JP3178164B2 - Electroplating equipment - Google Patents

Electroplating equipment

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Publication number
JP3178164B2
JP3178164B2 JP13397393A JP13397393A JP3178164B2 JP 3178164 B2 JP3178164 B2 JP 3178164B2 JP 13397393 A JP13397393 A JP 13397393A JP 13397393 A JP13397393 A JP 13397393A JP 3178164 B2 JP3178164 B2 JP 3178164B2
Authority
JP
Japan
Prior art keywords
plated
plating
anode
plating solution
suction means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP13397393A
Other languages
Japanese (ja)
Other versions
JPH06322599A (en
Inventor
和人 赤城
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP13397393A priority Critical patent/JP3178164B2/en
Publication of JPH06322599A publication Critical patent/JPH06322599A/en
Application granted granted Critical
Publication of JP3178164B2 publication Critical patent/JP3178164B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、リードフレーム等の被
めっき物の表面に、銀やはんだ等のめっき処理を施すた
めの電解めっき装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrolytic plating apparatus for plating a surface of an object to be plated such as a lead frame with silver or solder.

【0002】[0002]

【従来の技術】リードフレーム等の被めっき物に銀やは
んだ等の表面処理を施すには、一般的に電解めっき装置
によるめっき処理が行われている。電解めっき装置は、
めっき槽内のめっき液中に配置された陽極に相対向する
状態で陰極と導通する被めっき物を配置し、めっき液中
の金属陽イオンの還元を利用して被めっき物の表面に金
属を析出させるものである。
2. Description of the Related Art In order to apply a surface treatment such as silver or solder to an object to be plated such as a lead frame, plating is generally performed by an electrolytic plating apparatus. Electroplating equipment
An object to be plated is placed in conduction with the cathode in a state opposite to the anode placed in the plating solution in the plating bath, and the metal is applied to the surface of the object using the reduction of metal cations in the plating solution. It is to be deposited.

【0003】このような電解めっき装置を用いて高速な
めっき処理を施すには、空気の圧力を利用してめっき液
を強攪拌するための攪拌機構を設けたり、めっき液中に
浸漬している被めっき物を揺動させるための揺動機構を
設けたり、また、これらを並設することで攪拌と揺動の
両方を行ったりしている。このめっき処理の高速化とと
もに重要な要件として、めっき厚の均一化が挙げられ
る。均一なめっき厚を得るためには、陽極と被めっき物
との間に遮へい板を設けたり、被めっき物の隅部等のい
わゆる高電流密度部の近傍に補助陰極を設けたりして特
定箇所への電流集中を緩和するようにしている。
In order to perform a high-speed plating process using such an electrolytic plating apparatus, a stirring mechanism for strongly stirring the plating solution using the pressure of air is provided, or the plating solution is immersed in the plating solution. A rocking mechanism for rocking the object to be plated is provided, and both are stirred and rocked by arranging them side by side. An important requirement along with the speeding up of the plating process is to make the plating thickness uniform. In order to obtain a uniform plating thickness, a shielding plate is provided between the anode and the object to be plated, or an auxiliary cathode is provided near the so-called high current density part such as a corner of the object to be plated. To reduce current concentration on

【0004】[0004]

【発明が解決しようとする課題】しかしながら、このよ
うな電解めっき装置において、高速でかつ均一なめっき
処理を施すために、揺動機構と攪拌機構、および遮へい
板と補助陰極とをそれぞれ設けると、相反する作用が生
じてしまう。つまり、高速なめっき処理を施すため攪拌
機構を用いてめっき液を強攪拌しようとしても、陽極と
被めっき物との間に設けられた遮へい板により十分な攪
拌が妨げられてしまう。また、揺動機構により被めっき
物を揺動させようとした場合、補助陰極によりその揺動
運動が制限されてしまう。このように、めっき処理を施
す場合において、処理の高速化と均一化とを同時に実現
するのは非常に困難である。
However, in such an electroplating apparatus, in order to perform a high-speed and uniform plating process, a swing mechanism and a stirring mechanism, a shielding plate and an auxiliary cathode are provided, respectively. Opposing effects occur. In other words, even if an attempt is made to vigorously stir the plating solution using a stirring mechanism in order to perform high-speed plating, sufficient stirring is hindered by the shielding plate provided between the anode and the object to be plated. Further, when the object to be plated is swung by the swing mechanism, the swinging motion is limited by the auxiliary cathode. As described above, when plating is performed, it is very difficult to simultaneously increase the speed and uniformity of the processing.

