JP3187296B2 - Wire saw and work cutting method - Google Patents
Wire saw and work cutting methodInfo
- Publication number
- JP3187296B2 JP3187296B2 JP22396995A JP22396995A JP3187296B2 JP 3187296 B2 JP3187296 B2 JP 3187296B2 JP 22396995 A JP22396995 A JP 22396995A JP 22396995 A JP22396995 A JP 22396995A JP 3187296 B2 JP3187296 B2 JP 3187296B2
- Authority
- JP
- Japan
- Prior art keywords
- slurry
- wire
- storage tank
- work
- cutting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は、半導体材料、磁性
材料、セラミック等の脆性材料をワイヤにより切断する
ワイヤソー及びワーク切断方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire saw for cutting a brittle material such as a semiconductor material, a magnetic material, and a ceramic with a wire, and a method for cutting a workpiece.
【0002】[0002]
【従来の技術】この種のワイヤソーにおいては、溝を有
する複数のローラ間にワイヤが所定ピッチで螺旋状に巻
き付けられ、同ワイヤが往復しながら走行し、そのワイ
ヤ上に砥粒を含むスラリが供給される。そして、この状
態でワイヤの上方からワークが押し付けられ、ワイヤ走
行と砥粒とによりワークが切断されるようになってい
る。2. Description of the Related Art In a wire saw of this type, a wire is spirally wound at a predetermined pitch between a plurality of rollers having grooves, and the wire runs while reciprocating, and a slurry containing abrasive grains is formed on the wire. Supplied. In this state, the work is pressed from above the wire, and the work is cut by the wire running and the abrasive grains.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、上記従
来のワイヤソーにおいては次のような問題があった。 (1)ワークの切断後あるいは切断中にワイヤの外周面
にスラリが付着している。このため、ローラにワイヤが
巻き取られる際に、ローラの溝にスラリ中の小さく破砕
したワークのかけらが入り込む。このため、ワイヤがロ
ーラの溝から外れてしまい、後の切削作業に支障を来す
という問題があった。However, the above-mentioned conventional wire saw has the following problems. (1) Slurry adheres to the outer peripheral surface of the wire after or during the cutting of the work. For this reason, when the wire is wound on the roller, small pieces of the crushed work in the slurry enter the groove of the roller. For this reason, there has been a problem that the wire comes off the groove of the roller, which hinders the subsequent cutting operation.
【0004】(2)スラリは乾燥しやすいことから、ワ
ークの切削時に、スラリ中の砥粒が凝固してワークに亀
裂や割れの原因となったり、ワークからワイヤを引き抜
けない等の問題が発生する。そのため、近年では貯溜槽
にスラリを貯溜し、その貯溜槽内にワークを浸漬させな
がら切削を行っている。(2) Since the slurry is easy to dry, there are problems such as the solidification of the abrasive grains in the slurry during the cutting of the work, causing cracks and cracks in the work, and the inability to pull out the wire from the work. appear. For this reason, in recent years, slurry is stored in a storage tank, and cutting is performed while immersing a work in the storage tank.
【0005】しかし、貯溜槽内のスラリが貯溜槽からオ
ーバーフローすると、貯溜槽から溢れでたスラリが、貯
溜槽の下方に位置するワイヤにかかって上記(1)のよ
うな問題が発生する。また、ワークの切削中に割れた端
材は貯溜槽内に落下するが、この端材を貯溜槽内から取
り出す作業が非常に困難である。[0005] However, when the slurry in the storage tank overflows from the storage tank, the slurry overflowing from the storage tank is applied to a wire located below the storage tank to cause the problem (1). In addition, the scraps broken during the cutting of the work fall into the storage tank, but it is very difficult to remove the scraps from the storage tank.
【0006】本発明は上記問題点を解消するためになさ
れたものであって、第1の目的はワイヤに余分なスラリ
が付着するのを防止可能なワイヤソー及びワーク切断方
法を提供することにある。SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and a first object of the present invention is to provide a wire saw and a method for cutting a workpiece which can prevent extra slurry from adhering to a wire. .
【0007】第2の目的は、スラリ中の砥粒の乾燥を防
止し、かつ端材を容易に回収可能なワイヤソー及びワー
ク切断方法を提供することにある。A second object of the present invention is to provide a wire saw and a method for cutting a workpiece, which prevent drying of abrasive grains in a slurry and which can easily collect scraps.
