JP3166563U - Nanoparticle substrate for spectroscopy - Google Patents
Nanoparticle substrate for spectroscopy Download PDFInfo
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- JP3166563U JP3166563U JP2010008439U JP2010008439U JP3166563U JP 3166563 U JP3166563 U JP 3166563U JP 2010008439 U JP2010008439 U JP 2010008439U JP 2010008439 U JP2010008439 U JP 2010008439U JP 3166563 U JP3166563 U JP 3166563U
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Abstract
【課題】被分析物質のラマン信号の強度を増大させるラマン分光用基板を提供する。【解決手段】四角錐状凸凹構造のシリコン基板表面に、球状の銀ナノ粒子膜を堆積させる。【選択図】図1A Raman spectroscopic substrate for increasing the intensity of a Raman signal of an analyte is provided. A spherical silver nanoparticle film is deposited on a surface of a silicon substrate having a quadrangular pyramid-shaped uneven structure. [Selection diagram] Fig. 1
Description
本考案は、ラマン分光あるいは表面増強ラマン分光に用いる基板に関するものである。 The present invention relates to a substrate used for Raman spectroscopy or surface-enhanced Raman spectroscopy.
従来のラマン分光あるいは表面増強ラマン分光に用いられる基板は、光反射率の高い金属平板や、シリコン基板表面の倒立四角錐孔あるいはシリコン基板表面の多孔質孔に、貴金属ナノ粒子を配置する構造である。 Conventional substrates used for Raman spectroscopy or surface-enhanced Raman spectroscopy have a structure in which noble metal nanoparticles are placed in a metal plate with high light reflectivity, an inverted quadrangular pyramid hole on the silicon substrate surface, or a porous hole on the silicon substrate surface. is there.
従来のラマン分光あるいは表面増強ラマン分光に用いられる基板は、光反射率の高い金属基板や、シリコン基板表面の倒立四角錐孔あるいはシリコン基板表面の多孔質孔に、貴金属ナノ粒子を配置する構造である。 Conventional substrates used for Raman spectroscopy or surface-enhanced Raman spectroscopy have a structure in which noble metal nanoparticles are placed in a metal substrate with high light reflectivity, an inverted quadrangular hole on the silicon substrate surface, or a porous hole on the silicon substrate surface. is there.
これらの基板構造では入射光の吸収が少ないためラマン信号強度が低かったり、表面
増強ラマン分光効果をもたらすために用いる基板表面の加工プロセスが複雑であるなど
の課題があった。
These substrate structures have problems such as low Raman signal intensity due to low absorption of incident light and complicated processing of the substrate surface used to bring about the surface enhanced Raman spectral effect.
本考案が提供するラマン分光あるいは表面増強ラマン分光用の基板は、上記課題を解
決するために、シリコン基板表面に非特許文献1記載の既知手法で四角錐状の凸凹構造
を形成し、真空蒸着法を用いてその表面に球状(半球状および扁平球状を含む)銀ナノ
粒子堆積膜を形成した構造とした。
In order to solve the above problems, the substrate for Raman spectroscopy or surface-enhanced Raman spectroscopy provided by the present invention forms a quadrangular pyramid-like uneven structure on the surface of a silicon substrate by a known method described in Non-Patent Document 1, and vacuum deposition is performed. Using this method, a spherical (including hemispherical and flat spherical) silver nanoparticle deposited film was formed on the surface.
本考案によれば、四角錐状凸凹構造のシリコン基板表面に真空蒸着法を用いて銀ナノ
球状(半球状および扁平球状を含む)粒子堆積膜を形成し、ラマン分光および表面増強
ラマン分光における入射光の多重反射がもたらされ、被分析物質のラマン信号の強度を
著しく増大させる効果がある。
According to the present invention, a silver nanosphere (including hemisphere and flat sphere) particle deposition film is formed on the surface of a silicon substrate having a quadrangular pyramidal structure by vacuum evaporation, and incident in Raman spectroscopy and surface-enhanced Raman spectroscopy. Multiple reflection of light is brought about, which has the effect of significantly increasing the intensity of the Raman signal of the analyte.
さらに本考案は、表面増強ラマン分光効果をもたらす活性点となりえる十〜百nm程
度の球状(半球状および扁平球状を含む)銀ナノ粒子堆積膜構造を形成することができ、
表面増強ラマン信号を生成する場を多くするとともに、その強度を増大する効果がある。
Furthermore, the present invention can form a spherical (including hemispherical and flat spherical) silver nanoparticle deposited film structure of about 10 to 100 nm, which can be an active point that brings about a surface enhanced Raman spectral effect,
While increasing the field for generating the surface-enhanced Raman signal, there is an effect of increasing its intensity.
