JP3184740U - Pressing device - Google Patents

Abstract

A pressing device capable of pressing an object evenly without deviation is provided.
A pressing device 3 includes a pressing roller 4 that applies a pressing force to a pressing surface AS1 of a pressing object AS, an auxiliary roller 5 that makes a line contact or a surface contact with the pressing roller 4, and a line contact with the auxiliary roller 5. Pressure adjusting rollers 6A, 6B, and 6C capable of adjusting the pressing force in the rotation axis direction of the pressing roller 4 in surface contact, and the pressing roller 4 is provided so as to be elastically deformable with respect to the pressing object AS; The auxiliary roller 5 is provided so as to be able to be bent and deformed by the pressing force of the auxiliary roller 5. The auxiliary roller 5 is in contact with the pressing roller 4 for a distance longer than the length in the rotation axis direction where the pressing roller 4 contacts the pressing surface AS 1, and the pressing roller 4. In contrast, it is provided so that it cannot be elastically deformed, and can be bent and deformed by the pressing force of the pressure adjusting rollers 6A, 6B, 6C.
[Selection] Figure 2

Description

  The present invention relates to a pressing device.

2. Description of the Related Art Conventionally, there is known a paper feed mechanism that conveys a recording medium (press target) while being pressed between a paper feed roller and a pressure roller (pressing roller) (see, for example, Patent Document 1).
In the paper feeding mechanism described in Patent Document 1, the elastic member elastically biases both ends in the longitudinal direction of the pressing roller to press the pressing roller against the paper feeding roller, and the correction member corrects the bending of the pressing roller caused by the pressing. It is configured to correct.

JP 2005-112509 A

  However, in the paper feeding mechanism as described in Patent Document 1, when the pressing roller itself or the pressing roller surface is formed of an elastic member in order to prevent the pressing target from being damaged, the pressing force of the deflection correcting member is reduced by the pressing roller. Since it is absorbed by elastic deformation, there is a disadvantage that the deflection of the pressing roller cannot be corrected and the pressing object cannot be pressed properly. Here, as shown in FIG. 3 (A), if the axial length of the deflection correcting member 11 in the rotation axis direction is increased, the pressing force of the deflection correcting member 11 due to the elastic deformation of the pressing roller 12 is not easily absorbed. . However, as shown in FIG. 5B, the central portion of the pressing roller 12 in the rotation axis direction reaches the limit of elastic deformation and the bending is corrected, but the bending at both ends in the rotation axis direction is still not corrected. The inconvenience that the pressing object BB cannot be pressed properly cannot be eliminated.

  An object of the present invention is to provide a pressing device that can appropriately press an object to be pressed.

  In order to achieve the above object, a pressing device of the present invention includes a pressing roller that applies a pressing force to a pressing surface of an object to be pressed, an auxiliary roller that makes line contact or surface contact with the pressing roller, and a line that extends to the auxiliary roller. A pressure adjusting roller capable of adjusting a pressing force in the rotation axis direction of the pressing roller by contact or surface contact, and the pressing roller is provided to be elastically deformable with respect to the pressing object, and the auxiliary roller The auxiliary roller is in contact with the pressing roller for a distance longer than the length in the rotation axis direction where the pressing roller contacts the pressing surface, and the pressing roller of the pressure adjusting roller A configuration is adopted in which it is provided such that it can be bent and deformed by pressure.

  According to the present invention as described above, the pressing force of the pressure adjusting roller is not absorbed by the elastic deformation of the pressing roller, and the auxiliary roller is bent and deformed by the pressing force of the pressure adjusting roller. Since not only the central portion but also both end portions in the rotational axis direction reach the limit of elastic deformation and the deflection is corrected, the pressing object can be appropriately pressed.

The side view of the sheet sticking apparatus which concerns on one Embodiment of this invention. The front view of a sheet sticking apparatus. (A), (B) is explanatory drawing of the subject of this invention.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
Note that the X axis, the Y axis, and the Z axis in this embodiment are orthogonal to each other, the X axis and the Y axis are axes in a horizontal plane, and the Z axis is an axis that is orthogonal to the horizontal plane. Furthermore, in the present embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “ “Left” is the arrow direction of the X axis, “Right” is the opposite direction, “Front” is the arrow direction of the Y axis, and “Back” is the opposite direction.