【0008】[0008]
【課題を解決するための手段】上記目的を達成するため
に、請求項1に記載の発明では、複数の溝ローラ間に螺
旋状に巻き付けられたワイヤを走行させ、そのワイヤに
対して砥粒を含むスラリを供給しながらワークを押し付
けて、そのワークを切断するワイヤソーにおいて、前記
ワークの下方に配置され、前記ワイヤに供給されるスラ
リ及びワークの切断時に割れた端材を回収するととも
に、所定位置まで切断されると前記ワークを浸漬させる
スラリ貯溜槽と、前記スラリ貯溜槽内の液位をワイヤの
切断部より下方に離間した位置に設定するための液位設
定手段と、前記ワークの切断時にはスラリ貯溜槽を、ス
ラリを貯溜可能な状態に保持し、また、前記端材の取り
出し時にはスラリ貯溜槽を、スラリを排出する状態に保
持する切り換え手段とを備えたことをその要旨とする。In order to achieve the above object, according to the first aspect of the present invention, a wire spirally wound between a plurality of groove rollers is caused to travel, and abrasive grains are applied to the wire. pressing the workpiece while supplying a slurry containing, in wire saw for cutting the workpiece, the disposed below the workpiece and recovering the scraps cracked during cutting of the slurry and the workpiece supplied to the wire together
A slurry storage tank into which the work is immersed when cut to a predetermined position; and a liquid level setting for setting the liquid level in the slurry storage tank to a position separated from the wire cutting portion below. Means and a switching means for holding the slurry storage tank in a state where slurry can be stored when the work is cut, and for holding the slurry storage tank in a state where the slurry is discharged when removing the scraps. That is the gist.
【0009】請求項2に記載の発明では、前記請求項1
に記載の発明において、前記液位設定手段は、前記スラ
リ貯溜槽の側部に設けられたスラリ排出口であることを
その要旨とする。According to the second aspect of the present invention, the first aspect is provided.
In the invention described in (1), the gist is that the liquid level setting means is a slurry discharge port provided on a side portion of the slurry storage tank.
【0010】請求項3に記載の発明では、前記請求項1
又は請求項2に記載の発明において、前記スラリ貯溜槽
に対して取出可能に収容され、ワーク切断時に割れた端
材を回収する端材受取槽を備えたことをその要旨とす
る。[0010] According to the third aspect of the present invention, the first aspect is provided.
Alternatively, in the invention according to the second aspect, the gist of the present invention is to provide a scrap receiving tank that is removably accommodated in the slurry storage tank and collects scraps broken when the work is cut.
【0011】請求項4に記載の発明では、前記請求項3
に記載の発明において、前記端材受取槽には複数の貫通
孔が形成されていることをその要旨とする。請求項5に
記載の発明では、複数の溝ローラ間に螺旋状に巻き付け
られたワイヤを走行させ、そのワイヤに対して砥粒を含
むスラリを供給しながらワークを押し付けて、そのワー
クを切断するワイヤソーによるワーク切断方法におい
て、前記ワークの下方に、所定液位を超えないようにス
ラリを貯溜する貯溜槽を配置し、その貯溜槽にワークを
浸漬させるとともに、貯溜槽内にワイヤが浸漬しない状
態で、ワークの切断を行うことをその要旨とする。According to the fourth aspect of the present invention, the third aspect of the present invention is provided.
In the invention described in (1), the gist is that a plurality of through holes are formed in the scrap receiving tank. According to the fifth aspect of the present invention, a wire spirally wound between a plurality of groove rollers is run, and a workpiece is pressed while supplying a slurry containing abrasive grains to the wire to cut the workpiece. In the work cutting method using a wire saw, a storage tank for storing slurry is arranged below the work so as not to exceed a predetermined liquid level, and the work is immersed in the storage tank and the wire is not immersed in the storage tank. Thus, the gist is to cut the work.
【0012】従って、請求項1に記載の発明において
は、ワークの切断時にはワイヤにスラリが供給される。
ワイヤに供給されたスラリはスラリ貯溜槽に回収され
る。このとき、切り換え手段はスラリ貯溜槽をスラリを
貯溜する状態に保持する。また、このとき、液位設定手
段によりスラリ貯溜槽内の液位はワイヤの切断部よりも
若干下方に設定される。これにより、ワーク切断後のス
ラリ等の余分なスラリがワイヤにかかるのが防止される
とともに、ワイヤがスラリ貯溜槽内のスラリに接触する
のが防止される。また、ワーク切断中に割れた端材はス
ラリ貯溜槽内に回収される。スラリ貯溜槽に回収された
端材を取り出す際は、切り換え手段によりスラリ貯溜槽
内のスラリが排出される。これにより、スラリが邪魔に
ならずに端材の取り出しが容易に行われる。さらに、ワ
ークが所定位置まで切断されると、ワークは貯溜槽に浸
漬される。これにより、ワーク切断時にワークに付着し
たスラリの乾燥が防止される。また、ワイヤは貯溜槽内
のスラリに接触しないことから、ワイヤに余分なスラリ
が付着するのが防止される。 Therefore, according to the first aspect of the present invention, the slurry is supplied to the wire when the work is cut.
