JP3176409B2 - Electrical property evaluation device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for evaluating electric characteristics. More specifically, the present invention relates to an electrical characteristic evaluation apparatus for evaluating in-plane uniformity of an object to be measured among electric characteristics of the object to be measured and selecting an object to be measured that satisfies a standard.

[0002]

2. Description of the Related Art Conventionally, in a disk-shaped product such as a zinc oxide lightning arrester element, variations in electrical characteristics between a central portion and a peripheral portion due to a variation in particles in a manufacturing process, etc. In some cases, it is necessary to examine electrical characteristics.

FIG. 4 is a schematic explanatory view of an electric characteristic evaluation apparatus conventionally used in such a case. In the figure, reference numeral 50 denotes an object to be measured, 21 denotes an upper metal terminal electrode, and 22 denotes a lower metal terminal electrode.

With this apparatus, the lower metal terminal electrode 22 is pressed against the lower surface of the device under test 50 and brought into contact therewith, and the upper metal terminal electrode 21 is brought into contact with a position facing the lower metal terminal electrode 22. These electrodes are shown in FIG.
As shown in FIG.
And a voltmeter 70 in parallel. A constant current of, for example, 1 mA is passed between the metal terminal electrodes 21 and 22 and the voltage between the metal terminal electrodes at this time is measured. Once data at a certain point on the device under test 50 is obtained, the metal terminal electrodes 21 and 22 are removed from the device under test 50 to obtain data at another point. The metal terminal electrodes 21 and 22 are brought into contact with the measurement point position, and 1 mA is supplied again to measure the voltage between the metal terminal electrodes. Thus, as shown in FIG. 6, the voltage between the metal terminal electrodes at each measurement point (1, 2, 3,...) Is obtained.

From the position and voltage data obtained in this manner, a voltage distribution is obtained based on, for example, a graph showing a voltage change with respect to the position as shown in FIG.

[0006]

In the above-described conventional electrical characteristic evaluation apparatus, since there is only one pair of metal terminal electrodes, if the number of measurement points is increased in order to accurately determine the in-plane distribution,
Since the measurement must be performed by moving the object to be measured or the pair of electrodes each time, there is a problem that the measurement requires a lot of time and labor.

[0007] In addition, these DUTs that satisfy the characteristic distribution may be used singly or may be used in a state where a large number of them are stacked in series (hereinafter, referred to as a series body). It is necessary to optimally select a combination so as to cancel out manufacturing variations of each one and eliminate unevenness of in-plane distribution in the entire series body and fall within a predetermined variation range. Therefore, there is a problem that it takes a lot of time and effort to select an optimum sample from the conventional individual data.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and accurately and quickly measures electric characteristics of a plurality of objects to be measured at a plurality of points, and optimally selects N pieces in a series body. It is an object of the present invention to provide a device capable of evaluating electrical characteristics.

[0009]

An electric characteristic evaluation apparatus according to the present invention comprises a plurality of sets of metal terminal electrodes opposed to each other across a device under test, and a power supply connected to a pair of metal terminal electrodes sandwiching the device under test. Between the power supply and each of the plurality of sets of metal terminal electrodes, and a pair of terminal switches for switching and connecting to the plurality of sets of metal terminal electrodes, and a measurement for measuring electrical characteristics generated between the pair of metal terminal electrodes. And a processing device that controls the terminal switcher and the power supply and captures the output of the measuring device.

[0010]

The electrical characteristic evaluation device of the present invention can measure the electrical characteristics of each location by sequentially switching a plurality of sets of opposing metal terminal electrodes by means of a terminal switch, and can measure quickly.

Further, by providing the sorting device, it is possible to make uniform the electrical characteristics of a series body in which a plurality of objects to be measured are stacked, and to obtain a combination of the objects to be measured satisfying the specifications in a short time.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a block diagram showing an electric characteristic evaluation apparatus according to one embodiment of the present invention. In the figure, 11
(11a, 11b, 11c, 11d) are the upper metal terminal electrodes of the DUT 50, and 12 (12a, 12b, 12c, 12d) are the DUTs at positions opposed to the upper metal terminal electrodes 11, respectively. The lower metal terminal electrodes arranged with 50 interposed therebetween are held by holding plates 41 and 42, respectively. 31, 32 are a plurality of metal terminal electrodes 11a, 11b, 11c, 11d, respectively.
Any one of 12a, 12b, 12c and 12d and the constant current device 60
This is a terminal switch for switching the connection with the terminal. 70 is a voltmeter, 80 is a processing device using a computer, 81 is an instruction from the processing device 80, a controller for turning on and off the constant current device 60, 82 is an instruction from the processing device 80, and a metal terminal electrode. A controller that drives the terminal switches 31 and 32 of 11 and 12 and 83 is an output device.

