JP3170876B2 - How to attach the short pipe for exhausting the vacuum vessel - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION This invention relates to a method of attaching the exhaust short pipe of the vacuum vessel, and more particularly, in the manufacturing technology of electronic components, as a fluorescent display tube, a vacuum vessel made of glass or the like to the various electrodes and electronic circuit elements are utilized in the apparatus to be sealed, the inner space of the vacuum vessel, such as this relates to the mounting method of the exhaust short pipe necessary for evacuation.

[0002]

2. Description of the Related Art Vacuum containers are widely used as components of various electronic devices and image display devices. For example, in a fluorescent display tube, characters and the like can be displayed by controlling an electron beam from a cathode ray with an electrode in a vacuum vessel.

[0003] As a method of manufacturing such a vacuum vessel,
Usually, a pair of substantially symmetrical box-shaped divided bodies are made of glass or the like, and various electronic elements and components are mounted inside the divided bodies, and then the pair of divided bodies are placed in a space in the center. , Facing each other. A glass frit is interposed on the mating surface along the outer peripheral edge of the divided body by means such as coating. When this glass frit is fired, a pair of divided bodies are sealed to form a sealed container. Glass frit is an adhesive liquid material consisting of a low-melting glass composition and an organic binder.If the glass frit is baked, the organic binder disappears and the heat-melted low-melting glass composition solidifies upon cooling. By doing so, the divided bodies on both sides can be completely fused and integrated.

However, the inner space of the vacuum container is not in a vacuum state only by sealing the divided body. Therefore, in advance, a part of the vacuum vessel, a short pipe for exhaust made of glass or the like,
After a so-called tip tube is attached and the above-mentioned divided body is sealed, a vacuum device is connected to the short tube, and the internal space of the vacuum vessel is evacuated.

[0005] The short tube is attached by inserting a short tube into a lower hole formed through the vacuum vessel, interposing a glass frit similar to that described above between the short tube and the lower hole, and firing the glass frit. With this, the short tube is attached and fixed to the vacuum vessel. The firing step for attaching the short pipe can be performed simultaneously with the firing step for sealing the divided body.

[0006] The method of mounting exhaust short pipe in such a vacuum vessel, have been proposed various improvements, for example,
The present applicant has filed Japanese Patent Application No. 61-139552 (Japanese Unexamined Patent Application Publication No.
Japanese Patent Application Laid-Open No. 2-296350) has proposed an improved method of attaching a short exhaust pipe. According to this method, a sufficient amount of glass frit can be accommodated between the tapered pilot hole and the short pipe by forming the pilot hole formed in the vacuum container as a tapered hole, and the glass melted by heating in the firing step is formed. The frit can be prevented from flowing out to the surroundings, and the short exhaust pipe can be attached well.

[0007]

However, in the above-mentioned conventional method of attaching a short tube for exhausting a vacuum vessel ,
When attaching the exhaust short pipe in vacuum container, the sealing between the exhaust short pipe and the lower hole may be insufficient. this is,
When the short exhaust pipe is mounted on the inclined surface of the vacuum vessel, the glass frit that has been heated and melted during the firing process of the glass frit causes the gap between the short pipe for exhaust and the pilot hole to have a higher slope due to the effect of weight. The phenomenon occurs that it moves from the lower side to the lower side and is biased. As a result, at a position where the inclination is high, the glass frit disappears or becomes very small, and the short tube and the pilot hole cannot be sufficiently fused and integrated. If there is a slight gap between the short pipe and the pilot hole,
The sealing of the vacuum vessel is incomplete. In addition, if there is insufficient fusion between the short pipe and the pilot hole, the mounting strength of the short pipe will be weakened at that point, and there is a risk that the short pipe will be damaged or the seal will be broken during subsequent handling. is there.

[0008] An object of the present invention is Te manufacturing techniques smell of the vacuum container, as described above, even if the mounting surface of the exhaust short pipe is inclined, the gap is drilled between the stub tube and the lower hole It is another object of the present invention to provide a method for attaching a short pipe for exhaust which can be surely and firmly fused and integrated.