The slurry supplied to the wire is collected in a slurry storage tank. At this time, the switching means holds the slurry storage tank in a state of storing the slurry. At this time, the liquid level in the slurry storage tank is set slightly below the cut portion of the wire by the liquid level setting means. This prevents excess slurry such as the slurry after the work is cut off from being applied to the wire, and also prevents the wire from contacting the slurry in the slurry storage tank. Further, the scraps broken during the work cutting are collected in the slurry storage tank. When removing the scraps collected in the slurry storage tank, the switching means discharges the slurry in the slurry storage tank. This facilitates removal of the offcuts without the slurry getting in the way. In addition,
When the workpiece is cut to the specified position, the workpiece is immersed in the storage tank.
Pickled. As a result, when the workpiece is cut,
The dried slurry is prevented from drying. In addition, wire
Extra slurry on the wire because it does not touch the
Is prevented from adhering.
【0013】請求項2に記載の発明においては、請求項
1に記載の発明の作用に加え、スラリ貯溜槽に回収され
るスラリの液位が上昇し、所定液位に達すると、スラリ
はスラリ排出口から外部に排出される。これにより、ス
ラリの液位が上昇し、スラリがワイヤに接触するのが防
止される。According to the second aspect of the present invention, in addition to the operation of the first aspect, when the level of the slurry recovered in the slurry storage tank rises and reaches a predetermined level, the slurry is removed. It is discharged outside through the discharge port. Thereby, the liquid level of the slurry rises, and the slurry is prevented from contacting the wire.
【0014】請求項3に記載の発明においては、請求項
1又は請求項2に記載の発明の作用に加え、ワークの切
断中に割れた端材は端材受取手段に回収される。従っ
て、端材を回収する際は、スラリ貯溜槽から端材受取槽
を取り出すことで容易に行われる。According to a third aspect of the present invention, in addition to the function of the first or second aspect, scraps broken during the cutting of the work are collected by the scrap receiving means. Therefore, when collecting the offcuts, it is easily performed by taking out the offcut receiving tank from the slurry storage tank.
【0015】請求項4に記載の発明においては、請求項
3に記載の発明の作用に加え、端材受取槽には複数の貫
通孔が形成されていることから、端材受取槽をスラリ貯
溜槽から引き上げた際には、その貫通孔からスラリが溢
れ落ちる。これにより、スラリが邪魔にならずに容易に
端材を取り出すことが可能となる。According to the fourth aspect of the present invention, in addition to the operation of the third aspect of the present invention, since a plurality of through holes are formed in the offcut receiving tank, the offcut receiving tank is stored in the slurry storage tank. When lifted from the tank, the slurry overflows from the through hole. Thereby, it is possible to easily take out the scrap without the slurry being in the way.
【0016】請求項5に記載の発明によれば、ワークが
所定量切断されると、ワークは貯溜槽に浸漬される。こ
れにより、ワーク切断時にワークに付着したスラリの乾
燥が防止される。また、ワイヤは貯溜槽内のスラリに接
触しないことから、ワイヤに余分なスラリが付着するの
が防止される。According to the fifth aspect of the present invention, when the work is cut by a predetermined amount, the work is immersed in the storage tank. Thereby, drying of the slurry attached to the work at the time of cutting the work is prevented. Further, since the wire does not come into contact with the slurry in the storage tank, it is possible to prevent extra slurry from adhering to the wire.
【0017】[0017]
【発明の実施の形態】以下、本発明を具体化した一実施
の形態を図面に基づいて説明する。図1及び図2に示す
ように、第1の溝ローラ11、第2の溝ローラ12、第
3の溝ローラ13の3個の溝ローラは逆トライアングル
状に配置されている。各溝ローラ11〜13の外周面に
は多数の溝14が所定ピッチで形成されている。鋼線よ
りなる切断用ワイヤ15は前記各溝ローラ11〜13の
溝14に連続して螺旋状に巻付けられ、溝ローラ11〜
13の回転により走行される。なお、溝ローラ11〜1
3は図示しないモータにより回転される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. As shown in FIG. 1 and FIG. 2, three groove rollers of a first groove roller 11, a second groove roller 12, and a third groove roller 13 are arranged in an inverted triangle shape. A large number of grooves 14 are formed on the outer peripheral surface of each of the groove rollers 11 to 13 at a predetermined pitch. The cutting wire 15 made of a steel wire is continuously spirally wound around the groove 14 of each of the groove rollers 11 to 13, and the groove rollers 11 to 13 are wound.
The vehicle is driven by the rotation of thirteen. The groove rollers 11 to 1
3 is rotated by a motor (not shown).
【0018】一対のリール16,17は前記溝ローラ1
1〜13の側方に配設されている。そして、一方のリー
ル16から複数のガイドローラ18を介して溝ローラ1
1〜13上にワイヤ15が供給されるとともに、溝ロー
ラ11〜13上から複数のガイドローラ19を介して他
方のリール17にワイヤ15が巻き取られる。また、一
方のリール16から他方のリール17にワイヤ15が全
て巻き取られたときには、ワイヤ15の供給及び巻取り
方向が反転される。なお、走行途中ではワイヤ15は一
定量進むと少し後退するという進退動作走行を行う。A pair of reels 16 and 17 are provided with the groove roller 1.