In order to examine the electrical characteristics of the device under test with this electrical characteristic evaluation apparatus, first, the device under test 50 is arranged between the metal terminal electrodes 11 and 12. In this way, the DUT 50
A plurality of sets of metal terminal electrodes 11, arranged at positions to be measured,
12 comes into contact with the device under test 50.

Next, a processing device 80 using a computer
Sends a signal to the terminal switches 31 and 32 via the controller 82 to connect to the metal terminal electrodes 11a and 12a. Next, a power-on signal is sent from the processing device 80 to the controller 81. The controller 81 supplies a constant current of 1 mA from the constant current device 60 between the metal terminal electrodes 11a and 12a.
The voltage ( _V1mA ) generated between the terminals is measured.
The measured values are input to the processing device 80. Next, the processing device 80
Sends a signal to turn off the power to the controller 81, and at the same time, sends a signal to the terminal switches 31 and 32 via the controller 82 to connect to the metal terminal electrodes 11b and 12b. Next, a power-on signal is sent from the processing device 80 to the controller 81.
The controller 81 supplies a constant current of 1 mA from the constant current device 60 between the metal terminal electrodes 11b and 12b, and the voltmeter 70 measures the voltage (V1 _mA ) generated between the terminals. The measured values are input to a processing device 80 using a computer.

The above operation is repeated in the same manner to
, The voltage (V _{1 mA} ) distribution of the device under test 50 as shown in FIG.

The horizontal axis of the graph of FIG. 3 represents the distance from the center of the object to be measured in the radial direction, r (distance from the center) /
R (radius of the object to be measured), and the vertical axis is based on the minimum value (Vmin) of the measured voltage (V1 _mA ).

[0017]

(Equation 1) It is indicated by the value obtained by

In this evaluation example, the constant current is selected to be 1 mA. However, the constant current may be more or less than 1 mA as long as the electric characteristics of the device under test 50 do not change and the reproducibility of the measured voltage is good.

In this way, as shown in FIG. 6, in order to know the in-plane distribution of the object to be measured, data of measurement points 1 to 32 (the number of measurement points is changed as necessary) is processed by the processing unit 80.
To record. In this way, data of a large number of devices under test are recorded.

The characteristics of the device under test generally vary in production. Therefore, when the measured object is used alone, the sample No. whose measurement data is less than the reference value is used. Is output from the output device 83 and used. On the other hand, when measuring objects having variations are stacked in series and used in a series, it is necessary to reduce the non-uniformity of the in-plane distribution of the entire series using this data. In order to compare and sort with such a reference value, as shown in FIG.
Sorting is performed by a sorter 84 connected to 80. This sorting method will be described in detail.

Sample No. Is denoted by i, the measurement position is denoted by j, and the measurement data at the position j of the sample i is denoted by Vi, j. Now N
It weights the number of stand-alone in series to the series body. At this time ,
The data at the position j is obtained by equation (1).

[0022]

(Equation 2) Where V in formula (1) (j) becomes data in position j of the series connection body, equal in number to the number j of measurement points.

It is assumed that the maximum value of V (j) is V (j) max and the minimum value of V (j) is V (j) min. A parameter U for evaluating nonuniformity is defined by the following equation (2).

[0024]

(Equation 3) It can be said that the smaller this U is, the smaller the nonuniformity is.

Now, it is assumed that data of M (M> N) objects to be measured are input to the processing device 80 using a computer. The required specifications for a series body composed of N single bodies are determined as: Reference voltage of the series body : V0 V0 allowable value: ΔV0 Allowable non-uniformity: F, and satisfy the following equations (3) to (5) The combination is sorted by the sorting means of the processing device 80 or the sorter 84 to select an optimal series.