[0009]

According to the present invention, there is provided a method for mounting a short pipe for exhausting a vacuum vessel according to the present invention.
The method described in any one of claims 1 to 3 is an effective method when the short exhaust pipe is attached to the inclined surface of the vacuum vessel. The case where the evacuation short pipe is attached to the inclined surface of the vacuum vessel means that the mounting surface of the evacuation short pipe is inclined due to the structure of the vacuum vessel even if the vacuum vessel is held horizontally and firing is performed.
If, when performing firing in a state of being inclined mating surfaces of the split body, the mounting surface of the exhaust short pipe is considered and if resulting in inclined. As described above, even when the mounting surface of the exhaust pipe is inclined, as a means for satisfactorily mounting the exhaust pipe,
The method described below is adopted.

First, in the method according to the first aspect, the pilot hole of the vacuum vessel is formed in a vertical direction perpendicular to the horizontal plane. Therefore, the prepared hole is formed in an inclined state with respect to the inclined mounting surface. In addition, the shape of the pilot hole may be a normal perfect circular shape. In addition, if a space is provided on the outer surface side of the pilot hole such as a tapered hole or a stepped hole in which the diameter of the pilot hole on the outer surface side is larger than the diameter of the inner surface side, a space in which the glass frit can be stored is shorter. It is possible to improve the integration of the tube with the tube or the mounting strength of the tube.

Next, as a method according to a second aspect, the shape of the pilot hole is formed such that the diameter in the direction along the inclination of the mounting surface is larger than the diameter in the direction perpendicular to the inclination. It is also effective. Specifically, the pilot hole may be an elliptical hole, an oblong hole, an oval hole, or the like, and the major axis may be set so as to be inclined. In this case, it is preferable that the short diameter of the pilot hole is set to be substantially the same as the outer diameter of the short exhaust pipe. In the case of an oval hole, it is preferable that the larger radius of curvature is arranged on the higher slope.

According to a third aspect of the present invention, a liquid storage frame is disposed on the mounting surface surrounding the lower hole on the outer surface side of the lower hole into which the short pipe is inserted, and the liquid storage frame is provided inside the liquid storage frame. A method in which firing is performed by supplying glass frit is effective. The liquid reservoir frame is made of a material, such as glass, metal, or ceramic, that can withstand the firing process of glass frit and that does not impair the function of the vacuum container even if it remains on the outer surface of the vacuum container after firing. Is preferred. As a specific shape of the liquid storage frame, one having an arbitrary frame shape such as a circle or a square is used. The amount of glass frit that can be stored inside can be changed by the inner diameter and height of the liquid storage frame. When the glass frit is fired, the liquid storage frame is fused and integrated with the vacuum vessel and the short tube. When a liquid reservoir frame is used, the structure of the pilot hole may be an ordinary perfect circular shape. Further, the pilot hole may be formed in a tapered shape.

In the above configuration, the material of the short pipe for exhaust is
Similar to short exhaust pipes in ordinary vacuum vessels such as glass
Is fine. The thickness and length of the short pipe are the same as those of a normal vacuum vessel.
What is necessary is just to set in the range of the above. Take the short pipe for exhaust into a vacuum vessel.
For mounting, a short exhaust pipe can be inserted into the vacuum vessel.
The lower hole of use advance formed through the exhaust short pipe in the lower hole
Insert and place glass between the short pipe for exhaust and the pilot hole.
With the frit interposed, the glass frit is fired.
By fusing the short pipe for exhaust to the pilot hole,
Let Glass frit for attaching short exhaust pipe
If the firing step is performed in the same manner as the normal vacuum vessel firing step,
Good.

Glass frit has been conventionally used for this kind.
Normal glass frit used in the process can be used
You. Specifically, an organic binder is added to the low melting glass composition.
Adhesive liquid made by mixing or kneading is used
it can. Materials such as low-melting glass compositions and organic binders
The material is the type and use of the material constituting the divided body of the vacuum vessel,
It is selected according to the required performance.

The above-described method for mounting the short pipe for exhausting is performed according to the purpose, structure, required performance, and the like of the vacuum vessel.
Each of the methods may be employed alone, or each of the methods may be employed in combination as needed.

[0016]

The method of mounting a short exhaust pipe according to any one of claims 1 to 3 is provided.
The use will be described.

When a short pipe for exhaust is attached to the lower hole of the vacuum vessel, the short pipe can be inserted smoothly.
A certain gap is provided between the short pipe and the pilot hole so that the adhesive liquid glass frit flows sufficiently between the short pipe and the pilot hole. Therefore, when the pilot hole is provided on the inclined surface, the glass frit heated and melted in the firing step flows toward the lower slope in the gap between the short tube and the pilot hole, and is concentrated and accumulated in the portion with the lowest slope. Would. Then, on the higher slope, the glass frit disappears or decreases from the gap between the short pipe and the pilot hole. That is, a relatively small amount of glass frit existing in the gap between the short tube and the pilot hole is all moved to the lowest slope. As a result, there are some places where the fusion and unification of the short pipe and the pilot hole are locally insufficient.

