CN210778496U

CN210778496U - Alignment platform with built-in driver

Info

Publication number: CN210778496U
Application number: CN201921923374.5U
Authority: CN
Inventors: 陈志鑫; 庄运清; 林俊宏
Original assignee: GMT Global Inc
Current assignee: GMT Global Inc
Priority date: 2019-11-08
Filing date: 2019-11-08
Publication date: 2020-06-16
Anticipated expiration: 2029-11-08

Abstract

The utility model discloses a counterpoint platform of built-in driver, including a base, a platform, several guide device and several driver, wherein the base is relative each other with the platform, and the base runs through the several through hole, and each guide device gets into each through hole respectively, and each guide device bottom edge is located respectively to each driver. The control signals of each actuator are not easily affected by the outside to generate noise, so as to effectively reduce the actuation error of each actuator, and have high actuation precision and reliability.

Description

Alignment platform with built-in driver

Technical Field

The utility model relates to an counterpoint platform especially indicates a built-in driver's counterpoint platform.

Background

With the development of technology, various processing modes of manufacturing have entered the nanometer level, and many precision products have higher and more stringent precision requirements in the manufacturing process, especially for photoelectric and wafer products, and the precision positioning technology becomes a necessary condition.

The alignment platform is a device applied to a precision machining process; the alignment platform mainly comprises a base, a platform and a plurality of guiding devices, wherein the base and the platform are opposite to each other, each guiding device is arranged between the base and the platform, and the platform can move or rotate relative to the base through each guiding device.

The guide device is mainly divided into a screw type guide device and a slide rail type guide device, wherein the screw type guide device mainly utilizes a rotary motor to drive a screw, the screw is used for screwing a screw sleeve to convert the rotary motion into linear motion so as to drive the platform to move, and the slide rail type guide device mainly utilizes a linear motor which is in linear motion to drive a slide rail so as to drive the platform to move.

The guiding device is controlled by a driver, the driver is mainly composed of an electronic circuit and is used for controlling the current passing through a rotary motor or a linear motor and controlling the displacement of the guiding device, the aligning platform is used for separating a plurality of guiding devices from a plurality of drivers correspondingly controlling the guiding devices, each driver is separated from the aligning platform, and each driver is electrically connected with each corresponding guiding device by utilizing an electric lead.

The contraposition platform separates the driver from the contraposition platform, although the possible pollution of the driver to the peripheral environment of the contraposition platform can be reduced, a considerable distance exists between the driver and the guiding device, the electric lead between the driver and the guiding device has a corresponding length, when the current passes through the electric lead, the current can generate an attenuation phenomenon, and the control signal transmitted by the driver to the guiding device is easily influenced by the outside to generate noise.

SUMMERY OF THE UTILITY MODEL

The main objective of the present invention is to provide an alignment platform with a built-in driver.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

an alignment platform with a built-in driver comprises a base, a platform, a plurality of guiding devices and a plurality of drivers, wherein the base and the platform are opposite to each other, each guiding device is respectively connected with the base and the platform, each driver is respectively electrically connected with each guiding device, and accordingly each guiding device respectively drives the platform and the base to move relatively;

each guide device comprises a power part and an actuating part respectively, wherein the actuating part of each guide device is connected with one side of the platform facing the base, and the power part of each guide device is connected with one side of the base facing the platform;

the base penetrates through a plurality of through holes, the power part of each guide device enters each through hole, each driver is arranged on the bottom edge of each guide device, the power part mainly comprises a primary side and a secondary side, the periphery of the primary side forms an isolation part, and the isolation part is formed by resin with dust-proof, water-proof and insulating properties, so that the primary side is positioned;

the bottom edge of the base is provided with a plurality of protective parts, and each protective part is respectively connected with the periphery of the bottom end of each through hole, so that each driver is protected and foreign matter pollution is avoided.

