JP3198612B2 - Membrane separation device - Google Patents
Membrane separation deviceInfo
- Publication number
- JP3198612B2 JP3198612B2 JP12873892A JP12873892A JP3198612B2 JP 3198612 B2 JP3198612 B2 JP 3198612B2 JP 12873892 A JP12873892 A JP 12873892A JP 12873892 A JP12873892 A JP 12873892A JP 3198612 B2 JP3198612 B2 JP 3198612B2
- Authority
- JP
- Japan
- Prior art keywords
- membrane
- water
- membrane separation
- turbidity
- washing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は膜分離装置に係り、特
に、原水濁度の変動に対して、膜モジュールの閉塞を防
止し、濾過速度を低下させず安定させるよう改良された
膜分離装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a membrane separation apparatus, and more particularly to an improved membrane separation apparatus for preventing fluctuations in raw water turbidity by preventing blockage of a membrane module and stabilizing a filtration rate without lowering it. About.
【０００２】[0002]
【従来の技術】膜分離装置は、周知の通り、耐圧容器内
に設けられた分離膜の一方の側（１次室）に原水を加圧
供給し、該膜の透過水を他方の側（２次室）から取り出
すよう構成されたものである。2. Description of the Related Art As is well known, a membrane separation apparatus supplies raw water under pressure to one side (primary chamber) of a separation membrane provided in a pressure-resistant container, and transmits permeated water of the membrane to the other side (primary chamber). (Secondary room).
【０００３】この膜分離装置には、該容器内の１次室に
供給された原水の全量を膜透過させて処理する全量濾過
（以下、デッド・エンド濾過ということがある。）型の
膜分離装置と、原水を１次室に循環供給し、該１次室内
を通過する原水の一部を膜透過させて２次室側から取り
出すようにした平行流濾過（以下、クロス・フローとい
うことがある。）型の膜分離装置とがある。[0003] This membrane separation apparatus is a membrane filtration (hereinafter sometimes referred to as dead-end filtration) type membrane separation in which the entire amount of raw water supplied to a primary chamber in the vessel is permeated through a membrane and treated. An apparatus and a parallel flow filter (hereinafter referred to as a cross flow) in which raw water is circulated and supplied to the primary chamber, and a part of the raw water passing through the primary chamber is permeated through the membrane and taken out from the secondary chamber. ) Type membrane separation device.
【０００４】クロス・フロー型の膜分離装置にあって
は、濁度変動があっても、使用に耐えない程の濾過速度
まで低下させることなく膜濾過を継続させることができ
る。このため、河川水、工業用水、上水をＲＯ（逆浸
透）膜分離するための前処理に凝集・沈澱・濾過に代わ
って、ＵＦ（限外濾過）膜やＭＦ（精密濾過）膜で膜濾
過を行ない、前処理プロセスを簡素化することができ
る。[0004] In a cross-flow type membrane separation apparatus, even if there is a turbidity fluctuation, the membrane filtration can be continued without lowering the filtration rate to a level that cannot be used. For this reason, UF (ultrafiltration) membranes and MF (microfiltration) membranes are used instead of flocculation, precipitation, and filtration in pretreatment for RO (reverse osmosis) membrane separation of river water, industrial water, and clean water. Filtration can be performed to simplify the pretreatment process.
【０００５】また、半導体洗浄廃水中に含有している微
量のＴＯＣ成分（イソプロピルアルコール、メタノール
などの有機洗浄剤）を、好気性流動層式生物処理装置
（バイオ・フィルター）で生物分解し、バイオ・フィル
ターから剥離する菌体を例えば１０6 個／ｍｌレベル程
度含む流出水を塩素減菌した後、菌体を除去するところ
にも適用されている。この透過水を次工程の超純水製造
装置に送水することにより、安価な処理で次工程の生菌
増殖を抑制することが可能となった。A small amount of TOC components (organic detergents such as isopropyl alcohol and methanol) contained in semiconductor cleaning wastewater are biodegraded by an aerobic fluidized bed biological treatment apparatus (biofilter), and biodegradation is carried out. -It is also applied to removing bacteria after effluent water containing, for example, about 10 6 cells / ml of cells to be peeled off from the filter is subjected to chlorine sterilization. By sending this permeated water to the next-step ultrapure water production apparatus, it has become possible to suppress viable bacterial growth in the next step by an inexpensive treatment.
