JP3222777B2 - Optical fiber preform shape measuring device - Google Patents

Optical fiber preform shape measuring device

Info

Publication number
JP3222777B2
JP3222777B2 JP21709896A JP21709896A JP3222777B2 JP 3222777 B2 JP3222777 B2 JP 3222777B2 JP 21709896 A JP21709896 A JP 21709896A JP 21709896 A JP21709896 A JP 21709896A JP 3222777 B2 JP3222777 B2 JP 3222777B2
Authority
JP
Japan
Prior art keywords
preform
optical fiber
shape
outer diameter
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP21709896A
Other languages
Japanese (ja)
Other versions
JPH1062299A (en
Inventor
佳昌 清水
忠克 島田
秀夫 平沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP21709896A priority Critical patent/JP3222777B2/en
Publication of JPH1062299A publication Critical patent/JPH1062299A/en
Application granted granted Critical
Publication of JP3222777B2 publication Critical patent/JP3222777B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、光ファイバ用プリ
フォームの形状を測定する装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring the shape of an optical fiber preform.

【0002】[0002]

【従来の技術】光ファイバ用プリフォームは光ファイバ
を線引きするための原料母材であり、一般的に外径が3
0〜60mm、長さが1000mm程度の円柱形状であ
る。プリフォームは線引き炉内で2000℃以上の高温
に加熱され、その下方から引き取り装置で100〜60
0m/分の速度で引き取ることによって光ファイバに加
工される。
2. Description of the Related Art An optical fiber preform is a raw material base material for drawing an optical fiber and generally has an outer diameter of 3 mm.
It has a cylindrical shape with a length of about 0 to 60 mm and a length of about 1000 mm. The preform is heated to a high temperature of 2,000 ° C. or higher in a drawing furnace, and is drawn from below by a drawing device to 100 to 60 ° C.
It is processed into an optical fiber by drawing at a speed of 0 m / min.

【0003】プリフォームの外径変動や曲がり量が大き
いと、プリフォームを線引き炉に設置する際に、プリフ
ォームの一部が炉の壁面に近づいたり、接触することが
ある。するとプリフォームの一部が局所的に加熱される
ため、線引きして得られた光ファイバの断面が円形にな
らなかったり、線引きの途中でファイバが切れてしまう
ことがある。このため、線引きする前にプリフォームの
形状を測定し外径変動や曲がり量が基準以下であるかど
うか検査する必要がある。
[0003] If the preform has a large variation in outside diameter or a large amount of bending, a part of the preform may approach or come into contact with the wall of the furnace when the preform is installed in a drawing furnace. Then, since a part of the preform is locally heated, the cross section of the optical fiber obtained by drawing may not be circular, or the fiber may be broken during drawing. For this reason, before drawing, it is necessary to measure the shape of the preform and inspect whether the variation in outer diameter and the amount of bending are below the reference.

【0004】従来のプリフォームの形状測定装置は、プ
リフォームの両端の2点でテフロン製の支持台で支持
し、プリフォームの下に変位計、例えばミツトヨ製リニ
アゲージカウンター・型番LG−S1を配置したもので
あり、プリフォームを測定の度に手で回転させながら曲
がり量を測定し、外径はノギス等で測定し、それらの測
定が終了する度に変位計の位置を移動させていた。
In a conventional preform shape measuring apparatus, two points at both ends of the preform are supported by a support made of Teflon, and a displacement meter, for example, a linear gauge counter made by Mitutoyo, model number LG-S1, is placed under the preform. It was arranged, the bending amount was measured while rotating the preform by hand every time the measurement was performed, the outer diameter was measured with calipers, etc., and the position of the displacement meter was moved each time those measurements were completed .

【0005】[0005]

【発明が解決しようとする課題】このように従来の形状
測定装置では、一回の測定の度に手作業が必要となり、
測定作業が煩雑なだけでなく、長さ1000mmのプリ
フォームを10mm間隔で100点測定した場合には1
5分以上の時間を要し時間がかかりすぎる。またノギス
で外径を測定するときには、プリフォームにノギスを接
触させるため、プリフォームの表面に傷を付けないよう
にせねばならず、難しい作業であった。
As described above, in the conventional shape measuring device, manual work is required for each measurement.
Not only is the measurement operation complicated, but when measuring 100 points of the preform with a length of 1000 mm at 10 mm intervals, 1
It takes more than 5 minutes and takes too much time. Also, when measuring the outer diameter with a vernier caliper, the caliper must be brought into contact with the preform, so that the surface of the preform must not be scratched, which is a difficult task.