【0005】[0005]

【課題を解決するための手段】本発明はこのような課題
を解決するために成された電解めっき装置である。すな
わち、この電解めっき装置は、めっき槽内のめっき液中
に配置した陽極の近傍に陰極と導通する被めっき物を対
向配置して、被めっき物の表面に金属を析出させるもの
であり、めっき液中で被めっき物を揺動させる揺動機構
を設けるとともに、吹き出し手段を設けて被めっき物の
方向にめっき液を送り出す。さらに、吹き出し手段から
送り出されて被めっき物に当たっためっき液を引き込む
ための吸引手段を設ける。
SUMMARY OF THE INVENTION The present invention is an electrolytic plating apparatus made to solve such a problem. That is, in this electrolytic plating apparatus, an object to be plated, which is electrically connected to a cathode, is disposed in the vicinity of an anode disposed in a plating solution in a plating tank, and a metal is deposited on the surface of the object to be plated. A swing mechanism for swinging the object to be plated in the solution is provided, and a blowing means is provided to send out the plating solution in the direction of the object to be plated. Further, a suction means is provided for drawing in the plating solution sent from the blowing means and hitting the object to be plated.

【0006】また、陽極に対して被めっき物の反対側に
吹き出し手段を配置し、めっき液を陽極越しに被めっき
物に向けて送り出したり、また、網状電極から成る陽極
の場合には、この陽極に対して被めっき物の反対側に吹
き出し手段と吸引手段とを配置したりする。さらに、陽
極に対して被めっき物の反対側に吸引手段を配置し、か
つ、陽極に隣接して吹き出し手段を設け、金属陽イオン
を含むめっき液を吸引手段から引き込んで、吹き出し手
段から被めっき物に向けて送り出すようにした電解めっ
き装置でもある。
Further, a blowing means is disposed on the opposite side of the object to be plated with respect to the anode, and the plating solution is sent out toward the object to be plated through the anode. A blowing means and a suction means are arranged on the side opposite to the object to be plated with respect to the anode. Further, a suction means is disposed on the opposite side of the object to be plated with respect to the anode, and a blowing means is provided adjacent to the anode, and a plating solution containing a metal cation is drawn in from the suction means, and the plating solution is plated from the blowing means. It is also an electroplating device that sends it out to a product.

【0007】[0007]

【作用】めっき液中に配置した陽極の近傍に被めっき物
を対向配置しているため、被めっき物の隅部等のいわゆ
る高電流密度部への金属陽イオンの集中がなくなり、均
一なめっき厚が得られる。また、吹き出し手段から被め
っき物に向けてめっき液を送り出し、被めっき物に当た
っためっき液を吸引手段にて引き込むことで、陽極と被
めっき物との間のめっき液を滞留させることなく、常に
高濃度の金属陽イオンを被めっき物の近傍に送り込むこ
とができ、高速なめっき処理を施せる。
[Function] Since the object to be plated is opposed to the anode disposed in the plating solution, the concentration of metal cations on so-called high current density portions such as corners of the object to be plated is eliminated, and uniform plating is achieved. Thickness is obtained. Also, by sending the plating solution from the blowing means toward the object to be plated, and drawing in the plating solution that has hit the object to be plated by the suction means, without causing the plating solution between the anode and the object to be plated to stay, High-concentration metal cations can always be sent to the vicinity of the object to be plated, and high-speed plating can be performed.

【0008】つまり、吹き出し手段を陽極に対して被め
っき物の反対側に配置することで、めっき液を陽極越し
に送り出すことになり、高濃度の金属陽イオンを被めっ
き物に供給できる。また、これとは反対に、吸引手段を
陽極に対して被めっき物の反対側に配置することで、一
旦、高濃度の金属陽イオンを引き込んだ後に、まとめて
吹き出し手段から被めっき物側に送り出しても高濃度の
金属陽イオンを供給できることになり、高速なめっき処
理を施せるようになる。
That is, by disposing the blowing means on the opposite side of the object to be plated with respect to the anode, the plating solution is sent out over the anode, and a high concentration of metal cations can be supplied to the object to be plated. On the contrary, by disposing the suction means on the opposite side of the object to be plated with respect to the anode, once the high concentration metal cations are drawn in, the blowing means collectively moves from the blowing means to the object to be plated. A high concentration of metal cations can be supplied even if it is sent out, so that high-speed plating can be performed.