【０００６】このような用途では濁度変動が極めて激し
い。河川水や工業用水などでは季節変動に加えて、降雨
の影響がある。また、半導体洗浄廃水を工期性流動層式
生物処理装置で処理したものでは、廃水中のＴＯＣ濃度
の変動に比例して、流出してくる菌体濃度（濁質濃度）
も変動する。In such applications, the turbidity fluctuation is extremely severe. River water and industrial water are affected by rainfall in addition to seasonal variations. In the case where semiconductor cleaning wastewater is treated by a fluidized-bed type biological treatment device, the bacterial cell concentration (turbidity concentration) flowing out is proportional to the fluctuation of the TOC concentration in the wastewater.
Also fluctuate.
【０００７】しかしながら、両者の場合はいずれも、濁
度はほとんど低濃度で維持される場合が多い。However, in both cases, the turbidity is often maintained at a substantially low concentration.
【０００８】このようにほとんどの場合が低濁度である
原水に対しては、クロス・フロー濾過をもちいなくても
デッド・エンド濾過で十分な膜濾過速度を得る。As described above, for the raw water having a low turbidity in most cases, a sufficient membrane filtration rate can be obtained by dead end filtration without using cross flow filtration.
【０００９】ただし、デッド・エンド濾過を採用する場
合は、濾過速度を維持（回復）させるために、定期的に
洗浄操作（逆洗）を行ない、膜面に析出したケーク層を
洗浄除去する必要がある。膜濾過速度を高く維持するに
は、この定期的な洗浄操作の排出水を原水槽に戻さず系
外に排出するのが望ましい。However, when dead-end filtration is employed, in order to maintain (recover) the filtration rate, it is necessary to periodically perform a washing operation (backwashing) to wash and remove the cake layer deposited on the membrane surface. There is. In order to maintain a high membrane filtration rate, it is desirable to discharge the water discharged from the periodic washing operation to the outside of the system without returning to the raw water tank.
【００１０】洗浄廃水を系外に排出すれば、用水の回収
率（＝（１−排出水量／原水量）×１００）を低下させ
ることになる。If the washing wastewater is discharged out of the system, the recovery rate of the water (= (1−amount of discharged water / amount of raw water) × 100) will be reduced.
【００１１】洗浄間隔を短くすると、用水の回収率を下
げるので経済性を低下させる。反対に洗浄間隔を長くす
ると、原水の濁質が急上昇したときには洗浄が間に合わ
ず、モジュールを閉塞させてしまう危険性が高いなどの
問題があった。When the washing interval is shortened, the recovery rate of the water is reduced, so that the economy is reduced. Conversely, if the washing interval is lengthened, there is a problem that when the turbidity of the raw water suddenly rises, washing cannot be performed in time, and there is a high risk of blocking the module.
【００１２】このような問題に対処する公知例として、
濁度を測定し、設定値との比較により、それを超えた場
合、洗浄をするものがある。これは、閾値制御のため、
濁度が悪化すると頻繁に洗浄をおこなってしまう。[0012] As a known example for addressing such a problem,
Some turbidity is measured and compared with the set value. This is for threshold control,
When the turbidity worsens, washing is frequently performed.
【００１３】従って、河川水等の濁度変動が激しいとこ
ろでは不利である。Therefore, it is disadvantageous in places where the turbidity varies greatly, such as river water.
【００１４】[0014]
【発明が解決しようとする課題】上記の通り、従来の膜
分離装置においては、原水の濁度変動等により分離膜が
閉塞したり、用水回収率が低下したりするという問題が
あった。As described above, the conventional membrane separation apparatus has a problem that the separation membrane is clogged due to fluctuations in the turbidity of the raw water or the like, and the water recovery rate is reduced.
【００１５】本発明は、原水の濁質の変動に応じて洗浄
頻度を調節することにより、分離膜を閉塞させる危険性
を排除し、かつ用水の回収率を高めることができる膜分
離装置を提供するものである。[0015] The present invention provides a membrane separation apparatus capable of eliminating the risk of clogging the separation membrane and increasing the recovery rate of water by adjusting the washing frequency in accordance with the fluctuation of the turbidity of the raw water. Is what you do.