  1 and 2, a sheet sticking apparatus 1 includes a supply means 2 for supplying an adhesive sheet AS as a pressing object, and a semiconductor wafer (hereinafter sometimes simply referred to as a wafer) WF having the adhesive sheet AS as an adherend. And a pressing device 3 that presses the head.

  The supply means 2 includes a support roller 21 that supports the original fabric RS in which an adhesive sheet AS whose one surface is an adhesive surface AD is temporarily attached on a strip-shaped release sheet RL, and a plurality of guides that guide the original fabric RS. The release sheet RL is provided between the roller 22, a release plate 23 as a release unit that folds the release sheet RL and peels the adhesive sheet AS from the release sheet RL, and a driving roller 25 driven by a rotation motor 24 as a drive device. And a collection roller 27 that is driven by a driving device (not shown) and collects the release sheet RL, and is entirely supported by the frame 28.

  The pressing device 3 includes a pressing roller 4 that applies pressing force to the pressing surface AS1 of the adhesive sheet AS, an auxiliary roller 5 that makes line contact or surface contact with the pressing roller 4, and a line contact or surface contact with the auxiliary roller 5 to press. The pressure adjusting unit 6 having first to third pressure adjusting rollers 6A to 6C capable of adjusting the pressing force in the rotation axis direction of the roller 4, the supporting means 7 for supporting the wafer WF, and the pressing force of the pressing roller 4 are detected. A possible pressing force detecting means 8 and a supporting means 7 are supported by a slider 91, and a moving means for moving the pressing roller 4 and the supporting means 7 relative to each other and a linear motor 9 as a driving device are provided.

The pressing roller 4 is provided so as to be elastically deformable with respect to the adhesive sheet AS, and is provided so as to be able to bend and deform by the pressing force of the auxiliary roller 5. In order to make the pressure roller 4 elastically deformable, the pressure roller 4 itself or the surface of the pressure roller 4 may be formed of an elastic member.
The auxiliary roller 5 is provided so as to be able to bend and be deformed by the pressing force of the pressure adjusting roller 6 while being in contact with the pressing roller 5 for a distance longer than the length in the rotation axis direction where the pressing roller 4 is in contact with the pressing surface AS1.
Three pressure adjusting units 6 are provided in the direction of the rotation axis of the auxiliary roller 5 and are supported by output shafts 62A to 62C of linear motion motors 61A to 61C as drive devices, and the brackets 63A to 63C. First to third pressure adjusting rollers 6A to 6C as pressure adjusting rollers that are rotatably supported by 63C via rotating shafts 60A to 60C and can adjust the pressing force of the pressing roller 4 in the rotating shaft direction, and pressing rollers 4 and direct drive motors 61D and 61E as drive devices that rotatably support the rotation shafts 41 and 51 of the auxiliary roller 5 by bearings 63D and 63E supported by output shafts 62D and 62E. By providing a plurality of pressure adjusting rollers in the direction of the rotation axis of the auxiliary roller 5, the pressing force on the adhesive sheet AS can be partially adjusted.
The first to third pressure adjusting rollers 6A to 6C and the pressing roller 4 are configured by one of a magnet (permanent magnet or electromagnet) and one containing iron that can be magnetized to the magnet, and the auxiliary roller 5 Is constituted by the other, and the first to third pressure adjusting rollers 6A to 6C and the auxiliary roller 5 are provided so that the auxiliary roller 5 and the pressing roller 4 can be magnetized to each other.
Thereby, the first to third pressure adjusting rollers 6A to 6C apply force to the pressing roller 4 in the adhesive sheet AS direction (downward direction) and in the direction opposite to the adhesive sheet AS direction (upward direction). It is possible to give power.

  The support means 7 includes an opening 72 having a rectangular shape in plan view, that is, when viewed from above, and a rectangular outer table 71 having a plurality of ribs 73 projecting inward from the opening 72, and An inner table 75 having a mounting surface 76 having a rectangular shape in plan view and capable of attracting and holding the wafer WF by suction means such as a decompression pump and a vacuum ejector, and a biasing force provided on the rib 73 to support the inner table 75 from below. And a spring 74 as means. The inner table 75 is provided so that movement in the XY plane is restricted by sliding means (not shown) and movement in the Z-axis direction is possible.

