JP3195932B2 - Switching mechanism of air circuit of transfer device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a switching mechanism of a pneumatic circuit of a transfer device for sucking a work to a suction nozzle provided on a turntable, transferring the work intermittently, and processing the work while stopped.

[0002]

2. Description of the Related Art A conventional example of this type of transfer apparatus will be described with reference to the drawings. FIG. 3 is a plan view showing only the main part, and FIG.
FIG. 4 is a longitudinal sectional view taken along line AA in FIG. 3. This transfer device has a turntable 2 on the top surface of a rotating shaft 1 provided in a vertical direction and rotates integrally. The turntable 2 is provided with a plurality of suction nozzles 3 (eight in this case) at equal angular intervals on a concentric circle around the rotation center with the suction port directed downward. A center valve 4 is disposed at the center of the upper surface of the turntable 2, and a lower portion (a center valve movable portion) 4 a is integrally fixed to the turntable 2 and
Rotate with. The center valve movable portion 4a is provided with a ventilation hole 4c that extends from the top surface to the side surface corresponding to the suction nozzle 3, and the opening of the ventilation hole 4c on the side surface of the center valve movable portion 4a is connected to the corresponding suction nozzle 3 by the pipe 5. Connected. The ports on the top surface side of the ventilation holes 4c are arranged at equal angular intervals on a concentric circle about the center of rotation. An upper portion (center valve fixing portion) 4b of the center valve 4 is disposed in airtight surface contact with the top surface of the center valve movable portion 4a, and is fixed by a support (not shown). The center valve fixing part 4b is provided with a vent hole 4d that passes from the lower surface to the top surface, and the center valve movable part 4a
The opening on the top surface side of the center valve fixing portion 4b of the ventilation hole 4d is connected to the corresponding switching electromagnetic valve 6 by a pipe 7. The opening on the lower surface side of the ventilation hole 4d is disposed at a position facing the ventilation hole 4c when the turntable 2 is at a predetermined stop position (position where the suction nozzle 3 is at the predetermined stop positions P1 to P8). The lower surface of the center valve fixing portion 4b is provided with a groove 4e for expanding the opening of the ventilation hole 4d along the circumference of the arrangement as necessary. A vacuum source 8 and a high-pressure source 9 are connected to the switching electromagnetic valve 6 to switch the connection to the pipe 7.

Next, a more detailed configuration will be described with an explanation of the operation of the transport device. A work 10 such as a resin-molded semiconductor element is sequentially supplied to a position P1 where the suction nozzle 3 stops by a transfer device (not shown). Then, the suction nozzle 3 sucks and holds the workpiece 10, and the turntable 2 rotates intermittently to rotate the positions P2, P3 and P3.
... Conveyed sequentially to P8. The suction holding of the work 10 is performed by connecting the vacuum source 8 to the pipe 7 by the switching electromagnetic valve 6. The opening of the work 10 is performed by connecting the high pressure source 9 to the pipe 7 by the switching electromagnetic valve 6. Here, the high-pressure source 9 may be opened only to the atmospheric pressure, but is set to a pressure slightly higher than the atmospheric pressure in order to enhance the responsiveness. As an example, a lead shaper (not shown) is arranged at the positions P2 and P3, and the lead is formed in two steps.
Do homing is completed. During that time, the suction nozzle 3 holds the work 10. At the position P4, a characteristic inspection device (not shown) is arranged. Here, the work 10 is delivered to the characteristic inspection device (not shown). After the inspection, the suction nozzle 3 sucks and holds the work 10 again and thereafter. Transfer to position. In the characteristic inspection, the work 10 is classified into, for example, three divisions of characteristic divisions A and B and a defective product. The position P5 is an empty position and the work 10 is stopped only once and does not perform any processing. At the position P6, only the workpiece A having the characteristic section A is transferred to the next step, for example, to the transport mechanism (not shown) of the marking device. The work 10 in another section is conveyed to the next position P7 while being sucked by the suction nozzle 3. Work 1 at position P7
Those of the remaining characteristic category B of 0 are transferred to the next process. Similarly, at the position P8, the remaining defective products are released and dropped on a tray (not shown).