【００１６】[0016]
【課題を解決するための手段】請求項１の膜分離装置
は、分離膜に原水を供給する手段、及び、該分離膜を洗
浄する手段を有し、上記原水が河川水、工業用水、又は
半導体洗浄廃水である膜分離装置において、原水の濁度
を検出する濁度計と、濾水量の増減に応じて洗浄間隔を
設定すること無く、該濁度計の検出値に基づき洗浄の間
隔を設定する洗浄間隔設定手段とを備えたことを特徴と
するものである。請求項２の膜分離装置は、請求項１に
おいて、デッド・エンド濾過型の膜分離装置であること
を特徴とする。According to a first aspect of the present invention, there is provided a membrane separation apparatus comprising: means for supplying raw water to the separation membrane; and means for washing the separation membrane, wherein the raw water is river water, industrial water, or A turbidity meter that detects the turbidity of raw water and a cleaning interval in accordance with an increase or decrease in the amount of drained water in a membrane separation device that is semiconductor cleaning wastewater.
A cleaning interval setting means for setting a cleaning interval based on the detection value of the turbidity meter without setting . The membrane separation device according to claim 2 is a dead end filtration type membrane separation device according to claim 1.
【００１７】[0017]
【作用】本発明は、原水の濁度変動に基いて洗浄間隔を
設定するものであり、濁度の変動のみにより影響を受け
ない。According to the present invention, the washing interval is set based on the turbidity fluctuation of the raw water, and the cleaning interval is not affected only by the turbidity fluctuation.
【００１８】[0018]
【実施例】図１に実施例装置の系統図を示す。原水は、
原水受槽１からポンプ２によりデッド・エンド型の第１
の膜分離装置３の原水室（１次室）３ａに送り込まれ
る。分離膜３ｂを透過した水は、逆洗用加圧水槽４及び
取出ライン５を経て膜透過水として取り出される。FIG. 1 is a system diagram of an apparatus according to an embodiment. Raw water is
Dead end type 1st pump from raw water receiving tank 1 by pump 2
Into the raw water chamber (primary chamber) 3 a of the membrane separation device 3. The water that has passed through the separation membrane 3b is taken out through the pressurized water tank 4 for back washing and the take-out line 5 as membrane permeated water.
【００１９】ポンプ２の吐出水の一部は濁度計２０に供
給され、濁度計測された後、原水受槽１に戻される。濁
度計２０の検出値は制御器２１に入力され、この濁度検
出値に基いて逆洗間隔が設定される。A part of the water discharged from the pump 2 is supplied to the turbidity meter 20, where the turbidity is measured and then returned to the raw water receiving tank 1. The detection value of the turbidity meter 20 is input to the controller 21, and the backwash interval is set based on the turbidity detection value.
【００２０】分離膜３ｂに蓄積したケーキ状物質を逆洗
除去する際には、ポンプ２を停止し、取出ライン５の弁
５ａを閉、前記加圧水槽４に接続された空気ライン６の
弁６ａを開とする。これにより、加圧水槽４内の透過水
が膜分離装置３の透過水室（２次室）３ｃに加圧下で送
り込まれ、分離膜３ｂの逆洗が行なわれる。逆洗排水
は、洗浄排水ライン７を経て中間水槽８に送られる。When the cake-like substance accumulated in the separation membrane 3b is backwashed and removed, the pump 2 is stopped, the valve 5a of the extraction line 5 is closed, and the valve 6a of the air line 6 connected to the pressurized water tank 4 is closed. Open. Thereby, the permeated water in the pressurized water tank 4 is sent to the permeated water chamber (secondary chamber) 3c of the membrane separation device 3 under pressure, and the backwashing of the separation membrane 3b is performed. The backwash drainage is sent to the intermediate water tank 8 via the wash drainage line 7.
【００２１】なお、この洗浄排水ライン７の弁７ａは、
当然ながら、逆洗排水の排出時にのみ開とされ、膜分離
装置３の運転中には閉とされる。The valve 7a of the washing and draining line 7 is
As a matter of course, it is opened only when the backwash drainage is discharged, and is closed during the operation of the membrane separation device 3.
【００２２】中間水槽８内の洗浄排水は、ポンプ９によ
りクロス・フロー型の第２の膜分離装置１０の１次室１
０ａに送り込まれ、次いで循環ライン１１を経て中間水
槽８に戻される。なお、このとき、循環ライン１１の弁
１１ａは開となっている。第２の膜分離装置１０内の分
離膜１０ｂの透過水は、２次室１０ｃから加圧水槽に取
出ライン１３を経て膜透過水として回収される。The washing wastewater in the intermediate water tank 8 is supplied to a primary chamber 1 of a cross-flow type second membrane separation apparatus 10 by a pump 9.