【0006】本発明は前記の課題を解決するためなされ
たもので、プリフォームの表面に傷を付けることがな
く、手間がかからず効率的で、しかも短時間で光ファイ
バ用プリフォームの形状を測定できる装置を提供するこ
とを目的とする。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and does not damage the surface of the preform. It is an object of the present invention to provide a device capable of measuring the temperature.

【0007】[0007]

【課題を解決するための手段】前記の目的を達成するた
めになされた本発明の光ファイバ用プリフォームの形状
測定装置は、図1に示すように、光ファイバ用プリフォ
ーム1に、その側方から光を入射させてプリフォーム1
の形状を測定する形状測定装置において、プリフォーム
1が乗せられる保持台11と、プリフォーム1に対し
軸方向と垂直な方向から、出射光が直交する少なく
とも2個のレーザ照射器5により光を入射させてその外
径を測定する外径測定器2と、外径測定器2をプリフォ
ーム1の長手方向に移動させる駆動手段4と、外径測定
器2の測定位置を検知する位置検知器3とを有する。
The optical fiber preform shape measuring apparatus of the present invention, which has been made in order to achieve the above object, has an optical fiber preform 1 provided on an optical fiber preform 1 as shown in FIG. Preform 1 by injecting light from the side
In the shape measuring apparatus for measuring the shape of the preform 1, the holding table 11 on which the preform 1 is mounted, and the preform 1 , in which the outgoing light is orthogonal to the direction perpendicular to the axial direction,
An outer diameter measuring device 2 for irradiating light with two laser irradiators 5 to measure the outer diameter, a driving means 4 for moving the outer diameter measuring device 2 in the longitudinal direction of the preform 1, and an outer diameter measuring device And a position detector 3 for detecting a measurement position of the device 2.

【0008】外径測定器2は少なくとも2個のレーザ照
射器5を有し、各レーザ照射器5からの出射光が直交す
ることが好ましく、同時に2方向からのプリフォームの
径を測定できる。
The outer diameter measuring device 2 has at least two laser irradiators 5, and it is preferable that the light emitted from each of the laser irradiators 5 is orthogonal to each other, and can simultaneously measure the diameter of the preform from two directions.

【0009】保持台11はポリテトラフルオロエチレン
製であることが好ましく、プリフォーム1が傷付くこと
がなく、保持台11の上を滑らせ易い。
The holding table 11 is preferably made of polytetrafluoroethylene , so that the preform 1 is not damaged and can easily slide on the holding table 11.

【0010】形状測定装置は保持台11に光ファイバ用
プリフォーム1を搬送する自動搬送装置を有すると良
く、形状測定の全過程をほぼ無人で行うことができる。
The shape measuring device preferably has an automatic transfer device for transferring the optical fiber preform 1 to the holding table 11, so that the entire process of shape measurement can be performed almost unattended.

【0011】[0011]

【発明の実施の形態】以下、本発明の実施例を詳細に説
明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail.

