JP3187296B2 - Wire saw and work cutting method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw for cutting a brittle material such as a semiconductor material, a magnetic material, and a ceramic with a wire, and a method for cutting a workpiece.

[0002]

2. Description of the Related Art In a wire saw of this type, a wire is spirally wound at a predetermined pitch between a plurality of rollers having grooves, and the wire runs while reciprocating, and a slurry containing abrasive grains is formed on the wire. Supplied. In this state, the work is pressed from above the wire, and the work is cut by the wire running and the abrasive grains.

[0003]

However, the above-mentioned conventional wire saw has the following problems. (1) Slurry adheres to the outer peripheral surface of the wire after or during the cutting of the work. For this reason, when the wire is wound on the roller, small pieces of the crushed work in the slurry enter the groove of the roller. For this reason, there has been a problem that the wire comes off the groove of the roller, which hinders the subsequent cutting operation.

(2) Since the slurry is easy to dry, there are problems such as the solidification of the abrasive grains in the slurry during the cutting of the work, causing cracks and cracks in the work, and the inability to pull out the wire from the work. appear. For this reason, in recent years, slurry is stored in a storage tank, and cutting is performed while immersing a work in the storage tank.

[0005] However, when the slurry in the storage tank overflows from the storage tank, the slurry overflowing from the storage tank is applied to a wire located below the storage tank to cause the problem (1). In addition, the scraps broken during the cutting of the work fall into the storage tank, but it is very difficult to remove the scraps from the storage tank.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and a first object of the present invention is to provide a wire saw and a method for cutting a workpiece which can prevent extra slurry from adhering to a wire. .

A second object of the present invention is to provide a wire saw and a method for cutting a workpiece, which prevent drying of abrasive grains in a slurry and which can easily collect scraps.

[0008]

In order to achieve the above object, according to the first aspect of the present invention, a wire spirally wound between a plurality of groove rollers is caused to travel, and abrasive grains are applied to the wire. pressing the workpiece while supplying a slurry containing, in wire saw for cutting the workpiece, the disposed below the workpiece and recovering the scraps cracked during cutting of the slurry and the workpiece supplied to the wire together
A slurry storage tank into which the work is immersed when cut to a predetermined position; and a liquid level setting for setting the liquid level in the slurry storage tank to a position separated from the wire cutting portion below. Means and a switching means for holding the slurry storage tank in a state where slurry can be stored when the work is cut, and for holding the slurry storage tank in a state where the slurry is discharged when removing the scraps. That is the gist.

According to the second aspect of the present invention, the first aspect is provided.
In the invention described in (1), the gist is that the liquid level setting means is a slurry discharge port provided on a side portion of the slurry storage tank.

[0010] According to the third aspect of the present invention, the first aspect is provided.
Alternatively, in the invention according to the second aspect, the gist of the present invention is to provide a scrap receiving tank that is removably accommodated in the slurry storage tank and collects scraps broken when the work is cut.

According to the fourth aspect of the present invention, the third aspect of the present invention is provided.
In the invention described in (1), the gist is that a plurality of through holes are formed in the scrap receiving tank. According to the fifth aspect of the present invention, a wire spirally wound between a plurality of groove rollers is run, and a workpiece is pressed while supplying a slurry containing abrasive grains to the wire to cut the workpiece. In the work cutting method using a wire saw, a storage tank for storing slurry is arranged below the work so as not to exceed a predetermined liquid level, and the work is immersed in the storage tank and the wire is not immersed in the storage tank. Thus, the gist is to cut the work.

Therefore, according to the first aspect of the present invention, the slurry is supplied to the wire when the work is cut.
The slurry supplied to the wire is collected in a slurry storage tank. At this time, the switching means holds the slurry storage tank in a state of storing the slurry. At this time, the liquid level in the slurry storage tank is set slightly below the cut portion of the wire by the liquid level setting means. This prevents excess slurry such as the slurry after the work is cut off from being applied to the wire, and also prevents the wire from contacting the slurry in the slurry storage tank. Further, the scraps broken during the work cutting are collected in the slurry storage tank. When removing the scraps collected in the slurry storage tank, the switching means discharges the slurry in the slurry storage tank. This facilitates removal of the offcuts without the slurry getting in the way. In addition,
When the workpiece is cut to the specified position, the workpiece is immersed in the storage tank.
Pickled. As a result, when the workpiece is cut,
The dried slurry is prevented from drying. In addition, wire
Extra slurry on the wire because it does not touch the
Is prevented from adhering.