By this innovative unique design, make the utility model discloses contrast prior art, can improve each driver and each lead the current attenuation phenomenon between the device, each driver is difficult for receiving external influence to each control signal that leads the device respectively and produces the noise, effectively reduces each error that leads the device to actuate, and it is high to actuate precision and reliability, reaches practical progressive nature.

Drawings

Fig. 1 is a perspective view of an elevation angle state according to an embodiment of the present invention.

Fig. 2 is a perspective exploded view of an elevation state according to an embodiment of the present invention.

Fig. 3 is a schematic partial sectional view of an embodiment of the present invention.

FIG. 4 is a perspective view of the second elevation angle state according to the embodiment of the present invention.

Fig. 5 is a bottom view of a second embodiment of the present invention.

Fig. 6 is a perspective view of a three-elevation state according to an embodiment of the present invention.

Detailed Description

Please refer to fig. 1 to fig. 6, which are practical embodiments of the alignment platform of the built-in driver of the present invention, but these embodiments are only for illustrative purposes and are not limited by the structure in the patent application.

As shown in fig. 1 to fig. 3, the first embodiment of the alignment platform with driver of the present invention comprises a base 10, a platform 20, a plurality of guiding devices 30 and a plurality of drivers 40, wherein the base 10 and the platform 20 are opposite to each other, each guiding device 30 is respectively connected to the base 10 and the platform 20, and each driver 40 is respectively electrically connected to each guiding device 30, so that each guiding device 30 respectively drives the platform 20 and the base 10 to move relatively.

Each guiding device 30 comprises a power part 32 and an actuating part 34, wherein the actuating part 34 of each guiding device 30 is connected with one side of the platform 20 facing the base 10, and the power part 32 of each guiding device 30 is connected with one side of the base 10 facing the platform 20; each driver 40 is mainly composed of an electronic circuit for controlling the current passing through the power portion 32 of each guiding device 30, thereby controlling the displacement of the operation portion 34 of each guiding device 30.

The base 10 penetrates several through holes 12, the power part 32 of each guiding device 30 enters each through hole 12, each driver 40 is disposed at the bottom edge of each guiding device 30, and each driver 40 is adjacent to the power part 32 of each guiding device 30, wherein each driver 40 is disposed inside each through hole 12 as a preferred implementation choice, the power part 32 is mainly composed of a primary side 322 and a secondary side 324, an isolation part 36 is formed at the periphery of the primary side 322, the isolation part 36 is made of resin with dust-proof, water-proof and insulating properties, so as to prevent the primary side 322 from directly contacting the secondary side 324, the drivers 40 and the hole walls of the through holes 12, several protection parts 50 are disposed at the bottom edge of the base 10, and each protection part 50 is connected to the periphery of the bottom end of each through hole 12, thereby protecting each driver 40 from foreign matter pollution.

The formation of the isolation part 36 can fill the through hole 12 with a dustproof, waterproof and insulating gel-like resin when the primary side 322 is disposed on the base 10, so that the isolation part 36 is formed by the gel-like resin covering the primary side 322, and thereby the primary side 322 is positioned in the through hole 12 by the isolation part 36; the partition 36 is shown in a partial cross-sectional view in fig. 2, and fig. 2 cannot be used as an explanation of the shape of the partition 36.

Through the formation of each through hole 12, each driver 40 can be disposed adjacent to the power portion 32 of each guiding device 30, the length of the electrical conductor (not shown) between each driver 40 and each guiding device 30 for passing current can be greatly reduced, the attenuation phenomenon of the current passing through the electrical conductor can be greatly improved, each driver 40 is not easy to influence the control signal of each guiding device 30 by the outside to generate noise, the error of the operation of each guiding device 30 is effectively reduced, and the operation precision and reliability are high.

Because each driver 40 is disposed adjacent to each guiding device 30, it is not necessary to arrange a space for disposing each driver 40 outside the alignment platform, and more guiding devices 30 can be disposed in a more compact array by using the overall space range of the alignment platform, so as to increase the diversification degree of the actuation modes of the platform 20 and effectively reduce the complexity of the overall configuration.