In the above operation, since the movable portion 4a and the fixed portion 4b of the center valve are in airtight contact with each other, suction is maintained even when the ventilation holes 4c and 4d do not face each other when the turntable 2 rotates. Should do it. However, if there is a leak in the portion where the suction nozzle 3 is sucking the work 10, the suction force may be weakened. Therefore, as shown in FIG. 4, the opening of the ventilation hole 4d is expanded by the groove 4e to the vicinity of the next opening of the ventilation hole 4d.

In the above operation, the switching solenoid valve 6 at the position P1 is at a high pressure immediately before the stop of the turntable 2, is switched to a vacuum after the stop, and is maintained after the start of the movement of the turntable 2, and is switched to a high pressure before the stop. The solenoid valve 6 for switching between the positions P2 and P3 turns the turntable 2 unless the work 10 is lost at the beginning or end of the operation of the apparatus and the work 10 is not sucked by the suction nozzle 3.
Vacuum is maintained both during stopping and moving. The switching solenoid valve 6 of P4 is in a vacuum immediately before the stop of the turntable 2,
Immediately after the stop, the pressure is switched to a high pressure, and the work 10 is transferred to a characteristic inspection device (not shown). After the inspection, the work is returned to a vacuum again, and the work 10 is recovered. The switching solenoid valve 6 at the position P5 maintains the vacuum during stoppage and movement of the turntable 2 except when the work 10 is lost at the beginning or end of the operation of the apparatus and the work 10 is not sucked by the suction nozzle 3. I do. P
If the work 10 to be conveyed is an object to be delivered to another apparatus (characteristic A), the switching solenoid valve 6 is switched to a high pressure immediately before the stop of the turntable 2 and to a high pressure immediately after the stop. The work 10 is delivered to another device, maintained after the start of the movement of the turntable 2, and switched to vacuum immediately before the stop. If the work 10 is to pass, the vacuum is maintained while the turntable 2 is stopped or moving. The switching solenoid valve 6 at the position P7 is switched to a high pressure immediately before the stop of the turntable 2 and to a high pressure immediately after the stop if the conveyed workpiece 10 is an object to be transferred to another device (characteristic category B). Then, the work 10 is transferred to another device, maintained after the start of the movement of the turntable 2, and switched to vacuum immediately before the stop. If the work 10 is to pass, the vacuum is maintained while the turntable 2 is stopped or moving. When there is no work 10, the pressure is high just before the stop, and is maintained during the stop and after the start of the movement. When the work 10 is conveyed and released here, the switching solenoid valve 6 at the position P8 is in a vacuum state immediately before the stop of the turntable 2, and is switched to a high pressure immediately after the stop to drop the work 10, and the turntable 2 is turned off. 2 is maintained after the start of the movement.
When there is no work 10, the pressure is high just before the stop, and is maintained during the stop and after the start of the movement.

The transfer speed of this transfer device is determined by the sum of the time during which the turntable 2 rotates between the positions and the time during which the turntable 2 is stopped, and the time during which the turntable 2 is stopped is the shortest of the time required for each position. It will be decided in a long time. Therefore, in order to increase the transport speed, it is necessary to speed up the rotational movement and shorten the stop time, and for that purpose, it is necessary to quickly switch between suction and release of the nozzle.

[0007]

However, in this transfer apparatus, as shown in FIG. 4, a pipe 7, a vent 4d, a vent 4c, a pipe 5 and a suction pipe extend from the switching electromagnetic valve 6 to the tip of the suction nozzle 3. There is a path for the nozzle 3, which is not particularly noticeable in FIG. 4 because it is not shown in the figure. However, since the pipe 7 is actually the longest, there is a limit to reducing the time required for switching between vacuum and high pressure. Therefore, when the switching electromagnetic valve 6 is arranged so as to be directly connected to the opening on the upper surface side of the vent hole 4d of the center valve fixing portion 4b, the area of the top surface of the center valve 4 is increased because many electromagnetic valves 6 are used. Therefore, when the movable portion 4a of the center valve and, consequently, the turntable 2 become large, the inertia increases, which hinders an increase in the rotation speed of the turntable 2.

