JP3169075B2 - High frequency laminated probe - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high frequency laminated probe capable of performing a circuit inspection of a semiconductor device in a high frequency region.

[0002]

2. Description of the Related Art FIG. 4 is a perspective view showing a conventional jig for measuring high frequency characteristics of a semiconductor device.

As shown in FIG. 4, a conventional jig for measuring high frequency characteristics includes a substrate having a dielectric layer 101 laminated on a ground layer 102 and a circuit pattern 103 formed on the surface of the substrate. Have. The high-frequency characteristic measuring jig is arranged horizontally with the surface of the substrate on which the circuit pattern 103 is formed facing upward. The device under test 104 such as a semiconductor device has an electrode of the circuit pattern 10
3 is mounted on a high-frequency characteristic measuring jig in a state of being in contact with an electrode provided at the end of the third element.

By operating the high-frequency characteristic measuring jig in this state, the high-frequency characteristic of the device under test 104 is measured.

[0005]

However, the conventional high-frequency characteristic measuring jig described above has a configuration in which a device to be measured having a planar shape is mounted on a flat substrate. The electrodes of the device under test may not come into contact with the electrodes of the jig due to accuracy, variations in the height of each electrode in the device under test, and the like. In particular, when the device under test is a leadless device having an electrode formed on the back surface, contact failure between the electrode of the jig and the electrode of the device under test may occur more remarkably.

Accordingly, an object of the present invention is to provide a high-frequency laminated probe which can prevent the occurrence of a contact failure with each electrode of a device under test.

[0007]

In order to achieve the above object, a high-frequency laminated probe according to the present invention comprises: a substrate having a dielectric layer formed on a ground layer; and a substrate provided on one side of the substrate. A high-frequency laminated probe configured by overlapping a plurality of probe portions each having an end face electrode that is in contact with an electrode of a measurement element, wherein each of the adjacent probe portions is provided with the end face electrode. One of the probe units adjacent to each other is configured to be mutually displaceable in a direction perpendicular to a side surface.
The dielectric layer of the probe part and the probe part of the other
The ground layer and the ground layer are configured to be slidable with each other .

According to the high frequency laminated probe of the present invention configured as described above, when the device to be measured is pressed against the high frequency laminated probe, each probe section is displaced so as to follow the height variation of the electrodes of the device to be measured. Therefore, it is possible to more reliably contact each end face electrode of the high frequency laminated probe with each electrode of the device under test.

[0009]

Further, the dielectric layer has a first dielectric layer formed on the ground layer, and a second dielectric layer formed on the first dielectric layer. Since the second dielectric layer is made of a material having a smaller friction coefficient than the first dielectric layer, each probe section can be displaced more smoothly.

[0011] Further, an elastic member is provided on a side surface of the probe portion opposite to the side surface on which the end surface electrode is provided, so that a force for pressing the device to be measured against the high frequency laminated probe is provided. The end surface electrode of each probe is pressed against each electrode of the device to be measured by the reaction force of.

Further, the elastic member may be constituted by a spring or a rubber member.

Alternatively, the pressure of the fluid acting on the bag-shaped member when the element to be measured is pressed against the high-frequency laminated probe can be adjusted to any part by forming the elastic member from a bag-shaped member filled with a fluid. Because the end electrodes of each probe are pressed against the electrodes of the device under test by the same amount of reaction force, the electrodes of the device to be measured and the end electrodes of the high-frequency laminated probe become more uniform. The contact can be made in a stable state.

[0014]

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing one embodiment of a high-frequency laminated probe according to the present invention, with a part thereof cut away.

As shown in FIG. 1, the high-frequency laminated probe according to the present embodiment is configured by overlapping a plurality of probe portions 7 with each other. Each probe unit 7
Provided between the first dielectric layer 1 and the second dielectric layer 2 and a substrate in which the first dielectric layer 1 and the second dielectric layer 2 are sequentially laminated on the ground layer 3 Circuit pattern 4 provided. An end surface electrode 5 extending from the circuit pattern 4 is formed on one side surface of the substrate. On the other hand, an elastic member 6 made of a spring, a rubber member, or the like is provided on a side surface of the substrate opposite to the side surface on which the end surface electrode 5 is formed.

The probe portions 7 adjacent to each other are composed of the second dielectric layer 2 of one probe portion 7 and the other probe portion 7.
And the ground layers 3 are superimposed in contact with each other. The second dielectric layer 2 and the ground layer 3 that are in contact with each other are configured so as not to separate from each other and to be slidable at least in the direction of the arrow shown in the figure.
Accordingly, the probe units 7 adjacent to each other can be displaced independently of each other in the direction of the arrow in the drawing, that is, in the direction perpendicular to the side surface on which the end face electrode 5 is provided.