Each protection portion 50 is a thin film formed of resin having dust-proof, water-proof and insulating properties, thereby preventing external dust or foreign matter from entering each through hole 12 and affecting the reliability of the operation of each driving device 30 and each driver 40; each protection part 50 may be formed by a plate.

The second embodiment is obtained by changing the first embodiment, and the second embodiment is the same as the first embodiment, and the description will not be repeated, as shown in fig. 4 and fig. 5, the second embodiment is mainly different from the first embodiment in that the bottom edge of the base 10 is recessed with a slot 14, the slot 14 is laterally communicated with each through hole (not shown), the slot 14 extends to one side of the base 10, the power line 42 of each driver (not shown) is located in the slot 14, so as to improve the wiring convenience, the power line 42 is used for coupling each driver and the power source (not shown), so that the power source provides power to each driver.

The formation of the slots 14 and the space between the slots 14 and the through holes 12 are advantageous for standardizing the power lines 42 to a fixed form, for example, a printed circuit board with a conductive loop or a stamped metal wire is used as each power line 42, and the printed circuit board or the metal wire is inserted into the slots 14 during assembly, so that the power contacts between the power lines 42 and the guiding devices 30 can be easily aligned and conducted, and the problem of displacement of the power lines 42 possibly caused by the operation of the protection parts 50 can be avoided.

The third embodiment is obtained by changing the second embodiment, and the third embodiment is the same as the second embodiment, which will not be repeated, as shown in fig. 6, and the third embodiment is mainly different from the second embodiment in that a protection film 16 is disposed on the bottom of the base 10 along the wire groove (not shown), so as to protect the power line (not shown), and the protection film 16 is a thin film formed by a resin with dust-proof, water-proof and insulating properties.

The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims

1. An alignment platform with a built-in driver is characterized by comprising a base, a platform, a plurality of guiding devices and a plurality of drivers, wherein the base and the platform are opposite to each other, each guiding device is respectively connected with the base and the platform, and each driver is respectively electrically connected with each guiding device;

each guide device comprises a power part and an action part respectively, wherein the action part of each guide device is connected with one side of the platform facing the base, and the power part of each guide device is connected with one side of the base facing the platform;

the base penetrates through a plurality of through holes, the power part of each guide device enters each through hole, each driver is arranged on the bottom edge of each guide device, the power part mainly comprises a primary side and a secondary side, the periphery of the primary side forms an isolation part for positioning the primary side, and the isolation part is formed by resin with dust-proof, water-proof and insulating properties;

the bottom edge of the base is provided with a plurality of protective parts, and each protective part is respectively connected with the periphery of the bottom end of each through hole.

2. The alignment platform of claim 1, wherein the primary sides are disposed in the through holes, and the isolation portion covers the primary sides.

3. The alignment platform of claim 1, wherein each driver is located in each through hole.

4. The alignment stage of an internal drive according to claim 1, 2 or 3, wherein each of the shielding portions is a film formed of a resin having dust-proof, water-proof and insulating properties.

5. The alignment platform of claim 1, 2 or 3, wherein each of the protection members is a plate.

6. The alignment platform of claim 4, wherein the bottom edge of the base is recessed with a slot, the slot is laterally connected to each through hole, the slot extends to one side of the base, and the power line of each driver is located in the slot.

7. The alignment platform of claim 6, wherein each power line is standardized to a fixed configuration.

8. The alignment platform of claim 7, wherein each power line is a printed circuit board with conductive circuit or a stamped metal wire.

9. The alignment platform as claimed in claim 6, wherein the bottom edge of the base is provided with a shielding film at the slot.

10. The alignment stage of claim 9, wherein the protection film is a thin film made of resin having dust-proof, water-proof and insulating properties.