controlling the amount of operation displacement of the operating unit 34 of each of the guide moving devices 30.

  A plurality of through holes 12 are formed through the base 10, the power units 32 of the respective guide moving devices 30 enter the respective through holes 12, and the respective actuators 40 are respectively provided with the respective guide moving devices 30. 30, each of the actuators 40 is in close contact with the power unit 32 of each of the guide moving devices 30, and each of the actuators 40 is located inside each of the through holes 12. Is selected as a more preferable embodiment, the power unit 32 is mainly composed of a primary side 322 and a secondary side 324, and an isolation part 36 is formed on the outer periphery of the primary side 322, and the isolation part 36 is The primary side 322 is in direct contact with the secondary side 324, the actuator 40, and the hole wall of the through hole 12. It is possible to avoid that. A plurality of protection portions 50 are provided on the bottom edge of the base 10, and each of the protection portions 50 is joined to the periphery of the bottom end of each of the through holes 12, thereby protecting each of the actuators 40. And contamination by foreign matter can be avoided.

Further, regarding the formation of the isolation part 36, when the primary side 322 is installed on the base 10,
By filling the through-hole 12 with a colloidal resin having dustproof, waterproof and insulating properties, the isolating portion 36 is formed of the colloidal resin surrounding the primary side 322, whereby the isolating portion 36 is interposed. Thus, the primary side 322 is positioned in the through hole 12. Although FIG. 2 shows the isolation part 36 in a partial cross-sectional state, the interpretation of the shape of the isolation part 36 should not be construed as being limited to the one shown in FIG.

  The formation of the through holes 12 allows the actuators 40 to be closely installed with the power units 32 of the guide moving devices 30, respectively, so that a current flows between the actuators 40 and the guide moving devices 30. The length of the electric wires (not shown in the figure) for flowing can be greatly reduced, and the phenomenon of attenuation caused by the current flowing through the electric wires can be greatly improved. It is possible to suppress a control signal from each of the actuators 40 to each of the guide moving devices 30 from being affected by the outside world and generating noise, thereby effectively reducing an operation error of each of the guide moving devices 30. Therefore, operation accuracy and reliability can be improved.

  Since each of the actuators 40 is closely installed with each of the guide moving devices 30, there is no need to separately prepare a space for installing each of the actuators 40 outside the alignment table, and the entire alignment table is not required. The space range can be used, more guide moving devices 30 can be arranged more closely, the degree of diversification of the operation modes of the table 20 can be increased, and the overall arrangement is complicated. The degree can be effectively reduced.

  Further, each of the protective parts 50 is a thin film formed of a resin having dustproof, waterproof and insulating properties, whereby dust and foreign matter from the outside enters into each of the through holes 12, and each of the guide moving devices 30. And, it does not adversely affect the operation reliability of each of the actuators 40. Each of the protection units 50 may be selected from those configured using a plate.

  As shown in FIGS. 4 and 5, the main difference between the second embodiment and the first embodiment is that a line groove 14 is recessed at the bottom edge of the base 10, and the line groove 14 The wire groove 14 extends to one side of the base 10, and the power cable 42 of each of the actuators (not shown) is connected to the hole (not shown in the drawing). Is positioned. Thereby, the convenience of wiring can be improved, and the power cable 42 is used to connect each of the actuators to a power source (not shown in the figure), so that the power cable 42 is connected to each of the actuators from the power source. Power is supplied to this.

  The formation of the wire groove 14 and the spatial configuration communicating with each through hole 12 of the wire groove 14 facilitates standardization of each of the power cables 42 to a fixed form. Each power cable 42 is formed using a circuit board or a press-formed metal wire. At the time of assembling, if the printed electric circuit board or the metal wire is placed in the wire groove 14, it is easy to align and electrically connect the power contacts between the power cables 42 and the guide moving devices 30. This can also avoid the problem of misalignment that may occur in each of the power cables 42 when each of the protection units 50 is installed.

  As shown in FIG. 6, the main difference between the third embodiment and the second embodiment is that a protective film 16 is provided in the line groove (not shown in the figure) at the bottom edge of the base 10. Thereby, the power cable (not shown in the figure) can be protected, and the protective film 16 is a thin film formed of a resin having dustproof, waterproof and insulating properties.

DESCRIPTION OF SYMBOLS 10 ... Base 12 ... Through-hole 14 ... Wire groove 16 ... Protective film 20 ... Table 30 ... Guide moving device 32 ... Power unit 322 ... Primary side 324 ... Secondary side 34 ... Operating part 36 ... Isolation part 40 ... Actuator 42 ... Electric power Cable 50: Protective part

Claims (5)

A positioning table with a built-in actuator including a base, a table, a plurality of guide moving devices, and a plurality of actuators,
The base is disposed so as to face the table, the guide moving devices are respectively joined to the base and the table, and the actuators are electrically connected to the guide moving devices, respectively. And
Each of the guide moving devices has a power unit and an operating unit, and the operating unit of each of the guide moving devices is joined to one side of the table facing the base, and each of the guide moving devices is The power unit is joined to one side of the base facing the table,
A plurality of through holes are formed through the base, the power units of the respective guide moving devices enter the respective through holes, and the respective actuators are respectively provided at bottom edges of the respective guide moving devices. The power unit is mainly composed of a primary side and a secondary side, and an isolation part for positioning the primary side is formed on an outer periphery of the primary side, and the isolation part has dustproof, waterproof and insulating properties. Formed of resin with
A positioning table with a built-in actuator, wherein a plurality of protection portions are provided on a bottom edge of the base, and each of the protection portions is joined to a periphery of a bottom end of each through hole.   The positioning table according to claim 1, wherein each of the primary sides is provided in each of the through holes, and the primary side is surrounded by the isolation part.   The positioning table according to claim 1, wherein each of the actuators is located in each of the through holes.   A line groove is recessed at a bottom edge of the base, the line groove communicates with each of the through holes in a lateral direction, and the line groove extends to one side of the base, and the line groove extends to one side of the base. The positioning table according to any one of claims 1 to 3, wherein a power cable is positioned in the wire groove.   The positioning table according to claim 4, wherein each of the power cables is a printed electric circuit board having a conductive circuit or a pressed metal wire.

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