【0009】[0009]

【実施例】以下に、本発明の電解めっき装置の実施例を
図に基づいて説明する。なお、以下の説明で用いる図に
おいて、めっき液は特に図示しないが、めっき槽内に満
たされているものとする。図1は、本発明の電解めっき
装置を説明する斜視図である。すなわち、この電解めっ
き装置1は、めっき槽2内の所定のめっき液中に陽極3
を設け、この陽極3の近傍に陰極と導通するリードフレ
ーム等から成る被めっき物10を対向配置することで、
被めっき物10の表面に金属を析出させるものである。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an electrolytic plating apparatus according to the present invention will be described below with reference to the drawings. In the drawings used in the following description, the plating solution is not particularly shown, but is assumed to be filled in the plating tank. FIG. 1 is a perspective view illustrating the electrolytic plating apparatus of the present invention. That is, the electrolytic plating apparatus 1 includes an anode 3 in a predetermined plating solution in a plating tank 2.
Is provided, and an object to be plated 10 made of a lead frame or the like which is electrically connected to the cathode is disposed in the vicinity of the anode 3 so as to face each other.
The metal is deposited on the surface of the plating object 10.

【0010】被めっき物10は、搬送用バー12に取り
付けられた固定治具11により保持されている。例え
ば、リードフレームのような長尺状の被めっき物10の
場合には、その長辺部分の片側全体を保持できるクリッ
プ状の固定治具11が適しており、被めっき物10の全
体に均一な電流を流すことができるようになっている。
このような固定治具11により被めっき物10を保持
し、しかも陽極3の近傍に被めっき物10を配置するこ
とで、金属陽イオンを直線的に移動させることができ、
高電流密度部への金属陽イオンの集中を防ぐことができ
る。
The object to be plated 10 is held by a fixing jig 11 attached to a transport bar 12. For example, in the case of a long plating object 10 such as a lead frame, a clip-shaped fixing jig 11 that can hold one side of the long side portion is suitable, and is uniformly applied to the entire plating object 10. A large current.
By holding the object to be plated 10 by such a fixing jig 11 and arranging the object to be plated 10 in the vicinity of the anode 3, the metal cations can be moved linearly,
Concentration of metal cations on the high current density portion can be prevented.

【0011】また、電解めっき装置1には、例えば偏心
カムとモータとから成る揺動機構4が設けられており、
搬送用バー12と固定治具11とを介して被めっき物1
0をめっき液中で揺動できるようになっている。さら
に、めっき槽2内には、めっき液を被めっき物10に向
けて送り出すための吹き出し手段5と、吹き出し手段5
から送り出されて被めっき物10に当たりめっき処理に
関与しためっき液を引き込むための吸引手段6とが設け
られている。
Further, the electroplating apparatus 1 is provided with a swing mechanism 4 composed of, for example, an eccentric cam and a motor.
Plated object 1 via transfer bar 12 and fixing jig 11
0 can be swung in the plating solution. Further, in the plating tank 2, a blowing unit 5 for sending the plating solution toward the plating object 10, and a blowing unit 5.
And a suction means 6 for drawing in a plating solution which has been sent out of the apparatus and which has hit the object to be plated 10 and which has been involved in the plating process.

【0012】吹き出し手段5は、めっき槽2の外側に設
けられた第1予備室7につながっており、第1パイプ7
aを介して図示しないポンプとつながっている。また、
吸引手段6は、めっき槽2の外側に設けられた第2予備
室8と連通しており、第2パイプ8aを介して上記のポ
ンプとつながっている。すなわち、このポンプの作動に
より、めっき液は第1パイプ7aを介して第1予備室7
に送り込まれ、吹き出し手段5から被めっき物10に向
けて送り出される。また、めっき処理に関与しためっき
液は、吸引手段6から引き込まれて第2予備室に入り、
第2パイプ8aを介してポンプに戻る。このようにポン
プの作動によりめっき液がめっき槽2内を循環するよう
になっている。
The blowing means 5 is connected to a first preliminary chamber 7 provided outside the plating tank 2 and has a first pipe 7.
It is connected to a pump (not shown) via a. Also,
The suction means 6 communicates with a second preparatory chamber 8 provided outside the plating tank 2, and is connected to the above-mentioned pump via a second pipe 8a. That is, the operation of this pump causes the plating solution to flow through the first pipe 7a to the first preliminary chamber 7
And is sent out from the blowing means 5 toward the plating object 10. Further, the plating solution involved in the plating process is drawn from the suction means 6 and enters the second preliminary chamber,
Return to the pump via the second pipe 8a. Thus, the plating solution is circulated in the plating tank 2 by the operation of the pump.