It is arranged on the side of 1-13. Then, the groove roller 1 is transferred from one of the reels 16 via a plurality of guide rollers 18.
The wire 15 is supplied to the reels 1 to 13, and the wire 15 is wound on the other reel 17 from the groove rollers 11 to 13 via the plurality of guide rollers 19. When the wire 15 is completely wound from one reel 16 to the other reel 17, the supply and winding directions of the wire 15 are reversed. In the course of traveling, the wire 15 performs an advancing / retreating operation in which the wire 15 slightly retreats after traveling a predetermined amount.
【0019】一対のダンサレバー20,21は前記溝ロ
ーラ11〜13と各リール16,17との間において、
ワイヤ15の走行経路内に回動可能に配設され、それら
の先端にはダンサローラ22,23及びウエイト24,
25が取り付けられている。そして、これらのウエイト
24,25により、溝ローラ11〜13間のワイヤ15
に所定のテンションが付与されている。A pair of dancer levers 20 and 21 are provided between the groove rollers 11 to 13 and the respective reels 16 and 17.
It is rotatably disposed in the traveling path of the wire 15 and has dancer rollers 22, 23 and weights 24, 23 at its ends.
25 are attached. The weights 24 and 25 cause the wires 15 between the groove rollers 11 to 13 to move.
Is given a predetermined tension.
【0020】一対のスラリ供給パイプ26,27は前記
第1の溝ローラ11及び第2の溝ローラ12の上方に配
設され、このスラリ供給パイプ26,27から第1の溝
ローラ11と第2の溝ローラ12との間のワイヤ15に
対して、砥粒を含むスラリが流下供給される。ワーク3
1は溝ローラ11の上方に上下動可能に配設され、この
ワーク31が第1の溝ローラ11と第2の溝ローラ12
間のワイヤ15に押し付けられることにより、スラリ中
の砥粒のラッピング作用にてウエハー状に切断される。A pair of slurry supply pipes 26, 27 are disposed above the first groove roller 11 and the second groove roller 12, and the first groove roller 11 and the second groove roller 11 are supplied from the slurry supply pipes 26, 27. Slurry containing abrasive grains is supplied to the wire 15 between the groove roller 12 and the groove roller 12. Work 3
1 is disposed above the groove roller 11 so as to be able to move up and down.
By being pressed against the intervening wire 15, the slurry is cut into a wafer by the lapping action of the abrasive grains in the slurry.
【0021】各溝ローラ11〜13により包囲されるス
ペース内には上部が開口する箱状のスラリ貯溜槽41が
配置されている。このスラリ貯溜槽41は前記スラリ供
給パイプ26,27から流下するスラリを一時的に貯溜
する槽である。スラリ貯溜槽41の側面上部には液位設
定手段としてのスラリ排出口42が開口形成されてい
る。このスラリ排出口42には別槽のスラリ収容タンク
(図示せず)から延びるパイプが連結されている。な
お、前記スラリ排出口42の形成位置は、前記第1の溝
ローラ11と第2の溝ローラ12との間を繋ぐワイヤ1
5の位置から約5cm下方に離間した位置に形成されて
いる。A box-shaped slurry storage tank 41 having an open top is disposed in a space surrounded by the groove rollers 11 to 13. The slurry storage tank 41 is a tank for temporarily storing the slurry flowing down from the slurry supply pipes 26 and 27. A slurry discharge port 42 as a liquid level setting means is formed in the upper part of the side surface of the slurry storage tank 41. A pipe extending from a separate slurry storage tank (not shown) is connected to the slurry discharge port 42. The formation position of the slurry discharge port 42 is determined by the position of the wire 1 connecting the first groove roller 11 and the second groove roller 12.
It is formed at a position about 5 cm below the position 5.
【0022】前記スラリ貯溜槽41内には上部が開口す
る箱状の端材受取槽43が取出可能に収容されている。
ワーク31の切断時に割れた端材は、この端材受取槽4
3に回収される。端材受取槽43の側面及び底面には複
数の貫通孔44が多数形成されている。端材受取槽43
の上部開口縁は前記スラリ貯溜槽41の開口縁部を被う
ように設けられている。なお、本実施の形態では、端材
受取槽43として金網を使用している。In the slurry storage tank 41, a box-shaped scrap receiving tank 43 having an open top is accommodated so as to be able to be taken out.
The scraps broken when the work 31 is cut are removed from the scrap receiving tank 4.
Collected in 3. A large number of through holes 44 are formed in the side and bottom surfaces of the scrap receiving tank 43. Scrap material receiving tank 43
Is provided so as to cover the opening edge of the slurry storage tank 41. In this embodiment, a wire mesh is used as the scrap receiving tank 43.