【0012】図1は、本発明の光ファイバ用プリフォー
ムの形状測定装置の実施例を示す斜視図である。同図に
示すように、外径測定器2は2組のレーザ照射器5およ
びレーザ受光器6(アンリツ(株)製・KL15Xシリ
ーズ)を有しており、各レーザ照射器5は出射したレー
ザ光が直交する位置に配置されている。光ファイバ用プ
リフォーム1は厚さ10mmのテフロン製の保持台11
に乗せられて、外径測定器2の2個のレーザ照射器5か
ら出射されたレーザ光が交わる位置に配置されている。
外径測定器2は同時に直交する2方向のプリフォーム1
の外径を測定できる。外径測定器2は走査板7に取り付
けられ、走査板7の下面に取り付けられたボールナット
16は固定台15上にプリフォーム1と平行に取り付け
られたネジ棒13に螺合している。ネジ棒13はモータ
4に接続されている。固定台15上にはガイドレール1
4が固設され、走査板7を摺動可能に支持している。さ
らに固定台15上には外径測定器2の測定位置を検知窓
8で検知するリンアエンコーダ3(ソニーマグネスケー
ル(株)製・GB/SR−108シリーズ)がプリフォ
ーム1と平行に取り付けられている。
FIG. 1 is a perspective view showing an embodiment of an apparatus for measuring the shape of an optical fiber preform according to the present invention. As shown in the drawing, the outer diameter measuring device 2 has two sets of laser irradiators 5 and laser receivers 6 (KL15X series manufactured by Anritsu Corporation), and each laser irradiator 5 emits a laser beam. The lights are arranged at orthogonal positions. The optical fiber preform 1 is a 10 mm thick Teflon holding base 11.
And placed at a position where the laser beams emitted from the two laser irradiators 5 of the outer diameter measuring device 2 intersect.
The outer diameter measuring device 2 is a preform 1 in two directions orthogonal at the same time.
The outer diameter of can be measured. The outer diameter measuring device 2 is attached to the scanning plate 7, and a ball nut 16 attached to the lower surface of the scanning plate 7 is screwed to a screw bar 13 attached to a fixed base 15 in parallel with the preform 1. The screw rod 13 is connected to the motor 4. Guide rail 1 on fixed base 15
The scanning plate 7 is slidably supported. Further, on the fixed base 15, a lure encoder 3 (GB / SR-108 series manufactured by Sony Magnescale Co., Ltd.) for detecting the measurement position of the outer diameter measuring device 2 with the detection window 8 is attached in parallel with the preform 1. Have been.

【0013】図2は本発明の光ファイバ用プリフォーム
の形状測定装置の制御ブロック図である。同図に示すよ
うにリニアエンコーダ3、外径測定器2、モータ4は、
それぞれリニアエンコーダ演算部25、外径測定器演算
部26、モータコントローラ21を介して制御回路10
に接続されてその動作が制御される。制御回路10は、
演算結果を記録するハードディスクのデータストレージ
22に接続されている。
FIG. 2 is a control block diagram of the optical fiber preform shape measuring apparatus of the present invention. As shown in the figure, the linear encoder 3, the outer diameter measuring device 2, and the motor 4
The control circuit 10 is connected via a linear encoder operation unit 25, an outer diameter measuring unit operation unit 26, and a motor controller 21 respectively.
And its operation is controlled. The control circuit 10
It is connected to a data storage 22 of a hard disk for recording the calculation results.

【0014】光ファイバ用プリフォームの形状測定装置
は、以下のように動作する。
The apparatus for measuring the shape of an optical fiber preform operates as follows.

【0015】まず図2に示す制御回路10に光ファイバ
用プリフォーム1の形状を測定する間隔を設定し、測定
を開始する。すると図1に示すようにモータ4が断続的
に駆動して、外径測定器2は矢印の方向に移動および停
止を繰り返し、外径測定器2が停止したときに測定した
プリフォーム1の直交方向の外径データと、リニアエン
コーダ3で検知した測定位置データとが、リニアエンコ
ーダ演算部25および外径測定器演算部26で演算処理
され、プリフォーム1の外径、中心の基準点からのズレ
(変位量)、変位の方向、外径の変化している位置、プ
リフォーム1全体の外径の平均値、プリフォーム1全体
の外径の変動量の形状データが算出されて、データスト
レージ22に保存されると同時にプリンタで印刷され
る。
First, an interval for measuring the shape of the optical fiber preform 1 is set in the control circuit 10 shown in FIG. 2, and the measurement is started. Then, as shown in FIG. 1, the motor 4 is driven intermittently, the outer diameter measuring device 2 repeatedly moves and stops in the direction of the arrow, and the orthogonality of the preform 1 measured when the outer diameter measuring device 2 stops. The outer diameter data in the direction and the measurement position data detected by the linear encoder 3 are processed by the linear encoder calculator 25 and the outer diameter measuring device calculator 26 to obtain the outer diameter of the preform 1 and the center of the preform 1 from the reference point. The displacement (displacement amount), the direction of displacement, the position where the outer diameter is changed, the average value of the outer diameter of the entire preform 1, and the shape data of the variation of the outer diameter of the entire preform 1 are calculated, and data storage is performed. 22 and printed by the printer at the same time.