【0013】次に、図2の斜視図を用いて本発明の電解
めっき装置1の要部を説明する。すなわち、陽極3は、
めっき槽2の対向する内側面側にそれぞれ吊り下げされ
た状態で配置され、しかも一定の間隔を開けて複数設け
られている。この対向する陽極3間に図1で示すような
リードフレーム等から成る被めっき物10を配置する。
被めっき物10を配置する場合、被めっき物10と片方
の陽極3との間隔を、例えば20mm以下の接近した状
態にすることで、陽極3から金属陽イオンの回り込みを
抑制できることになる。また、各陽極3の後ろ側には、
第1予備室7と連通する吹き出し手段5がそれぞれ設け
られており、めっき槽2内へめっき液を送り出してい
る。さらに、各陽極3の間には、第2予備室8と連通す
る吸引手段6がそれぞれ設けられており、めっき処理に
関与しためっき液を引き込むようになっている。
Next, the essential parts of the electrolytic plating apparatus 1 of the present invention will be described with reference to the perspective view of FIG. That is, the anode 3
The plurality of plating tanks 2 are arranged on the opposite inner side surfaces of the plating tank 2 in a state of being suspended, respectively, and are provided at predetermined intervals. An object to be plated 10 made of a lead frame or the like as shown in FIG.
When the object to be plated 10 is arranged, the distance between the object to be plated 10 and one of the anodes 3 is set to, for example, 20 mm or less so that the wraparound of metal cations from the anode 3 can be suppressed. Also, behind each anode 3,
Blowing means 5 communicating with the first preliminary chamber 7 is provided, respectively, and supplies the plating solution into the plating tank 2. Further, suction means 6 communicating with the second preliminary chamber 8 is provided between the anodes 3 so as to draw in a plating solution involved in the plating process.

【0014】このような電解めっき装置1を用いてめっ
き処理を施すには、先ず、固定治具11を用いてリード
フレーム等の被めっき物10を保持した状態で、搬送用
バー12を揺動機構4に取り付ける。そして、揺動機構
4を作動して被めっき物10を揺動(略円運動)させな
がら陽極3と陰極である被めっき物10との間に所定の
電流を流す。これと同時に、吹き出し手段5からめっき
液を送り出すとともに、めっき処理に関与しためっき液
を吸引手段6から引き込むようにする。
In order to perform a plating process using such an electrolytic plating apparatus 1, first, while holding an object 10 such as a lead frame using a fixing jig 11, the transport bar 12 is swung. Attach to mechanism 4. Then, a predetermined current is caused to flow between the anode 3 and the object to be plated 10 which is a cathode while the object to be plated 10 is oscillated (substantially circular movement) by operating the swing mechanism 4. At the same time, the plating solution is sent out from the blowing means 5 and the plating solution involved in the plating process is drawn in from the suction means 6.

【0015】このようなめっき処理を施す際のめっき液
の流れを図3の模式図に基づいて説明する。すなわち、
各陽極3の後ろ側(陽極3に対して被めっき物10の反
対側)に配置された吹き出し手段5から送り出されるめ
っき液は、図中矢印aに示すように陽極3越しに流れて
被めっき物10に当たる。めっき液は、陽極3越しに流
れる際に高濃度の金属陽イオンを含むことになり、これ
が被めっき物10の表面に当たるようになる。被めっき
物10の表面でめっき処理が施された後、めっき処理に
関与しためっき液は、図中矢印bに示すように吸引手段
6から引き込まれる。なお、吸引手段6の先端は、陽極
3よりもわずかに被めっき物10に近い位置に設けられ
ているため、めっき処理に関与する前のめっき液を引き
込んでしまうことはない。
The flow of the plating solution during such a plating process will be described with reference to the schematic diagram of FIG. That is,
The plating solution sent out from the blowing means 5 disposed behind each anode 3 (on the opposite side of the workpiece 10 with respect to the anode 3) flows through the anode 3 as shown by an arrow a in the drawing to be plated. Hit object 10. The plating solution contains a high concentration of metal cations when flowing through the anode 3, and this comes into contact with the surface of the workpiece 10. After the plating process is performed on the surface of the object to be plated 10, the plating solution involved in the plating process is drawn in from the suction means 6 as shown by an arrow b in the figure. Note that the tip of the suction means 6 is provided at a position slightly closer to the plating object 10 than the anode 3, so that the plating solution before participating in the plating process is not drawn.

