JP3171926B2 - Method for manufacturing L-type thermocouple device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing an L-type thermocouple device, and more particularly, to a method for manufacturing an L-type thermocouple device having high accuracy and easy manufacture.

[0002]

2. Description of the Related Art Conventionally, thermocouples have been used by being sealed in a glass tube, and a method of manufacturing a linear thermocouple device includes a linear thermocouple device having one end sealed. In a glass tube, a thermocouple (eg,
A Pt wire and a PtRh wire are inserted into an insulating tube.

In the case of an L-type thermocouple device, if the curvature is large, a thermocouple metal wire is inserted into an insulated tube made of an insulated short tube into a curved glass tube having one end sealed. Can be manufactured by inserting a thermocouple. In this case, by configuring the insulating tube with a large number of insulating short tubes, the thermocouple can be formed by bending even at the bent portion of the glass tube.

However, when an L-type thermocouple device having a small curvature (for example, R is 5R to 15R, that is, a radius of less than 15 mm) is manufactured by inserting a thermocouple into a curved glass tube, a large number of processes are required. There is a problem in that it is difficult or impossible to insert the thermocouple formed of the insulating tube short tube to the sealed glass tube tip. For example, when manufacturing an L-shaped thermocouple device bent at 90 degrees, the glass tube has an opening at one end and has a long linear portion sealed, and the other end of the linear portion has a length of 90 degrees. Prepare a glass tube that is bent every time and has an opening at the other end through a short straight line portion, while the thermocouple,
A thermocouple, in which a thermocouple metal wire is inserted in a tube, is prepared for an insulating tube including a long straight portion, an insulating short tube inserted into the bent portion, and an insulating long tube of the short straight portion. It is manufactured by inserting a thermocouple into the glass tube opening from the side of the insulated short tube, but it is difficult to insert the insulated short tube until it is inserted into the long straight part through the bent part. In many cases.

Therefore, conventionally, in the manufacture of an L-shaped thermocouple device having a small curvature, a metal wire for a thermocouple is inserted into an insulating tube composed of two kinds of glass tubes pre-bent and a short tube of an insulating tube. An L-type thermocouple device is manufactured using the thermocouple thus obtained (see FIG. 1).

As a specific example, one straight tube made of glass whose one end is sealed and one bent tube made of glass which is opened at both ends and bent at 90 degrees in the middle are prepared. A thermocouple is inserted from one end of the tube, a thermocouple is taken out from the other end, and the thermocouple is inserted into the straight tube through the opening. After the insertion, the two types of glass tubes are welded and connected to produce one L-type thermocouple device. According to this method, by inserting a thermocouple into two types of glass tubes and then welding the openings of the two types of glass tubes to each other, an L-type thermocouple having a curved portion with a small curvature, for example, 90 degrees. The device can also be easily manufactured.

However, in this method, the melting of the two types of glass tubes involves heating the joint with a burner. At that time, the thermocouple inserted into the joining portion uses a metal wire, such as Pt, in the insulating tube. In some cases, the characteristics may be degraded due to heating of the wire or the Pt-Rh wire, and a measurement temperature error may occur. That is, the Pt wire and the Pt-Rh wire in the insulating tube are exposed to the flame of the burner at the time of welding and melt from the gap between the insulating tube short tubes, so that the Pt wire and the Pt-Rh wire are used for temperature measurement. May become smaller than the specified 0.5 mmΦ, which may cause a measurement temperature error. When the burner is used, impurities (for example, soot) adhere to the insulating tube, so that contamination in the glass tube may occur. In order to produce L-shaped thermocouples corresponding to various curvatures and lengths that occur, it is necessary to prepare glass tubes of various sizes, but having inventory stock has disadvantages in production and location problems. Welding of glass tubes requires skill, welding is not performed or the connection is displaced, causing a decrease in yield. Fast production No, there is a problem that equal.

[0008] The present invention has been made in view of the above circumstances, and an object of the present invention is to solve the conventional problems. That is, an object of the present invention is to provide an L
An object of the present invention is to provide a method of manufacturing an L-type thermocouple device which can be easily manufactured in the manufacture of a thermocouple device, has no temperature measurement error, and has no production disadvantage.

[0009]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention is directed to an L-shape having a straight portion provided with an opening at one end and a curved portion provided at the other end of the straight portion. A thermocouple consisting of a pair of dissimilar metal wires inserted in a state insulated from the insulating long tube and the plurality of insulating short tubes in the opening of the glass tube is inserted from the insulating short tube side, and After arranging the thermocouple so that the insulating short tube is located in the component, the linear portion or opening slightly ahead of the tip of the thermocouple arranged in the linear portion is sealed. This is a method for manufacturing an L-type thermocouple device.

[0010]

According to the present invention having the above-described structure, when manufacturing an L-type thermocouple device, a thermocouple is inserted from the opening on the straight portion side of the glass tube, and the thermocouple is arranged at a predetermined position. Seal the tube.

Since the insulating tube is composed of an insulating long tube and an insulating short tube, a thermocouple is inserted into the glass tube bent portion by inserting a thermocouple from the insulating short tube side. The short insulating tube can be inserted so that the long insulating tube is located in the straight portion of the glass tube.

In addition, since the insulating tube short tube is located at the bent portion, a thermocouple having a desired curvature can be manufactured. In addition, since the insulating tube is composed of two types of long insulating tube and short insulating tube, it is difficult to insert the intermediate tube when inserting only a large number of conventional short tubes. Can be prevented and can be easily inserted.