【0016】尚、通常一本の母インゴットを延伸して得
られる光ファイバ用プリフォームは全長が10m以上あ
って長すぎるため、本発明の形状測定装置で測定を行う
際には、10本以上に切断し約1mの長さにして測定さ
れる。この時、プリフォーム切断前にペンで印を付け、
切断されたプリフォーム1を保持台11に乗せるときに
方向を合わせることによって、切断前のプリフォーム全
体の形状データを得ることができる。
Incidentally, the preform for an optical fiber obtained by stretching a single mother ingot is usually too long, having a total length of 10 m or more. Into a length of about 1 m. At this time, mark with a pen before cutting the preform,
By matching the direction when placing the cut preform 1 on the holding table 11, shape data of the entire preform before cutting can be obtained.

【0017】本発明の形状測定装置を使用して、長さ1
000mm、外径60mmのプリフォーム1を10mm
間隔で100点の形状を測定し、測定データからプリフ
ォーム1の外径、中心点の変位量と変位方向を算出した
データを得た。その結果を図3に示す。同図に示したよ
うに、プリフォーム1の外径および中心点の変位量と変
位方向の変化する様子を正確に知ることができ、しかも
測定時間は60秒と短かった。
Using the shape measuring apparatus of the present invention, the length 1
000 mm, preform 1 with an outer diameter of 60 mm is 10 mm
The shape of 100 points was measured at intervals, and data obtained by calculating the outer diameter of the preform 1, the amount of displacement of the center point and the direction of displacement from the measured data were obtained. The result is shown in FIG. As shown in the figure, the amount of displacement of the outer diameter and the center point of the preform 1 and the manner in which the displacement direction changes can be accurately known, and the measurement time was as short as 60 seconds.

【0018】比較のため、同じプリフォーム1の形状を
従来の形状測定装置を使用して測定した。ただしプリフ
ォーム1は両端の2点で支持台で支持されているため、
プリフォーム1の中心部分500mmのみを10mm間
隔で測定し、得られた測定データをコンピュータに入力
しプリフォーム1の外径、中心点の変位量と変位方向を
算出したデータを得た。その結果を図4に示す。同図に
示すように、各データはばらつきが大きく正確性に欠
け、しかも測定時間は7分と長かった。
For comparison, the shape of the same preform 1 was measured using a conventional shape measuring device. However, since the preform 1 is supported by the support at two points at both ends,
Only the central portion 500 mm of the preform 1 was measured at 10 mm intervals, and the obtained measurement data was input to a computer to obtain data obtained by calculating the outer diameter of the preform 1, the amount of displacement of the center point, and the direction of displacement. FIG. 4 shows the results. As shown in the figure, each data had large variations and lacked accuracy, and the measurement time was as long as 7 minutes.

【0019】次に本発明の形状測定装置に加えて自動搬
送装置を使用し、長さ10000mm、外径60mmの
プリフォームを10本に切断して長さ1000mmにし
たプリフォーム1を、1本ずつ方向を一致させながら保
持台11に乗せて10mm間隔で形状を測定し、10本
のプリフォーム1に連続する外径、中心点の変位量と変
位方向を算出したデータを得た。その結果を図5に示
す。同図に示したように、プリフォーム1の外径および
中心点の変位量と変位方向の変化する様子を連続的に正
確に知ることができ、しかも測定時間は15分(90秒
/1本)と短かった。
Next, in addition to the shape measuring apparatus of the present invention, one preform 1 having a length of 10000 mm and an outer diameter of 60 mm was cut into 10 pieces to a length of 1000 mm using an automatic conveying device. The shape was measured at intervals of 10 mm by placing the preforms 1 on the holding table 11 in the same direction, and data obtained by calculating the outer diameter, the displacement of the center point, and the displacement direction of the ten preforms 1 were obtained. The result is shown in FIG. As shown in the figure, the displacement amount of the outer diameter and the center point of the preform 1 and the manner in which the displacement direction changes can be continuously and accurately known, and the measurement time is 15 minutes (90 seconds / 1 line). ) And was short.