[0008]

In order to solve the above-mentioned problems, an air circuit switching mechanism of a transfer device according to the present invention employs a plurality of suction nozzles arranged at equal angular intervals around a turntable which rotates intermittently. A suction mechanism for transporting the suction nozzle and switching the air pipe to the suction nozzle between a vacuum source and a high-pressure source to switch between suction holding and release of the work by using a vacuum source and a high-pressure source. And a center valve that connects the electromagnetic valve corresponding to the rotation angle position of the suction nozzle and the suction nozzle, and the location of the electromagnetic valve requires high-speed switching. The rotation angle position is directly connected to the center valve ,
The remaining electromagnetic valves are connected by piping and arranged at another place. According to the above configuration, especially in places requiring high-speed switching, the center valve is directly connected to the solenoid valve for switching between vacuum and high pressure, so switching is quicker. There is no need to increase

[0009]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An example of a switching mechanism for an air circuit according to the present invention will be described with reference to the drawings. In this example, since the stop time of the turntable 2 is determined at the position 4 in the conventional transfer measures shown in FIGS. 3 and 4, the stop time at this point is minimized to improve the transfer speed. It is a thing. In this position, after the turntable 2 stops, the suction nozzle 3 is switched from vacuum to high pressure, and the work 10 is delivered to a characteristic inspection device (not shown). After the inspection, the suction nozzle 3 is switched from high pressure to vacuum, and the work 10 is transferred to the characteristic inspection device. And then the turntable 2 moves. Since the air circuit is switched twice as described above, increasing the switching speed of the air circuit is effective for increasing the transport speed. FIG. 1 is a plan view showing only a main part thereof, and FIG. 2 is a longitudinal sectional view taken along line BB of FIG. 3 and 4 are designated by the same reference numerals. This transfer device has a turntable 2 on the top surface of a rotating shaft 1 provided in a vertical direction and rotates integrally. The turntable 2 has a plurality of suction nozzles 3 in the periphery with suction ports directed downward, and a plurality of (e.g., 8
) Is the same as before. Here, the suction nozzle 3
May move up and down. A center valve 14 is disposed at the center of the upper surface of the turntable 2, and a lower portion (center valve movable portion) 4a is integrally fixed to the turntable 2 and rotates together with the turntable 2. 4a is provided with a ventilation hole 4c that extends from the top surface to the side surface corresponding to each of the suction nozzles 3, and an opening on the side surface of the center valve movable portion 4a of the ventilation hole 4c is connected to the corresponding suction nozzle 3 by a pipe 5, and The point on the top surface side of the pores 4c is arranged at equal angular intervals on the circumference centered on the rotation center as in the conventional case. An upper portion (center valve fixing portion) 14b of the center valve 14 is disposed in air-tight contact with the top surface of the center valve movable portion 4a, is fixed by a support (not shown), and has a ventilation hole 4d that passes from the lower surface to the top surface. The center valve movable portion 4a is provided corresponding to the ventilation hole 4c, and the lower opening of the ventilation hole 4d is at a position where the turntable 2 is at a predetermined stop position (a position where the suction nozzle 3 is at a predetermined stop position P1 to 8). Hour vent 4c
Is also the same as the conventional one. However, the center valve fixing portion 14b of the ventilation hole 4d
The top side port is connected to the corresponding switching electromagnetic valve 6 by piping, mostly by piping, but the port of the ventilation hole 4d corresponding to the position P4 is provided on the top surface of the center valve fixing portion 14b for switching. The difference is that it is directly connected to the electromagnetic valve 16. Then, the center valve fixing portion 14b
Is provided with a groove 4e for expanding the opening of the ventilation hole 4d along the circumference of the arrangement as required, but the shape is slightly different from the example of FIG. A vacuum source 8 and a high-pressure source 9 are connected to the switching electromagnetic valves 6 and 16, and the connection to the pipe 7 is switched.