After the insertion is completed, the glass tube is sealed by fusing the straight portion or opening of the glass tube slightly ahead of the tip of the thermocouple disposed in the inserted straight portion of the glass tube. Can be. Since the sealed part is the glass tube part ahead of the thermocouple tip, the measurement temperature error does not affect the thermocouple at the time of sealing and the characteristics of the metal wire in the insulating tube do not deteriorate. Never invite.

[0014] Unlike welding, welding can reduce the adhesion of impurities in the insulating tube. In addition, welding can be performed more easily than welding, and an L-type thermocouple device excellent in accuracy can be quickly manufactured.

Since the glass tube can be formed to have a straight portion having an arbitrary length, when manufacturing an L-type thermocouple device, the glass tube should be made in accordance with the desired length of the thermocouple of the straight portion. By sealing the tubes, L-type thermocouple devices of various sizes can be easily manufactured.

[0016]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the method of the present invention will be described below in detail. This embodiment is a method of manufacturing a thermocouple device for vertical CVD. First, a glass tube for an L-type thermocouple is prepared. FIG.
Fig. 2 shows a vertical glass tube for a thermocouple for CVD.

The glass tube 1 has an opening 5 at one end and a straight portion 2. The other end of the straight portion 2 has a bent portion 3 bent at 90 degrees, and the bent portion 3 passes through the straight portion 4,
At the other end, an opening 6 is provided. The length of the straight portion 2 is arbitrary. The composition of the glass tube 1 is not particularly limited as long as it is a quartz tube. In this embodiment, a low alkali transparent quartz tube is used.

Next, a thermocouple is prepared. The thermocouple is configured by inserting a pair of different metal wires for a thermocouple into an insulating tube. The thermocouple metal wire may be any thermocouple metal wire, and is not particularly limited. In this embodiment, Pt
-A metal wire for thermocouple combining PtRh is used. FIG. 2 shows a vertical type thermocouple for CVD.

The thermocouple 10 is composed of a Pt-PtRh wire 9 which is inserted through one insulating long pipe 11 and a plurality of short insulating pipes 12 while being insulated from each other. The material of the insulation tube is
Ceramics, for example, 99/8% alumina.

The long insulating tube 11 is a straight insulating tube slightly shorter than the length of the straight portion 2 of the predetermined L-type thermocouple glass tube. The number of insulated short tubes 12 comprises any number sufficient to be placed at the bend in the glass tube.

The Pt-PtRh wire 9 is inserted through a through hole 13 penetrating into the insulating tube, and is disposed so as to be connected at the end on the side of the linear portion of the insulating tube. In order to insert the thermocouple 10 into the glass tube 1, the straight-portion-side opening 5
Then, the insulating short tube 12 in the thermocouple 10 is inserted.

By inserting the thermocouple 10 from the side of the insulated short tube 12, the insulated short tube 12 becomes a tip, and is inserted along the glass tube in order, and the bent portion 3 where the glass tube is bent at a right angle. The insulated short tube 12 is inserted into the tube, and the thermocouple can be bent along the bent portion of the glass tube. The insertion of the thermocouple 10 is performed until the short insulating tube 12 is disposed in the bent portion 3 of the glass tube and the long insulating tube 11 is disposed in the straight portion 2 of the glass tube (see FIG. 3).

After the insertion, the straight tube 2 or the glass tube opening 5 slightly ahead of the tip of the thermocouple 10 arranged in the straight glass tube 2 is melt-sealed.
Is sealed. Since the sealing portion is located before the thermocouple, the sealing for the heating can be performed without affecting the thermocouple at all. As mentioned above, although one Example of this invention was described, this invention is not limited to the said Example .

[0024]

According to the method of the present invention, the insertion of the insulating tube into the L-shaped glass tube and the sealing of the glass tube portion are easy, and the L-type thermocouple device can be easily manufactured. Further, it is possible to provide a highly accurate L-type thermocouple device which does not cause deterioration in characteristics of the thermocouple due to heating at the time of sealing and can prevent occurrence of a measurement temperature error.

[Brief description of the drawings]

FIG. 1 shows a vertical C which is an embodiment of the method of the present invention.
It is explanatory drawing of the glass tube for thermocouples for VD.

FIG. 2 shows an embodiment of the method of the present invention,
It is explanatory drawing of the thermocouple for VD.

FIG. 3 shows an embodiment of the method of the present invention,
It is insertion explanatory drawing of the thermocouple for VD in a glass tube.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Glass tube 2 Glass tube straight part 3 Glass tube bent part 4 Glass tube straight part 5 Glass tube opening 6 Glass tube opening 9 Metal wire for thermocouples 10 Thermocouple 11 Insulated long tube 12 Insulated short tube 13 Through hole

──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Nobuyuki Ikeda 232 Tobukicho, Hachioji-shi, Tokyo Nippon Fuen All Co., Ltd. Inside the Hachioji Center (72) Inventor Hiroaki Iwagaya 232 Tobukicho, Hachioji-shi, Tokyo Nihon Fuen All Co., Ltd. Hachioji Center (72) Inventor Tomonao Nakazawa 232 Tobuki-cho, Hachioji-shi, Tokyo Nippon Fuen All Co., Ltd. Hachioji Center (58) Fields investigated (Int. Cl. ⁷ , DB name) G01K 7/02

Claims (1)

(57) [Claims] 1. An L-shaped glass tube having a straight portion provided with an opening at one end and a bent portion provided at the other end of the straight portion is provided with an insulating long tube and a plurality of insulating shorts. A thermocouple made of a pair of dissimilar metal wires inserted in a state of being insulated from each other with a tube is inserted from the side of the insulated short tube, and the thermocouple is arranged so that the insulated short tube is located in the bent portion. And then sealing the linear portion or opening slightly ahead of the tip of the thermocouple disposed in the linear portion.