V0−ΔV0 ≦ V (j) min (3) V (j) max ≦ V0 + ΔV0 (4) U ≦ F (5) Using the selector 84, select N from the M objects to be measured. In the following, a selection means for forming a series body and reducing non-uniformity of in-plane electrical characteristics of the series body will be described below. The number and L of the measurement points are determined and set according to the size of the object to be measured. The number of measurement points is determined by the processing accuracy of the object to be measured. For example, in the case of a metal oxide object, measurement is performed at intervals of 10 mm. The voltage of a single unit is measured, and the data is input from the processing device. Compare with the reference value of the judgment formula for a single unit,
Collect M that passed. The number of combinations ( _{M CN} ) selected from N out of _M is compared with the reference values of the discriminants (3) to (5) for the series for which V (j) is calculated, and the combinations satisfying the discriminant The combinations satisfying the discriminant are output to the output device 83 in ascending order of the parameter U for selecting.

When a single unit is selected using the separator 84, the measured data of the single unit is compared with a reference value, and the sample No. Is output by the output device 83.

In the above-described embodiment, an example has been described in which the controllers 81 and 82 are configured separately from the processing device 80. However, the functions may be provided in the processing device 80 using a computer. Further, the sorting device of the embodiment shown in FIG. 2 can also be provided with the function of the processing device 80 using a computer.

In the above-described embodiment, the description has been made of the control of the standard and the variation by focusing on the voltage characteristic of the device under test. However, other characteristics such as measuring the current characteristic by connecting a constant voltage device are described. The present invention can be applied to the case where a sorting operation for reducing the standard and the variation of the characteristics is required. Therefore, a power supply device other than the constant current device can be connected according to the purpose, and a measuring device other than the voltmeter can be connected according to the purpose.

[0030]

As described above, according to the present invention, a terminal switch which can switch a plurality of sets of metal terminal electrodes is provided, so that there is an effect that measurement can be performed quickly.

Further, since the selector for selecting a combination of the DUTs satisfying the specifications of the electrical characteristics is provided, there is an effect that the operation of selecting a plurality of stacked series members from the DUTs can be performed in a short time.

[Brief description of the drawings]

FIG. 1 is a block diagram illustrating an electric characteristic evaluation apparatus according to an embodiment of the present invention.

FIG. 2 is a block diagram of an embodiment of an electrical characteristic evaluation device incorporating a selector according to the present invention.

FIG. 3 is a diagram showing a voltage (V _{1 mA} ) distribution of an object to be measured.

FIG. 4 is a schematic explanatory view of an electrode section of a conventional electrical characteristic evaluation device.

FIG. 5 is a schematic explanatory view of a conventional electrical characteristic evaluation device.

FIG. 6 is a diagram illustrating an example of a measurement position of an object to be measured.

[Explanation of symbols]

 11, 12 Metal terminal electrode 31, 32 Terminal switch 50 Device under test 60 Constant current device 70 Voltmeter 80 Processing device 84 Sorter

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-2-245673 (JP, A) JP-A-3-230501 (JP, A) JP-A-4-80666 (JP, A) 172773 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) G01R 31/00 G01R 27/00-27/32 G01N 27/00-27/24 H01C 7/12

Claims (1)

(57) [Claims] 1. A plurality of sets of metal terminal electrodes facing each other across a device under test, a power supply connected to a pair of metal terminal electrodes across the device under test, and a power supply and each of the plurality of sets of metal terminal electrodes. In the meantime, a pair of terminal switches that are switched and connected to a plurality of sets of metal terminal electrodes, a measuring device that measures electric characteristics generated between the pair of metal terminal electrodes, and a terminal switch and a power supply are controlled. the output of the measuring device an electric characteristic evaluation apparatus and a processor for capturing the electrical characteristic data, rows of electrical characteristics data capture for M DUT
No, the electrical characteristic data at the position j of each DUT is
V (j) is the sum total of the measured objects (M> N)
Where, for a plurality of measurement positions j, the maximum value V (j) max of V (j) and the minimum value V (j) min of V (j)
Is within the range of the allowable value ± ΔV0 with respect to the reference voltage V0.
Ri, and, U = (V (j) max-V (j) min) / V (j) non-uniformity U is predetermined allowable unevenness than that represented by min
An electrical characteristic evaluation device having a selector for selecting N from the M objects to be measured so as to be inside .