【0016】このようなめっき液の流れにより、陽極3
と被めっき物10との間にめっき液が滞留することな
く、常に高濃度の金属陽イオンを含むめっき液を被めっ
き物10に当てることができるため、高速なめっき処理
を施せるようになる。また、陽極3と被めっき物10と
の間隔を、先に述べたように例えば20mm以下に近づ
けることで、金属陽イオンの回り込みを抑制し、均一な
めっき厚を得ることができるようになる。
Due to the flow of the plating solution, the anode 3
Since a plating solution containing a high concentration of metal cations can always be applied to the object to be plated 10 without the plating solution remaining between the object and the object to be plated 10, high-speed plating can be performed. Further, by setting the distance between the anode 3 and the object to be plated 10 close to, for example, 20 mm or less as described above, the wraparound of metal cations can be suppressed, and a uniform plating thickness can be obtained.

【0017】この電解めっき装置1による具体的なめっ
き処理として、リードフレームから成る被めっき物10
にはんだめっきを施した例を示す。被めっき物10であ
るリードフレームの大きさは、約200mm×32mm
であり、リードフレームと陽極3との間隔を20mm以
下に設定した。また、めっき液においては、Sn2+濃度
を27g/l、Pb2+濃度を3g/l、遊離酸濃度を1
80ml/l、その他の添加剤濃度を40ml/lとい
う組成のものを用いた。このめっき液の温度を30℃に
して、電流密度を40A/dm2 の電流を24秒間流し
た結果、リードフレームの表面に7〜9μmの厚さのは
んだめっきを施すことができ、その均一性も良好となっ
た。
As a specific plating process by the electrolytic plating apparatus 1, a plating object 10 composed of a lead frame is used.
Here, an example in which solder plating is performed is shown. The size of the lead frame as the object to be plated 10 is about 200 mm × 32 mm
The distance between the lead frame and the anode 3 was set to 20 mm or less. In the plating solution, the Sn 2+ concentration was 27 g / l, the Pb 2+ concentration was 3 g / l, and the free acid concentration was 1 g / l.
A composition having a composition of 80 ml / l and a concentration of other additives of 40 ml / l was used. The temperature of the plating solution was set to 30 ° C., and a current density of 40 A / dm 2 was passed for 24 seconds. As a result, the surface of the lead frame could be plated with a solder having a thickness of 7 to 9 μm. Was also good.

【0018】次に、本発明の他の実施例を図4〜図6に
基づいて説明する。図4は、他の電解めっき装置1の要
部を示す斜視図である。すなわち、この電解めっき装置
1は、陽極3として網状電極31が設けられたものであ
り、網状電極31の後ろ側に吹き出し手段5と吸引手段
6とがそれぞれ配置されている。図5は、この網状電極
31を用いた場合のめっき液の流れを説明する模式図で
ある。網状電極31を用いることにより、吹き出し手段
5から送り出されためっき液は、網の目を通過して被め
っき物10に当たり、めっき処理に関与した後に再び網
の目を通過して吸引手段6にて引き込まれる。つまり、
必要に応じて吹き出し手段5と吸引手段6とを設けて最
も効率の良いめっき液の循環を得ることができ、めっき
処理の高速化を図れることになる。
Next, another embodiment of the present invention will be described with reference to FIGS. FIG. 4 is a perspective view showing a main part of another electrolytic plating apparatus 1. That is, the electroplating apparatus 1 is provided with a mesh electrode 31 as the anode 3, and the blowing means 5 and the suction means 6 are arranged behind the mesh electrode 31. FIG. 5 is a schematic diagram illustrating the flow of a plating solution when the mesh electrode 31 is used. By using the reticulated electrode 31, the plating solution sent from the blowing means 5 passes through the mesh and hits the object 10 to be plated. Pulled in. That is,
By providing the blowing means 5 and the suction means 6 as necessary, the most efficient circulation of the plating solution can be obtained, and the plating process can be speeded up.