According to the second aspect of the present invention, in addition to the operation of the first aspect, when the level of the slurry recovered in the slurry storage tank rises and reaches a predetermined level, the slurry is removed. It is discharged outside through the discharge port. Thereby, the liquid level of the slurry rises, and the slurry is prevented from contacting the wire.

According to a third aspect of the present invention, in addition to the function of the first or second aspect, scraps broken during the cutting of the work are collected by the scrap receiving means. Therefore, when collecting the offcuts, it is easily performed by taking out the offcut receiving tank from the slurry storage tank.

According to the fourth aspect of the present invention, in addition to the operation of the third aspect of the present invention, since a plurality of through holes are formed in the offcut receiving tank, the offcut receiving tank is stored in the slurry storage tank. When lifted from the tank, the slurry overflows from the through hole. Thereby, it is possible to easily take out the scrap without the slurry being in the way.

According to the fifth aspect of the present invention, when the work is cut by a predetermined amount, the work is immersed in the storage tank. Thereby, drying of the slurry attached to the work at the time of cutting the work is prevented. Further, since the wire does not come into contact with the slurry in the storage tank, it is possible to prevent extra slurry from adhering to the wire.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. As shown in FIG. 1 and FIG. 2, three groove rollers of a first groove roller 11, a second groove roller 12, and a third groove roller 13 are arranged in an inverted triangle shape. A large number of grooves 14 are formed on the outer peripheral surface of each of the groove rollers 11 to 13 at a predetermined pitch. The cutting wire 15 made of a steel wire is continuously spirally wound around the groove 14 of each of the groove rollers 11 to 13, and the groove rollers 11 to 13 are wound.
The vehicle is driven by the rotation of thirteen. The groove rollers 11 to 1
3 is rotated by a motor (not shown).

A pair of reels 16 and 17 are provided with the groove roller 1.
It is arranged on the side of 1-13. Then, the groove roller 1 is transferred from one of the reels 16 via a plurality of guide rollers 18.
The wire 15 is supplied to the reels 1 to 13, and the wire 15 is wound on the other reel 17 from the groove rollers 11 to 13 via the plurality of guide rollers 19. When the wire 15 is completely wound from one reel 16 to the other reel 17, the supply and winding directions of the wire 15 are reversed. In the course of traveling, the wire 15 performs an advancing / retreating operation in which the wire 15 slightly retreats after traveling a predetermined amount.

A pair of dancer levers 20 and 21 are provided between the groove rollers 11 to 13 and the respective reels 16 and 17.
It is rotatably disposed in the traveling path of the wire 15 and has dancer rollers 22, 23 and weights 24, 23 at its ends.
25 are attached. The weights 24 and 25 cause the wires 15 between the groove rollers 11 to 13 to move.
Is given a predetermined tension.

A pair of slurry supply pipes 26, 27 are disposed above the first groove roller 11 and the second groove roller 12, and the first groove roller 11 and the second groove roller 11 are supplied from the slurry supply pipes 26, 27. Slurry containing abrasive grains is supplied to the wire 15 between the groove roller 12 and the groove roller 12. Work 3
1 is disposed above the groove roller 11 so as to be able to move up and down.
By being pressed against the intervening wire 15, the slurry is cut into a wafer by the lapping action of the abrasive grains in the slurry.

A box-shaped slurry storage tank 41 having an open top is disposed in a space surrounded by the groove rollers 11 to 13. The slurry storage tank 41 is a tank for temporarily storing the slurry flowing down from the slurry supply pipes 26 and 27. A slurry discharge port 42 as a liquid level setting means is formed in the upper part of the side surface of the slurry storage tank 41. A pipe extending from a separate slurry storage tank (not shown) is connected to the slurry discharge port 42. The formation position of the slurry discharge port 42 is determined by the position of the wire 1 connecting the first groove roller 11 and the second groove roller 12.
It is formed at a position about 5 cm below the position 5.

In the slurry storage tank 41, a box-shaped scrap receiving tank 43 having an open top is accommodated so as to be able to be taken out.
The scraps broken when the work 31 is cut are removed from the scrap receiving tank 4.
Collected in 3. A large number of through holes 44 are formed in the side and bottom surfaces of the scrap receiving tank 43. Scrap material receiving tank 43
Is provided so as to cover the opening edge of the slurry storage tank 41. In this embodiment, a wire mesh is used as the scrap receiving tank 43.