  The pressing force detecting means 8 is applied to the first detecting means 8A capable of detecting the first pressing force applied to the first end 43 side of the pressing roller 4 and the second end 44 side of the pressing roller 4. Second detection means 8B capable of detecting the second pressing force and third detection means 8C capable of detecting the third pressing force applied to the central portion 45 of the pressing roller 4 are provided. The first to third detection means 8A to 8C are first to third by first to third load cells 83A to 83C for supporting brackets 82A to 82C for rotatably supporting the rollers 81A to 81C and sliders 85A to 85C. Linear motors 84A to 84C as drive devices that support the load cells 83A to 83C are provided. The rollers 81A to 81C support the inner table 75 at their uppermost portions, and are provided so as to be movable by the linear motors 84A to 84C so that the uppermost portions are aligned along the Y axis. Yes.

In the sheet sticking apparatus 1 described above, a procedure for sticking the adhesive sheet AS to the wafer WF will be described.
First, after the operator sets the original fabric RS as shown in FIG. 1, a set value of a pressing force for pressing the adhesive sheet AS is input via an operation panel (not shown) and the operation start signal is input. Then, the supply means 2 drives the rotation motor 24 and a driving device (not shown) to feed out the original fabric RS. When the detection means (not shown) detects that the leading end of the adhesive sheet AS in the feeding direction has been peeled off by the peeling plate 23, the supply means 2 stops driving the rotation motor 24 and the driving equipment (not shown). It will be in the standby state. In addition, the space | interval of the lowest part of the press roller 4 and the mounting surface 76 is set to the thickness below the sum total of the thickness of the wafer WF, and the thickness of the adhesive sheet AS.

  Then, when the transfer means (not shown) places the wafer WF on the placement surface 76, the support means 7 drives the suction means (not shown), and after attracting and holding the wafer WF, the moving means drives the linear motor 9, The support means 7 is conveyed leftward. When the detection unit (not shown) detects that the wafer WF has reached a predetermined position, the supply unit 2 drives the rotation motor 24 and a driving device (not shown) to adjust the adhesive sheet in accordance with the conveyance speed of the wafer WF. The AS is fed out and the pressing roller 4 presses and adheres the adhesive sheet AS to the wafer WF.

Here, the pressing position 4P which is the lowermost part of the pressing roller 4 and the pressure receiving position 8P which is the uppermost part of each of the rollers 81A to 81C (only the roller 81B is shown in FIG. 1) are positioned on a straight line LZ along the Z axis. Then, as indicated by a two-dot chain line in FIG. 1, the pressing force detecting means 8 drives each of the linear motors 84A to 84C, and the pressing position 4P and the pressure receiving position 8P are not linearly displaced from each other on the straight line LZ. The sliders 85A to 85C are moved rightward with respect to the motors 84A to 84C. Then, when the adhesive sheet AS and the wafer WF are sandwiched between the pressing roller 4 and each of the rollers 81A to 81C, the first to third load cells 83A to 83C detect the first to third pressing forces, respectively. Then, the pressure adjusting unit 6 drives the direct acting motors 61A to 61C, and performs predetermined control so that the first to third pressing forces are equal to the set value.
That is, based on the first pressing force detected by the first load cell 83A, the pressure adjusting unit 6 drives the linear motion motor 61A and performs control so that the first pressing force becomes equal to the set value. Based on the second and third pressing forces detected by the second and third load cells 83B and 83C, the pressure adjusting unit 6 drives the linear motors 61B and 61C, and these second and third pressing forces are set values. Control to be equal to

Here, when the set value of the pressing force is not sufficient only by the weight of the pressing roller 4, the pressure adjusting unit 6 drives the linear motors 61D and 61E to urge the pressing roller 4 and the auxiliary roller 5 downward. Then, the first and second end portions 43 and 44 side of the pressing roller 4 is a power point, and both contact points AS2 and AS3 of the adhesive sheet AS and the pressing roller 4 serve as fulcrums, and the central portion of the pressing roller 4 serving as an action point. 45 bends in the opposite direction (upward) to the biasing direction (downward) of the linear motor 61D.
On the contrary, when the set value of the pressing force becomes excessive when the weight of the pressing roller 4 is applied, the pressure adjusting unit 6 drives the linear motion motors 61D and 61E to turn the pressing roller 4 and the auxiliary roller 5 on. Energize upward. Then, when the magnetic force between the pressing roller 4 and the auxiliary roller 5 is strong, since the first and second end portions 43 and 44 side of the pressing roller 4 are supported by the bearing 64D, the central portion 45 has no support. Will be bent upward by the magnetic force.
As described above, when the central portion 45 is bent upward, the central portion 45 reaches the limit of elastic deformation and the bending is corrected. However, the bending on the first and second end portions 43 and 44 side is Still not corrected, the third pressing force of the central portion 45 is insufficient compared to the first and second pressing forces of the first and second end portions 43 and 44.