【0020】比較のため、同様に10本に切断したプリ
フォーム1を、従来の形状測定装置を使用して1本ずつ
順次形状を測定した。ただしプリフォーム1は両端の2
点で支持台で支持されているため、プリフォーム1の中
心部分500mmのみを10mm間隔で測定し、得られ
た測定データをコンピュータに入力しプリフォーム1の
外径、中心点の変位量と変位方向を算出したデータを得
た。その結果を図6に示す。同図に示すように、データ
には連続性がなく正確性に欠け、しかも測定時間は80
分(8分/1本)と長かった。
For comparison, the shape of the preform 1 similarly cut into 10 pieces was sequentially measured one by one using a conventional shape measuring device. However, preform 1 is 2
Since the point is supported by the support table, only the central portion of the preform 1 at 500 mm is measured at 10 mm intervals, the obtained measurement data is input to a computer, and the outer diameter of the preform 1, the displacement of the central point and the displacement The data for which the direction was calculated was obtained. FIG. 6 shows the result. As shown in the figure, the data is not continuous and lacks accuracy, and the measurement time is 80
Minutes (8 minutes / line).

【0021】[0021]

【発明の効果】以上、詳細に説明したように本発明の形
状測定装置で光ファイバ用プリフォームの形状を測定す
ると、プリフォームの表面に傷を付けることがなく、手
間がかからず短時間で効率的に測定することができ、し
かも形状データの正確性が高い。またプリフォームの自
動搬送装置を使用すれば、プリフォームの形状測定作業
をほぼ無人化することができる。
As described in detail above, when the shape of the preform for optical fiber is measured by the shape measuring apparatus of the present invention, the surface of the preform is not damaged, and it takes no time and effort. Measurement can be performed efficiently, and the accuracy of the shape data is high. In addition, if an automatic preform conveying device is used, the work of measuring the shape of the preform can be made almost unmanned.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明を適用する光ファイバ用プリフォームの
形状測定装置の実施例を示す斜視図である。
FIG. 1 is a perspective view showing an embodiment of an apparatus for measuring the shape of an optical fiber preform to which the present invention is applied.

【図2】本発明を適用する光ファイバ用プリフォームの
形状測定装置の制御ブロック図である。
FIG. 2 is a control block diagram of an optical fiber preform shape measuring apparatus to which the present invention is applied.

【図3】本発明を適用する光ファイバ用プリフォームの
形状測定装置により測定したプリフォームの形状データ
を示す図である。
FIG. 3 is a diagram showing preform shape data measured by an optical fiber preform shape measuring apparatus to which the present invention is applied.

【図4】従来の光ファイバ用プリフォームの形状測定装
置により測定したプリフォームの形状データを示す図で
ある。
FIG. 4 is a diagram showing shape data of a preform measured by a conventional optical fiber preform shape measuring apparatus.

【図5】本発明を適用する光ファイバ用プリフォームの
形状測定装置により測定した別のプリフォームの形状デ
ータを示す図である。
FIG. 5 is a diagram showing shape data of another preform measured by an optical fiber preform shape measuring apparatus to which the present invention is applied.

【図6】従来の光ファイバ用プリフォームの形状測定装
置により測定した別のプリフォームの形状データを示す
図である。
FIG. 6 is a diagram showing shape data of another preform measured by a conventional optical fiber preform shape measuring apparatus.

【符号の説明】[Explanation of symbols]

