JP2633168B2 - Fluid heater - Google Patents
Fluid heaterInfo
- Publication number
- JP2633168B2 JP2633168B2 JP5069131A JP6913193A JP2633168B2 JP 2633168 B2 JP2633168 B2 JP 2633168B2 JP 5069131 A JP5069131 A JP 5069131A JP 6913193 A JP6913193 A JP 6913193A JP 2633168 B2 JP2633168 B2 JP 2633168B2
- Authority
- JP
- Japan
- Prior art keywords
- heat
- thermocouple
- heating coil
- sensitive
- fluid heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Control Of Resistance Heating (AREA)
- Resistance Heating (AREA)
- Control Of Temperature (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は流体加熱ヒーター、特に
加熱すべき流体を通過せしめる中心孔を有するパイプ状
の流体加熱ヒーターに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid heater, and more particularly to a pipe-shaped fluid heater having a central hole through which a fluid to be heated passes.
【０００２】[0002]
【従来の技術】図３は従来の流体加熱ヒーターを示し、
１は例えば外径１１ｍｍ、内径９ｍｍの石英パイプ、２
はこの石英パイプ１上にスペース巻きした鉄クロムアル
ミ線等の発熱コイル、３はそのリード線、４は熱電対、
例えばアルメル、クロメル熱電対、５はその感熱部であ
る。2. Description of the Related Art FIG. 3 shows a conventional fluid heater.
1 is a quartz pipe having an outer diameter of 11 mm and an inner diameter of 9 mm, for example.
Is a heating coil such as an iron-chromium aluminum wire wound in space on the quartz pipe 1, 3 is its lead wire, 4 is a thermocouple,
For example, alumel and chromel thermocouples and 5 are the heat-sensitive portions.
【０００３】このような従来の流体加熱ヒーターにおい
ては、上記石英パイプ１の外周面上に、上記発熱コイル
２の端部から僅か離して上記熱電対４の感熱部５を無機
接着剤６で固定し、この熱電対４によって検出した温度
に応じて上記発熱コイル２に流す電流を制御し、発熱コ
イル２が過熱して断線しないように制御している。In such a conventional fluid heater, the heat-sensitive portion 5 of the thermocouple 4 is fixed on the outer peripheral surface of the quartz pipe 1 with an inorganic adhesive 6 slightly apart from the end of the heating coil 2. and controls the current supplied to the heating coil 2 in accordance with the temperature detected by the thermocouple 4, fever co
The wire 2 is controlled so as not to overheat and break .
【０００４】[0004]
【発明が解決しようとする課題】然しながら、上記従来
の流体加熱ヒーターでは、熱電対４によって発熱コイル
２の温度を直接測定するものではなく、発熱コイル２よ
り離れた石英パイプ１上の温度を測定するものであるか
ら、より正確に発熱コイル２の温度を制御するために
は、上記熱電対４の感熱部５をできるだけ発熱コイル２
に近い位置に固定する必要がある。然しながら、発熱コ
イル２と感熱部５との間に短絡を生ずるおそれがあるた
め感熱部５を発熱コイル２にあまり近づけることはでき
ない。However, in the above-mentioned conventional fluid heater, the temperature of the heating coil 2 is not directly measured by the thermocouple 4, but the temperature on the quartz pipe 1 remote from the heating coil 2 is measured. Therefore, in order to more accurately control the temperature of the heating coil 2, the heat-sensitive portion 5 of the thermocouple 4 should be connected to the heating coil 2 as much as possible.
It is necessary to fix it at a position close to. However, since there is a possibility that a short circuit may occur between the heating coil 2 and the heat-sensitive part 5, the heat-sensitive part 5 cannot be brought too close to the heating coil 2.
【０００５】従って上記感熱部５を無機接着剤によって
発熱コイル２上に直接絶縁して固定する方法も考えられ
たが、この方法では感熱部５と発熱コイル２間に介在さ
れる無機接着剤の厚さが一定せず、例えば発熱コイル２
を１０００℃に発熱せしめる場合、２００℃程度の温度
誤差を生ずるようになる。Accordingly, a method has been considered in which the heat-sensitive portion 5 is directly insulated and fixed on the heat generating coil 2 with an inorganic adhesive. The thickness is not constant, for example, the heating coil 2
Is heated to 1000 ° C., a temperature error of about 200 ° C. occurs.