【0019】また、図6は、上記以外の例のめっき液の
流れを説明する模式図である。すなわち、この電解めっ
き装置1は、各陽極3の後ろ側に吸引手段6が配置され
ているとともに、各陽極3の間にそれぞれ吹き出し手段
5が設けられたものである。この電解めっき装置1で
は、陽極3の近傍に存在する高濃度の金属陽イオンを一
旦吸引手段6にて引き込み(図中矢印b)、図示しない
リザーブタンク等に蓄積した後、高濃度の金属陽イオン
を含むめっき液を吹き出し手段5から被めっき物10に
向けて送り出している(図中矢印a)。このようなめっ
き液の流れにより、高濃度の金属陽イオンを有するめっ
き液を常に被めっき物10に当てることができ、めっき
処理の高速化を図ることができる。
FIG. 6 is a schematic diagram for explaining the flow of the plating solution in an example other than the above. That is, in the electroplating apparatus 1, the suction means 6 is disposed behind each anode 3, and the blowing means 5 is provided between each anode 3. In the electroplating apparatus 1, high concentration metal cations present near the anode 3 are once drawn by the suction means 6 (arrow b in the drawing) and accumulated in a reserve tank (not shown) or the like. A plating solution containing ions is sent from the blowing means 5 toward the plating object 10 (arrow a in the figure). By such a flow of the plating solution, the plating solution having a high concentration of metal cations can be constantly applied to the object to be plated 10, and the speed of the plating process can be increased.

【0020】なお、本実施例においては、被めっき物1
0として主にリードフレームを用いた場合について説明
したが、本発明はこれに限定されることはない。また、
陽極3や吹き出し手段5、および吸引手段6をそれぞれ
複数設けた例について示したが、被めっき物10の大き
さに応じてそれぞれ設定すればよい。
In this embodiment, the object to be plated 1
Although a case where a lead frame is mainly used as 0 has been described, the present invention is not limited to this. Also,
Although an example in which a plurality of anodes 3, blowing means 5, and suction means 6 are provided has been described, each may be set according to the size of the workpiece 10.

【0021】[0021]

【発明の効果】以上説明したように、本発明の電解めっ
き装置によれば次のような効果がある。すなわち、陽極
の近傍に被めっき物を配置することにより、高電流密度
部付近への金属陽イオンの集中を抑制できるため、均一
なめっき厚を得ることが可能となる。さらに、被めっき
物の揺動するとともに、吹き出し手段からめっき液を被
めっき物に向けて送り出し、めっき処理に関与しためっ
き液を吸引手段により引き込むことでめっき液の滞留か
無くなり、常に高濃度の金属陽イオンを被めっき物に供
給できるため高速なめっき処理を施すことが可能とな
る。これらのことから、めっき厚の均一化とめっき処理
の高速化の両立を果たすことができる。
As described above, the electrolytic plating apparatus of the present invention has the following effects. That is, by arranging the object to be plated in the vicinity of the anode, the concentration of metal cations in the vicinity of the high current density portion can be suppressed, so that a uniform plating thickness can be obtained. Furthermore, while the object to be plated swings, the plating solution is sent out from the blowing means toward the object to be plated, and the plating solution involved in the plating process is drawn in by the suction means. Since metal cations can be supplied to the object to be plated, high-speed plating can be performed. From these facts, it is possible to achieve both uniform plating thickness and high-speed plating.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の電解めっき装置を説明する斜視図であ
る。
FIG. 1 is a perspective view illustrating an electrolytic plating apparatus according to the present invention.

【図2】本発明の電解めっき装置の要部斜視図である。FIG. 2 is a perspective view of a main part of the electrolytic plating apparatus of the present invention.

【図3】めっき液の流れを説明する模式図(その1)で
ある。
FIG. 3 is a schematic diagram (part 1) illustrating a flow of a plating solution.

【図4】他の電解めっき装置の要部斜視図である。FIG. 4 is a perspective view of a main part of another electrolytic plating apparatus.