【0023】次に、ワーク31の切断時における作用に
ついて説明する。まず、ワーク31の切断を行う際は、
前述したように、スラリ供給パイプ26,27からスラ
リを流下させるとともにワイヤ15を走行させる。この
状態で、ワーク31を下降させワイヤ15に押し付け
る。これにより、ワーク31の切断が開始される。この
とき、スラリ供給パイプ26,27から流下するスラリ
はスラリ貯溜槽41内に回収される。スラリ貯溜槽41
に回収されたスラリの液位が上昇し、スラリ排出口42
まで達した場合には、同スラリ排出口42からスラリが
外部に排出される。これにより、スラリ供給パイプ2
6,27から供給されたスラリ貯溜槽41内のスラリの
液位はスラリ排出口42よりも上昇することはない。Next, the operation at the time of cutting the work 31 will be described. First, when cutting the work 31,
As described above, the slurry is caused to flow down from the slurry supply pipes 26 and 27 and the wire 15 is run. In this state, the work 31 is lowered and pressed against the wire 15. Thereby, the cutting of the work 31 is started. At this time, the slurry flowing down from the slurry supply pipes 26 and 27 is collected in the slurry storage tank 41. Slurry storage tank 41
The liquid level of the collected slurry rises, and the slurry discharge port 42
When the temperature reaches the upper limit, the slurry is discharged from the slurry discharge port 42 to the outside. Thereby, the slurry supply pipe 2
The liquid level of the slurry in the slurry storage tank 41 supplied from 6 and 27 does not rise above the slurry discharge port 42.
【0024】ワーク31の切断開始直後には、ワーク3
1はスラリ貯溜槽41内に浸漬されない。そして、ワー
ク31が所定位置まで切断されると、ワーク31は下降
し、スラリ貯溜槽41内のスラリに浸漬される。これに
より、ワーク31の乾燥が防止される。ワーク切断中に
何らかの原因でワーク31が割れた際には、その割れた
端材は端材受取槽43に落下する。ワーク31の切断終
了後、図3に示すように、スラリ貯溜槽41を各溝ロー
ラ11〜13により包囲される空間部より取り出す。そ
して、スラリ貯溜槽41から端材受取槽43を取り出
す。このとき、端材受取槽43内のスラリは、多数の貫
通孔44から外部に漏れ出る。これにより、端材受取槽
43内にはスラリは存在しなくなる。端材受取槽43を
スラリ貯溜槽41より取り出したら、端材を取り出し、
再度端材受取槽43をスラリ貯溜槽41内に収容する。Immediately after the start of cutting the work 31, the work 3
1 is not immersed in the slurry storage tank 41. When the work 31 is cut to a predetermined position, the work 31 descends and is immersed in the slurry in the slurry storage tank 41. This prevents the work 31 from drying. When the work 31 is broken for some reason during the cutting of the work, the broken end material falls into the end material receiving tank 43. After the cutting of the work 31 is completed, the slurry storage tank 41 is removed from the space surrounded by the groove rollers 11 to 13 as shown in FIG. Then, the scrap receiving tank 43 is taken out of the slurry storage tank 41. At this time, the slurry in the scrap receiving tank 43 leaks out from the many through holes 44 to the outside. As a result, no slurry exists in the scrap receiving tank 43. After removing the scrap material receiving tank 43 from the slurry storage tank 41, remove the scrap material,
The scrap receiving tank 43 is stored in the slurry storage tank 41 again.
【0025】本実施の形態では、上記のようにワイヤソ
ーを構成したことにより次のような効果を得ることがで
きる。 (1)スラリ供給パイプ26,27から流下されるスラ
リを回収して貯溜するスラリ貯溜槽41と、同スラリ貯
溜槽に対して取出可能に収容され、ワーク切断時に割れ
た端材を回収する端材受取槽43を備えたことにより、
余分なスラリがワイヤにかかるのを防止できる。これに
より、溝ローラ11〜13の溝14内に小さく破砕した
ワークのかけらが入り込むのを防止でき、延いては溝1
4からワイヤ15が外れるのを防止できる。その結果、
加工精度及び歩留りの向上を図ることができる。In the present embodiment, the following effects can be obtained by configuring the wire saw as described above. (1) A slurry storage tank 41 that collects and stores slurry flowing down from the slurry supply pipes 26 and 27, and an end that is housed in the slurry storage tank so as to be able to be taken out of the slurry storage tank and collects scraps broken when cutting the work. By having the material receiving tank 43,
Excess slurry can be prevented from hitting the wire. Thereby, it is possible to prevent small pieces of crushed work from entering the grooves 14 of the groove rollers 11 to 13, and
4 can be prevented from coming off the wire 15. as a result,
The processing accuracy and the yield can be improved.