0a, and then returned to the intermediate water tank 8 via the circulation line 11. At this time, the valve 11a of the circulation line 11 is open. The permeated water of the separation membrane 10b in the second membrane separation device 10 is recovered from the secondary chamber 10c to the pressurized water tank via the extraction line 13 as the permeated water.
【００２３】中間水槽８内の濁質濃度が所定濃度以上に
なった場合には、弁１１ａを閉とし、循環ライン１１か
ら分岐した濃縮排水ライン１４の弁１４ａを開とし、中
間水槽８内の濃縮水を系外に排出する。なお、この弁１
４ａは、この排出時以外のときには閉とされている。When the turbidity concentration in the intermediate water tank 8 becomes equal to or higher than a predetermined concentration, the valve 11a is closed, and the valve 14a of the concentrated drainage line 14 branched from the circulation line 11 is opened. Discharge the concentrated water out of the system. In addition, this valve 1
Reference numeral 4a is closed at times other than the discharge.
【００２４】分離膜１０ｂの逆洗を行なうには、取出ラ
イン１３の弁１３ａを閉、空気ライン１５の弁１５ａを
開とし、空気圧によって透過水を透過水室１０ｃに送り
込む。To perform backwashing of the separation membrane 10b, the valve 13a of the extraction line 13 is closed, the valve 15a of the air line 15 is opened, and permeated water is sent to the permeated water chamber 10c by air pressure.
【００２５】逆洗間隔の時間Ｔは、濁度ｃに応じてたと
えば次のような演算式で設定される。The time T of the backwash interval is set according to, for example, the following equation according to the turbidity c.
【００２６】 Ｔ＝Ａ・（１／Ｃ）・（Ｍ／Ｑ） ・・・（１） ここで、Ａ：膜モジュールの形式や、膜洗浄方法によて
決まる定数、Ｃ：膜入口側の濁度、Ｍ：膜分離装置の膜
面積、Ｑ：単位時間あたりの膜濾過水量。T = A · (1 / C) · (M / Q) (1) where A: a constant determined by the type of the membrane module and the membrane cleaning method, C: the membrane inlet side Turbidity, M: membrane area of membrane separation device, Q: membrane filtration water amount per unit time.
【００２７】なお、図示の実施例の如く複数段の膜分離
装置を備えたものにおける２段目以降の逆洗間隔の時間
は、上記（１）式のＡ、Ｍ、Ｑの数値を変更するだけで
設定できる。The values of A, M, and Q in the above equation (1) are changed for the backwashing interval for the second and subsequent stages in a system having a plurality of stages of membrane separation devices as in the illustrated embodiment. Just set.
【００２８】なお、本実施例の膜分離装置は、次のよう
な優れた特徴を有する。The membrane separation apparatus of this embodiment has the following excellent features.
【００２９】 処理する原水量の例えば５０〜９０％
を第１の膜分離装置３によって濾過で処理できるので、
濾過する原水だけをポンプ２で送水すればよく、運転動
力を小さくできる。For example, 50 to 90% of the amount of raw water to be treated
Can be treated by filtration by the first membrane separation device 3,
Only the raw water to be filtered needs to be sent by the pump 2, and the operating power can be reduced.
【００３０】 また、第１の膜分離装置３の洗浄排水
を中間水槽８に排出するので、原水の濁質濃度を高める
ことがない。そのため、分離膜３ｂの膜面への濁質の負
荷を一定に維持することができ、膜の濾過速度を高く且
つ一定に維持することができる。Since the washing wastewater from the first membrane separation device 3 is discharged to the intermediate water tank 8, the concentration of the turbid substance in the raw water does not increase. Therefore, the load of the turbid substance on the membrane surface of the separation membrane 3b can be kept constant, and the filtration rate of the membrane can be kept high and constant.
【００３１】 原水の濁度が著しく高いときも洗浄間
隔を短縮することにより、第１の膜分離装置３の濾過速
度を維持できる。また、膜３ｂの閉塞を防止できる。Even when the turbidity of the raw water is extremely high, the filtration speed of the first membrane separation device 3 can be maintained by shortening the washing interval. In addition, blockage of the film 3b can be prevented.