Further , the glass frit can be spread evenly.
In order, a vacuum vessel or divided body is tilted with respect to the horizontal plane, a method of performing baked formation of the glass frit supplied to the mating surfaces is adopted, at the same time as the baked formation of the glass frit, a short pipe split body When the glass frit is baked to be mounted on the slab, since the divided body is inclined, the short pipe is mounted on the inclined surface, so that the above-described problem becomes conspicuous. In the case it has not tilt the divided body
Also, the structure of the whole divided body or vacuum chamber may have to perform sintering of the glass frit in a state where the mounting surface of the short pipe is inclined.

[0019] In contrast, in the method according to claim 1,
Since the pilot hole is formed in a vertical direction perpendicular to the horizontal plane, even if the mounting surface of the pilot hole is inclined, the space itself between the pilot hole and the short pipe is a vertical cylindrical shape without inclination Space. If the glass frit is housed in the vertical cylindrical space, the heated and melted glass frit will not move along the slope of the mounting surface, and the glass frit will be in the space between the pilot hole and the short pipe. It will evenly exist. Therefore, if the heat-melted glass frit is cooled and solidified, there is no gap between the short tube and the pilot hole or an insufficiently fused portion. In addition, the short pipe is fused and integrated firmly and firmly into the pilot hole with a glass frit on the entire circumference, and the short pipe has high mounting strength.

Next, in the method according to the second aspect, the pilot hole is formed such that the diameter in the direction along the inclination of the mounting surface is larger than the diameter in the direction perpendicular to the inclination. There is a large gap between the short pipe having the same front-rear and left-right diameters and the pilot hole having different front-rear and left-right diameters in an inclined direction in which the diameter of the pilot hole is large.
If a glass frit is interposed in the gap between the pilot hole and the short pipe, a large amount of glass frit will be present in the inclined direction where the gap is large. When the glass frit is fired in this state, even if the heated and melted glass frit moves from the higher slope to the lower slope, at least one of the large amount of glass frit existing in the high slope portion is obtained. The part will also stay on the high slope part. Also, even if the glass frit that exists on the higher slope tries to move to the lower slope along the major axis of the pilot hole,
Since the gap between the pilot hole and the short pipe is small on the minor diameter side perpendicular to this, it is difficult to move beyond this part to the lower slope, and the glass frit of the higher slope part has a lower slope. It does not move to the side. As a result, the glass frit exists around the entire circumference between the pilot hole and the short pipe, and the short pipe is securely fused and integrated into the pilot hole without any gap.

Further, in the method according to the third aspect, a liquid storage frame is disposed on the mounting surface surrounding the lower hole on the outer surface side of the lower hole into which the short pipe is inserted, and the liquid storage frame is provided inside the liquid storage frame. Firing is performed by supplying a glass frit. Since a large space is formed inside the liquid reservoir frame, a large amount of glass frit can be accommodated in this space. As a result, even if the heated and melted glass frit moves along the inclination direction,
At least a part of the glass frit existing in a large amount is distributed over the entire circumference in the gap between the short tube and the pilot hole, and the short tube is securely fused and integrated into the pilot hole without a gap.

[0022]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 3 shows a schematic structure of a flat type vacuum vessel used for a fluorescent display tube or the like. The vacuum container T is formed by superposing the shallow box-shaped divided bodies 10 and 20 made of a pair of glasses. A glass frit 30 is interposed between the facing mating surfaces 14 and 24 of the divided bodies 10 and 20, and the glass frit 30 is fired to fuse and integrate the divided bodies 10 and 20 to form a vacuum container. Seal T.
A short exhaust pipe 40 is attached to the side surface of the split body 10 on one side. After the evacuation device is connected to the short tube 40 and the inside of the vacuum vessel T is evacuated and then the short tube 40 is sealed, the inside of the vacuum vessel T is kept in a vacuum state.

As shown in FIG. 1, of the divided bodies 10 and 20 constituting the vacuum vessel T, the adhesive liquid glass frit 30 is fixed to the mating surface 14 of the divided body 10 on the side where the short pipe 40 is mounted. After applying with glass frit 3
0 that the form baked. Simultaneously with baked formation of the glass frit 30 This also performs the firing of the glass frit for mounting the short tube 40 to the divided body 10.