Next, a more detailed configuration will be described with an explanation of the operation of the transport device. Position P1 as before
The workpieces 10 such as resin-molded semiconductor elements are sequentially supplied at the same position and orientation by a transfer device (not shown), where the workpieces 9 are suction-held by the suction nozzles 3 and the turntable 2 rotates intermittently. Positions P2, P3, ...
・ Transport sequentially with P8. The suction and holding of the work 10 is performed by the switching electromagnetic valves 6 and 16 to the pipe 7 or the ventilation hole 4.
This is performed by connecting a vacuum source 8 to d. Work 10
Is opened by connecting the high pressure source 9 to the pipe 7 or the ventilation hole 4d by the switching electromagnetic valves 6 and 16. Here, the high-pressure source may be merely opened to the atmospheric pressure, but is set to a pressure slightly higher than the atmospheric pressure in order to enhance the responsiveness. As in the conventional case, at positions P2 and P3, lead homing is completed in two steps by a lead shaper (not shown). During that time, the suction nozzle 3 holds the work 10. At the position P4, a characteristic inspection device (not shown) is arranged. Here, the work 10 is delivered to the characteristic inspection device (not shown), and after the inspection is completed, the suction nozzle 3 sucks and holds the work 10 again and thereafter. Transfer to position. Here, the switching between the suction and release of the suction nozzle 3 is performed directly via the fixed portion 1 of the center valve 14 without passing through the pipe 7.
Since the pressure is switched between vacuum and high pressure by the electromagnetic valve 16 attached to 4b, the speed is high. In the characteristic inspection, the work 10 is classified into three categories, and the position P6,
Position P7 and position P8
The point that is released is the same as before.

In this device also, the center valve fixing portion 14b has a groove 14e for expanding the lower opening of the ventilation hole 4d.
However, as shown in FIG. 1, it is slightly different from the conventional device. That is, the groove of the ventilation hole 4d at the position P4 that requires high-speed switching of the air circuit is not provided, or the width of the ventilation hole 4d is reduced so as to reduce the factors that reduce the switching speed of the air circuit. Instead, the groove 14e at the next position P5 is expanded to the vicinity of the opening of the ventilation hole 14b at the position P4.

In the above operation, the switching solenoid valve 6 at the position P1 has a high pressure immediately before the stop of the turntable 2, and after the stop, switches to a vacuum and holds the work 10 by suction to maintain it even after the start of the movement of the turntable 2. The switching solenoid valves 6 for the positions P2 and P3 are evacuated while the turntable 2 is stopped or moving unless the work 9 is lost at the beginning or end of the operation of the apparatus and the work 10 is not sucked by the suction nozzle 3. To maintain. The solenoid valve 16 for switching P4 is in a vacuum immediately before the stop of the turntable 2,
Immediately after the stop, the pressure is switched to a high pressure, and the work 10 is transferred to a characteristic inspection device (not shown). After the inspection, the work is returned to a vacuum again, and the work 10 is recovered. At this time, the solenoid valve 16 is attached to the center valve fixing portion 1.
Since it is directly installed at 4b and there is no pipe 7, switching is quicker than at other positions. The switching solenoid valve 6 at the position P5 maintains the vacuum during stoppage and movement of the turntable 2 except when the work 10 is lost at the beginning or end of the operation of the apparatus and the work 10 is not sucked by the suction nozzle 3. I do. The solenoid valve 6 for switching P6 is a vacuum immediately before the stop of the turntable 2 and is switched to a high pressure immediately after the stop if the conveyed workpiece 10 is an object to be delivered to another device (characteristic A). The work 10 is delivered to another device, maintained after the start of the movement of the turntable 2, and switched to vacuum immediately before the stop. If the work 10 is to pass, the vacuum is maintained while the turntable 2 is stopped or moving. The switching solenoid valve 6 at the position P7 is switched to a high pressure immediately before the stop of the turntable 2 and to a high pressure immediately after the stop, if the conveyed workpiece 10 is an object to be transferred to another device (characteristic category B). Then, the work 10 is transferred to another device, maintained after the start of the movement of the turntable 2, and switched to vacuum immediately before the stop. Work 1
If 0 is to pass, the vacuum is maintained while the turntable 2 is stopped and moving. When there is no work 10, the pressure is high just before the stop, and is maintained during the stop and after the start of the movement. When the work 10 is conveyed and released here, the switching solenoid valve 6 at the position P8 is in a vacuum state immediately before the stop of the turntable 2, and is switched to a high pressure immediately after the stop to drop the work 10, and the turntable 2 is turned off. 2 is maintained after the start of the movement. If there is no work 10, high pressure just before the stop,
It is maintained during the stop and after the start of movement.