【００３２】 膜面に付着したケーキ層の剥離物を多
量に含む第１の膜分離装置３の洗浄排水を第２の膜分離
装置１０で濃縮するので、膜分離装置全体としての用水
回収率も高いものとなる。Since the washing wastewater of the first membrane separation device 3 containing a large amount of peeled cake layer adhered to the membrane surface is concentrated in the second membrane separation device 10, the water recovery rate of the entire membrane separation device is also improved. It will be expensive.
【００３３】 クロス・フロー濾過方式の第２の膜分
離装置１０では、原水流路の膜面に生ずる強い剪断力の
ために、ケーキ層の成長が抑止される。このため、濁質
を多量に含む原水でも原水流路を閉塞させることなく濾
過処理できる。In the second membrane separator 10 of the cross flow filtration type, the growth of the cake layer is suppressed due to the strong shearing force generated on the membrane surface of the raw water flow path. Therefore, even raw water containing a large amount of turbid matter can be filtered without blocking the raw water flow path.
【００３４】 第２の膜分離装置１０の濾過処理量
は、全体の１０〜５０％程度と少量であり、クロス・フ
ロー濾過に関わる運転動力費用は、水処理装置全体とし
てみるとわずかなものである。[0034] The filtration amount of the second membrane separation device 10 is as small as about 10 to 50% of the whole, and the operating power cost related to cross-flow filtration is negligible as a whole of the water treatment device. is there.
【００３５】 複数段の膜分離装置により、それぞれ
の洗浄排水を処理する系では、それぞれの膜入口側に濁
度計を設けなくても第１段の濁度信号を代表値として、
それぞれの洗浄排出頻度を調節できる。用水の回収率を
高めることができる。In a system in which each washing wastewater is treated by a plurality of membrane separation devices, the turbidity signal of the first stage can be used as a representative value without providing a turbidity meter at each membrane inlet side.
The frequency of each washing and discharging can be adjusted. The recovery rate of water can be increased.
【００３６】本発明において、膜モジュールの形態は、
中空糸、平膜などいずれでも良く、また外圧、内圧のい
ずれでも良い。なお、膜面のケーキ層除去のための物理
的洗浄の容易なものが好ましい。In the present invention, the form of the membrane module is
Any of hollow fibers and flat membranes may be used, and any of external pressure and internal pressure may be used. It is preferable to use a material that can be easily physically cleaned to remove the cake layer on the film surface.
【００３７】更に、洗浄は実施例のように逆洗に限らず
流速変更等の他の手段でも良い。Further, the washing is not limited to the back washing as in the embodiment, but may be other means such as changing the flow rate.
【００３８】図示の実施例装置において、膜モジュール
は、第１、第２の膜分離装置３、１０ともに同じ形式の
ものでもよく、それぞれ濾過方式の違いによりその形状
を変えたものでもよい。分離膜は、濁質を除去できるも
のであれば良く、目標とする処理水質に応じてＲＯ（逆
浸透）、ＵＦ（限外濾過）、ＭＦ（精密濾過）等を採用
する。In the illustrated embodiment, the membrane module may be of the same type in both the first and second membrane separators 3 and 10, or may have different shapes depending on the filtration method. The separation membrane may be any as long as it can remove turbid matter, and RO (reverse osmosis), UF (ultrafiltration), MF (microfiltration), or the like is adopted according to the target treated water quality.
【００３９】[0039]
【発明の効果】以上の通り、本発明の膜分離装置による
と、原水の濁質の変動のみに影響されず、変動に応じた
洗浄頻度の自動調節により、モジュールを閉塞させる危
険性を排除し、膜の洗浄限界まで運転できる。また、用
水の回収率を高めることもできる。As described above, according to the membrane separation apparatus of the present invention, the risk of blockage of the module is eliminated by automatically adjusting the washing frequency according to the fluctuation without being affected only by the fluctuation of the turbidity of the raw water. Can operate up to the membrane cleaning limit. In addition, the recovery rate of water can be increased.
【図１】実施例装置の系統図である。FIG. 1 is a system diagram of an embodiment apparatus.