Next, the attachment of the short tube 40 will be described.

As shown in FIG. 1, a glass frit 30 coated on the mating surfaces 14 of the split body 10 when baked formed,
A short pipe 40 is formed in the pilot hole 12 formed through the side surface of the divided body 10.
With previously inserted arranged, in advance by supplying a glass frit between the lower hole 12 and the short pipe 40, the same time as baked formed of glass frit 30, a short pipe 40 is fused integrally to the lower hole 12 . At this time, the glass frit 30 is
4 For the purpose of uniformly spreading over the entire surface, the divided body 10 is held in an inclined state, or the mounting surface itself of the short pipe 40 is formed to be inclined with respect to the mating surface 14 or the like. The mounting surface of the short pipe 40 is considerably inclined with respect to the horizontal plane.

Therefore, a mounting structure for the short pipe 40 shown in FIG. 4 is employed. Assume that the mounting surface 16 of the divided body 10 is inclined by an angle θ1 with respect to the horizontal plane. On the other hand, the pilot hole 12 is formed in a vertical direction perpendicular to the horizontal plane, regardless of the inclination of the mounting surface 16 of the divided body 10. In addition, the lower hole 12 is formed in a lower portion 12 b inside the vacuum vessel T.
However, the inner diameter is slightly larger than the outer diameter of the short pipe 40, but the upper portion 12a on the outer surface side of the pilot hole 12 is formed with an inner diameter considerably larger than the outer diameter of the short pipe 40, It is a so-called stepped pilot hole 12. An adhesive liquid glass frit 32 is inserted into the stepped pilot hole 12.
When the glass frit 32 is supplied, the glass frit 32
Many glass frit 3 in the large space between
2 accumulates. As a result, the glass frit 32 exists reliably over the entire circumference of the short tube 40. Further, when a large amount of the glass frit 32 exists in the upper portion 12a, the glass frit 32 surely flows into the narrow gap between the lower hole lower portion 12b and the short pipe 40. Since the pilot hole 12 is formed in the vertical direction, the glass frit 32 does not move between the pilot hole 12 and the short pipe 40 in the inclined direction.

As described above, if the above-described firing is performed in a state where the glass frit 32 is interposed between the short tube 40 and the pilot hole 12, the short tube 40 is formed by the glass frit 32 over the entire circumference thereof. 12 is reliably and firmly fused and integrated.

FIG. 5 shows a different embodiment of the mounting structure of the short pipe 40.

In this embodiment, the pilot hole 12 is formed in an elliptical shape. However, in this case, unlike the above-described embodiment, the pilot hole 12 is formed so as to penetrate in a direction orthogonal to the mounting surface 16 of the divided body 10. The oval pilot hole 12 is arranged so that its major axis D1 is parallel to the inclination direction of the mounting surface 16. The short diameter D2 of the pilot hole 12 is set to be substantially the same as the outer diameter D0 of the short pipe 40. Long diameter D of pilot hole 12
1 is set to be considerably larger than the outer diameter D0 of the short pipe 40.

When the short tube 40 is inserted into the lower hole 12 and the glass frit 32 is supplied between the short tube 40 and the lower hole 12, a large amount of the glass frit 32 is provided in a large space on the long diameter D1 side of the lower hole 12. Will accumulate. In this state, the above-described firing step is performed. Then, the heated and melted glass frit 32 moves along the inclination of the mounting surface 16 and moves from the higher end to the center side or the lower end from the center side along the major axis D1 of the prepared hole 12. The glass frit 32 moves to the part side. However, the long diameter D1 of the prepared hole 12
A large amount of glass frit 3 on the end side with high slope along
2, only a part of the glass frit 32 moves, and the remaining glass frit 32 is
The space between can be filled. As a result, the short tube 40 is securely and firmly fused and integrated into the pilot hole 12 by the glass frit 32 over the entire circumference.