  Even in such a situation, since the first to third load cells 83A to 83C detect the first to third pressing forces, the pressure adjusting unit 6 is not directly adjusted based on the detection data of the third load cell 83C. The dynamic motor 61C is driven, and the third pressure adjusting roller 6C is lowered. As a result, the central portion 55 of the auxiliary roller 5 is bent and deformed in the downward direction, so that the central portion 45 is similarly bent and deformed in the downward direction, and not only the central portion 45 but also the first and second portions. The end side also reaches the limit of elastic deformation, the deflection is corrected, and a pressing force can be evenly applied to the adhesive sheet AS. At this time, when the first and second pressing forces increase, the first and second pressure adjusting rollers 6A and 6B may be raised to decrease the first and second pressing forces, or the first and second pressing forces may be increased. When the pressing force decreases, the first and second pressure adjusting rollers 6A and 6B may be lowered to increase the first and second pressing forces.

  Thereafter, the wafer WF to which the adhesive sheet AS is attached is transferred to the next process by a transfer means (not shown), the inner table 75 is returned to the position shown in FIG. 1, and thereafter the same operation as described above is repeated.

  According to the embodiment as described above, the pressing force of the first to third pressure adjusting rollers 6A to 6C is not absorbed by the elastic deformation of the pressing roller 4, and the auxiliary roller 5 is set to the first to third pressure adjusting rollers 6A. By bending and deforming with a pressing force of ˜6C, not only the central portion 45 of the pressing roller 4 in the direction of the rotating shaft 41 but also the ends 43 and 44 side of the rotating shaft 41 in the direction of the elastic shaft reach the limit of elastic deformation and the bending is corrected. Therefore, the adhesive sheet AS can be pressed appropriately.

  As described above, the best configuration, method and the like for carrying out the present invention are disclosed in the above description, but the present invention is not limited to this. That is, although the present invention has been illustrated and described with particular reference to particular embodiments, it will be understood that the present invention is not limited to the above-described embodiments without departing from the scope of the technical idea and purpose of the present invention. Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description limited to the shape, material, etc. disclosed above is an example for easy understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of some or all of such limitation is included in this invention.

For example, as indicated by reference numeral AA in FIG. 1, a configuration other than the linear motion motors 61D and 61E of the pressure adjustment unit 6 and a plurality of auxiliary rollers 5 are provided in the circumferential direction of the pressure roller 4, and the rotation shaft of the pressure roller 4 is distorted. This may be prevented. In this case, the number of pressure adjusting rollers constituting the pressure adjusting unit 6 may be the same or different. Further, the pressure adjusting roller provided in the circumferential direction of the pressing roller 4 may have the same position in the direction of the rotation shaft 41 of the pressing roller 4 or may be shifted.
Further, the first to third pressure adjusting rollers 6A to 6C and the pressing roller 4 and the auxiliary roller 5 are composed of magnets having different polarities, and the first to third pressure adjusting rollers 6A to 6C are connected to the auxiliary roller 5 and the pressing roller. The roller 4 may be configured to be able to hold magnetically.
Furthermore, the first to third pressure adjusting rollers 6A to 6C may not have a function of applying a force in the direction opposite to the adhesive sheet AS direction. The third pressure adjusting rollers 6 </ b> A to 6 </ b> C may not be configured to hold the auxiliary roller 5 and the pressing roller 4, and may not be able to apply a force in the direction opposite to the adhesive sheet AS direction.
Further, one, two, or four or more pressure adjusting rollers may be provided.
Further, the peeling means may be constituted by a round bar, a roller or the like.
Further, the urging means may be composed of an elastic member such as rubber or resin.