１ 原水受槽 ３ 第１の膜分離装置 ４ 加圧水槽 ８ 中間水槽 １０ 第２の膜分離装置 １２ 加圧水槽 ２０ 濁度計 ２１ 制御器 DESCRIPTION OF SYMBOLS 1 Raw water receiving tank 3 First membrane separation device 4 Pressurized water tank 8 Intermediate water tank 10 Second membrane separation device 12 Pressurized water tank 20 Turbidity meter 21 Controller
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) B01D 65/02 C02F 1/44 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int. Cl. 7 , DB name) B01D 65/02 C02F 1/44
Claims (2)
分離膜を洗浄する手段を有し、上記原水が河川水、工業
用水、又は半導体洗浄廃水である膜分離装置において、
原水の濁度を検出する濁度計と、濾水量の増減に応じて
洗浄間隔を設定すること無く、該濁度計の検出値に基づ
き洗浄の間隔を設定する洗浄間隔設定手段とを備えたこ
とを特徴とする膜分離装置。1. A membrane separation apparatus comprising: means for supplying raw water to a separation membrane; and means for washing the separation membrane, wherein the raw water is river water, industrial water, or semiconductor cleaning wastewater.
A turbidity meter for detecting turbidity of the raw water, depending on the drainage amount of increase or decrease
A washing interval setting means for setting an interval of washing based on a detection value of the turbidity meter without setting an interval of washing.
型の膜分離装置であることを特徴とする膜分離装置。 2. The method according to claim 1, wherein the dead end filtration is performed.
A membrane separation device characterized by being a type of membrane separation device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12873892A JP3198612B2 (en) | 1992-05-21 | 1992-05-21 | Membrane separation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12873892A JP3198612B2 (en) | 1992-05-21 | 1992-05-21 | Membrane separation device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05317660A JPH05317660A (en) | 1993-12-03 |
| JP3198612B2 true JP3198612B2 (en) | 2001-08-13 |
Family
ID=14992239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12873892A Expired - Fee Related JP3198612B2 (en) | 1992-05-21 | 1992-05-21 | Membrane separation device |
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| JP (1) | JP3198612B2 (en) |
Cited By (2)
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|---|---|---|---|---|
| JP2006326473A (en) * | 2005-05-25 | 2006-12-07 | Jfe Engineering Kk | Operation method of membrane separation apparatus |
| JP2019025397A (en) * | 2017-07-27 | 2019-02-21 | 住友電気工業株式会社 | Treatment apparatus and treatment method of oil-containing seawater |
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|---|---|---|---|---|
| JP3951373B2 (en) * | 1997-08-26 | 2007-08-01 | Ｊｆｅエンジニアリング株式会社 | Waste water treatment apparatus and method, water purification treatment facility |
| JP2000093753A (en) * | 1998-07-22 | 2000-04-04 | Toray Ind Inc | Method for operating filter membrane module device and filter membrane module device |
| JP4135267B2 (en) * | 1998-09-02 | 2008-08-20 | 東レ株式会社 | Method of operating a total filtration type membrane separation apparatus and total filtration type membrane separation apparatus |
| JP4079082B2 (en) * | 2003-12-10 | 2008-04-23 | 富士電機システムズ株式会社 | Backwashing method for membrane filtration water treatment equipment |
| JP2006272218A (en) * | 2005-03-30 | 2006-10-12 | Toray Ind Inc | Two-stage membrane filtration system and operation method of two-stage membrane filtration system |
| JP4804097B2 (en) * | 2005-10-11 | 2011-10-26 | ダイセル化学工業株式会社 | Continuous operation method of water purification system |
| JP2009262087A (en) * | 2008-04-28 | 2009-11-12 | Hitachi Ltd | Operation method of water treatment device |
| JP6812198B2 (en) * | 2016-10-21 | 2021-01-13 | 株式会社日立製作所 | Water treatment equipment and water treatment method |
| JP7144925B2 (en) * | 2017-09-21 | 2022-09-30 | オルガノ株式会社 | MEMBRANE FILTRATION DEVICE AND MEMBRANE FILTRATION METHOD |
-
1992
- 1992-05-21 JP JP12873892A patent/JP3198612B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006326473A (en) * | 2005-05-25 | 2006-12-07 | Jfe Engineering Kk | Operation method of membrane separation apparatus |
| JP2019025397A (en) * | 2017-07-27 | 2019-02-21 | 住友電気工業株式会社 | Treatment apparatus and treatment method of oil-containing seawater |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05317660A (en) | 1993-12-03 |
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