Next, the operation of the high-frequency laminated probe shown in FIG. 1 will be described with reference to FIG. FIG. 2 shows FIG.
FIG. 3 is a side view showing a state in which the high frequency laminated probe shown in FIG.

First, the electrodes of the device under test 8 are aligned with the end surface electrodes 5 of the high-frequency laminated probe placed on a flat surface with each elastic member 6 facing down.
Is pressed against the high frequency laminated probe. Each probe unit 7 of the high-frequency laminated probe against which the device under test 8 is pressed,
The elastic member 6 presses the element 8 to be measured by the reaction force. As a result, each probe section 7 slides between the second dielectric layer 2 and the ground layer 3 adjacent to each other, and is displaced so as to follow variations in the height of the electrodes on the back surface of the device 8 to be measured.

As described above, in the high-frequency laminated probe of the present embodiment, since the respective probe portions 7 can be displaced independently of each other, there is a case where the heights of the respective electrodes of the device under test 8 vary. In addition, since each probe unit 7 is displaced so as to absorb the variation, each end surface electrode 5 of the high frequency laminated probe can be more reliably brought into contact with each electrode of the device under test 8.

(Modification) FIG. 3 is a side view showing a modification of the high-frequency laminated probe shown in FIG. Here, FIG.
The same components as those of the high-frequency laminated probe shown in (1) are denoted by the same reference numerals, and detailed description is omitted.

In the present modification, a bag-like member 9 filled with a fluid material composed of a liquid such as water or oil or a gas such as air is used as the elastic member. Bag-like member 9
Is formed of rubber, soft resin, or the like.

In the high-frequency laminated probe of this modification, as shown in FIG. 3, when the terminal 8 to be measured is pressed against the high-frequency laminated probe, each probe section 7 causes the electrode height variation on the back surface of the device 8 to be measured. , And the bag-like member 9 is deformed accordingly. At this time, since the pressure of the fluid acting on the bag-shaped member 9 is uniform in any part, a reaction force of the same magnitude is applied to the lower surface of each probe part 7. Therefore, in this modification, each probe unit 7
Can be made uniform irrespective of the amount of displacement of each probe section 7, so that each electrode of the device under test 8 and each end face electrode 5 of the high-frequency laminated probe can be kept in a more stable state. Can be contacted.

[0024]

As described above, the high-frequency laminated probe of the present invention is configured such that the probe portions adjacent to each other can be mutually displaced in a direction perpendicular to the side surface on which the end face electrode is provided. Each probe part adjacent to each other
The dielectric layer of one probe part and the other probe part
Since the ground layer and the ground layer are configured to be slidable with each other, each end face electrode of the high-frequency laminated probe can be more reliably brought into contact with each electrode of the device under test.

[Brief description of the drawings]

FIG. 1 shows an embodiment of a high-frequency laminated probe according to the present invention.
FIG. 2 is a perspective view with a part cut away.

FIG. 2 is a side view showing a state in which the high-frequency laminated probe shown in FIG. 1 is in contact with an element to be measured.

FIG. 3 is a side view showing a modification of the high-frequency laminated probe shown in FIG.

FIG. 4 is a perspective view showing a conventional jig for measuring high frequency characteristics of a semiconductor element.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 1st dielectric layer 2 2nd dielectric layer 3 ground layer 4 circuit pattern 5 end surface electrode 6 elastic member 7 probe part 8 element to be measured 9 bag-shaped member

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G01R 31/26 G01R 1/06-1/073 H01L 21/66

Claims (5)

(57) [Claims] 1. A probe comprising: a substrate having a dielectric layer formed on a ground layer; and a plurality of probe portions provided on one side surface of the substrate and having an end surface electrode in contact with an electrode of a device under test. A high-frequency laminated probe that is configured to be superimposed on one another, wherein the probe units adjacent to each other are configured to be mutually displaceable in a direction perpendicular to a side surface on which the end face electrode is provided , and are adjacent to each other. One of the probe units to be probed
Part of the dielectric layer and the other probe part
A high-frequency laminated probe characterized in that it is configured to slide with respect to a window layer . 2. The dielectric layer has a first dielectric layer formed on the ground layer and a second dielectric layer formed on the first dielectric layer. 2. The high-frequency laminated probe according to claim 1 , wherein the second dielectric layer is made of a material having a lower coefficient of friction than the first dielectric layer. Wherein the high frequency laminate probe according to claim 1 or 2 is provided with a resilient member on the side opposite to the side where the end surface electrode is provided for each probe parts. 4. The high frequency laminated probe according to claim 3 , wherein the elastic member is made of a spring or a rubber member. 5. The high-frequency laminated probe according to claim 3 , wherein the elastic member is a bag-like member filled with a fluid.