Next, the operation at the time of cutting the work 31 will be described. First, when cutting the work 31,
As described above, the slurry is caused to flow down from the slurry supply pipes 26 and 27 and the wire 15 is run. In this state, the work 31 is lowered and pressed against the wire 15. Thereby, the cutting of the work 31 is started. At this time, the slurry flowing down from the slurry supply pipes 26 and 27 is collected in the slurry storage tank 41. Slurry storage tank 41
The liquid level of the collected slurry rises, and the slurry discharge port 42
When the temperature reaches the upper limit, the slurry is discharged from the slurry discharge port 42 to the outside. Thereby, the slurry supply pipe 2
The liquid level of the slurry in the slurry storage tank 41 supplied from 6 and 27 does not rise above the slurry discharge port 42.

Immediately after the start of cutting the work 31, the work 3
1 is not immersed in the slurry storage tank 41. When the work 31 is cut to a predetermined position, the work 31 descends and is immersed in the slurry in the slurry storage tank 41. This prevents the work 31 from drying. When the work 31 is broken for some reason during the cutting of the work, the broken end material falls into the end material receiving tank 43. After the cutting of the work 31 is completed, the slurry storage tank 41 is removed from the space surrounded by the groove rollers 11 to 13 as shown in FIG. Then, the scrap receiving tank 43 is taken out of the slurry storage tank 41. At this time, the slurry in the scrap receiving tank 43 leaks out from the many through holes 44 to the outside. As a result, no slurry exists in the scrap receiving tank 43. After removing the scrap material receiving tank 43 from the slurry storage tank 41, remove the scrap material,
The scrap receiving tank 43 is stored in the slurry storage tank 41 again.

In the present embodiment, the following effects can be obtained by configuring the wire saw as described above. (1) A slurry storage tank 41 that collects and stores slurry flowing down from the slurry supply pipes 26 and 27, and an end that is housed in the slurry storage tank so as to be able to be taken out of the slurry storage tank and collects scraps broken when cutting the work. By having the material receiving tank 43,
Excess slurry can be prevented from hitting the wire. Thereby, it is possible to prevent small pieces of crushed work from entering the grooves 14 of the groove rollers 11 to 13, and
4 can be prevented from coming off the wire 15. as a result,
The processing accuracy and the yield can be improved.

The end material receiving tank 43 has a plurality of through holes 4.
When the scrap material receiving tank 43 is pulled up from the slurry storage tank 41 because of the formation of the slurry 4, the slurry overflows from the through hole 44. Thereby, the scraps can be easily taken out from the scrap receiving tank 43 without the slurry being in the way.

(2) Since the slurry discharge port 42 is formed on the side surface of the slurry storage tank 41, the liquid level of the slurry in the slurry storage tank 41 and the first groove roller 11 and the second groove roller 12 The distance between the wire 15 stretched therebetween can be kept constant. Thereby, the slurry storage tank 41
The wire 15 can be prevented from being immersed in the slurry inside, so that the amount of abrasive grains and the like in the slurry can be reduced in the grooves 14 of the groove rollers 11 to 13.

(3) The work 31 is cut while immersed in the slurry storage tank. Thereby, work 3
Drying of the slurry attached to the workpiece 31 at the time of cutting 1 can be prevented, and cracking or the like of the workpiece 31 can be prevented. This is a particularly effective cutting method for aqueous slurries that are easy to dry.

(4) Since the upper opening edge of the scrap receiving tank 43 is provided so as to cover the opening edge of the slurry storage tank 41, the scrap received in the scrap receiving tank 43 is externally (slurried). Outflow to the storage tank 41) can be prevented.

The present invention can also be configured as follows. (1) To embody a wire saw using two groove rollers. (2) In the above embodiment, the scrap material receiving tank 43 for collecting the scrap material is provided so as to be able to be taken out of the slurry storage tank 41, but this may be embodied as shown in FIG. That is, the scrap material may be directly collected by the slurry storage tank 51 without providing the scrap material receiving tank 43. In this case, a drain hole 52 as a switching means is formed on the bottom surface of the slurry storage tank 51. Then, a valve (for example, a ball valve) 53 as switching means is connected to the drain hole 52. When removing the scraps, the valve 53 is opened to discharge the slurry in the slurry storage tank 51. Thereby, the scraps can be easily taken out from the slurry storage tank 51 without the slurry being in the way.