【0026】また、端材受取槽43には複数の貫通孔4
4が形成されていることから、端材受取槽43をスラリ
貯溜槽41から引き上げた際には、その貫通孔44から
スラリが溢れ落ちる。これにより、スラリが邪魔になら
ずに端材受取槽43から容易に端材を取り出すことがで
きる。The end material receiving tank 43 has a plurality of through holes 4.
When the scrap material receiving tank 43 is pulled up from the slurry storage tank 41 because of the formation of the slurry 4, the slurry overflows from the through hole 44. Thereby, the scraps can be easily taken out from the scrap receiving tank 43 without the slurry being in the way.
【0027】(2)スラリ貯溜槽41の側面にスラリ排
出口42を形成したことにより、スラリ貯溜槽41内の
スラリの液面と、第1の溝ローラ11と第2の溝ローラ
12との間に張られたワイヤ15との間の距離を一定に
保持することができる。これにより、スラリ貯溜槽41
内のスラリにワイヤ15が浸漬するのを防止することが
でき、延いては溝ローラ11〜13の溝14内にスラリ
中の砥粒等が巻き込み量を減少できる。(2) Since the slurry discharge port 42 is formed on the side surface of the slurry storage tank 41, the liquid level of the slurry in the slurry storage tank 41 and the first groove roller 11 and the second groove roller 12 The distance between the wire 15 stretched therebetween can be kept constant. Thereby, the slurry storage tank 41
The wire 15 can be prevented from being immersed in the slurry inside, so that the amount of abrasive grains and the like in the slurry can be reduced in the grooves 14 of the groove rollers 11 to 13.
【0028】(3)ワーク31をスラリ貯溜槽に浸漬さ
せた状態で切断するようにした。これにより、ワーク3
1の切断時にワーク31に付着したスラリの乾燥を防止
でき、ワーク31の割れ等を防止することができる。こ
れは、特に乾燥しやすい水性スラリに有効な切断方法で
ある。(3) The work 31 is cut while immersed in the slurry storage tank. Thereby, work 3
Drying of the slurry attached to the workpiece 31 at the time of cutting 1 can be prevented, and cracking or the like of the workpiece 31 can be prevented. This is a particularly effective cutting method for aqueous slurries that are easy to dry.
【0029】(4)端材受取槽43の上部開口縁はスラ
リ貯溜槽41の開口縁部を被うように設けられているこ
とから、端材受取槽43に受け取った端材を外部(スラ
リ貯溜槽41)に流出するのを防止できる。(4) Since the upper opening edge of the scrap receiving tank 43 is provided so as to cover the opening edge of the slurry storage tank 41, the scrap received in the scrap receiving tank 43 is externally (slurried). Outflow to the storage tank 41) can be prevented.
【0030】なお、本発明は次のように構成することも
できる。 (1)2個の溝ローラを使用したワイヤソーに具体化す
ること。 (2)上記実施の形態では、スラリ貯溜槽41内に端材
を回収する端材受取槽43を取出可能に設けたが、これ
を図4に示すように具体化してもよい。すなわち、端材
受取槽43を設けず、直接スラリ貯溜槽51により端材
を回収するようにしてもよい。この場合には、スラリ貯
溜槽51の底面に切り換え手段としてのドレン孔52を
形成する。そして、このドレン孔52に切り換え手段と
してのバルブ(例えば、ボールバルブ)53を連結す
る。端材の取り出し時には、バルブ53を開放してスラ
リ貯溜槽51内のスラリを排出する。これにより、スラ
リが邪魔にならずにスラリ貯溜槽51から容易に端材を
取り出すことができる。The present invention can also be configured as follows. (1) To embody a wire saw using two groove rollers. (2) In the above embodiment, the scrap material receiving tank 43 for collecting the scrap material is provided so as to be able to be taken out of the slurry storage tank 41, but this may be embodied as shown in FIG. That is, the scrap material may be directly collected by the slurry storage tank 51 without providing the scrap material receiving tank 43. In this case, a drain hole 52 as a switching means is formed on the bottom surface of the slurry storage tank 51. Then, a valve (for example, a ball valve) 53 as switching means is connected to the drain hole 52. When removing the scraps, the valve 53 is opened to discharge the slurry in the slurry storage tank 51. Thereby, the scraps can be easily taken out from the slurry storage tank 51 without the slurry being in the way.