本分光用基板は、テクスチャー処理を行った四角錐状凸凹構造のシリコン基板表面
に球状(半球状および扁平球状を含む)銀ナノ粒子堆積膜を形成する。成膜後の基板は
切り分けてスライドグラスなどに張り付け、ラマン分光用基板として用いる。被分析サ
ンプルはこの基板上に、例えば水溶液状として、数マイクロリッター程度の液量を滴下
して、分光分析を実施する。また同様にして、表面増強ラマン分光用基板として用いる。
In this spectroscopic substrate, a spherical (including hemispherical and flat spherical) silver nanoparticle deposition film is formed on the surface of a silicon substrate having a textured square pyramidal structure. The substrate after film formation is cut out and attached to a slide glass or the like to be used as a substrate for Raman spectroscopy. The sample to be analyzed is spectroscopically analyzed by dropping a liquid amount of about several microliters on this substrate, for example, as an aqueous solution. Similarly, it is used as a substrate for surface enhanced Raman spectroscopy.
本分光用基板に、例えばモデル化学物質として塩素系殺菌剤であるクロロタロニル40
ppm溶液を3マイクロリットル滴下し、平坦な構造の銀蒸着膜基板を用いて同様にラマ
ン分光分析を行った結果と比較を行った。分析には日本電子製JRS-SYSTEM2000型顕微ラ
マン分光装置(励起波長632.8nm、分解能1cm-1、最大出力30mW、対物レンズ50倍)を
用いた。その結果、平坦な構造の銀蒸着膜基板と比較し1267cm-1あるいは2240cmのピ
ーク高さを基準にして計算すると約2倍程度以上の感度増加効果が確認された。同様の
方法で、ネオニコチノイド系農薬のクロチアニジン水溶液と銀ナノ粒子混合液を同基板
に滴下し分析を行うと、約0.1ppb程度の低濃度領域まで検出することが可能であった。
For example, chlorothalonil 40, which is a chlorine-based disinfectant, is used as a model chemical substance on this spectroscopic substrate.
3 microliters of ppm solution was dropped, and the results were compared with the results of Raman spectroscopic analysis using a flat silver deposited film substrate. A JRS JRS-SYSTEM2000 Raman microscope (excitation wavelength 632.8 nm, resolution 1 cm-1, maximum output 30 mW, objective lens 50 times) was used for analysis. As a result, a sensitivity increase effect of about twice or more was confirmed when calculated on the basis of the peak height of 1267 cm-1 or 2240 cm as compared with the flat deposited silver substrate. In the same way, when a neonicotinoid pesticide clothianidin aqueous solution and silver nanoparticle mixed solution were dropped onto the same substrate and analyzed, it was possible to detect even a low concentration region of about 0.1 ppb.
本分光用基板を用いると、食品や環境中の残留農薬や化学物質などの高感度分析を行
うことができる。またその他、人間や動物由来の体液などの化学成分をごく微量のサン
プルを用いて測定することが可能となる。
When this spectroscopic substrate is used, highly sensitive analysis of residual agricultural chemicals and chemical substances in food and the environment can be performed. In addition, chemical components such as human or animal-derived body fluids can be measured using a very small amount of sample.
1 銀ナノ粒子堆積膜
2 四角錐状凸凹構造のシリコン基板
1 Silver nanoparticle deposition film 2 Silicon substrate with quadrangular pyramidal structure
Claims (1)
A substrate for Raman spectroscopy and surface-enhanced Raman spectroscopy characterized by a structure in which spherical (including hemispherical and flat spherical) silver nanoparticle films are deposited on the surface of a silicon substrate having a quadrangular pyramidal structure.
Priority Applications (1)
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JP2010008439U JP3166563U (en) | 2010-12-27 | 2010-12-27 | Nanoparticle substrate for spectroscopy |
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JP2010008439U JP3166563U (en) | 2010-12-27 | 2010-12-27 | Nanoparticle substrate for spectroscopy |
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JP3166563U true JP3166563U (en) | 2011-03-10 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016031140A1 (en) * | 2014-08-27 | 2016-03-03 | 富士フイルム株式会社 | Optical electric-field enhancing device |
CN106323938A (en) * | 2016-08-11 | 2017-01-11 | 上海师范大学 | Thiophanate-methyl residue measuring method based on surface-enhanced Raman spectroscopy technology |
-
2010
- 2010-12-27 JP JP2010008439U patent/JP3166563U/en not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016031140A1 (en) * | 2014-08-27 | 2016-03-03 | 富士フイルム株式会社 | Optical electric-field enhancing device |
JPWO2016031140A1 (en) * | 2014-08-27 | 2017-05-25 | 富士フイルム株式会社 | Photoelectric field enhancement device |
CN106323938A (en) * | 2016-08-11 | 2017-01-11 | 上海师范大学 | Thiophanate-methyl residue measuring method based on surface-enhanced Raman spectroscopy technology |
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