[0031]

According to the first aspect of the present invention, since the slurry supplied to the wire is collected in the slurry storage tank, it is possible to prevent excess slurry from being applied to the wire. Accordingly, it is possible to prevent small pieces of the crushed work from entering the groove of the groove roller and prevent the wire from coming off the groove. As a result, the processing accuracy and the yield can be improved. In addition, the end material can be easily taken out. Furthermore, when the workpiece is cut,
Can prevent the slurry from drying out, which can lead to cracks and
Cracks and the like can be prevented. In addition, the wire is connected to the slurry in the storage tank.
Extra slurry adheres to the wire because it does not
To prevent the wire from coming off the groove.
You.

According to the invention described in claim 2, according to claim 1
In addition to the effects of the invention described in (1), since the liquid level of the slurry in the slurry storage tank can be reliably set below the cut portion of the wire, it is possible to prevent the wire from contacting the slurry in the slurry storage tank. As a result, it is possible to prevent small pieces of crushed work in the slurry from entering the groove of the groove roller, and to prevent the wire from coming off the groove.

According to the invention described in claim 3, according to claim 1
Alternatively, in addition to the effects of the invention described in claim 2, the workability can be improved because the offcuts can be easily collected. According to the invention of claim 4, in addition to the effect of the invention of claim 3, when the scrap material receiving tank is pulled up from the slurry storage tank, the slurry overflows from the through hole, so that the slurry is The offcuts can be easily taken out of the offcut receiving tank without being in the way.

According to the fifth aspect of the present invention, it is possible to prevent drying of the slurry attached to the work at the time of cutting the work, thereby preventing the work from cracking and cracking. Further, since the wire does not come into contact with the slurry in the storage tank, it is possible to prevent extra slurry from adhering to the wire and prevent the wire from coming off the groove.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view of a wire saw according to an embodiment of the present invention.

FIG. 2 is a schematic side view of a wire saw.

FIG. 3 is a side view of the slurry storage tank in a state where the scrap receiving tank is taken out.

FIG. 4 is a side sectional view of a slurry storage tank according to another embodiment.

[Explanation of symbols]

11, 12, 13 ... groove roller, 15 ... wire, 31 ... work, 41 ... slurry storage tank, 43 ... scrap material receiving tank, 42 ...
Slurry discharge port as liquid level setting means, 44 through-hole, 5
1 ... Slurry storage tank, 52 ... Drain hole as switching means, 53 ... Valve as switching means.

Continuation of the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) B28D 5/04 B24B 27/06 B24B 55/12

Claims (5)

(57) [Claims] 1. A wire saw for cutting a work by running a wire spirally wound between a plurality of groove rollers, pressing a work while supplying a slurry containing abrasive grains to the wire, It is disposed below the workpiece and recovering the scraps cracked during cutting of the slurry and the workpiece supplied to the wire DOO
Further, when cut to a predetermined position, the work is immersed.
That a slurry storage tank, the liquid level of the slurry reservoir tank below the cutting portion of the wire
A liquid level setting means for setting to a separated position , a slurry storage tank when the work is cut, a slurry storage tank being held in a state capable of storing slurry, and a slurry storage tank when discharging the scraps, and discharging of the slurry. And a switching means for maintaining the state of the wire saw. 2. The wire saw according to claim 1, wherein the liquid level setting means is a slurry discharge port provided on a side of the slurry storage tank. 3. The scrap material is collected in a scrap material receiving tank which is removably accommodated in the slurry storage tank.
Or the wire saw according to claim 2. 4. The wire saw according to claim 3, wherein a plurality of through holes are formed in the scrap receiving tank. 5. A workpiece cut by a wire saw for cutting a workpiece by running a wire spirally wound between a plurality of groove rollers, pressing a workpiece while supplying a slurry containing abrasive grains to the wire, and cutting the workpiece. In the method, a storage tank for storing slurry is arranged below the work so as not to exceed a predetermined liquid level, the work is immersed in the storage tank, and the wire is not immersed in the storage tank. Work cutting method using a wire saw for cutting.