【0031】[0031]
【発明の効果】請求項1に記載の発明によれば、ワイヤ
に供給されたスラリはスラリ貯溜槽に回収されることか
ら、余分なスラリがワイヤにかかるのが防止される。こ
れにより、溝ローラの溝内に小さな破砕したワークのか
けらが入り込むのを防止でき、溝からワイヤが外れるの
を防止できる。その結果、加工精度及び歩留りの向上を
図ることができる。また、容易に端材の取り出しを行う
ことができる。さらに、ワーク切断時にワークに付着し
たスラリの乾燥を防止でき、延いてはワークの亀裂及び
割れ等を防止できる。また、ワイヤは貯溜槽内のスラリ
に接触しないことから、ワイヤに余分なスラリが付着す
るのを防止でき、溝からワイヤが外れるのを防止でき
る。 According to the first aspect of the present invention, since the slurry supplied to the wire is collected in the slurry storage tank, it is possible to prevent excess slurry from being applied to the wire. Accordingly, it is possible to prevent small pieces of the crushed work from entering the groove of the groove roller and prevent the wire from coming off the groove. As a result, the processing accuracy and the yield can be improved. In addition, the end material can be easily taken out. Furthermore, when the workpiece is cut,
Can prevent the slurry from drying out, which can lead to cracks and
Cracks and the like can be prevented. In addition, the wire is connected to the slurry in the storage tank.
Extra slurry adheres to the wire because it does not
To prevent the wire from coming off the groove.
You.
【0032】請求項2に記載の発明によれば、請求項1
に記載の発明の効果に加え、確実にスラリ貯溜槽内のス
ラリの液位をワイヤの切断部よりも下方に設定できるこ
とから、スラリ貯溜槽内のスラリにワイヤが接触するの
を防止できる。その結果、溝ローラの溝内にスラリ中の
小さく破砕したワークのかけら等が入り込むのを防止で
き、溝からワイヤが外れるのを防止できる。According to the invention described in claim 2, according to claim 1
In addition to the effects of the invention described in (1), since the liquid level of the slurry in the slurry storage tank can be reliably set below the cut portion of the wire, it is possible to prevent the wire from contacting the slurry in the slurry storage tank. As a result, it is possible to prevent small pieces of crushed work in the slurry from entering the groove of the groove roller, and to prevent the wire from coming off the groove.
【0033】請求項3に記載の発明によれば、請求項1
又は請求項2に記載の発明の効果に加え、端材の回収が
容易に行うことができることから、作業性を向上でき
る。請求項4に記載の発明によれば、請求項3に記載の
発明の効果に加え、端材受取槽をスラリ貯溜槽から引き
上げた際には、貫通孔からスラリが溢れ落ちることか
ら、スラリが邪魔にならずに端材受取槽から端材を容易
に取り出すことができる。According to the invention described in claim 3, according to claim 1
Alternatively, in addition to the effects of the invention described in claim 2, the workability can be improved because the offcuts can be easily collected. According to the invention of claim 4, in addition to the effect of the invention of claim 3, when the scrap material receiving tank is pulled up from the slurry storage tank, the slurry overflows from the through hole, so that the slurry is The offcuts can be easily taken out of the offcut receiving tank without being in the way.
【0034】請求項5に記載の発明によれば、ワーク切
断時にワークに付着したスラリの乾燥を防止でき、延い
てはワークの亀裂及び割れ等を防止できる。また、ワイ
ヤは貯溜槽内のスラリに接触しないことから、ワイヤに
余分なスラリが付着するのを防止でき、溝からワイヤが
外れるのを防止できる。According to the fifth aspect of the present invention, it is possible to prevent drying of the slurry attached to the work at the time of cutting the work, thereby preventing the work from cracking and cracking. Further, since the wire does not come into contact with the slurry in the storage tank, it is possible to prevent extra slurry from adhering to the wire and prevent the wire from coming off the groove.
【図1】 本発明を具体化した実施の形態におけるワイ
ヤソーの模式的な斜視図。FIG. 1 is a schematic perspective view of a wire saw according to an embodiment of the present invention.
【図2】 ワイヤソーの模式的な側面図。FIG. 2 is a schematic side view of a wire saw.
【図3】 端材受取槽を取り出した状態のスラリ貯溜槽
の側面図。FIG. 3 is a side view of the slurry storage tank in a state where the scrap receiving tank is taken out.
【図4】 別の実施の形態におけるスラリ貯溜槽の側断
面図。FIG. 4 is a side sectional view of a slurry storage tank according to another embodiment.
11,12,13…溝ローラ、15…ワイヤ、31…ワ
ーク、41…スラリ貯溜槽、43…端材受取槽、42…
液位設定手段としてのスラリ排出口、44…貫通孔、5
1…スラリ貯溜槽、52…切り換え手段としてのドレン
孔、53…切り換え手段としてのバルブ。11, 12, 13 ... groove roller, 15 ... wire, 31 ... work, 41 ... slurry storage tank, 43 ... scrap material receiving tank, 42 ...
Slurry discharge port as liquid level setting means, 44 through-hole, 5
1 ... Slurry storage tank, 52 ... Drain hole as switching means, 53 ... Valve as switching means.