1は光ファイバ用プリフォーム、2は外径測定器、3は
リニアエンコーダ、4はモータ、5はレーザ照射器、6
はレーザ受光器、7は走査板、8は検知窓、10は制御
回路、11は保持台、13はネジ棒、14はガイドレー
ル、15は固定台、16はボールナット、21はモータ
コントローラ、22はデータストレージ、25はリニア
エンコーダ演算部、26は外径測定器演算部である。
1 is an optical fiber preform, 2 is an outer diameter measuring device, 3 is a linear encoder, 4 is a motor, 5 is a laser irradiator, 6
Is a laser receiver, 7 is a scanning plate, 8 is a detection window, 10 is a control circuit, 11 is a holding table, 13 is a screw rod, 14 is a guide rail, 15 is a fixed table, 16 is a ball nut, 21 is a motor controller, 22 is a data storage, 25 is a linear encoder operation unit, and 26 is an outside diameter measuring unit operation unit.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭63−195505(JP,A) 特開 平8−110281(JP,A) 特開 平5−99789(JP,A) 実開 平5−81678(JP,U) (58)調査した分野(Int.Cl.7,DB名) G01M 11/00 - 11/02 G01B 11/00 - 11/30 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-63-195505 (JP, A) JP-A-8-110281 (JP, A) JP-A-5-99789 (JP, A) 81678 (JP, U) (58) Fields investigated (Int. Cl. 7 , DB name) G01M 11/00-11/02 G01B 11/00-11/30

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 光ファイバ用プリフォームに、その側方
から光を入射させて該プリフォームの形状を測定する形
状測定装置において、 該プリフォームが乗せられる保持台と、 該プリフォームに対して軸方向と垂直な方向から、出
射光が直交する少なくとも2個のレーザ照射器により
を入射させてその外径を測定する外径測定器と、 該外径測定器を該プリフォームの長手方向に移動させる
駆動手段と、 該外径測定器の測定位置を検知する位置検知器とを有す
ることを特徴とする光ファイバ用プリフォームの形状測
定装置。
1. A shape measuring device for measuring the shape of an optical fiber preform by irradiating light from a side thereof to the preform, comprising: a holding table on which the preform is placed; , from the axial direction perpendicular to the direction, out
An outer diameter measuring device for measuring the outer diameter of light by irradiating light with at least two laser irradiators whose emission light is orthogonal, a driving means for moving the outer diameter measuring device in a longitudinal direction of the preform; A shape measuring device for an optical fiber preform, comprising: a position detector for detecting a measurement position of a diameter measuring device.
【請求項2】 前記保持台がポリテトラフルオロエチレ
製であることを特徴とする請求項1に記載の光ファイ
バ用プリフォームの形状測定装置。
2. The method according to claim 1, wherein the holding table is made of polytetrafluoroethylene.
Shape measuring apparatus of the preform for optical fiber according to claim 1, characterized in that it is made of down.
【請求項3】 前記保持台に光ファイバ用プリフォーム
を搬送する自動搬送装置を有することを特徴とする請求
項1に記載の光ファイバ用プリフォームの形状測定装
置。
3. The apparatus for measuring the shape of an optical fiber preform according to claim 1, further comprising an automatic transport device for transporting the optical fiber preform to the holding table.
JP21709896A 1996-08-19 1996-08-19 Optical fiber preform shape measuring device Expired - Fee Related JP3222777B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21709896A JP3222777B2 (en) 1996-08-19 1996-08-19 Optical fiber preform shape measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21709896A JP3222777B2 (en) 1996-08-19 1996-08-19 Optical fiber preform shape measuring device

Publications (2)

Publication Number Publication Date
JPH1062299A JPH1062299A (en) 1998-03-06
JP3222777B2 true JP3222777B2 (en) 2001-10-29

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ID=16698820

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP3222777B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10323152A1 (en) * 2003-05-22 2004-12-16 Hauni Maschinenbau Ag Device for measuring the diameter of a rod-shaped object, in particular of the tobacco-processing industry
JP2005315750A (en) * 2004-04-28 2005-11-10 Toyoda Suchiirusentaa Kk Long material bend inspection apparatus and inspection method
EP1772438B1 (en) * 2004-05-28 2016-06-29 Shin-Etsu Chemical Co., Ltd. Method for producing an optical fiber preform
JP5503100B2 (en) * 2007-06-06 2014-05-28 古河電気工業株式会社 Core shape measuring apparatus and core shape measuring method in cylindrical transparent body
JP6256900B2 (en) * 2013-01-18 2018-01-10 新生化学工業株式会社 Burr inspection device
CN111412875B (en) * 2019-01-08 2024-04-09 中天科技精密材料有限公司 Preform detection equipment

Also Published As

Publication number Publication date
JPH1062299A (en) 1998-03-06

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