【図5】めっき液の流れを説明する模式図(その2)で
ある。
FIG. 5 is a schematic diagram (part 2) illustrating the flow of a plating solution.

【図6】めっき液の流れを説明する模式図(その3)で
ある。
FIG. 6 is a schematic diagram (part 3) illustrating the flow of a plating solution.

【符号の説明】[Explanation of symbols]

1 電解めっき装置 2 めっき槽 3 陽極 4 揺動機構 5 吹き出し手段 6 吸引手段 7 第1予備室 8 第2予備室 10 被めっき物 11 固定治具 12 搬送用バー DESCRIPTION OF SYMBOLS 1 Electroplating apparatus 2 Plating tank 3 Anode 4 Swinging mechanism 5 Blowing means 6 Suction means 7 First preliminary chamber 8 Second preliminary chamber 10 Plated object 11 Fixing jig 12 Transport bar

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 めっき槽内のめっき液中に配置した陽極
の近傍に、陰極と導通する被めっき物を対向配置して、
該被めっき物の表面に金属を析出させる電解めっき装置
であって、 前記めっき液中で前記被めっき物を揺動するための揺動
機構と、 前記被めっき物に向けて前記めっき液を送り出すための
吹き出し手段と、 前記吹き出し手段から送り出されて前記被めっき物に当
たっためっき液を引き込むための吸引手段とから成るこ
とを特徴とする電解めっき装置。
Claims: 1. An object to be plated, which is electrically connected to a cathode, is disposed in the vicinity of an anode disposed in a plating solution in a plating tank, and is opposed to the anode.
An electroplating apparatus for depositing a metal on a surface of the object to be plated, comprising: a swing mechanism for swinging the object to be plated in the plating solution; and sending the plating solution toward the object to be plated. And a suction means for drawing in a plating solution sent from the blowing means and hitting the object to be plated.
【請求項2】 前記吹き出し手段は、前記陽極に対して
前記被めっき物の反対側に配置され、前記めっき液を該
陽極越しに該被めっき物に向けて送り出していることを
特徴とする請求項1記載の電解めっき装置。
2. The method according to claim 1, wherein the blowing unit is disposed on the opposite side of the object to be plated with respect to the anode, and sends out the plating solution toward the object to be plated through the anode. Item 2. The electrolytic plating apparatus according to Item 1.
【請求項3】 前記陽極が網状電極から成り、該陽極に
対して前記被めっき物の反対側に前記吹き出し手段と前
記吸引手段とが配置されていることを特徴とする請求項
1記載の電解めっき装置。
3. The electrolysis according to claim 1, wherein said anode comprises a mesh electrode, and said blowing means and said suction means are arranged on a side of said anode opposite to said object to be plated. Plating equipment.
【請求項4】 前記吸引手段が前記陽極に対して前記被
めっき物の反対側に配置され、かつ、前記吹き出し手段
が該陽極に隣接して設けられており、金属陽イオンを含
む前記めっき液を該吸引手段から引き込んで、該吹き出
し手段から該被めっき物に向けて送り出していることを
特徴とする請求項1記載の電解めっき装置。
4. The plating solution according to claim 1, wherein the suction means is disposed on the opposite side of the object to be plated with respect to the anode, and the blowing means is provided adjacent to the anode, the plating solution containing a metal cation. 2. The electrolytic plating apparatus according to claim 1, wherein the gas is drawn from the suction means and sent out from the blowing means toward the object to be plated.
JP13397393A 1993-05-12 1993-05-12 Electroplating equipment Expired - Fee Related JP3178164B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13397393A JP3178164B2 (en) 1993-05-12 1993-05-12 Electroplating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13397393A JP3178164B2 (en) 1993-05-12 1993-05-12 Electroplating equipment

Publications (2)

Publication Number Publication Date
JPH06322599A JPH06322599A (en) 1994-11-22
JP3178164B2 true JP3178164B2 (en) 2001-06-18

Family

ID=15117407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13397393A Expired - Fee Related JP3178164B2 (en) 1993-05-12 1993-05-12 Electroplating equipment

Country Status (1)

Country Link
JP (1) JP3178164B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5795514B2 (en) * 2011-09-29 2015-10-14 アルメックスPe株式会社 Continuous plating equipment

Also Published As

Publication number Publication date
JPH06322599A (en) 1994-11-22

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