Next, the embodiment shown in FIG.
This is an embodiment using. The inclined mounting surface 1 of the divided body 10
6, a tapered pilot hole 12 whose outer surface side is widened is formed through. The short tube 40 is inserted and arranged in the pilot hole 12. An annular liquid reservoir frame 60 is arranged on the outer surface of the pilot hole 12. The glass frit 32 is supplied to the inner space of the liquid storage frame 60. The glass frit 32 is
2 and the short pipe 40, and the mounting surface 16
The glass frit 32 is placed inside the liquid storage frame 60
Will accumulate. Therefore, the glass frit 32
The glass frit 32 heated and melted when
Even if the glass frit moves to the lower slope, the glass frit 3 can be reliably secured over the entire circumference between the short pipe 40 and the pilot hole 12.
2 will be present. Therefore, also in this embodiment, the short tube 40 has the glass frit 3 around its entire circumference.
In step 2, the lower hole 12 is securely and firmly fused and integrated.

Further, in each of the above-described embodiments, the specific shape of the prepared hole 12 can be freely changed without impairing the function of each. Further, the structures of the respective embodiments can be implemented in combination. For example, in the embodiment of FIG. 4, the shape of the lower hole upper portion 12a may be formed into an ellipse or an oval. Further, the lower hole upper portion 12a may not be symmetrical about the center, but may be one-sided. For example, the space between the lower hole upper part 12a and the short pipe 40, that is, the space for storing the glass frit 32 may be located only at a position where the inclination of the mounting surface 16 is high or low. In the embodiment of FIG. 5, the short tube 40 may be arranged at a position deviated from the center of the oval pilot hole 12 in the major axis direction.
In the embodiment of FIG. 6, the shape of the pilot hole 12 is
It is also possible to have an oval or stepped structure.

[0034]

Mentioned above, according to the present invention, the mounting method of the exhaust short pipe according to the invention of this is, even if the mounting surface is inclined split body attaching the short pipe, all between the short pipe and the lower hole In a state where the glass frit is present around the circumference, the glass frit can be fired and the short pipe can be securely fused and integrated into the pilot hole. It is possible to provide a vacuum container excellent in the strength and durability of the part. In particular, when the above-described method of fusing the vacuum vessel is adopted, there is a high possibility that the mounting surface of the short pipe is inclined, and in the conventional method, the mounting of the short pipe was not sufficiently performed. According to the mounting method of the invention, the short pipe can be mounted very easily and reliably.

[Brief description of the drawings]

[1] partially sectional side view showing a baked formation process of the supplied glass frit to the divided body

FIG. 2 is a schematic structural view of a vacuum vessel.

FIG. 3 (a) is an installation of a short exhaust pipe according to the present invention.
A sectional view (b) showing an embodiment of the structure is a plan view of the short pipe and the pilot hole of the above.

FIG. 4 (a) shows the actual structure of another short exhaust pipe mounting structure.
Sectional view (b) showing the embodiment is a plan view of the short pipe and pilot hole of the above.

FIG. 5 is a cross section showing another embodiment of a mounting structure for a short exhaust pipe.
Figure

[Explanation of symbols]

 T Vacuum container 10, 20 Divided body 12 Preparatory hole 14, 24 Mating surface 16 Mounting surface 30, 32 Glass frit 40 Short tube

──────────────────────────────────────────────────の Continuing on the front page (72) Inventor Kenji Fujishiro 1006 Kadoma Kadoma, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. In-company (56) References JP-A-62-296350 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) H01J 9/26 H01J 29/86 H01J 31/15

Claims (3)

(57) [Claims] A short tube for exhaust is inserted into a lower hole penetrating the inclined surface of the vacuum container, and a glass frit interposed between the short tube and the lower hole is fired to exhaust the gas into the vacuum container. A method of attaching a short pipe for exhaust, wherein the pilot hole is formed in a vertical direction perpendicular to a horizontal plane. 2. A short tube for exhaust is inserted into a lower hole penetrating the inclined surface of the vacuum vessel, and a glass frit interposed between the short pipe and the lower hole is fired to exhaust the gas into the vacuum vessel. In the method of attaching a short pipe for exhaust, the pilot hole is formed so that a diameter in a direction along the inclination of the mounting surface is larger than a diameter in a direction orthogonal to the same. Mounting method. 3. A short pipe for exhaust is inserted into a pilot hole formed through the inclined surface of the vacuum vessel, and a glass frit interposed between the short pipe and the pilot hole is fired to exhaust the gas into the vacuum vessel. In the method of mounting and fixing the short pipe, a liquid storage frame is arranged on the mounting surface surrounding the pilot hole on the outer surface side of the pilot hole in which the short pipe is inserted, and a glass frit is supplied inside the liquid storage frame. A method for mounting a short pipe for exhaust, characterized by performing firing.