【０００６】また、上記無機接着剤の厚さが薄ければ熱
電対４と発熱コイル２間が短絡するおそれがあり、その
固定作業には十分な注意が必要で作業性が悪いという欠
点があった。本発明は上記の欠点を除くようにしたもの
である。In addition, if the thickness of the inorganic adhesive is small, heat is generated.
There is a risk that the thermocouple 4 and the heating coil 2 may be short-circuited.
It is necessary to pay sufficient attention to the fixing work and the workability is poor.
There was a point. The present invention has been made to eliminate the above disadvantages.
【０００７】[0007]
【課題を解決するための手段】本発明の流体加熱ヒータ
ーは、被加熱流体を流す管上に巻回された発熱コイル
と、熱電対と、この熱電対の感熱部を取り巻く絶縁管と
より成り、上記絶縁管が上記発熱コイル上に直接接触し
た状態で、無線接着剤によって上記管及び発熱コイルに
固定されていることを特徴とする。上記熱電対は上記感
熱部の近傍で折り曲げられ、上記感熱部を含む部分と含
まない部分に分けられており、上記絶縁管は上記夫々の
部分の折り曲げ基部を取り囲む夫々別個の絶縁管素子よ
り成ることを特徴とする。SUMMARY OF THE INVENTION A fluid heater according to the present invention comprises a heating coil wound on a tube through which a fluid to be heated flows , a thermocouple, and an insulating tube surrounding a heat-sensitive portion of the thermocouple. The insulating tube is in direct contact with the heating coil
In this state, it is fixed to the tube and the heating coil with a wireless adhesive. The thermocouple is bent in the vicinity of the heat-sensitive part, and is divided into a part including the heat-sensitive part and a part not including the heat-sensitive part. It is characterized by the following.
【０００８】[0008]
【実施例】以下図面によって本発明の実施例を説明す
る。Embodiments of the present invention will be described below with reference to the drawings.
【０００９】本発明においては、図１に示すように熱電
対４の感熱部５部分を例えば外径２ｍｍ、長さ１１ｍｍ
の石英またはセラミック管７で囲み、このセラミック管
７を発熱コイル２上に直接接触せしめ、この部分をセラ
ミック粉末を主成分とする無機接着剤８で覆うことによ
って上記セラミック管７を石英パイプ１及び発熱コイル
２に固定せしめる。In the present invention, as shown in FIG. 1, the heat-sensitive portion 5 of the thermocouple 4 is formed, for example, with an outer diameter of 2 mm and a length of 11 mm.
The ceramic tube 7 is brought into direct contact with the heating coil 2 and the ceramic tube 7 is covered with an inorganic adhesive 8 containing ceramic powder as a main component. It is fixed to the heating coil 2.
【００１０】なお、熱電対４の感熱部５は異種金属線の
端部を溶接した部分であり、この部分は他の部分とは異
なり膨れを生じていることが多い。また、熱電対４は上
記感熱部近傍で１８０゜折り曲げて使用することが多
い。従って、図２に示すように上記感熱部５を含む部分
４ａと含まない部分４ｂに分け、この夫々の部分４ａ，
４ｂの折り曲げ基部を夫々別個のセラミック管７ａ，７
ｂによって囲むようにすれば熱電対４の安定した取り付
けが可能となり好ましい。Note that the heat-sensitive portion 5 of the thermocouple 4 is a portion obtained by welding the end of a dissimilar metal wire, and this portion is often swollen unlike other portions. In addition, the thermocouple 4 is often used by being bent at 180 ° in the vicinity of the above-mentioned heat sensitive part.
No. Therefore, as shown in FIG. 2, a portion 4a including the heat sensitive portion 5 and a portion 4b not including the heat sensitive portion 5 are divided.
The bent bases of the ceramic tubes 4b are connected to separate ceramic tubes 7a and 7
stable with up All Invite Re to thermocouple 4 as surrounded by b
Injury is preferred.
【００１１】[0011]
【発明の効果】本発明の流体加熱ヒーターは上記のよう
な構成であるから、熱電対４の感熱部５と発熱コイル２
間の間隔をセラミック管７の厚さに応じた一定の値に維
持することができ、発熱コイル２の温度を常時正しく検
出できるから、発熱コイル２の異常加熱による断線等を
未然に防止できる。また、上記セラミック管７の存在に
より熱電対４と発熱コイル２間の絶縁は完全に保証され
るから両者の固定作業はあまり注意することなく機械的
になし得るからその作業性も向上する等大きな利益があ
る。Since the fluid heater of the present invention has the above-described structure, the heat-sensitive portion 5 of the thermocouple 4 and the heat-generating coil 2
Since the interval between them can be maintained at a constant value corresponding to the thickness of the ceramic tube 7 and the temperature of the heating coil 2 can always be correctly detected, disconnection or the like due to abnormal heating of the heating coil 2 can be prevented . Also, the presence of the ceramic tube 7
The insulation between the thermocouple 4 and the heating coil 2 is completely guaranteed.