In this example, the presence or absence of the work 10 is confirmed at the position P1, and the switching operation of the air circuit as described above is performed at the position corresponding to the suction nozzle 3 sucking the work 10, so that the work 10 is not sucked. Suction nozzle 3
Is connected to the high pressure side in order to prevent the vacuum from being broken and the adsorption capacity from being reduced at the position corresponding to.

However, the piping from the solenoid valves 6, 16 to the vacuum pump (not shown) is made relatively long individually,
The suction nozzle connected to the vacuum side does not have the work 10, and even if the vacuum is broken, the other suction nozzles can normally suction, thereby simplifying the configuration and software of the transfer device. In this case, the normal air circuit switching operation may be performed even when there is a suction nozzle having no work such as at the beginning or end of work. In this case, it is better to connect between the electromagnetic valve 16 requiring high-speed switching and a vacuum pump (not shown) as short as possible as long as the suction force can be reduced when there is no work 10 in another nozzle.

According to the transfer device described above, the switching speed of the air circuit is increased at the position 4 where the stop time of the turntable 2 is determined, so that the stop time can be shortened and the transfer speed is improved.

[0016]

As described above, according to the present invention, a high transfer speed can be attained by disposing the switching electromagnetic valve directly at the center valve only at a position where a quick air circuit switching is required.

[Brief description of the drawings]

FIG. 1 is a plan view of a main part of an embodiment of the present invention.

FIG. 2 is a longitudinal sectional view thereof.

FIG. 3 is a plan view of a main part of a conventional device.

FIG. 4 is a longitudinal sectional view thereof.

[Explanation of symbols]

 2 Turntable 3 Suction nozzle 5, 7 Piping 6 Electromagnetic valve 8 Vacuum source 9 High pressure source 10 Work 14 Center valve P1 to P8 Position where suction nozzle stops

Claims (2)

(57) [Claims] A work is suctioned and conveyed to a plurality of suction nozzles arranged at equal angular intervals around a turntable rotated intermittently, and an air pipe to the suction nozzle is connected to a vacuum source and a high pressure source. In a switching mechanism of an air pipe of a transfer device for switching between suction holding and release of a workpiece by switching, a plurality of electromagnetic valves for switching between a vacuum source and a high pressure source, and the electromagnetic valve corresponding to a rotation angle position of the suction nozzle and the electromagnetic valve. A center valve for connecting to a suction nozzle, wherein the rotation angle position has a specific rotation angle position requiring high-speed switching, and the electromagnetic valve arrangement location requires high-speed switching. Those with a specific rotation angle position are directly connected to the center valve.
Binding to the remainder of the electromagnetic valve switching mechanism of the air circuit, characterized in that arranged in the other locations are connected to one another through pipes. 2. The method according to claim 1, wherein the work is sucked and conveyed by a plurality of suction nozzles arranged at equal angular intervals around a turntable which rotates intermittently, and the work is held at a predetermined position where the suction nozzle stops. In performing the processing, the air pipe to the suction nozzle is switched between a vacuum source and a high pressure source to switch between suction holding and release of the work, and a switching mechanism of the air pipe of the transfer device includes a plurality of switches for switching between the vacuum source and the high pressure source. An electromagnetic valve, a center valve for connecting the electromagnetic valve corresponding to the stop position of the suction nozzle and the suction nozzle at that position, and a specific stop position requiring high-speed switching among the stop positions. Since the location of the electromagnetic valve affects the stoppage time of the turntable, high-speed switching is required. That is of a particular stop position is directly connected to the center valve,
A switching mechanism for an air circuit, wherein the remaining electromagnetic valves are connected by piping and arranged at another location.