フロントページの続き (58)調査した分野(Int.Cl.7,DB名) B28D 5/04 B24B 27/06 B24B 55/12 Continuation of the front page (58) Field surveyed (Int.Cl. 7 , DB name) B28D 5/04 B24B 27/06 B24B 55/12
Claims (5)
れたワイヤを走行させ、そのワイヤに対して砥粒を含む
スラリを供給しながらワークを押し付けて、そのワーク
を切断するワイヤソーにおいて、 前記ワークの下方に配置され、前記ワイヤに供給される
スラリ及びワークの切断時に割れた端材を回収するとと
もに、所定位置まで切断されると前記ワークを浸漬させ
るスラリ貯溜槽と、 前記スラリ貯溜槽内の液位をワイヤの切断部より下方に
離間した位置に設定するための液位設定手段と、 前記ワークの切断時にはスラリ貯溜槽を、スラリを貯溜
可能な状態に保持し、また、前記端材の取り出し時には
スラリ貯溜槽を、スラリを排出する状態に保持する切り
換え手段とを備えたワイヤソー。1. A wire saw for cutting a work by running a wire spirally wound between a plurality of groove rollers, pressing a work while supplying a slurry containing abrasive grains to the wire, It is disposed below the workpiece and recovering the scraps cracked during cutting of the slurry and the workpiece supplied to the wire DOO
Further, when cut to a predetermined position, the work is immersed.
That a slurry storage tank, the liquid level of the slurry reservoir tank below the cutting portion of the wire
A liquid level setting means for setting to a separated position , a slurry storage tank when the work is cut, a slurry storage tank being held in a state capable of storing slurry, and a slurry storage tank when discharging the scraps, and discharging of the slurry. And a switching means for maintaining the state of the wire saw.
の側部に設けられたスラリ排出口である請求項1に記載
のワイヤソー。2. The wire saw according to claim 1, wherein the liquid level setting means is a slurry discharge port provided on a side of the slurry storage tank.
取出可能に収容された端材受取槽に回収される請求項1
又は請求項2に記載のワイヤソー。3. The scrap material is collected in a scrap material receiving tank which is removably accommodated in the slurry storage tank.
Or the wire saw according to claim 2.
されている請求項3に記載のワイヤソー。4. The wire saw according to claim 3, wherein a plurality of through holes are formed in the scrap receiving tank.
れたワイヤを走行させ、そのワイヤに対して砥粒を含む
スラリを供給しながらワークを押し付けて、そのワーク
を切断するワイヤソーによるワーク切断方法において、 前記ワークの下方に、所定液位を超えないようにスラリ
を貯溜する貯溜槽を配置し、その貯溜槽にワークを浸漬
させるとともに、貯溜槽内にワイヤが浸漬しない状態
で、ワークの切断を行うワイヤソーによるワーク切断方
法。5. A workpiece cut by a wire saw for cutting a workpiece by running a wire spirally wound between a plurality of groove rollers, pressing a workpiece while supplying a slurry containing abrasive grains to the wire, and cutting the workpiece. In the method, a storage tank for storing slurry is arranged below the work so as not to exceed a predetermined liquid level, the work is immersed in the storage tank, and the wire is not immersed in the storage tank. Work cutting method using a wire saw for cutting.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22396995A JP3187296B2 (en) | 1995-08-31 | 1995-08-31 | Wire saw and work cutting method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22396995A JP3187296B2 (en) | 1995-08-31 | 1995-08-31 | Wire saw and work cutting method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0966521A JPH0966521A (en) | 1997-03-11 |
JP3187296B2 true JP3187296B2 (en) | 2001-07-11 |
Family
ID=16806525
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22396995A Expired - Fee Related JP3187296B2 (en) | 1995-08-31 | 1995-08-31 | Wire saw and work cutting method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3187296B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7306508B2 (en) | 2003-10-27 | 2007-12-11 | Mitsubishi Denki Kabushiki Kaisha | Multi-wire saw |
EP2723540A4 (en) * | 2011-06-23 | 2015-07-15 | Systems Automation S Pte Ltd Fa | Cutting machine and method of cutting |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6455294B2 (en) * | 2015-04-22 | 2019-01-23 | 信越半導体株式会社 | Wire saw equipment |
JP2016203321A (en) * | 2015-04-24 | 2016-12-08 | 株式会社安永 | Wire saw, and manufacturing method of manufacturing plurality of sliced articles from workpiece using wire saw |
-
1995
- 1995-08-31 JP JP22396995A patent/JP3187296B2/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7306508B2 (en) | 2003-10-27 | 2007-12-11 | Mitsubishi Denki Kabushiki Kaisha | Multi-wire saw |
EP2343155A1 (en) | 2003-10-27 | 2011-07-13 | Mitsubishi Denki Kabushiki Kaisha | Multi-wire saw |
EP2723540A4 (en) * | 2011-06-23 | 2015-07-15 | Systems Automation S Pte Ltd Fa | Cutting machine and method of cutting |
Also Published As
Publication number | Publication date |
---|---|
JPH0966521A (en) | 1997-03-11 |
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