Further, when the inner table 75 is an integrated object, for example, the pressing data of the first load cell 83A that detects the first pressing force is influenced by the third pressing force, or the third load cell 83C that detects the third pressing force. Since the pressing force data is affected by the first and second pressing forces, the inner table 75 may be formed of an elastic member such as resin, rubber, a thin metal plate, or the first and second end portions 43 and 44 side and A configuration in which the center portion 45 is divided (divided into three) may be employed.
Further, the pressing force detecting means 8 may not be provided, or only one or two of the first to third detecting means 8A to 8C may be provided.
Furthermore, the pressing force detection means 8 may be one body, two bodies, or four bodies or more.
Further, as the pressing force detection means 8, other detection means such as a pressure sensor, an optical sensor, an imaging means, etc. may be employed instead of the first to third load cells 83A to 83C.
Further, the pressing force detection means 8 may employ a linear detection means fixed in the outer table 71 parallel to the moving direction of the support means 7.
Further, a table on which a frame-shaped member is placed may be provided so as to surround the inner table 75, and the wafer WF may be raised and lowered with respect to the frame-shaped member. In this case, the sheet sticking apparatus 1 is configured so that the wafer WF and the frame-shaped member are integrated via the adhesive sheet AS.
Moreover, it is good also as a structure which supports each roller 81A-81C with the slider of one linear motor.
Further, the moving means may stop the supporting means 7 and move the pressing roller 4, the auxiliary roller 5 and the pressure adjusting section 6, or the pressing roller 4, the auxiliary roller 5, the pressure adjusting section 6 and the supporting means. 7 may be moved.

Furthermore, the adhesive sheet AS, the pressing object, the material, type, shape, and the like of the adherend in the present invention are not particularly limited. For example, the adhesive sheet AS is not limited to adhesive forms such as pressure-sensitive adhesiveness and heat-sensitive adhesiveness. When a heat-sensitive adhesive is used, an appropriate heating means for heating the adhesive sheet AS. May be provided. Such an adhesive sheet AS is, for example, a single layer having only an adhesive layer, an intermediate layer between the base sheet and the adhesive layer, a cover layer on the upper surface of the base sheet, etc. Three or more layers, or a so-called double-sided adhesive sheet that can peel the base sheet from the adhesive layer may be used. The double-sided adhesive sheet comprises a single-layer or multi-layer intermediate layer. It may be a single layer or a multilayer having no intermediate layer. Moreover, as a pressing target object, the members and articles | goods, etc. of arbitrary forms used as provision object of pressing force, such as resin for foodstuffs and a container, can also be made into object. Examples of the adherend include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit board, information recording substrates such as optical disks, glass plates, steel plates, earthenware, wood plates or resin plates, Arbitrary forms of members and articles can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes and the like can be attached to any adherend as described above.
Moreover, you may employ | adopt the press apparatus 3 for other apparatuses, such as a coating device and a test | inspection apparatus other than the sheet sticking apparatus 1. FIG. In the case of a coating apparatus or an inspection apparatus, if the pressing force applied to the object to be applied by the applying means to be applied or the pressing force applied to the object to be inspected by the inspection means to be inspected is not uniform, Although the inspection cannot be performed, by adopting the pressing device 3 in the coating device or the inspection device, it is possible to equalize the pressing force on the object to be inspected or the object to be inspected, and perform accurate application or inspection.

The means and steps in the present invention are not limited in any way as long as the operations, functions, or steps described for the means and steps can be performed. The process is not limited at all. For example, the pressing roller is not limited insofar as it applies a pressing force to the pressing surface of the object to be pressed, as long as it is within the technical range in light of the technical common sense at the beginning of the application (others). The description of the means and process is omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to these, a combination of them directly or indirectly may be employed (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 3 ... Pressing device 4 ... Pressing roller 5 ... Auxiliary roller 6A, 6B, 6C ... 1st, 2nd, 3rd pressure adjustment roller AS ... Adhesive sheet (pressing object)

Claims (1)

A pressing roller that applies a pressing force to the pressing surface of the pressing object;
An auxiliary roller that makes line contact or surface contact with the pressing roller;
A pressure adjusting roller capable of adjusting a pressing force in a rotation axis direction of the pressing roller by line contact or surface contact with the auxiliary roller;
The pressing roller is provided so as to be elastically deformable with respect to the pressing object, and is provided to be able to bend and deform by the pressing force of the auxiliary roller,
The auxiliary roller is in contact with the pressing roller for a distance longer than the length in the rotation axis direction where the pressing roller contacts the pressing surface, and is provided so as to be able to bend and deform by the pressing force of the pressure adjusting roller. A pressing device.

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