The fixing work of both is mechanical without paying much attention
Therefore, there are great benefits such as improved workability .
【図１】本発明の流体加熱ヒーターの正面図である。FIG. 1 is a front view of a fluid heater according to the present invention.
【図２】本発明の流体加熱ヒーターの熱電対説明用平面
図である。FIG. 2 is a plan view for explaining a thermocouple of the fluid heater of the present invention.
【図３】従来の流体加熱ヒーターの斜視図である。FIG. 3 is a perspective view of a conventional fluid heater.
１ 石英パイプ ２ 発熱コイル ３ リード線 ４ 熱電対 ５ 感熱部 ６ 無機接着剤 ７ セラミック管 ８ 無機接着剤 DESCRIPTION OF SYMBOLS 1 Quartz pipe 2 Heating coil 3 Lead wire 4 Thermocouple 5 Heat sensitive part 6 Inorganic adhesive 7 Ceramic tube 8 Inorganic adhesive
Claims (2)
コイルと、熱電対と、この熱電対の感熱部を取り巻く絶
縁管とより成り、上記絶縁管が上記発熱コイル上に直接
接触した状態で、無機接着剤によって上記管及び発熱コ
イルに固定されていることを特徴とする流体加熱ヒータ
ー。1. A heating coil wound on a tube through which a fluid to be heated flows , a thermocouple, and an insulating tube surrounding a heat-sensitive portion of the thermocouple, wherein the insulating tube directly contacts the heating coil. The fluid heating heater is fixed to the tube and the heating coil by an inorganic adhesive in a state where the fluid heating heater is in a state of being heated.
げられ、上記感熱部を含む部分と含まない部分に分けら
れており、上記絶縁管が上記夫々の部分の折り曲げ基部
を取り囲む夫々別個の絶縁管素子より成ることを特徴と
する請求項１記載の流体加熱ヒーター。2. The thermocouple is bent in the vicinity of the heat-sensitive part and divided into a part including the heat-sensitive part and a part not including the heat-sensitive part, and the insulating tube surrounds a bent base of each part. 2. The fluid heater according to claim 1, comprising an insulating tube element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5069131A JP2633168B2 (en) | 1993-03-05 | 1993-03-05 | Fluid heater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5069131A JP2633168B2 (en) | 1993-03-05 | 1993-03-05 | Fluid heater |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06259148A JPH06259148A (en) | 1994-09-16 |
| JP2633168B2 true JP2633168B2 (en) | 1997-07-23 |
Family
ID=13393789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5069131A Expired - Lifetime JP2633168B2 (en) | 1993-03-05 | 1993-03-05 | Fluid heater |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2633168B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014073545A1 (en) * | 2012-11-06 | 2014-05-15 | 貞徳舎株式会社 | Electric heater, and heating device and semiconductor production device comprising same |
| JP2019033008A (en) * | 2017-08-08 | 2019-02-28 | 修平 浦谷 | Fluid heating apparatus, fluid heating system, and temperature control method of fluid heating apparatus |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5575625A (en) * | 1978-12-05 | 1980-06-07 | Toshiba Corp | Surface heater |
| JPS564878A (en) * | 1979-06-25 | 1981-01-19 | Nippon Telegr & Teleph Corp <Ntt> | Read-in and recording unit for card |
| JPH01272932A (en) * | 1988-04-23 | 1989-10-31 | Toshiba Ceramics Co Ltd | Protection device for thermocouple for high-purity and high-temperature atmosphere |
| JPH03175625A (en) * | 1989-12-04 | 1991-07-30 | Nec Corp | Method and apparatus for heat treatment of semiconductor device |
| JPH04143036A (en) * | 1990-10-05 | 1992-05-18 | Nippon Steel Corp | Super high temperature forging method |
| JP3093748U (en) * | 2002-10-30 | 2003-05-16 | 順子 永井 | Moxibustion device with aroma function |
-
1993
- 1993-03-05 JP JP5069131A patent/JP2633168B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06259148A (en) | 1994-09-16 |
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